相干衍射成像聚焦系统和相干衍射成像系统
By using multilayer film mirrors and aspherical mirrors in the coherent diffraction imaging system and optimizing the beam path, the problems of excessive system size and light energy loss were solved, and a compact coherent diffraction imaging system was realized.
CN116679366BActive Publication Date: 2026-07-17JIHUA LAB
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIHUA LAB
- Filing Date
- 2023-05-19
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Traditional coherent diffraction imaging systems are too large, limiting their application in various scenarios, and extreme ultraviolet light suffers significant transmission loss in focusing systems.
Method used
A first multilayer film and a second multilayer film are respectively set on a first reflector and a second reflector. The incident angle is smaller than the grazing angle. Combined with an even-order aspherical reflector and an aperture, the beam path is optimized to reduce the reflector area and light energy loss.
Benefits of technology
A compact structure for coherent diffraction imaging systems has been achieved, reducing light energy loss and meeting the requirements for compact coherent diffraction imaging systems.
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Smart Images
Figure CN116679366B_ABST
Abstract
本发明公开一种相干衍射成像聚焦系统和相干衍射成像系统，其中，相干衍射成像聚焦系统用于接收并聚焦来自光源的光，且包括：第一反射镜，用于接收来自光源的光；所述第一反射镜的反射面上设置有第一多层膜；所述光源的光入射所述第一反射镜的入射角小于掠射角度；第二反射镜，用于接收所述第一反射镜的出射光；所述第二反射镜的发射面上设置有第二多层膜；所述第一反射镜的出射光入射所述第二反射镜的入射角小于掠射角度；所述第二反射镜的出射光可聚焦。本发明技术方案能够使得相干衍射成像系统的结构更紧凑。
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