Wafer number recognition device with automatic opening and closing recognition function

Abstract

A wafer number recognition device with automatic on-off identification function includes a base, a support, a light source, a plurality of image capturing units, an image recognition unit and a control unit. The base includes a wafer boat placement part and a first switch, and the first switch is arranged on the wafer boat placement part. The light source is arranged on the support. The plurality of image capturing units are arranged on the support. The control unit is electrically connected with the first switch, the light source, the plurality of image capturing units and the image recognition unit. Therefore, the wafer number recognition device can automatically turn on and off the light source, the image capturing unit and the image recognition unit, which is quite convenient in operation.

Description

Technical Field

[0001] This invention relates to a wafer marking identification device, and more particularly to a wafer marking identification device with an automatic on / off identification function. Background Technology

[0002] In hybrid floor shop production, wafers from different suppliers are often processed simultaneously. If different batches of wafers require resetting and retraining optical character recognition (OCR), it significantly impacts production speed, making the inspection process a bottleneck on the production line. Therefore, wafer marking and identification has become a crucial step in semiconductor packaging and testing plants, enabling rapid wafer differentiation to improve management efficiency and reduce the risk of wafer confusion or loss.

[0003] However, existing wafer identification devices rely on manually pressing a first switch to turn the light source, image capturing unit, and image recognition unit on and off, which is quite cumbersome to operate.

[0004] Furthermore, existing wafer identification devices lack supplemental lighting and only have a single image capturing unit that captures images from a single angle, making them susceptible to interference from the external environment (e.g., variable and light-disturbed environments), resulting in poor identification performance.

[0005] In addition, existing wafer identification devices require pre-setting and training of optical character recognition to obtain character types, which makes it difficult to cope with production lines with mixed batches and diverse characteristics. Summary of the Invention

[0006] The main objective of this invention is to provide a wafer marking identification device with automatic on / off identification function, which can automatically turn on and off the light source, image capturing unit and image recognition unit, and is quite easy to operate.

[0007] Another objective of this invention is to provide a wafer marking identification device with automatic on / off identification function, which can capture images from different angles through light source supplementation and multiple image capturing units, making it less susceptible to interference from the external environment and improving the identification effect.

[0008] Another objective of this invention is to provide a wafer marking identification device with automatic opening and closing identification function, which does not require prior knowledge of the character type or obtaining the character type, and is easy to handle production lines with mixed batches and diverse characteristics.

[0009] To achieve the aforementioned objectives, the present invention provides a wafer marking identification device with an automatic on / off identification function, comprising a base, a support, at least one light source, multiple image capturing units, an image recognition unit, and a control unit. The base includes a wafer carrier placement section and at least one first switch, the at least one first switch being disposed on the wafer carrier placement section. At least one light source is disposed on the support. Multiple image capturing units are disposed on the support. The control unit is electrically connected to at least one first switch, at least one light source, multiple image capturing units, and the image recognition unit. When a wafer carrier is placed in the wafer carrier placement section, at least one first switch transmits a first start signal to the control unit. The control unit activates at least one light source, multiple image capturing units, and the image recognition unit according to the first start signal. At least one light source projects light onto multiple wafers in the wafer carrier for supplementary illumination. Multiple image capturing units capture images of the markings on the multiple wafers in the wafer carrier. The control unit receives the images of the markings on the multiple wafers and transmits them to the image recognition unit. The image recognition unit identifies the markings on the multiple wafers based on the images of the markings on the multiple wafers. After the crystal boat is removed from the crystal boat placement section, at least one first switch sends a first shutdown signal to the control unit, and the control unit shuts down at least one light source, multiple image capturing units and image recognition units according to the first shutdown signal.

[0010] In some embodiments, the base further includes a positioning member disposed on the crystal boat placement portion and having at least one positioning groove, wherein at least one first switch is located in the at least one positioning groove; and wherein, when the crystal boat is placed on the crystal boat placement portion, at least one protrusion of the crystal boat is positioned in the at least one positioning groove and presses down on at least one first switch.

[0011] In some embodiments, the bracket includes a base and a support member, a crystal boat placement part is disposed on the base, the support member is fixed on the base, and at least one light source and multiple image capturing units are disposed on the support member.

[0012] In some embodiments, the bracket includes a base and a support member, a crystal boat placement part is disposed on the base, the support member is movable relative to the base, and at least one light source and a plurality of image capturing units are disposed on the support member; wherein, when the crystal boat is placed on the crystal boat placement part, the support member moves upward to a first position and is located above the base; and wherein, after the crystal boat is removed from the crystal boat placement part, the support member moves downward to a second position and is located below the base.

