A light source system and an optical system based on a spatial light modulator

CN116609937BActive Publication Date: 2026-10-30TUOTUO TECHNOLOGY (SUZHOU) CO LTD
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Patent Information

Application Number
CN202310658508.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-05
Publication Date
2026-10-30
Estimated Expiration
2043-06-05

AI Technical Summary

Technical Problem

[0003]现有的光源系统中,通常通过调整孔径光阑光圈的大小,以实现通过光束大小的调节,此外,通常通过整体调整孔径光阑的位置,以实现同轴对准或离轴光束出射,显然,这种调节方式的调节精度低且调节便利性差

Benefits of technology

[0038]本申请的基于空间光调制器的光源系统,包括光源组件、第一空间光调制器、第一透镜组、第二空间光调制器和出光组件,第一空间光调制器用于接收光源组件出射的汇聚光束,并能够对入射的汇聚光束进行入射光数值孔径角调节、入射位置调节和空间滤波中的至少其一,以输出第一调制光束,第一空间光调制器不仅可以实现入射光数值孔径角的高精度调节,也能够实现入射光入射位置调节,进而实现光路对准或实现离轴光束出射,同时也能够实现对入射光进行空间滤波;第二空间光调制器能够对准直处理后的第一调制光束进行出射位置调制,以调节目标调制光束在目标成像区域上的投射位置。

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Abstract

The light source system based on a spatial light modulator comprises: a light source assembly configured to emit a convergent light beam; a first spatial light modulator configured to receive the convergent light beam and capable of at least one of incident light numerical aperture angle adjustment, incident position adjustment and spatial filtering on the incident convergent light beam to output a first modulated light beam; a first lens set configured to receive the first modulated light beam and perform collimation processing on the first modulated light beam; a second spatial light modulator configured to receive the collimated first modulated light beam and capable of emitting position modulation on the collimated first modulated light beam to output a second modulated light beam; and a light emitting assembly configured to receive the second modulated light beam and capable of at least one of convergent processing and focusing processing on the second modulated light beam to output a target modulated light beam. The application can realize efficient and high-precision modulation on the incident light beam to output the target modulated light beam, and further flexibly adapt to different application scenarios.
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Description

Technical Field

[0001] This application relates to the field of light source technology, and in particular to a light source system and optical system based on a spatial light modulator. Background Technology

[0002] In the field of optics, such as in the field of light source illumination, it is usually necessary to use a light source system to modulate the light beam and project the modulated light beam onto the target imaging area.

[0003] In existing light source systems, the size of the transmitted beam is usually adjusted by changing the size of the aperture stop. In addition, the position of the aperture stop is usually adjusted as a whole to achieve coaxial alignment or off-axis beam emission. Obviously, this adjustment method has low adjustment accuracy and poor adjustment convenience. Summary of the Invention

[0004] This application provides a light source system and optical system based on a spatial light modulator, which can achieve efficient and high-precision modulation of the incident beam to output a target modulated beam, thereby flexibly adapting to different application scenarios.

[0005] On the one hand, this application provides a light source system based on a spatial light modulator, comprising:

[0006] Light source assembly, used to emit a converging light beam;

[0007] A first spatial light modulator is disposed on the outgoing light path of the light source assembly, for receiving the converging beam, and for performing at least one of the following on the incident converging beam: incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering, so as to output a first modulated beam.

[0008] The first lens group is disposed in the output optical path of the first spatial light modulator, and is used to receive the first modulated beam and collimate the first modulated beam.

[0009] The second spatial light modulator is disposed on the outgoing light path of the first lens group, for receiving the collimated first modulated beam and for modulating the outgoing position of the collimated first modulated beam to output the second modulated beam.

[0010] The light-emitting component is disposed on the output light path of the second spatial light modulator, for receiving the second modulated beam, and is capable of performing at least one of focusing and convergence processing on the second modulated beam to output the target modulated beam.

[0011] Furthermore, the first spatial light modulator can project the incident converging beam off-axis or coaxially, so that the first modulated beam is projected off-axis or coaxially onto the first lens group, and the first modulated beam can be projected onto the target imaging area through the first lens group, the second spatial light modulator and the light output component.

[0012] Furthermore, the first spatial light modulator can spatially filter the incident converging beam to form a first modulated beam projected onto the first lens group. The first modulated beam can be projected onto the target imaging area via the first lens group, the second spatial light modulator, and the light-emitting component.

[0013] Furthermore, the second spatial light modulator can perform pattern modulation on the incident collimated first modulated beam to form a second modulated beam carrying a target pattern. The second modulated beam can be projected onto the target imaging area through the light-emitting component to present the target pattern in the target imaging area.

[0014] Furthermore, the first spatial light modulator is capable of transmitting and / or reflecting the incident light beam;

[0015] And / or,

[0016] The second spatial light modulator is capable of transmitting and / or reflecting the incident light beam.

[0017] Furthermore, the light source assembly includes a light source and a second lens group;

[0018] The second lens group is disposed in the output light path of the light source, and the first spatial light modulator is disposed in the output light path of the second lens group;

[0019] The light source is used to generate and output an outgoing light beam; the second lens group is used to receive the outgoing light beam, converge the outgoing light beam to obtain the converged light beam, and project the converged light beam onto the first spatial light modulator.

[0020] Furthermore, the light-emitting assembly includes a third lens group and an objective lens;

[0021] The third lens group is disposed on the output light path of the second spatial light modulator, and the objective lens and the third lens group are disposed on the same optical axis.

[0022] The third lens group is used to receive the second modulated beam and to converge the second modulated beam to output the converged second modulated beam.

[0023] The objective lens is used to receive the converged second modulated beam and to focus the converged second modulated beam to output the target modulated beam.

[0024] Furthermore, the light source system based on the spatial light modulator also includes a first light-absorbing element;

[0025] The first light-absorbing element is disposed on one side of the emitting end of the first spatial light modulator;

[0026] The first light-absorbing element is used to absorb stray light reflected from the non-light-passing area on the first spatial light modulator.

[0027] Furthermore, the light source system based on the spatial light modulator also includes a second light-absorbing element;

[0028] The second light-absorbing element is disposed on one side of the output end of the second spatial light modulator;

[0029] The second light-absorbing element is used to absorb stray light reflected from the non-light-passing area on the second spatial light modulator.

