Piezoelectric jet microbeam current device and precision coating printing equipment

Abstract

The present application provides a piezoelectric jet micro-beam device and a precision coating printing equipment. The piezoelectric jet micro-beam device comprises a liquid supply assembly, which is provided with a liquid supply cavity and a flow guide plate, and the flow guide plate is provided with a plurality of flow guide holes distributed at intervals; a liquid outlet assembly is provided with a plurality of jet holes distributed at intervals. A plurality of piezoelectric micro-needles are mounted on the flow guide plate, each piezoelectric micro-needle is a tubular structure composed of at least two piezoelectric resonators, one end of the piezoelectric micro-needle is fixedly connected to the flow guide plate and communicates with the liquid supply cavity, the other end of the piezoelectric micro-needle is fixedly connected to the liquid outlet assembly and communicates with the jet hole correspondingly. A control circuit is used to control the energization parameters of each piezoelectric resonator, and the liquid in each piezoelectric micro-needle is jetted outward from the jet hole based on the excitation signal of the piezoelectric resonator. The piezoelectric jet micro-beam device performs coating operation by outward jetting mode, realizes linear precision spraying, and achieves printing type coating operation of electronic material coating.

Description

Technical Field

[0001] This invention relates to the field of spraying technology, specifically to a piezoelectric jet micro-beam device and precision coating and printing equipment. Background Technology

[0002] In the electronics industry, electronic material coatings are used to achieve various functions, all of which have high dimensional precision requirements and extremely high morphological path requirements. For example, the electrode coating of power lithium batteries, the coating of optical PET films, and the fabrication of OLEDs all require the use of precision coating and printing technology.

[0003] However, existing coating technologies typically employ mechanical devices for stencil coating. For example, coating equipment uses stencil coating methods such as screen printing, slot coating, doctor blade coating, and anilox roller coating. These mechanical coating methods not only require numerous auxiliary devices to support the coating process, resulting in complex structures and difficult maintenance, but also require the coating liquid to cover the entire stencil, leading to significant losses of coating liquid and materials and persistently high coating costs. Summary of the Invention

[0004] To address the technical problems of high coating liquid loss and complex coating processes in existing technologies, this invention proposes a piezoelectric jet micro-beam device and a precision coating and printing equipment.

[0005] A first aspect of the present invention provides a piezoelectric jet microbeam device, comprising:

[0006] The liquid supply assembly is equipped with a liquid supply chamber and a guide plate that closes the liquid supply chamber. The guide plate is provided with a plurality of guide holes spaced apart.

[0007] The liquid outlet assembly is equipped with multiple spray holes spaced apart;

[0008] Multiple piezoelectric microneedles are installed on the guide plate. Each piezoelectric microneedle is a tubular structure composed of at least two piezoelectric resonators. One end of the piezoelectric microneedle is fixedly connected to the guide plate and communicates with the liquid supply chamber. The other end of the piezoelectric microneedle is fixedly connected to the liquid outlet assembly and communicates with the corresponding injection hole.

[0009] A control circuit electrically connected to each of the piezoelectric resonators is used to control the energizing parameters of each piezoelectric resonator, and the liquid in each piezoelectric microneedle is ejected outward from the injection hole based on the excitation signal of the piezoelectric resonator.

[0010] In one embodiment, the first electrode of the piezoelectric resonator contained in the piezoelectric microneedle extends along the outer sidewall to the first end, the second electrode of the piezoelectric resonator extends along the inner sidewall to the first end, the first end of the piezoelectric microneedle is glued and fixed to the flow guide plate, and the first electrode and the second electrode are correspondingly connected to the control circuit.

[0011] In one embodiment, the control circuit is attached to the surface of the guide plate.

[0012] In one embodiment, the control circuit is configured with a delay circuit, which can be used to control the on / off time of different piezoelectric resonators of the same piezoelectric microneedle; or, the delay circuit can be used to control the on / off time of different piezoelectric resonators of adjacent piezoelectric microneedles, so as to form a linear bundle by liquid jetting during the movement of the piezoelectric jetting microbeam device.