[0013] In some embodiments, the bracket further includes a lifting mechanism disposed on the base and electrically connected to the control unit, and a support member disposed on the lifting mechanism; wherein, when the crystal boat is placed in the crystal boat placement part, the control unit controls the lifting mechanism according to a first start signal, so that the lifting mechanism drives the support member to move upward to a first position; and wherein, after the crystal boat is removed from the crystal boat placement part, the control unit controls the lifting mechanism according to a first stop signal, so that the lifting mechanism drives the support member to move downward to a second position.

[0014] In some embodiments, the lifting mechanism includes a track, a slider, and a drive unit. The track is fixed to the base, the slider slides on the track, the drive unit is connected to the slider and electrically connected to the control unit, and a support member is disposed on the slider. When the crystal boat is placed in the crystal boat placement part, the control unit controls the drive unit according to a first start signal, and the drive unit drives the slider to move upward along the track, so that the slider drives the support member to move upward to a first position. After the crystal boat is removed from the crystal boat placement part, the control unit controls the drive unit according to a first stop signal, and the drive unit drives the slider to move downward along the track, so that the slider drives the support member to move downward to a second position.

[0015] In some embodiments, the bracket further includes a first position sensor and a second position sensor. The first position sensor is disposed on the lifting mechanism and electrically connected to the control unit, and the second position sensor is disposed on the lifting mechanism and electrically connected to the control unit. When the first position sensor senses that the support member is in a first position, the first position sensor transmits a first sensing signal to the control unit. The control unit determines that the support member is in the first position based on the first sensing signal and further activates at least one light source, multiple image capturing units, and an image recognition unit based on a first activation signal. When the second position sensor senses that the support member is in a second position, the second position sensor transmits a second sensing signal to the control unit. The control unit determines that the support member is in the second position based on the second sensing signal and further deactivates at least one light source, multiple image capturing units, and an image recognition unit based on a first deactivation signal.

[0016] In some embodiments, the base includes a pivot portion disposed on the crystal boat placement portion, the support includes a base and a support member, the support member is fixed to the base and pivotally disposed on the pivot portion, and at least one light source and multiple image capturing units are disposed on the support member; wherein, when the crystal boat contacts the base, the support member rotates upward relative to the pivot portion, causing the base to rotate downward to a first position, and the crystal boat is placed in the crystal boat placement portion; and wherein, after the crystal boat is removed from the crystal boat placement portion, the support member rotates downward relative to the pivot portion, causing the base to rotate upward to a second position.

[0017] In some embodiments, when the crystal boat contacts the base, the base is pressed down by the weight of the crystal boat and rotates downward, while the support is pulled upward relative to the pivot by the base; and wherein, after the crystal boat is removed from the crystal boat placement part, the weight of the support can cause the support to rotate downward relative to the pivot, and the base is pulled upward to the second position by the support.

[0018] In some embodiments, the bracket further includes at least one second switch and a rotating mechanism. The at least one second switch is disposed on the base and electrically connected to the control unit, and the rotating mechanism is connected to the support member and electrically connected to the control unit. When the crystal boat contacts the base, the at least one second switch transmits a second start signal to the control unit. The control unit controls the rotating mechanism according to the second start signal. The rotating mechanism drives the support member to rotate upward relative to the pivot portion, and the base is pulled downward by the support member to rotate to a first position, and the crystal boat is placed in the crystal boat placement portion. After the crystal boat is removed from the crystal boat placement portion, the at least one second switch transmits a second stop signal. The control unit controls the rotating mechanism according to the second stop signal. The rotating mechanism drives the support member to rotate downward relative to the pivot portion, and the base is pulled upward by the support member to rotate to a second position.

[0019] The advantage of this invention is that the wafer marking identification device can automatically turn on and off the light source, image capturing unit and image recognition unit, and is quite easy to operate.

[0020] Furthermore, the wafer marking identification device of the present invention can capture images from different angles through light source supplementation and multiple image capturing units, which is not easily affected by external environment and improves the identification effect.

[0021] Furthermore, the wafer marking identification device of the present invention does not require prior knowledge or acquisition of the character type, making it easy to handle production lines with mixed batches and diverse characteristics. Attached Figure Description

[0022] Figure 1 This is a perspective view of the first embodiment of the present invention.

[0023] Figure 2 This is a top view of the first embodiment of the present invention.

[0024] Figure 3 This is a structural block diagram of the first embodiment of the present invention.

[0025] Figure 4A This is a schematic diagram of the marking identification in the first embodiment of the present invention.

[0026] Figure 4B A schematic diagram showing the protrusion of the crystal boat pressing down on the first switch is shown.

[0027] Figure 5AA schematic diagram showing an image of the wafer's markings.

[0028] Figure 5B A schematic diagram of the image after character segmentation is shown.

[0029] Figure 5C This diagram illustrates the image weight optimization of the wafer markings by the image recognition unit.

