Gas purification apparatus, system and method

Abstract

A gas purification device (200), a gas purification system and a gas purification method, the gas purification device (200) comprising at least one electric field part (210) and at least one filter unit (220) arranged in sequence along a gas flow direction, wherein the filter unit (220) has a filter medium containing an electret material; the filter medium can be electreted by the electric field part (210).

Description

Technical Field

[0001] This invention relates to a gas purification device, system, and method. Background Technology

[0002] Currently, some environments have high cleanliness requirements. For example, cleanrooms are commonly used in semiconductor manufacturing processes to prevent contamination of semiconductor materials by particles, humidity, and temperature, which could affect the yield and reliability of semiconductors. Generally, the airflow entering a cleanroom needs to be purified, mainly through three levels of purification: pre-filter, medium-efficiency filter, and high-efficiency filter. Different air filters are used depending on the required purification level.

[0003] Primary air purification typically uses a primary air filter, which is mainly composed of non-woven fabric, nylon mesh, activated carbon filter cotton, metal mesh, etc., and is mainly used to filter suspended particles larger than 5μm.

[0004] Medium-efficiency air purification typically uses medium-efficiency air filters, which are mainly composed of special non-woven fabrics, glass fibers, etc., and are primarily used to filter suspended particles of 1-5μm.

[0005] High-efficiency air purification typically uses high-efficiency air filters, which are mainly composed of ultra-fine glass fiber paper and are primarily used to filter suspended particles larger than 0.5μm. There are even high-efficiency filters made of borosilicate microfiber, such as HEPA filters, which can filter suspended particles larger than 0.3μm. The ultra-high efficiency air filter U15 uses ultra-fine glass fiber paper as its filter media and can capture suspended particles larger than 0.12μm.

[0006] The air purification process for cleanroom intake air is typically completed outside the cleanroom. The three-stage filtration system is installed independently of the cleanroom, occupying a large space and incurring high construction costs. Furthermore, the filter materials at each stage become contaminated after a period of use, resulting in a short lifespan and requiring regular replacement, thus increasing the cost of the filtration equipment. Simultaneously, the high filtration resistance of the filter elements increases the power consumption of the air supply equipment. Summary of the Invention

[0007] The purpose of this invention is to provide a gas purification device, system, and application to solve the problems of air purification efficiency and air resistance in the prior art.

[0008] In a first aspect, the present invention provides a gas purification device for filtering and purifying gas, comprising:

[0009] At least one electric field device and at least one filter unit are arranged sequentially along the gas flow direction.

[0010] The filter unit has a filter medium formed of electret material;

[0011] The filter medium can be electreted by the electric field.

[0012] In one embodiment, the electric field unit has a gas flow channel through which the gas passes, the gas flow channel having a gas inlet for gas entry and a gas outlet for gas exit, and the electric field unit forming an electric field in the gas flow channel for filtering the gas.

[0013] In one embodiment, the location of the filter unit relative to the electric field section is defined as follows: the minimum of all the vertical distances from the gas outlets to the surface of the filter medium receiving the gas discharged from the gas outlets allows the filter medium to be electretted.

[0014] In one embodiment, the minimum value is less than or equal to 200 mm.

[0015] In one embodiment, the filtration unit is capable of filtering more than 99% of particles of 500 nm or larger in the gas.

[0016] In one embodiment, the electric field section is a first electric field section, which includes a first discharge electrode and a first adsorption electrode that form the electric field. The first adsorption electrode has a honeycomb structure composed of a plurality of hollow tube bundles. The first discharge electrode is at least partially disposed within the hollow tube bundles of the first adsorption electrode, and the gas flow channel is formed between the first discharge electrode and the first adsorption electrode.

[0017] In one embodiment, the electric field section is a second electric field section, which includes a second discharge electrode and a second adsorption electrode that form the electric field. The second adsorption electrode includes at least one electric field unit, which has a sidewall extending axially. The sidewall surrounds a channel to form a channel, and the sidewall is provided with a second air inlet for gas to enter the channel and a second air outlet for gas to exit the channel.

[0018] In one embodiment, the second electric field section includes multiple electric field adsorption units, with two adjacent electric field adsorption units sharing a sidewall, and the multiple electric field adsorption units connected to form an integral structure.

[0019] In one embodiment, the electric field section has an electric field unit, the electric field strength of which is less than 0.5 kV / mm.

[0020] In one embodiment, the electric field section includes a first electric field section and a second electric field section, which are arranged sequentially along the gas flow direction. The first electric field section is the aforementioned first electric field section, and the second electric field section is the aforementioned second electric field section.

[0021] In one embodiment, the electric field device includes a second electric field section and a first electric field section, which are arranged sequentially along the gas flow direction. The first electric field section is the aforementioned first electric field section, and the second electric field device is the aforementioned second electric field section.

[0022] A second aspect of the present invention provides an application of a gas purification device for purifying gas entering a semiconductor cleanroom, wherein the gas purification device is the aforementioned gas purification device.

[0023] A third aspect of the present invention provides a semiconductor cleanroom gas purification system, comprising: a gas purification device, wherein the gas purification device is the gas purification device described above.

[0024] A third aspect of the present invention provides a gas purification method, comprising:

[0025] An electric field is formed in the gas flow channel of the electric field section;

[0026] Gas is introduced into the gas flow channel for filtration to obtain purified gas;

[0027] The purified gas is then introduced into a filtration unit for filtration to obtain the treated gas.

[0028] The filtration unit performs filtration using a filter medium formed from electret material.

[0029] The electret material can be electreted by the electric field.

[0030] In one embodiment, the location of the filter unit relative to the electric field section is defined as follows: the minimum of all the vertical distances from the gas outlets to the surface of the filter medium receiving the gas discharged from the gas outlets allows the filter medium to be electretted.

[0031] In one embodiment, the minimum value is less than or equal to 200 mm.

[0032] In one embodiment, the filtration unit is capable of filtering more than 99% of particles of 500 nm or larger in the gas.

[0033] According to one aspect of the present invention, a gas purification device is provided for filtering and purifying gas, comprising: at least one electric field unit, a first filter unit, and a second filter unit arranged sequentially along the gas flow direction, wherein the first filter unit and the second filter unit respectively have a first filter medium and a second filter medium formed of electret material; both the first filter medium and the second filter medium can be electreted by the electric field unit, and the filter pore size of the second filter medium is larger than the filter pore size of the first filter medium.

[0034] In one embodiment, the filtration level of the first filter medium is any one of coarse filtration, medium filtration, or high-efficiency filtration.

[0035] In one embodiment, the second filter medium is PP cotton.

[0036] According to one aspect of the present invention, a gas purification system is provided, comprising: at least two gas purification devices arranged sequentially along the gas flow direction, wherein the gas purification devices are those described above.

[0037] According to one aspect of the present invention, an application of a gas purification system is provided for purifying gases entering a semiconductor cleanroom, said gas purification system being the gas purification system described above.

