Nozzle, nozzle assembly, nozzle manufacturing method, and printing device

Abstract

The present application relates to the technical field of display, in particular to a nozzle, a nozzle assembly, a nozzle manufacturing method and a printing device; the nozzle provided by the present application comprises a substrate, a first photosensitive layer and a second photosensitive layer, the first photosensitive layer is arranged on one side of the substrate, and the second photosensitive layer is arranged on the side of the first photosensitive layer away from the substrate; the nozzle further comprises a nozzle, the nozzle comprises an inlet and a flow channel, one end of the flow channel is communicated with the inlet, and the other end of the flow channel is an outlet; in the direction perpendicular to the plane where the substrate is located, the inlet penetrates through the second photosensitive layer; and the flow channel is located on the first photosensitive layer. The inlet and the flow channel of the nozzle can be formed on the first photosensitive layer and the second photosensitive layer by means of photoetching, and the flow channel with a small caliber and a small spacing can be manufactured by means of photoetching; therefore, the nozzle has the characteristics of a small outlet caliber, a small outlet spacing and high PPI pixel printing, and is convenient for manufacturing a display panel and a display device with a high PPI.

Description

Technical Field

[0001] This invention relates to the field of display technology, and more specifically, to a printhead, a printhead assembly, a printhead manufacturing method, and a printing apparatus. Background Technology

[0002] Organic light-emitting diodes (OLEDs) offer advantages such as self-illumination, wide viewing angles, thinness, flexibility, and low cost. With the continuous development of display technology, flexible display panels using OLED light-emitting devices have become the mainstream product in the display field.

[0003] In the manufacturing process of some OLED display panels, the light-emitting material layer needs to be printed. The existing printing nozzles used for printing light-emitting materials have a large inner diameter of flow channel and outlet, resulting in a small pixel density (Pixels Per Inch) for OLED display panels, which cannot meet the requirements of gradually increasing pixel density. Summary of the Invention

[0004] In view of this, the present invention provides a printhead, a printhead assembly, a printhead manufacturing method, and a printing apparatus, which aims to reduce the inner diameter of the nozzle flow channel and the outlet in the printhead structure, thereby increasing the pixel density that the printhead can print, and thus helping to improve the PPI of the display panel.

[0005] The technical solution of the present invention is as follows:

[0006] In a first aspect, the present invention provides a nozzle, comprising a substrate, a first photosensitive layer and a second photosensitive layer, wherein the first photosensitive layer is disposed on one side of the substrate and the second photosensitive layer is disposed on the side of the first photosensitive layer away from the substrate;

[0007] The nozzle includes a nozzle, which includes an inlet and a flow channel. One end of the flow channel is connected to the inlet, and the other end of the flow channel is the outlet.

[0008] The entrance penetrates the second photosensitive layer along a direction perpendicular to the plane of the substrate;

[0009] The flow channel is located in the first photosensitive layer.

[0010] Secondly, based on the same inventive concept, the present invention also provides a nozzle assembly, including at least a first nozzle and a second nozzle, the structure of the first nozzle and the second nozzle being as described in the first aspect;

[0011] The second nozzle is positioned on the side of the first nozzle away from the base of the first nozzle;

[0012] Along the direction perpendicular to the plane of the base of the first nozzle, the inlet of the second nozzle does not overlap with that of the first nozzle.

[0013] Thirdly, based on the same inventive concept, the present invention also provides a method for manufacturing a nozzle, comprising the following steps:

[0014] Provide a substrate, fabricate the first photosensitive layer on the substrate, and use exposure and development methods to create the flow channels and inlets of the nozzle;

[0015] A second photosensitive layer is disposed on the side of the first photosensitive layer away from the substrate. The second photosensitive layer does not enter the flow channel, and the inlet is exposed by exposure and development.

[0016] Fourthly, based on the same inventive concept, the present invention also provides a printing apparatus including any of the above-mentioned printheads.

[0017] Compared with related technologies, the display panel and display device provided by the present invention achieve at least the following beneficial effects:

[0018] The printhead provided by this invention includes a substrate, a first photosensitive layer, and a second photosensitive layer. The first photosensitive layer is disposed on one side of the substrate, and the second photosensitive layer is disposed on the side of the first photosensitive layer away from the substrate. The printhead also includes a nozzle, which includes an inlet and a flow channel. One end of the flow channel communicates with the inlet, and the other end of the flow channel is an outlet. The inlet penetrates the second photosensitive layer along a direction perpendicular to the plane of the substrate. The flow channel is located in the first photosensitive layer. Because the printhead of this invention includes a substrate, a first photosensitive layer, and a second photosensitive layer, the inlet and flow channel of the printhead can be formed on the first and second photosensitive layers by photolithography. Photolithography can be used to create flow channels with a small aperture and a small spacing. Therefore, the printhead of this invention has the characteristics of a small outlet aperture and a small outlet spacing, enabling high PPI pixel printing, which is convenient for manufacturing display panels and display devices with high PPI.

