Two-dimensional parallel bionic piezoelectric driver and excitation method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANDONG UNIV
- Filing Date
- 2023-05-29
- Publication Date
- 2026-06-16
Smart Images
Figure CN116667696B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of piezoelectric drive technology, specifically relating to a two-dimensional parallel bionic piezoelectric actuator and its excitation method. Background Technology
[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.
[0003] With the development of science and technology, micro / nano technology is increasingly demanding higher requirements for the stroke, accuracy, and load of drive systems in many cutting-edge fields such as micro / nano manipulation, precision optics, biomedicine, ultra-precision manufacturing, and aerospace. To meet these needs, various new types of actuators with precision driving and positioning functions have been developed. Compared with traditional actuators and other new types of actuators, piezoelectric actuators have many advantages, including compact structure, high precision, low power consumption, low noise, rapid response, large driving force, and wide operating frequency. These advantages make them highly suitable for applications in the aforementioned fields.
[0004] Piezoelectric actuators include ultrasonic actuators, inertial stepper actuators, inchworm actuators, and more. Ultrasonic actuators, as a novel type of actuator, utilize the inverse piezoelectric effect of piezoelectric ceramic elements to convert ultrasonic vibrations in an elastic body into linear or rotary motion output by a motor, achieving very high speeds. However, achieving both high output force and speed remains a challenge. Inertial stepper actuators utilize the momentum theorem and have advantages such as simple structure and fast response speed. However, these piezoelectric actuators have low driving force, and their stability, accuracy, and stroke are relatively low. Inchworm actuators, inspired by the movement of inchworms in nature, output continuous and precise displacement through the cooperation of a drive mechanism and a clamping mechanism. Compared with other actuators, inchworm actuators have advantages such as large stroke, fast response, high positioning accuracy, and strong load-bearing capacity. However, most inchworm actuators are one-dimensional linear. When multi-directional motion is required, multiple actuators need to be connected in series, resulting in high cost, complex overall structure, and difficulty in compensating for motion errors. Summary of the Invention
[0005] To address the aforementioned issues, this invention proposes a two-dimensional parallel bionic piezoelectric actuator and its excitation method. Through the structural design of the base guide rail mechanism, the driving mechanism, and the clamping mechanism, the amplitude and phase of the excitation voltage signal acting on the three piezoelectric stacks are controlled, enabling the two-dimensional parallel bionic piezoelectric actuator to move in any direction on the plane.
[0006] According to some embodiments, the first aspect of the present invention provides a two-dimensional parallel biomimetic piezoelectric actuator, which adopts the following technical solution:
[0007] A two-dimensional parallel biomimetic piezoelectric actuator includes a base guide rail mechanism and a driving mechanism and a clamping mechanism disposed on the base guide rail mechanism; wherein, the clamping mechanism includes a first direction clamping sub-mechanism and a second direction clamping sub-mechanism that are perpendicular to each other; a flexible anti-rhomboid part and a driving piezoelectric stack placed along the second direction on the flexible anti-rhomboid part; the first direction clamping sub-mechanism has a first direction clamping piezoelectric stack built in it, and the second direction clamping sub-mechanism has a second direction clamping piezoelectric stack built in it.
[0008] As a further technical limitation, the two-dimensional parallel bionic piezoelectric actuator also includes a base guide rail mechanism for placing the drive mechanism and the clamping mechanism, the base guide rail mechanism including a base base and guide rails and sliders disposed on the base base.
[0009] Furthermore, the first directional clamping sub-mechanism also includes a first directional mounting plate, a first directional clamping active body, a first directional clamping passive body, an auxiliary mounting block, a first wedge block, a first pre-tightening screw, and a slotted cylindrical head screw; wherein, the first directional mounting plate is provided with a thread matching the slotted cylindrical head screw, and is fixed to the slider provided in the first direction by the slotted cylindrical head screw; the first directional clamping active body and the first directional clamping passive body are respectively fixed to both sides of the first directional mounting plate by slotted cylindrical head screws.
[0010] Furthermore, the second-direction clamping sub-mechanism also includes a second-direction mounting plate, a second-direction clamping active body, a second-direction clamping passive body, a second-direction clamping piezoelectric stack, a second wedge block, a second-direction preload screw, and slotted cylindrical head screws; wherein, the second-direction mounting plate is provided with threads matching the slotted cylindrical head screws, and is fixed to the slider provided in the second direction by the slotted cylindrical head screws; the second-direction clamping active body and the second-direction clamping passive body are respectively fixed to both sides of the second-direction mounting plate by slotted cylindrical head screws.
