High-low temperature test module with carrier plate transfer mechanism

Abstract

The present application relates to a kind of tray transfer mechanism and high-low temperature test module with tray transfer mechanism, and tray transfer mechanism includes a base, a transmission assembly, a platform and a card clamping assembly.The transmission assembly includes a first driving element, a screw and a sliding table, can drive the card clamping assembly on platform linear displacement along slide rail.Card clamping assembly includes a second driving element, a connecting piece, a rotating rod, at least one clamping mechanism and a gear set, can make the swing of clamping mechanism rotate, to carry out the action of pressing down and separating.This tray transfer mechanism has the advantages of convenient disassembly and easy maintenance, and occupies smaller space to complete the task of conveying semiconductor element tray.In addition, the tray transfer mechanism of the present application can be applied to high-low temperature extreme environment temperature, so when high-low temperature test is carried out, the problem that electronic parts or electronic sensor is damaged due to unable to withstand high-low temperature extreme temperature can be effectively avoided.

Description

Technical Field

[0001] This invention relates to a tray transfer mechanism and a high and low temperature test module with a tray transfer mechanism, and more particularly to a tray transfer mechanism suitable for high and low temperature testing of semiconductor devices and a high and low temperature test module with a tray transfer mechanism. Background Technology

[0002] For example, US Patent Publication No. 9841461 discloses a transport device for semiconductor component transfer trays, comprising a driver, a trolley, and a transfer member mounted on the trolley. The transfer member has a pin that can be inserted into a socket on the transfer tray, causing the transfer tray to engage with the trolley. Therefore, when the trolley is driven by the driver, it can synchronously move the transfer tray along a track, thereby achieving the effect of transferring the transfer tray to different test stations. This design requires the addition of electronic components or sensors to sense whether the transfer tray is placed in the correct position so that the pin of the transfer member can be precisely engaged with the socket on the transfer tray.

[0003] However, if the aforementioned semiconductor component transfer tray conveying device is applied to the high and low temperature test module, the electronic components or electronic sensors used for positioning will be unable to withstand the extreme temperatures and will be damaged. Consequently, it will be impossible to determine whether the transfer tray is placed in the correct position, making it impossible for the moving trolley and the transfer tray to be connected, thus losing the function of transferring the transfer tray.

[0004] Therefore, there is an urgent need for a carrier transfer mechanism that can solve the above problems, as well as a high and low temperature test module with a carrier transfer mechanism. Summary of the Invention

[0005] The main objective of this invention is to provide a tray transfer mechanism, which primarily includes a transmission component and a locking component. The transmission component drives the locking component on the platform to move linearly along a slide rail, and the locking component causes the swinging part of the clamping mechanism to rotate, performing downward locking or upward lifting actions. Therefore, through its modular design, the tray transfer mechanism of this invention has the advantages of convenient assembly and disassembly and easy maintenance, and occupies a small space while completing the task of transferring semiconductor component trays.

[0006] To achieve the above objectives, the tray transfer mechanism of the present invention includes a base, a transmission assembly, a platform, and a locking assembly. The base is fixedly provided with a slide rail, two screw bearing seats, and two connecting member bearing seats. The transmission assembly includes a first driving element, a screw, and a slide. The first driving element is fixedly mounted on the base, the screw is connected to the first driving element and passes through the two screw bearing seats, and the slide is sleeved on the screw. The platform is fixedly provided with two rotating rod bearing seats, slidably mounted on the slide rail, and fixedly connected to the slide, so that the platform is linearly displaced along the slide rail by the drive of the slide. The latching assembly includes a second driving element, a connector, a rotating rod, at least one clamping mechanism, and a gear set. The second driving element is fixed on the base. The connector is connected to the second driving element and passes through two connector bearing seats. The rotating rod passes through two rotating rod bearing seats. At least one clamping mechanism is fixed on the rotating rod and pivots coaxially with the rotating rod. The gear set includes at least one set of driving gears on the connector and at least one set of driven gears on the rotating rod. At least one driving gear meshes with at least one driven gear.

[0007] The aforementioned screw can be connected to a first drive shaft of the first drive element via a universal joint. Therefore, it avoids the problem of excessive vibration during power transmission when the shaft centers of the screw and the first drive shaft are not aligned during long-distance power transmission.

[0008] The aforementioned connector can be used to connect a second drive shaft of the second drive element via a universal joint. Therefore, it avoids the problem of excessive vibration during power transmission when the shaft centers of the connector and the second drive shaft are not aligned during long-distance power transmission.

