Sealing valve and semiconductor inspection apparatus

Abstract

This application belongs to the field of sealing valve technology, and particularly relates to a sealing valve and semiconductor testing equipment. The sealing valve includes a sealing component, a first cylindrical assembly, and a driving device. A portion of the driving device is disposed within and movably connected to the first cylindrical assembly. The sealing component is located outside the first cylindrical assembly and connected to the driving device. The driving device can drive the sealing component to move away from the first cylindrical assembly along a first direction to a reversing position. When the sealing component is in the reversing position, the driving device can move relative to the first cylindrical assembly and drive the sealing component to move along a second direction. Applying this sealing valve to the sealing of a transmitter chamber allows switching between an open and sealed state. The direction switching of the sealing component is achieved through the coordinated movement of the first cylindrical assembly and the driving device, thus achieving the purpose of sealing the passageway, resulting in better sealing performance and longer service life.

Description

Technical Field

[0001] This application belongs to the field of sealing valve technology, and in particular relates to a sealing valve and semiconductor testing equipment. Background Technology

[0002] With the rapid development of semiconductor testing equipment in the semiconductor industry chain, the requirements for vacuum are becoming increasingly stringent, especially for the electron gun in scanning electron microscopes.

[0003] Currently, sealing valves are used to seal the environment surrounding the electron gun, allowing the environment to switch between sealed and unsealed states. In existing sealing valves, a pressure block is installed at the electron beam passage. By driving the sealing block against the pressure block, the sealing block, under the counterforce of the pressure block, covers the electron beam passage, thus achieving a seal.

[0004] However, the sliding friction between the pressure block and the sealing block can easily cause debris to form, which can then adhere to the sealing block and reduce its sealing performance. Summary of the Invention

[0005] This application provides a sealing valve and a semiconductor testing device to solve the technical problem in the prior art where friction-generated debris reduces sealing performance.

[0006] According to one aspect of this application, a sealing valve is provided, including a sealing assembly, a first cylindrical assembly, and a driving device. A portion of the driving device is disposed within the first cylindrical assembly and movably connected to the first cylindrical assembly. The sealing assembly is located outside the first cylindrical assembly and connected to the driving device. The driving device can drive the sealing assembly to move away from the first cylindrical assembly along a first direction to a reversing position. When the sealing assembly is in the reversing position, the driving device can move relative to the first cylindrical assembly and drive the sealing assembly to move along a second direction.

[0007] In an optional embodiment of this application, the driving device includes a driving mechanism and a compensation mechanism. Part of the driving mechanism is disposed within the first cylindrical assembly, and the compensation mechanism is disposed within the first cylindrical assembly and connected between the first cylindrical assembly and the driving mechanism in a first direction. The sealing assembly is connected to the driving mechanism, and the driving mechanism can drive the sealing assembly to move to a reversing position along the first direction. When the sealing assembly is in the reversing position, the driving mechanism can move relative to the first cylindrical assembly and activate the compensation mechanism, thereby driving the sealing assembly to move along a second direction.

[0008] In an optional embodiment of this application, the driving mechanism includes a second cylindrical assembly and a movable rod assembly. The second cylindrical assembly is disposed within and movably connected to the first cylindrical assembly, and the sealing assembly is connected to the movable rod assembly. The movable rod assembly passes through the first cylindrical assembly and the second cylindrical assembly and can move along a first direction to abut against the first cylindrical assembly, thereby placing the sealing assembly in a reversing position. When the sealing assembly is in the reversing position, the second cylindrical assembly can move relative to the first cylindrical assembly along a third direction, causing the compensation mechanism to activate and limit the movement of the movable rod assembly along a second direction. The first direction is perpendicular to the second direction, and the third direction intersects both the first and second directions.

[0009] In an optional embodiment of this application, the compensation mechanism includes a movable plate and a second elastic member. The movable plate is disposed between the first cylindrical assembly and the second cylindrical assembly and abuts against the first cylindrical assembly. The second elastic member is clamped between the movable plate and the second cylindrical assembly in a first direction.

[0010] In an optional embodiment of this application, the drive mechanism further includes a first elastic element and a control valve. The movable rod assembly includes a piston rod, which passes through the second cylindrical assembly and includes a piston section. The piston section is disposed within the second cylindrical assembly and divides the cavity of the second cylindrical assembly into a first chamber and a second chamber. The first elastic element is disposed within the first chamber and sandwiched between the piston section and the second cylindrical assembly. The control valve is connected to the second cylindrical assembly and communicates with the second chamber.

[0011] In an optional embodiment of this application, the movable rod assembly further includes an abutment member connected to the piston rod; in the reversing position, the abutment member abuts against the first cylinder assembly.

