Flow control tee valve and temperature control device

Abstract

Provided is a three-way valve for flow control and a temperature control device, which improves the sealing property of a fluid at a low temperature of about -85°C compared to a case in which a pressure acting portion does not have a cylindrical communication member whose both ends in the length direction are sealed by a sealing mechanism. The sealing mechanism has a covering member that is substantially U-shaped in cross section and is composed of synthetic resin, and is forced in the opening direction by a spring member composed of metal. The pressure acting portion has a cylindrical communication member that communicates the inner faces of first and second valve port forming members with first and second flow ports, and both ends in the length direction of the communication member are sealed by a sealing mechanism. The sealing mechanism has a covering member that is substantially U-shaped in cross section and is composed of synthetic resin, and is forced in the opening direction by a spring member composed of metal.

Description

Technical Field

[0001] This invention relates to a three-way valve for flow control and a temperature control device. Background Technology

[0002] Previously, the applicant had proposed solutions disclosed in Patent Document 1, etc., regarding the technology of three-way valves for flow control.

[0003] Patent Document 1 comprises: a valve body having a valve seat having a first valve port with a rectangular cross-section for fluid flow and a second valve port with a rectangular cross-section for fluid flow, the valve seat being formed by a cylindrical cavity; first and second valve port forming members mounted on the valve body, forming the first and second valve ports respectively; a cylindrical valve core rotatably disposed within the valve seat of the valve body, having an opening that simultaneously switches the first valve port from a closed state to an open state and the second valve port from an open state to a closed state; a pressure actuation unit that applies the pressure of the fluid leaking from the gap between the valve core and the valve seat to the first and second valve port forming members, suppressing positional changes of the valve core when the valve core opens and closes the first and second valve ports; and a drive mechanism that rotatably drives the valve core.

[0004] Prior art literature

[0005] Patent documents

[0006] Patent Document 1: Japanese Patent Application Publication No. 2018-204680 Summary of the Invention

[0007] The problem that the invention aims to solve

[0008] The purpose of this invention is to provide a three-way valve for flow control and a temperature control device that improves the sealing performance for fluids at low temperatures of around -85°C compared to cases where the pressure action part does not have first and second flow path forming members (the first and second flow path forming members are members installed on the valve body and forming the first and second flow outlets, and are sealed at both ends along the length direction by sealing mechanisms with a generally U-shaped cross section and made of synthetic resin, the sealing mechanisms being forced in the opening direction by metal spring members).

[0009] Solution for solving the problem

[0010] The invention described in technical solution 1 is a three-way valve for flow control, characterized in that,

[0011] The above-mentioned three-way valve for flow control has the following features:

[0012] The valve body has a valve seat consisting of a cylindrical cavity with a first valve port in a rectangular cross-section for fluid to flow out and a second valve port in a rectangular cross-section for fluid to flow out, and first and second outlet ports for the fluid to flow out from the first and second valve ports to the outside, respectively.

[0013] The first and second valve port forming members are installed on the valve body and respectively form the first and second valve ports;

[0014] A cylindrical valve core is rotatably disposed in the valve seat of the valve body and has an opening. When the first valve port is switched from the closed state to the open state, the second valve port is switched from the open state to the closed state.

[0015] A pressure-acting part applies the pressure of the fluid leaking from the gap between the valve core and the valve seat to the first and second valve port forming members, suppressing positional changes of the valve core when the valve core opens and closes the first and second valve ports; and

[0016] The drive mechanism rotates to drive the valve core.

[0017] The pressure action part has a first and a second flow path forming member, which is a member installed on the valve body and forms the first and second flow outlets. The two ends of the first and second flow path forming members along the length direction are sealed by a sealing mechanism with a cross section of approximately U-shape and made of synthetic resin. The sealing mechanism is forced in the opening direction by a metal spring member.

[0018] The invention described in technical solution 2 is a three-way valve for flow control, characterized in that,

[0019] The above-mentioned three-way valve for flow control has the following features:

[0020] The valve body has a valve seat consisting of a cylindrical cavity with a first valve port in a rectangular cross-section for the inflow of a first fluid and a second valve port in a rectangular cross-section for the inflow of a second fluid, and a first and a second inlet for the first and second fluids to flow into the first and second valve ports from the outside, respectively.

[0021] The first and second valve port forming members are installed on the valve body and respectively form the first and second valve ports;

[0022] A cylindrical valve core is rotatably disposed in the valve seat of the valve body and has an opening. When the first valve port is switched from the closed state to the open state, the second valve port is switched from the open state to the closed state.

[0023] A pressure-acting part applies the pressure of the fluid leaking from the gap between the valve core and the valve seat to the first and second valve port forming members, suppressing positional changes of the valve core when the valve core opens and closes the first and second valve ports; and

[0024] The drive mechanism rotates to drive the valve core.

[0025] The pressure action part has a first and a second flow path forming member, which is a member installed on the valve body and forms the first and second flow inlets. The two ends of the first and second flow path forming members along the length direction are sealed by a sealing mechanism with a cross section of approximately U-shape and made of synthetic resin. The sealing mechanism is forced in the opening direction by a metal spring member.

[0026] The invention described in technical solution 3 is the three-way valve for flow control described in technical solution 1, characterized in that one end of the first and second flow path forming members along the length direction is sealed by a first sealing mechanism relative to the inner surface of the first and second valve port forming members, and the other end of the first and second flow path forming members along the length direction is sealed by a second sealing mechanism relative to the inner surface of the valve body.

[0027] The invention described in technical solution 4 is the three-way valve for flow control described in technical solution 3, characterized in that one end of the first and second flow path forming members along the length direction is formed into a thin-walled cylindrical shape, and the inner circumferential surface of the end of the first and second valve port forming members is sealed by a first sealing mechanism; the other end of the first and second flow path forming members along the length direction is formed into a cylindrical shape with a thicker wall than the first end, and is sealed by a second sealing mechanism relative to the inner circumferential surface of the valve body.

[0028] The invention described in technical solution 5 is the three-way valve for flow control described in technical solution 4, characterized in that the first sealing mechanism is configured to open toward the other end of the first and second flow path forming members, and the second sealing mechanism is configured to open toward one end of the first and second flow path forming members.

[0029] The invention described in technical solution 6 is the three-way valve for flow control described in technical solution 5, characterized in that the first sealing mechanism is disposed on a stepped portion on the end face of the first and second flow path forming members on the side of the pressure action portion.

[0030] The first and second pressure plates of the first and second valve port forming members are provided with a step portion that is closed on the end face of the first and second flow path forming members on the side of the pressure action portion, so that the pressure of the pressure action portion acts on the first and second valve port forming members.

[0031] The invention described in technical solution 7 is the three-way valve for flow control described in technical solution 1, characterized in that the sealing mechanism is composed of a fully sealed component.

[0032] The invention described in technical solution 8 is the three-way valve for flow control described in technical solution 7, characterized in that the sealing mechanism comprises two identical fully sealed components arranged back to back.

[0033] The invention described in technical solution 9 is a temperature control device, characterized in that,

[0034] The above-mentioned temperature control device includes:

[0035] A temperature control mechanism having a temperature control flow path for the flow of a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio.

[0036] The first supply mechanism supplies the aforementioned cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side.

[0037] The second supply mechanism supplies the aforementioned high-temperature side fluid at a predetermined second temperature that has been adjusted to the high-temperature side.

[0038] A mixing mechanism, connected to the first and second supply mechanisms, mixes the low-temperature fluid supplied from the first supply mechanism with the high-temperature fluid supplied from the second supply mechanism and supplies it to the temperature control flow path; and

[0039] A flow control valve controls the flow rate of the temperature control fluid after it has passed through the aforementioned temperature control flow path and distributes it to the first supply mechanism and the second supply mechanism.

[0040] The flow control valve described above is a three-way valve for flow control, as described in any one of technical solutions 1, 3 to 8.

[0041] The invention described in technical solution 10 is a temperature control device, characterized in that,

[0042] The above-mentioned temperature control device includes:

[0043] A temperature control mechanism having a temperature control flow path for the flow of a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio.

[0044] The first supply mechanism supplies the aforementioned cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side.

[0045] A second supply mechanism supplies the aforementioned high-temperature side fluid, which is adjusted to a predetermined second temperature on the high-temperature side; and

[0046] A flow control valve, connected to the first and second supply mechanisms, adjusts the mixing ratio of the low-temperature fluid supplied from the first supply mechanism and the high-temperature fluid supplied from the second supply mechanism, and directs the mixture into the temperature control flow path.

[0047] The flow control valve described in any one of technical solutions 2 to 8 above is a three-way valve for flow control.

[0048] The effects of the invention

[0049] According to the present invention, a three-way valve for flow control and a temperature control device can be provided, which improves the sealing performance for fluids at low temperatures of around -85°C compared to cases where the pressure action part does not have first and second flow path forming members (the first and second flow path forming members are members installed on the valve body and forming the first and second flow outlets, and are sealed at both ends along the length direction by sealing mechanisms with a generally U-shaped cross section and made of synthetic resin, the sealing mechanisms being forced in the opening direction by metal spring members). Attached Figure Description

[0050] Figure 1(a) is a front view of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0051] Figure 1(b) is a right view of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0052] Figure 1(c) is a bottom view of the actuator section of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0053] Figure 2 Figure 1(b) is a cross-sectional view along line A-A of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0054] Figure 3 Figure 1(a) is a cross-sectional view along line B-B of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0055] Figure 4 This is a cross-sectional perspective view showing the main part of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0056] Figure 5(a) is a three-dimensional diagram showing the valve seat.

[0057] Figure 5(b) is a top view of the valve seat.

[0058] Figure 6 This is a diagram showing the relationship between the valve seat and the valve stem.

[0059] Figure 7(a) is a three-dimensional view showing a partial cross-section of the fully sealed component.

[0060] Figure 7(b) is a structural diagram showing the cross-section of the fully sealed component.

[0061] Figure 8 This is a cross-sectional view showing the installation state of the fully sealed component.

[0062] Figure 9 This is a structural diagram showing a modified example of a fully sealed component.

[0063] Figure 10(a) is a three-dimensional diagram showing the structure of the anti-loosening washer.

[0064] Figure 10(b) is a front view showing the anti-loosening washer.

[0065] Figure 10(c) is a side view showing a partial cross-section of the anti-loosening washer.

[0066] Figure 11 This is a three-dimensional diagram showing the structure of the adjustment ring.

[0067] Figure 12(a) is a configuration diagram showing the operation of the valve stem with one valve port set to fully open.

[0068] Figure 12(b) is a diagram showing the state in which the valve stem operates with both valve ports partially open.

[0069] Figure 13(a) is a three-dimensional diagram showing the valve stem.

[0070] Figure 13(b) is a front view of the valve stem.

[0071] Figure 14(a) is a diagram showing the operation of the valve stem.

[0072] Figure 14(b) is a diagram showing the operation of the valve stem.

[0073] Figure 15 This is a cross-sectional view showing the operation of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0074] Figure 16 This is a cross-sectional view showing an example of a three-way valve type motor valve according to Embodiment 2 of the present invention, which is a three-way valve for flow control.

[0075] Figure 17 This is a cross-sectional view showing an example of a three-way valve type motor valve according to Embodiment 3 of the present invention, which is a three-way valve for flow control.