[0013] In one embodiment, the flow guide holes are distributed in at least two rows parallel to each other along the length of the flow guide plate, and the piezoelectric microneedles correspond one-to-one with the flow guide holes.

[0014] In one embodiment, the guide hole is tapered, with the larger end of the guide hole facing the liquid supply chamber, and the central hole of the piezoelectric microneedle is aligned with the smaller end of the guide hole.

[0015] In one embodiment, the center distance between two adjacent flow guide holes is less than or equal to twice the axial diameter of the piezoelectric microneedle.

[0016] In one embodiment, the liquid dispensing assembly includes a base and a microporous baffle connected to the base, the injection hole is disposed on the microporous baffle, and the base is detachably connected to the liquid supply assembly.

[0017] In one embodiment, the diameter of the jet orifice is smaller than the diameter of the piezoelectric microneedle.

[0018] In one embodiment, the liquid supply assembly includes an ink tank, an inlet channel and an outlet channel disposed in the ink tank, the inlet channel and the outlet channel being respectively connected to the liquid supply chamber and guiding the liquid to flow along the liquid supply chamber, and the guide plate being fixed to the bottom of the ink tank.

[0019] In one embodiment, the piezoelectric jet microbeam device further includes a metal frame located between the liquid supply component and the liquid outlet component, the metal frame having an annular space, and the piezoelectric microneedles located within the annular space.

[0020] In one embodiment, the piezoelectric jet microbeam device further includes at least one heating band attached to the metal frame, the heating band being electrically connected to the control circuit.

[0021] In one embodiment, the liquid contains nano-metal particles.

[0022] The present invention also discloses a precision coating and printing device, including a main body and a piezoelectric jet micro-beam device as described above. The main body is configured with a coating space, and the liquid outlet component sprays liquid into the coating space.

[0023] In this invention, piezoelectric microneedles are controlled in segments by a control circuit to achieve different liquid spraying effects, resulting in flexible spraying. The piezoelectric jetting microbeam device performs coating operations by spraying outwards. Through precise linear spraying, it achieves a print-like coating operation for electronic materials, reducing the limitations of complex structures such as templates and template graphic lines, greatly increasing the flexibility of coating operations, and reducing coating liquid waste. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of the invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a three-dimensional schematic diagram of a piezoelectric jet microbeam device according to an embodiment of the present invention;

[0026] Figure 2 This is a first-view exploded view of a piezoelectric jet microbeam device according to an embodiment of the present invention;

[0027] Figure 3 This is a second-view exploded view of a piezoelectric jet microbeam device according to an embodiment of the present invention;

[0028] Figure 4 This is a cross-sectional magnified structural diagram of a piezoelectric microneedle provided in an embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the structure of a guide plate provided in an embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the liquid outlet assembly provided in an embodiment of the present invention.

[0031] In the figure: Liquid supply assembly 10; ink tank 11; liquid supply chamber 111; liquid inlet channel 12; liquid outlet channel 13; guide plate 14; guide hole 141; liquid outlet assembly 20; microporous baffle 21; jet hole 211; base 22; piezoelectric microneedle 30; piezoelectric resonator 31; first electrode 311; second electrode 312; separator ring 32; metal frame 40; annular space 41; heating belt 50; control circuit 60. Detailed Implementation

[0032] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0033] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the scope of protection of the invention is not limited to the specific embodiments disclosed below.

[0034] like Figures 1 to 3 As shown, this embodiment provides a piezoelectric jetting microbeam device that can jet liquid outwards, forming linear liquid lines on a carrier to construct an inkjet-type wire harness thin film coating process. The piezoelectric jetting microbeam device moves along a preset trajectory and outputs a continuous liquid beam to form a complete functional wire coating on the surface of the carrier.