[0038] According to one aspect of the present invention, a gas purification method is provided, characterized in that:

[0039] At least one electric field section and at least one filter unit are sequentially arranged along the gas flow direction; an electric field is formed in the gas flow channel of the electric field section; gas is allowed to enter the gas flow channel for filtration to obtain purified gas; the purified gas is allowed to enter the filter unit for filtration to obtain treated gas, wherein the filter unit performs filtration through a filter medium formed of electret material, and the electret material can be electreted by the electric field section. Attached Figure Description

[0040] Figure 1 This is an explosion diagram of the gas purification device according to Embodiment 1 of the present invention;

[0041] Figure 2 This is a three-dimensional schematic diagram of the first electric field section in Embodiment 1 of the present invention;

[0042] Figure 3 This is a three-dimensional schematic diagram of the second electric field section according to Embodiment 1 of the present invention;

[0043] Figure 4 This is a front view schematic diagram of the second electric field section, including the sealing plate;

[0044] Figure 5 This is a schematic diagram of the gas purification device in Embodiment 2 of the present invention;

[0045] Figure 6 This is a schematic diagram of the vertical distance from the gas outlet to the surface of the filter medium in Example 2;

[0046] Figure 7 This is an explosion diagram of the gas purification device in Example 4. Detailed Implementation

[0047] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to better understand the purpose, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are only for illustrating the essential spirit of the technical solution of the present invention.

[0048] In the following description, certain specific details are set forth for the purpose of illustrating various disclosed embodiments in order to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the art will recognize that embodiments may be practiced without one or more of these specific details. In other instances, well-known apparatuses, structures, and techniques associated with this application may not have been shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

[0049] Throughout this specification, references to "an embodiment" or "an embodiment" indicate that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Therefore, the appearance of "in an embodiment" or "an embodiment" in various places throughout the specification does not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic may be combined in any manner in one or more embodiments.

[0050] In the following description, in order to clearly demonstrate the structure and working method of the present invention, a number of directional terms will be used. However, terms such as "front", "back", "left", "right", "outside", "inside", "outward", "inward", "up", and "down" should be understood as convenient terms and not as limiting terms.

[0051] According to one aspect of the present invention, a gas purification system is provided, the gas purification system having at least one electric field device and at least one filter unit arranged sequentially along the gas flow direction, the electric field device and the filter unit being disposed in the gas flow channel, and the filter unit being located in the electric field generated by the electric field device.

[0052] The electric field device includes at least one first electric field device and / or a second electric field device.

[0053] Example 1

[0054] Figure 1 This is a three-dimensional schematic diagram of a gas purification system according to an embodiment of the present invention. The gas purification device 100 includes a housing 50 and an electric field section, a filter unit 20 and an ozone removal unit 10 arranged sequentially in the housing 50 along the airflow direction C. In this embodiment, the electric field section includes a first electric field section 40 and a second electric field section 30. A gas flow channel is formed in the housing 50 from top to bottom.

[0055] In this embodiment, the first electric field unit 40, the second electric field unit 30, the first filter unit 20, and the ozone removal unit 10 are detachably disposed in the housing 50.

[0056] The first electric field section 40 includes an outer frame and an electric field section disposed within the outer frame. The electric field section includes a dust removal electric field cathode 42 (first discharge electrode) and a dust removal electric field anode (first adsorption electrode) 41. The dust removal electric field cathode and the dust removal electric field anode are used to generate an ionization dust removal electric field. The dust removal electric field anode has a honeycomb structure composed of multiple hollow tube bundles, and the dust removal electric field cathode penetrates into the dust removal electric field anode. A dust removal electric field flow channel is formed between the dust removal electric field anode and the dust removal electric field cathode.

[0057] like Figure 2 As shown, the interior of the dust removal electric field anode 41 is composed of a honeycomb-shaped, hollow anode tube bundle. The hollow cross-section of the anode tube bundle is circular or polygonal, specifically hexagonal or triangular. In this embodiment, the cross-sectional shape of the anode tube bundle is hexagonal. The dust removal electric field cathode 42 includes several electrode rods, each corresponding to one of the anode tube bundles in the anode tube bundle group. The electrode rods are needle-shaped, polygonal, burr-shaped, threaded rod-shaped, or columnar.

[0058] In one embodiment, the ratio of the dust accumulation area of ​​the anode of the dust removal electric field to the discharge area of ​​the cathode of the dust removal electric field is 1.667:1-1680:1.

[0059] In this embodiment, the dust removal electric field cathode 42 is mounted on a support plate 43, and the support plate 43 is connected to the dust removal electric field anode 41 via an insulating mechanism. The insulating mechanism is used to achieve insulation between the support plate 43 and the dust removal electric field anode 41. In one embodiment of the present invention, the dust removal electric field anode 41 includes a first anode portion 412 and a second anode portion 411, i.e., the first anode portion 412 is near the inlet of the dust removal electric field device, and the second anode portion 411 is near the outlet of the dust removal electric field device. The support plate and the insulating mechanism are positioned between the first anode portion 412 and the second anode portion 411, i.e., the insulating mechanism is installed in the middle of the dust removal electric field or the dust removal electric field cathode 42, which can provide good support for the dust removal electric field cathode 42 and fix it relative to the dust removal electric field anode 41, maintaining a set distance between the dust removal electric field cathode 42 and the dust removal electric field anode 41.

[0060] like Figure 2 As shown, the second anode section 411 includes a plurality of anode tube bundles 411a. The anode tube bundles 411a and the dust removal electric field cathode 42 are electrically connected to the two electrodes of the power supply, which is a DC power supply. In this embodiment, the anode tube bundles 411a have a positive potential and the dust removal electric field cathode 42 has a negative potential.

[0061] The DC power supply can specifically be a DC high-voltage power supply. A discharge dust removal electric field is formed between the aforementioned anode tube bundle 411a and the dust removal electric field cathode 42. This discharge dust removal electric field is a static dust removal electric field. In this embodiment, the voltage between the anode and cathode is 6kV.

[0062] In this embodiment, the anode tube bundle 411a is a hollow regular hexagonal tube, and the dust removal electric field cathode 42 is rod-shaped and is inserted into the anode tube bundle 411a.

[0063] In this embodiment, the first electric field section 40 has external dimensions of 204*570*1170mm.

[0064] In one embodiment, the dust removal electric field anode 41 may also have only one anode section.

[0065] The second electric field section 30 includes a frame and a second discharge electrode and a second adsorption electrode disposed in the frame.