[0076] Figure 18 This is a conceptual diagram showing a temperature-maintaining device (cooler device) for a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention.

[0077] Figure 19 This is a conceptual diagram showing a temperature-maintaining device (cooler device) for a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 2 of the present invention. Detailed Implementation

[0078] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0079] [Implementation Method 1]

[0080] Figures 1(a), (b), and (c) are front views, left side views, and bottom views of a three-way valve type motor valve, which is an example of a three-way valve for flow control according to Embodiment 1 of the present invention. Figure 2 This is a cross-sectional view along line A-A in Figure 1(b). Figure 3 This is a cross-sectional view along line B-B in Figure 1(a). Figure 4 This is a cross-sectional perspective view showing the main parts of a three-way valve type motor valve.

[0081] The three-way valve type motor valve 1 is configured as a rotary three-way valve. As shown in Figure 1, the three-way valve type motor valve 1 is generally composed of the following parts: a valve part 2 disposed at the lower part; an actuator part 3 disposed at the upper part; and a sealing part 4 and a coupling part 5 disposed between the valve part 2 and the actuator part 3.

[0082] Valve section 2, as shown Figures 2 to 4 As shown, the valve body 6 is formed from a metal such as SUS and is approximately rectangular in shape. In the valve body 6, as... Figure 2 as well as Figure 3As shown, on one side (the left side in the example figure), there are: a first outlet 7 for fluid to flow out; and a first valve port 9 with a rectangular cross-section, which is connected to a valve seat 8 made of a cylindrical cavity, as an example of a flow port.

[0083] In this embodiment 1, the first outlet 7 and the first valve port 9 are not directly provided on the valve body 6. Instead, the first outlet 7 and the first valve port 9 are provided by installing a first valve seat 70, which is an example of a first valve port forming member forming the first valve port 9, and a first flow path forming member 15 forming the first outlet 7 on the valve body 6.

[0084] As shown in FIG. 5, the first valve seat 70 integrally comprises: a cylindrical portion 71 disposed on the outer side of the valve body 6 and formed into a cylindrical shape; and a tapered portion 72 formed into a tapered shape with its outer diameter decreasing towards the inner side of the valve body 6. Inside the tapered portion 72 of the first valve seat 70, a first valve port 9 with a rectangular cross-section (square in this embodiment 1) is formed. In addition, as described later, one end of the first flow path forming member 15, which is configured to form the first outlet 7, is inserted into the interior of the cylindrical portion 71 of the first valve seat 70 in a sealed (closed) state.

[0085] For example, polyimide (PI) resin can be used as the material for the first valve seat 70. Alternatively, so-called "super engineering plastics" can be used as the material for the first valve seat 70. Super engineering plastics possess superior heat resistance and mechanical strength at high temperatures compared to ordinary engineering plastics. Examples of super engineering plastics include polyetheretherketone (PEEK), polyphenylene sulfide (PPS), polyethersulfone (PES), polyamide-imide (PAI), liquid crystal polymer (LCP), polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), or composites thereof. Furthermore, the material for the first valve seat 70 can be, for example, "TECAPEEK" (registered trademark), manufactured by Ensinger Japan Co., Ltd., as a PEEK resin raw material for machining, and particularly, "TECAPEEK TF 10blue" (trade name), which is mixed with 10% PTFE and exhibits excellent lubrication properties.

[0086] like Figure 3 as well as Figure 4As shown, in the valve body 6, a recess 75 with a shape similar to that of the first valve seat 70 is formed by machining or the like, corresponding to the outer shape of the first valve seat 70. The recess 75 has: a cylindrical portion 75a corresponding to the cylindrical portion 71 of the first valve seat 70; and a tapered portion 75b corresponding to the tapered portion 72. The length of the cylindrical portion 75a of the valve body 6 is set to be longer than that of the cylindrical portion 71 of the first valve seat 70. As will be described later, the cylindrical portion 75a of the valve body 6 forms part of the first pressure actuating portion 94. The first valve seat 70 is mounted relative to the recess 75 of the valve body 6 so that it can move in directions approaching or away from the valve stem 34, which serves as the valve core.

[0087] With the first valve seat 70 installed in the recess 75 of the valve body 6, a small gap is formed between the outer peripheral surface of the first valve seat 70 and the inner peripheral surface of the recess 75 of the valve body 6. Fluid flowing into the interior of the valve seat 8 may leak through the small gap and flow into the outer peripheral area of ​​the first valve seat 70. In addition, the fluid leaking into the outer peripheral area of ​​the first valve seat 70 is directed toward the first pressure actuation part 94, which is formed by the space located outside the cylindrical portion 71 of the first valve seat 70. The first pressure actuation part 94 causes the pressure of the fluid to act on the surface 70a of the first valve seat 70 opposite to the valve stem 34. In addition to the fluid flowing out through the first valve port 9, the fluid flowing into the interior of the valve seat 8 also flows out through the second valve port 18 as described later. The first pressure actuation part 94 is defined by a state in which it is sealed with the first outlet 7 by the first flow path forming member 15.

[0088] The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid determined by the opening and closing degree of the valve stem 34. The fluid flowing into the interior of the valve seat 8 also leaks through the first valve port 9 and the second valve port 18 into the tiny gap formed between the outer peripheral surfaces of the valve seat 8 and the valve stem 34. Therefore, in the first pressure-acting part 94 corresponding to the first valve seat 70, in addition to the fluid flowing in (leaking) from the first valve port 9, there is also the fluid flowing in (leaking) from the second valve port 18 into the tiny gap formed between the outer peripheral surfaces of the valve seat 8 and the valve stem 34.

[0089] As shown in Figure 5(b), at the end of the tapered portion 72 of the first valve seat 70, a recess 74, which is an example of a clearance reduction portion and has a top-view arc shape, is provided. This recess 74 constitutes part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed in the valve body 6. The radius of curvature R of the recess 74 is set to be approximately equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve stem 34. To prevent the valve seat 8 of the valve body 6 from engaging with the valve stem 34 rotating inside the valve seat 8, a small gap is formed between the valve seat 8 and the outer peripheral surface of the valve stem 34. The recess 74 of the first valve seat 70 is as follows... Figure 6As shown, the first valve seat 70 is installed onto the valve body 6 either by protruding from the valve seat 8 of the valve body 6 toward the valve stem 34, or by contacting the outer peripheral surface of the valve stem 34. As a result, the gap G between the valve stem 34 and the inner surface of the valve seat 8 of the valve body 6 (which is a member facing the valve stem 34) becomes a value that is locally reduced by the amount by which the recess 74 of the first valve seat 70 protrudes compared to other parts of the valve seat 8. Thus, the gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34 is set to a desired value (G1 < G2) that is narrower (smaller) than the gap G2 between the valve stem 34 and the inner surface of the valve seat 8. Alternatively, the gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34 can also be a state where the recess 74 of the valve seat 70 contacts the valve stem 34, i.e., a state with no gap (gap G1 = 0).

[0090] However, when the recess 74 of the first valve seat 70 contacts the valve stem 34, there is a possibility that the driving torque of the valve stem 34 may increase due to the contact resistance of the recess 74 when the valve stem 34 is rotated. Therefore, the degree of contact between the recess 74 of the first valve seat 70 and the valve stem 34 should be adjusted taking into account the rotational torque of the valve stem 34. That is, it should be adjusted so that the driving torque of the valve stem 34 does not increase or, even if it does increase, the increase is small and does not hinder the rotation of the valve stem 34.

[0091] like Figure 3 as well as Figure 4 As shown, the first flow path forming member 15 is formed into a cylindrical shape using a metal such as SUS or a synthetic resin such as polyimide (PI) resin. The first flow path forming member 15 has a first outlet 7 formed internally, which communicates with the first valve port 9 regardless of the positional change of the first valve seat 70. Approximately half of the first flow path forming member 15 located on the side of the first valve seat 70 is formed as a thin-walled cylindrical portion 15a, which is relatively thin-walled. Furthermore, approximately half of the first flow path forming member 15 located on the side opposite to the first valve seat 70 is formed as a thick-walled cylindrical portion 15b, which is thicker than the thin-walled cylindrical portion. The inner surface of the first flow path forming member 15 is formed into a cylindrical shape. On the outer periphery of the first flow path forming member 15, between the thin-walled cylindrical portion 15a and the thick-walled cylindrical portion 15b, an annular flange portion 15c, which is thicker in the radial direction, is provided. The outer peripheral end of the flange 15c is configured to movably contact the inner peripheral surface of the recess 75.

[0092] Between the cylindrical portion 71 of the first valve seat 70 and the thin-walled cylindrical portion 15a of the first flow path forming member 15, such as Figure 3As shown, the valve is sealed (closed) by a fully sealing component 120, which is an example of the first sealing mechanism. This fully sealing component 120 is made of synthetic resin and has a roughly U-shaped cross-section. It is forced in the opening direction by a metal spring member. As shown in FIG. 5, a stepped portion 73 for accommodating the fully sealing component 120 is provided on the inner circumferential surface of the cylindrical portion 71 of the first valve seat 70 at the end located on the outer side of the valve body 6.

[0093] As shown in Figure 7, the fully sealed component 120 is a ring-shaped member arranged around the entire circumference of the inner circumference of the cylindrical portion 71 of the first valve seat 70. The fully sealed component 120 consists of a spring member 121 and a sealing member 122. The spring member 121 has a generally U-shaped cross-section and is made of a metal such as stainless steel. The sealing member 122, which applies force in the opening direction via the spring member 121, has a generally U-shaped cross-section and is made of a synthetic resin such as polytetrafluoroethylene (PTFE). The spring member 121 is formed in a generally U-shaped cross-section from a metal such as stainless steel. The elastic modulus of the spring member 121 is adjusted by providing narrow slits or grooves at regular intervals along its length or by appropriately setting the wall thickness. (See Figure 7 and...) Figure 8 As shown, the sealing member 122 includes: a base end portion 122a, which is arranged in a direction that seals between the stepped portion 73 of the cylindrical portion 71 of the first valve seat 70 to be sealed and the thin-walled cylindrical portion 15a of the first flow path forming member 15; and two lips 122b and 122c, which are arranged parallel to each other facing each other from both ends of the base end portion 122a along the circumferential surfaces of the two members to be sealed, in the same direction (outer axial direction of the first valve seat 70). The ends of the two lips 122b and 122c open outward along the axial direction of the first valve seat 70. The opening of the full-seal member 120 opens towards the first pressure-acting portion 94 and is subjected to pressure from the first pressure-acting portion 94. As shown in Figure 7(b), at the end of one of the lips 122b, a protrusion 122d is provided, protruding inward with a thickness equivalent to the wall thickness of the spring member 121 to prevent the spring member 121 from disengaging. The end portions 122b' and 122c' of the lips 122b and 122c are formed into a curved shape, with their outer peripheral surfaces protruding outward in a radial direction from the middle to the end. The end portions 122b' and 122c' of the lips 122b and 122c are in close contact with the inner peripheral surface of the first valve seat 70 and the outer peripheral surface of the first flow path forming member 15, thereby improving the sealing performance.