[0035] The piezoelectric jet microbeam device includes a liquid supply assembly 10, a liquid outlet assembly 20, multiple piezoelectric microneedles 30 connecting the liquid supply assembly 10 and the liquid outlet assembly 20, and a control circuit 60 electrically connected to the piezoelectric microneedles 30. The liquid supply assembly 10 is used to transport liquid, which can be configured as a functional liquid of different viscosities. Optionally, the liquid contains nano-metal particles. Preferably, the liquid contains silver nanoparticles.

[0036] The liquid supply assembly 10 is equipped with a liquid supply chamber 111, within which liquid is located. The liquid supply chamber 111 provides storage space for the liquid to maintain sufficient volume to meet jetting requirements. Optionally, the liquid supply assembly 10 includes an ink tank 11, an inlet channel 12 and an outlet channel 13 disposed in the ink tank 11. The inlet channel 12 and the outlet channel 13 are respectively connected to the liquid supply chamber 111 and guide the liquid to flow along the liquid supply chamber 111. The inlet channel 12 can be connected to an external ink source to form a continuous delivery of liquid within the ink source. The outlet channel 13 is connected to the liquid supply chamber 111 to form a circulating flow of liquid within the liquid supply chamber 111, avoiding sedimentation and clogging problems, and maintaining the consistency of liquid concentration and viscosity.

[0037] The liquid supply assembly 10 is equipped with a guide plate 14 that encloses the liquid supply chamber 111. The guide plate 14 is the section where liquid from the liquid supply chamber 111 is output to the piezoelectric microneedle 30. The guide plate 14 is provided with a plurality of spaced-apart guide holes 141 for outputting liquid from the liquid supply chamber 111. Optionally, the guide plate 14 is fixed to the bottom of the ink tank 11, and the liquid enters the piezoelectric microneedle 30 under its own weight. Preferably, the liquid supply chamber 111 has a pre-pressure of liquid, which acts on the liquid to maintain a substantially uniform pressure on the guide plate 14. For example, the pre-pressure comes from the liquid pressure of the ink source.

[0038] The liquid outlet assembly 20 is disposed opposite to the liquid supply assembly 10 and the two are connected by fasteners. The liquid outlet assembly 20 is provided with a plurality of spray holes 211 spaced apart, and the hole arrangement of the spray holes 211 is the same as the hole arrangement of the guide holes 141.

[0039] like Figures 3 to 5 As shown, multiple piezoelectric microneedles 30 are mounted on the flow guide plate 14. Each piezoelectric microneedle 30 is a tubular structure composed of at least two piezoelectric resonators 31. The piezoelectric microneedles 30 correspond one-to-one with the flow guide holes 141 on the flow guide plate 14, so that the liquid in the liquid supply chamber 111 flows into the piezoelectric microneedles 30.

[0040] One end of the piezoelectric microneedle 30 is fixedly connected to the guide plate 14 and communicates with the liquid supply chamber 111, while the other end of the piezoelectric microneedle 30 is fixedly connected to the liquid outlet assembly 20 and communicates with the corresponding injection hole 211. The piezoelectric microneedle 30 communicates with the corresponding guide hole 141 and injection hole 211. When no power is applied, the fluid is held within the piezoelectric microneedle 30 by liquid tension and atmospheric pressure. Preferably, the piezoelectric resonator 31 is configured as a piezoelectric ceramic.

[0041] The control circuit 60 is electrically connected to each piezoelectric resonator 31. The control circuit 60 is used to control the energizing parameters of each piezoelectric resonator 31. The liquid inside each piezoelectric microneedle 30 is ejected outward from the injection hole 211 based on the excitation signal of the piezoelectric resonator 31. Each piezoelectric microneedle 30 is provided with multiple piezoelectric resonators 31, which are spaced apart along the axial direction of the piezoelectric microneedle 30. A separator ring 32 is provided between two adjacent piezoelectric resonators 31, and the axial height of the separator ring 32 is less than the axial height of the piezoelectric resonator 31.