[0012] In an optional embodiment of this application, the second cylindrical assembly has a guide groove on its side wall, which extends in a third direction; the first cylindrical assembly includes a first cylindrical body, a capping assembly, a guide post, and a deformation sleeve, the capping assembly is connected to the end of the first cylindrical body away from the sealing assembly, the deformation sleeve is connected to the end of the first cylindrical body near the sealing assembly, the movable rod group passes through the deformation sleeve and is connected to the deformation sleeve; the guide post is connected to the side wall of the first cylindrical body and is housed in the guide groove, and can move along the guide groove.

[0013] In an optional embodiment of this application, the capping assembly includes a first cap and multiple rolling elements, all of which are disposed on the first cap; the compensation mechanism abuts against the rolling elements.

[0014] In an optional embodiment of this application, the sealing assembly includes a sealing block and a first sealing ring; the sealing block is connected to the driving device, and the first sealing ring is connected to the side wall of the sealing block in a second direction.

[0015] According to another aspect of this application, a semiconductor testing device is provided, including a transfer chamber, an emission source chamber, a sample testing chamber, and the aforementioned sealing valve; the transfer chamber includes a main channel and a sub-channel, a partition is provided in the main channel to divide the main channel into a first main channel and a second main channel, and the sub-channel is connected to the second main channel; the first main channel is connected to the emission source chamber, the second main channel is connected to the sample testing chamber, and the partition is provided with a passage to connect the first main channel and the second main channel; a first cylindrical assembly is connected to the side wall of the transfer chamber and partially located outside the transfer chamber, a portion of the driving device extends into the second main channel, and a sealing assembly is located in the second main channel, wherein in the reversing position, the projection of the sealing assembly in the second direction covers the passage.

[0016] In the sealing valve provided in this application, the driving device provides power to drive the sealing assembly to move in the first direction to the reversing position. When the sealing assembly is in the reversing position, the driving device and the first cylinder assembly can move relative to each other to drive the sealing assembly to move in the second direction, thereby allowing the sealing assembly to switch between moving in the first direction and moving in the second direction. In this way, the transition chamber on which the sealing valve is installed can open and close the passage, so that the emission source chamber can switch between the open state and the sealed state.

[0017] Compared to existing technologies, there is no need to add pressure blocks in the passage of the partition to cooperate with the sealing components, thus avoiding the occurrence of debris due to friction. As a result, the sealing valve provided by this application has better sealing effect and service life. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application; those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0019] Figure 1 This is a schematic diagram of a semiconductor testing apparatus provided according to one embodiment of this application;

[0020] Figure 2 for Figure 1 Cross-sectional view of the mating structure of the center-seal valve and the transition chamber;

[0021] Figure 3 for Figure 2 Cross-sectional view of a center-sealed valve;

[0022] Figure 4 for Figure 3 A schematic diagram of the sealing valve in another state;

[0023] Figure 5 for Figure 1 A 3D view of the sealed valve in the image;

[0024] Figure 6 for Figure 5 Exploded view of a centrally sealed valve.

[0025] The attached figures are labeled as follows:

[0026] 100. Sealing valve; 10. Sealing assembly; 11. Sealing block; 12. First sealing ring;

[0027] 20. First cylinder assembly; 21. First cylinder; 22. Cover assembly; 221. First cover; 222. Rolling element; 23. Guide post; 24. Deformation sleeve; 25. Limiting element; 26. Cover plate;

[0028] 30. Drive unit; 31. Drive mechanism; 311. Second cylinder assembly; 3111. Second cylinder; 3112. Second cover; 3113. Fourth sealing ring; 312. Movable rod assembly; 3121. Piston rod; 31211. Piston section; 31212. Second sealing ring; 3122. First adapter rod; 3123. Second adapter rod; 3124. Abutment member; 313. First elastic member; 314. Control valve;

[0029] 32. Compensation mechanism; 321. Movable plate; 322. Second elastic element;

[0030] 40. Third sealing ring; 51. Bolt; 52. Screw; 60. Adapter block; 71. Fifth sealing ring; 72. Sixth sealing ring; 80. Plug;

[0031] A1, mounting cavity; A2, annular cavity; B, guide groove; R1, first chamber; R2, second chamber; H0, through hole;

[0032] 201, partition; D, passageway; C1, emission source chamber; C2, sample detection chamber; C3, transfer chamber; C31, main channel; C311, first main channel; C312, second main channel; C32, sub-channel. Detailed Implementation

[0033] In the description of this application, it should be understood that the use of terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" to indicate orientation or positional relationship, unless otherwise specified, is understood to be based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0034] Furthermore, features specified with "first" or "second" for descriptive purposes only should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Features specified with "first" or "second" may explicitly or implicitly include at least one of the specified features. The description of "multiple" generally means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can be a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0036] In the description of this specification, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0037] Figure 1 This is a schematic diagram of a semiconductor testing apparatus according to one embodiment of this application. Figure 2 for Figure 1A cross-sectional view of the mating structure of the center-sealed valve 100 and the transition chamber C3. (See also...) Figure 1 and Figure 2 The semiconductor testing equipment includes a sealing valve 100, a transfer chamber C3, an emission source chamber C1, and a sample testing chamber C2.