[0094] Furthermore, the spring member 121 of the fully sealed component 120 is not limited to a structure with a generally U-shaped cross-section; it can also be as follows: Figure 9 As shown, the strip of metal is formed into a spiral structure with a circular or elliptical cross-section.

[0095] When the pressure of the fluid is not applied or the fluid pressure is relatively low, the fully sealed component 120 seals the gap between the first valve seat 70 and the first flow path forming component 15 by means of the elastic restoring force of the spring member 121. On the other hand, when the fluid pressure is relatively high, the fully sealed component 120 seals the gap between the first valve seat 70 and the first flow path forming component 15 by means of the elastic restoring force of the spring member 121 and the fluid pressure. Therefore, even when fluid flows into the first pressure actuating part 94 from the gap between the inner circumferential surface of the valve body 6 and the outer circumferential surface of the first valve seat 70, the fluid is sealed by the fully sealed component 120 and will not flow into the interior of the first flow path forming component 15 from the gap between the first valve seat 70 and the first flow path forming component 15.

[0096] The fully sealed component 120 is composed of a metal spring member 121 and a synthetic resin sealing member 122. The metal spring member 121 is self-explanatory, and the polytetrafluoroethylene (PTFE) resin constituting the sealing member 122 has excellent heat resistance and can withstand long-term use in extremely low temperature regions.

[0097] The end face 70a of the cylindrical portion 71 of the first valve seat 70 is as follows: Figure 2 as well as Figure 3 As shown, the area (pressure-bearing surface) where the first pressure-acting part 94 receives the pressure of the fluid is the region.

[0098] In this embodiment 1, a stepped portion 73 for mounting the fully sealing component 120 is provided on the end face 70a of the cylindrical portion 71 of the first valve seat 70. Therefore, corresponding to the provision of the stepped portion 73, the end face 70a of the cylindrical portion 71 of the first valve seat 70 is constructed to be difficult to receive the full pressure of the fluid from the first pressure action portion 94.

[0099] Therefore, as Figure 2 as well as Figure 3 As shown, in this embodiment 1, an annular first pressure plate 76 is provided. This first pressure plate 76 includes a stepped portion 73 of the first valve seat 70 that covers the end face 70a of the cylindrical portion 71 of the first valve seat 70, thereby sealing it off. This allows the pressure of the fluid to be effectively applied from the first pressure actuation portion 94 to the end face 70a of the cylindrical portion 71 of the first valve seat 70. In other words, the pressure plate 76 is configured to contact the end face 70a of the cylindrical portion 71 of the first valve seat 70 and seal the stepped portion 73. The first pressure plate 76 is formed of the same material as the first valve seat 70. Furthermore, a small gap is provided between the outer peripheral end face of the first pressure plate 76 along the radial direction and the recess 75 of the valve body 6, allowing fluid to leak into the first pressure actuation portion 94.

[0100] On the other hand, the end of the thick-walled cylindrical portion 15b of the first flow path forming member 15, which is one end of the valve body 6, is sealed (closed) between itself and the inner circumferential surface by a second full-seal member 130, which is an example of a second sealing mechanism. This second full-seal member 130 is made of synthetic resin and has a generally U-shaped cross-section. The second full-seal member 130 is forced in the opening direction by a metal spring member. Figure 3 As shown, on the inner circumferential surface of the valve body 6, at the outer end of the cylindrical portion 75a of the recess 75 along the axial direction, a cylindrical portion 75c for mounting the full-seal component 130 is formed with a slightly larger outer diameter than the cylindrical portion 75a of the recess 75. The length of the cylindrical portion 75c is set to be longer than the second full-seal component 130.

[0101] Furthermore, the gap between the cylindrical portion 75c of the valve body 6 and the thick-walled cylindrical portion 15b of the first flow path forming member 15 is sealed (closed) by the second fully sealing member 130. The second fully sealing member 130 opens toward the first pressure acting portion 94. That is, the second fully sealing member 130 is configured such that its opening receives fluid pressure from the first pressure acting portion 94. In addition, the second fully sealing member 130 is configured such that although its outer diameter is larger than that of the first fully sealing member 120, it is essentially the same as that of the first fully sealing member 120.

[0102] On the outer side of the cylindrical portion 71 of the first valve seat 70 along the axial direction, a first anti-loosening washer (corrugated washer) 16, as an example of an elastic member, is provided. This first anti-loosening washer 16 allows the first valve seat 70 to displace in a direction approaching or disengaging from the valve stem 34, and elastically deforms in the same direction. As shown in FIG. 10, the first anti-loosening washer 16 is made of stainless steel, iron, or phosphor bronze, and its shape in the front projection is formed as a ring with a desired width. Furthermore, the side surface of the first anti-loosening washer 16 is corrugated, allowing it to elastically deform along its thickness direction. The elastic modulus of the first anti-loosening washer 16 is determined based on its thickness, material, or the number of corrugations. The first anti-loosening washer 16 is housed in the first pressure-acting portion 94.

[0103] Furthermore, a first adjusting ring 77, which is an example of an annular adjusting member, is disposed on the outer side of the first anti-loosening washer 16. This first adjusting ring 77 adjusts the gap G1 between the valve stem 34 and the recess 74 of the first valve seat 70 by means of the first anti-loosening washer 16. Figure 11As shown, the first adjusting ring 77 is made of a metal such as SUS or a synthetic resin such as heat-resistant polyimide (PI) resin, and is composed of a cylindrical component with a relatively short length of male thread 77a formed on its outer circumferential surface. On the outer end face of the first adjusting ring 77, grooves 77b are provided at 180-degree opposite positions. These grooves 77b are used to engage a clamp (not shown) for adjusting the tightening amount when the first adjusting ring 77 is fastened to the female thread portion 78 provided on the valve body 6, thereby allowing the first adjusting ring 77 to rotate.

[0104] like Figure 4 As shown, the valve body 6 is provided with a first female threaded portion 78 for mounting the first adjusting ring 77. At the open end of the valve body 6, a short cylindrical portion 79 with an outer diameter approximately equal to that of the first adjusting ring 77 is provided. Furthermore, between the first female threaded portion 78 and the cylindrical portion 75c, a shorter machining cylindrical portion 75d with an inner diameter larger than the first female threaded portion 78 is provided, so that the first female threaded portion 78 can be machined over a desired length.

[0105] The first adjusting ring 77 adjusts the amount of tightening relative to the female thread 78 of the valve body 6, thereby adjusting the amount (distance) by which the first adjusting ring 77 pushes the first valve seat 70 inward via the first anti-loosening washer 16. If the tightening amount of the first adjusting ring 70 is increased, the first valve seat 70... Figure 6 As shown, the first adjusting ring 77 is pressed by the first anti-loosening washer 16 and the first pressure plate 76, causing the recess 74 to protrude from the inner circumferential surface of the valve seat 8 and move towards the valve stem 34, thus reducing the gap G1 between the recess 74 and the valve stem 34. Furthermore, if the tightening amount of the first adjusting ring 77 is preset to a small amount, the distance the first valve seat 70 is pushed by the first adjusting ring 77 is reduced, and it is positioned away from the valve stem 34, relatively increasing the gap G1 between the recess 74 of the first valve seat 70 and the valve stem 34. The pitch of the male thread 77a of the first adjusting ring 77 and the female thread 78 of the valve body 6 are set small, allowing for fine adjustment of the protrusion amount of the first valve seat 70.

[0106] In addition, such as Figure 2 As shown, on one side of the valve body 6, for connecting to piping (not shown) that allows fluid to flow out, a first flange member 10, as an example of a connecting member, is installed via four bolts 11 with hexagonal holes. Figure 9In the attached drawing, reference numeral 11a indicates the threaded hole of the bolt 11 with a hexagonal hole for fastening the connection. The first flange member 10 is made of the same metal as the valve body 6, such as SUS. The first flange member 10 has: a flange portion 12 with a side rectangular shape that is roughly the same as the side shape of the valve body 6; an insertion portion 13 that protrudes shortly in a cylindrical shape on the inner side of the flange portion 12; and a piping connection portion 14 that protrudes in a thick-walled, roughly cylindrical shape on the outer side of the flange portion 12 and connects to a piping (not shown). Figure 2 As shown, the flange portion 12 of the first flange member 10 is sealed to the valve body 6 by an O-ring 13a. A groove 13b for receiving the O-ring 13a is provided on the inner circumferential surface of the flange portion 12 of the first flange member 10. The inner circumference of the pipe connection portion 14 is, for example, configured with a tapered female thread (Rc1 / 2) with a diameter of approximately 21 mm and a diameter of approximately 0.58 inches. Furthermore, the shape of the pipe connection portion 14 is not limited to the aforementioned tapered female thread or the aforementioned female thread; it can also be a tube fitting or the like, as long as fluid can flow out from the first outlet 7.

[0107] Here, the O-ring 13a is a sealing member in the shape of an O-ring, obtained by completely covering the outside of a spiral spring member made of stainless steel or the like, which is formed in a circular or elliptical cross-section, with an elastically deformable synthetic resin made of Teflon (registered trademark) FEP (a copolymer of tetrafluoroethylene and hexafluoropropylene). The O-ring 13a can maintain its sealing performance even in extremely low temperature regions.

[0108] like Figure 2 As shown, on the other side of the valve body 6 (the right side in the figure), there are respectively: a second outlet 17 for fluid to flow out; and a second valve port 18 with a rectangular cross-section that communicates with the valve seat 8, which is a flow port, as an example.

[0109] In this embodiment 1, the second outlet 17 and the second valve port 18 are not directly provided on the valve body 6. Instead, the second outlet 17 and the second valve port 18 are provided by installing the second valve seat 80, which forms the second valve port 18 as an example of a valve port forming member, and the second flow path forming member 25, which forms the second outlet 17, on the valve body 6.

[0110] As shown by the parenthesized reference numerals in Figure 5, the second valve seat 80 is constructed in the same manner as the first valve seat 70. Specifically, the second valve seat 80 integrally comprises: a cylindrical portion 81 disposed on the outer side of the valve body 6, forming a cylindrical shape; and a tapered portion 82 formed with its outer diameter decreasing towards the inner side of the valve body 6. Inside the tapered portion 82 of the second valve seat 80, a second valve port 18 with a rectangular cross-section (square in this embodiment 1) is formed. Furthermore, one end of the second flow path forming member 25, which forms the second outlet 17, is disposed inside the cylindrical portion 81 of the second valve seat 80 in a sealed state.

[0111] like Figure 3 As shown, a recess 85, with a shape corresponding to and similar to the outer shape of the second valve seat 80, is formed in the valve body 6 through machining or the like. The recess 85 includes: a cylindrical portion 85a corresponding to the cylindrical portion 81 of the second valve seat 80; and a tapered portion 85b corresponding to the tapered portion 82. The length of the cylindrical portion 85a of the valve body 6 is set to be longer than the cylindrical portion 81 of the second valve seat 80. As described later, the cylindrical portion 85a of the valve body 6 forms the second pressure-acting portion 96. The second valve seat 80 is mounted so that it can move in a direction that approaches or moves away from the valve core 34 relative to the recess 85 of the valve body 6.