[0042] Optionally, the height of the piezoelectric resonator 31 can be flexibly adjusted based on different excitation intensity requirements. For example, the axial height of the piezoelectric resonator 31 located at the output end is greater than that of the piezoelectric resonator 31 located in the middle. Preferably, the heights of the piezoelectric resonators 31 are uniform, and the control circuit 60 can flexibly control the energizing parameters of the piezoelectric microneedles 30 based on this uniformity, so that the liquid spraying distance and spray wire diameter are controllable. Optionally, the number of piezoelectric resonators 31 can be set to two, three, four, five, six, eight, or ten.

[0043] Each piezoelectric microneedle 30 has an independently controllable piezoelectric resonator 31. Multiple piezoelectric microneedles 30 with piezoelectric resonators 31 form a matrix inkjet area. As the piezoelectric jet micro-beam device moves, various coating patterns can be printed and adjusted. The piezoelectric microneedles 30 are segmented and controlled by the control circuit 60 to achieve different liquid jetting effects, providing flexible jetting and fulfilling various coating requirements. The piezoelectric jet micro-beam device performs coating operations through outward jetting. Precise linear spraying enables print-style coating of electronic materials, reducing the limitations of complex structures and graphic lines on templates, greatly increasing the flexibility of coating operations, and reducing coating liquid waste.

[0044] The piezoelectric microneedle 30 has a tubular structure, and both the piezoelectric resonator 31 and the separator ring 32 are tubular structures. After polarization treatment, the inner diameter of the piezoelectric resonator 31 is 0.5 mm to 2 mm, and the wall thickness is 0.5 mm to 1 mm. Specifically, the inner diameter of the piezoelectric resonator 31 is set to 0.5 mm, 0.8 mm, 1 mm, 1.2 mm, 1.5 mm, 1.8 mm, and 2 mm. The wall thickness of the piezoelectric resonator 31 is 0.5 mm, 0.6 mm, 0.8 mm, and 1 mm.

[0045] In one embodiment, the first electrode 311 of the piezoelectric resonator 31 contained in the piezoelectric microneedle 30 extends along the outer sidewall to the first end, and the second electrode 312 of the piezoelectric resonator 31 extends along the inner sidewall to the first end. The first end of the piezoelectric microneedle 30 is glued and fixed to the guide plate 14. Both the first electrode 311 and the second electrode 312 extend to the first end to concentrate the conductive contact areas. The first electrode 311 and the second electrode 312 are correspondingly connected to the control circuit 60 so that the control circuit 60 can independently control the piezoelectric resonator 31 of each piezoelectric microneedle 30, thereby allowing all the piezoelectric resonators 31 to be controlled by the control circuit 60, forming a flexible inkjet pattern.

[0046] For example, the piezoelectric microneedle 30 is equipped with five piezoelectric resonators 31, with adjacent piezoelectric resonators 31 separated by a separator ring 32. The first electrodes 311 of the five piezoelectric resonators 31 are respectively connected to the control terminal of the control circuit 60, and the second electrodes 312 of the five piezoelectric resonators 31 are collectively connected to the control circuit 60. Each piezoelectric resonator 31 can be independently controlled by the control circuit 60. When the control circuit 60 sends an electrical signal to three piezoelectric resonators 31, the corresponding three piezoelectric resonators 31 are excited to drive the liquid to flow out, and the driving force of the liquid comes from the three piezoelectric resonators 31. When the control circuit 60 sends an electrical signal to five piezoelectric resonators 31, the corresponding five piezoelectric resonators 31 are excited to drive the liquid to flow out, and the driving force of the liquid comes from the five piezoelectric resonators 31.