[0030] Figure 6 This is a perspective view of the second embodiment of the present invention.

[0031] Figure 7 This is a schematic diagram of the second embodiment of the present invention for marking identification.

[0032] Figure 8 This is a perspective view of the third embodiment of the present invention.

[0033] Figure 9 This is a schematic diagram of the marking identification in the third embodiment of the present invention.

[0034] Figure 10 This is a side view of the fourth embodiment of the present invention.

[0035] Figure 11 This is a structural block diagram of the fourth embodiment of the present invention.

[0036] Figure 12 This is a schematic diagram of the fourth embodiment of the present invention for marking identification.

[0037] Figure 13 This is a perspective view of the fifth embodiment of the present invention.

[0038] Figure 14 This is a structural block diagram of the fifth embodiment of the present invention.

[0039] Figure 15 A schematic diagram of the crystal boat contacting the base is shown.

[0040] Figure 16A This is a schematic diagram of the fifth embodiment of the present invention for marking identification.

[0041] Figure 16B The diagram shows the base pressing down on the first switch.

[0042] Figure 17 This is a perspective view of the sixth embodiment of the present invention.

[0043] Figure 18 This is a structural block diagram of the sixth embodiment of the present invention.

[0044] Figure 19 A schematic diagram of the crystal boat contacting the base is shown.

[0045] Figure 20 A schematic diagram showing the crystal boat pressing down on the second switch is shown.

[0046] Figure 21 This is a schematic diagram of the sixth embodiment of the present invention for marking identification.

[0047] Explanation of reference numerals in the attached figures:

[0048] 10-Base, 11-Crystal boat placement part, 111-First end, 112-Second end, 12-Positioning component, 121-Positioning groove, 13-First switch, 131-First start signal, 132-First stop signal, 14-Indicator light, 15-Pivot part, 20, 20A, 20B, 20C-Bracket, 21-Base, 211-First end, 212-Second end, 22, 22A-Supporting component, 221-Vertical rod, 222-Horizontal rod, 23-Lifting mechanism, 231-Railway, 232-Slider, 233-Driver Unit, 24-First position sensor, 241-First sensing signal, 25-Second position sensor, 251-Second sensing signal, 26-Abutting part, 27-Second switch, 271-Second start signal, 272-Second stop signal, 28-Rotation mechanism, 30, 30A-Light source, 40-Image capturing unit, 41, 42-Image, 50-Image recognition unit, 60-Control unit, 70-Padded block, 80-Stop block, 100-Crystal boat, 101, 102-Protrusion, 200-Wafer, 201-Marking. Detailed Implementation

[0049] The following description, in conjunction with the accompanying drawings and component symbols, provides a more detailed account of the embodiments of the present invention, enabling those skilled in the art to implement the invention after studying this specification.

[0050] Figures 1 to 3 These are, respectively, a perspective view, a top view, and a structural block diagram of the first embodiment of the present invention. Figures 1 to 3As shown, this invention provides a wafer marking identification device with automatic on / off identification function, including a base 10, a support 20, a light source 30, multiple image capturing units 40, an image recognition unit 50, and a control unit 60. The base 10 includes a wafer boat placement part 11, a positioning member 12, and two first switches 13. The positioning member 12 is disposed on the first end 111 of the wafer boat placement part 11 and has two positioning slots 121. The two first switches 13 are disposed on the wafer boat placement part 11 and are respectively located in the two positioning slots 121. The support 20 includes a base 21 and two support members 22. The wafer boat placement part 11 is disposed on the base 21, and the two support members 22 are fixed to the base 21 and close to the second end 212 of the base 21. The light source 30 is disposed on one of the support members 22. The multiple image capturing units 40 are disposed on the other support member 22. The control unit 60 is electrically connected to the two first switches 13, the light source 30, the multiple image capturing units 40, and the image recognition unit 50.

[0051] Figure 4A This is a schematic diagram illustrating the identification of serial number 201 in the first embodiment of the present invention. Figure 4B A schematic diagram showing the protrusion 101 of the crystal boat 100 pressing against the first switch 13 is shown. Figure 5A A schematic diagram showing image 41 of notation 201 on wafer 200 is displayed. Figure 5B Image 42 shows a schematic diagram of the diced wafer 200 with marking 201. Figure 5C This diagram shows the image 42 weight optimization of the notation 201 on the diced wafer 200. The operation and effects of the first embodiment will be explained below with reference to the figures.