[0011] As a further technical limitation, the drive mechanism also includes four clamping blocks and slotted cylindrical head screws; wherein, two of the clamping blocks are fixed above the flexible anti-rhomboid part by screws in the first direction, and two of the clamping blocks are fixed below the flexible anti-rhomboid part by screws in the second direction.
[0012] As a further technical limitation, when the driving piezoelectric stack, the first-direction clamping piezoelectric stack, and the second-direction clamping piezoelectric stack are all de-energized, one end of the first-direction clamping sub-mechanism is normally open and the other end is normally closed, so that the driving mechanism cannot generate displacement in the second direction; one end of the second-direction clamping sub-mechanism is normally open and the other end is normally closed, so that the driving mechanism cannot generate displacement in the first direction.
[0013] According to some embodiments, the second aspect of the present invention provides an excitation method for a two-dimensional parallel bionic piezoelectric actuator, which employs the two-dimensional parallel bionic piezoelectric actuator provided in the first aspect, and adopts the following technical solution:
[0014] An excitation method for a two-dimensional parallel biomimetic piezoelectric actuator includes:
[0015] A low excitation signal is applied to the driving piezoelectric stack, the piezoelectric stack clamped in the first direction, and the piezoelectric stack clamped in the second direction. The first clamp in the first direction clamps and the second clamp is released. The first clamp in the second direction clamps and the second clamp is released.
[0016] A high excitation voltage signal is applied to the piezoelectric stack held in the first direction, and the first clamp in the second direction clamps and the second clamp releases.
[0017] A high excitation voltage signal is applied to the piezoelectric stack held in the first direction, and a high excitation voltage signal is applied to the driving piezoelectric stack to drive the piezoelectric stack to extend. The driving unit extends downward, causing the first direction mounting plate to move downward along the guide rail.
[0018] A high excitation voltage signal is applied to the drive piezoelectric stack, a low excitation voltage signal is applied to the piezoelectric stack clamped in the first direction, the piezoelectric stack clamped in the first direction retracts, the first clamp in the first direction clamps, and the second clamp releases.
[0019] A low excitation voltage signal is applied to the piezoelectric stack in the first direction, i.e., the clamp is not moved. A low excitation voltage signal is applied to the piezoelectric stack to drive it to shorten. The drive unit retracts downward, causing the first direction mounting plate to move downward along the guide rail.
[0020] Repeat the above steps to achieve a work cycle of downward movement in the second direction.
[0021] It should be noted that, in this embodiment, the first clamp in the first direction is the clamp position on the left side of the first direction, and the second clamp is the clamp position on the right side of the first direction; the first clamp in the second direction is the clamp position on the upper side of the second direction, and the second clamp is the clamp position on the lower side of the second direction.
[0022] As a further technical limitation, a high excitation voltage signal is applied to the piezoelectric stack held in the second direction to drive the piezoelectric stack to extend, the first clamp in the second direction clamps and the second clamp releases; while maintaining the piezoelectric stack held in the second direction with the high excitation voltage signal applied, i.e. the clamp remains stationary, a high excitation voltage signal is applied to the piezoelectric stack to drive it to extend, the drive unit extends, and the second direction mounting plate moves to the right along the guide rail.
[0023] As a further technical limitation, a high excitation voltage signal is applied to the piezoelectric stack while maintaining the drive piezoelectric stack, and a low excitation voltage signal is applied to the piezoelectric stack in the second direction to drive the piezoelectric stack to retract, thereby releasing the first clamp and clamping the second clamp in the second direction.
[0024] As a further technical limitation, a low excitation voltage signal is applied to the second-direction piezoelectric stack, i.e., it is clamped and not moved. A low excitation voltage signal is applied to the driving piezoelectric stack, which drives the piezoelectric stack to shorten. The driving unit retracts to the right, causing the second-direction mounting plate to move to the right along the guide rail.