[0030] Furthermore, the light source assembly also includes a light-diffusing element;

[0031] The light homogenizer is disposed on the outgoing light path of the light source, and the second lens group is disposed on the transmitted light path of the light homogenizer;

[0032] The beam homogenizer is used to receive the emitted beam, homogenize the emitted beam, and project the homogenized emitted beam onto the second lens group.

[0033] Furthermore, the light source assembly also includes a fourth lens group;

[0034] The fourth lens group is disposed on the output light path of the light source, and the light homogenizer is disposed on the output light path of the fourth lens group;

[0035] The fourth lens group is used to receive the emitted light beam, converge the emitted light beam, and project the converged emitted light beam onto the beam homogenizer.

[0036] On the other hand, this application provides an optical system including a light source system based on a spatial light modulator as described above.

[0037] The light source system and optical system based on a spatial light modulator provided in this application have the following beneficial effects:

[0038] The light source system based on a spatial light modulator disclosed in this application includes a light source component, a first spatial light modulator, a first lens group, a second spatial light modulator, and a light output component. The first spatial light modulator is used to receive the converging beam emitted from the light source component and can perform at least one of the following on the incident converging beam: incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering, to output a first modulated beam. The first spatial light modulator can not only achieve high-precision adjustment of the incident light numerical aperture angle, but also achieve incident light incident position adjustment, thereby achieving optical path alignment or off-axis beam output, and can also perform spatial filtering on the incident light. The second spatial light modulator can perform output position modulation on the aligned first modulated beam to adjust the projection position of the target modulated beam on the target imaging area. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 A schematic diagram of a light source system based on a spatial light modulator provided in an embodiment of this application;

[0041] Figure 2 A schematic diagram of another light source system based on a spatial light modulator provided in this application embodiment;

[0042] Figure 3 A schematic diagram of another light source system based on a spatial light modulator provided in this application embodiment;

[0043] Figure 4 A schematic diagram of another light source system based on a spatial light modulator provided in this application embodiment;

[0044] Figure 5 A schematic diagram of the aperture of a first spatial light modulator provided in an embodiment of this application;

[0045] Figure 6 A schematic diagram of the aperture of another first spatial light modulator provided in an embodiment of this application;

[0046] Figure 7 A schematic diagram of the aperture of another first spatial light modulator provided in an embodiment of this application;

[0047] Figure 8 A schematic diagram of the aperture of another first spatial light modulator provided in an embodiment of this application.

[0048] The following is supplementary explanation of the attached figures:

[0049] 10-Light source assembly; 11-Light source; 12-Second lens group; 121-First plano-convex lens; 122-Second plano-convex lens; 13-Light homogenizer; 14-Fourth lens group; 141-Third plano-convex lens; 142-Fourth plano-convex lens; 20-First spatial light modulator; 30-First lens group; 31-First concave lens; 32-First convex lens; 40-Second spatial light modulator; 50-Light emitting assembly; 51-Third lens group; 511-Second convex lens; 512-Third convex lens; 52-Objective lens; 60-First light absorber; 70-Second light absorber; 80-Target imaging area. Detailed Implementation

[0050] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of the present application, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative effort are within the scope of protection of the present application.

[0051] The term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of this application. In the description of this application, it should be understood that the terms "upper," "lower," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first," "second," etc., may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data used can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein.

[0052] The following is in conjunction with the appendix Figure 1-8 The technical solutions in the embodiments of this application are introduced, and the technical solutions in the embodiments of this application can be applied to light source lighting systems.

[0053] This application provides a light source system based on a spatial light modulator, comprising: a light source assembly 10 for emitting a converging beam; a first spatial light modulator 20 disposed on the outgoing optical path of the light source assembly 10 for receiving the converging beam and capable of performing at least one of incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering on the incident converging beam to output a first modulated beam; a first lens group 30 disposed on the outgoing optical path of the first spatial light modulator 20 for receiving the first modulated beam and collimating the first modulated beam; a second spatial light modulator 40 disposed on the outgoing optical path of the first lens group 30 for receiving the collimated first modulated beam and capable of performing outgoing position modulation on the collimated first modulated beam to output a second modulated beam; and a light-emitting assembly 50 disposed on the outgoing optical path of the second spatial light modulator 40 for receiving the second modulated beam and capable of performing at least one of converging and focusing processing on the second modulated beam to output a target modulated beam.

[0054] In some embodiments, the light source assembly 10 is capable of generating an outgoing light beam, converging the generated outgoing light beam to obtain a converged light beam, and projecting the converged light beam onto the first spatial light modulator 20.

[0055] In some embodiments, a first spatial light modulator 20 is disposed on the outgoing light path of the light source assembly 10. The first spatial light modulator 20 is capable of receiving the converging light beam emitted from the light source assembly 10 and performing a preset modulation process on the incident converging light beam to obtain a first modulated light beam. Specifically, the preset modulation process includes at least one of incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering.

[0056] In some embodiments, similar to the function of adjusting the aperture size with an aperture stop, the first spatial light modulator 20 can adjust the numerical aperture angle of the converging beam entering the first spatial light modulator 20; compared with adjusting the aperture size with an aperture stop, the first spatial light modulator 20 can efficiently and accurately adjust the numerical aperture angle of the converging beam entering the first spatial light modulator 20 to meet the optical system requirements of multiple angle incident light.

[0057] In existing technologies, such as current lighting systems, aperture stops are used to adjust the numerical aperture angle and incident position of the incident light. To achieve off-axis illumination, the position of the aperture stop needs to be moved as a whole to make the optical path off-axis, thereby achieving off-axis illumination. The existing method of achieving off-axis illumination by moving the position of the aperture stop as a whole has poor adjustment convenience and low adjustment accuracy, which inevitably introduces the problem of low adjustment accuracy of the entire optical system.

[0058] In some embodiments, the first spatial light modulator 20 can efficiently and precisely adjust the incident position of the converging beam into the first spatial light modulator 20 to achieve high-precision optical path alignment. At this time, the converging beam emitted from the light source assembly 10 can easily pass through the center of the aperture of the first spatial light modulator 20; or achieve high-precision off-axis optical path alignment so that the first modulated beam can be projected onto the first lens group 30 with high precision off-axis alignment. Compared with the prior art, in the process of adjusting the incident position of the converging beam, this application does not require overall adjustment of the position of the first spatial light modulator 20, which has good adjustment convenience and high adjustment accuracy.