[0009] The first driving element can be a motor, and the second driving element can be a cylinder. Therefore, the transmission assembly can use a motor as its power source, and the latching assembly can use a cylinder as its power source.

[0010] The aforementioned connector can be a spline, which includes a spline shaft and a guide groove recessed in the spline shaft. Therefore, by setting the guide groove of the spline, the rotational freedom of the drive gear relative to the spline can be restricted, so that power can be transmitted to the drive gear through the connector, and then from the drive gear to the driven gear, thereby controlling the clamping mechanism to perform rotational engagement or rotational disengagement.

[0011] The aforementioned at least one drive gear may be two drive gears. The connecting member is provided with a bushing that clamps the two drive gears. The bushing can move in the axial direction of the connecting member and defines the distance between the two drive gears, so that the two drive gears mesh with the two driven gears.

[0012] The aforementioned at least one clamping mechanism may include a swinging part and a pin fixed to the swinging part. Therefore, the clamping mechanism of the present invention can complete the action of rotational fastening or rotational opening by rotating and swinging, and fasten the pin to the object to be connected.

[0013] The aforementioned at least one clamping mechanism can be two clamping mechanisms, which are respectively fixed at the positions of the rotating rods covered by the two rotating rod bearing seats and pivot coaxially with the rotating rods. Therefore, the rotating rod bearing seats can be used as the support for the clamping mechanisms to restrict the axial displacement of the clamping mechanisms, so that they can complete the rotational locking or rotational unlocking actions only by being driven by the rotating rods.

[0014] Another objective of this invention is to provide a high and low temperature testing module with a tray transfer mechanism, which is used in a high and low temperature testing machine. Because the tray transfer mechanism of this invention is a pure metal mechanism without electronic components or electronic sensors, it can be used in extreme high and low temperature environments and can accurately align the tray. This effectively avoids the problem of electronic components or electronic sensors being damaged due to their inability to withstand extreme high and low temperatures, as described in the prior art.

[0015] To achieve the above objectives, the high and low temperature testing module with a tray transfer mechanism of the present invention, which withstands extreme high and low temperature environments, includes a conveyor base, a tray, and a tray transfer mechanism. The conveyor base is provided with a track. The tray has multiple positioning holes and is supported on the track. The tray transfer mechanism, adjacent to the conveyor base, includes a base, a transmission assembly, a platform, and a locking assembly. The base is fixedly provided with a slide rail, two screw support seats, and two connecting member support seats. The transmission assembly includes a first driving element, a screw, and a slide. The first driving element is fixedly mounted on the base. The screw is connected to the first driving element and passes through the two screw support seats. The slide is sleeved on the screw. The platform is fixedly provided with two rotating rod support seats, slidably mounted on the slide rail, and fixedly connected to the slide, so that the platform is linearly displaced along the slide rail by the drive of the slide. The latching assembly includes a second driving element, a connector, a rotating rod, at least one clamping mechanism, and a gear set. The second driving element is fixed on a base. The connector connects to the second driving element and passes through two connector bearing seats. The rotating rod passes through two rotating rod bearing seats. At least one clamping mechanism is fixed on the rotating rod and pivots coaxially with the rotating rod. The gear set includes at least one set of driving gears on the connector and at least one set of driven gears on the rotating rod. At least one driving gear meshes with at least one driven gear. The at least one clamping mechanism can selectively latch multiple positioning holes or leave multiple positioning holes unlatched.

[0016] When at least one clamping mechanism engages with multiple positioning holes, it can drive the carrier plate to move along the track. Therefore, after the clamping mechanism and the carrier plate are engaged, the transmission assembly can drive the clamping mechanism to transfer the carrier plate to different test stations.

[0017] The aforementioned transport carrier may also include a lifting device, allowing the carrier to selectively move upwards to contact a test head or downwards away from the test head. Therefore, by providing the lifting device, the semiconductor components within the carrier can be directly connected to the test head in the high and low temperature test module for electrical testing.

[0018] The above overview and the following detailed description are illustrative in nature and are intended to further illustrate the invention. Other objects and advantages of the invention will be set forth in the following description and illustrations. Attached Figure Description

[0019] Figure 1 This is a perspective view of a preferred embodiment of the tray transfer mechanism of the present invention.

[0020] Figure 2 This is a perspective view of the connector, drive gear, and bushing according to a preferred embodiment of the present invention.

