A method for sticking a plurality of ingots

Abstract

The application provides a method for sticking a plurality of crystal bars, comprising the following steps: providing a plurality of crystal bars, wherein each of the plurality of crystal bars has a first end face; grinding the first end face of each of the plurality of crystal bars to optimize the self-rotation angle of the plurality of crystal bars and make the crystal direction value of the first end face after grinding be a target crystal direction value; and sticking the plurality of crystal bars on a crystal bar sticking jig table along the length direction at intervals, wherein the first end face of each of the plurality of crystal bars is arranged perpendicularly to the crystal bar sticking jig table, and the interval between two adjacent crystal bars is a preset value, so that the difficulty of sticking the crystal bars can be reduced, and the tension loss of the wire net during cutting can be as small as possible.

Description

Technical Field

[0001] This invention relates to the field of positioning and bonding rod technology, and in particular to a method for bonding multiple crystal rods. Background Technology

[0002] Before cutting, the crystal rods need to be bonded to the bonding jig. However, due to the weight of large-sized (12-inch) crystal rods, the bonding requirements are high.

[0003] During the crystal pulling process of monocrystalline silicon, short crystal rods with lengths shorter than the conventional length (400mm-450mm) are typically produced at the beginning and end. When wafer demand is low (e.g., customer samples), cutting these short crystal rods can meet the requirements. However, due to the limitation of the current gluing fixture stage being smaller than the gluing fixture's length requirement for crystal rod length, X-ray cannot detect the crystal orientation of short crystal rods due to the limited travel of the gluing fixture stage. Therefore, it is usually necessary to bond two short crystal rods simultaneously to the gluing fixture stage for cutting.

[0004] When two short crystal rods are simultaneously bonded to the bonding jig, they need to be bonded to both ends of the worktable via resin plates. This causes the spacing between the two short crystal rods to change with their lengths (worktable length = length of the two short crystal rods + spacing between them). Consequently, the length of the empty wire mesh differs during cutting, resulting in varying wire mesh tension losses. Furthermore, although the wire mesh on the cutting machine can be adjusted according to the actual length of the crystal rods, the adjustment is limited and can only be performed from both ends of the worktable, making bonding difficult. Summary of the Invention

[0005] The purpose of this invention is to provide a method for bonding multiple crystal rods, which can reduce the difficulty of bonding and minimize the loss of wire mesh tension during cutting.

[0006] To address the above problems, the present invention provides a method for bonding multiple crystal rods, comprising the following steps:

[0007] A plurality of crystal rods are provided, each of the plurality of crystal rods having a first end face;

[0008] The first end faces of the plurality of crystal rods are ground to optimize the rotation angle of the plurality of crystal rods, and to make the crystal orientation of the ground first end faces a target crystal orientation value; and

[0009] Multiple crystal rods are bonded to a sticking fixture at intervals along their length. The first end face of the multiple crystal rods is perpendicular to the sticking fixture, and the interval between two adjacent crystal rods is a preset value.

[0010] Optionally, the preset value is greater than the minimum allowable gap between two adjacent crystal rods.

[0011] Furthermore, the preset value is 5mm to 15mm.

[0012] Optionally, the step of grinding the first end face of the crystal rod includes:

[0013] The crystal rod is placed in a fixture. The crystal rod has a first end face and a second end face that are arranged opposite to each other. The bottom of the fixture is in contact with the second end face, and the top end face of the fixture is parallel to the first end face.

[0014] The crystal orientation angles of the crystal ingot located in the fixture are measured and adjusted to find the target crystal orientation of the crystal ingot. The crystal orientation of the crystal ingot includes a horizontal crystal orientation and a vertical crystal orientation, and the values ​​of the horizontal and vertical crystal orientations both fall within the target crystal orientation range. After adjustment, there is an angle between the first end face of the crystal ingot and the top end face of the fixture.

[0015] The first end face is ground so that the crystal orientation of the ground first end face is the target crystal orientation value, and the top end face of the fixture is arranged parallel to the ground first end face.