[0059] In some embodiments, the first spatial light modulator 20 may perform spatial filtering on the converging beam emitted from the light source component 10 based on the light quality requirements of the target modulated beam; for example, the first spatial light modulator 20 may perform high-frequency noise and interference removal processing on the converging beam.

[0060] It is understood that the first spatial light modulator 20 can realize one, two or all of the following: incident light numerical aperture angle adjustment, incident position adjustment and spatial filtering. In other words, the first spatial light modulator 20 in this embodiment can realize the integration of incident light numerical aperture angle adjustment, incident position adjustment and spatial filtering functions, making the light source system based on the spatial light modulator simple and compact.

[0061] In some embodiments, please refer to Figure 1-4 The first lens group 30 includes a first concave lens 31 and a first convex lens 32. The first concave lens 31 is disposed on the outgoing light path of the first spatial light modulator 20, the first convex lens 32 is disposed on the outgoing light path of the first concave lens 31, and the second spatial light modulator 40 is disposed on the outgoing light path of the first convex lens 32.

[0062] Preferably, the first concave lens 31 and the first convex lens 32 are arranged along the same optical axis.

[0063] Specifically, the first concave lens 31 and the first convex lens 32 work together to receive the first modulated beam emitted from the first spatial light modulator 20 and collimate the first modulated beam so that the collimated first modulated beam is parallel and uniformly incident into the second spatial light modulator 40.

[0064] In some embodiments, the second spatial light modulator 40 can modulate the exit position of the first modulated beam after alignment processing to adjust the projection position of the target modulated beam on the target imaging region 80. It can also perform pattern modulation on the first modulated beam after alignment processing to form a second modulated beam carrying the target pattern, thereby presenting the target pattern in the target imaging region 80.

[0065] In some embodiments, the light-emitting component 50 is capable of converging and / or focusing the second modulated beam to obtain the target modulated beam, and is capable of projecting the target modulated beam onto the target imaging region 80.

[0066] Specifically, in the light source system based on the spatial light modulator, the converging light beam emitted from the light source component 10 passes through the first spatial light modulator 20, the first lens group 30, the second spatial light modulator 40, and the light output component 50, and is finally projected onto the target imaging area 80.

[0067] The light source system based on a spatial light modulator of this application includes a light source assembly 10, a first spatial light modulator 20, a first lens group 30, a second spatial light modulator 40, and a light output assembly 50. The first spatial light modulator 20 is used to receive the converging beam emitted from the light source assembly 10 and can perform at least one of the following on the incident converging beam: incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering, to output a first modulated beam. The first spatial light modulator 20 can not only achieve high-precision adjustment of the incident light numerical aperture angle, but also achieve incident light incident position adjustment, thereby achieving optical path alignment or off-axis beam output, and can also perform spatial filtering on the incident light. The second spatial light modulator 40 can perform output position modulation on the first modulated beam after alignment processing to adjust the projection position of the target modulated beam on the target imaging region 80.

[0068] In this embodiment of the application, the light source system based on the spatial light modulator also includes a controller, and the first spatial light modulator 20 is electrically connected to the controller.

[0069] In this embodiment, the first spatial light modulator 20 is capable of adjusting the aperture size to adjust the incident light numerical aperture angle of the incident converging beam.

[0070] For details, please see Figure 5 and Figure 6 Based on the aperture size adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture size adjustment to adjust the numerical aperture angle of the converged beam emitted from the light source component 10, thereby adjusting the system resolution and meeting the optical system requirements of multi-angle incident light.

[0071] Understandable, Figure 5 The rectangular outline in the diagram can be considered as a schematic diagram of the outer outline of the first spatial light modulator 20, and the circle within the rectangular outline can be considered as a schematic diagram of the aperture outline, with the area within the circle representing the beam passage area; and with Figure 5 Compared to the illustrated circular aperture, Figure 6 The circular aperture shown in the image has become larger.

[0072] In this embodiment, the first spatial light modulator 20 can project the incident converging beam off-axis or coaxially, so that the first modulated beam is projected off-axis or coaxially to the first lens group 30, and the first modulated beam can be projected to the target imaging area 80 through the first lens group 30, the second spatial light modulator 40 and the light output component 50.

[0073] In this embodiment, the first spatial light modulator 20 can adjust the aperture position to adjust the incident position of the incident converging beam, thereby projecting the incident converging beam off-axis or coaxially.

[0074] For details, please see Figure 5 and Figure 7 Based on the aperture position adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture position adjustment to adjust the incident position of the converging beam emitted from the light source assembly 10 into the first spatial light modulator 20, thereby projecting the incident converging beam off-axis or coaxially.

[0075] In some embodiments, the first spatial light modulator 20 is capable of aperture position adjustment so that the first spatial light modulator 20 can coaxially project the incident converging beam, thereby achieving optical path alignment. In this case, the converging beam emitted from the light source assembly 10 can easily pass through the center of the aperture of the first spatial light modulator 20.

[0076] In some embodiments, please refer to Figure 5 and Figure 7 The first spatial light modulator 20 can adjust the aperture position so that it can project the incident converging beam off-axis, thereby improving the depth of focus, resolution and contrast, and increasing the depth of field.

[0077] Understandably, with Figure 5 Compared to the illustrated circular aperture, Figure 7 The position of the circular aperture shown in the image has changed.

[0078] In this embodiment, the first spatial light modulator 20 can spatially filter the incident converging beam to form a first modulated beam projected onto the first lens group 30. The first modulated beam can be projected onto the target imaging area 80 via the first lens group 30, the second spatial light modulator 40, and the light output component 50.

[0079] In this embodiment, the first spatial light modulator 20 can adjust the aperture shape to spatially filter the incident converging beam to form a first modulated beam projected onto the first lens group 30.

[0080] For details, please see Figure 5 and Figure 8Based on the aperture shape adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture shape adjustment to spatially filter the incident converging beam to obtain beams with different information, such as high-frequency information or low-frequency information. It can also achieve noise reduction or interference reduction as needed.

[0081] Understandably, with Figure 5 Compared to the illustrated circular aperture, Figure 8 The aperture shape shown in the image has changed; Figure 8 The square within the rectangular outline can be used as a schematic diagram of the aperture outline, and the area within the square is the area through which the light beam passes.

