一种钽基扩散键合复合膜层及其制备方法
By preparing diffusion-bonded composite films on tantalum metal surfaces, a method was developed that employs organic solvent pre-cleaning, chemical degreasing, and activation treatment, combined with electrodeposition additive regulation and high-temperature thermal diffusion. This method solved the problem of poor adhesion caused by the dense Ta2O5 oxide film on the tantalum metal surface, achieving diffusion-bonded composite films with good adhesion. It also overcame the Kirkendall effect during heat treatment and improved the wear resistance and corrosion resistance of the film.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- CHANGAN UNIV
- Filing Date
- 2023-06-12
- Publication Date
- 2026-07-17
AI Technical Summary
In the prior art, the adhesion of protective films on the surface of tantalum metal is poor, and it is difficult to directly electrodeposit dense and well-adhesive coatings.
A method for preparing diffusion-bonded composite films on the surface of tantalum metal involves pre-cleaning the sample with organic solvents, chemical degreasing, and activation before electrodeposition. Electrodeposition additives are used to reduce the overall stress level of the film. Finally, heat treatment is performed to obtain a diffusion-bonded composite film with an interleaved distribution of film, substrate, diffusion solid solution, and intermetallic compounds.
A diffusion-bonded composite film with good adhesion and excellent performance was prepared on the surface of tantalum metal, which solved the problem of poor adhesion caused by chemical inertness and the presence of dense Ta2O5 oxide film. By using electrodeposition pretreatment and electrodeposition additives to reduce the overall stress level between the film and the substrate, interface defects and performance degradation caused by Kirkendall effect during heat treatment were avoided.
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Figure CN116695199B_ABST