[0016] Furthermore, the fixture includes a main body and a rotary table.

[0017] The main body includes a bottom and a top, and the rotary table is rotatably connected to the end face of the bottom.

[0018] The rotary table is rotatably mounted on the bottom end face, and the second end face is located on the rotary table; and

[0019] When the crystal rod is placed in the fixture, the length of the crystal rod is greater than the length of the main body, so that the first end face extends beyond the top.

[0020] Furthermore, the main body is extendable along its length.

[0021] Furthermore, a plurality of bolts are threaded onto the outer peripheral surface of the top, the bolts being radially retractable along the main body, and the crystal rod being fixed inside all the bolts.

[0022] Furthermore, the method for adjusting the horizontal crystal orientation to within the target crystal orientation range includes:

[0023] X-rays are emitted through a directional instrument, and the X-rays fall on the physical center point of the first end face;

[0024] The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the horizontal crystal orientation is found, and the value of the horizontal crystal orientation falls within the target crystal orientation range.

[0025] Furthermore, the method for adjusting the vertical crystal orientation to within the target crystal orientation range includes:

[0026] The orientation instrument stops emitting X-rays, and the rotary table drives the crystal rod to rotate 90°.

[0027] X-rays are emitted through a directional instrument, and the X-rays fall at the intersection of all the screws;

[0028] The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the vertical crystal orientation is found, and the value of the vertical crystal orientation falls within the target crystal orientation range.

[0029] Optionally, the rod bonding fixture includes a worktable and a resin plate, the resin plate being fixed to the worktable and used to bond multiple crystal rods.

[0030] Furthermore, multiple crystal rods are bonded to the worktable in pairs along the length direction using resin plates, such that the first end face of the multiple crystal rods is perpendicular to the worktable.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] This invention provides a method for bonding multiple crystal rods, comprising the following steps: providing multiple crystal rods, each of which has a first end face; grinding the first end faces of the multiple crystal rods to optimize the rotation angle of the multiple crystal rods and to make the crystal orientation of the ground first end face a target crystal orientation value; and bonding the multiple crystal rods at intervals along their length onto a bonding fixture, wherein the first end faces of the multiple crystal rods are perpendicular to the bonding fixture, and the interval between two adjacent crystal rods is a preset value, which can reduce the difficulty of bonding and minimize the loss of wire mesh tension during cutting. Attached Figure Description

[0033] Figure 1 This is a schematic flowchart of a method for bonding multiple crystal rods according to an embodiment of the present invention.

[0034] Figures 2-3 This is a schematic diagram of the structure of a clamp provided in an embodiment of the present invention;

[0035] Figure 4 This is a side view of an adhesive rod fixture table provided in an embodiment of the present invention;

[0036] Figure 5 This is a front view schematic diagram of an adhesive rod fixture table provided in an embodiment of the present invention.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1-Crystal rod; 11-Main body; 12-Rotating table; 13-Pin; 20-Bolt; 21-Nut; 22-Screw; 31-Worktable; 32-Resin board. Detailed Implementation

[0039] The following will provide a more detailed description of a method for bonding multiple crystal rods according to the present invention. The invention will now be described in more detail with reference to the accompanying drawings, which illustrate preferred embodiments of the invention. It should be understood that those skilled in the art can modify the invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the invention.

[0040] For clarity, not all features of the actual embodiments are described. In the following description, well-known functions and structures are not detailed in detail, as they would obscure the invention with unnecessary detail. It should be understood that in the development of any actual embodiment, numerous implementation details must be made to achieve the developer's specific objectives, such as changes from one embodiment to another according to limitations related to the system or business. Furthermore, it should be understood that such development work may be complex and time-consuming, but is merely routine work for those skilled in the art.

[0041] To make the objectives and features of the present invention more apparent and understandable, the specific embodiments of the present invention will be further described below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, and are only used to conveniently and clearly assist in illustrating the objectives of the embodiments of the present invention.