[0112] With the second valve seat 80 installed in the recess 85 of the valve body 6, a small gap is formed between the second valve seat 80 and the recess 85 of the valve body 6. Fluid flowing into the interior of the valve seat 8 can flow into the outer periphery of the second valve seat 80 through the small gap. Furthermore, the fluid flowing into the outer periphery of the second valve seat 80 is directed towards the second pressure-acting part 96, which is formed by the space located outside the cylindrical portion 81 of the second valve seat 80. This second pressure-acting part 96 applies fluid pressure to the surface 80a of the second valve seat 80 opposite to the valve stem 34. In addition to the fluid flowing out through the second valve port 18, the fluid flowing into the interior of the valve seat 8 also flows out through the first valve port 9. The second pressure-acting part 96 is defined by a seal between itself and the second outlet 17 formed by the second flow path forming member 25.

[0113] The pressure of the fluid acting on the valve stem 34 disposed inside the valve seat 8 depends on the flow rate of the fluid determined by the opening and closing degree of the valve stem 34. The fluid flowing into the interior of the valve seat 8 also flows in (leaks in) through the first valve port 9 and the second valve port 18 into the tiny gap formed between the outer peripheral surfaces of the valve seat 8 and the valve stem 34. Therefore, in the second pressure-acting part 96 corresponding to the second valve seat 80, in addition to the fluid flowing out from the second valve port 18, fluid flowing out from the first valve port 9 also flows into the tiny gap formed between the outer peripheral surfaces of the valve seat 8 and the valve stem 34. Furthermore, the second valve seat 80 is formed of the same material as the first valve seat 70.

[0114] As shown in FIG. 5(b), at the end of the tapered portion 82 of the second valve seat 80, a recess 84, which is an example of a clearance reduction portion and has a top-view arc shape, is provided. This recess 84 constitutes part of a cylindrical curved surface corresponding to the cylindrical valve seat 8 formed on the valve body 6. The radius of curvature R of the recess 84 is set to be approximately equal to the radius of curvature of the valve seat 8 or the radius of curvature of the valve stem 34. As will be described later, the valve seat 8 of the valve body 6 has a small gap between it and the outer peripheral surface of the valve stem 34 to prevent engagement of the valve stem 34 rotating inside the valve seat 8. The recess 84 of the second valve seat 80 is installed such that, when the second valve seat 80 is installed on the valve body 6, it protrudes towards the valve stem 34 compared to the valve seat 8 of the valve body 6, or it is installed such that it contacts the outer peripheral surface of the valve stem 34. As a result, the gap G between the valve stem 34 and the inner surface of the valve seat 8 of the valve body 6, which is a component facing the valve stem 34, is set to a value that is locally reduced compared to other parts of the valve seat 8, corresponding to the protrusion of the recess 84 of the second valve seat 80. Thus, the gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34 is set to a desired value (G3 < G2) that is narrower (smaller) than the gap G2 between the valve stem 34 and the inner surface of the valve seat 8. Alternatively, the gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34 can also be a state where the recess 84 of the valve seat 80 is in contact with the valve stem 34, i.e., a state with no gap (gap G3 = 0).

[0115] However, when the recess 84 of the second valve seat 80 contacts the valve stem 34, there is a possibility that the driving torque of the valve stem 34 may increase due to the contact resistance of the recess 84 when rotating the valve stem 34. Therefore, the degree of contact between the recess 84 of the second valve seat 70 and the valve stem 34 is initially considered, taking into account the rotational torque of the valve stem 34. That is, it is adjusted to a degree where the driving torque of the valve stem 34 does not increase or, even if it does increase, the increase is small and does not impede the rotation of the valve stem 34.

[0116] like Figure 4As shown, the second flow path forming member 25 is formed into a cylindrical shape from a metal such as SUS or a synthetic resin such as polyimide (PI) resin. The second flow path forming member 25 has a second outlet 17 formed internally, which communicates with the second valve port 18 regardless of the positional change of the second valve seat 80. Approximately half of the second flow path forming member 25 located on the side of the second valve seat 80 is formed as a thin-walled cylindrical portion 25a, which is relatively thin-walled. Conversely, approximately half of the second flow path forming member 25 located on the side opposite to the second valve seat 80 is formed as a thick-walled cylindrical portion 25b, which is thicker than the thin-walled cylindrical portion. The inner surface of the second flow path forming member 25 is cylindrically continuous. On the outer periphery of the second flow path forming member 25, between the thin-walled cylindrical portion 25a and the thick-walled cylindrical portion 25b, an annular flange portion 25c, which is thicker in a radially outward square shape, is provided. The outer peripheral end of the flange 25c is configured to movably contact the inner peripheral surface of the recess 85.

[0117] like Figure 2 As shown, the cylindrical portion 81 of the second valve seat 80 and the thin-walled cylindrical portion 25a of the second flow path forming member 25 are sealed (closed) by a first full-seal member 140, which is an example of a first sealing mechanism. The first full-seal member 140 is made of synthetic resin and has a generally U-shaped cross-section. The first full-seal member 140 is forced in the opening direction by a metal spring member. As shown in FIG5, a stepped portion 83 for receiving the first full-seal member 140 is provided on the inner circumferential surface of the cylindrical portion 81 of the second valve seat 80 at the end located on the outer side of the valve body 6.

[0118] As shown in Figure 7, the first fully sealed component 140 is constructed in the same manner as the first fully sealed component 120. The first fully sealed component 140 has a spring member 141 and a sealing member 142. When there is no fluid pressure or the fluid pressure is relatively low, the first fully sealed component 140 seals the gap between the second valve seat 80 and the second flow path forming component 25 by means of the elastic restoring force of the spring member 141. On the other hand, when the fluid pressure is relatively high, the first fully sealed component 140 seals the gap between the second valve seat 80 and the second flow path forming component 25 by means of the elastic restoring force of the spring member 141 and the fluid pressure. Therefore, when fluid flows into the second pressure-acting part 96 from the gap between the inner peripheral surface of the valve body 6 and the outer peripheral surface of the second valve seat 80, the fluid is also sealed by the first fully sealed component 140 and will not flow into the interior of the second flow path forming component 25 from the gap between the second valve seat 80 and the second flow path forming component 25.

[0119] The end face 80a of the cylindrical portion 81 of the second valve seat 80 is as follows: Figure 2 as well as Figure 3The area (pressure-bearing surface) subjected to fluid pressure by the second pressure-acting part 96, as shown.

[0120] In this embodiment 1, a stepped portion 83 for mounting the first fully sealing member 140 is provided on the end face 80a of the cylindrical portion 81 of the second valve seat 80. Therefore, corresponding to the provision of the stepped portion 83, the end face 80a of the cylindrical portion 81 of the second valve seat 80 is configured to be less susceptible to the full pressure of the fluid pressure from the second pressure action portion 96.

[0121] Therefore, in this embodiment 1, as Figure 2 as well as Figure 3 As shown, an annular first pressure-bearing plate 86 is provided, which covers and blocks the end face 80a of the cylindrical portion 81 of the second valve seat 80 by the stepped portion 83 of the second valve seat 80, so that the pressure of the fluid can be effectively applied from the second pressure-acting portion 96 to the end face 80a of the cylindrical portion 81 of the second valve seat 80. That is, the pressure-bearing plate 86 is configured to contact the end face 80a of the cylindrical portion 81 of the second valve seat 80 and block the stepped portion 83. The second pressure-bearing plate 86 is formed of the same material as the second valve seat 80. In addition, a small gap is provided between the outer peripheral end face of the second pressure-bearing plate 86 in the radial direction and the recess 85 of the valve body 6 so that fluid can leak into the second pressure-acting portion 96.

[0122] On the other hand, the end of the thick-walled cylindrical portion 25b of the second flow path forming member 25, which is one end of the second flow path forming member 25, is sealed (closed) with the inner circumferential surface of the valve body 6 by a second full-seal member 150, which is an example of a second sealing mechanism. The second full-seal member 150 is made of synthetic resin and has a generally U-shaped cross-section. The second full-seal member 150 is forced in the opening direction by a metal spring member. On the inner circumferential surface of the valve body 6, as shown in FIG5, a cylindrical portion 85c for mounting the second full-seal member 150 is formed at the outer end of the cylindrical portion 85a of the recess 85, which is slightly larger in outer diameter than the cylindrical portion 85a of the recess 85. The length of the cylindrical portion 85c is set to be longer than that of the second full-seal member 150.

[0123] Furthermore, the gap between the cylindrical portion 85c of the valve body 6 and the thick-walled cylindrical portion 25b of the second flow path forming member 25 is sealed (closed) by the second full-seal member 150. The second full-seal member 150 opens toward the second pressure-acting portion 96. That is, the second full-seal member 150 is configured such that its opening receives fluid pressure from the second pressure-acting portion 96. In addition, the second full-seal member 150 is configured such that although its outer diameter is larger than that of the first full-seal member 140, it is essentially the same as that of the first full-seal member 140.

[0124] A second anti-loosening washer (corrugated washer) 26, serving as an example of an elastic member, is provided on the outer side of the cylindrical portion 81 of the second valve seat 80. This second anti-loosening washer 26 allows the second valve seat 80 to displace in a direction approaching or disengaging from the valve stem 34, and pushes the second valve seat 80 towards contact with the valve stem 34. As shown in FIG10, the second anti-loosening washer 26 is made of stainless steel, iron, or phosphor bronze, and its front projection shape is formed as a ring with a desired width. Furthermore, the side surface shape of the second anti-loosening washer 26 is corrugated, allowing it to elastically deform along its thickness direction. The elastic modulus of the second anti-loosening washer 26 is determined based on its thickness, material, or the number of corrugations. The second anti-loosening washer 26 uses the same construction as the first anti-loosening washer 16.

[0125] Furthermore, a second adjusting ring 87, serving as an example of an adjusting member, is disposed on the outer side of the second anti-loosening washer 26. This second adjusting ring 87 adjusts the gap G3 between the valve stem 34 and the recess 84 of the second valve seat 80 by means of the second anti-loosening washer 26. Figure 11 As shown, the second adjusting ring 87 is made of heat-resistant synthetic resin or metal, and is a cylindrical component with a relatively short length of male thread 87a formed on its outer circumferential surface. On the outer end face of the second adjusting ring 87, grooves 87b are provided at 180-degree opposite positions. These grooves 87b are used to secure (not shown) a clamp for adjusting the tightening amount and to rotate the second adjusting ring 87 when it is fastened to the female thread portion 88 provided on the valve body 6.

[0126] In valve body 6, such as Figure 3 As shown, a second female threaded portion 88 is provided for mounting the second adjusting ring 87. At the open end of the valve body 6, a short cylindrical portion 89 is provided with an outer diameter approximately equal to that of the second adjusting ring 87. Furthermore, between the second female threaded portion 88 and the cylindrical portion 85c of the valve body 6, a machining cylindrical portion 85d with an inner diameter larger than the second female threaded portion 88 is provided in a shorter manner so that the second female threaded portion 88 can be machined to a desired length.