[0052] like Figure 4A and Figure 4B As shown, when the crystal boat 100 is placed in the crystal boat placement section 11, the two protrusions 101 of the crystal boat 100 are respectively positioned in multiple positioning slots 121 and press against multiple first switches 13, and the opening of the crystal boat 100 faces the multiple support members 22; in other words, the crystal boat 100 is placed horizontally on the crystal boat placement section 11, and the tops of the multiple wafers 200 in the crystal boat 100 face the multiple support members 22. Figure 3 As shown, multiple first switches 13 synchronously transmit first start signals 131 to the control unit 60, and the control unit 60 activates the light source 30, multiple image capturing units 40, and image recognition unit 50 according to the multiple first start signals 131. Figure 4A As shown, the light source 30 projects light laterally onto multiple wafers 200 in the crystal boat 100 for supplemental lighting, and multiple image capturing units 40 laterally capture images 41 of the markings 201 on the multiple wafers 200 in the crystal boat 100 (see...). Figure 5A ).like Figure 3 and Figures 5A to 5CAs shown, the control unit 60 receives images 41 of the markings 201 of multiple wafers 200 and transmits them to the image recognition unit 50. The image recognition unit 50 identifies the markings 201 of the multiple wafers 200 based on the images 41. More specifically, the image recognition unit 50 uses a simplified swarm optimization (SSO) algorithm to perform character segmentation on the images 41 of the markings 201 of the multiple wafers 200. The image 42 after character segmentation is shown in the figure. Figure 5B The image recognition unit 50 further optimizes the weights of the character-segmented image 42 using a convolutional neural network (CNN). For example... Figure 5C To illustrate more clearly, a convolutional neural network (CNN) consists of an input layer, hidden layers, and an output layer. The hidden layers include convolutional layers, rectified layers, pooling layers, and fully connected layers, each containing multiple neurons connected by weights. The neural network structure and weights constitute the core of the model. By simplifying the swarm optimization algorithm, a neural architecture search is performed to find the best neural network architecture and adjust its hyperparameters.

[0053] In summary, the core of the recognition model obtained through deep learning lies in the network architecture and the weights between neurons. The simplified swarm algorithm not only optimizes the network structure but also optimizes the weights. By optimizing the network structure and weights through the simplified swarm algorithm, the number of network structures and weights is reduced, improving the model's recognition efficiency. Therefore, the recognition efficiency of the image recognition unit 50 is improved to complete the entire recognition process in just one minute and thirty seconds, and the recognition accuracy is increased to 99.5%, higher than the industry average of 92%.

[0054] like Figure 1 and Figure 3 As shown, after the crystal boat 100 is removed from the crystal boat placement part 11, multiple first switches 13 synchronously transmit first shutdown signals 132 to the control unit 60. The control unit 60 shuts down the light source 30, multiple image capturing units 40 and image recognition units 50 according to the multiple first shutdown signals 132.

[0055] like Figures 1 to 3As shown, in the first embodiment, the base 10 also includes an indicator light 14, which is disposed on the crystal boat placement portion 11 and electrically connected to the control unit 60. If only one protrusion 101 of the crystal boat 100 presses down on one of the first switches 13, and the other protrusion 101 does not press down on the other first switch 13, the control unit 60 will only receive one first start signal 131 and activate the indicator light 14 according to the first start signal 131. At the same time, the control unit 60 will not activate the light source 30, the multiple image capturing units 40, and the image recognition unit 50. The user can determine from the indicator light 14 that the position of the crystal boat 100 is incorrect and that the crystal boat 100 must be repositioned. If both protrusions 101 of the crystal boat 100 press down on the two first switches 13 respectively, the control unit 60 will receive two first start signals 131 and activate the light source 30, the multiple image capturing units 40, and the image recognition unit 50 according to the two first start signals 131, while turning off the indicator light 14. The user can determine from the indicator light 14 being off that the position of the crystal boat 100 is correct. After the crystal boat 100 is removed from the crystal boat placement section 11, the two first switches 13 synchronously transmit the first shutdown signal 132 to the control unit 60. The control unit 60 activates the indicator light 14 and changes the color of the indicator light 14 according to the two first shutdown signals 132 to remind the user that the operation has ended.

[0056] like Figure 1 and Figure 2 As shown, the wafer marking identification device also includes a pad 70. The pad 70 is disposed between the base 21 and the wafer carrier placement portion 11, and is close to the second end 112 of the wafer carrier placement portion 11, allowing the wafer carrier placement portion 11 to tilt upwards relative to the base 21. Figure 4A As shown, when the crystal boat 100 is placed in the crystal boat placement section 11, the elevation angle of the crystal boat placement section 11 makes it easier for the light from the light source 30 to illuminate the surface of these wafers 200, and makes it easier for the multiple image capturing units 40 to capture the markings of these wafers 200.