[0025] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0026] This invention adopts a component assembly method, which facilitates the processing and manufacturing of components and allows for timely replacement and repair if damaged. Specifically, three piezoelectric stacks can achieve parallel motion of two degrees of freedom. Compared with inertial actuators, the clamping device can guarantee a large load, and the cumulative micro-step motion mode can ensure that both large stroke and high precision conditions are met simultaneously. Theoretically, it can achieve joint motion in any direction in a plane, filling the research gap of existing parallel inchworm actuation. It can be used as an optical attitude adjustment device, a precision manufacturing positioning device, and a micro-nano manipulation control device, etc. Attached Figure Description
[0027] The accompanying drawings, which form part of this embodiment, are used to provide a further understanding of this embodiment. The illustrative embodiments and their descriptions are used to explain this embodiment and do not constitute an improper limitation of this embodiment.
[0028] Figure 1 This is a schematic diagram of the overall structure of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0029] Figure 2 This is a schematic diagram of the driving mechanism of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0030] Figure 3 This is a schematic diagram of the first-direction clamping sub-mechanism of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0031] Figure 4This is a schematic diagram of the second-direction clamping sub-mechanism of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0032] Figure 5 This is a schematic diagram of the base guide rail mechanism of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0033] Figure 6 This is a schematic diagram illustrating the driving principle of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 1 of the present invention;
[0034] Figure 7 This is a schematic diagram of the excitation signal of the two-dimensional parallel bionic piezoelectric actuator in Embodiment 2 of the present invention;
[0035] Among them, 1. Drive mechanism, 101. Drive piezoelectric stack, 102. Flexible anti-rhomboid part, 103. Clamping block, 2. Slotted cylindrical head screw, 3. First direction clamping sub-mechanism, 301. First wedge block, 302. First pre-tightening screw, 303. Auxiliary mounting block, 304. First direction clamping active body, 305. First direction clamping piezoelectric stack, 306. First direction mounting plate, 307. First direction clamping passive body, 4. Second direction clamping sub-mechanism, 401. Second wedge block, 402. Second pre-tightening screw, 403. Second direction clamping passive body, 404. Second direction clamping piezoelectric stack, 405. Second direction mounting plate, 406. Second direction clamping active body, 5. Base guide rail mechanism, 501. Guide rail, 502. Slider, 503. Base base. Detailed Implementation
[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0037] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.
[0038] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0039] In this invention, terms such as "upper," "lower," "left," "right," "front," "back," "vertical," "horizontal," "side," and "bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only to facilitate the description of the structural relationships of the various components or elements of this invention and do not specifically refer to any component or element in this invention. They should not be construed as limiting the invention.
[0040] In this invention, terms such as "fixed connection," "connected," and "linked" should be interpreted broadly, indicating a fixed connection, an integral connection, or a detachable connection; a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can determine the specific meaning of these terms in this invention based on the specific circumstances, and they should not be construed as limitations on the invention.
[0041] Where there is no conflict, the embodiments and features in the embodiments of the present invention can be combined with each other.
[0042] Example 1
[0043] Embodiment 1 of the present invention introduces a two-dimensional parallel bionic piezoelectric actuator.
[0044] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 The two-dimensional parallel bionic piezoelectric actuator shown includes a base guide rail mechanism 5, a drive mechanism 1, and a clamping mechanism; wherein, the clamping mechanism includes a first direction clamping sub-mechanism 3 and a second direction clamping sub-mechanism 4 that are perpendicular to each other; in this embodiment, the direction along the long side of the base base 503 is defined as the first direction.
[0045] The following sections will provide a detailed description of the specific structural configuration of the two-dimensional parallel bionic piezoelectric actuator in this embodiment.
[0046] At the center of the base 503, a protrusion is provided along the first direction and a groove is provided along the second direction for mounting the guide rail 501; along the provided protrusion and groove, an axial threaded hole is opened, and the guide rail 501 is installed in the opened axial threaded hole by a slotted cylindrical head screw 2. The slider 502 is set on the guide rail 501, and the guide rail 501 and the slider 502 are matched in position and size.
[0047] The base guide rail mechanism 5 in this embodiment includes a base base 503 and four guide rails, four sliders 502 and twelve slotted cylindrical head screws 2 disposed on the base base 503.
[0048] At the center of the base guide rail mechanism 5, a drive mechanism 1 is provided; specifically, the drive mechanism 1 includes a flexible anti-rhomboid part 102, a drive piezoelectric stack 101, four clamping blocks 103 and eight slotted cylindrical head screws 2; wherein, the drive piezoelectric stack 101 is placed in the flexible anti-rhomboid part 102 along the second direction, the two clamping blocks 103 are fixed above the flexible anti-rhomboid part 102 by screws in the first direction, and the two clamping blocks 103 are fixed below the flexible anti-rhomboid part 102 by screws in the second direction.