[0066] Reference Figure 3 The second adsorption electrode includes eight electric field adsorption units: a first electric field adsorption unit 810, a second electric field adsorption unit 820, a third electric field adsorption unit 830, a fourth electric field adsorption unit 840, a fifth electric field adsorption unit 850, a sixth electric field adsorption unit 860, a seventh electric field adsorption unit 870, and an eighth electric field adsorption unit 880. These eight units are arranged adjacently on the left and right sides, sharing a sidewall. The channel of each unit is surrounded by the sidewall, forming an equilateral triangle with a cross-section perpendicular to the axial direction. In other embodiments, the number of electric field adsorption units is not limited to this; it can be adjusted according to the actual gas flow rate required for purification. Furthermore, the multiple electric field adsorption units can be arranged adjacently or non-adjacently in any direction (up, down, left, right, front, back). In this embodiment, for ease of production and processing, the eight electric field adsorption units have identical structures and shapes. However, in other embodiments, depending on storage space conditions or other factors, the structures, shapes, and sizes of the multiple electric field adsorption units can be different or partially the same.

[0067] In other embodiments, the channel of the electric field adsorption unit is surrounded by sidewalls to form a polygonal cross-section perpendicular to the axial direction. The polygon can be any one of a quadrilateral, pentagon, or hexagon.

[0068] The air inlet and / or air outlet are circular, elliptical, or polygonal in shape. Preferably, the polygon includes any one or more of triangular, quadrilateral, pentagonal, and hexagonal shapes.

[0069] Reference Figure 3The second discharge electrode 809 includes discharge electrodes 819, 829, 839, 849, 859, 869, 879, and 889. Each discharge electrode is disposed within the channel of its corresponding electric field unit. Since the cross-section of each electric field unit's channel, formed by the sidewalls, perpendicular to the axial direction, is an equilateral triangle, the second discharge electrode 809 is preferably disposed parallel to the sidewalls of the channel and passes through the center of the inscribed circle of the corresponding electric field unit's cross-section, where the discharge efficiency is highest. For example, discharge electrode 819 is disposed within the channel of the first electric field unit 810, and is preferably disposed parallel to the sidewalls of the channel and passes through the center of the inscribed circle of the first electric field unit 810's cross-section, and so on, relating the other discharge electrodes to the electric field units.

[0070] Reference Figure 3 The structure of the first electric field adsorption unit 810 and the second electric field adsorption unit 820 will be used as an example for explanation, and the structure of other electric field adsorption units can be deduced by analogy. The first electric field adsorption unit 810 includes a sidewall 812 extending along the axial direction. The sidewall 812 includes a first sidewall 8121, a second sidewall 8122, and a third sidewall 8123. The first sidewall 8121, the second sidewall 8122, and the third sidewall 8123 surround to form a first channel 811. The sidewall 812 is provided with a first air inlet 813 (gas inlet) for gas to enter the channel 811 and a first air outlet 814 (gas outlet) for gas to exit the first channel 811. There are multiple first air inlets 813 and first air outlets 814. Multiple first air inlets 813 are evenly arranged in two rows along the axial direction on the first sidewall 8121. Multiple first air outlets 814 are evenly arranged in two rows along the axial direction on the second sidewall 8122. There are no air inlets or air outlets distributed on the third sidewall 8123. The center of the first air inlet 813 and the center of the first air outlet 814 are arranged on different planes perpendicular to the axial direction. The first electric field unit 810 and the second electric field unit 820 share a second sidewall 8122. The two surfaces of the second sidewall 8122 face the first channel 811 of the first electric field unit 810 and the second channel 821 of the second electric field unit 820, respectively. That is, the first vent 814 on the second sidewall 8122 of the first electric field unit 810 is used as the second vent of the second sidewall 8122 of the second electric field unit 820 to ensure that gas can directly enter the second electric field unit 820 from the first electric field unit 810. Multiple second vents 824 are opened on the fourth sidewall 8222 of the second electric field unit 820 and are evenly arranged in two rows along the axial direction. No vents and / or vents are opened on the fifth sidewall 8223 of the second electric field unit 820.

[0071] The air inlet and / or air outlet are circular, elliptical, or polygonal in shape. Preferably, the polygon includes any one or more of triangular, quadrilateral, pentagonal, and hexagonal shapes.

[0072] In this embodiment, the air inlet and / or air outlet are circular in shape, and the sidewalls are made of a material containing stainless steel and / or aluminum.

[0073] Reference Figure 3 In this embodiment, all electric field adsorption units are electrically connected to the same pole of the power supply, and all discharge electrodes are electrically connected to the other pole of the power supply. For example, taking the first electric field adsorption unit 810 and the second electric field adsorption unit 820 as examples, the first electric field adsorption unit 810 is electrically connected to the anode of the power supply, and the discharge electrode 819 is electrically connected to the cathode of the power supply; the second adsorption electric field unit 820 is electrically connected to the anode of the power supply, and the discharge electrode 829 is electrically connected to the cathode of the power supply. The first electric field adsorption unit 810 and the discharge electrode 819 form a first electric field, and the second electric field adsorption unit 820 and the discharge electrode 829 form a second electric field. However, in other embodiments, multiple electric field adsorption units are divided into two groups, and the two groups of electric field adsorption units are arranged in two or more rows. Each row of electric field adsorption units is in the same group. The first group of electric field adsorption units is electrically connected to the anode of the power supply, and the corresponding first group of discharge electrodes is electrically connected to the cathode of the power supply; the second group of electric field adsorption units is electrically connected to the cathode of the power supply, and the corresponding second group of discharge electrodes is electrically connected to the anode of the power supply. When the airflow passes through the electric fields formed by the first set of electric field adsorption units and the first set of discharge electrodes, and the second set of electric field adsorption units and the second set of discharge electrodes, the particulate matter in the gas acquires negative and positive charges respectively. The negatively charged particulate matter in the gas is deposited on the first set of electric field units, and the particulate matter in the gas that is easily charged with positive charges is deposited on the second set of electric field units, thereby improving the dust removal efficiency.

[0074] It should be noted that the gas does not flow along the axial direction of the channel, which can be understood as the gas not flowing from one end of the channel to the other along the axial direction of the channel; the gas enters the channel through the inlet and exits the channel through the outlet.

[0075] It should be noted that the above-mentioned electric field adsorption unit can serve as the adsorption electrode of the electric field device. The discharge electrode of the electric field device discharges and ionizes. After the particulate matter in the gas combines with the charged ions, the particulate matter in the gas gains a charge. The charged particulate matter moves towards the adsorption electrode and is deposited on the adsorption electrode. When the gas enters in a direction that is not parallel to the side wall of the electric field unit, that is, the gas entry direction is not perpendicular to the ion flow direction in the electric field, compared with the electric field where the gas entry direction is perpendicular to the ion flow direction, this invention increases the residence time of the gas in the electric field, which can improve the charging efficiency of the particulate matter and allow more particulate matter to be deposited on the adsorption electrode, thereby improving the dust removal efficiency.