[0082] It should be noted that the adjustment of the aperture size, position or shape is relative to the first spatial light modulator 20 as a whole, or in other words, the adjustment of the aperture size, position or shape is relative to the outer contour of the first spatial light modulator 20; during the process of adjusting the aperture size, position or shape, the overall position of the first spatial light modulator 20 is fixed, or in other words, the position of the outer contour of the first spatial light modulator 20 is fixed.

[0083] In some embodiments, the first spatial light modulator 20 includes multiple independent units. The controller can control the multiple independent units, and the multiple independent units can independently receive control signals from the controller and adjust the aperture size, position, or shape based on the control signals they receive to form a first modulated beam.

[0084] In some embodiments, the independent unit includes a reflective unit; multiple reflective units in the first spatial light modulator 20 can change their own optical properties based on the control signals they receive, thereby achieving aperture adjustment, and thus being able to perform preset modulation processing on the incident converging beam to obtain a first modulated beam. For example, the reflective unit can be a mirror coated with a liquid crystal layer, and the controller can change the optical properties of the liquid crystal crystals in the liquid crystal layer by controlling the electric field. When the electric field is applied to the liquid crystal layer, the liquid crystal crystals are twisted, thereby changing the reflection angle of the mirror, and thus achieving aperture adjustment; for example, the reflective unit can also be a coated mirror.

[0085] Furthermore, the independent unit also includes an aperture adjustment component, which is connected to the reflection unit such as a mirror. The aperture adjustment component can adjust the reflection unit so that the reflection unit reflects or does not reflect the incident converging beam. In this way, the controller can control multiple aperture adjustment components and thus control multiple reflection units, thereby enabling multiple reflection units to adjust the size, position, or shape of the aperture.

[0086] In some embodiments, the independent unit includes a transmission unit; multiple transmission units in the first spatial light modulator 20 can change their optical properties based on their respective received control signals to achieve aperture adjustment, thereby enabling preset modulation processing of the incident converging beam to obtain a first modulated beam; specifically, the controller can change the arrangement of the transmission units by twisting them, so that the transmission units transmit / do not transmit the incident converging beam. When powered on, the transmission units can transmit the incident converging beam; when powered off, the transmission units do not transmit the incident converging beam they receive, thereby enabling multiple transmission units to adjust the size, position, or shape of the aperture. For example, the transmission unit can be a liquid crystal molecule.

[0087] In this embodiment, the second spatial light modulator 40 can perform pattern modulation on the incident collimated first modulated beam to form a second modulated beam carrying the target pattern. The second modulated beam can be projected onto the target imaging region 80 via the light emitting component 50 to present the target pattern in the target imaging region 80.

[0088] In this embodiment, the second spatial light modulator 40 is electrically connected to the controller.

[0089] In this embodiment, the controller can control the second spatial light modulator 40 to load the target pattern, so that the second spatial light modulator 40 emits a second modulated beam carrying the target pattern. The second modulated beam passes through the light-emitting component 50 and is finally projected onto the target imaging area 80 to present the target pattern in the target imaging area 80.

[0090] In some embodiments, the target pattern loaded on the second spatial light modulator 40 can be accurately reflected on the target imaging area 80. That is, the size of the target pattern loaded on the second spatial light modulator 40, the position of the target pattern relative to the outer contour of the second spatial light modulator 40, and the pattern of the target pattern can all be accurately reflected on the target imaging area 80.

[0091] In this embodiment of the application, the first spatial light modulator 20 is capable of transmitting and / or reflecting the incident light beam, and / or the second spatial light modulator 40 is capable of transmitting and / or reflecting the incident light beam.

[0092] In some embodiments, at least one of the first spatial light modulator 20 and the second spatial light modulator 40 is a transmissive spatial light modulator capable of transmitting incident light beams, such as an LCD (Liquid Crystal Display), where an individual unit is a pixel.

[0093] In some embodiments, at least one of the first spatial light modulator 20 and the second spatial light modulator 40 is a reflective spatial light modulator capable of reflecting the incident light beam, such as LCOS (Liquid Crystal on Silicon) or DMD (Digital Micromirror Devices), and the independent unit corresponds to a reflective mirror unit or micromirror unit coated with a liquid crystal layer.

[0094] In some embodiments, please refer to Figure 1 The first spatial light modulator 20 is capable of reflecting the incident light beam, and the second spatial light modulator 40 is capable of reflecting the incident light beam.

[0095] Specifically, the reflective first spatial light modulator 20 can reflect and emit a first modulated beam, and the reflective second spatial light modulator 40 can reflect and emit a second modulated beam.

[0096] In some embodiments, please refer to Figure 2 The first spatial light modulator 20 can transmit the incident light beam, and the second spatial light modulator 40 can transmit the incident light beam.

[0097] Specifically, the first spatial light modulator 20 can transmit and emit a first modulated beam, and the second spatial light modulator 40 can transmit and emit a second modulated beam.

[0098] In some embodiments, please refer to Figure 3 The first spatial light modulator 20 can transmit the incident light beam, and the second spatial light modulator 40 can reflect the incident light beam.

[0099] Specifically, the transmissive first spatial light modulator 20 can transmit and emit a first modulated beam, and the reflective second spatial light modulator 40 can reflect and emit a second modulated beam.

[0100] In some embodiments, please refer to Figure 4 The first spatial light modulator 20 can reflect the incident light beam, and the second spatial light modulator 40 can transmit the incident light beam.

[0101] Specifically, the reflective first spatial light modulator 20 can reflect and emit the first modulated beam, and the transmissive second spatial light modulator 40 can transmit and emit the second modulated beam.

[0102] It should be noted that whether the first spatial light modulator 20 is transmissive or reflective, and whether the second spatial light modulator 40 is transmissive or reflective, can be selected according to the actual spatial layout of the optical path. This application does not limit whether the first spatial light modulator 20 is transmissive or reflective, and whether the second spatial light modulator 40 is transmissive or reflective.

[0103] In this embodiment of the application, please refer to Figure 1-4 The light source assembly 10 includes a light source 11 and a second lens group 12; the second lens group 12 is disposed in the outgoing light path of the light source 11, and the first spatial light modulator 20 is disposed in the outgoing light path of the second lens group 12; the light source 11 is used to generate and output an outgoing light beam; the second lens group 12 is used to receive the outgoing light beam, perform convergence processing on the outgoing light beam to obtain a converged light beam, and project the converged light beam onto the first spatial light modulator 20.