[0127] The second adjusting ring 87 adjusts the amount of tightening relative to the female thread 88 of the valve body 6, and adjusts the amount (distance) by which the second adjusting ring 87 pushes the second valve seat 80 inward by means of the second anti-loosening washer 26. If the tightening amount of the second adjusting ring 87 is increased, the second valve seat 80 will... Figure 6As shown, the second adjusting ring 87 is pressed by the second anti-loosening washer 26, causing the recess 84 to protrude from the inner circumferential surface of the valve seat 8 and displace in the direction close to the valve stem 34, thus reducing the gap G3 between the recess 84 and the valve stem 34. Furthermore, if the tightening amount of the second adjusting ring 87 is preset to a small amount, the distance the second valve seat 80 is pushed by the second adjusting ring 87 is reduced, and it is positioned away from the valve stem 34, relatively increasing the gap G3 between the recess 84 of the second valve seat 80 and the valve stem 34. The pitch of the male thread 87a of the second adjusting ring 87 and the female thread 88 of the valve body 6 are set small, allowing for fine adjustment of the protrusion amount of the second valve seat 80.

[0128] like Figure 2 As shown, on the other side of the valve body 6, a second flange member 19, as an example of a connecting member, is installed via four bolts 20 with hexagonal holes for connecting a piping (not shown) that allows fluid to flow out. The second flange member 19 is made of a metal such as SUS, similar to the first flange member 10. The second flange member 19 has: a flange portion 21 with a rectangular side shape identical to the side shape of the valve body 6; an insertion portion 22 protruding from the inner side of the flange portion 21 in a cylindrical shape; and a piping connection portion 23, in a thick-walled, generally cylindrical shape, protruding from the outer side of the flange portion 21 and connecting to a piping (not shown). Figure 2 As shown, the flange portion 21 of the second flange member 19 is sealed to the valve body 6 by an O-ring 21a. An annular groove 21b for receiving the O-ring 21a is provided on the inner circumferential surface of the flange portion 21 of the second flange member 19. The inner circumference of the pipe connection portion 23 is, for example, configured with a tapered female thread (Rc1 / 2) with a diameter of approximately 21 mm and a diameter of approximately 0.58 inches. Furthermore, similar to the pipe connection portion 14, the shape of the pipe connection portion 23 is not limited to the aforementioned tapered female thread or the aforementioned female thread; it can also be a pipe fitting or the like, as long as fluid can flow out from the second outlet 17.

[0129] Here, as a fluid (coolant), for example, fluorine-based inert liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) can be used, which can be applied in a temperature range of approximately -85 to +120°C at a pressure of 0 to 1 MPa.

[0130] In addition, such as Figure 2As shown, the valve body 6 has an opening on its lower end face, providing a flow inlet 26 with a cross-sectional circular shape, serving as the third valve port for fluid inflow. On the lower end face of the valve body 6, a third flange member 27, as an example of a connecting member, is installed via four bolts 28 with hexagonal holes for connecting to a pipe (not shown) for fluid inflow. At the lower end of the flow inlet 26, a cylindrical portion 26a with an inner diameter larger than the flow inlet 26 is provided for mounting the third flange member 27. The third flange member 27 has: a flange portion 29 formed with a rectangular bottom surface; and an insertion portion 30 (see reference) that is cylindrical and protrudes relatively shortly from the inner surface of the flange portion 29. Figure 2 A thick-walled, roughly cylindrical pipe connection portion 31 protrudes from the outer side of the flange portion 29 and connects to piping (not shown). Figure 2 As shown, the flange portion 29 of the third flange member 27 is sealed to the valve body 6 by an O-ring 29a. A groove 29b for receiving the O-ring 29a is provided on the inner circumferential surface of the flange portion 29 of the third flange member 27. The inner circumference of the pipe connection portion 31 is configured as, for example, a tapered female thread (Rc1 / 2) with a diameter of approximately 21 mm and a diameter of approximately 0.58 inches. Furthermore, the shape of the pipe connection portion 31 is not limited to a tapered female thread or a female thread; it can also be a pipe fitting or the like, as long as fluid can flow in from the inlet 26.

[0131] like Figure 3 As shown, at the center of the valve body 6, there is a valve seat 8 with a first valve port 9 and a second valve port 18 in a rectangular cross-section, which are provided by mounting the first and second valve seats 70 and 80. The valve seat 8 is formed by a cylindrical cavity corresponding to the shape of the valve core described later. In addition, a part of the valve seat 8 is formed by the first and second valve seats 70 and 80. The cylindrical valve seat 8 is provided in a through state on the upper end face of the valve body 6. As shown in FIG12, the first valve port 9 and the second valve port 18 provided on the valve body 6 are arranged axially symmetrically with respect to the central axis (axis of rotation) C of the cylindrical valve seat 8. To further explain, the first valve port 9 and the second valve port 18 are arranged orthogonally with respect to the cylindrical valve seat 8, and one end edge of the first valve port 9 is open at a position facing the other end edge of the second valve port 18 (a position 180 degrees apart) across the central axis C. Additionally, the other end edge of the first valve port 9 is open at a position opposite to one end edge of the second valve port 18 (180 degrees apart) across the central axis C. Furthermore, for convenience, the gap between the valve seat 8 and the valve stem 34 is omitted from the illustration in Figure 12.

[0132] In addition, such as Figure 2As shown, the first valve port 9 and the second valve port 18, as described above, are formed by openings with a rectangular cross-section, such as a square cross-section, created by mounting the first and second valve seats 70 and 80 onto the valve body 6. For the first valve port 9 and the second valve port 18, the length of one side is set to be smaller than the diameter of the first outlet 7 and the second outlet 17, forming a rectangular prism shape that is inscribed within the first outlet 7 and the second outlet 17.

[0133] As shown in Figure 13, the valve stem 34, which is an example of a valve core, is made of metal such as SUS and has a generally cylindrical shape. The valve stem 34 generally integrally includes: a valve core part 35 that functions as a valve core; shaft support parts 36 and 37 that are respectively provided above and below the valve core part 35 and rotatably support the upper and lower parts of the valve stem 34; a sealing part 38 that is composed of the same part as the upper shaft support part 36; and a coupling part 39 provided on the upper part of the sealing part 38.

[0134] The upper and lower shaft support portions 36 and 37 are respectively formed into cylindrical shapes with an outer diameter smaller than that of the valve core portion 35 and having the same or different diameters. For example... Figure 4 As shown, the lower shaft support 37 is rotatably supported on the lower end of the valve seat 8 provided on the valve body 6 via the bearing 41, which serves as a bearing member. At the lower part of the valve seat 8, an annular support 42 is provided to support the bearing 41. The bearing 41, the support 42, and the inlet 26 are configured with approximately the same inner diameter, allowing the temperature control fluid to flow into the interior of the valve core 35 with virtually no resistance.

[0135] In addition, such as Figure 2As shown in Figure 13(b), the valve core 35 is formed into a cylindrical shape with an opening 44 that is approximately semi-cylindrical in shape. This opening 44 has an opening height H2 that is lower than the opening height H1 of the first and second valve ports 9 and 18. The valve actuation part 45 of the valve core 35 with the opening 44 is formed into a semi-cylindrical shape with a predetermined central angle α (e.g., 180 degrees) (the approximately semi-cylindrical shape of the opening 44 is removed from the cylindrical shape). In order to include the valve core 35 located above and below the opening 44, the valve actuation part 45 is rotatably disposed within the valve seat 8 with a small gap between it and the inner circumferential surface of the valve seat 8 in a non-contact manner, while simultaneously switching the first valve port 9 from a closed state to an open state. As shown in Figure 13, the upper and lower valve stem portions 46 and 47, which are disposed above and below the valve actuation part 45, are formed into cylindrical shapes with the same outer diameter as the valve actuation part 45, and rotate freely in a non-contact state with a small gap between them on the inner circumferential surface of the valve seat 8. Inside the valve actuation part 45 and the upper and lower valve stem portions 46 and 47, a cylindrical cavity 48 is provided with a through-hole extending towards the lower end.

[0136] Furthermore, the cross-sectional shape of the two end faces 45a and 45b of the valve actuating part 45 along the circumferential direction (rotation direction) is formed as a planar shape along the direction intersecting (orthogonal) with its central axis C. To further explain, as shown in FIG13, the cross-sectional shape of the two end faces 45a and 45b of the valve actuating part 45 along the circumferential direction, intersecting with the rotation axis C, is formed as a planar shape towards the opening 44. The wall thickness of the two end faces 45a and 45b is, for example, set to a value equal to the thickness T of the valve actuating part 45.

[0137] The valve actuation unit 45 does not limit the cross-sectional shape of the two ends 45a and 45b along the circumferential direction that intersect the rotation axis C to a planar shape; the two end faces 45a and 45b along the circumferential direction (rotation direction) can also be formed into curved shapes.

[0138] As shown in Figure 14, when the valve stem 34 is rotated to open and close the first and second valve ports 9 and 18, the two circumferential ends 45a and 45b of the valve actuation unit 45 are moved (rotated) in a manner that protrudes or retracts from the circumferential ends of the first and second valve ports 9 and 18 in the flow of fluid, causing the first and second valve ports 9 and 18 to change from an open state to a closed state or from a closed state to an open state. At this time, in order to make the opening area of ​​the first and second valve ports 9 and 18 change linearly (straight-line) with respect to the rotation angle of the valve stem 34, the two circumferential ends 45a and 45b of the valve actuation unit 45 preferably have a planar cross-sectional shape.

[0139] like Figure 2 As shown, the sealing part 4 seals (closes) the valve stem 34 in a rotatable manner relative to the valve body 6, creating a liquid-tight state. The sealing part 4 includes: the valve body 6; the valve stem 34; a fully sealed component 160 and 170, which is disposed between the valve body 6 and the valve stem 34 and seals the two in a liquid-tight manner, and is made of synthetic resin with a metal spring member exerting force in the opening direction; and a bearing member 180 that rotatably supports the valve stem 34 relative to the valve body.

[0140] like Figure 2 As shown, a cylindrical support recess 51 is provided at the upper end of the valve body 6 to rotatably support the valve stem 34. At the upper end of the support recess 51, a cylindrical portion 51b with a large inner diameter is formed via a tapered portion 51a. As described above, the valve stem 34 rotatably and fluidically supports the upper valve stem portion 46 at the lower end of the support recess 51 via a bearing 180, which is an example of a bearing member, and fully sealed components 160 and 170.

[0141] As shown in Figure 1, the coupling part 5 is disposed between the valve body 6, which has a built-in sealing part 4, and the actuator part 3. The coupling part 5 is used to connect the valve stem 34 to a rotating shaft (not shown) that rotates the valve stem 34 integrally.

[0142] like Figure 2 As shown, the coupling section 5 comprises the following components: a spacer 59 disposed between the sealing section 4 and the actuator section 3; a coupling plate 60 fixed to the upper part of the spacer 59; and a coupling member 62 that is housed in a cylindrical space 61 formed in a through state inside the spacer 59 and the coupling plate 60, and connects the valve stem 34 to a rotating shaft (not shown). The spacer 59 is formed from a synthetic resin such as polyimide (PI) resin into a tall, cylindrical shape with a planar shape substantially the same as a part of the valve body 6. For the spacer 59, a flange 59a provided at its lower end is fixed to both the valve body 6 and the coupling plate 60 by a mechanism such as a threaded fastener 59b. Furthermore, as... Figure 2 As shown, the connector plate 60 is formed into a polygonal plate shape from a top view using metal such as SUS. The connector plate 60 is mounted to the base plate 64 of the actuator section 3 by means of bolts 63 with hexagonal holes.

