Method for detecting the flatness of a ring

By detecting the gap between the protruding part of the ring component and the standard flatness detection surface of the tooling fixture, the problem of the protruding part of the ring component not being at the same level was solved, realizing rapid qualification inspection of the ring component and ensuring the normal operation of the sputtering machine.

CN116642406BActive Publication Date: 2026-06-16KONFOONG MATERIALS INTERNATIONAL CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
KONFOONG MATERIALS INTERNATIONAL CO LTD
Filing Date
2023-05-24
Publication Date
2026-06-16

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    Figure CN116642406B_ABST
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Abstract

The application discloses a ring piece flatness detection method and belongs to the technical field of flatness detection. The ring piece flatness detection method comprises the following steps: placing a standard flatness detection surface of a tool clamp upward on a workbench surface; placing a ring piece on the tool clamp, and placing a protruding part around the ring piece above the standard flatness detection surface; inserting a plug gauge between each protruding part and the standard flatness detection surface to obtain the spacing of the gap between the protruding part and the standard flatness detection surface; when the spacing of the gap between each protruding part and the standard flatness detection surface is within an error value range, the ring piece is determined to be qualified; and when the spacing of the gap between the protruding part and the standard flatness detection surface exceeds the error value range, the ring piece is determined to be unqualified. Only the ring piece to be detected is placed on the tool clamp, and the plug gauge is inserted into the gap, so that whether each protruding part of the detection ring piece is on the same horizontal plane can be quickly detected.
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