重载精密型多维位姿调控系统

By designing a heavy-duty precision multi-dimensional pose control system, and utilizing multi-dimensional translation and rotation components, the problem of high-precision adjustment under heavy load was solved, and micron-level precise alignment of the cavity system was achieved.

CN116658775BActive Publication Date: 2026-07-17SHANGHAI TECH UNIV

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI TECH UNIV
Filing Date
2023-06-01
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies struggle to simultaneously achieve high load and high precision six-dimensional adjustment, especially in the field of optics, where micrometer-level precise alignment of sample or probe cavities is required.

Method used

A heavy-duty precision multidimensional pose control system was designed, including a platform, first, second and third load adjustment devices. Through multidimensional translation and rotation components, combined with controllers and sensors, the system achieves precise adjustment of the cavity system.

Benefits of technology

It enables translation of the cavity system along the X, Y, and Z axes and rotation around the X, Y, and Z axes, achieving high-precision adjustment at the micrometer level and meeting the precise positioning requirements of optical equipment.

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Abstract

本发明提供一种重载精密型多维位姿调控系统,包括:搭载台;第一负载调节装置,第一负载调节装置包括第一底座、第一升降驱动机构、第一Z向升降台、第一Y向平移组件以及第一X向平移组件;第二负载调节装置,第二负载调节装置包括第二底座、第二升降驱动机构、第二Z向升降台、第二Y向平移组件、第二X向平移组件以及第二X向驱动机构;第三负载调节装置,第三负载调节装置包括第三底座、第三升降驱动机构、第三Z向升降台、第三X向平移组件、第三X向驱动机构、第三Y向平移组件以及第三Y向驱动机构。本发明能够对腔体系统沿X轴方向、沿Y轴方向、沿Z轴方向、绕X轴转动、绕Y轴转动以及绕Z轴转动进行精准调节。
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