[0019] Of course, any product implementing this invention does not necessarily need to achieve all of the technical effects described above at the same time.

[0020] Other features and advantages of the invention will become clear from the following detailed description of exemplary embodiments of the invention with reference to the accompanying drawings. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the invention and, together with their description, serve to explain the principles of the invention.

[0022] Figure 1 The diagram shown is a schematic representation of the structure of a nozzle provided in an embodiment of the present invention;

[0023] Figure 2 for Figure 1 AA cross-sectional view of the nozzle shown;

[0024] Figure 3The diagram shown is a flowchart of the nozzle manufacturing process provided in an embodiment of the present invention;

[0025] Figure 4 The figure shown is a schematic diagram of a second photosensitive layer provided in an embodiment of the present invention;

[0026] Figure 5 The diagram shown is another structural schematic of the second photosensitive layer provided in an embodiment of the present invention;

[0027] Figure 6 As shown Figure 1 The BB cross-sectional view of the nozzle shown;

[0028] Figure 7 The diagram shown is a schematic diagram of an application structure of the nozzle provided in an embodiment of the present invention;

[0029] Figure 8 The image shown is a front view of a nozzle assembly provided in an embodiment of the present invention;

[0030] Figure 9 The image shown is a top view of a nozzle assembly provided in an embodiment of the present invention;

[0031] Figure 10 The image shown is a right view of a nozzle assembly provided in an embodiment of the present invention. Detailed Implementation

[0032] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention.

[0033] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0034] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0035] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0036] Various modifications and variations can be made to this invention without departing from its spirit or scope, as will be apparent to those skilled in the art. Therefore, this invention is intended to cover modifications and variations falling within the scope of the corresponding claims (the claimed technical solutions) and their equivalents. It should be noted that the embodiments provided in this invention can be combined with each other without contradiction.

[0037] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0038] This invention provides a printhead, comprising a substrate, a first photosensitive layer, and a second photosensitive layer. The first photosensitive layer is disposed on one side of the substrate, and the second photosensitive layer is disposed on the side of the first photosensitive layer away from the substrate. The printhead also includes a nozzle, which includes an inlet and a flow channel. One end of the flow channel communicates with the inlet, and the other end of the flow channel is an outlet. The inlet penetrates the second photosensitive layer along a direction perpendicular to the plane of the substrate. The flow channel is located in the first photosensitive layer. The printhead of this invention comprises a substrate, a first photosensitive layer, and a second photosensitive layer. Thus, the inlet and flow channel of the printhead can be formed on the first and second photosensitive layers by photolithography. Photolithography can be used to create flow channels with a small aperture and a small spacing. Therefore, the printhead of this invention has the characteristics of a small outlet aperture and a small outlet spacing, enabling high PPI pixel printing, which is convenient for manufacturing display panels and display devices with high PPI.

[0039] The above is the core idea of ​​this invention. The technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the embodiments of this invention.

[0040] Figure 1 The diagram shown is a schematic representation of the structure of a nozzle provided in an embodiment of the present invention; Figure 2 for Figure 1 The diagram shown is an AA representation of the nozzle; please refer to it. Figure 1 and Figure 2 The nozzle of the present invention includes a substrate 00, a first photosensitive layer 01 and a second photosensitive layer 02. The first photosensitive layer 01 is disposed on one side of the substrate 00, and the second photosensitive layer 02 is disposed on the side of the first photosensitive layer 01 away from the substrate 00. The nozzle also includes a nozzle 03, which includes an inlet 031 and a flow channel 032. One end of the flow channel 032 communicates with the inlet 031, and the other end of the flow channel 032 is an outlet 033. The inlet 031 penetrates the second photosensitive layer 02 along a direction perpendicular to the plane of the substrate 00. The flow channel 032 is located in the first photosensitive layer 01.