[0042] Figure 1 This is a schematic flowchart illustrating a method for bonding multiple crystal rods according to this embodiment. Figure 1 As shown, this embodiment provides a method for bonding multiple crystal rods, including the following steps:

[0043] Step S1: Provide a plurality of crystal rods, each of which has a first end face;

[0044] Step S2: Grind the first end faces of the plurality of crystal rods to optimize the rotation angle of the plurality of crystal rods, and make the crystal orientation of the first end face after grinding the target crystal orientation value; and

[0045] Step S3: A plurality of crystal rods are bonded at intervals along the length direction on the bonding jig table, the first end face of the plurality of crystal rods is perpendicular to the bonding jig table, and the interval between two adjacent crystal rods is a preset value.

[0046] The following combination Figures 2-5 This embodiment provides a detailed description of a method for bonding multiple crystal rods.

[0047] Please see Figures 4-5 First, step S1 is executed, providing multiple crystal rods 1, each of which has a first end face m. The number of crystal rods is at least two.

[0048] The multiple crystal rods 1 are all short crystal rods produced by single crystal silicon at the beginning and end of crystal pulling, with a length less than the conventional length (long crystal rods with a length of 400mm to 450mm). The length of the multiple crystal rods 1 is less than the limited length of the sticking jig, for example: 150mm, 155mm, etc.

[0049] This step specifically includes the following steps:

[0050] First, the monocrystalline silicon is pulled into a crystal, and then the outer peripheral surface of the pulled monocrystalline silicon is rolled.

[0051] Next, the monocrystalline silicon is cut to obtain the crystal rod 1, which has a first end face m and a second end face that are arranged opposite to each other.

[0052] Next, step S2 is performed to grind the first end face m of the multiple crystal rods 1 to optimize the rotation angle of the multiple crystal rods 1 and to make the crystal orientation of the first end face m after grinding the target crystal orientation value.

[0053] This step specifically includes the following steps:

[0054] Step S21: Place each of the crystal rods 1 in a fixture. The crystal rod 1 has a second end face and a first end face m that are arranged opposite to each other. The bottom of the fixture is in contact with the second end face, and the top end face of the fixture is parallel to the first end face m.

[0055] like Figures 2-3As shown, the clamp is a cylindrical structure with one open end. The clamp includes a main body 11 and a rotary table 12. The main body 11 is a hollow cylindrical structure with openings at both ends, and has an elongated notch extending through at least one end in the length direction. The main body 11 includes a bottom and a top. The rotary table 12 is rotatably connected to the end face of the bottom of the main body. The outer circumferential surface of the bottom has four first through holes, with each pair of first through holes facing each other, and the line connecting them passing through the center point of the rotary table 12. The rotary table 12 has two second through holes that extend radially through it. The diameter of the first through holes is the same as the diameter of the second through holes. When one pair of first through holes (i.e., two facing first through holes) faces one second through hole, another pair of first through holes faces another second through hole. When one pair of first through holes faces one second through hole, a pin can be placed in the pair of first and second through holes to keep the rotary table 12 relatively stationary with respect to the main body.

[0056] Preferably, the length of the main body portion can be adjusted (e.g., the main body portion is telescopic along its length) so that the clamp can be adapted to crystal rods of various lengths.

[0057] The length of the crystal rod 1 is greater than the length of the main body, such that the second end face is located on the rotary table 12, and the first end face m extends out of the top of the main body. The top is uniformly provided with a plurality of third through holes along the circumference. Each third through hole has an internal thread, and each through hole is provided with a bolt 20, such as a hexagonal bolt. The bolt 20 has an external thread that matches the internal thread, allowing the bolt to extend and retract radially along the main body. The bolt 20 is threaded through the third through hole, and both ends of the bolt 20 are located outside the two openings of the third through hole, thus fixing the crystal rod inside all the bolts.

