Quartz bell jar cleaning device and cleaning method

Abstract

The present invention discloses a quartz bell jar cleaning device and method, comprising a rotating table, an internal cleaning mechanism, an external cleaning mechanism, an internal fixing mechanism, and an external fixing mechanism. The internal fixing mechanism comprises a lower lifting rod, the upper end of which is mounted with a lower suction cup; the external fixing mechanism comprises an upper lifting rod, the lower end of which is mounted with an upper suction cup; the internal cleaning mechanism comprises an elastic rod, on which a plurality of cleaning cloths are sequentially mounted; and the structure of the external cleaning mechanism is the same as that of the internal cleaning mechanism. The quartz bell jar cleaning device and method of the present invention realize automatic cleaning of large quartz bell jars and can meet the internal and external cleaning needs of quartz bell jars of different specifications. The cleaning quality is guaranteed, the cleaning efficiency is improved, and the quartz bell jar is not easily damaged during the cleaning process.

Description

Technical Field

[0001] The invention belongs to the technical field of quartz bell jar cleaning equipment, and particularly relates to a quartz bell jar cleaning device and a cleaning method. Background Art

[0002] The quartz bell jar is a jar made of quartz and is widely used in the fields of medicine and chemical production. After the quartz bell jar is produced and after long-term use, it needs to be cleaned to remove stains on the inner and outer surfaces of the quartz bell jar. The existing cleaning process of the quartz bell jar is manual cleaning, which not only has low cleaning efficiency, but also is laborious and tedious, and the cleaning effect cannot be guaranteed. Especially large quartz bell jars are easily damaged during the cleaning process, causing losses. Therefore, it is necessary to design a cleaning device that can automatically clean the quartz bell jar based on the characteristics of the quartz bell jar. Summary of the Invention

[0003] In order to solve the above technical problems, the technical solution adopted by the present invention is: a quartz bell jar cleaning device includes a rotating table, an internal cleaning mechanism, an external cleaning mechanism, an internal fixing mechanism and an external fixing mechanism,

[0004] The rotating table is driven to rotate by a rotating drive mechanism, and a center hole is provided in the middle of the rotating table;

[0005] The internal fixing mechanism includes a lower lifting rod, the upper end of which is rotatably mounted with a lower suction cup, the lower lifting rod being driven up and down by a lower lifting drive mechanism, and the lower lifting rod being coaxially arranged with the center hole;

[0006] The external fixing mechanism includes an upper lifting rod, the lower end of which is rotatably mounted with an upper suction cup, the upper lifting rod is driven up and down by an upper lifting drive mechanism, and the upper lifting rod is coaxially arranged with the center hole;

[0007] The inner cleaning mechanism includes an elastic rod, the elastic rod passes through a center hole, a vertical movement driving mechanism for moving the elastic rod up and down and a horizontal movement driving mechanism for moving the elastic rod radially are installed at the lower end of the elastic rod, a plurality of cleaning cloths are sequentially arranged on one side of the elastic rod from bottom to top, the cleaning cloths are detachably mounted on a cleaning block, a plurality of nozzles are mounted on the cleaning block, the cleaning block is connected to the elastic rod through an elastic plate, a water pipe is mounted on the elastic rod, the nozzles are respectively connected to the water pipe through a hose, and the water pipe is connected to the cleaning liquid through a booster pump;

[0008] The structure of the external cleaning mechanism is the same as that of the internal cleaning mechanism. The cleaning cloth on the external cleaning mechanism faces the axis of the center hole. The upper end of the elastic rod of the external cleaning mechanism on the side away from the axis of the center hole is hinged with a push-pull cylinder. A fixed frame is provided on one side of the external cleaning mechanism. A cross rail is installed on the fixed frame. A transverse slider is installed on the transverse rail. The transverse slider is driven by the transverse cylinder to move on the transverse rail, and the push-pull cylinder is hinged on the transverse slider.

[0009] As a preferred embodiment of the above technical solution, the elastic rod is composed of a plurality of rod sections connected in sequence, adjacent rod sections are hinged, and spring sheets are connected between adjacent rod sections.

[0010] As a preferred embodiment of the above technical solution, both sides of the rod section are bent to form side guard plates, and a clamping groove is formed between the side guard plates. The water pipe is located in the clamping groove, and the clamping groove and the spring sheet are respectively located on both sides of the rod section.