[0038] The transfer chamber C3 includes a main channel C31 and a sub-channel C32. The main channel C3 is provided with a partition 201 to divide the main channel C31 into a first main channel C311 and a second main channel C312. The sub-channel C32 is connected to the second main channel C312.

[0039] The first main channel C311 connects to the emission source chamber C1, and the second main channel C312 connects to the sample detection chamber C2. The partition 201 is provided with a passageway D to connect the first main channel C311 and the second main channel C312.

[0040] Specifically, the electron gun is one of the main components of the scanning electron microscope and is installed in the emission source chamber C1. The sample to be tested, such as a wafer, can be placed in the sample detection chamber C2. The electron beam emitted by the electron gun is accelerated and deflected, and then passes through the first main channel C311, the channel D, and the second main channel C312 before irradiating the sample to be tested located in the sample detection chamber R2.

[0041] As can be seen, the emission source chamber C1 and the sample detection chamber C2 are connected via a transition chamber C3. In practical applications, one scenario is that when debugging the scanning electron microscope before connecting the emission source chamber C1 and the sample detection chamber C2, it is necessary to seal the emission source chamber C1 to perform vacuum evacuation. Another scenario is that when changing samples after the sample to be detected has been completed, it is necessary to seal the emission source chamber C1 to ensure vacuum.

[0042] In practical applications, an ion pump is connected to the emission source chamber C1 to perform evacuation, ensuring that the electron gun located in the emission source chamber C1 is in a vacuum environment. A vacuum pump should be connected to the sample detection chamber C2 to perform evacuation, ensuring that the semiconductor sample located in the detection chamber C2 is in a vacuum environment.

[0043] In this embodiment, by closing the passage D with the sealing valve 100 to seal the source chamber C1, and connecting the branch channel C32 to another vacuum pump, a vacuum can be achieved in the first main channel C311, preventing the transfer chamber C3 from contaminating the source chamber C1 and ensuring that the electron gun is in a vacuum environment. When the sealing valve 100 is open, the passage D can be opened to allow the electron beam to pass through and irradiate the sample to be tested in the sample detection chamber C2.

[0044] Figure 3 for Figure 2 A sectional view of the center-sealed valve 100, combined with... Figure 1It can be seen that, Figure 3 In the diagram, the sealing assembly 10 of the sealing valve 100 is in the open position, and in this position, the sealing assembly 10 does not cover the passage D. (See also...) Figures 1 to 3 The sealing valve 100 includes a sealing assembly 10, a first cylindrical assembly 20, and a drive device 30. Part of the drive device 30 is disposed inside the first cylindrical assembly 20 and is movably connected to the first cylindrical assembly 20, while the sealing assembly 10 is located outside the first cylindrical assembly 20 and connected to the drive device 30.

[0045] The first cylindrical assembly 20 is connected to the side wall of the transfer chamber C3 and is partially located outside the transfer chamber C3. A part of the drive device 30 disposed inside the first cylindrical assembly 20 is located outside the transfer chamber C3, and another part of the drive device 30 extends out of the first cylindrical assembly 20 and into the second main channel C312. The sealing assembly 10 is connected to the part of the drive device 30 that extends out of the first cylindrical assembly 20 and is located in the second main channel C312 of the transfer chamber.

[0046] Specifically, the drive device 30 can drive the sealing assembly 10 to move away from the first cylindrical assembly 20 along a first direction to a reversing position. In the reversing position, the sealing assembly 10 is located on one side of the passage D in a second direction, and the projection of the sealing assembly 10 in the second direction at least covers the passage D. In addition, when the sealing assembly 10 is in the reversing position, the drive device 30 can move relative to the first cylindrical assembly 20 and drive the sealing assembly 10 to move along the second direction.

[0047] In this embodiment, the first cylindrical assembly 20 can be fixedly installed on the side wall of the transition chamber C3, thereby enabling the sealing valve 100 to be installed on the side wall of the transition chamber C3. A portion of the drive device 30 can pass through the first cylindrical assembly 20 and the transition chamber C3 to connect with the sealing assembly 10 in the second main channel C312. The drive device 30 provides a degree of freedom of movement to drive the sealing assembly 10 to move.