[0047] Preferably, the control circuit 60 is equipped with a delay circuit, which can be used to control the on / off time of different piezoelectric resonators 31 of the same piezoelectric microneedle 30. The delay circuit can extend the energizing time of the corresponding piezoelectric resonator 31. After other piezoelectric resonators 31 drive the liquid to flow out, the piezoelectric resonator 31 connected to the delay circuit continues to be energized, thereby enabling the same piezoelectric microneedle 30 to continuously output liquid. When the delay circuit moves in conjunction with the piezoelectric jet microbeam device, continuous output of the piezoelectric microneedle 30 can be achieved, coating a continuous line structure on the carrier.

[0048] In an optional embodiment, the delay circuit can be used to control the on / off times of different piezoelectric resonators 31 of adjacent piezoelectric microneedles 30, so as to form a linear bundle of liquid jets during the movement of the piezoelectric jet micro-beam device. The adjacent piezoelectric microneedles 30, in conjunction with the delay circuit, enable continuous superposition jetting of the piezoelectric microneedles 30, realize the superposition setting of coating lines, and facilitate the control of coating thickness.

[0049] like Figures 3 to 6 As shown, the control circuit 60 is electrically connected to the first electrode 311 and the second electrode 312. Preferably, the control circuit 60 is attached to the surface of the guide plate 14. The guide plate 14 is a plate-shaped structure made of one of the following materials: glass, ceramic, or silicon. Guide holes 141 are provided through the guide plate 14. The guide plate 14 is formed with at least two rows of guide holes 141 arranged in parallel rows by etching or machining. For example, the guide holes 141 can be set to two, three, four, five, six, or eight rows, etc., with more than ten guide holes 141 in each row. Further, photolithographic metal wires are sputtered on the surface of the guide plate 14, and these metal wires correspond to the guide holes 141. The first end of the piezoelectric microneedle 30 is bonded to the guide plate 14 with conductive adhesive so that the metal wires are electrically connected to the first electrode 311 and the second electrode 312 of the corresponding piezoelectric resonator 31. Alternatively, the control circuit 60 is configured as a thin-film circuit formed on the surface of the guide plate 14.

[0050] In one embodiment, at least two rows of flow guide holes 141 are distributed parallel to each other along the length of the flow guide plate 14, and each piezoelectric microneedle 30 corresponds to one of the flow guide holes 141. The flow guide holes 141 penetrate the flow guide plate 14 to guide liquid into the piezoelectric microneedles 30. The joint between the piezoelectric microneedles 30 and the flow guide plate 14 is sealed. Preferably, the center line of the piezoelectric microneedles 30 coincides with the center line of the flow guide holes 141. Preferably, the flow guide holes 141 are conical, with the larger end of the flow guide holes 141 facing the liquid supply chamber 111, and the central hole of the piezoelectric microneedles 30 aligned with the smaller end of the flow guide holes 141. The conical shape of the flow guide holes 141 guides the liquid flow and introduces the liquid into the piezoelectric microneedles 30.

[0051] Optionally, the center distance between two adjacent guide holes 141 is less than or equal to twice the axial diameter of the piezoelectric microneedles 30. The guide holes 141 are matched with the piezoelectric microneedles 30; correspondingly, the center distance of the guide holes 141 satisfies the spacing of the piezoelectric microneedles 30 while avoiding mutual interference. For example, the ratio of the center distance of the guide holes 141 to the axial distance of the piezoelectric microneedles 30 is 1, 1.2, 1.5, 1.8, 2, etc., to maintain a suitable density of piezoelectric microneedles 30 and improve the spraying effect.

[0052] In one embodiment, the liquid dispensing assembly 20 includes a base 22 and a microporous baffle 21 connected to the base 22. A spray orifice 211 is disposed on the microporous baffle 21. The base 22 is detachably connected to the liquid supply assembly 10. The microporous baffle 21 is fixed to the base 22 so that the piezoelectric microneedle 30 sprays liquid outward through the microporous baffle 21. The microporous baffle 21 is made of metal foil, such as stainless steel foil.