[0104] In some embodiments, the light source 11 can be a light source such as an LED lamp or a halogen lamp.

[0105] In some embodiments, the second lens group 12 is used to converge the emitted light beam from the light source 11 to obtain a converged light beam that can be projected onto the first spatial light modulator 20, thereby preventing the light beam entering the first spatial light modulator 20 from being too weak.

[0106] In some embodiments, please refer to Figure 1-4 The second lens group 12 includes a first plano-convex lens 121 and a second plano-convex lens 122. The first plano-convex lens 121 is disposed on the outgoing light path of the light source 11, the second plano-convex lens 122 is disposed on the outgoing light path of the first plano-convex lens 121, and the first spatial light modulator 20 is disposed on the outgoing light path of the second plano-convex lens 122.

[0107] Specifically, the light source 11, the first plano-convex lens 121, the second plano-convex lens 122, and the first spatial light modulator 20 are arranged in a common optical path in sequence; the first plano-convex lens 121 and the second plano-convex lens 122 cooperate to converge the emitted light beam from the light source 11 to obtain a converged light beam.

[0108] In this embodiment of the application, please refer to Figure 1-4 The light-emitting assembly 50 includes a third lens group 51 and an objective lens 52. The third lens group 51 is disposed on the output light path of the second spatial light modulator 40, and the objective lens 52 is disposed on the same optical axis as the third lens group 51. The third lens group 51 is used to receive the second modulated beam and to converge the second modulated beam to output the converged second modulated beam. The objective lens 52 is used to receive the converged second modulated beam and to focus the converged second modulated beam to output the target modulated beam.

[0109] In some embodiments, please refer to Figure 1-4 The third lens group 51 includes a second convex lens 511 and a third convex lens 512; the second convex lens 511 is disposed on the output light path of the second spatial light modulator 40, the third convex lens 512 is disposed on the output light path of the second convex lens 511, and the objective lens 52 is disposed on the output light path of the third convex lens 512.

[0110] Preferably, the second convex lens 511, the third convex lens 512, and the objective lens 52 are arranged along the same optical axis.

[0111] Specifically, the second convex lens 511 and the third convex lens 512 work together to converge the second modulated beam emitted from the second spatial light modulator 40 and project the converged second modulated beam onto the objective lens 52 so that the objective lens 52 can focus the converged second modulated beam.

[0112] In this embodiment of the application, please refer to Figure 1 and Figure 4 The light source system based on the spatial light modulator also includes a first light absorber 60; the first light absorber 60 is disposed on one side of the output end of the first spatial light modulator 20; the first light absorber 60 is used to absorb stray light reflected from the non-light-passing area on the first spatial light modulator 20.

[0113] In some embodiments, the first spatial light modulator 20 is a reflective spatial light modulator that can reflect and emit the first modulated beam. To solve the problem of stray light in the non-light-passing area, a first light-absorbing element 60 is provided on one side of the emitting end of the first spatial light modulator 20. In this way, the first light-absorbing element 60 can absorb the stray light reflected from the non-light-passing area on the first spatial light modulator 20.

[0114] In some embodiments, the first light-absorbing element 60 is disposed on the reflected light path of the reflective first spatial light modulator 20.

[0115] Specifically, the first light-absorbing element 60 can be a first black light-absorbing cloth.

[0116] In this embodiment of the application, please refer to Figure 1 and Figure 3 The light source system based on the spatial light modulator also includes a second light absorber 70; the second light absorber 70 is disposed on one side of the output end of the second spatial light modulator 40; the second light absorber 70 is used to absorb stray light reflected from the non-light-passing area on the second spatial light modulator 40.

[0117] In some embodiments, the second spatial light modulator 40 is a reflective spatial light modulator that can reflect and emit a second modulated beam. To solve the problem of stray light in the non-light-passing area, a second light-absorbing element 70 is provided on one side of the emitting end of the second spatial light modulator 40. This facilitates the absorption of stray light reflected from the non-light-passing area on the second spatial light modulator 40 by the second light-absorbing element 70.

[0118] In some embodiments, the second light-absorbing element 70 is disposed on the reflected light path of the reflective second spatial light modulator 40.

[0119] Specifically, the second light-absorbing element 70 can be a second black light-absorbing cloth.

[0120] In some embodiments, the first spatial light modulator 20 is a transmissive spatial light modulator capable of transmitting and emitting a first modulated beam; to solve the problem of stray light in the non-transmitting area of ​​the first spatial light modulator 20, a first annular light absorber is provided between the first spatial light modulator 20 and the second lens group 12; the converging beam can enter the first spatial light modulator 20 through the central hole of the first annular light absorber.

[0121] In some embodiments, the second spatial light modulator 40 is a transmissive spatial light modulator capable of transmitting and emitting a second modulated beam; to solve the problem of stray light in the non-transmitting area of ​​the second spatial light modulator 40, a second annular light absorber is provided between the second spatial light modulator 40 and the first lens group 30; the first modulated beam after collimation can enter the second spatial light modulator 40 through the central hole of the second annular light absorber.

[0122] In this embodiment of the application, please refer to Figure 1-4 The light source assembly 10 also includes a light homogenizer 13; the light homogenizer 13 is disposed on the outgoing light path of the light source 11, and the second lens group 12 is disposed on the transmission light path of the light homogenizer 13; the light homogenizer 13 is used to receive the outgoing light beam, homogenize the outgoing light beam, and project the homogenized outgoing light beam onto the second lens group 12.

[0123] Preferably, the light source 11, the light homogenizer 13, and the second lens group 12 are arranged along the same optical axis.

[0124] In some embodiments, in order to reduce the divergence angle of the beam emitted by the light source 11 and improve the uniformity of the beam emitted by the light source 11, the light source assembly 10 further includes a light homogenizer 13, which can homogenize the beam emitted by the light source 11.

[0125] Optionally, the light-diffusing element 13 can be a light-diffusing tube or a light-diffusing rod.

[0126] In this embodiment of the application, please refer to Figure 1-4The light source assembly 10 also includes a fourth lens group 14; the fourth lens group 14 is disposed in the outgoing light path of the light source 11, and the light homogenizer 13 is disposed in the outgoing light path of the fourth lens group 14; the fourth lens group 14 is used to receive the outgoing light beam, perform convergence processing on the outgoing light beam, and project the converged outgoing light beam onto the light homogenizer 13.