[0057] like Figure 1 and Figure 2 As shown, in the first embodiment, the wafer marking identification device further includes two blocks 80, which are disposed at the first end 211 of the base 21 and abut against the first end 111 of the wafer boat placement portion 11. Figure 4A As shown, the two blocks 80 prevent the crystal boat placement part 11 from moving towards the first end 211 of the base 21. Therefore, the crystal boat placement part 11 can maintain a fixed distance from the light source 30 and the multiple image capturing units 40, thus ensuring that the light from the light source 30 is maintained at the optimal projection angle and distance, and that the multiple image capturing units 40 are maintained at the optimal shooting angle and distance, so as to obtain a clear image 41 of the markings 201 of the multiple wafers 200.

[0058] like Figure 4B As shown, in the first embodiment, each first switch 13 is a pressure switch. In some embodiments, each first switch 13 may also be a micro switch or an inductive switch.

[0059] It is worth mentioning that, such as Figure 4A As shown, when the crystal boat 100 is laid horizontally, the wafers 200 within it are also laid horizontally. Because 6-inch or 8-inch wafers 200 are lighter, they are less likely to be crushed by gravity when laid horizontally. However, wafers 200 larger than 8 inches are heavier, making them more susceptible to crushing by gravity when laid horizontally. Therefore, this first embodiment is suitable for 6-inch or 8-inch wafers 200, but not for wafers 200 larger than 8 inches.

[0060] like Figure 1 and Figure 2 As shown, the light source 30 in the first embodiment is a light bulb, that is, the light source 30 in the first embodiment is a point light source.

[0061] In some embodiments, the number of light sources 30 can be multiple, and these light sources 30 can provide multi-angle supplementary lighting to improve the recognition effect.

[0062] Figure 6 This is a perspective view of the second embodiment of the present invention. Figure 6 As shown, the difference between the second embodiment and the first embodiment is that the light source 30A in the second embodiment is a light strip, which contains multiple light-emitting diodes.

[0063] Figure 7 This is a schematic diagram illustrating the marking identification process according to the second embodiment of the present invention. For example... Figure 7 As shown, because each LED in the light strip has the same luminous flux, the light provided by the light strip is scattered more uniformly than that from a point light source. Therefore, the light from the light strip can help multiple image capturing units 40 capture clearer images 41 of the markings 201 on multiple wafers 200, thereby improving the image recognition unit 50's ability to recognize the markings 201 on these wafers 200.

[0064] Figure 8 This is a perspective view of the third embodiment of the present invention. Figure 8As shown, the difference between the third embodiment and the first embodiment is that: firstly, each support member 22A includes a vertical rod 221 and a horizontal rod 222. The vertical rods 221 are fixed to the base 21 and close to the second end 212 of the base 21. The horizontal rods 222 extend laterally from the top of the vertical rods 221 and are located above the crystal boat placement part 11. The light source 30 and the image capturing units 40 are respectively disposed on the horizontal rods 222; secondly, the pad 70 is omitted.

[0065] Figure 9 This is a schematic diagram illustrating the marking identification process according to the third embodiment of the present invention. Figure 9 As shown, when the crystal boat 100 is placed in the crystal boat placement section 11, the two protrusions 102 of the crystal boat 100 are respectively positioned in the positioning grooves 121 and press down the first switches 13, and the opening of the crystal boat 100 faces upward toward the crossbars 222. In other words, the crystal boat 100 is placed vertically on the crystal boat placement section 11; the light source 30 projects light from top to bottom onto the wafers 200 in the crystal boat 100 for supplementary lighting, and the image capturing units 40 capture images 41 of the markings 201 of the wafers 200 in the crystal boat 100 from top to bottom.

[0066] It is worth mentioning that, such as Figure 9 As shown, when the crystal boat 100 is placed vertically, the wafers 200 in the crystal boat 100 are also placed vertically. Since these wafers 200 are not affected by gravity and will not be squeezed to break when placed vertically, the third embodiment is applicable to wafers 200 of all sizes.

[0067] Figure 10 and Figure 11 These are, respectively, a side view and a structural block diagram of the fourth embodiment of the present invention. Figure 10 and Figure 11 As shown, the fourth embodiment differs from the first embodiment in that the bracket 20A further includes a lifting mechanism 23, a first position sensor 24, and a second position sensor 25. The lifting mechanism 23 includes a track 231, a slider 232, and a drive unit 233. The track 231 is fixed to the second end 212 of the base 21 and extends downwards from the base 21. The slider 232 slides on one side of the track 231. The drive unit 233 is connected to the slider 232 and electrically connected to the control unit 60. Support members 22 are disposed on the slider 232. The first position sensor 24 is disposed on the other side of the track 231, near the top of the track 231, and is electrically connected to the control unit 60. The second position sensor 25 is disposed on the other side of the track 231, near the bottom of the track 231, and is electrically connected to the control unit 60.