[0048] Specifically, the drive device 30 can move the sealing assembly 10 along the first direction to a reversing position. This reversing position is understood to be the limit position that the sealing assembly 10 can move away from the first cylindrical assembly 20 in the first direction. At this reversing position, the sealing assembly 10 can no longer move away from the first cylindrical assembly 20 along the first direction, and the projection of the sealing assembly 10 in the second direction covers the passageway D. As the drive device 30 continues to operate, the relative movement between the drive device 30 and the first cylindrical assembly 20 causes the sealing assembly 10 to move along the second direction to seal the passageway D.

[0049] As can be seen, in the sealing valve 100 provided in this application, the driving device 30 is the power source and works with the first cylinder assembly 20 to drive the sealing assembly 10 to directly open and close the passage D, so that the emission source chamber C1 switches between the open state and the sealed state. Compared with the prior art, it is not necessary to add a pressure block at the passage D of the partition 201 to cooperate with the sealing assembly 10, thus avoiding the occurrence of debris due to friction. Therefore, the sealing valve 100 provided in this application has a better sealing effect and service life.

[0050] In some alternative embodiments, the drive device 30 includes a drive mechanism 31 and a compensation mechanism 32. Part of the drive mechanism 31 is disposed within the first cylindrical assembly 20, and the compensation mechanism 32 is disposed within the first cylindrical assembly 20 and connected between the first cylindrical assembly 20 and the drive mechanism 31 in a first direction.

[0051] The sealing assembly 10 is connected to the drive mechanism 31, which can drive the sealing assembly 10 to move in a first direction to a reversing position. When the sealing assembly 10 is in the reversing position, the drive mechanism 31 can move relative to the first cylinder assembly 20 and activate the compensation mechanism 32, thereby driving the sealing assembly 10 to move in a second direction.

[0052] In this embodiment, the driving device 30 mainly consists of a driving mechanism 31 and a compensation mechanism 32. The driving mechanism 31 provides a driving force in the first direction, causing the sealing assembly 10 to move along the first direction to a reversing position. As can be seen from the above, after the sealing assembly 10 is in the reversing position, the sealing assembly 10 can no longer move along the first direction. As the driving mechanism 31 continues to provide the driving force in the first direction, the driving mechanism 31 moves relative to the first cylindrical assembly 20, causing the compensation mechanism 32, which is sandwiched between the first cylindrical assembly 20 and the driving mechanism 31, to operate. The compensation mechanism 32 cooperates with the driving mechanism 31 and the first cylindrical assembly 20 to convert the first degree of freedom in the first direction provided by the driving mechanism 31 to the sealing assembly 10 into a second degree of freedom in the second direction.

[0053] Figure 4 for Figure 3 The diagram shows the sealing valve 100 in another state, where the sealing component 10 is in a closed position. In this closed position, the sealing component 10 covers the passage D, and the transmitter chamber C1 is sealed. Further, the drive mechanism 31 includes a second cylindrical assembly 311 and a movable rod assembly 312. The second cylindrical assembly 311 is disposed within and movably connected to the first cylindrical assembly 20, and the sealing component 10 is connected to the movable rod assembly 312. The movable rod assembly 312 passes through the first cylindrical assembly 20 and the second cylindrical assembly 311, and can move along a first direction to abut against the first cylindrical assembly 20, causing the sealing component 10 to be in a reversing position.

[0054] With the sealing assembly 10 in the reversing position, the second cylinder assembly 311 can move relative to the first cylinder assembly 20 in a third direction, causing the compensation mechanism 32 to activate and limit the movement of the movable rod assembly 312 in a second direction. The first direction is perpendicular to the second direction, and the third direction intersects both the first and second directions.

[0055] The portion of the drive device 30 located inside the first cylindrical assembly 20 refers to the portion of the compensation mechanism 32, the second cylindrical assembly 311, and the movable rod assembly 312. The portion of the drive device 30 located outside the first cylindrical assembly 20 refers to the portion of the movable rod assembly 312 extending outside the first cylindrical assembly 20.

[0056] The movable rod assembly 312 can move along the first direction, thus driving the sealing assembly 10 to move along the first direction. The movable rod assembly 312 cooperates with the first cylinder assembly 20 to limit its movement, determining the limit position that the movable rod assembly 312 can move away from the first cylinder assembly 20 along the first direction, which is the reversing position of the sealing assembly 10.

[0057] In the reversing position, as the drive mechanism 31 continues to operate, the movable rod assembly 312 can no longer move along the first direction, and the first cylinder assembly 20 and the second cylinder assembly 311 are movably connected, so the two can move relative to each other in the third direction.