[0076] It is also important to note that when the centers of the inlet and outlet are arranged on different planes perpendicular to the axial direction, the gas flow in the channel can be disrupted, further increasing the residence time of the gas in the electric field, increasing the frequency of close contact with the discharge electrode, and improving the charging efficiency and charge of the particles. Moreover, when the gas forms a cyclone flow, it is beneficial for the separation of large particles. Combining these two points, the dust removal efficiency can be effectively improved. Additionally, it is important to note that if at least one of the sidewalls does not have an inlet or outlet along the centerline extending along the channel direction, the area at the centerline position is not damaged. After the particles are charged, they are directly adsorbed near the centerline of the adsorption electrode, increasing the amount of particles adsorbed on the adsorption electrode, thereby improving the dust removal efficiency. The particles include, but are not limited to, solid particles, droplets, solid particles with attached liquid, aerosols, plasma-state solid particles or droplets, and can also be microorganisms such as bacteria and fungi.

[0077] Reference Figure 3 Taking the gas flow of the first electric field adsorption unit 810 and the second electric field adsorption unit 820 as an example, the gas flow of other electric field adsorption units follows the same principle. Gas enters the first electric field through the first inlet 813, then enters the second electric field through the first outlet 814, and finally exits through the second outlet 824. Since the centers of the first inlet 813 and the first outlet 814 are arranged on different planes perpendicular to the axial direction, and the centers of the second inlet (in this embodiment, the second inlet is the first outlet 814) and the second outlet 824 are arranged on different planes perpendicular to the axial direction, the gas flow is turbulent as the gas passes through the first and second electric fields, further increasing the residence time of the gas in the two electric fields and increasing the frequency of close contact with the discharge electrode 819 and the discharge electrode 829. The closer to the discharge electrode 809, the higher the gas ionization efficiency, improving the charge efficiency and charge of the particulate matter. Moreover, when the gas forms a cyclone flow, it is beneficial for the separation of large particles. Combining the above two points, the dust removal efficiency is effectively improved. In other embodiments, an air inlet is provided on the fifth sidewall 8223 of the second electric field adsorption unit 820, so that the airflow of the second electric field adsorption unit 820 and the third electric field adsorption unit 830 is connected, and gas can flow from the third electric field adsorption unit 830 to the second electric field adsorption unit 820. However, in other embodiments, an air inlet or outlet can be provided on the sidewall of each electric field unit, which means that the gas in each electric field unit can come from multiple adjacent electric field units, or flow to multiple adjacent electric field units. The gas flow is highly turbulent, and there is more airflow near the discharge electrode, which increases the charging efficiency and charge of the particles in the gas, thereby improving the dust removal efficiency.

[0078] In this embodiment, the discharge electrode 819 in the second discharge electrode 809 is used as an example. The discharge electrode 819 is a slender needle-shaped conductor. In other embodiments, the discharge electrode 819 may also be a polygonal, burr-shaped, threaded rod-shaped, or columnar conductor. In this embodiment, the diameter of the discharge electrode 819 is 0.1-10 mm, and preferably, the diameter of the discharge electrode 819 is 0.2-5 mm.

[0079] In one embodiment, the discharge electrode 819 is elongated and made of any one of 304 stainless steel, titanium, tungsten, or iridium.

[0080] Figure 4 This is a front view schematic diagram of the second electric field device. The frame includes a first sealing plate 81 and a second sealing plate 82. The second electric field device 30 includes a first sealing plate 81, a second sealing plate 82, and an electric field adsorption device 800. The first sealing plate 81 and the second sealing plate 82 are respectively connected to the two ends of the electric field adsorption device 800, that is, respectively connected to the two ends of each electric field unit in the electric field adsorption device 800, and the two ends are sealed to ensure that the gas only enters and exits from the air inlet or air outlet of each electric field unit.

[0081] In this embodiment, for example, the discharge electrode 819 is made of iridium, and the second electric field device 30 has external dimensions of 88.5*570*1170mm.

[0082] In this embodiment, the dust removal electric field channel (gas channel) in the first electric field device 40 is perpendicular to the channel formed by the sidewall surrounding the electric field unit of the second electric field device 30.

[0083] The filter unit 20 uses an ultra-high efficiency air filter, which can filter 99% of particles larger than or equal to 500 nm in the gas, preferably particles larger than or equal to 300 nm. Such filter units are, for example, high efficiency particulate air (HEPA) filters or ultra-high efficiency air filters (ULPA).

[0084] The filter unit 20 has an electret material.

[0085] In this embodiment, the filter unit 20 adopts a U15 filter with external dimensions of 96*570*1170mm.

[0086] In one embodiment, the distance between the first electric field device 40 and the second electric field device 30 is 3-15mm, and the distance between the second electric field device 30 and the filter unit 20 is 2-25mm.

[0087] During operation, the electric field device continuously electrets the filter unit 20, ensuring that the filter unit maintains high adsorption performance.

[0088] On the one hand, since the filter unit can maintain a high electret state for a long time, even if the filter pore size is increased, the adsorption effect will not be affected. On the other hand, increasing the filter pore size reduces the ventilation resistance, and under the same wind speed conditions, the energy consumption of the fan can be greatly reduced.

[0089] Example 2

[0090] like Figure 5 As shown, the gas purification device 200 provided in this embodiment is used to purify gas, including at least one electric field section 210 and at least one filter unit 220 arranged sequentially along the gas flow direction.

[0091] The electric field unit 210 has a gas flow channel 211 through which the gas passes. The gas flow channel has a gas inlet for gas entry and a gas outlet for gas exit. The gas inlet can be a single hole or aperture, and the gas outlet can be one or more, such as... Figure 5 In the process, there are multiple electric field gas inlets and multiple electric field gas outlets.

[0092] The electric field unit 210 forms an electric field in the gas flow channel 211. This electric field purifies the gas passing through the gas flow channel 211. Gas purification via electric field is well-known in the art: by ionizing the gas through one electrode forming the electric field, the particulate matter in the gas becomes charged, allowing it to be adsorbed by the other electrode. For example, if one electrode is negatively charged and the other positively charged, the negatively charged electrode ionizes the gas, causing the particulate matter in the gas to become negatively charged, thus enabling it to be adsorbed and removed by the positively charged other electrode.

[0093] The filter unit 220 filters the gas treated by the electric field unit 210 through a filter medium formed by electret material. Specifically, it filters the gas discharged from the electric field gas outlet. The filter medium can be electreted by the electric field unit 210. That is, the filter unit 220 is positioned so that the filter medium can be charged by the electric field unit 210, or in other words, the filter medium can receive charged ions generated by the ionization of the gas by the electric field unit 210, thereby becoming electreted. In this embodiment, the filter medium can be a mesh, a layer, or a filter element, etc.

[0094] In existing technologies, if only the filter unit 220 is used for purification, the purification method of the filter unit 220 is: filtration is achieved through pore size blocking, staggered paths, and rapid gas velocity impact. In environments with high requirements for gas purification and filtration, such as in semiconductors, it is difficult to further improve the removal effect of particles larger than 10nm. However, the gas purification system in this embodiment, because the electric field can electret the filter unit, not only achieves the above-mentioned purification methods but also increases the purification effect due to electret. Combined with the electric field, compared with existing technologies, it can remove particles larger than 10nm more effectively, making it more suitable for use in environments with high requirements.