[0041] For details, please refer to [link / reference]. Figure 1 and Figure 2 The printhead of the present invention includes a substrate 00, a first photosensitive layer 01, and a second photosensitive layer 02. Thus, the inlet 031 and the flow channel 032 of the printhead can be formed on the first photosensitive layer 01 and the second photosensitive layer 02 by photolithography. The formed flow channel 032 can have a small diameter and a small spacing, thus enabling the printing of high PPI pixels. Furthermore, when using the printhead of the present invention to fabricate the light-emitting material layer of a display panel, it is convenient to produce a display panel with a high PPI.

[0042] Figure 3 The diagram shown is a flowchart illustrating the manufacturing process of the nozzle provided in this embodiment of the invention. Please refer to it. Figure 3 Based on the same inventive concept, the present invention also provides a method for manufacturing a nozzle, comprising the following steps:

[0043] Provide a substrate 00, fabricate a first photosensitive layer 01 on the substrate 00, and fabricate the nozzle flow channel 032 and inlet 031 using an exposure and development method;

[0044] A second photosensitive layer 02 is disposed on the surface of the first photosensitive layer 01 away from the substrate 00. The second photosensitive layer 02 does not enter the flow channel 032, and the inlet 031 is exposed by exposure and development.

[0045] Please combine Figure 2 and Figure 3 Specifically, during the fabrication of the nozzle, the first photosensitive layer 01 is exposed and developed to form the main body of the flow channel 032 and the main body of the inlet 031, with the substrate 00 serving as the bottom of the flow channel 032 and the inlet 031. Then, when forming the second photosensitive layer 02 on the surface of the first photosensitive layer 01 away from the substrate 00, the material of the second photosensitive layer 02 must not flow into the main body of the flow channel 032 formed by the first photosensitive layer 01; otherwise, it would fill the already formed main body of the flow channel 032. After the second photosensitive layer 02 is formed, it is located above the main body of the flow channel 032, forming the top of the flow channel 032, thus completing the flow channel 032. Because the inlet 031 has a large diameter, some photosensitive material is used to fill the inlet 031 during the fabrication of the second photosensitive layer 02. After the second photosensitive layer 02 is formed, it is exposed and developed to expose the inlet 031, thus forming the inlet 031.

[0046] Please continue to refer to this. Figure 2Based on the foregoing, the dimensions of the flow channel 032 and outlet 033 of the nozzle required by this invention are relatively small, generally between 10µm and 100µm in width. For some photosensitive materials, which can be organic polymers, organic polymers have large molecular weights, complex molecular structures, certain viscoelasticity, and poor flowability. When the width of the main body of the flow channel 032 is small, for polymers with large molecular weights and poor flowability, the polymers will be blocked outside the main body of the flow channel 032. This invention takes advantage of the fact that the exposure and development process of the photosensitive film layer can produce micron-sized small structures, and utilizes the physical properties of the second photosensitive film layer and the characteristics of the small flow channel size to successfully prepare a flow channel 032 and outlet 033 with small dimensions, which has very significant advantages.

[0047] It should be further noted that, in some embodiments of the present invention, after the first photosensitive layer 01 is exposed and developed, a step of curing the remaining portion of the first photosensitive layer 01 is included to strengthen the strength of the first photosensitive layer 01; after the second photosensitive layer 02 is exposed and developed, a step of curing the remaining portion of the second photosensitive layer 02 is included to strengthen the strength of the second photosensitive layer 02.

[0048] It should also be noted that, Figure 1 and Figure 2 This is merely an illustration of the nozzle structure of the present invention and is not intended to limit the nozzle structure of the present invention. Figure 1 The number of inlets 031 shown is three. In practical applications, the number of inlets can be set according to the number of colors to be printed and other conditions, and can be two, three or more. The shape of the inlets is not limited to the circle shown in the figure, and can also be other shapes, such as square. The shape of the printhead is also not limited to... Figure 1 The shape shown is rectangular; the nozzle may not necessarily have the shape shown. Figure 2 The bend shown.

[0049] Please continue to refer to this. Figure 2 In some embodiments of the present invention, the cross-sectional area of ​​the inlet 031 is A along the direction parallel to the plane of the substrate 00; the cross-sectional area of ​​the flow channel 032 is B along the direction perpendicular to the extension of the flow channel 032, where A > B.