[0011] As a preferred embodiment of the above technical solution, the vertical movement drive mechanism includes a vertical cylinder, the horizontal movement drive mechanism includes a horizontal cylinder, the lower end of the elastic rod of the internal cleaning mechanism is provided with a cross bar, one end of the cross bar is fixedly connected to the lower end of the elastic rod, and the other end is fixedly connected to the output shaft of the vertical cylinder, the output shaft of the horizontal cylinder is fixedly connected to a slider, the slider is installed on the slide rail, and the vertical cylinder is fixedly connected to the slider.

[0012] As a preferred embodiment of the above technical solution, the lower lifting drive mechanism and the upper lifting drive mechanism are lifting cylinders respectively, and vacuum tubes are installed inside the lower lifting rod and the upper lifting rod respectively. One end of the vacuum tube is connected to the lower suction cup or the upper suction cup, and the other end is connected to the vacuum pumping equipment, and a pressure relief valve is installed on the vacuum tube.

[0013] As a preferred embodiment of the above technical solution, the rotary drive mechanism includes a rotary motor, the rotary table is connected to a gear ring, the output shaft of the rotary motor is connected to a gear, and the gear is meshed with the gear ring.

[0014] As a preferred embodiment of the above technical solution, the rotating table is provided with a plurality of positioning blocks, the positioning blocks are coaxial with the central hole, and the outer side surfaces of the positioning blocks are gradually inclined toward the middle of the rotating table to form an inclined curved surface.

[0015] As a preferred embodiment of the above technical solution, hot air pipes are respectively installed on the elastic rods, the hot air pipes are connected to the fans, a heating device is provided on the hot air pipes, and a plurality of air nozzles are connected to the hot air pipes.

[0016] A quartz bell jar cleaning method, using the above-mentioned quartz bell jar cleaning device, comprises the following steps:

[0017] Step 1: Place the quartz bell jar on the rotating table, drive the upper lifting rod to descend by the upper lifting drive mechanism, and use the upper suction cup to suck the upper outer surface of the quartz bell jar to fix the quartz bell jar on the rotating table;

[0018] Step 2: The rotary drive mechanism drives the rotating table to rotate, driving the quartz bell jar to rotate together;

[0019] Step 3: The vertical movement driving mechanism drives the elastic rod of the inner cleaning mechanism to pass through the center hole and rise a certain distance, and then the horizontal movement driving mechanism drives the elastic rod of the inner cleaning mechanism to move radially, so that the cleaning cloth on the elastic rod is close to the inner wall of the quartz bell jar, the booster pump is started, and the cleaning liquid is sprayed from the nozzle on the elastic rod of the inner cleaning mechanism to the inner wall of the quartz bell jar, and the vertical movement driving mechanism drives the elastic rod of the inner cleaning mechanism to continue to rise an end distance, and utilizes the guiding effect of the arc-shaped top of the quartz bell jar to make the upper end of the elastic rod bend along the top of the quartz bell jar until the upper end of the elastic rod extends to the vertical inner wall on the other side of the quartz bell jar;

[0020] Step 4: After cleaning is completed, the vertical movement drive mechanism drives the elastic rod of the inner cleaning mechanism to gradually descend, and the elastic rod of the inner cleaning mechanism returns to a vertical state. The horizontal movement drive mechanism drives the elastic rod of the inner cleaning mechanism to move radially toward the center direction of the center hole, so that the cleaning cloth is away from the inner wall of the quartz bell jar;

[0021] Step 5. The rotary drive mechanism is closed, the quartz bell jar is stationary, and then the lower lifting drive mechanism drives the lower lifting rod in the internal fixing mechanism to rise, so that the lower suction cup sucks the top of the quartz bell jar from the inside; the upper suction cup is depressurized, and the upper lifting drive mechanism drives the upper lifting rod to rise, so that the upper suction cup is separated from the quartz bell jar; the horizontal movement drive mechanism in the external cleaning mechanism drives the elastic rod of the external cleaning mechanism to move radially, so that the cleaning cloth on the elastic rod is close to the outer wall of the quartz bell jar; the push-pull cylinder and the transverse movement cylinder are started, so that the upper end of the elastic rod in the external cleaning mechanism is attached to the top of the quartz bell jar; the booster pump is started, and the cleaning liquid is sprayed from the nozzle on the elastic rod of the external cleaning mechanism to the outer wall of the quartz bell jar; the rotary drive mechanism is turned on, the quartz bell jar rotates, and the outer surface of the quartz bell is cleaned;

[0022] Step 6. After the outer surface of the quartz bell jar is cleaned, the push-pull cylinder, the horizontal movement drive mechanism and the transverse movement cylinder are started, so that the elastic rod in the outer cleaning mechanism is away from the quartz bell jar; the lower suction cup is depressurized, and the lower lifting drive mechanism drives the lower lifting rod to descend, so that the lower suction cup is separated from the quartz bell jar, completing the cleaning of the quartz bell jar.