[0095] In scenarios where wind speed requirements are not high, the faster the wind speed of the filter unit, the better the filtration effect due to the rapid impact of the gas velocity. Therefore, it is necessary to maintain a high energy consumption operation. In contrast, the present invention can achieve the same filtration effect with low energy consumption, thus reducing operating costs.

[0096] As can be seen, due to the presence of the electric field unit 210, and the fact that the electric field unit 210 can electret the filter medium, the filter medium can be continuously electretted during operation. This allows the filter medium to continuously exert a more effective filtration effect compared to a situation where it cannot be continuously electretted. In this way, compared with the prior art, energy consumption and operating costs are reduced. Moreover, by performing a preliminary purification through the electric field unit 210, the service life of the filter medium can be extended, the number of replacements can be reduced, thereby reducing operating costs and also reducing secondary pollution to the environment after replacement.

[0097] To achieve this electret, the position of the filter unit 220 relative to the electric field section 210 can be limited as follows: the minimum of all vertical distances from the electric field gas outlets to the surface of the filter medium receiving the gas discharged from the electric field gas outlets allows the filter medium to be electretted.

[0098] Specifically, such as Figure 6 As described in the diagram, the arrows indicate the gas flow direction. After the gas exits from gas outlet 13, the filter medium receives the gas from surface A for filtration and then discharges it from surface B. The minimum vertical distance L among all gas outlets 13 to surface A allows the filter medium to be electretted, that is, to acquire the aforementioned charged ions and become electretted. In some embodiments, the gas outlets 13 are not on the same plane, and the vertical distances from all gas outlets to surface A vary in length; the shortest vertical distance is the aforementioned minimum value.

[0099] The specific value of this minimum can be set according to the above rules, taking into account factors such as structural compactness, power consumption, and usage. In this embodiment, the minimum value is less than or equal to 200mm.

[0100] In this embodiment, the specific structure of the electric field device is the same as that of the various electric field units involved in Embodiment 1.

[0101] In this embodiment, the filter unit 220 can achieve 99% filtration of particles larger than or equal to 500 nm in the gas, preferably, it can filter particles larger than or equal to 300 nm. Such a filter unit is, for example, a high-efficiency particulate air (HEPA) filter or an ultra-low-penetration air (ULPA) filter. By combining this filter unit 220 with the electric field unit 210, the filtration efficiency for particles as small as 10 nm can exceed 99%.

[0102] Therefore, the gas purification device 200 of this embodiment, when used in a semiconductor cleanroom, can reduce energy consumption, extend the service life of the filter unit 220, reduce operating costs, and also reduce secondary pollution to the environment after the filter unit 220 is replaced. Moreover, it can filter particles of 10nm with an efficiency of over 99%.

[0103] This embodiment also provides a semiconductor cleanroom air purification system, including the air purification device 200 described above. This reduces the investment in primary and intermediate filtration in current semiconductor cleanroom purification systems, thus meeting purification requirements and further reducing floor space and investment costs.

[0104] This embodiment also provides a gas purification method, characterized in that it includes:

[0105] At least one electric field unit and at least one filter unit are sequentially arranged along the gas flow direction;

[0106] An electric field is formed in the gas flow channel of the electric field device;

[0107] Gas is introduced into the gas flow channel for electrostatic filtration to obtain primary filtered gas;

[0108] The primary filtered gas is then introduced into the filtration unit for electret filtration to obtain the treated gas.

[0109] The filtration unit uses electret material for electret filtration.

[0110] The electret material can be electreted by the electric field.

[0111] In Embodiments 1 and 2, the gas purification device includes an electric field section, which is arranged as follows: along the airflow direction, there are a first electric field section and a second electric field section. In practice:

[0112] The electric field section can be a single first electric field section, or multiple first electric field sections arranged in the direction of airflow.

[0113] The electric field section can also be a second electric field section, or multiple second electric field sections arranged in the direction of airflow;

[0114] The electric field section can also be a second electric field section and a first electric field section arranged sequentially along the airflow direction.

[0115] Comparative Example 1

[0116] Experimental conditions: The gas purification system includes a filtration unit, which uses a high-efficiency filter (model: U15) with a single-layer filter element thickness of 96mm. The ventilation fan operates at 220V and 1.006A.

[0117] Test case

[0118] Experimental conditions: Gas filtration experiments were conducted using the different electric field combinations and filter units described above. Filter unit 20 used a high-efficiency filter (model: U15) with a single-layer filter element thickness of 96mm. The ventilation fan power was 150W.

[0119] Both the comparative and experimental cases employed detection methods: the average number of 10-100nm particles before and after gas treatment was measured using a TSI dust detector from the United States. This value was used to determine the filtration effect.

[0120] The results were as follows:

[0121] (1) Under the same wind speed, the filtration effect of the test example is better than that of the comparative example. Therefore, the various combined electric fields and filtration units of the present invention are arranged sequentially along the direction of the gas being processed. In environments such as semiconductor manufacturing that require high cleanliness, this is more suitable than the comparative example.

[0122] (2) When the test example uses a low wind speed, it can achieve a nearly identical filtration effect compared to the high wind speed of the comparative example. However, the power consumption of the test example is greater than that of the comparative example. In scenarios where the gas processing speed requirement is not high, the various combinations of electric fields and filter units described above can be sequentially set along the gas processing direction to achieve the same effect as the comparative example at a lower wind speed. This results in lower operating costs and reduces the number of filter unit replacements, further reducing operating costs.

[0123] In one embodiment, the gas purification system includes a housing 50 and a second electric field section 30, a first electric field section 40, and a filter unit 20 arranged sequentially in the housing 50 along the airflow direction C.

[0124] In one embodiment, depending on space conditions or other factors, the gas purification system includes a housing 50 and a first electric field section 40 and a filter unit 20 sequentially disposed in the housing 50 along the airflow direction C.

[0125] Comparative experimental data revealed that the gas purification device in the above embodiment, which uses an electric field unit in conjunction with a filter unit, not only reduces energy consumption but also, due to the pretreatment of the gas by the electric field unit, reduces the flow of large particles in the gas through the filter unit, extending the service life of the filter unit and thus reducing operating costs.

[0126] Another aspect of the present invention provides an air purification method, comprising the following steps:

[0127] At least one electric field unit and at least one filter unit are sequentially arranged along the airflow direction, and the filter unit can be electreted by the electric field unit.

[0128] When the electric field section adopts the first electric field section, the first electric field section includes a dust removal electric field cathode and a dust removal electric field anode. The dust removal electric field cathode and the dust removal electric field anode are used to generate an ionization dust removal electric field. The dust removal electric field anode has a honeycomb structure composed of multiple hollow tube bundles.