[0058] In detail, the bolt 20 includes a nut 21 and a screw 22. The screw 22 includes a connecting end and a free end. The connecting end is connected to the nut 21. The length of the screw 22 is greater than the depth of the third through hole, so that the free end extends into the third through hole from the outside of the main body 11. After the thread passes through the third through hole, the free end is located inside the main body 11, and the nut 21 is located outside the main body 11. The crystal rod is located inside all the free ends of the screw 22, and at least most of the free ends of the screw 22 are in contact with the crystal rod. Since the opening of the notch faces the top, the position of the crystal rod in the fixture can be adjusted by rotating the nut 21. At the same time, the notch prevents damage to the crystal rod caused by physical compression of the fixture, and also changes the angle between the first end face m and the top end face of the crystal rod, so that the crystal rod tilts in the fixture.

[0059] Specifically, this step involves placing each crystal rod 1 in the fixture, with the length of each crystal rod 1 being greater than the length of the main body 11. The second end face is located on the rotary table, and the first end face m extends beyond the top of the main body 11. Bolts 20 threaded on the outer circumference of the top end face limit and fix the crystal rod 1 between all the bolts 20. At this time, the center position of the first end face m of the crystal rod 1 is located at the center position of the screw extension position, and the included angle between the first end face m of the crystal rod 1 and the top end face is zero, that is, the first end face m and the top end face are set parallel to each other.

[0060] Step S22: Measure and adjust the crystal orientation angle of the crystal rod 1 located in the fixture to find the target crystal orientation of the crystal rod 1. The crystal orientation of the crystal rod 1 includes a horizontal crystal orientation and a vertical crystal orientation. The values ​​of the horizontal crystal orientation and the vertical crystal orientation both fall within the target crystal orientation range. After adjustment, there is an angle between the first end face of the crystal rod 1 and the top end face of the fixture.

[0061] This step specifically includes the following steps:

[0062] First, an X-ray is emitted through a directional instrument, and the X-ray falls on the physical center point of the first end face m of the crystal rod 1;

[0063] Next, the crystal plane orientation angle of the crystal rod 1 is adjusted by rotating the bolt until the maximum value of the horizontal crystal orientation is found. At this time, the intersection of all the screws 22 is not the physical center point of the crystal rod 1, and after adjustment, the crystal rod 1 is tilted.

[0064] Next, the bolts are rotated to adjust the crystal orientation angle of the crystal rod 1, so that the horizontal crystal orientation value falls within the target crystal orientation range. The target crystal orientation range is not a cleavage range of the crystal rod, where the cleavage range is the angle range in which the crystal rod 1 may crack along a certain crystallization direction. At this time, after adjustment, the crystal rod 1 tilts again.

[0065] Next, the orientation instrument stops emitting X-rays and pulls the pin out of the first and second through holes. The rotary table 12 drives the crystal rod to rotate 90° and inserts the pin into a pair of first through holes and their corresponding second through holes to lock the rotary table 12, so that the rotary table cannot drive the crystal rod 1 to rotate.

[0066] Next, an X-ray is emitted through a directional instrument, falling at the intersection of all screws 22 (i.e., the center point of the crystal rod). The crystal orientation angle of the crystal rod 1 is adjusted by rotating the bolts until the maximum value of the perpendicular crystal orientation is found. At this point, after adjustment, the crystal rod 1 tilts again.

[0067] Next, the screw is rotated to adjust the crystal plane orientation angle of the crystal rod 1 so that the value of the vertical crystal orientation falls within the target crystal orientation range. At this time, the center position of the screw is the center position of the crystal axis. After adjustment, the crystal rod 1 is further tilted so that the first end face m and the top end face are not parallel. That is, the first end face m intersects with the top end face, that is, there is an acute angle between the two end faces.

[0068] Next, the first end face m is marked so that it can be fully ground during subsequent grinding processes. In this embodiment, a marker is used to color the first end face m of the crystal rod 1. This colored portion needs to be completely removed in subsequent processes to prevent insufficient grinding of the crystal rod 1.

[0069] Next, the pins are inserted into both pairs of first through holes and their corresponding second through holes to lock all the pins in place.