[0053] Furthermore, the aperture of the spray orifice 211 is smaller than that of the piezoelectric microneedle 30, and the aperture of the spray orifice 211 is less than or equal to 100 micrometers. A micro-orifice baffle 21 is placed at the other end of the piezoelectric microneedle 30 to prevent direct liquid dripping and to control the spray range and shape of the liquid. The aperture of the spray orifice 211 can be set to 50 micrometers, 60 micrometers, 70 micrometers, 80 micrometers, 85 micrometers, 90 micrometers, 95 micrometers, or 100 micrometers.

[0054] In one embodiment, the piezoelectric jet microbeam device further includes a metal frame 40 located between the liquid supply assembly 10 and the liquid outlet assembly 20. The two ends of the metal frame 40 abut against the liquid supply assembly 10 and the liquid outlet assembly 20, respectively, to maintain accurate spacing between the liquid supply assembly 10 and the liquid outlet assembly 20, and to keep the length of the piezoelectric microneedles 30 stable. The metal frame 40 is configured as a ring structure, and its surrounding area forms an annular space 41, within which the piezoelectric microneedles 30 are located. Preferably, the annular space 41 is rectangular to surround and protect all the piezoelectric microneedles 30. Optionally, the liquid supply assembly 10, the metal frame 40, and the liquid outlet assembly 20 are connected by fasteners. Optionally, the fasteners pass through the base 22 and the metal frame 40 and are locked to the liquid supply assembly 10.

[0055] Furthermore, the piezoelectric jet micro-beam device also includes at least one heating band 50 attached to the metal frame 40, and the heating band 50 is electrically connected to the control circuit 60. The heating band 50 has a long strip structure, which generates heat when energized to heat the metal frame 40 and the ink cartridge, so as to keep the liquid in the piezoelectric microneedle 30 and the ink cartridge under suitable and stable conditions for stable operation, suitable for cold regions and cold weather, and to maintain smooth liquid flow.

[0056] The piezoelectric jetting micro-beam device disclosed in the above embodiments is applied to a precision coating and printing equipment. The precision coating and printing equipment includes a main body and the piezoelectric jetting micro-beam device as disclosed in the above embodiments. The main body is equipped with a coating space, and the liquid outlet component 20 jets liquid into the coating space. The carrier can move along the coating space, and the liquid outlet component 20 jets liquid towards the carrier to achieve coating operations on the carrier. This allows for the processing of complex coating shapes and multi-layer circuits, resulting in good coating effects and low coating costs.

[0057] For illustrative purposes, the foregoing description uses specific names to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that specific details are not required to practice the embodiments. Therefore, for purposes of illustration and description, the foregoing description of specific embodiments herein is presented. These descriptions are not intended to be exhaustive or to limit the embodiments to the precise forms disclosed. It will be apparent to those skilled in the art that many modifications and variations are possible in light of the teachings above. Furthermore, when used herein to refer to the location of components, the terms above and below, or their synonyms, do not necessarily refer to absolute locations relative to external references, but rather to the relative locations of the components with reference to the accompanying drawings.

[0058] Furthermore, the foregoing figures and descriptions include numerous concepts and features that can be combined in various ways to achieve a variety of beneficial effects and advantages. Therefore, features, components, elements, and / or concepts from various different figures can be combined to produce embodiments or implementations that are not necessarily shown or described in this specification. Moreover, in any particular embodiment and / or implementation, not all features, components, elements, and / or concepts shown in the specific figures or descriptions are necessarily required. It should be understood that such embodiments and / or implementations fall within the scope of this specification.