[0129] When the electric field section adopts a second electric field section, the second electric field section includes a discharge electrode and an adsorption electrode. The adsorption electrode is an integral structure composed of multiple electric field units connected together. The discharge electrode passes through the channel of the electric field unit, and an electric field is formed between the discharge electrode and the electric field unit.

[0130] The electric field section includes a first electric field section and a second electric field section, which are arranged sequentially along the airflow direction.

[0131] The filtration unit includes a filtration unit 20 that employs an ultra-high efficiency air filter.

[0132] The dust removal electric field channel in the first electric field section 40 is perpendicular to the channel formed by the sidewall surrounding the electric field unit in the second electric field section 30.

[0133] The distance between the first electric field section 40 and the second electric field section 30 is set to 3-15mm, and the distance between the second electric field section 30 and the filter unit 20 is set to 2-25mm.

[0134] Example 3

[0135] The gas purification device of this embodiment includes three electric field sections arranged sequentially along the gas flow direction and a filter unit. All three electric field sections adopt the first electric field section 40 from Embodiment 1. Figure 2As shown, the first electric field section includes a dust removal electric field cathode 42 (first discharge electrode) and a dust removal electric field anode (first adsorption electrode) 41. The dust removal electric field anode 41 includes a first anode section 412 and a second anode section 411. The first anode section 412 and the second anode section 411 have the same size. Figure 2 In the middle, the second anode part 411 includes a plurality of anode tube bundles 411a, the anode tube bundles 411a are 60mm long, their cross-section is honeycomb-shaped, the diameter of the inscribed circle is R=23mm, and the diameter of the dust removal electric field cathode 42 is 1mm.

[0136] In this embodiment, an anode tube bundle 411a and a dust removal electric field cathode located in the anode tube bundle 411a constitute an electric field unit. The first electric field unit in this embodiment uses a DC power supply, and the electric field strength E of the electric field unit is equal to the voltage / 0.5R.

[0137] The filtration unit uses an air filter with a high-efficiency F6 grade and a thickness of 70mm. The distance between the surface of the F6 grade air filter and the outlet of the electric field section is 20mm.

[0138] Experiments have shown that under the voltage and current conditions specified in Table 1 of this embodiment, the gas treated by the electric field section of this embodiment is of high quality and has no adverse effects on human work and life for extended periods under this environment.

[0139] Table 1 shows the experimental data obtained from tests conducted on the gas purification device under different wind speeds and voltages.

[0140] Table 1

[0141]

[0142] In Table 1: E represents the electric field strength of the electric field element.

[0143] As can be seen from Table 1:

[0144] At wind speeds of 0.5 m / s and 0.7 m / s, the dust removal efficiency of using only the filter unit is much higher than that at a wind speed of 0.3 m / s, indicating that higher wind speeds result in better dust removal, but also higher energy consumption.

[0145] At a wind speed of 0.3 m / s, the dust removal efficiency using the superposition of an electric field and a filter unit is much higher than that without the use of an electric field.

[0146] When the wind speed is 0.5 m / s and 0.7 m / s, the number of 0.3 μm particles was measured. The dust removal efficiency of the superimposed electric field and filter unit reached more than 98% compared with the original environment.

[0147] The electric field strength of the electric field unit is between 0.4 and 0.5.

[0148] Example 4

[0149] Figure 7 This is a perspective view of a gas purification device according to an embodiment of the present invention. The gas purification device includes a housing and an electric field unit, a first filter unit and a second filter unit arranged sequentially in the housing 710 along the airflow direction D. A gas flow channel is formed in the housing from top to bottom.

[0150] The electric field section can be a first electric field section and a second electric field section arranged sequentially along the airflow direction, or...

[0151] The electric field section can also be a second electric field section and a first electric field section arranged sequentially along the airflow direction, or

[0152] The electric field section can be a single first electric field section, or multiple first electric field sections arranged in the direction of airflow.

[0153] The electric field section can also be a second electric field section, or multiple second electric field sections arranged in the direction of airflow; wherein, the first electric field section and the second electric field section are the first electric field section and the second electric field section in Embodiment 1.

[0154] In this embodiment, the electric field unit 740 is as shown in Embodiment 1. Figure 2 The first electric field section 740, the first filter unit 720, and the second filter unit 730 shown are detachably disposed in the housing 710.

[0155] In one embodiment, the electric field section 740 may also be one or more second electric field sections.

[0156] In one embodiment, an anode tube bundle 411a in the first electric field section and a dust removal electric field cathode located in the anode tube bundle 411a constitute an electric field unit, and the electric field strength of the electric field unit is less than 0.5 kV / mm.

[0157] In one embodiment, an electric field adsorption unit in the second electric field section and a discharge electrode located in the electric field adsorption unit constitute an electric field unit, and the electric field strength of the electric field unit is less than 0.5 kV / mm.

[0158] In one embodiment, the gas purification device further includes a fan positioned in front of the electric field section 740 along the airflow direction D to accelerate the gas flow.

[0159] The first filter unit 720 includes a first filter medium formed of electret material; the first filter medium can be electreted by the electric field section 740.

[0160] In one embodiment, the filtration level of the first filter medium is any one of coarse filtration (G1-G3), medium filtration (G4, F5), or high-medium filtration (F6-F9).

[0161] In this embodiment, the first filter medium uses a high-efficiency F6 level filter. The air filter used in this embodiment is an F6 / A714 (the filter element is electret material).

[0162] The second filter unit 730 includes a second filter medium formed of electret material; the second filter medium can be electreted by the electric field section 740, and the pore size of the second filter medium is larger than that of the first filter medium.

[0163] In this embodiment, the second filter medium is PP cotton, commonly known as doll cotton, hollow cotton, or filling cotton. It is made of polypropylene fiber and is a synthetic chemical fiber. PP cotton has electret properties.

[0164] In this embodiment, the gas first enters the electric field unit 740. This electric field purifies the gas passing through the gas flow channel. Gas purification via electric field is well-known in the art: by ionizing the gas through one electrode forming the electric field, the particulate matter in the gas becomes charged, allowing it to be adsorbed by the other electrode. For example, if one electrode is negatively charged and the other positively charged, the negatively charged electrode ionizes the gas, causing the particulate matter in the gas to become negatively charged, thus allowing it to be adsorbed and removed by the positively charged electrode. Through the purification process of the electric field unit 740, large and medium-sized particulate matter in the gas is removed.

[0165] During operation, the electric field unit 740 ionizes the gas passing through the gas channel to generate positive and negative particles, causing the first and second filter media to become electret. Because the first filter unit 720 and the second filter unit 730 are continuously electretted, the first filter unit 720 and the second filter unit 730 maintain high adsorption performance, thereby further removing small and medium-sized particulate matter from the gas.

[0166] The gas is purified by the electric field section 740 and filtered by the first filter unit 720 and the second filter unit 730, and finally comes out as fresh air.