[0023] The beneficial effects of the present invention are as follows: the quartz bell jar cleaning device and cleaning method of the present invention realize automatic cleaning of large quartz bell jars and can meet the needs of cleaning the inside and outside of quartz bell jars of different specifications. The cleaning quality is guaranteed, the cleaning efficiency is improved, and the quartz bell jar is not easily damaged during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of the present invention;

[0025] Figure 2 is a schematic diagram of the cross-sectional structure of the elastic rod;

[0026] Figure 3It is a schematic diagram of the cross-sectional structure of the elastic rod at another angle;

[0027] Figure 4 It is a structural diagram of the rotating table;

[0028] Figure 5 It is a schematic diagram of the cross-sectional structure of the positioning block. DETAILED DESCRIPTION

[0029] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0032] like Figure 1-5 As shown, the quartz bell jar cleaning device includes a rotating table 1, an inner cleaning mechanism, an outer cleaning mechanism, an inner fixing mechanism and an outer fixing mechanism.

[0033] The rotating table 1 is driven to rotate by a rotating drive mechanism, and a central hole 2 is provided in the middle of the rotating table 1;

[0034] The internal fixing mechanism includes a lower lifting rod 3, the upper end of which is rotatably mounted with a lower suction cup 4, the lower lifting rod 3 is driven up and down by a lower lifting drive mechanism, and the lower lifting rod 3 is coaxially arranged with the center hole 2;

[0035] The external fixing mechanism includes an upper lifting rod 5 , the lower end of which is rotatably mounted with an upper suction cup 6 . The upper lifting rod 5 is driven to move up and down by an upper lifting drive mechanism, and the upper lifting rod 5 is coaxially arranged with the center hole 2 .

[0036] The internal cleaning mechanism includes an elastic rod 7 that passes through the center hole 2. The lower end of the elastic rod 7 is equipped with a vertical movement drive mechanism for moving the elastic rod 7 up and down, and a horizontal movement drive mechanism for moving the elastic rod 7 radially. A plurality of cleaning cloths 8 are arranged on one side of the elastic rod 7 from bottom to top. The cleaning cloths 8 are detachably mounted on a cleaning block 9. The cleaning block 9 is equipped with a plurality of nozzles 11. The cleaning block 9 is connected to the elastic rod 7 via an elastic plate 10. Water pipes 12 are installed on the elastic rod 7. The nozzles 11 are connected to the water pipes 12 via hoses. The water pipes 12 are connected to the cleaning fluid via a booster pump. The cleaning block 9 and the elastic plate 10 are both made of elastic rubber blocks. The cleaning cloths 8 are sleeved and fit over the cleaning block 9 for easy replacement.

[0037] The structure of the external cleaning mechanism is the same as that of the internal cleaning mechanism. The cleaning cloth 8 on the external cleaning mechanism faces the axis of the center hole 2. The upper end of the elastic rod 7 of the external cleaning mechanism, which is away from the axis of the center hole 2, is hinged with a push-pull cylinder 13. A fixed frame is provided on one side of the external cleaning mechanism. A transverse rail 14 is installed on the fixed frame. A transverse slider 15 is installed on the transverse rail 14. The transverse slider 15 is driven by a transverse cylinder 16 to move on the transverse rail 14. The push-pull cylinder 13 is hinged on the transverse slider 15. The external cleaning mechanism is used to clean the outer surface of the quartz bell jar, and the internal cleaning mechanism is used to clean the inner surface of the quartz bell jar.

[0038] Furthermore, the elastic rod 7 is composed of a plurality of rod segments 17 connected in sequence. Adjacent rod segments 17 are hinged, and spring plates 20 are connected between adjacent rod segments 17. The upper and lower rod segments 17 are arranged in sequence. When in a vertical position, the lower rod segment 17 supports the upper rod segment 17. When the elastic rod 7 bends, the spring plates 20 bend, forming a certain angle between the upper and lower rod segments 17.