[0049] The clamping mechanism includes a first-direction clamping sub-mechanism 3 and a second-direction clamping sub-mechanism 4 that are perpendicular to each other; in this embodiment, the direction along the long side of the base base 503 is defined as the first direction.
[0050] The first-direction clamping sub-mechanism 3 includes a first-direction mounting plate 306, a first-direction clamping active body 304, a first-direction clamping passive body 307, four auxiliary mounting blocks 303, a first-direction clamping piezoelectric stack 305, four first wedge blocks 301, two first pre-tightening screws 302, and twenty-five slotted cylindrical head screws 2. The first-direction mounting plate 306 has a flexible structure cut on it to increase the opening and closing range of the clamping position, and has threads that match the slotted cylindrical head screws 2. It is fixed to the slider 502 set in the first direction by eight slotted cylindrical head screws 2. The first-direction clamping active body 304 and the first-direction clamping passive body 307 cooperate with the auxiliary mounting blocks 303, which are respectively fixed to both sides of the first-direction mounting plate 306 by slotted cylindrical head screws 2. The gap in the middle cooperates with the clamping block 103 above the drive mechanism 1.
[0051] The second-direction clamping submechanism 4 includes a second-direction mounting plate 405, a second-direction clamping active body 406, a second-direction clamping passive body 403, a second-direction clamping piezoelectric stack 404, four second wedge blocks 401, two second-direction pre-tightening screws 402, and eighteen slotted cylindrical head screws 2. The second-direction mounting plate 405 has a flexible structure cut on it to increase the opening and closing range of the clamp, and has threads that match the slotted cylindrical head screws 2. It is fixed to the slider 502 set in the second direction with eight slotted cylindrical head screws 2. The second-direction clamping active body 406 and the second-direction clamping passive body 403 are respectively fixed to both sides of the second-direction mounting plate 405 with slotted cylindrical head screws 2, and the gap in the middle cooperates with the clamping block 133 below the drive mechanism 1. The specific installation method of the second-direction clamping structure 4 is similar to that of the first-direction clamping submechanism 3.
[0052] In this embodiment, when the driving piezoelectric stack 101, the first-direction clamping piezoelectric stack 305, and the second-direction clamping piezoelectric stack 404 are not energized, the upper end of the first-direction clamping submechanism 3 is normally open and its lower end is normally closed, so that the driving mechanism 1 cannot generate displacement in the second direction; the right end of the second-direction clamping submechanism 4 is normally open and its left end is normally closed, so that the driving mechanism 1 cannot generate displacement in the first direction.
[0053] like Figure 6 As shown in the figure, this embodiment describes the driving principle scheme of the two-dimensional parallel bionic piezoelectric actuator. Through the principle of clamping-driving-clamping, the driving part generates a step displacement in one working cycle, thereby realizing continuous displacement.
[0054] The drive mechanism 1 generates displacements in both the first and second directions through the generated drive piezoelectric stack 101, achieving parallel motion in conjunction with the first-direction clamping sub-mechanism 3 and the second-direction clamping sub-mechanism 4. During operation, based on one excitation voltage signal, the drive mechanism 1 controls the drive piezoelectric stack 101 to generate minute displacements in the first and second directions respectively; using the second excitation voltage signal, the first-direction clamping piezoelectric stack 305 in the first direction controls the clamping opening and closing of the upper and lower ends in the second direction; and using the third excitation voltage signal, the second-direction clamping piezoelectric stack 404 in the second direction controls the clamping opening and closing of the left and right ends in the first direction. By changing the magnitude of the excitation voltage applied to the two piezoelectric stacks in the drive part of the driver, the elongation of the piezoelectric stacks under the excitation voltage is changed, thereby adjusting the step displacement of the drive structure 1 in one working cycle.
[0055] The invention adopts a component assembly method, which makes the components easy to process and manufacture, and can be replaced and repaired in time if damaged. Specifically, three piezoelectric stacks can realize parallel motion of two degrees of freedom. Compared with inertial actuators, the clamping device can ensure large load, and the cumulative micro-step motion mode can ensure that large stroke and high precision conditions are met at the same time.
[0056] Example 2
[0057] Based on the two-dimensional parallel bionic piezoelectric actuator introduced in Embodiment 1, Embodiment 2 of the present invention introduces an excitation method for a two-dimensional parallel bionic piezoelectric actuator.
