衍射光学元件的光栅的主模板和印模的制作方法、主模板和印模
By adjusting the distance between the plate and the substrate and the perforation area during the manufacturing process of the master template and the mold, the material deposition thickness is controlled, solving the problem of unstructured layer thickness variation. This achieves precise thickness control and a simplified manufacturing process, improving the performance and yield of the optical assemblies.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- DISPELIX OY
- Filing Date
- 2021-12-20
- Publication Date
- 2026-07-17
AI Technical Summary
In existing technologies for replicating the nanostructure of diffractive optical elements, variations in the thickness of the unstructured layer make pattern transfer processes difficult or impossible, and increase manufacturing complexity and contamination risks.
By adjusting the distance D between the plate and the substrate during the manufacturing process of the master template and the mold, and by setting the area variation of the perforations on the plate, the material deposition thickness is controlled, so that the fill factor and height of the raised and recessed structures are proportional, and the thickness variation of the unstructured layer is reduced.
This enables precise control of thickness during the replication process, simplifies the manufacturing process, reduces the risk of contamination, and improves the performance and yield of optical combiners.
Smart Images
Figure CN116685456B_ABST