[0050] For details, please refer to [link / reference]. Figure 2 In this invention, the cross-sectional area of ​​the inlet 031 is A in the direction parallel to the plane of the substrate 00; and the cross-sectional area of ​​the flow channel 032 is B in the direction perpendicular to the extension of the flow channel 032, where A > B. This is based on the following two considerations:

[0051] Firstly: Inlet 031 is the inlet of the printing material, which is usually connected to the feed tube. Existing feed tubes are generally quite thick. In order to match the size of the feed tube and facilitate its installation, the size of the nozzle inlet 031 is close to the size of the feed tube. Thus, due to the large diameter of the feed tube, the cross-sectional area A of inlet 031 is large in the direction parallel to the plane of the base 00.

[0052] Furthermore, as mentioned above, the printhead of the present invention aims to reduce the inner diameter of the nozzle in the printhead structure, thereby increasing the pixel density that the printhead can print, which in turn helps to improve the PPI of the display panel. Therefore, along the direction perpendicular to the flow channel 032, the cross-sectional area B of the flow channel 032 is required to be as small as possible, so that the outlet 033 of the flow channel 032 has a smaller outlet size. And because the cross-sectional area of ​​the flow channel 032 is small, in the direction parallel to the plane where the substrate 00 is located, more flow channels 032 can be set within the limited area of ​​the first photosensitive layer 01 and the second photosensitive layer 02. Thus, the spacing between adjacent outlets 033 is smaller, and therefore, pixels with a higher PPI can be printed.

[0053] Therefore, in this invention, the cross-sectional area of ​​the inlet 031 is A in the direction parallel to the plane of the substrate 00; and the cross-sectional area of ​​the flow channel 032 is B in the direction perpendicular to the extension of the flow channel 032, where A > B. In this way, the compatibility between the nozzle and the feed tube can be taken into account, and it is easy to achieve printing with higher PPI pixels.

[0054] Secondly, since the cross-sectional area of ​​the flow channel 032 is small, the flow resistance of the printing material in the flow channel 032 is relatively large. In this invention, an inlet 031 with a larger cross-sectional area is provided. The larger inlet 031 stores more ink, which can reduce the material supply resistance during the printing process and, to a certain extent, can improve the flow force of the printing material in the flow channel 032, thus avoiding the phenomenon of ink interruption during printing.

[0055] Figure 4 The diagram shown is a schematic representation of a second photosensitive layer provided in an embodiment of the present invention; please refer to... Figure 2 and Figure 4 In some optional embodiments of the present invention, there are multiple nozzles 03, which are arranged along the first direction D1. The center-to-center distance between two adjacent outlets 033 is less than 200 μm. The first direction D1 is parallel to the plane of the substrate 00.

[0056] Please continue to refer to this. Figure 4 It should be noted that the center-to-center distance between two adjacent outlets is less than 200um. The distance here is the sum of the width D of an outlet 033 along the first direction D1 and the distance J between two adjacent outlets 033, where the first direction D1 is parallel to the plane of the base 00.

[0057] Please continue to refer to this. Figure 4 It should be noted that the center-to-center distance between two adjacent outlets in this invention is less than 200 μm, which does not mean that the center-to-center distance between two adjacent outlets in this invention is close but less than 200 μm. In fact, according to the photolithography precision of the first photosensitive layer 01 and the first photosensitive layer, the width D of outlet 033 along the first direction D1 can be around 10 μm, and the distance between adjacent outlets 033 can also be around 10 μm. Thus, in some embodiments of this invention, the center-to-center distance between two adjacent outlets 033 can be 20 μm.

[0058] It should also be noted that in practical applications, the width of the flow channel 032 and the outlet 033 along the first direction D1 can be adjusted as needed so that the spacing between the flow channel 032 and the outlet 033 can meet the PPI requirements of the pixels to be printed.

[0059] Furthermore, along the direction perpendicular to the plane where the substrate 00 is located, the height of the flow channel 032 and the outlet 033 depends on the thickness of the first photosensitive layer 01. In practical applications, the thickness of the first photosensitive layer 01 can be adjusted as needed.

[0060] Figure 5 The diagram shown is a schematic representation of a second photosensitive layer provided in an embodiment of the present invention; please refer to... Figure 5 In some optional embodiments of the present invention, multiple entrances 031 are arranged in two or more rows along the second direction D2, and the second direction D2 is parallel to the plane where the base 00 is located.