[0058] During the relative movement of the first cylinder assembly 20 and the second cylinder assembly 311 in the third direction, the second cylinder assembly 311 drives the movable rod assembly 312 to move in the second direction, and acts on the compensation mechanism 32 to cause the compensation mechanism 32 to operate. In other words, the movement of the first cylinder assembly 20 and the second cylinder assembly 311 in the third direction can be decomposed into the movement of the movable rod assembly 312 in the second direction and the movement of the compensation mechanism 32.

[0059] As can be seen, in this embodiment, the movable rod assembly 312 has a first degree of freedom and a second degree of freedom to drive the sealing assembly 10 to move in the first and second directions. The movable rod assembly 312 cooperates with the first cylinder assembly 20 to determine the reversing position, thereby switching between the first and second direction movements.

[0060] Furthermore, the drive mechanism 31 also includes a first elastic element 313 and a control valve 314. The movable rod assembly 312 includes a piston rod 3121, which passes through the second cylindrical assembly 311 and includes a piston section 31211. The piston section 31211 is disposed within the second cylindrical assembly 311 and divides the cavity of the second cylindrical assembly 311 into a first chamber R1 and a second chamber R2.

[0061] The first elastic element 313 is disposed in the first chamber R1 and sandwiched between the piston section 31211 and the second cylinder assembly 311. The control valve 314 is connected to the second cylinder assembly 311 and communicates with the second chamber R2.

[0062] It should be understood that the pressure exerted by the first elastic element 313 in the first chamber R1 on the piston section 31211 needs to be balanced with the pressure exerted by the fluid in the second chamber R2 on the piston section 31211. Therefore, by controlling the fluid entering the second chamber R2 through the control valve 314, the fluid pressure in the second chamber R2 can be adjusted, causing the first elastic element 313 to deform, thus ensuring that the pressures exerted by both on the piston section 31211 remain balanced. Accordingly, the piston section 31211 is displaced in the first direction, that is, the piston rod 3121 can move in the first direction.

[0063] Figure 5 for Figure 1 A three-dimensional view of the sealing valve 100 in the diagram. Figure 6 for Figure 5 Exploded view of the central sealing valve 100. Please refer to... Figure 4 and Figure 5 In specific applications, the piston rod 3121 also includes a second sealing ring 31212, which is fitted over the piston section 31211 to ensure that the first chamber R1 and the second chamber R2 are independent of each other, preventing fluid leakage from the second chamber R2 into the first chamber R1. Additionally, the control valve 314 is a speed regulating valve that controls the speed at which fluid enters and exits the second chamber R2, i.e., the opening and closing speed of the sealing valve 100. The control valve 314 is mounted on the second cylinder assembly 311 via an adapter block 60 and a fifth sealing ring 71.

[0064] As can be seen, in this embodiment, the drive mechanism 31 utilizes the elastic force of the first elastic element 313 in the first chamber R1 and the fluid pressure in the second chamber R2 to drive the piston rod 3121. In specific applications, air enters the second chamber R2 through the control valve 314, meaning the drive mechanism 31 is a pneumatic mechanism, specifically a single-acting cylinder, but it can also be a hydraulic mechanism, a double-acting cylinder, etc.

[0065] Please see Figure 4 In some alternative embodiments, the movable rod assembly 312 further includes an abutment 3124 connected to the piston rod 3121. In the reversing position, the abutment 3124 abuts against the first cylinder assembly 20.

[0066] Specifically, the abutment 3124 is fitted over the end of the piston rod 3121 near the sealing assembly 10, and the abutment 3124 can move with the piston rod 3121 in a first direction. When the abutment 3124 abuts against the first cylinder assembly 20, the piston rod 3121 cannot continue to move in the first direction, but the piston rod 3121 can move in a second direction.

[0067] In practical applications, the abutment member 3124 is a plastic washer ring. After the piston rod 3121 drives the abutment member 3124 to abut against the first cylindrical assembly 20, the abutment member 3124 can play a buffering role, preventing the piston rod 3121 from impacting the first cylindrical assembly 20, thus achieving a buffering effect. Of course, during the movement of the piston rod 3121 in the second direction, there is sliding friction between the abutment member 3124 and the first cylindrical assembly 20, so it is necessary to ensure that the abutment member 3124 has a certain degree of wear resistance.

[0068] In some alternative embodiments, the compensation mechanism 32 includes a movable plate 321 and a second elastic member 322. The movable plate 321 is disposed between the first cylindrical assembly 20 and the second cylindrical assembly 311 and abuts against the first cylindrical assembly 20. The second elastic member 322 is sandwiched between the movable plate 321 and the second cylindrical assembly 311 in a first direction.