[0167] In this embodiment, a high-efficiency F6 grade first filter medium is used in combination with PP cotton. Experiments show that the filtration effect can reach the effect of filtration grade H14. Thus, the filtration effect after the combination of 1+1 is greater than 2.

[0168] In other embodiments, if filtration grade G or F is used in conjunction with PP cotton, the effect of filtration grade H14 can be achieved. If filtration grade F9 is used in conjunction with PP cotton, the effect of filtration grade U15 can be achieved.

[0169] Furthermore, in this embodiment, the gas first passes through the first filter unit 720 and then through the second filter unit 730. Because the PP cotton has a large pore size, it does not increase the resistance to gas flow or affect the gas flow. Additionally, the gas flow rate slows down after passing through the first filter unit 720, making it easier for small and medium-sized particles to be adsorbed by the PP cotton when passing through the second filter unit 730.

[0170] This embodiment effectively solves the problems of air purification efficiency and air resistance, with the combination of F6 filter media and PP cotton filter media playing a key role.

[0171] Compared with the H14 filter media, this embodiment not only makes up for the problems of high air resistance and high energy consumption of the original H14 filter media, but also makes up for the problem of short service life of the original purification module using H14 filter media.

[0172] The combined use of the first filter unit 720 and the second filter unit 730 can achieve 99% filtration of particles larger than or equal to 500 nm in the gas, and preferably, it can filter particles larger than or equal to 300 nm. In the prior art, if only the first filter unit 720 and the second filter unit 730 are used for physical purification, the purification method is to achieve filtration through pore size blocking, staggered paths, and rapid gas velocity impact. In environments with high requirements for gas purification and filtration, such as in semiconductors, it is difficult to further improve the removal effect of particles larger than 10 nm. However, the gas purification system in this embodiment, because the electric field device can electret the filter unit, allows the filter unit to achieve a purification effect that is enhanced by electret in addition to the above-mentioned purification methods. Combined with the electric field device, it can achieve a better removal effect of particles larger than 10 nm compared to the prior art, and is therefore more suitable for use in environments with high requirements.

[0173] Because the faster the airflow of the filter unit, the better the filtration effect due to the rapid impact of the gas, the higher the airflow requires higher energy consumption. In contrast, this embodiment can achieve the same filtration effect with low energy consumption, thus reducing operating costs.

[0174] As can be seen, due to the presence of the electric field unit 740, the filter media can be electreted. Therefore, during operation, the electric field unit 740 can continuously electret the filter media, so that the filter media can continuously exert a more effective filtration effect compared to the situation where it cannot be continuously electreted. In this way, compared with the existing technology, energy consumption and operating costs are reduced. Moreover, by performing a first purification through the electric field unit 740, the service life of the filter media can be extended, the number of replacements can be reduced, thereby reducing operating costs and also reducing secondary pollution to the environment after replacement.

[0175] Furthermore, since the filter unit can maintain a high electret state for a long time, even if the filter pore size is increased, the adsorption effect will not be affected. On the other hand, increasing the filter pore size reduces the ventilation resistance, and under the same wind speed conditions, the energy consumption of the fan can be greatly reduced.

[0176] In order to achieve electreting of the filter medium, the arrangement positions of the first filter unit 720 and the second filter unit 730 relative to the electric field unit 740 can be limited as follows: the minimum of all the vertical distances from the gas outlets to the surface of the filter medium that receives the gas discharged from the gas outlets can enable the filter medium to be electreted.

[0177] Specifically, such as Figure 6 As shown in the diagram, the arrows indicate the gas flow direction. After the gas exits from gas outlet 13, the filter medium receives the gas from surface A for filtration and then discharges it from surface B. The minimum vertical distance L among all gas outlets 13 to surface A allows the filter medium to be electretted, that is, to acquire the aforementioned charged ions and become electretted. In some embodiments, the gas outlets 13 are not on the same plane, and the vertical distances from all gas outlets to surface A vary in length; the shortest vertical distance is the aforementioned minimum value.

[0178] The specific value of this minimum can be set according to the above rules, taking into account factors such as structural compactness, power consumption, and usage. In this embodiment, the minimum value is less than or equal to 200mm.

[0179] In this embodiment, the first filter unit 20 and the second filter unit 30 work together to achieve 99% filtration of particles larger than or equal to 500 nm in the gas. Preferably, they can filter particles larger than or equal to 300 nm. By combining this filter unit with the electric field unit, the filtration efficiency for 10 nm particles can exceed 99%. Through multiple experiments, this embodiment has shown good purification effect, low wind resistance, low energy consumption, and reduced operating costs in actual use.

[0180] Therefore, the gas purification system of this embodiment, when used in a semiconductor cleanroom, can reduce energy consumption, extend the service life of the filter unit, reduce operating costs, and also reduce secondary pollution to the environment after filter unit replacement. Moreover, it can filter particles as small as 10nm with an efficiency of over 99%.

[0181] This embodiment provides a gas purification system, including: at least two gas purification devices arranged sequentially along the gas flow direction, wherein the gas purification devices are those described above.

[0182] This embodiment provides an application of a gas purification system for purifying gases entering a cleanroom. The gas purification system is the one described above.

[0183] This reduces the investment in primary and secondary filtration in cleanroom purification while still meeting purification requirements, further reducing space requirements and investment costs.

[0184] Example 5

[0185] The gas purification device of this embodiment includes three electric field sections and two filter units arranged sequentially along the gas flow direction. All three electric field sections adopt the first electric field section 40 from Embodiment 1. Figure 2 As shown, the first electric field section includes a dust removal electric field cathode 42 (first discharge electrode) and a dust removal electric field anode (first adsorption electrode) 41. The dust removal electric field anode 41 includes a first anode section 412 and a second anode section 411. The first anode section 412 and the second anode section 411 have the same size. Figure 2 In the middle, the second anode part 411 includes a plurality of anode tube bundles 411a, the anode tube bundles 411a are 60mm long, their cross-section is honeycomb-shaped, the diameter of the inscribed circle is R=23mm, and the diameter of the dust removal electric field cathode 42 is 1mm.

[0186] In this embodiment, an anode tube bundle 411a and a dust removal electric field cathode located in the anode tube bundle 411a constitute an electric field unit. The first electric field unit in this embodiment uses a DC power supply, and the electric field strength E of the electric field unit is equal to the voltage / 0.5R.

[0187] The two filter units respectively adopt the first filter unit 720 and the second filter unit 730 in Embodiment 4.

[0188] The first filter unit 720 uses an air filter with a high-efficiency F6 filtration level, and the filter medium of the second filter unit 730 is PP cotton.

[0189] The distance between the surface of the first filter unit 720 and the outlet of the electric field section is 20mm, the distance between the surface of the second filter unit 730 and the outlet of the electric field section is 100mm, and the distance between the surface of the second filter unit 730 and the outlet of the first filter unit 720 is 10mm.

[0190] The first filter unit 720 has a thickness of 70mm.