[0061] Specifically, as mentioned above, the cross-sectional area of ​​the inlet 031 is A in the direction parallel to the plane of the substrate 00; the cross-sectional area of ​​the channel 032 is B in the direction perpendicular to the extension of the channel 032, where A > B. This ensures both the compatibility of the nozzle and the feed tube connection and facilitates printing with higher PPI pixels. In some embodiments of the invention, the nozzles 03 are arranged along the first direction D1, the channel 032 extends along the second direction D2, and the inlet 031 is located on one side of the channel 032 along the second direction D2, where the second direction D2 intersects the first direction D1. To achieve a wider inlet 031 and a narrower channel 032, the width of the inlet 033 along the first direction D1 is much greater than the width of the channel 032 along the first direction D1. If the inlets 031 are arranged in a row along the first direction D1, the required distance for the inlets 033 in the first direction D1 is much greater than the required distance for the channel 032 in the first direction D1, resulting in a very large width of the nozzles 03 in the first direction D1. Based on this, in order to set more flow channels 032 within the limited area of ​​the second photosensitive layer 02; or, when the number of flow channels 032 is fixed, to reduce the width of the nozzle along the first direction D1, and to arrange multiple inlets 031 in two or more rows along the second direction D2, the second photosensitive layer 02 can be effectively utilized, while the width of the nozzle along the first direction D1 can be reduced.

[0062] Furthermore, in some embodiments of the present invention, the width of the inlet 031 along the first direction is much greater than the width of the flow channel 032 along the first direction, and because the spacing requirement of the outlet 033 is relatively small; the present invention arranges multiple inlets 031 in two or more rows, which also helps to reduce the spacing between adjacent flow channels 032, and thus helps to reduce the spacing between outlets 033; at the same time, arranging multiple inlets 031 in two or more rows also facilitates the shortening of the length of the flow channel 032 along the second direction D2, thereby reducing the flow resistance of the printing material.

[0063] It should be noted that the shape of the inlet 031 in this invention can be circular, rectangular, rounded rectangle or other shapes; the spacing between two adjacent inlets 031 can be equal or unequal; the opening size of the inlets 031 can be equal or unequal; the shapes of different inlets 031 can be the same or different.

[0064] Please continue to refer to this. Figure 5 In some embodiments of the present invention, the inlet 031 is arranged in two rows, including a first row 031A and a second row 031B. Along the first direction D1, the inlet 031 of the second row 031B is located between the two inlets 031 of the first row 031A or at both ends of the inlets 031 of the first row 031A. The first direction is parallel to the plane of the base. The first direction intersects with the second direction.

[0065] For details, please refer to [link / reference]. Figure 5 Along the second direction D2, the inlets 031 are arranged in two rows, including a first row 031 and a second row 031B; the first row 031 includes at least two inlets 031; along the first direction D1, there is a gap between two adjacent inlets 031. The inlets 031 of the second row 031B of the present invention are located between the two inlets 031 of the first row 031A or at both ends of the inlets 031 of the first row 031A. In this way, the inlets 031 of the first row 031A and the inlets 031 of the second row 031B can be staggered. Then, the flow channels 032 connected to the corresponding inlets 031 can be more easily staggered along the first direction D1. There is no need to specially set avoidance between the flow channels 032. Therefore, it is beneficial to reduce the length of the flow channels 032, thereby reducing the flow resistance of the printing material.

[0066] Figure 6 As shown Figure 1 Please refer to the BB cross-sectional view of the nozzle shown. Figure 6 In some embodiments of the present invention, the cross-sectional shape of the flow channel 032 is an inverted trapezoid.

[0067] Specifically, in some embodiments of the present invention, the main body of the flow channel 032 is formed on the first photosensitive layer 01, and is exposed and developed through the first photosensitive layer 01, and then cured; the cross-sectional shape of the flow channel 032 is an inverted trapezoid, which is a typical shape formed by the exposure and development process.

[0068] It should be noted that although the inverted trapezoidal cross-sectional shape of the flow channel 032 is a typical shape formed by the exposure and development process, the cross-sectional shape of the flow channel 032 of the present invention is not limited to an inverted trapezoidal shape. The cross-sectional shape of the flow channel 032 can be made rectangular, rounded rectangular, etc. by optimizing the parameters of the exposure and development process.

[0069] It should also be noted that the spacing between different flow channels 032 can be the same or different; the width of different flow channels 032 can be the same or different; and the extension direction of the flow channel 032 can be a straight line, an oblique line, or a curve.

[0070] Please continue to refer to this. Figure 2 In some optional embodiments of the present invention, the substrate 00 is a flexible substrate, and the first photosensitive layer 01 and the second photosensitive layer 02 are also flexible materials.