[0021] Figure 3 This is a perspective view of the clamping mechanism of a high and low temperature test module with a carrier plate transfer mechanism according to a preferred embodiment of the present invention, showing that multiple positioning holes are not fastened.

[0022] Figure 4 This is a side view of the clamping mechanism of a preferred embodiment of the present invention without engaging multiple positioning holes.

[0023] Figure 5 This is a perspective view of the clamping mechanism of a high and low temperature test module with a carrier plate transfer mechanism according to a preferred embodiment of the present invention, showing how the clamping mechanism secures multiple positioning holes.

[0024] Figure 6 This is a side view of a preferred embodiment of the present invention, showing the clamping mechanism fastening multiple positioning holes.

[0025] Figure 7 This is a schematic diagram of the carrier plate of a high and low temperature test module with a carrier plate transfer mechanism moving along a track, according to a preferred embodiment of the present invention.

[0026] Figure 8 This is a schematic diagram of the upward movement of the carrier plate of the high and low temperature test module with a carrier plate transfer mechanism according to a preferred embodiment of the present invention.

[0027] Figure 9 This is a front view of a high and low temperature test module with a carrier plate transfer mechanism according to a preferred embodiment of the present invention.

[0028] [Explanation of Labels in the Attached Image]

[0029] 1-Carrier transfer mechanism

[0030] 10-High and Low Temperature Test Module

[0031] 2-base

[0032] 201, 202 - baffles

[0033] 21-Slide rail

[0034] 22-Screw bearing seat

[0035] 23-Connector bearing seat

[0036] 3-Transmission Components

[0037] 31-First driving element

[0038] 310 - First Drive Shaft

[0039] 32-Screw

[0040] 320-Universal Joint

[0041] 33-Slide

[0042] 4-Platform

[0043] 41-Rotor Bearing Seat

[0044] 5-Card Snap-on Component

[0045] 51-Second driving element

[0046] 510 - Second Drive Shaft

[0047] 52-Connector

[0048] 520-Universal Joint

[0049] 521-Splined Shaft

[0050] 522-Guide Groove

[0051] 523-Bushing

[0052] 53-Rotor

[0053] 54-Clamping Mechanism

[0054] 541-Swinging Part

[0055] 542-Pin

[0056] 55-Gear Set

[0057] 551-Drive Gear

[0058] 552-Driven Gear

[0059] 6-Conveyor Carrier

[0060] 61-orbit

[0061] 62-Lifting device

[0062] 7-Carrier Disk

[0063] 71-Positioning Hole

[0064] 8-Test Head

[0065] R-Breaking Space

[0066] D-region Detailed Implementation

[0067] Please see Figure 1 This is a perspective view of a preferred embodiment of the tray transfer mechanism of the present invention. The figure shows a tray transfer mechanism 1, which mainly includes a base 2, a transmission component 3, a platform 4, and a locking component 5.

[0068] In this embodiment, the base 2 is fixedly provided with a slide rail 21, two screw bearing seats 22, and two connecting member bearing seats 23, serving as a fixed base for the tray transfer mechanism 1 to support the transmission assembly 3, the platform 4, and the latching assembly 5. The transmission assembly 3 includes a first driving element 31, a screw 32, and a slide 33. The first driving element 31 is fixedly mounted on a baffle 201 extending from one end of the base 2, such as... Figure 1 As shown, the baffle 201 and the base 2 are assembled into a combined structure, but this is not a limitation; the baffle 201 and the base 2 can also be an integrally formed structure. In this embodiment, the first driving element 31 is a motor. The main reason why the transmission assembly 3 uses a motor as a power source is that the motor is more precise in control and can judge abnormal states through the returned signals, making the detection of abnormalities more immediate. The screw 32 is connected to a first driving shaft 310 of the first driving element 31 by a universal joint 320 and passes through two screw bearing seats 22. In this embodiment, the first driving shaft 310 is the motor drive shaft of the motor. The slide 33 is sleeved on the screw 32 to provide power to make the slide 33 produce linear displacement. The universal joint 320 is used to avoid the problem of large vibration during power transmission when the center positions of the screw 32 and the first drive shaft 310 are not consistent when transmitting power over long distances. In another embodiment, the screw 32 can be directly connected to the first drive element 31, and the first drive element 31 can directly drive the screw 32 to rotate.