[0068] Figure 12 This is a schematic diagram illustrating the marking identification process according to the fourth embodiment of the present invention. Figure 11 , Figure 12As shown, when the crystal boat 100 is placed in the crystal boat placement section 11, the control unit 60 controls the drive unit 233 according to these first activation signals 131. The drive unit 233 drives the slider 232 to move upward along the track 231, so that the slider 232 drives the support members 22 to move upward to the first position and above the base 21. When the first position sensor 24 senses that the support members 22 are in the first position, the first position sensor 24 transmits the first sensing signal 241 to the control unit 60. The control unit 60 determines that the support members 22 are in the first position according to the first sensing signal 241 and further activates the light source 30, the image capturing unit 40 and the image recognition unit 50 according to the first activation signal 131.

[0069] like Figure 10 and Figure 11 As shown, after the crystal boat 100 is removed from the crystal boat placement section 11, the control unit 60 controls the drive unit 233 according to the first shut-off signal 132. The drive unit 233 drives the slider 232 to move downward along the track 231, causing the slider 232 to drive the support members 22 to move downward to the second position and be located below the base 21. When the second position sensor 25 senses that the support members 22 are in the second position, the second position sensor 25 transmits the second sensing signal 251 to the control unit 60. The control unit 60 determines that the support members 22 are in the second position according to the second sensing signal 251 and further shuts off the light source 30, the image capturing units 40 and the image recognition unit 50 according to the first shut-off signal 132.

[0070] Compared to the first embodiment, the fourth embodiment has the advantage that, when no identification work is being performed, these support members 22 are located below the base 21, preventing the wafer 100 from colliding with these support members 22 during the user's handling of the wafer 100, thus avoiding damage to the wafers 200 due to impact forces. Compared to the first embodiment, the fourth embodiment has the disadvantage that, when the identification work begins, the lifting mechanism 23 must drive these support members 22 to rise, and after the identification work is completed, the lifting mechanism 23 must drive these support members 22 to fall, resulting in longer operation time and lower work efficiency.

[0071] Figure 13 and Figure 14 These are, respectively, a perspective view and a structural block diagram of the fifth embodiment of the present invention. Figure 13 and Figure 14As shown, the fifth embodiment differs from the first embodiment in the following ways: First, the base 10 further includes two pivot portions 15 and a first switch 13. These pivot portions 15 are disposed on the crystal boat placement portion 11, and the first switch 13 is disposed on the crystal boat placement portion 11 and located below the base 21. Second, a pad 70 is disposed on the crystal boat placement portion 11 and located between these pivot portions 15 and the second end 112 of the crystal boat placement portion 11. Third, the bracket 20B includes only one support member 22. The support member 22 is pivotally disposed between these pivot portions 15 and abuts against the pad 70. The pad 70 allows the support member 22 to maintain an inclined state relative to the crystal boat placement portion 11, so that the base 21 can tilt upward relative to the crystal boat placement portion 11. Fourth, the light source 30 and these image capturing units 40 are respectively disposed on both sides of the support member 22. Fifth, the bracket 20B further includes two abutment portions 26, which are disposed on the base 21.

[0072] Figure 15 A schematic diagram of the contact base 21 of the crystal boat 100 is shown. Figure 16A This is a schematic diagram illustrating the marking identification process according to the fifth embodiment of the present invention. Figure 16B A schematic diagram showing the base 21 pressing down on the first switch 13 is shown. Figure 15 As shown, when the crystal boat 100 contacts the base 21, the crystal boat 100 abuts against these abutment portions 26, which prevent the crystal boat 100 from sliding towards the support member 22. Figure 16A As shown, the base 21 is pressed down by the gravity of the crystal boat 100 and rotates downward to the first position. The support member 22 is pulled upward relative to the pivot portion 15 by the base 21, and the crystal boat 100 is placed in the crystal boat placement portion 11. The two protrusions 101 of the crystal boat 100 are respectively located in these positioning grooves 121 and press against these first switches 13 (see...). Figure 4B At the same time, the base 21 presses down on the first switch 13 (see...). Figure 16B ).like Figure 14 As shown, these first switches 13 synchronously transmit a first start signal 131 to the control unit 60, and the control unit 60 activates the light source 30, the image capturing units 40, and the image recognition units 50 according to these first start signals 131. Figure 16A As shown, the light source 30 projects light laterally onto the wafers 200 in the crystal boat 100 for supplemental lighting, and the image capturing units 40 laterally capture images 41 of the markings on the wafers 200 in the crystal boat 100. Figure 14 As shown, the control unit 60 receives the images 41 of the markings on these wafers 200 and transmits them to the image recognition unit 50. The image recognition unit 50 identifies the markings on these wafers 200 based on the images 41 of the markings on these wafers 200.