[0071] For details, please refer to [link / reference]. Figure 2The substrate 00, the first photosensitive layer 01 and the second photosensitive layer 02 are made of flexible materials. As a result, the flow channel 032 can be bent to a certain extent, thereby changing the orientation of the outlet 033 of the flow channel 032, making it easier for the nozzle to cooperate and connect with other structures, and making it more convenient to use.

[0072] Please continue to refer to this. Figure 2 In some optional embodiments of the present invention, along the second direction D2, the nozzle includes a first region Q1, a second region Q2 and a third region Q3; the second region Q2 is located between the first region Q1 and the third region Q3, and the second region Q2 is a bent region; the inlet 031 is disposed in the first region Q1; the flow channel 032 is disposed at least in the second region Q2 and the third region Q3; the second direction D2 is parallel to the plane where the substrate 00 is located.

[0073] Specifically, the nozzle of the present invention includes a first region Q1, a second region Q2, and a third region Q3, wherein the second region Q2 is a bent region; along the second direction, one end of the second region Q2 is connected to the first region Q1, and the other end of the second region is connected to the third region Q3; this structure has the following characteristics:

[0074] First: In this invention, the second region Q2 is a bent region, the first region Q1 is a non-bent region, and the inlet 031 is located in the first region Q1. That is to say, the inlet 031 is located in the non-bent region, which is beneficial to the connection between the feed pipe 04 and the inlet 031.

[0075] First: In this invention, the second region Q2 is a bent region, and the flow channel is located at least in the second region Q2 and the third region Q3. Thus, by changing the bending direction of the second region Q2, the flow direction of the printing material in the flow channel 032 and the direction of the outlet 033 can be changed, thereby making it easier to align the outlet 033 with the object to be printed, and making the use of the printhead more convenient.

[0076] Figure 7 The diagram shown is a schematic representation of an application structure of the nozzle provided in this embodiment of the invention; please refer to it. Figure 7 In some embodiments of the present invention, the display panel 05 to be printed is located below the printhead along a direction perpendicular to the plane of the substrate 00, and the plane of the substrate 00 is parallel to the plane of the display panel. In this case, if the luminescent material layer in the display panel 05 is to be printed, the printhead needs to be bent. Based on this, the second region Q2 of the present invention can be bent toward the display panel.

[0077] Please continue to refer to this. Figure 7In some embodiments of the present invention, the printhead includes a first nozzle 03A, a second nozzle 03B, and a third nozzle 03C. A first feed tube 04A is connected to the first nozzle 03A, a second feed tube 04B is connected to the second nozzle 03B, and a third feed tube 04C is connected to the third nozzle 03C. The first feed tube 04A, the second feed tube 04B, and the third feed tube 04C are filled with inks of different colors, such as red, green, and blue. Therefore, the first nozzle 03A, the second nozzle 03B, and the third nozzle 03C can print inks of different colors.

[0078] Please continue to refer to this. Figure 7 The display panel 05 includes a substrate 051, an array layer 052, and a pixel definition layer 053. The pixel definition layer 053 includes multiple pixel openings 054. The outlets 033 of the first nozzle 03A, the second nozzle 03B, and the third nozzle 03C correspond one-to-one with the pixel openings 054. In this way, the printing of the light-emitting material layer in the display panel 05 can be realized.

[0079] It should be noted that, Figure 7 An application example of the printhead provided by the present invention is given; in a practical application environment, the number of nozzles in the printhead can be adjusted according to the type of ink required by the object to be printed and the setting of the pixel unit. The printhead can have two nozzles, three nozzles or other numbers of nozzles; in addition, the bending direction of the second region Q2 can also be adjusted according to the settings corresponding to the object to be printed.

[0080] Please continue to refer to this. Figure 2 and Figure 3 In some optional embodiments of the present invention, when manufacturing the nozzle, the solid content of the second photosensitive layer 02 is greater than the solid content of the first photosensitive layer 01.