[0191] Experiments have shown that under the voltage and current conditions specified in Table 2 of this embodiment, the gas treated by the electric field section of this embodiment is of high quality and has no adverse effects on human work and life for extended periods under this environment.

[0192] Table 2 shows the experimental data obtained from tests conducted on the gas purification device under different wind speeds and voltages.

[0193] Table 2

[0194]

[0195] In Table 2: E represents the electric field strength of the electric field element.

[0196] As can be seen from Table 2:

[0197] At wind speeds of 0.3 m / s and 0.5 m / s, the dust removal efficiency using the superposition of electric field and filter unit can reach 100%, with zero detection of 0.3 μm particles. This makes it particularly suitable for places with extremely high environmental requirements, such as laboratories and electronic component factories.

[0198] The electric field strength of the electric field element is between 0.3 and 0.5.

[0199] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A gas purification device for filtering and purifying gas, characterized in that, include: At least one electric field unit and at least one filter unit are arranged sequentially along the gas flow direction. The filtration unit has a filter medium containing electret material; The filter medium can be electreted by the electric field section; The electric field section is a second electric field section, which includes a second discharge electrode and a second adsorption electrode that form the electric field. The second adsorption electrode includes multiple electric field adsorption units. Each electric field adsorption unit has a sidewall extending along the axial direction. The sidewall forms a channel around the channel. The cross-section of the channel perpendicular to the axial direction is an equilateral triangle. The second discharge electrode is arranged parallel to the sidewall of the channel and passes through the center of the inscribed circle of the cross-section. Three sidewalls are formed around the channel, including a first sidewall, a second sidewall, and a third sidewall. Adjacent electric field adsorption units share a sidewall. The first sidewall is provided with a plurality of second air inlets for gas to enter the channel, the second sidewall is provided with a plurality of second air outlets for gas to exit the channel, and the third sidewall is not provided with air inlets and air outlets. The center of the second air inlet on the first sidewall and the center of the second air outlet on the second sidewall are arranged on different planes perpendicular to the axial direction. The second air inlet is not provided on the centerline extending along the channel direction of the first sidewall, and the second air inlet is not provided on the centerline extending along the channel direction of the second sidewall.

2. The gas purification device according to claim 1, characterized in that: in, The electric field section has a gas flow channel through which the gas passes. The gas flow channel has a gas inlet for gas to enter and a gas outlet for gas to exit. The electric field section has an electric field formed in the gas flow channel for ionizing and removing dust from the gas.

3. The gas purification device according to claim 2, characterized in that: in, The location of the filter unit relative to the electric field unit is limited as follows: the minimum of all the vertical distances from the gas outlets to the surface of the filter medium that receives the gas discharged from the gas outlets allows the filter medium to be electretted.

4. The gas purification device according to claim 3, characterized in that: in, The minimum value is less than or equal to 200 mm.

5. The gas purification device according to claim 1, characterized in that: The electric field section includes a first electric field section and a second electric field section. The first electric field unit and the second electric field unit are arranged sequentially along the gas flow direction. The first electric field section includes a first discharge electrode and a first adsorption electrode that form an electric field. The first adsorption electrode has a honeycomb structure composed of multiple hollow tube bundles. The first discharge electrode is at least partially disposed within the hollow tube bundles of the first adsorption electrode. A gas flow channel is formed between the first discharge electrode and the first adsorption electrode.

6. The gas purification device according to claim 1, characterized in that: The electric field section includes a second electric field section and a first electric field section, which are arranged sequentially along the gas flow direction. The first electric field section includes a first discharge electrode and a first adsorption electrode that form an electric field. The first adsorption electrode has a honeycomb structure composed of multiple hollow tube bundles. The first discharge electrode is at least partially disposed in the hollow tube bundle of the first adsorption electrode. A gas flow channel is formed between the first discharge electrode and the first adsorption electrode.

7. The gas purification device according to claim 1, characterized in that, include: The first filter unit and the second filter unit are arranged sequentially along the gas flow direction. The first filter unit and the second filter unit each have a first filter medium and a second filter medium formed of electret material; both the first filter medium and the second filter medium can be electreted by the electric field section, and the pore size of the second filter medium is larger than that of the first filter medium.

8. The gas purification device according to claim 7, characterized in that: The filtration level of the first filter medium is any one of coarse filtration, medium filtration, or high-efficiency filtration.

9. The gas purification device according to claim 7, characterized in that: The second filter medium is PP cotton.

10. The gas purification device according to claim 1, characterized in that: The filtration unit can filter more than 99% of particles larger than or equal to 500 nm in the gas.

11. A gas purification system, characterized in that, include: The gas purification device according to any one of claims 1-10.

12. The gas purification system according to claim 11, characterized in that, include: At least two gas purification devices are arranged sequentially along the gas flow direction.

13. An application of a gas purification system, characterized in that: The gas purification system is used to purify the gas entering the semiconductor cleanroom, and the gas purification system is the gas purification system described in claim 11 or 12.

14. A gas purification method, characterized in that: At least one electric field unit and at least one filter unit are sequentially arranged along the gas flow direction; An electric field is formed in the gas flow channel of the electric field section; Gas is introduced into the gas flow channel for filtration to obtain purified gas; The purified gas is then introduced into a filtration unit for filtration to obtain the treated gas. The filtration unit performs filtration using a filter medium formed from electret material. The electret material can be electreted by the electric field. The electric field section is a second electric field section, which includes a second discharge electrode and a second adsorption electrode that form the electric field. The second adsorption electrode includes a plurality of electric field adsorption units. Each electric field adsorption unit has a sidewall extending along the axial direction. The sidewall surrounds to form a channel. The cross section of the channel perpendicular to the axial direction is an equilateral triangle. The second discharge electrode is arranged parallel to the sidewall of the channel and passes through the center of the inscribed circle of the cross section. Three sidewalls are formed around the channel, including a first sidewall, a second sidewall and a third sidewall. The first sidewall is provided with a plurality of second air inlets for gas to enter the channel, the second sidewall is provided with a plurality of second air outlets for gas to exit the channel, and the third sidewall is not provided with air inlets and air outlets. The center of the second air inlet on the first sidewall with the second air inlet and the center of the second air outlet on the second sidewall with the second air outlet are arranged on different planes perpendicular to the axial direction. The second air inlet is not provided on the centerline extending along the channel direction of the first sidewall, and the second air inlet is not provided on the centerline extending along the channel direction of the second sidewall.

15. The gas purification method according to claim 14, characterized in that: The location of the filter unit relative to the electric field unit is limited as follows: the minimum of all the vertical distances from the gas outlets to the surface of the filter medium that receives the gas discharged from the gas outlets allows the filter medium to be electretted.

16. The gas purification method according to claim 15, characterized in that: The minimum value is less than or equal to 200 mm.

17. The gas purification method according to any one of claims 14-16, characterized in that: The filtration unit can filter more than 99% of particles larger than or equal to 500 nm in the gas.

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