[0039] Furthermore, both sides of the rod section 17 are bent to form side guard plates 18 , and a clamping groove 19 is formed between the side guard plates 18 . The water pipe 12 is located in the clamping groove 19 . The clamping groove 19 and the spring piece 20 are respectively located on both sides of the rod section 17 .

[0040] Furthermore, the vertical movement drive mechanism includes a vertical cylinder 21, and the horizontal movement drive mechanism includes a translation cylinder 22. A cross bar 23 is provided at the lower end of the elastic rod 7 of the internal cleaning mechanism. One end of the cross bar 23 is fixedly connected to the lower end of the elastic rod 7, and the other end is fixedly connected to the output shaft of the vertical cylinder 21. The output shaft of the translation cylinder 22 is fixedly connected to a slider 24, which is mounted on a slide rail 25. The vertical cylinder 21 is fixedly connected to the slider 24. The height of the elastic rod 7 can be adjusted by the vertical cylinder 21, and the horizontal distance between the elastic rod 7 and the quartz bell jar can be adjusted by the translation cylinder 22.

[0041] Furthermore, the lower lifting drive mechanism and the upper lifting drive mechanism are respectively a lifting cylinder 26, and a vacuum tube is installed inside the lower lifting rod 3 and the upper lifting rod 5, respectively. One end of the vacuum tube is connected to the lower suction cup 4 or the upper suction cup 6, and the other end is connected to the vacuum pumping equipment. A pressure relief valve is installed on each vacuum tube. The vacuum tube is connected to the lower suction cup 4 or the upper suction cup 6 through a slip ring, which does not affect the rotation of the lower suction cup 4 or the upper suction cup 6. When pressure relief is required, the pressure is relieved through the pressure relief valve, so that the lower suction cup 4 or the upper suction cup 6 can be separated from the quartz bell jar.

[0042] Furthermore, the rotary drive mechanism includes a rotary motor 27. A gear ring 28 is connected to the rotary table 1. The output shaft of the rotary motor 27 is connected to a gear 29, which meshes with the gear ring 28. The rotary motor 27 drives the rotary table 1 to rotate through the engagement of the gear 29 and the gear ring 28. The cleaning device also includes a frame, on which the rotary table 1 is rotatably mounted. A water collection box is installed below the rotary table 1 to collect cleaning fluid that flows from the center hole and around the rotary table 1.

[0043] Furthermore, the turntable 1 is provided with several circles of positioning blocks 30. Each circle of positioning blocks 30 includes several positioning blocks 30. The circle formed by each circle of positioning blocks 30 is coaxial with the center hole 2. The outer side surfaces of the positioning blocks 30 gradually tilt toward the turntable 1 to form an inclined curved surface 31. A circular arc transition forms between the two sides of the positioning blocks 30 and the turntable 1. Different circles of positioning blocks 30 are used to clean quartz bell jars of different diameters. The outer side surfaces of the positioning blocks 30 are inclined curved surfaces 31, which facilitate the positioning of the quartz bell jar.

[0044] Furthermore, each of the elastic rods 7 is equipped with a hot air pipe 31, which is connected to a fan and equipped with a heating device. Each of the hot air pipes 31 is connected to a plurality of air nozzles 32. The hot air pipes 31 are installed in the clamping groove 19. After cleaning, the air nozzles 32 on the elastic rods 7 spray hot air to quickly dry the inner or outer wall of the quartz bell jar, preventing water stains.

[0045] The quartz bell jar cleaning method comprises the following steps:

[0046] Step 1: Place the quartz bell jar on the rotating table 1. The upper lifting drive mechanism drives the upper lifting rod 5 to descend, and uses the upper suction cup 6 to suck the upper outer surface of the quartz bell jar, so that the quartz bell jar is fixed on the rotating table 1.

[0047] Step 2: The rotation drive mechanism drives the rotating table 1 to rotate, driving the quartz bell jar to rotate together.