[0069] In this embodiment, the platform 4 is fixedly provided with two rotating rod bearing seats 41, which are slidably mounted on the slide rail 21 and fixedly connected to the slide table 33, so that the platform 4 can be linearly displaced along the slide rail 21 by the drive of the slide table 33. The displacement power transmission of the transmission component 3 is provided by the first driving element 31, which is transmitted to the screw 32 through the universal joint 320. The screw 32 then causes the slide table 33 to produce linear displacement, thereby driving the snap-fit ​​component 5 set on the platform 4 to move synchronously, so as to achieve the effect of transferring the object to be connected.

[0070] In this embodiment, the latching assembly 5 includes a second driving element 51, a connector 52, a rotating rod 53, two clamping mechanisms 54, and a gear set 55. The second driving element 51 is fixed to a baffle 202 extending from the other end of the base 2, as shown below. Figure 1 As shown, the baffle 202 and the base 2 are assembled into a combined structure, but this is not a limitation; the baffle 201 and the base 2 can also be an integrally formed structure. The connector 52 is connected to a second drive shaft 510 of the second drive element 51 by a universal joint 520 and passes through two connector bearing seats 23. In this embodiment, the second drive element 51 is a cylinder, and the second drive shaft 510 is the cylinder drive shaft of the cylinder. The function of the universal joint 520 is to avoid the problem of large vibration during power transmission when the shaft center positions of the connector 52 and the second drive shaft 510 are not consistent when transmitting power over a long distance. In another embodiment, the connector 52 can also be directly connected to the second drive element 51, and the second drive element 51 directly drives the connector 52 to rotate. Furthermore, the rotating rod 53 passes through two rotating rod support seats 23, and two clamping mechanisms 54 are respectively fixed on the rotating rod 53, pivoting coaxially with the rotating rod 53. In this embodiment, the two clamping mechanisms 54 are respectively fixed at the positions of the rotating rod 53 covered by the two rotating rod support seats 41, pivoting coaxially with the rotating rod 53. Therefore, the two rotating rod support seats 41 can be used as supports for the clamping mechanisms 54, restricting the axial displacement of the clamping mechanisms 54, so that they are only driven by the rotating rod 53 to complete the rotational engagement or disengagement action. In this embodiment, the gear set 55 includes two drive gears 551 sleeved on the connecting member 52 and two driven gears 552 sleeved on the rotating rod 53, wherein the two drive gears 551 respectively mesh with the two driven gears 552.

[0071] Please refer to the following: Figure 2This is a perspective view of a connector, drive gear, and bushing according to a preferred embodiment of the present invention. As shown in the figure, the connector 52 in this embodiment is a spline, which includes a spline shaft 521 and a guide groove 522 recessed in the spline shaft 521. The guide groove 522 of the connector 52 restricts the rotational freedom of the drive gear 551 relative to the connector 52, allowing power to be transmitted from the connector 52 to the drive gear 551, and then from the drive gear 551 to the driven gear 552, thereby controlling the clamping mechanism 54 to perform rotational engagement or disengagement. Furthermore, the connector 52 is fitted with a bushing 523 that clamps the two drive gears 551. The bushing 523 can move in the axial direction of the connector 52 and defines the relative distance between the two drive gears 551, allowing the two drive gears 551 to mesh with the two driven gears 552. Furthermore, please refer to... Figure 3 A partial enlarged view of the clamping mechanism 54 is shown in the figure. The clamping mechanism 54 of this embodiment includes a swing part 541 and two pins 542 fixed on the swing part 541. The swing part 541 is disposed on the rotating rod 53, so that the clamping mechanism 54 can complete the action of rotating and locking or rotating and opening by rotating and swinging, and press down the pins 542 to lock or release the object to be connected.

[0072] The rotational power of the buckle assembly 5 is provided by the second drive element 51, transmitted to the connector 52 via the universal joint 520, and then transmitted to the drive gear 551 via the guide groove 522 of the connector 52. After receiving the power from the drive gear 551, the driven gear 552 will cause the rotating rod 53 to rotate, thereby driving the swing part 541 of the clamping mechanism 54 to rotate, and pressing down the pin 542 to fasten or release the object to be connected.

[0073] Through the above design, the transmission component 3 can drive the latching component 5 on the platform 4 to move linearly along the slide rail 21, and the latching component 5 can cause the swinging part 541 of the clamping mechanism 54 to rotate, so as to perform the action of pressing down to lock or lifting up to separate. Therefore, through the modular design, the tray transfer mechanism 1 of the present invention has the advantages of convenient disassembly and assembly and easy maintenance, and occupies a small space to complete the task of transferring semiconductor component trays.