[0127] In some embodiments, please refer to Figure 1-4 The fourth lens group 14 includes a third plano-convex lens 141 and a fourth plano-convex lens 142. The third plano-convex lens 141 is disposed in the light path of the light source 11, the fourth plano-convex lens 142 is disposed in the light path of the third plano-convex lens 141, and the light homogenizer 13 is disposed in the light path of the fourth plano-convex lens 142.

[0128] Preferably, the light source 11, the third plano-convex lens 141, the fourth plano-convex lens 142, the light homogenizer 13, the first plano-convex lens 121, and the second plano-convex lens 122 are arranged along the same optical axis.

[0129] Specifically, the third plano-convex lens 141 and the fourth plano-convex lens 142 work together to converge the emitted light beam from the light source 11 and project the converged emitted light beam onto the light homogenizer 13.

[0130] This application also provides an optical system including the above-described spatial light modulator-based light source system, which is capable of projecting a target modulated beam onto a target imaging region 80 on the optical system.

[0131] The following section describes the optical path setup of the spatial light modulator-based light source system in this application, using specific application scenarios as examples:

[0132] The spatial light modulator-based light source system in this application includes a light source 11, a third plano-convex lens 141, a fourth plano-convex lens 142, a light homogenizer 13, a first plano-convex lens 121, a second plano-convex lens 122, a first spatial light modulator 20, a first concave lens 31, a first convex lens 32, a second spatial light modulator 40, a second convex lens 511, a third convex lens 512, and an objective lens 52 arranged in sequence in a common optical path. The emitted light beam from the light source 11 can be sequentially processed by the converging treatment of the third plano-convex lens 141 and the fourth plano-convex lens 142, the light homogenizing treatment of the light homogenizer 13, the converging treatment of the first plano-convex lens 121 and the second plano-convex lens 122, the modulation treatment of the first spatial light modulator 20, the collimation treatment of the first concave lens 31 and the first convex lens 32, the modulation treatment of the second spatial light modulator 40, the converging treatment of the second convex lens 511 and the third convex lens 512, and the focusing treatment of the objective lens 52, so as to project a target modulated light beam onto the target imaging region 80.

[0133] The light source system based on a spatial light modulator provided in this application has the following beneficial effects:

[0134] 1. A first spatial light modulator 20 is provided in the output optical path of the light source assembly 10. The first spatial light modulator 20 can perform at least one of the following on the incident converging beam: incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering, to output a first modulated beam. The first spatial light modulator 20 can not only achieve high-precision adjustment of the incident light numerical aperture angle, but also achieve precise adjustment of the incident light incident position, thereby achieving precise alignment of the optical path or off-axis beam output. At the same time, it can also achieve spatial filtering of the incident light. The first spatial light modulator 20 can integrate the functions of incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering, making the light source system based on the spatial light modulator simple and compact.

[0135] 2. A second spatial light modulator 40 is provided in the incident light path of the light-emitting component 50. The second spatial light modulator 40 can modulate the output position of the first modulated beam after straightening to accurately adjust the projection position of the target modulated beam on the target imaging area 80. It can also perform pattern modulation on the first modulated beam after straightening to form a second modulated beam carrying the target pattern, thereby accurately presenting the target pattern in the target imaging area 80.

[0136] 3. A first light-absorbing element 60 is provided on one side of the output end of the first spatial light modulator 20 to facilitate the absorption of stray light reflected from the non-light-passing area on the first spatial light modulator 20 by the first light-absorbing element 60; a second light-absorbing element 70 is provided on one side of the output end of the second spatial light modulator 40 to facilitate the absorption of stray light reflected from the non-light-passing area on the second spatial light modulator 40 by the second light-absorbing element 70.

[0137] 4. Selecting the transmissive first spatial light modulator 20 and the reflective first spatial light modulator 20, as well as the transmissive second spatial light modulator 40 and the reflective second spatial light modulator 40, based on the actual spatial layout of the optical path can improve the flexibility of the deployment of the light source system based on the spatial light modulator, enabling the light source system based on the spatial light modulator to flexibly adapt to different application scenarios.

[0138] The following describes specific embodiments of this application based on the above technical solution.

[0139] Example 1

[0140] Please see Figure 1 and Figure 5-8Embodiment 1 provides a light source system based on a spatial light modulator, comprising: a light source assembly 10 for emitting a converging beam; a first spatial light modulator 20 disposed on the outgoing optical path of the light source assembly 10 for receiving the converging beam and capable of performing at least one of incident light numerical aperture angle adjustment, incident position adjustment, and spatial filtering on the incident converging beam to output a first modulated beam; a first lens group 30 disposed on the outgoing optical path of the first spatial light modulator 20 for receiving the first modulated beam and collimating the first modulated beam; a second spatial light modulator 40 disposed on the outgoing optical path of the first lens group 30 for receiving the collimated first modulated beam and capable of performing outgoing position modulation on the collimated first modulated beam to output a second modulated beam; and a light-emitting assembly 50 disposed on the outgoing optical path of the second spatial light modulator 40 for receiving the second modulated beam and capable of performing at least one of converging and focusing processing on the second modulated beam to output a target modulated beam.

[0141] Both the first spatial light modulator 20 and the second spatial light modulator 40 are reflective spatial light modulators.

[0142] The light source assembly 10 includes a light source 11, a third plano-convex lens 141, a fourth plano-convex lens 142, a light homogenizer 13, a first plano-convex lens 121, and a second plano-convex lens 122. The light source 11, the third plano-convex lens 141, the fourth plano-convex lens 142, the light homogenizer 13, the first plano-convex lens 121, and the second plano-convex lens 122 are arranged sequentially along the optical axis. The first spatial light modulator 20 is disposed on the output light path of the second plano-convex lens 122.

[0143] The first lens group 30 includes a first concave lens 31 and a first convex lens 32. The first concave lens 31 is disposed on the reflected light path of the first spatial light modulator 20. The first concave lens 31 and the first convex lens 32 are disposed on the same optical axis. The second spatial light modulator 40 is disposed on the outgoing light path of the first convex lens 32.

[0144] The light-emitting assembly 50 includes a second convex lens 511, a third convex lens 512, and an objective lens 52. The second convex lens 511 is disposed on the reflected light path of the second spatial light modulator 40, and the second convex lens 511, the third convex lens 512, and the objective lens 52 are arranged along the same optical axis.