[0069] As described above, when the sealing assembly 10 is in the reversing position, the movable rod assembly 312 can no longer drive the sealing assembly 10 to move away from the first cylindrical assembly 20 along the first direction. The second cylindrical assembly 311 moves relative to the first cylindrical assembly 20 in the third direction. At this time, the second elastic member 322 is compressed to absorb the motion component in the first direction of the relative motion between the second cylindrical assembly 311 and the first cylindrical assembly 20, so that the second cylindrical assembly 311 only exhibits the motion component in the second direction. This allows the second cylindrical assembly 311 to drive the movable rod assembly 312 to move along the second direction, thereby causing the sealing assembly 10 to move along the second direction. It can be seen that the compensation mechanism 32 compensates for the motion component in the first direction through the second elastic member 322.

[0070] Please see Figure 5 and Figure 6 In some optional embodiments, the second cylindrical assembly 311 has a guide groove B on its sidewall, which extends in a third direction. The first cylindrical assembly 20 includes a first cylindrical body 21, a capping assembly 22, a guide post 23, and a deformable sleeve 24. The capping assembly 22 is connected to the end of the first cylindrical body 21 away from the sealing assembly 10, and the deformable sleeve 24 is connected to the end of the first cylindrical body 21 near the sealing assembly 10. The movable rod assembly 312 passes through and is connected to the deformable sleeve 24. The guide post 23 is connected to the sidewall of the first cylindrical body 21 and is housed in the guide groove B, and is movable along the guide groove B.

[0071] In this embodiment, the guide post 23 disposed on the first cylinder 21 and the guide groove B disposed on the second cylinder assembly 311 cooperate to enable the second cylinder assembly 311 to have a degree of freedom of movement in the third direction relative to the first cylinder assembly 20.

[0072] It should be noted that the deformable sleeve 24 is capable of extension, retraction, and swinging. Therefore, during the movement of the movable rod assembly 312 along the first direction, the deformable sleeve 24 can extend and retract along the first direction; during the movement of the movable rod assembly 312 along the second direction, the deformable sleeve 24 can swing.

[0073] Please see Figure 5 In specific applications, the deformation sleeve 24 is a bellows, but it is not limited to this; for example, it can also be a rubber hose. In addition, the end of the first cylinder 21 near the sealing assembly 10 is designed with a flange structure, and the deformation sleeve 24 is connected to the flange end of the first cylinder 21.

[0074] Please combine Figure 2 A through hole H0 is provided on the side wall of the transition chamber C3. The flange end of the first cylinder 21 is connected to the side wall of the transition chamber C3 by bolts 51, allowing the deformation sleeve 24 to extend into the through hole H0. The movable rod assembly 312 passes through the through hole H0 and extends into the second main channel C312. The deformation sleeve 24 separates the inner cavity of the first cylinder assembly 20 from the second main channel C312, ensuring the airtightness of the transition chamber C3. In addition, a third sealing ring 40 is also sandwiched between the flange end of the first cylinder 21 and the side wall of the transition chamber C3 to ensure airtightness.

[0075] Furthermore, there are multiple guide grooves B, which are arranged in parallel and spaced apart. There are also multiple guide posts 23, each corresponding to a specific guide groove B. In this embodiment, the cooperation between the multiple guide posts 23 and the guide grooves B ensures the stability of the second cylindrical assembly 311 and the first cylindrical assembly 20 in the third direction.

[0076] Please see Figure 5 and Figure 6 In specific applications, the second cylindrical assembly 311 has multiple guide grooves B on its opposite side walls. The first cylindrical assembly 20 also includes a cover plate 26, which is disposed on the opposite side walls of the first cylindrical assembly 21. The opposite side walls of the first cylindrical assembly 21 have through holes for installing guide posts 23. The cover plate 26 can cover the through holes for installing guide posts 23, ensuring the sealing of the first cylindrical assembly 20.

[0077] To facilitate understanding of this solution, it is described in detail below with reference to the accompanying drawings. Please refer to... Figures 1 to 3In the illustrated embodiment, the sealing assembly 10 is in the open position, that is, the sealing assembly 10 fully opens the passage D. As the fluid pressure in the second chamber R2 decreases, the first elastic member 313 unfolds, causing the piston rod 3121 to move in the first direction. That is, the movable rod group 312 drives the sealing assembly 10 to move in the first direction, and the corresponding terrain deformation sleeve 24 extends until the abutment member 3124 abuts against the first cylinder 21.

[0078] When the abutting member 3124 abuts against the first cylinder 21, the movable rod assembly 312 cannot continue to move in the first direction. As the fluid pressure in the second chamber R2 continues to decrease, the first elastic member 313 acts on the second cylinder assembly 311, causing the second cylinder assembly 311 and the first cylinder assembly 20 to move relative to each other in the third direction. That is, the guide post 23 on the first cylinder 21 slides in the guide groove B on the second cylinder assembly 311.