[0074] Please see Figure 3 and Figure 4The figures show a perspective view and a side view of a high and low temperature test module with a tray transfer mechanism according to a preferred embodiment of the present invention, showing the clamping mechanism without engaging multiple positioning holes. The figure illustrates a high and low temperature test module 10 with a tray transfer mechanism, which withstands extreme high and low temperature environments. It mainly includes: a transport carrier 6, three trays 7, and a tray transfer mechanism 1. The transport carrier 6 is provided with a track 61. The three trays 7 are respectively provided with multiple positioning holes 71 and are supported on the track 61. The tray transfer mechanism 1 is adjacent to the transport carrier 6, and its structural features have been described previously and will not be repeated here. The two clamping mechanisms 54 can selectively engage or disengage the multiple positioning holes 71, allowing the clamping components 5 and the trays 7 to connect or separate, thereby performing the tray transfer function or not performing the tray transfer function. Figure 3 and Figure 4 As shown, the two clamping mechanisms 54 did not engage the multiple positioning holes 71, so the clamping assembly 5 and the carrier plate 7 were separated. At this time, the transmission assembly 3 could not drive the clamping mechanism 54 to move the carrier plate 7 to different test stations.

[0075] Please see Figure 5 and Figure 6 These are, respectively, a perspective view and a side view of the clamping mechanism of the high and low temperature test module with a tray transfer mechanism according to a preferred embodiment of the present invention, showing the clamping mechanism engaging multiple positioning holes. As shown in the figures, the two clamping mechanisms 54 are driven by the rotational power of the clamping assembly 5, causing the swinging part 541 to rotate and pressing the pin 542 down to engage with the multiple positioning holes 71. Therefore, the clamping assembly 5 and the tray 7 are connected. Please refer to the following: Figure 7 This is a schematic diagram of the movement of the tray along the track in a high and low temperature test module with a tray transfer mechanism according to a preferred embodiment of the present invention. As shown in the figure, since the clamping assembly 5 and the tray 7 are connected, the transmission assembly 3 can simultaneously drive the two clamping mechanisms 54 to move the two trays 7 forward or backward along the track 61, and transfer the two trays 7 to different test stations of the high and low temperature test module 10, thereby accelerating the transfer time of the trays 7 and increasing the test efficiency. The tray transfer mechanism of the present invention can replace the rotating rod 53 of appropriate length as needed, and add clamping mechanisms 54 and rotating rod bearing seats 41. Multiple trays 7 can be transferred to multiple test stations of the high and low temperature test module 10 at the same time. For example, multiple trays 7 can be transferred to different test stations such as high temperature, low temperature and normal temperature at the same time, so as to flexibly carry out high and low temperature tests and reduce the cost and time of redeveloping the tray transfer mechanism 1.

[0076] Please see Figure 8This is a schematic diagram of the upward movement of the carrier plate in a high and low temperature test module with a carrier plate transfer mechanism according to a preferred embodiment of the present invention. As shown in the figure, in this embodiment, the transport carrier 6 further includes a lifting device 62, which allows the carrier plate 7 to selectively move upward to contact a test head 8 or downward away from the test head 8, so that the semiconductor components in the carrier plate 7 can be directly connected to the test head 8 in the high and low temperature test module 10 and subjected to electrical testing. It should be noted that before the lifting device 62 moves the carrier plate 7 upward, the clamping assembly 5 will first provide rotational power to lift the clamping mechanism 54 and separate it from the carrier plate 7, providing a clearance space R. During the upward pressure test of the carrier plate 7, the clamping mechanism 54 can avoid interference with the carrier plate 7, thereby avoiding collision with the test head 8 and damage.

[0077] Please see Figure 9 This is a front view of a high and low temperature test module with a tray transfer mechanism according to a preferred embodiment of the present invention. As shown in the figure, in this embodiment, since the area D of the tray transfer mechanism 1 of the high and low temperature test module 10 corresponding to the transport carrier 6 is free of electronic components or electronic sensors, the stability and reliability of the tray transfer mechanism 1 are optimized, and the service life of the tray transfer mechanism 1 is increased. In addition, by setting the first driving element 31 and the second driving element 51 of the present invention on the outside of the two baffles 201, 202 respectively, firstly, the space used for the mechanism design between the two baffles 201, 202 can be reduced, so that the first driving element 31 and the second driving element 51 do not occupy the space of the test equipment, thereby achieving an optimal space configuration; secondly, the first driving element 31 and the second driving element 51 can be more easily inspected, improving the convenience of maintenance and replacement.