[0145] Light source 11 can be a halogen lamp.

[0146] The third plano-convex lens 141 and the fourth plano-convex lens 142 work together to converge the emitted light beam from the light source 11 and project the converged emitted light beam onto the light homogenizer 13.

[0147] The light homogenizer 13 can be a light homogenizer bar, used to receive the outgoing light beam after the converging process, homogenize the outgoing light beam after the converging process, and project the outgoing light beam after the homogenization process onto the first plano-convex lens 121.

[0148] The first plano-convex lens 121 and the second plano-convex lens 122 cooperate to converge the received uniform light-emitting beam to obtain a converged beam, and project the converged beam onto the first spatial light modulator 20.

[0149] The light source system based on the spatial light modulator also includes a controller, and the first spatial light modulator 20 is electrically connected to the controller.

[0150] The first spatial light modulator 20 can receive the converging beam emitted from the second plano-convex lens 122 and perform preset modulation processing on the incident converging beam to obtain the first modulated beam; the preset modulation processing includes incident light numerical aperture angle adjustment, incident position adjustment and spatial filtering.

[0151] Based on the aperture size adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture size adjustment to adjust the numerical aperture angle of the converging beam emitted from the second plano-convex lens 122, thereby adjusting the system resolution and meeting the optical system requirements of multiple angle incident light.

[0152] Based on the aperture position adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture position adjustment to adjust the incident position of the converging beam emitted from the second plano-convex lens 122 into the first spatial light modulator 20, thereby causing the first modulated beam to be projected off-axis onto the first concave lens 31 to improve the focusing depth, resolution and contrast, and increase the depth of field; or, thereby causing the first modulated beam to be projected coaxially onto the first concave lens 31 to achieve optical path alignment. At this time, the converging beam emitted from the second plano-convex lens 122 can easily pass through the center of the aperture of the first spatial light modulator 20.

[0153] Based on the aperture shape adjustment signal output by the controller, the first spatial light modulator 20 can perform high-precision aperture shape adjustment to spatially filter the incident converging beam to obtain beams with different information, such as high-frequency information or low-frequency information. It can also achieve noise reduction or interference reduction as needed.

[0154] The first spatial light modulator 20 includes multiple independent units. The controller can control the multiple independent units. The multiple independent units can independently receive control signals from the controller and adjust the aperture size, position or shape based on the control signals they receive to form a first modulated beam.

[0155] The first concave lens 31 and the first convex lens 32 cooperate to receive the first modulated beam emitted from the first spatial light modulator 20 and collimate the first modulated beam so that the collimated first modulated beam is parallel and uniformly incident into the second spatial light modulator 40.

[0156] The second spatial light modulator 40 can modulate the exit position of the first modulated beam after alignment processing to adjust the projection position of the target modulated beam on the target imaging area 80. It can also perform pattern modulation on the first modulated beam after alignment processing to form a second modulated beam carrying the target pattern, thereby presenting the target pattern in the target imaging area 80.

[0157] The second spatial light modulator 40 is electrically connected to the controller; the controller can control the second spatial light modulator 40 to load the target pattern, so that the second spatial light modulator 40 emits a second modulated beam carrying the target pattern, thereby enabling the target pattern loaded on the second spatial light modulator 40 to be accurately reflected on the target imaging area 80. That is to say, the size of the target pattern loaded on the second spatial light modulator 40, the position of the target pattern relative to the outer contour of the second spatial light modulator 40, and the pattern of the target pattern can all be accurately reflected on the target imaging area 80.

[0158] The second convex lens 511 and the third convex lens 512 work together to converge the second modulated beam emitted from the second spatial light modulator 40 and project the converged second modulated beam onto the objective lens 52.

[0159] Objective lens 52 can receive the converged second modulated beam and focus the converged second modulated beam to output the target modulated beam.

[0160] The light source system based on the spatial light modulator also includes a first light absorber 60, which is disposed on one side of the output end of the reflective first spatial light modulator 20. That is, the first light absorber 60 is disposed on the reflected light path of the reflective first spatial light modulator 20 to absorb stray light reflected from the non-light-passing area on the first spatial light modulator 20.

[0161] The first light-absorbing element 60 can be a first black light-absorbing cloth.

[0162] The light source system based on the spatial light modulator also includes a second light absorber 70, which is disposed on one side of the output end of the reflective second spatial light modulator 40. That is, the second light absorber 70 is disposed on the reflected light path of the reflective second spatial light modulator 40 to absorb stray light reflected from the non-light-passing area on the second spatial light modulator 40.

[0163] The second light-absorbing element 70 can be a second black light-absorbing cloth.

[0164] Example 2

[0165] Please see Figure 2 The difference between Embodiment 2 and Embodiment 1 lies in the configuration of the first spatial light modulator 20 and the second spatial light modulator 40, as well as the selection of the light source 11. The similarities with Embodiment 1 will not be repeated here. The differences between Embodiment 2 and Embodiment 1 are explained as follows:

[0166] Both the first spatial light modulator 20 and the second spatial light modulator 40 are transmissive spatial light modulators.

[0167] The first concave lens 31 is disposed on the transmission light path of the first spatial light modulator 20, and the second convex lens 511 is disposed on the transmission light path of the second spatial light modulator 40.

[0168] A first annular light-absorbing element is disposed between the first spatial light modulator 20 and the second plano-convex lens 122 to absorb stray light present in the non-light-passing area of ​​the first spatial light modulator 20.

[0169] A second annular light-absorbing element is provided between the second spatial light modulator 40 and the first convex lens 32 to absorb stray light present in the non-light-passing area of ​​the second spatial light modulator 40.

[0170] Light source 11 can be an LED light.

[0171] Example 3

[0172] Please see Figure 3 The difference between Embodiment 3 and Embodiment 1 lies in the configuration of the first spatial light modulator 20 and the second spatial light modulator 40, as well as the selection of the light source 11. The similarities with Embodiment 1 will not be repeated here. The differences between Embodiment 3 and Embodiment 1 are explained as follows:

[0173] The first spatial light modulator 20 is a transmissive spatial light modulator, and the second spatial light modulator 40 is a reflective spatial light modulator.

[0174] The first concave lens 31 is disposed on the transmission light path of the first spatial light modulator 20, and the second convex lens 511 is disposed on the reflection light path of the second spatial light modulator 40.