[0079] Please see Figure 4 Under the action of the second cylinder assembly 311, the second elastic element 322 is compressed, and the movement of the second cylinder assembly 311 in the first direction is absorbed by the second elastic element 322, so that the second cylinder assembly 311 only exhibits movement in the second direction. Correspondingly, it drives the movable rod assembly 312, the second elastic element 322 and the movable plate 321 to move in the second direction. The movable rod assembly 312 drives the sealing assembly 10 to move in the second direction, so that the sealing assembly 10 covers the passage D, that is, the sealing assembly 10 is in the closed position.

[0080] As can be seen, the above embodiments illustrate the process of switching the transmitter chamber C1 from the open state to the sealed state. Of course, switching from the sealed state to the open state is a reverse process, which will not be repeated here.

[0081] In some alternative embodiments, the capping assembly 22 includes a first cap 221 and a plurality of rolling elements 222, all disposed on the first cap 221. The compensation mechanism 32 abuts against the rolling elements 222.

[0082] As can be seen from the above, the compensation mechanism 32 includes a movable plate 321 and a second elastic member 322, wherein the movable plate 321 abuts against the rolling member 222, thereby reducing friction and ensuring the service life of the sealing valve 100.

[0083] Please see Figure 4In some optional embodiments, the second cylindrical assembly 311 includes a second cylindrical body 3111 and a second cap 3112. The second cap 3112 is connected to the end of the second cylindrical body 3111 away from the sealing assembly 10 and has a mounting cavity A1 and an annular cavity A2, the annular cavity A2 surrounding the outside of the mounting cavity A1. A portion of the first elastic member 313 is disposed in the annular cavity A2, a portion of the second elastic member 322 is disposed in the mounting cavity A1, and one end of the piston rod 3121 passes through the mounting cavity A1 and the second elastic member 322.

[0084] Specifically, the second cover 3112 has two cavities, an inner and an outer cavity, which are respectively the mounting cavity A1 and the annular cavity A2. One end of the first elastic member 313 abuts against the piston section 31211, and the other end abuts against the second cover 3112 and is housed in the annular cavity A2 for limiting and preventing the first elastic member 313 from shaking.

[0085] One end of the second elastic member 322 abuts against the movable plate 321, and the other end abuts against the second cover 3112 and is housed in the mounting chamber A1 for limiting its position and preventing it from shaking. In addition, the second elastic member 322 is sleeved on the piston rod 3121 and is guided by the piston rod 3121.

[0086] In specific applications, the second elastic element 322 is a compression spring, but it is not limited to this; for example, it can also be a rubber elastic pad. The second cylinder assembly 311 also includes a fourth sealing ring 3113, which is disposed on the second cylinder 3111 and sleeved on the piston rod 3121 to determine the sealing performance of the chamber R2.

[0087] In some optional embodiments, the movable rod assembly 312 further includes a first adapter rod 3122 and a second adapter rod 3123, with the piston rod 3121, the first adapter rod 3122, and the second adapter rod 3123 sequentially spliced ​​along a first direction. The sealing assembly 10 is connected to the second adapter rod 3123, and the first adapter rod 3122 is movably connected to the first cylinder assembly 20.

[0088] In this embodiment, the movable rod assembly 312 is a three-segment splicing structure. The two ends of the first adapter rod 3122 are respectively connected to the piston rod 3121 and the second adapter rod 3123, and the first adapter rod 3122 is connected to the deformation sleeve 24, thereby realizing a movable connection with the first cylinder assembly 20. The sealing assembly 10 is connected to the end of the second adapter rod 3123 away from the first cylinder assembly 20.

[0089] Please see Figure 5 In some alternative embodiments, the sealing assembly 10 includes a sealing block 11 and a first sealing ring 12. The sealing block 11 is connected to the drive device 30, and the first sealing ring 12 is connected to the sidewall of the sealing block 11 in a second direction.

[0090] With the transmitter chamber C1 sealed, the sealing assembly 10 covers the passage D, and the first sealing ring 12 is sandwiched between the sealing block 11 and the partition 201 to ensure a tight seal. In specific applications, the sealing assembly 10 is connected to the second adapter rod 3123 via screws 52.

[0091] In some optional embodiments, the first cylindrical assembly 20 further includes a limiting member 25, which is connected to the first cylindrical body 21 and abuts against the second cylindrical assembly 311, specifically against the second cylindrical body 3111.