[0070] Next, step S23 is executed to grind the first end face m so that the crystal orientation of the ground first end face m is the target crystal orientation value, and the top end face of the fixture is set parallel to the ground first end face m.

[0071] In detail, the crystal rod 1 fixed on the fixture is fixed on the grinding fixture, and the first end face m is ground to remove the mark, so that the crystal orientation of the first end face m after grinding is the target crystal orientation value, and the top end face of the main body 11 is parallel to the first end face m after grinding.

[0072] Next, step S3 is performed, in which multiple crystal rods 1 are bonded to the bonding jig table at intervals along their length. The first end face m of the multiple crystal rods 1 is perpendicular to the bonding jig table, and the interval between the multiple crystal rods 1 is a preset value. The preset value can be greater than the minimum allowable gap between two adjacent crystal rods; preferably, the preset value can be the minimum allowable gap between two adjacent crystal rods 1.

[0073] In this embodiment, due to the limitations of the machine, the gap between two adjacent crystal rods 1 is 5mm to 15mm. Preferably, the minimum allowable gap between two adjacent crystal rods 1 is 5mm, so that the empty wire mesh between two adjacent crystal rods 1 is fixed. In this way, with a fixed interval of 5mm, the gap between all two adjacent crystal rods 1 simultaneously bonded to the sticking jig is 5mm.

[0074] like Figures 4-5 As shown, the bonding fixture includes a worktable 31, a resin plate 32, a clamping and fixing component 33, a guide rail 34, a lifting component 35, and a lifting shaft 36. The resin plate 32 is fixed on the worktable 31 and is used to bond the crystal rod. The worktable 31 is movably mounted on the guide rail 34 and can move back and forth along the guide rail 34. The worktable 31 is fixed on the lifting shaft 36 and moves vertically up and down with the lifting shaft 36. The lifting component 35 and the clamping and fixing component 33 are used to support the crystal rod before it is placed on the worktable. The length of the worktable is greater than 400mm. Since the length of the worktable is greater than the sum of the lengths of all the crystal rods 1 and the fixed intervals between all adjacent crystal rods, the wire mesh is only arranged in the area containing the sum of the lengths of multiple crystal rods 1 and the fixed intervals during cutting, rather than the entire length of the worktable. This minimizes the wire mesh tension loss during cutting and makes the crystal orientation accuracy of multiple short crystal rods close to that of a single long crystal rod. The supporting component is, for example, a roller.

[0075] The specific steps are as follows: First, the clamping and fixing member 33 fixes the first crystal rod from the first end face m and the second end face of the first crystal rod, and the lifting member 35 lifts the first crystal rod from the bottom; then, after the worktable 31 adjusts its position relative to the first crystal rod through the guide rail 34, the worktable 31 moves upward through the lifting shaft 36 and fixes the first crystal rod on the worktable 31 through the resin plate 32; after that, the clamping and fixing member 33 and the lifting member 35 are removed, and the worktable 31 is moved; the bonding and fixing of the remaining crystal rods are repeated using the above method, and at this time, the interval between adjacent crystal rods is a preset value.

[0076] It should be noted that in the above steps, the first end face m of all the crystal rods is set perpendicular to the sticking rod fixture stage.

[0077] In summary, the present invention provides a method for bonding multiple crystal rods, comprising the following steps: providing multiple crystal rods, each of the multiple crystal rods having a first end face; grinding the first end faces of the multiple crystal rods respectively to optimize the rotation angle of the multiple crystal rods, and making the crystal orientation value of the ground first end face a target crystal orientation value; and bonding the multiple crystal rods at intervals along the length direction onto a bonding fixture, wherein the first end faces of the multiple crystal rods are perpendicular to the bonding fixture, and the interval between two adjacent crystal rods is a preset value, which can reduce the difficulty of bonding and minimize the loss of wire mesh tension during cutting.