[0073] like Figure 13 and Figure 14 As shown, after the crystal boat 100 is removed from the crystal boat placement part 11, the gravity of the support member 22 causes it to rotate downward relative to the pivot parts 15. The base 21 is pulled upward by the support member 22 and rotates to the second position, with the support member 22 abutting against the pad 70. At this time, the first switches 13 synchronously transmit first shutdown signals 132 to the control unit 60. The control unit 60 shuts down the light source 30, the image capturing units 40, and the image recognition units 50 according to these first shutdown signals 132.

[0074] Figure 17 and Figure 18 These are, respectively, a perspective view and a structural block diagram of the sixth embodiment of the present invention. Figure 17 and Figure 18 As shown, the difference between the sixth embodiment and the fifth embodiment is that the bracket 20C further includes two second switches 27 and a rotating mechanism 28. The second switches 27 are disposed on the base 21 and electrically connected to the control unit 60, and the rotating mechanism 28 is connected to the support member 22 and electrically connected to the control unit 60.

[0075] Figure 19 A schematic diagram of the contact base 21 of the crystal boat 100 is shown. Figure 20 The diagram shows the crystal boat 100 pressing down the second switch 27. Figure 21 This is a schematic diagram illustrating the marking identification process according to the sixth embodiment of the present invention. Figure 19 and Figure 20 As shown, when the crystal boat 100 contacts the base 21, the crystal boat 100 presses down on the second switches 27 and abuts against the abutment parts 26. Figure 18 and Figure 21 As shown, these second switches 27 simultaneously transmit second start signals 271 to the control unit 60. The control unit 60 controls the rotating mechanism 28 according to these second start signals 271. The rotating mechanism 28 drives the support member 22 to rotate upward relative to these pivot parts 15. The base 21 is pulled downward by the support member 22 and rotates to the first position, and the crystal boat 100 is placed in the crystal boat placement part 11.

[0076] like Figure 17 and Figure 18 As shown, after the crystal boat 100 is removed from the crystal boat placement part 11, these second switches 27 simultaneously transmit second shut-off signals 272. The control unit 60 controls the rotation mechanism 28 according to these second shut-off signals 272. The rotation mechanism 28 drives the support member 22 to rotate downward relative to these pivot parts 15, and the base 21 is pulled upward by the support member 22 to rotate to the second position.

[0077] In summary, the wafer marking identification device of the present invention can automatically turn on and off the light source, image capturing unit and image recognition unit, and is quite simple to operate.

[0078] Furthermore, the wafer marking identification device of the present invention can capture images from different angles through light source supplementation and multiple image capturing units, which is not easily affected by external environment and improves the identification effect.

[0079] Furthermore, the wafer marking identification device of the present invention does not require prior knowledge or acquisition of the character type, making it easy to handle production lines with mixed batches and diverse characteristics.

[0080] The above description is merely a preferred embodiment for explaining the present invention and is not intended to limit the present invention in any way. Therefore, any modifications or changes made to the present invention under the same inventive spirit should still be included within the scope of protection intended by the present invention.

Claims

1. A wafer marking recognition device capable of automatically recognizing the opening and closing functions, characterized in that, include: The base includes a crystal boat placement part and at least one first switch, wherein the at least one first switch is disposed on the crystal boat placement part; support; At least one light source is mounted on the bracket; Multiple image capturing units are mounted on the bracket; Image recognition unit; as well as The control unit is electrically connected to the at least one first switch, the at least one light source, the plurality of image capturing units, and the image recognition unit; When the crystal boat is placed in the crystal boat placement section, the at least one first switch transmits a first start signal to the control unit. The control unit activates the at least one light source, the plurality of image capturing units, and the image recognition unit according to the first start signal. The at least one light source projects light onto the plurality of wafers in the crystal boat for supplementary lighting. The plurality of image capturing units capture images of the markings on the plurality of wafers in the crystal boat. The control unit receives the images of the markings on the plurality of wafers and transmits them to the image recognition unit. The image recognition unit identifies the markings on the plurality of wafers based on the images of the markings on the plurality of wafers. Wherein, after the crystal boat is removed from the crystal boat placement part, the at least one first switch sends a first shutdown signal to the control unit, and the control unit shuts down the at least one light source, the plurality of image capturing units and the image recognition unit according to the first shutdown signal; The bracket includes a base and a support member. The crystal boat placement part is disposed on the base, and the support member is movable relative to the base. The at least one light source and the plurality of image capturing units are disposed on the support member. When the crystal boat is placed on the crystal boat placement part, the support member moves upward to a first position and is located above the base. After the crystal boat is removed from the crystal boat placement part, the support member moves downward to a second position and is located below the base. The bracket further includes a lifting mechanism, which is disposed on the base and electrically connected to the control unit, and the support member is disposed on the lifting mechanism; wherein, when the crystal boat is placed in the crystal boat placement part, the control unit controls the lifting mechanism according to the first start signal, so that the lifting mechanism drives the support member to move upward to the first position; and wherein, after the crystal boat is removed from the crystal boat placement part, the control unit controls the lifting mechanism according to the first stop signal, so that the lifting mechanism drives the support member to move downward to the second position; The bracket further includes a first position sensor and a second position sensor. The first position sensor is disposed on the lifting mechanism and electrically connected to the control unit. The second position sensor is disposed on the lifting mechanism and electrically connected to the control unit. When the first position sensor senses that the support member is in the first position, the first position sensor transmits a first sensing signal to the control unit. The control unit determines that the support member is in the first position based on the first sensing signal and further activates the at least one light source, the plurality of image capturing units, and the image recognition unit based on the first activation signal. When the second position sensor senses that the support member is in the second position, the second position sensor transmits a second sensing signal to the control unit. The control unit determines that the support member is in the second position based on the second sensing signal and further deactivates the at least one light source, the plurality of image capturing units, and the image recognition unit based on the first deactivation signal.