[0081] Specifically, as mentioned above, during the fabrication of the printhead, the first photosensitive layer 01 is exposed and developed to form the main body of the flow channel 032 and the main body of the inlet 031, with the substrate 00 serving as the bottom of the flow channel 032 and the inlet 031. Then, when forming the second photosensitive layer 02 on the surface of the first photosensitive layer 01 away from the substrate 00, it is required that the material of the second photosensitive layer 02 does not flow into the main body of the flow channel 032 formed by the first photosensitive layer 01; otherwise, it would fill the already formed main body of the flow channel 032. After the second photosensitive layer 02 is formed, it is located in the main body of the flow channel 032. Above, the top of the flow channel 032 is formed, thus completing the entire flow channel 032. As an optional embodiment of the present invention, in order to better prevent the material of the second photosensitive layer 02 from burying the main body of the flow channel 032 formed on the first photosensitive layer 01, the present invention selects a material with a solid content greater than that of the first photosensitive layer 01 as the material of the second photosensitive layer 02. The higher the solid content of the photosensitive material, the worse its fluidity. Therefore, selecting a material with a higher solid content as the material of the second photosensitive layer 02 helps to prevent the second photosensitive layer 02 from leaking into the flow channel 032 during coating and avoids clogging of the flow channel 032.

[0082] Please continue to refer to this. Figure 2 Based on the same inventive concept, the hardness of the second photosensitive layer 02 is greater than that of the first photosensitive layer 01.

[0083] Based on the above, in order to prevent the second photosensitive layer 02 from leaking into the flow channel 032 during coating and to avoid clogging of the flow channel 032, the solid content of the second photosensitive layer 02 is greater than the solid content of the first photosensitive layer 01. Thus, after the first photosensitive layer 01 and the second photosensitive layer 02 are cured, the hardness of the second photosensitive layer 02 is greater than the hardness of the first photosensitive layer 01 in the nozzle structure.

[0084] Please continue to refer to this. Figure 2 In some optional embodiments of the present invention, the substrate 00 is a flexible substrate, and the substrate 00 is disposed on a rigid substrate through a temporary bonding layer; after the second photosensitive layer 02 is cured, the rigid substrate is removed.

[0085] Specifically, the flexible substrate has the characteristics of being flexible and bendable. Therefore, in order to make the structure of the nozzle have a certain degree of flexibility, the substrate 00 of the present invention is a flexible substrate. However, on the other hand, the hardness of the flexible substrate is relatively low. Therefore, when manufacturing the nozzle, the present invention sets the substrate 00 on the rigid substrate through a temporary bonding layer. This facilitates the fabrication of the first photosensitive layer 01 and the second photosensitive layer 02 on the substrate 00. After the second photosensitive layer 02 is fabricated, the rigid substrate can be removed.

[0086] Figure 8 The image shown is a front view of a nozzle assembly provided in an embodiment of the present invention; Figure 9The image shown is a top view of a nozzle assembly provided in an embodiment of the present invention; Figure 10 The image shown is a right view of a nozzle assembly provided in an embodiment of the present invention; please refer to... Figure 8 , Figure 9 and Figure 10 Based on the same inventive concept, the present invention also provides a nozzle assembly, which includes at least a first nozzle P1 and a second nozzle P2, the structures of the first nozzle P1 and the second nozzle P2 as described above; the second nozzle P2 is disposed on the side of the first nozzle P1 away from the base 00 of the first nozzle P1; along the direction perpendicular to the plane where the base 00 of the first nozzle P1 is located, the second nozzle P2 does not overlap with the inlet 031 of the first nozzle P1.

[0087] For details, please refer to [link / reference]. Figures 8 to 10 The nozzle assembly of the present invention includes a first nozzle P1 and a second nozzle P2, the first nozzle P1 and the second nozzle P2 being arranged along a third direction D3, where the third direction D3 is the thickness direction of the second nozzle P2 or the first nozzle P1.

[0088] Please combine Figure 4 Since each nozzle has multiple outlets 033 arranged along the first direction D1, when the nozzle assembly has multiple nozzles, the nozzle assembly has multiple rows of outlets 033 in the third direction D3, thus forming a... Figure 10 The array shown is an outlet 033; therefore, during printing, the number of ink droplets ejected by the printhead assembly at one time is several times the number of ink droplets ejected by a single printhead. Thus, the printhead assembly of the present invention has the characteristic of improving printing efficiency.

[0089] In addition, please continue to combine Figure 2 , Figure 4 and Figure 10 In some embodiments of the present invention, the sum of the thicknesses of the substrate 00, the first photosensitive layer 01 and the second photosensitive layer 02 is about 10 μm. Therefore, when the nozzle assembly includes multiple nozzles, the distance between two adjacent outlets 033 along the third direction D3 is also about 10 μm.

[0090] Generally, in related technologies, the inner diameter of outlet 033 is about 20-80um, and the spacing between outlets 033 is also about 20-80um; in the printhead assembly of the present invention, along the third direction D3, the spacing between two adjacent outlets 033 is about 10um. Thus, along the third direction D3, the outlets 033 have a smaller gap, which is beneficial to improving the PPI of the printed pixels.