[0143] As shown in Figure 13(a), a groove 65 is provided at the upper end of the valve stem 34, extending horizontally. The valve stem 34 is connected and fixed to the coupling member 62 by fitting a protrusion 66 provided on the coupling member 62 into the groove 65. On the other hand, a groove 67 is provided at the upper end of the coupling member 62, extending horizontally. A rotating shaft (not shown) is connected and fixed to the coupling member 62 by fitting a protrusion (not shown) into the groove 67 provided on the coupling member 62. The spacer 59 has an O-ring 190 at its upper end to prevent liquid from reaching the actuator part 3 when liquid leaks from the sealing part 4.

[0144] As shown in Figure 1, the actuator unit 3 includes a base plate 64 that is rectangular in shape when viewed from above. A housing 90, which is a cuboid-shaped box containing a drive mechanism such as a stepper motor or encoder, is mounted on the upper part of the base plate 64 via screw fasteners 91. The drive mechanism of the actuator unit 3 is not limited in structure as long as it can rotate a rotation axis (not shown) in the desired direction with a specified accuracy based on a control signal. The drive mechanism consists of a stepper motor, a drive force transmission mechanism that transmits the rotational drive force of the stepper motor to the rotation axis via a drive force transmission mechanism such as gears, and an angle sensor such as an encoder that detects the rotation angle of the rotation axis.

[0145] Additionally, in Figure 1, reference numeral 92 indicates the stepper motor side cable, and reference numeral 93 indicates the angle sensor side cable. These stepper motor side cables 92 and angle sensor side cables 93 are respectively connected to a control device (not shown) that controls the three-way valve type motor valve 1.

[0146] <Environmental Conditions>

[0147] As described above, the three-way valve type motor valve 1 according to Embodiment 1 is configured to be used for fluids with temperatures, for example, around -85 to +120°C, especially around -85°C. Therefore, the ambient conditions surrounding the use of the three-way valve type motor valve 1 preferably correspond to a temperature range of around -85 to +120°C. That is, when a fluid at around -85°C flows through the three-way valve type motor valve 1, the valve body 6 itself becomes at the same temperature as the fluid at around -85°C. As a result, in environments where the conditions for using the three-way valve type motor valve 1 include humidity (as opposed to moisture in the air), moisture in the air adheres to the three-way valve type motor valve 1 and freezes, which can be considered a cause of malfunction of the three-way valve type motor valve 1.

[0148] Therefore, in this embodiment 1, as the environmental conditions for using the three-way valve type motor valve 1, nitrogen (N) is used. 2－ In the environment after air replacement, it is desirable that the ambient humidity (relative humidity) is below 0.10%, preferably around 0.01%.

[0149] <Action of a three-way valve type motor valve>

[0150] In the three-way valve type motor valve 1 according to Embodiment 1, when a low-temperature fluid of about -85°C is circulated, the flow rate of the fluid is controlled as follows.

[0151] like Figure 4 As shown, during assembly or adjustment of the three-way valve type motor valve 1, the first and second flange components 10 and 19 are temporarily removed from the valve body 6, exposing the adjusting rings 77 and 87 to the outside. In this state, the tightness of the adjusting rings 77 and 87 relative to the valve body 6 is adjusted using a clamp (not shown), as follows: Figure 6 As shown, the amount of protrusion of the first and second valve seats 70 and 80 relative to the valve seat 8 of the valve body 6 is varied. When the tightening amount of the adjusting rings 77 and 87 relative to the valve body 6 is increased, the recesses 74 and 84 of the first and second valve seats 70 and 80 protrude from the inner peripheral surface of the valve seat 8 of the valve body 6, and the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve stem 34 decreases until the recesses 74 and 84 of the first and second valve seats 70 and 80 contact the outer peripheral surface of the valve stem 34. On the other hand, when the tightening amount of the adjusting rings 77 and 87 relative to the valve body 6 is decreased, the length of the protrusion of the recesses 74 and 84 of the first and second valve seats 70 and 80 from the inner peripheral surface of the valve seat 8 of the valve body 6 is decreased, and the gap G1 between the recesses 74 and 84 of the first and second valve seats 70 and 80 and the outer peripheral surface of the valve stem 34 increases.

[0152] In this embodiment 1, for example, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer peripheral surface of the valve stem 34 is set to be less than 10 μm. However, the gap G1 between the recesses 74, 84 of the first and second valve seats 70, 80 and the outer peripheral surface of the valve stem 34 is not limited to this value, and can be a value smaller than this value, for example, gap G1 = 0 μm (contact state), or it can be set to 10 μm or more.

[0153] like Figure 2 As shown, the three-way valve type motor valve 1 allows fluid to flow in via a pipe (not shown) through the third flange member 27, and allows fluid to flow out via a pipe (not shown) through the first flange member 10 and the second flange member 19. Furthermore, as shown in FIG14(a), the three-way valve type motor valve 1, for example, in its initial state before operation, is in a state where the valve actuation part 45 of the valve stem 34 closes (fully closes) the first valve port 9 while opening (fully opens) the second valve port 18.

[0154] like Figure 2As shown, if the three-way valve type motor valve 1 rotates a stepper motor (not shown) provided in the actuator section 3 by a predetermined amount, then the rotating shaft (not shown) is rotated in accordance with the rotation amount of the stepper motor. If the three-way valve type motor valve 1 rotates to drive the rotating shaft, the valve stem 34, which is connected to and fixed to the rotating shaft, rotates by the same angle as the rotation amount (rotation angle) of the rotating shaft. Accompanying the rotation of the valve stem 34, the valve actuation part 45 rotates inside the valve seat 8. As shown in FIG12(a), the circumferential end 45a of the valve actuation part 45 gradually opens the first valve port 9, allowing the fluid flowing in from the inlet 26 to flow into the interior of the valve seat 8 and out from the first housing member 10 via the first outlet 7.

[0155] At this time, as shown in FIG14(a), since the other end 45b of the valve actuation part 45 along the circumferential direction opens the second valve port 18, the fluid flowing in from the inlet 27 flows into the interior of the valve seat 8, is distributed according to the amount of rotation of the valve column 34, and flows out from the second housing member 19 to the outside via the second outlet 17.

[0156] As shown in Figure 14(a), if the three-way valve type motor valve 1 rotates to drive the valve stem 34, the first valve port 9 will be gradually opened by the circumferential end 45a of the valve actuation part 45. Then, the fluid will pass through the valve seat 8 and the interior of the valve stem 34 and be supplied to the outside through the first and second valve ports 9 and 18 and through the first and second outlets 9 and 18.

[0157] Furthermore, because the two ends 45a and 45b of the valve actuation section 45 along the circumferential direction of the three-way valve type motor valve 1 are formed into a curved or planar cross-sectional shape, the opening areas of the first and second valve ports 9 and 18 can change linearly (straight-line) depending on the rotation angle relative to the valve stem 34. Additionally, the fluid whose flow rate is restricted by the two ends 45a and 45b of the valve actuation section 45 can be considered to flow in a near-laminar state, allowing for high-precision control of the fluid distribution ratio (flow rate) corresponding to the opening areas of the first valve port 9 and the second valve port 18.

[0158] In the three-way valve type motor valve 1 of this embodiment, as described above, the valve actuation part 45 of the valve column 34 initially becomes a state in which the first valve port 9 is closed (fully closed) while the second valve port 18 is opened (fully open).

[0159] At this time, for the three-way valve type motor valve 1, if the valve actuation part 45 of the valve column 34 closes the first valve port 9 (fully closed), then ideally the fluid flow rate should be zero.

[0160] However, as Figure 6As shown, to prevent the valve stem 34 from engaging with the inner circumferential surface of the valve seat 8, the three-way valve type motor valve 1 is rotatably configured in a non-contact manner with a small gap between the outer circumferential surface of the valve stem 34 and the inner circumferential surface of the valve seat 8. As a result, a small gap G2 is formed between the outer circumferential surface of the valve stem 34 and the inner circumferential surface of the valve seat 8. Therefore, even when the valve actuation part 45 of the valve stem 34 closes (fully closes) the first valve port 9, the flow rate of the three-way valve type motor valve 1 will not be zero, and a small amount of fluid will flow into the second valve port 18 through the small gap G2 between the outer circumferential surface of the valve stem 34 and the inner circumferential surface of the valve seat 8.

[0161] However, in the three-way valve type motor valve 1 involved in this embodiment, such as Figure 6 As shown, the first and second valve seats 70 and 80 are provided with recesses 74 and 84, which protrude from the inner circumferential surface of the valve seat 8 toward the valve stem 34, thereby partially reducing the gap G1 between the outer circumferential surface of the valve stem 34 and the inner circumferential surface of the valve seat 8.

[0162] Therefore, even though the three-way valve type motor valve 1 is configured to rotate freely in a non-contact manner with a small gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8 in order to prevent metal-to-metal seizing between the valve stem 34 and the inner peripheral surface of the valve seat 8, the gap G1, which is a locally reduced area between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8, greatly restricts and inhibits the flow of fluid from the first valve port 9 to the small gap G2 that exists between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8.

[0163] Therefore, in the three-way valve type motor valve 1, compared with the three-way valve type motor valve that does not have a recess 74, 84 that is configured to partially reduce the gap between the valve stem 34 and the first and second valve seats 70, 80 facing the valve stem 34, the leakage of fluid when the three-way valve type motor valve 1 is fully closed can be significantly suppressed.

[0164] Preferably, the three-way valve type motor valve 1 of this embodiment can significantly reduce the gaps G1 and G2 by making the recesses 74 and 84 of the first and second valve seats 70 and 80 contact the outer peripheral surface of the valve column 34, thereby significantly suppressing fluid leakage when the three-way valve type motor valve 1 is fully closed.

[0165] In addition, the three-way valve type motor valve 1 can also significantly suppress fluid leakage from the second valve port 18 to the other side, the first valve port 9, when the valve actuation part 45 of the valve column 34 blocks (fully closes) the second valve port 18.

[0166] Furthermore, in this embodiment 1, as Figure 3As shown, on the surfaces 70a and 80a of the first and second valve seats 70 and 80 opposite to the valve stem 34, there are first and second pressure-acting parts 94 and 96 that allow the fluid pressure to act through a small gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8. Therefore, as shown in FIG12(a), when the opening of the three-way valve type motor valve 1 is near 0% (i.e., when the first valve port 9 is fully closed) and near 100% (i.e., when the first valve port 9 is fully open), if the first and second valve ports 9 and 18 are nearly fully closed, the amount of fluid flowing out from the first and second valve ports 9 and 18 is significantly reduced. Consequently, the pressure of the fluid flowing out of the valve ports of the three-way valve type motor valve 1 in the near-fully closed state decreases. Therefore, for example, when the opening is 0% (i.e., when the first valve port 9 is fully closed), fluid with a pressure of approximately 700 kPa flows in from the inlet 26 and flows out from the second valve port 18 at approximately 700 kPa. At this point, on the side of the first valve port 9, which is in a near-fully closed state, the pressure on the outlet side decreases to, for example, about 100 kPa. As a result, a pressure difference of about 600 kPa is generated between the second valve port 18 and the first valve port 9.