[0092] In practical applications, there are multiple limiting members 25, which are set screws. After the second cylinder assembly 311 drives the movable rod assembly 312 to put the sealing assembly 10 in the closed position, the limiting member 25 is screwed in until it abuts against the second cylinder assembly 311, which can limit the position of the second cylinder assembly 311 in the second direction, so that the sealing assembly 10 is kept in the closed position and the sealing stability is improved.

[0093] In practical applications, a spare inlet is provided on the side wall of the second cylinder 3111, which is sealed by the plug 80 in conjunction with the sixth sealing ring 72.

[0094] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A sealed valve, characterized by The device includes a sealing assembly, a first cylindrical assembly, and a driving device. A portion of the driving device is disposed within the first cylindrical assembly and is movably connected to the first cylindrical assembly. The driving device includes a driving mechanism and a compensation mechanism. A portion of the driving mechanism is disposed within the first cylindrical assembly, and the compensation mechanism is disposed within the first cylindrical assembly and connected between the first cylindrical assembly and the driving mechanism in a first direction. The driving mechanism includes a second cylindrical assembly and a movable rod assembly. The second cylindrical assembly is disposed inside the first cylindrical assembly and is movably connected to the movable rod assembly. The sealing assembly is located outside the first cylindrical assembly and is connected to the movable rod assembly. The driving mechanism can drive the sealing assembly to move away from the first cylindrical assembly along the first direction to a reversing position. When the sealing assembly is in the reversing position, the second cylinder assembly can move relative to the first cylinder assembly in a third direction and cause the compensation mechanism to actuate to compensate for the movement component in the first direction, thereby limiting the movement of the movable rod assembly in the second direction and driving the sealing assembly to move in the second direction. Wherein, the first direction is perpendicular to the second direction, and the third direction intersects the first direction and the second direction.

2. The sealing valve according to claim 1, characterized in that, The movable rod assembly passes through the first cylinder assembly and the second cylinder assembly, and can move along the first direction to abut against the first cylinder assembly, so that the sealing assembly is in the reversing position.

3. The sealing valve according to claim 1, characterized in that, The compensation mechanism includes a movable plate and a second elastic member. The movable plate is disposed between the first cylindrical assembly and the second cylindrical assembly and abuts against the first cylindrical assembly. The second elastic member is sandwiched between the movable plate and the second cylindrical assembly in the first direction.

4. The sealing valve according to claim 2, characterized in that, The drive mechanism further includes a first elastic element and a control valve, and the movable rod assembly includes a piston rod, which passes through the second cylindrical assembly and includes a piston section. The piston section is disposed inside the second cylindrical assembly and divides the cylinder cavity of the second cylindrical assembly into a first chamber and a second chamber; The first elastic element is disposed in the first chamber and sandwiched between the piston section and the second cylinder assembly, and the control valve is connected to the second cylinder assembly and communicates with the second chamber.

5. The sealing valve according to claim 4, characterized in that, The movable rod assembly also includes an abutment member, which is connected to the piston rod; In the reversing position, the abutment abuts against the first cylindrical assembly.

6. The sealing valve according to claim 1, characterized in that, The second cylindrical assembly has a guide groove on its side wall, and the guide groove extends along the third direction; The first cylindrical assembly includes a first cylindrical body, a capping assembly, a guide post, and a deformable sleeve. The capping assembly is connected to the end of the first cylindrical body away from the sealing assembly, and the deformable sleeve is connected to the end of the first cylindrical body close to the sealing assembly. The movable rod group passes through the deformable sleeve and is connected to the deformable sleeve. The guide post is connected to the side wall of the first cylinder and housed in the guide groove, and can move along the guide groove.

7. The sealing valve according to claim 6, characterized in that, The capping assembly includes a first cap and a plurality of rolling elements, wherein the plurality of rolling elements are disposed on the first cap; The compensation mechanism abuts against the rolling element.

8. The sealing valve according to any one of claims 1 to 7, characterized in that, The sealing assembly includes a sealing block and a first sealing ring; The sealing block is connected to the driving device, and the first sealing ring is connected to the side wall of the sealing block in the second direction.

9. A semiconductor testing device, characterized in that, Includes a transfer chamber, a source emission chamber, a sample detection chamber, and a sealing valve according to any one of claims 1 to 8; The transfer chamber includes a main channel and a sub-channel. The main channel is provided with a partition to divide the main channel into a first main channel and a second main channel. The sub-channel is connected to the second main channel. The first main channel connects to the emission source chamber, the second main channel connects to the sample detection chamber, and the partition is provided with a passage to connect the first main channel and the second main channel; The first cylindrical assembly is connected to the side wall of the transition chamber and partially located outside the transition chamber. A portion of the drive device extends into the second main channel. The sealing assembly is located within the second main channel. In the reversing position, the projection of the sealing assembly in the second direction covers the passageway.

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