[0078] Furthermore, it should be noted that, unless otherwise specified or indicated, the terms "first" and "second" in the specification are used only to distinguish the various components, elements, steps, etc. in the specification, and are not used to indicate the logical or sequential relationships between the various components, elements, steps, etc.

[0079] It is understood that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the technical solutions of the present invention based on the disclosed technical content, or equivalent embodiments can be modified accordingly, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the present invention shall still fall within the protection scope of the present invention.

Claims

1. A method for bonding multiple crystal rods, characterized in that, Includes the following steps: A plurality of crystal rods are provided, each of the plurality of crystal rods having a first end face; The first end faces of the plurality of crystal rods are ground to optimize the rotation angle of the plurality of crystal rods, and to make the crystal orientation of the ground first end faces a target crystal orientation value; and Multiple crystal rods are bonded to the bonding jig table at intervals along the length direction. The first end face of each crystal rod is perpendicular to the bonding jig table, and the interval between two adjacent crystal rods is a preset value. The step of grinding the first end face of the crystal rod includes: The crystal ingot is placed in a fixture. The crystal ingot has a first end face and a second end face that are disposed opposite to each other. The bottom of the fixture is in contact with the second end face, and the top end face of the fixture is parallel to the first end face. The fixture includes a main body and a rotary table. The main body includes a bottom and a top. The rotary table is rotatably connected to the bottom end face. The rotary table is rotatably disposed on the bottom end face, and the second end face is located on the rotary table. When the crystal ingot is placed in the fixture, the length of the crystal ingot is greater than the length of the main body, such that the first end face extends beyond the top. The crystal orientation angles of the crystal ingot located in the fixture are measured and adjusted to find the target crystal orientation of the crystal ingot. The crystal orientation of the crystal ingot includes a horizontal crystal orientation and a vertical crystal orientation, and the values ​​of the horizontal and vertical crystal orientations both fall within the target crystal orientation range. After adjustment, there is an angle between the first end face of the crystal ingot and the top end face of the fixture. The first end face is ground so that the crystal orientation of the ground first end face is the target crystal orientation value, and the top end face of the fixture is arranged parallel to the ground first end face.

2. The method for bonding multiple crystal rods as described in claim 1, characterized in that, The preset value is greater than the minimum allowable gap between two adjacent crystal rods.

3. The method for bonding multiple crystal rods as described in claim 2, characterized in that, The preset value is 5 mm to 15 mm.

4. The method for bonding multiple crystal rods as described in claim 1, characterized in that, The main body is retractable along its length.

5. The method for bonding multiple crystal rods as described in claim 1, characterized in that, Multiple bolts are threaded onto the outer circumferential surface of the top, and the bolts are retractable along the radial direction of the main body. The crystal rod is fixed inside all the bolts.

6. The method for bonding multiple crystal rods as described in claim 5, characterized in that, The method for adjusting the horizontal crystal orientation to within the target crystal orientation range includes: X-rays are emitted through a directional instrument, and the X-rays fall on the physical center point of the first end face; The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the horizontal crystal orientation is found, and the value of the horizontal crystal orientation falls within the target crystal orientation range.

7. The method for bonding multiple crystal rods as described in claim 5, characterized in that, The method for adjusting the vertical crystal orientation to within the target crystal orientation range includes: The orientation instrument stops emitting X-rays, and the rotary table drives the crystal rod to rotate 90°. X-rays are emitted through a directional instrument, and the X-rays fall at the intersection of all the screws; The crystal plane orientation angle of the crystal rod is adjusted by rotating the bolt until the maximum value of the vertical crystal orientation is found, and the value of the vertical crystal orientation falls within the target crystal orientation range.

8. The method for bonding multiple crystal rods as described in claim 1, characterized in that, The rod bonding fixture includes a workbench and a resin plate, the resin plate being fixed on the workbench and used to bond multiple crystal rods.

9. The method for bonding multiple crystal rods as described in claim 8, characterized in that, Multiple crystal rods are bonded to the worktable in pairs along the length direction using resin plates, such that the first end face of the multiple crystal rods is perpendicular to the worktable.

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