[0058] like Figure 7 The excitation signal design of the two-dimensional parallel bionic piezoelectric actuator shown includes:
[0059] When a low excitation signal is applied to all three piezoelectric stacks, the first clamp in the first direction is clamped and the second clamp is released, and the first clamp in the second direction is clamped and the second clamp is released.
[0060] A high excitation voltage signal is applied to the piezoelectric stack held in the first direction, causing the piezoelectric stack to elongate. The displacement is amplified by the bridge amplification mechanism and the lever amplification mechanism. The first clamp in the second direction is tightened, and the second clamp is released.
[0061] While maintaining the piezoelectric stack in the first direction, a high excitation voltage signal is applied, i.e. the clamp is not moved. A high excitation voltage signal is applied to the piezoelectric stack of the drive unit, the piezoelectric stack elongates, the drive unit elongates downward, and drives the mounting plate in the first direction to move downward along the guide rail by 1 / 2 of the elongation.
[0062] A high excitation voltage signal is applied to the piezoelectric stack while a low excitation voltage signal is applied to the piezoelectric stack in the first direction. The piezoelectric stack is driven to retract, clamped in the first clamp in the first direction, and released in the second clamp.
[0063] A low excitation voltage signal is applied to the piezoelectric stack in the first direction, i.e., the clamp is not moved. A low excitation voltage signal is applied to the piezoelectric stack to drive it to shorten. The drive unit retracts downward and drives the mounting plate in the first direction to move downward along the guide rail by 1 / 2 of the elongation.
[0064] Repeat the above steps to complete one work cycle of downward movement in the second direction.
[0065] As one or more embodiments, a high excitation voltage signal is applied to the piezoelectric stack held in the second direction, the piezoelectric stack elongates, and the displacement is amplified by the bridge amplification mechanism and the lever amplification mechanism, the first clamp in the second direction is clamped, and the second clamp is released.
[0066] As one or more embodiments, a high excitation voltage signal is applied to the piezoelectric stack held in the second direction, i.e., the clamp is not moved, and a high excitation voltage signal is applied to the drive piezoelectric stack, causing the piezoelectric stack to elongate, the drive unit to elongate to the right, and the mounting plate in the second direction to move to the right along the guide rail by 1 / 2 of the elongation.
[0067] As one or more embodiments, a high excitation voltage signal is applied to the driving piezoelectric stack, a low excitation voltage signal is applied to the piezoelectric stack clamped in the second direction, the piezoelectric stack retracts, the first clamp in the second direction is released, and the second clamp is tightened.
[0068] As one or more embodiments, a low excitation voltage signal is applied to the piezoelectric stack held in the second direction, i.e., the clamp is not moved. A low excitation voltage signal is applied to the piezoelectric stack of the drive unit, the piezoelectric stack shortens, the drive unit retracts to the right, and drives the mounting plate in the second direction to move to the right along the guide rail by 1 / 2 of the elongation.
[0069] The above description is merely a preferred embodiment of this practice and is not intended to limit the scope of this practice. Various modifications and variations can be made to this practice by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this practice should be included within the protection scope of this practice.
Claims
1. A two-dimensional parallel biomimetic piezoelectric actuator, characterized in that, The device includes a base guide rail mechanism and a drive mechanism and a clamping mechanism disposed on the base guide rail mechanism; wherein, the clamping mechanism includes a first direction clamping sub-mechanism and a second direction clamping sub-mechanism that are perpendicular to each other; a flexible anti-rhomboid part and a drive piezoelectric stack placed along the second direction on the flexible anti-rhomboid part; the first direction clamping sub-mechanism has a first direction clamping piezoelectric stack built in it, and the second direction clamping sub-mechanism has a second direction clamping piezoelectric stack built in it; it also includes a base guide rail mechanism for placing the drive mechanism and the clamping mechanism, the base guide rail mechanism including a base base and a guide rail and a slider disposed on the base base; The first-direction clamping sub-mechanism further includes a first-direction mounting plate, a first-direction clamping active body, a first-direction clamping passive body, an auxiliary mounting block, a first wedge block, a first preload screw, and slotted cylindrical head screws; wherein, the first-direction mounting plate has threads matching the slotted cylindrical head screws, and is fixed to the slider in the first direction by the slotted cylindrical head screws; the first-direction clamping active body and the first-direction clamping passive body are respectively fixed to both sides of the first-direction mounting plate by slotted cylindrical head screws; the gap between the first-direction clamping active body and the first-direction clamping passive body cooperates with the clamping block above the drive mechanism; The second-direction clamping sub-mechanism further includes a second-direction mounting plate, a second-direction clamping active body, a second-direction clamping passive body, a second-direction clamping piezoelectric stack, a second wedge block, a second-direction preload screw, and slotted cylindrical head screws; wherein, the second-direction mounting plate has threads that match the slotted cylindrical head screws, and is fixed to the slider in the second direction by the slotted cylindrical head screws; the second-direction clamping active body and the second-direction clamping passive body are respectively fixed to both sides of the second-direction mounting plate by slotted cylindrical head screws; The gap between the second-direction clamping active body and the second-direction clamping passive body cooperates with the clamping block below the drive mechanism; the drive mechanism also includes four clamping blocks and slotted cylindrical head screws; wherein, two of the clamping blocks are fixed above the flexible anti-rhomboid part by screws in the first direction, and two of the clamping blocks are fixed below the flexible anti-rhomboid part by screws in the second direction.
