Surface treatment apparatus and surface treatment method

By combining the suspension transport mechanism and the rollers, the problem of uneven substrate transport speed is solved, and high-precision surface treatment of the opposite side of the substrate is achieved. In particular, the uniformity of coating thickness and pattern accuracy are improved during the substrate bending process.

CN116710378BActive Publication Date: 2026-07-24FUJIFILM CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
FUJIFILM CORP
Filing Date
2022-01-25
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

In suspended transport devices, uneven transport speed of the substrate leads to reduced surface treatment accuracy, especially when the substrate is bent along the outer circumference of a cylindrical component, making it difficult to perform high-precision surface treatment on the opposite side of the substrate.

Method used

A suspension transport mechanism is used to suspend the central part of the substrate in the width direction through a gas injection component, and the substrate is bent by the rotation of the edge rings. At the same time, rollers are used to stabilize the transport and ensure the surface treatment accuracy of the opposite side of the substrate.

Benefits of technology

It achieves high-precision surface treatment of the opposite side of the substrate, such as improved coating thickness uniformity and pattern accuracy, and reduces the impact of uneven transport speed.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN116710378B_ABST
    Figure CN116710378B_ABST
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Abstract

A surface treatment apparatus or a surface treatment method using the same, the surface treatment apparatus including: a levitation transport mechanism having a gas jetting member capable of jetting gas from a jetting port of an outer peripheral surface, a pair of edge rings each disposed at an axial end of the outer peripheral surface of the gas jetting member and having an outer peripheral surface that protrudes with respect to the outer peripheral surface of the gas jetting member, and a drive portion that rotates the pair of edge rings; and a surface treatment mechanism that levitates a first surface of a substrate from the outer peripheral surface of the gas jetting member using the levitation transport mechanism, brings both end portions of the first surface of the substrate into contact with the outer peripheral surfaces of the pair of edge rings, and transports the substrate while bending the substrate along the outer peripheral surfaces of the rotating pair of edge rings, the surface treatment mechanism being used to perform surface treatment on a second surface of the substrate that is bent along the outer peripheral surfaces of the pair of edge rings.
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