[0175] A first annular light-absorbing element is disposed between the first spatial light modulator 20 and the second plano-convex lens 122 to absorb stray light present in the non-light-passing area of ​​the first spatial light modulator 20.

[0176] A second light-absorbing element 70 is provided in the reflected light path of the second spatial light modulator 40 to absorb stray light reflected from the non-light-passing area on the second spatial light modulator 40.

[0177] Light source 11 can be an LED light.

[0178] Example 4

[0179] Please see Figure 4 The difference between Embodiment 4 and Embodiment 1 lies in the arrangement of the first spatial light modulator 20 and the second spatial light modulator 40, as well as the selection of the light source 11. The similarities with Embodiment 1 will not be repeated here. The differences between Embodiment 4 and Embodiment 1 are explained as follows:

[0180] The first spatial light modulator 20 is a reflective spatial light modulator, and the second spatial light modulator 40 is a transmissive spatial light modulator.

[0181] The first concave lens 31 is disposed on the reflected light path of the first spatial light modulator 20, and the second convex lens 511 is disposed on the transmitted light path of the second spatial light modulator 40.

[0182] A first light-absorbing element 60 is provided on the reflected light path of the first spatial light modulator 20 to absorb stray light reflected from the non-light-passing area on the first spatial light modulator 20.

[0183] A second annular light-absorbing element is provided between the second spatial light modulator 40 and the first convex lens 32 to absorb stray light present in the non-light-passing area of ​​the second spatial light modulator 40.

[0184] Light source 11 can be an LED light.

[0185] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A light source system based on a spatial light modulator, characterized in that, include: A light source assembly (10) is used to emit a converging beam; A first spatial light modulator (20) is disposed on the outgoing light path of the light source assembly (10) for receiving the converging beam and for performing at least one of incident light numerical aperture angle adjustment, incident position adjustment and spatial filtering on the incident converging beam to output a first modulated beam. The first lens group (30) is disposed on the outgoing light path of the first spatial light modulator (20) for receiving the first modulated beam and collimating the first modulated beam. The second spatial light modulator (40) is disposed on the outgoing light path of the first lens group (30) for receiving the first modulated beam after collimation processing, and is capable of performing pattern modulation and outgoing position modulation on the first modulated beam after collimation processing to output a second modulated beam carrying the target pattern. The light-emitting component (50) is disposed on the output light path of the second spatial light modulator (40) for receiving the second modulated beam and for performing at least one of focusing and convergence processing on the second modulated beam to output the target modulated beam.

2. The light source system based on a spatial light modulator according to claim 1, characterized in that, The first spatial light modulator (20) can project the incident converging beam off-axis or coaxially, so that the first modulated beam is projected off-axis or coaxially to the first lens group (30), and the first modulated beam can be projected to the target imaging area (80) through the first lens group (30), the second spatial light modulator (40) and the light output component (50).

3. The light source system based on a spatial light modulator according to claim 1, characterized in that, The first spatial light modulator (20) can spatially filter the incident converging beam to form a first modulated beam projected onto the first lens group (30). The first modulated beam can be projected onto the target imaging area (80) via the first lens group (30), the second spatial light modulator (40), and the light output component (50).

4. The light source system based on a spatial light modulator according to claim 1, characterized in that, The second modulated beam can be projected onto the target imaging area (80) via the light-emitting component (50) to present the target pattern in the target imaging area (80).

5. The light source system based on a spatial light modulator according to claim 1, characterized in that, The first spatial light modulator (20) is capable of transmitting and / or reflecting the incident light beam; And / or, The second spatial light modulator (40) is capable of transmitting and / or reflecting the incident light beam.

6. The light source system based on a spatial light modulator according to any one of claims 1-5, characterized in that, The light source assembly (10) includes a light source (11) and a second lens group (12); The second lens group (12) is disposed in the output light path of the light source (11), and the first spatial light modulator (20) It is positioned on the outgoing light path of the second lens group (12); The light source (11) is used to generate and output an outgoing light beam; the second lens group (12) is used to receive the outgoing light beam, and to converge the outgoing light beam to obtain the converged light beam, and to project the converged light beam onto the first spatial light modulator (20).

7. The light source system based on a spatial light modulator according to any one of claims 1-5, characterized in that, The light-emitting assembly (50) includes a third lens group (51) and an objective lens (52); The third lens group (51) is disposed on the output light path of the second spatial light modulator (40), and the objective lens (52) is disposed on the same optical axis as the third lens group (51). The third lens group (51) is used to receive the second modulated beam and to converge the second modulated beam to output the converged second modulated beam. The objective lens (52) is used to receive the converged second modulated beam and to focus the converged second modulated beam to output the target modulated beam.

8. The light source system based on a spatial light modulator according to any one of claims 1-5, characterized in that, The light source system based on the spatial light modulator also includes a first light-absorbing element (60); The first light-absorbing element (60) is disposed on one side of the emitting end of the first spatial light modulator (20); The first light-absorbing element (60) is used to absorb stray light reflected from the non-light-passing area on the first spatial light modulator (20).

9. The light source system based on a spatial light modulator according to any one of claims 1-5, characterized in that, The light source system based on the spatial light modulator also includes a second light-absorbing element (70); The second light-absorbing element (70) is disposed on one side of the emitting end of the second spatial light modulator (40); The second light-absorbing element (70) is used to absorb stray light reflected from the non-light-passing area on the second spatial light modulator (40).

10. The light source system based on a spatial light modulator according to claim 6, characterized in that, The light source assembly (10) also includes a light-diffusing element (13); The light homogenizer (13) is disposed on the outgoing light path of the light source (11), and the second lens group (12) is disposed on the transmission light path of the light homogenizer (13). The light-diffusing element (13) is used to receive the emitted light beam, perform light-diffusing processing on the emitted light beam, and project the light-diffusing emitted light beam after light-diffusing processing onto the second lens group (12).

11. The light source system based on a spatial light modulator according to claim 10, characterized in that, The light source assembly (10) also includes a fourth lens group (14); The fourth lens group (14) is disposed on the outgoing light path of the light source (11), and the light homogenizer (13) is disposed on the outgoing light path of the fourth lens group (14); The fourth lens group (14) is used to receive the emitted light beam, converge the emitted light beam, and project the converged emitted light beam onto the light homogenizer (13).

12. An optical system, characterized in that, The light source system based on a spatial light modulator as described in any one of claims 1-11.

Citation Information

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