2. The two-dimensional parallel bionic piezoelectric actuator as described in claim 1, characterized in that, When the driving piezoelectric stack, the first-direction clamping piezoelectric stack, and the second-direction clamping piezoelectric stack are all de-energized, one end of the first-direction clamping sub-mechanism is normally open and the other end is normally closed, so that the driving mechanism cannot generate displacement in the second direction; one end of the second-direction clamping sub-mechanism is normally open and the other end is normally closed, so that the driving mechanism cannot generate displacement in the first direction.
3. An excitation method for a two-dimensional parallel bionic piezoelectric actuator, employing a two-dimensional parallel bionic piezoelectric actuator as described in any one of claims 1-2, characterized in that, include: A low excitation signal is applied to the driving piezoelectric stack, the piezoelectric stack clamped in the first direction, and the piezoelectric stack clamped in the second direction. The first clamp in the first direction clamps and the second clamp is released. The first clamp in the second direction clamps and the second clamp is released. A high excitation voltage signal is applied to the piezoelectric stack held in the first direction, and the first clamp in the second direction clamps and the second clamp releases. A high excitation voltage signal is applied to the piezoelectric stack held in the first direction, and a high excitation voltage signal is applied to the driving piezoelectric stack to drive the piezoelectric stack to extend. The driving unit extends downward, causing the first direction mounting plate to move downward along the guide rail. A high excitation voltage signal is applied to the drive piezoelectric stack, a low excitation voltage signal is applied to the piezoelectric stack clamped in the first direction, the piezoelectric stack clamped in the first direction retracts, the first clamp in the first direction clamps, and the second clamp releases. A low excitation voltage signal is applied to the piezoelectric stack in the first direction, i.e., the clamp is not moved. A low excitation voltage signal is applied to the piezoelectric stack to drive it to shorten. The drive unit retracts downward, causing the first direction mounting plate to move downward along the guide rail. Repeat the above steps to achieve a work cycle of downward movement in the second direction.
4. The excitation method for a two-dimensional parallel bionic piezoelectric actuator as described in claim 3, characterized in that, A high excitation voltage signal is applied to the piezoelectric stack held in the second direction to drive the piezoelectric stack to extend. The first clamp in the second direction clamps and the second clamp releases. While maintaining the piezoelectric stack held in the second direction with the high excitation voltage signal applied (i.e., the clamp remains stationary), a high excitation voltage signal is applied to the piezoelectric stack to drive it to extend. The drive unit extends and drives the mounting plate in the second direction to move to the right along the guide rail.
5. The excitation method for a two-dimensional parallel bionic piezoelectric actuator as described in claim 3, characterized in that, A high excitation voltage signal is applied to the piezoelectric stack, and a low excitation voltage signal is applied to the piezoelectric stack in the second direction, causing the piezoelectric stack to retract, the first clamp in the second direction to loosen, and the second clamp to tighten.
6. The excitation method for a two-dimensional parallel bionic piezoelectric actuator as described in claim 3, characterized in that, A low excitation voltage signal is applied to the second-direction piezoelectric stack, i.e., it is clamped and not moved. A low excitation voltage signal is applied to the drive piezoelectric stack, which drives the piezoelectric stack to shorten. The drive unit retracts to the right, causing the second-direction mounting plate to move to the right along the guide rail.