[0078] Through the above design, the present invention can use the tray transfer mechanism 1 in a high and low temperature testing machine. Since the tray transfer mechanism 1 of the present invention is a pure metal mechanism without electronic parts or electronic sensors, it can be used in extreme high and low temperature environments and can accurately align the tray 7. It can effectively avoid the problem of electronic parts or electronic sensors being damaged due to their inability to withstand extreme high and low temperatures, as described in the prior art.

[0079] The specific embodiments described above further illustrate the purpose, technical solutions, and beneficial effects of this disclosure. It should be understood that the above descriptions are merely specific embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A tray transfer mechanism, comprising: A base is fixedly provided with a slide rail, two screw bearing seats and two connecting member bearing seats; A transmission assembly includes a first driving element, a screw, and a slide. The first driving element is fixed on the base, the screw is connected to the first driving element and passes through the two screw bearing seats, and the slide is sleeved on the screw. A platform is fixedly provided with two rotating rod bearing seats, which slide on the slide rail and are fixed to the slide table, so that the platform is linearly displaced along the slide rail by the drive of the slide table; and A snap-fit ​​assembly includes a second drive element, a connector, a rotating rod, at least one clamping mechanism, and a gear set. The second drive element is fixed on the base. The connector connects to the second drive element and passes through two connector bearing seats. The connector is a spline, which includes a spline shaft and a guide groove recessed in the spline shaft. The rotating rod passes through two rotating rod bearing seats. The at least one clamping mechanism is fixed on the rotating rod and pivots coaxially with the rotating rod. The gear set includes at least one set of drive gears disposed on the connector and at least one set of driven gears disposed on the rotating rod. The at least one drive gear meshes with the at least one driven gear.

2. The carrier transfer mechanism according to claim 1, wherein The screw is connected to a first drive shaft of the first drive element via a universal joint.

3. The carrier transfer mechanism according to claim 1, wherein The connector is connected to a second drive shaft of the second drive element via a universal joint.

4. The carrier transfer mechanism according to claim 1, wherein The first driving element is a motor, and the second driving element is a cylinder.

5. The tray transfer mechanism according to claim 1, wherein, The at least one drive gear is two drive gears, and the connecting piece is provided with a bushing that is clamped between the two drive gears.

6. The tray transfer mechanism according to claim 1, wherein, The at least one clamping mechanism includes a swinging part and a pin fixed to the swinging part.

7. The tray transfer mechanism according to claim 1, wherein, The at least one clamping mechanism is actually two clamping mechanisms, which are respectively fixed at the positions of the rotating rods covered by the two rotating rod bearing seats and pivot coaxially with the rotating rods.

8. A high and low temperature test module with a carrier plate transfer mechanism, which withstands extreme high and low temperature environments, comprising: A transport carrier is equipped with a track; A tray, with multiple positioning holes, is supported on the track; and A tray transfer mechanism, adjacent to the conveyor, includes a base, a transmission assembly, a platform, and a locking assembly. The base is fixedly provided with a slide rail, two screw bearing seats, and two connecting member bearing seats. The transmission assembly includes a first drive element, a screw, and a slide. The first drive element is fixed to the base, the screw is connected to the first drive element and passes through the two screw bearing seats, and the slide is sleeved on the screw. The platform is fixedly provided with two rotating rod bearing seats, slidably mounted on the slide rail, and fixedly connected to the slide, allowing the platform to move linearly along the slide rail under the drive of the slide. The locking assembly includes a second... The device comprises a drive element, a connector, a rotating rod, at least one clamping mechanism, and a gear set. The second drive element is fixed on the base. The connector connects to the second drive element and passes through the two connector bearing seats. The connector is a spline, which includes a spline shaft and a guide groove recessed in the spline shaft. The rotating rod passes through the two rotating rod bearing seats. The at least one clamping mechanism is fixed on the rotating rod and pivots coaxially with the rotating rod. The gear set includes at least one set of drive gears disposed on the connector and at least one set of driven gears disposed on the rotating rod. The at least one drive gear meshes with the at least one driven gear. in, The at least one clamping mechanism can selectively engage or disengage the plurality of positioning holes.

9. The high and low temperature test module with a tray transfer mechanism according to claim 8, wherein, When the at least one clamping mechanism engages with the plurality of positioning holes, the at least one clamping mechanism drives the carrier plate to move along the track.

10. The high and low temperature test module with a pallet transfer mechanism according to claim 8, wherein, The transport carrier also includes a lifting device, which allows the tray to be selectively raised to contact a test head or lowered away from the test head.

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