[0091] Based on the same inventive concept, the present invention also provides a printing apparatus, including the above-described printhead.

[0092] In summary, the display panel and display device provided by the present invention achieve at least the following beneficial effects:

[0093] The printhead of the present invention includes a substrate 00, a first photosensitive layer 01, and a second photosensitive layer 02. Thus, the inlet 031 and the flow channel 032 of the printhead can be formed on the first photosensitive layer 01 and the second photosensitive layer 02 by photolithography. The formed flow channel 032 can have a small diameter and a small spacing, thus enabling the printing of high PPI pixels. Furthermore, when using the printhead of the present invention to fabricate the light-emitting material layer of a display panel, it is convenient to produce a display panel with a high PPI.

[0094] While specific embodiments of the invention have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of the invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims

1. A nozzle, characterized in that, It includes a substrate, a first photosensitive layer and a second photosensitive layer, wherein the first photosensitive layer is disposed on one side of the substrate and the second photosensitive layer is disposed on the side of the first photosensitive layer away from the substrate; The nozzle includes a nozzle, the nozzle includes an inlet and a flow channel, one end of the flow channel is connected to the inlet, and the other end of the flow channel is an outlet; The entrance penetrates the second photosensitive layer along a direction perpendicular to the plane of the substrate; The flow channel is located in the first photosensitive layer; The cross-sectional area of ​​the inlet is A along a direction parallel to the plane of the base. Along a direction perpendicular to the extension of the flow channel, the cross-sectional area of ​​the flow channel is B, where A > B.

2. The nozzle according to claim 1, characterized in that, The number of nozzles is multiple, and the center-to-center distance between two adjacent nozzles is less than 200 μm.

3. The nozzle according to claim 2, characterized in that, Along the second direction, the multiple entrances are arranged in two or more rows, and the second direction is parallel to the plane of the base.

4. The nozzle according to claim 3, characterized in that, The entrances are arranged in two rows, including a first row and a second row. Along a first direction, the entrances of the second row are located between the two entrances of the first row or at both ends of the entrances of the first row. The first direction is parallel to the plane of the base. The first direction intersects with the second direction.

5. The nozzle according to claim 1, characterized in that, The cross-sectional shape of the flow channel is an inverted trapezoid.

6. The nozzle according to claim 1, characterized in that, The substrate is a flexible substrate, and both the first photosensitive layer and the second photosensitive layer are flexible materials.

7. The nozzle according to claim 1, characterized in that, Along the second direction, the nozzle includes a first region, a second region, and a third region; the second region is located between the first region and the third region, and the second region is a bent region; The entrance is located in the first area; The flow channel is provided at least in the second region and the third region; The second direction is parallel to the plane in which the base is located.

8. The nozzle according to claim 1, characterized in that, The hardness of the second photosensitive layer is greater than that of the first photosensitive layer.

9. A nozzle assembly, characterized in that, It includes at least a first nozzle and a second nozzle, the structure of the first nozzle and the second nozzle being as described in any one of claims 1 to 8; The second nozzle is positioned on the side of the first nozzle away from the base of the first nozzle; Along a direction perpendicular to the plane of the base of the first nozzle, the inlet of the second nozzle does not overlap with that of the first nozzle.

10. A method for manufacturing a nozzle, characterized in that, Includes the following steps: A substrate is provided, a first photosensitive layer is fabricated on the substrate, and the flow channel and inlet of the nozzle are fabricated using an exposure and development method; A second photosensitive layer is disposed on the surface of the first photosensitive layer away from the substrate. The second photosensitive layer does not enter the flow channel, and the inlet is exposed by exposure and development. The cross-sectional area of ​​the inlet is A along a direction parallel to the plane of the base. Along a direction perpendicular to the extension of the flow channel, the cross-sectional area of ​​the flow channel is B, where A > B.

11. The manufacturing method according to claim 10, characterized in that, The solid content of the second photosensitive layer is greater than that of the first photosensitive layer.

12. The manufacturing method according to claim 10, characterized in that, The substrate is a flexible substrate, which is disposed on a rigid substrate through a temporary bonding layer; after the second photosensitive layer is cured, the rigid substrate is removed.

13. A printing apparatus, characterized in that, Includes the nozzle as described in any one of claims 1 to 8.

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