Claims

1. A piezoelectric jet microbeam device, characterized in that, include: A liquid supply assembly is provided with a liquid supply chamber and a guide plate that closes the liquid supply chamber. The guide plate is provided with a plurality of guide holes spaced apart. The liquid outlet assembly is equipped with multiple spray holes spaced apart; Multiple piezoelectric microneedles are installed on the guide plate. Each piezoelectric microneedle is a tubular structure composed of at least two piezoelectric resonators. One end of the piezoelectric microneedle is fixedly connected to the guide plate and communicates with the liquid supply chamber. The other end of the piezoelectric microneedle is fixedly connected to the liquid outlet assembly and communicates with the corresponding injection hole. A control circuit electrically connected to each of the piezoelectric resonators is used to control the energizing parameters of each of the piezoelectric resonators, and the liquid in each piezoelectric microneedle is ejected outward from the injection hole based on the excitation signal of the piezoelectric resonator; The piezoelectric resonator on each piezoelectric microneedle can be controlled independently, and the piezoelectric resonators of multiple piezoelectric microneedles form a matrix inkjet area.

2. The piezoelectric jet microbeam device according to claim 1, characterized in that, The first electrode of the piezoelectric resonator contained in the piezoelectric microneedle extends along the outer sidewall to the first end, and the second electrode of the piezoelectric resonator extends along the inner sidewall to the first end. The first end of the piezoelectric microneedle is glued and fixed to the guide plate, and the first electrode and the second electrode are correspondingly connected to the control circuit.

3. The piezoelectric jet microbeam device according to claim 2, characterized in that, The control circuit is attached to the surface of the guide plate.

4. The piezoelectric jet microbeam device according to claim 2, characterized in that, The control circuit is equipped with a delay circuit, which is used to control the on / off time of different piezoelectric resonators of the same piezoelectric microneedle; or, the delay circuit is used to control the on / off time of different piezoelectric resonators of adjacent piezoelectric microneedles, so that liquid jetting forms a linear bundle during the movement of the piezoelectric jetting microbeam device.

5. The piezoelectric jet microbeam device according to claim 1, characterized in that, The flow guide holes are distributed in at least two rows parallel to the length of the flow guide plate, and the piezoelectric microneedles correspond one-to-one with the flow guide holes.

6. The piezoelectric jet microbeam device according to claim 5, characterized in that, The guide hole is conical in shape, with the larger end of the guide hole facing the liquid supply chamber, and the central hole of the piezoelectric microneedle is aligned with the smaller end of the guide hole.

7. The piezoelectric jet microbeam device according to claim 5, characterized in that, The center distance between two adjacent flow guide holes is less than or equal to twice the shaft diameter of the piezoelectric microneedle.

8. The piezoelectric jet microbeam device according to claim 1, characterized in that, The liquid dispensing assembly includes a base and a microporous baffle connected to the base. The injection hole is disposed on the microporous baffle, and the base is detachably connected to the liquid supply assembly.

9. The piezoelectric jet microbeam device according to claim 8, characterized in that, The diameter of the jet orifice is smaller than the diameter of the piezoelectric microneedle.

10. The piezoelectric jet microbeam device according to claim 1, characterized in that, The liquid supply assembly includes an ink tank, an inlet channel and an outlet channel disposed in the ink tank, the inlet channel and the outlet channel being connected to the liquid supply chamber and guiding the liquid to flow along the liquid supply chamber, and the guide plate being fixed to the bottom of the ink tank.

11. The piezoelectric jet microbeam device according to claim 1, characterized in that, The piezoelectric jet microbeam device also includes a metal frame located between the liquid supply component and the liquid outlet component, the metal frame having an annular space, and the piezoelectric microneedles located within the annular space.

12. The piezoelectric jet microbeam device according to claim 11, characterized in that, The piezoelectric jet microbeam device also includes at least one heating band attached to the metal frame, and the heating band is electrically connected to the control circuit.

13. The piezoelectric jet microbeam device according to claim 1, characterized in that, The liquid contains nano-sized metal particles.

14. A precision coating and printing device, characterized in that, The device includes a main body and a piezoelectric jet microbeam device as described in any one of claims 1 to 13, wherein the main body is configured with a coating space and the liquid outlet component jets liquid toward the coating space.

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