2. The wafer marking recognition apparatus of claim 1, wherein The base further includes a positioning member disposed on the crystal boat placement portion and having at least one positioning groove, wherein the at least one first switch is located in the at least one positioning groove; and wherein, when the crystal boat is placed on the crystal boat placement portion, at least one protrusion of the crystal boat is positioned in the at least one positioning groove and presses against the at least one first switch.

3. The wafer mark recognition apparatus according to claim 1, wherein The lifting mechanism includes a track, a slider, and a drive unit. The track is fixed to the base, the slider slides on the track, the drive unit is connected to the slider and electrically connected to the control unit, and the support member is disposed on the slider. When the crystal boat is placed in the crystal boat placement section, the control unit controls the drive unit according to the first start signal, and the drive unit drives the slider to move upward along the track, causing the slider to drive the support member upward to the first position. After the crystal boat is removed from the crystal boat placement section, the control unit controls the drive unit according to the first stop signal, and the drive unit drives the slider to move downward along the track, causing the slider to drive the support member downward to the second position.

4. A wafer marking recognition device capable of automatically recognizing the opening and closing functions, characterized in that, include: The base includes a crystal boat placement part and at least one first switch, wherein the at least one first switch is disposed on the crystal boat placement part; support; At least one light source is mounted on the bracket; Multiple image capturing units are mounted on the bracket; Image recognition unit; as well as The control unit is electrically connected to the at least one first switch, the at least one light source, the plurality of image capturing units, and the image recognition unit; When the crystal boat is placed in the crystal boat placement section, the at least one first switch transmits a first start signal to the control unit. The control unit activates the at least one light source, the plurality of image capturing units, and the image recognition unit according to the first start signal. The at least one light source projects light onto the plurality of wafers in the crystal boat for supplementary lighting. The plurality of image capturing units capture images of the markings on the plurality of wafers in the crystal boat. The control unit receives the images of the markings on the plurality of wafers and transmits them to the image recognition unit. The image recognition unit identifies the markings on the plurality of wafers based on the images of the markings on the plurality of wafers. Wherein, after the crystal boat is removed from the crystal boat placement part, the at least one first switch sends a first shutdown signal to the control unit, and the control unit shuts down the at least one light source, the plurality of image capturing units and the image recognition unit according to the first shutdown signal; The base includes a pivot portion disposed on the crystal boat placement portion. The bracket includes a base and a support member. The support member is fixed to the base and pivotally disposed on the pivot portion. The at least one light source and the plurality of image capturing units are all disposed on the support member. When the crystal boat contacts the base, the support member rotates upward relative to the pivot portion, causing the base to rotate downward to a first position, so that the crystal boat is placed on the crystal boat placement portion. After the crystal boat is removed from the crystal boat placement portion, the support member rotates downward relative to the pivot portion, causing the base to rotate upward to a second position. The bracket further includes at least one second switch and a rotating mechanism. The at least one second switch is disposed on the base and electrically connected to the control unit. The rotating mechanism is connected to the support member and electrically connected to the control unit. When the crystal boat contacts the base, the at least one second switch transmits a second start signal to the control unit. The control unit controls the rotating mechanism according to the second start signal. The rotating mechanism drives the support member to rotate upward relative to the pivot portion. The base is pulled downward by the support member and rotates to the first position, and the crystal boat is placed in the crystal boat placement portion. After the crystal boat is removed from the crystal boat placement portion, the at least one second switch transmits a second stop signal. The control unit controls the rotating mechanism according to the second stop signal. The rotating mechanism drives the support member to rotate downward relative to the pivot portion. The base is pulled upward by the support member and rotates to the second position.

Images