[0167] Therefore, in the three-way valve type motor valve 1 without a countermeasure, the pressure difference between the second valve port 18 and the first valve port 9 causes the valve stem 34 to move (displace) towards the first valve port 9, where the pressure is relatively lower, resulting in partial contact between the valve stem 34 and the bearing 41. Consequently, there is a possibility that the driving torque increases when rotating the valve stem 34 in the closing direction, leading to malfunction.

[0168] In contrast, in the three-way valve type motor valve 1 of this embodiment, such as Figure 15As shown, on the surfaces of the first and second valve seats 70 and 80 opposite to the valve stem 34, there are first and second pressure-acting portions 94 and 96 that allow the pressure of fluid leaking through a small gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8 to act on the first and second valve seats 70 and 80. Therefore, in the three-way valve type motor valve 1 according to this embodiment, even when a pressure difference occurs between the second valve port 18 and the first valve port 9, the pressure of the fluid on the side with relatively higher pressure acts on the first and second pressure-acting portions 94 and 96 through the small gap between the outer peripheral surface of the valve stem 34 and the inner peripheral surface of the valve seat 8. As a result, due to the pressure of the fluid acting on the side with relatively higher pressure (around 100 kPa), the first valve seat 70 on the side with relatively lower pressure (around 100 kPa) acts to return the valve stem 34 to the appropriate position. Therefore, in the three-way valve type motor valve 1 of this embodiment, it is possible to prevent or suppress the movement (displacement) of the valve stem 34 toward the first valve stem 9 with relatively lower pressure due to the pressure difference between the second valve port 18 and the first valve port 9, maintain the state in which the valve stem 34 is smoothly supported by the bearing 41, and prevent or suppress the increase of driving torque when rotating the valve stem 34 in the closing direction.

[0169] In addition, in the three-way valve type motor valve 1 of this embodiment, it also operates when the first valve port 9 is fully open, that is, when the second valve port 18 is close to the fully closed state, which can prevent or suppress the increase of driving torque when rotating the valve column 34.

[0170] For the three-way valve type motor valve 1 involved in this embodiment 1, the fluid (coolant) is, for example, a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) that can be used in a temperature range of about -85 to +120°C with a pressure of 0 to 1 MPa.

[0171] When switching the outflow of fluid at around -85°C, the valve body 6 supplying the fluid becomes approximately -85°C.

[0172] To seal (close) the first and second fully sealing components 120, 130, 140, and 150 between the first and second valve seats 70 and 80 and the first and second flow path forming members 15 and 25, and between the first and second flow path forming members 15 and 25 and the valve body 6, the three-way valve type motor valve 1 uses first and second fully sealing components 120, 130, 140, and 150. Furthermore, the first and second fully sealing components 120, 130, 140, and 150 are respectively configured to open towards the first and second pressure-acting parts 94 and 96. The first fully sealing component 120 is composed of a metal spring member 121 and a synthetic resin sealing member 122. The metal spring member 121 is self-explanatory, and the polytetrafluoroethylene (PTFE) resin constituting the sealing member 122 has excellent heat resistance and can withstand long-term use in extremely low temperature regions. The same applies to the other first and second fully sealing components 130, 140, and 150.

[0173] Therefore, the three-way valve type motor valve 1 according to this embodiment 1 can improve the sealing performance for fluids at low temperatures of around -85°C compared to the following cases: the first and second pressure action parts do not have first and second flow path forming members that are sealed at both ends along the length direction by a sealing mechanism (force applied in the opening direction by a metal spring member) with a cross section of approximately U-shape and made of synthetic resin, which are members that are installed on the valve body 6 to form the first and second flow outlets 7 and 17. Instead, O-rings are used to seal between the first and second valve seats 70 and 80 and the first and second flow path forming members 15 and 25, and between the first and second flow path forming members 15 and 25 and the valve body 6.

[0174] That is, by using the first and second fully sealed components 120, 130, 140, and 150 to seal between the first and second valve seats 70 and 80 and the first and second flow path forming members 15 and 25, and between the first and second flow path forming members 15 and 25 and the valve body 6, high sealing performance can be achieved even for fluids at low temperatures of around -85°C. Furthermore, the first and second fully sealed components 120, 130, 140, and 150 have a relatively large contact area between the first and second valve seats 70 and 80 and the first and second flow path forming members 15 and 25, and between the first and second flow path forming members 15 and 25 and the valve body 6, which also contributes to high sealing performance.

[0175] [Implementation Method 2]

[0176] Figure 16 This invention illustrates a three-way valve type motor valve as an example of a flow control valve according to Embodiment 2 of the present invention.

[0177] The three-way valve type motor valve 1 involved in this embodiment 2 does not divide the same fluid into two parts, but is configured as a mixing three-way valve type motor valve 1 for mixing two different fluids.

[0178] like Figure 16 As shown, the three-way valve type motor valve 1 has a first inlet 7 for the inflow of a cryogenic fluid (which is the first fluid) and a first valve port 9 with a rectangular cross-section that communicates with a valve seat 8 formed by a cylindrical cavity on one side of the valve body 6. In this embodiment, the first outlet 7 and the first valve port 9 are not directly provided on the valve body 6, but rather the first inlet 17 and the first valve port 9 are provided by installing a first valve seat 70, which forms the first valve port 9, as an example of a valve port forming member, and a first flow path forming member 15, which forms the first inlet 7, on the valve body 6.

[0179] Furthermore, the three-way valve type motor valve 1 has a second inlet 17 on the other side of the valve body 6, which is for the inflow of a high-temperature side fluid that is the second fluid; and a second valve port 18 with a rectangular cross-section that communicates with a valve seat 8 formed by a cylindrical cavity. In this embodiment, the second outlet 17 and the second valve port 18 are not directly provided on the valve body 6, but are provided by installing a second valve seat 80, which forms the second valve port 18 as an example of a valve port forming member, and a second flow path forming member 25, which forms the second outlet 17, on the valve body 6.

[0180] In addition, the three-way valve type motor valve 1 has an outlet 26 on the bottom surface of the valve body 6 for the mixed fluid, i.e. the temperature control fluid, to flow out after the first and second fluids are mixed inside the valve body 6.

[0181] Here, the cryogenic fluid (first fluid) and the high-temperature fluid (second fluid) are fluids used for temperature control purposes. The fluid with the relatively lower temperature is called the cryogenic fluid, and the fluid with the relatively higher temperature is called the high-temperature fluid. Therefore, cryogenic fluid and high-temperature fluid refer to a relative relationship, and do not mean a fluid with an absolutely low temperature or an absolutely high temperature. As cryogenic fluid and high-temperature fluid, for example, in a temperature range of approximately 0 to 1 MPa and -85 to +120°C, fluorine-based inert liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) can be used.

[0182] However, as described above, the three-way valve type motor valve 1 according to Embodiment 2 is configured as a three-way valve type motor valve 1 for mixing two different fluids. Therefore, different first and second fluids flow in from the first and second inlet 7, 17. The pressure of the first and second fluids flowing in from the first and second inlet 7, 17 acts on the second fully sealed members 130, 150 through the gap between the outer periphery of the first and second adjusting rings 77, 87 and the inner periphery of the first and second adjusting rings 77, 87 and the first and second flow path forming members 15, 25.

[0183] In addition, the pressure of the first and second fluids flowing in from the first and second inlets 7 and 17 acts on the first fully sealed components 120 and 140 through the gap between the first and second flow path forming components 15 and 25 and the first and second valve seats 70 and 80.

[0184] Therefore, in this embodiment 2, the first fully sealed components 120 and 140 and the second fully sealed components 130 and 150 are arranged in the direction in which the pressure of the fluid acts on their openings. That is, the first fully sealed components 120 and 140 are arranged with their openings located inside the valve body 6, and the second fully sealed components 130 and 150 are arranged with their openings located outside the valve body 6.

[0185] The other components and functions are the same as those in Embodiment 1 described above, so their descriptions are omitted.

[0186] [Implementation Method 3]

[0187] Figure 17 A three-way valve type motor valve is shown as an example of a flow control valve according to Embodiment 3 of the present invention.

[0188] The three-way valve type motor valve 1 involved in this embodiment 3 is configured in a corresponding manner with the three-way valve type motor valve 1 for distribution and mixing.

[0189] like Figure 17 As shown, for the three-way valve type motor valve 1, two of the first fully sealed components 120 and 140 and two fully sealed components 130 and 150 installed on the valve body 6 are arranged back to back with their openings facing opposite sides.

[0190] That is, for the first fully sealed components 120 and 140, two fully sealed components 120 and 140 are respectively arranged back to back with their openings located on the inner and outer sides of the valve body 6.

[0191] Similarly, for the second fully sealed components 130 and 150, two fully sealed components 120 and 140 are respectively arranged back to back with their openings located on the inside and outside of the valve body 6.

[0192] Furthermore, the three-way valve type motor valve 1 according to Embodiment 3 can be used for both dispensing and mixing purposes with the same structure.

[0193] The other components and functions are the same as those in Embodiment 1 described above, so their descriptions are omitted.

[0194] [Example 1]

[0195] Figure 18 This is a conceptual diagram showing a temperature-maintaining device (cooler device) for a flow control three-way valve according to Embodiment 1 of the present invention.

[0196] This cooler device 100 is used, for example, in a semiconductor manufacturing apparatus that includes plasma etching processes to maintain the temperature of a semiconductor wafer, such as a temperature-controlled object W, at a constant temperature. When a temperature-controlled object W, such as a semiconductor wafer, is subjected to plasma etching or similar processes, the temperature may sometimes rise due to plasma generation or discharge.

[0197] The cooler device 100 includes a table-shaped temperature control unit 101, which is configured to contact the temperature control object W as an example of a temperature control mechanism. The temperature control unit 101 has a temperature control flow path 102 inside, through which a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio flows.

[0198] A mixing mechanism 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on / off valve 103. A low-temperature side thermostatic tank 104, storing a low-temperature fluid adjusted to a predetermined low-temperature side set temperature, is connected to one side of the mixing mechanism 111. A first pump 105 supplies low-temperature side fluid from the low-temperature side thermostatic tank 104 to the three-way valve type motor valve 1. Conversely, a high-temperature side thermostatic tank 106, storing a high-temperature fluid adjusted to a predetermined high-temperature side set temperature, is connected to the other side of the mixing mechanism 111. A second pump 107 supplies high-temperature side fluid from the high-temperature side thermostatic tank 106 to the three-way valve type motor valve 1. The mixing mechanism 111 is connected to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0199] In addition, a return pipe is provided on the outflow side of the temperature control flow path 102 of the temperature control unit 101, and is connected to the low-temperature side constant temperature bath 104 and the high-temperature side constant temperature bath 106 respectively via the flow control three-way valve 1 for distribution.

[0200] The cooler device 100 uses a three-way valve type motor valve 1 to distribute the control fluid flowing through the temperature control flow path 102 of the temperature control unit 101 to the low-temperature side thermostatic bath 104 and the high-temperature side thermostatic bath 106 respectively. The three-way valve type motor valve 1 controls the flow rate of the control fluid distributed to the low-temperature side thermostatic bath 104 and the high-temperature side thermostatic bath 106 by rotating the valve column 34 driven by the stepper motor 110.

[0201] As low-temperature and high-temperature fluids, for example, in a temperature range of approximately 0–1 MPa and -85–+120°C, fluorine-based inert liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) can be used.

[0202] Furthermore, in the mixing section 111 where the low-temperature fluid supplied from the low-temperature thermostatic bath 104 by the first pump 105 and the high-temperature fluid supplied from the high-temperature thermostatic bath 106 by the second pump 107 are mixed by a mixing mechanism that appropriately mixes the fluids after controlling the flow rates of each fluid. Of course, a three-way valve type motor valve 1 for mixing can also be used as the mixing mechanism, as described above.

[0203] [Example 2]

[0204] Figure 19 This is a conceptual diagram showing a temperature-maintaining device (cooler device) for a flow control three-way valve according to Embodiment 2 of the present invention.

[0205] A three-way valve type motor valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via an on / off valve 103. A low-temperature side thermostatic tank 104, storing a low-temperature fluid adjusted to a predetermined low-temperature side set temperature, is connected to the first flange 10 of the three-way valve type motor valve 1. A first pump 105 supplies low-temperature side fluid from the low-temperature side thermostatic tank 104 to the three-way valve type motor valve 1. A high-temperature side thermostatic tank 106, storing a high-temperature fluid adjusted to a predetermined high-temperature side set temperature, is connected to the second flange 19 of the three-way valve type motor valve 1. A second pump 107 supplies high-temperature side fluid from the high-temperature side thermostatic tank 106 to the three-way valve type motor valve 1. The third flange 27 of the three-way valve type motor valve 1 is connected to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0206] In addition, a return pipe is provided on the outflow side of the temperature control flow path 102 of the temperature control unit 101, which is connected to the low-temperature side constant temperature bath 104 and the high-temperature side constant temperature bath 106 respectively.

[0207] The three-way valve type motor valve 1 includes a stepper motor 108 that rotates and drives the valve stem 34. Additionally, a temperature sensor 109 is provided in the temperature control unit 101 to detect the temperature of the temperature control unit 101. The temperature sensor 109 is connected to a control device (not shown), which controls the drive of the stepper motor 108 of the three-way valve type motor valve 1.

[0208] like Figure 19 As shown, the cooler device 100 detects the temperature of the temperature control object W by a temperature sensor 109, and based on the detection result of the temperature sensor 109, controls the rotation of the stepper motor 108 of the three-way valve type motor valve 1 by a control device, thereby controlling the temperature of the temperature control object W to be equal to a predetermined set temperature.

[0209] The three-way valve type motor valve 1 drives the valve column 34 by rotating the stepper motor 108 to control the mixing ratio of the low-temperature fluid supplied by the first pump 105 from the low-temperature side thermostatic bath 104 and the high-temperature fluid supplied by the second pump 107 from the high-temperature side thermostatic bath 106. It controls the temperature of the temperature control fluid, which is a mixture of the low-temperature side fluid and the high-temperature side fluid, supplied from the three-way valve type motor valve 1 to the temperature control flow path 102 of the temperature control unit 101 via the on / off valve 103.

[0210] At this time, the three-way valve type motor valve 1 can control the mixing ratio of the low-temperature side fluid and the high-temperature side fluid with high precision according to the rotation angle of the valve column 34, and can fine-tune the temperature of the temperature control fluid. Therefore, the cooler device 100 using the three-way valve type motor valve 1 according to this embodiment, by having the temperature control fluid, whose mixing ratio of the low-temperature side fluid and the high-temperature side fluid is controlled and adjusted to a predetermined temperature, flow to the temperature control flow path 102 of the temperature control unit 101, the temperature control unit 101 can control the temperature of the contacting temperature control object W to the desired temperature.

[0211] As low-temperature and high-temperature fluids, fluorine-based inert liquids such as Opteon (registered trademark) (manufactured by Chemours-Mitsui Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) can be used, which can be applied in a temperature range of approximately -85 to +120°C and pressures of 0 to 1 MPa.

[0212] Industrial applicability

[0213] Three-way valves for flow control and temperature control devices are available to improve the sealing performance of fluids at low temperatures of around -85°C.

[0214] Explanation of reference numerals in the attached figures

[0215] 1... Three-way valve type motor valve

[0216] 2...Valve Section

[0217] 3...Actuator section

[0218] 4...Sealing part

[0219] 5...Coupling Section

[0220] 6...Valve body

[0221] 7...First Stream Entry

[0222] 8...valve seat

[0223] 9...Valve Port 1

[0224] 10...First flange component

[0225] 11... Bolts with hexagonal holes

[0226] 12...Flange section

[0227] 13... Insertion section

[0228] 14... Piping Connections

[0229] 15...First flow path forming component

[0230] 16... Chamfer

[0231] 17...Second Stream Entrance

[0232] 18...Second valve port

[0233] 19...Second flange component

[0234] 20... Bolts with hexagonal holes

[0235] 21...Flange section

[0236] 22... Insertion section

[0237] 23... Piping Connections

[0238] 25...Second Flow Path Forming Component

[0239] 34...valve column

[0240] 35...valve core

[0241] 45...Valve Actuating Section

[0242] 45a, 45b... both ends

[0243] 70, 80... Valve seats 1 and 2

[0244] 74, 84... recessed

[0245] 120, 130, 140, 150...all sealed parts.

Claims

1. A three-way valve for flow control, characterized in that, The above-mentioned three-way valve for flow control has the following features: The valve body has a valve seat, a first outlet and a second outlet. The valve seat has a first valve port with a rectangular cross-section for fluid to flow out and a second valve port with a rectangular cross-section for fluid to flow out. It is formed by a cylindrical cavity. The first outlet and the second outlet allow the fluid to flow out from the first outlet and the second outlet to the outside, respectively. The first and second valve port forming members are installed on the valve body and respectively form the first and second valve ports; A cylindrical valve core is rotatably disposed in the valve seat of the valve body and has an opening. When the first valve port is switched from the closed state to the open state, the second valve port is switched from the open state to the closed state. A pressure-acting part applies the pressure of the fluid leaking from the gap between the valve core and the valve seat to the first and second valve port forming members, suppressing positional changes of the valve core when the valve core opens and closes the first and second valve ports; and The drive mechanism rotates to drive the valve core. The aforementioned pressure-acting part has cylindrical first and second flow path forming members, which are installed on the valve body and form the first and second flow outlets, respectively. The two ends of the first and second flow path forming members along their length are sealed by a sealing mechanism. This sealing mechanism is made of synthetic resin and has a U-shaped cross-section, and is constructed of a metal spring member that applies force in the opening direction. The sealing mechanism is configured such that the opening with the U-shaped cross section opens toward the pressure action part in the axial direction of the first and second flow path forming members.

2. A three-way valve for flow control, characterized in that, The above-mentioned three-way valve for flow control has the following features: The valve body has a valve seat, a first inlet and a second inlet. The valve seat is provided with a first valve port in a rectangular cross-section for the inflow of a first fluid and a second valve port in a rectangular cross-section for the inflow of a second fluid. It is formed by a cylindrical cavity. The first and second inlets allow the first and second fluids to flow from the outside into the first and second valve ports, respectively. The first and second valve port forming members are installed on the valve body and respectively form the first and second valve ports; A cylindrical valve core is rotatably disposed in the valve seat of the valve body and has an opening. When the first valve port is switched from the closed state to the open state, the second valve port is switched from the open state to the closed state. The pressure-acting part applies the pressure of the first and second fluids leaking from the gap between the valve core and the valve seat to the first and second valve port forming members, thereby suppressing the positional change of the valve core when the valve core opens and closes the first and second valve ports. as well as The drive mechanism rotates to drive the valve core. The aforementioned pressure-acting part has cylindrical first and second flow path forming members, which are installed on the valve body and form the first and second flow inlets. The two ends of the first and second flow path forming members along their length are sealed by a sealing mechanism. This sealing mechanism is made of synthetic resin and has a U-shaped cross-section, and is constructed of a metal spring member that applies force in the opening direction. The sealing mechanism is configured such that the opening with the U-shaped cross section opens toward the pressure action part in the axial direction of the first and second flow path forming members.

3. The three-way valve for flow control as described in claim 1, characterized in that, One end of the first and second flow path forming members along the length direction is sealed by the first sealing mechanism relative to the inner surface of the first and second valve port forming members, and the other end of the first and second flow path forming members along the length direction is sealed by the second sealing mechanism relative to the inner surface of the valve body.

4. The three-way valve for flow control as described in claim 3, characterized in that, One end of the first and second flow path forming members along the length direction is formed into a thin-walled cylindrical shape, and the inner circumferential surface of the end of the first and second valve port forming members is sealed by a first sealing mechanism. The other end of the first and second flow path forming members along the length direction is formed into a cylindrical shape with a thicker wall than the first end, and the inner circumferential surface of the valve body is sealed by a second sealing mechanism.

5. The three-way valve for flow control as described in claim 4, characterized in that, The first sealing mechanism is configured to open toward the other end of the first and second flow path forming members, and the second sealing mechanism is configured to open toward one end of the first and second flow path forming members.

6. The three-way valve for flow control as described in claim 5, characterized in that, The first sealing mechanism is disposed at the stepped portion, which is located on the end face of the first and second flow path forming members on the side facing the pressure action portion. The flow control three-way valve has a first and a second pressure plate, which closes the stepped portion on the end face of the first and second flow path forming member on the side of the pressure action portion, so that the pressure of the pressure action portion acts on the first and second valve port forming member.

7. The three-way valve for flow control as described in claim 1, characterized in that, The aforementioned sealing mechanism consists of fully sealed components.

8. The three-way valve for flow control as described in claim 7, characterized in that, The sealing mechanism consists of two identical fully sealed components arranged back-to-back.

9. A temperature control device, characterized in that, The above-mentioned temperature control device includes: A temperature control mechanism having a temperature control flow path for the flow of a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio. The first supply mechanism supplies the aforementioned cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side. The second supply mechanism supplies the aforementioned high-temperature side fluid at a predetermined second temperature that has been adjusted to the high-temperature side. A mixing mechanism, connected to the first and second supply mechanisms, mixes the low-temperature fluid supplied from the first supply mechanism with the high-temperature fluid supplied from the second supply mechanism and supplies it to the temperature control flow path; and A flow control valve controls the flow rate of the temperature control fluid after it has passed through the aforementioned temperature control flow path and distributes it to the first supply mechanism and the second supply mechanism. The flow control valve described above is a three-way valve for flow control as described in any one of claims 1, 3 to 8.

10. A temperature control device, characterized in that, The above-mentioned temperature control device includes: A temperature control mechanism having a temperature control flow path for the flow of a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid with an adjusted mixing ratio. The first supply mechanism supplies the aforementioned cryogenic fluid at a predetermined first temperature adjusted to the cryogenic side. The second supply mechanism supplies the aforementioned high-temperature side fluid at a predetermined second temperature that has been adjusted to the high-temperature side. as well as A flow control valve, connected to the first and second supply mechanisms, adjusts the mixing ratio of the low-temperature fluid supplied from the first supply mechanism and the high-temperature fluid supplied from the second supply mechanism, and directs the mixture into the temperature control flow path. The flow control valve described above is a three-way valve for flow control as described in any one of claims 2 to 8.

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