[0048] Step three, the vertical movement drive mechanism drives the elastic rod 7 of the inner cleaning mechanism to pass through the center hole 2 and rise a certain distance, and then the horizontal movement drive mechanism drives the elastic rod 7 of the inner cleaning mechanism to move radially, so that the cleaning cloth 8 on the elastic rod 7 is close to the inner wall of the quartz bell jar, the booster pump is started, and the cleaning liquid is sprayed from the nozzle 11 on the elastic rod 7 of the inner cleaning mechanism to the inner wall of the quartz bell jar, and the vertical movement drive mechanism drives the elastic rod 7 of the inner cleaning mechanism to continue to rise a distance, and utilizes the guiding effect of the curved top of the quartz bell jar to make the upper end of the elastic rod 7 bend along the top of the quartz bell jar until the upper end of the elastic rod 7 extends to the vertical inner wall on the other side of the quartz bell jar.

[0049] Step 4: After cleaning is complete, the vertical motion drive mechanism gradually lowers the elastic rod 7 of the inner cleaning mechanism, returning it to its vertical position. The horizontal motion drive mechanism then moves the elastic rod 7 radially toward the center of the central hole 2, moving the cleaning cloth 8 away from the inner wall of the quartz bell jar. After cleaning the inner wall, you can use the air nozzle 32 on the elastic rod 7 of the inner cleaning mechanism to spray hot air to quickly dry the inner wall of the quartz bell jar.

[0050] Step 5, the rotary drive mechanism is closed, the quartz bell jar is stationary, and then the lower lifting drive mechanism drives the lower lifting rod 3 in the internal fixing mechanism to rise, so that the lower suction cup 4 sucks the top of the quartz bell jar from the inside; the upper suction cup 6 is depressurized, and the upper lifting drive mechanism drives the upper lifting rod 5 to rise, so that the upper suction cup 6 is separated from the quartz bell jar; the horizontal moving drive mechanism in the outer cleaning mechanism drives the elastic rod 7 of the outer cleaning mechanism to move radially, so that the cleaning cloth 8 on the elastic rod 7 is close to the outer wall of the quartz bell jar; the push-pull cylinder 13 and the lateral movement cylinder 16 are started, so that the upper end of the elastic rod 7 in the outer cleaning mechanism fits the top of the quartz bell jar; the booster pump is started, and the nozzle 11 on the elastic rod 7 of the outer cleaning mechanism sprays cleaning fluid to the outer wall of the quartz bell jar; the rotary drive mechanism is turned on, the quartz bell jar rotates, and the outer surface of the quartz bell is cleaned. After the outer wall is cleaned, you can choose to use the air nozzle 32 on the elastic rod 7 of the outer cleaning mechanism to spray hot air to quickly air-dry the outer wall of the quartz bell jar.

[0051] Step 6: After the outer surface of the quartz bell jar is cleaned, the push-pull cylinder 13, the translation drive mechanism and the transverse cylinder 16 are started, so that the elastic rod 7 in the outer cleaning mechanism is away from the quartz bell jar; the lower suction cup 4 is depressurized, and the lower lifting drive mechanism drives the lower lifting rod 3 to descend, so that the lower suction cup 4 is separated from the quartz bell jar, completing the cleaning of the quartz bell jar.

[0052] It is worth mentioning that the technical features such as the cylinder and motor involved in the patent application of this invention should be regarded as prior art. The specific structure, working principle and possible control method and spatial layout method of these technical features can be selected by conventional means in the field and should not be regarded as the inventive point of this patent. This patent will not be further elaborated.

[0053] The above describes in detail the preferred specific embodiments of the present invention. It should be understood that ordinary technicians in this field can make many modifications and changes based on the concept of the present invention without creative work. Therefore, any technical solutions that can be obtained by technicians in this technical field through logical analysis, reasoning or limited experiments based on the concept of the present invention on the basis of existing technologies should be within the scope of protection determined by the claims.

Claims

1. A quartz bell jar cleaning device, characterized in that: It includes a rotating table, an internal cleaning mechanism, an external cleaning mechanism, an internal fixing mechanism and an external fixing mechanism. The rotating table is driven to rotate by a rotating drive mechanism, and a center hole is provided in the middle of the rotating table; The internal fixing mechanism includes a lower lifting rod, the upper end of which is rotatably mounted with a lower suction cup, the lower lifting rod being driven up and down by a lower lifting drive mechanism, and the lower lifting rod being coaxially arranged with the center hole; The external fixing mechanism includes an upper lifting rod, the lower end of which is rotatably mounted with an upper suction cup, the upper lifting rod is driven up and down by an upper lifting drive mechanism, and the upper lifting rod is coaxially arranged with the center hole; The inner cleaning mechanism includes an elastic rod, the elastic rod passes through a center hole, a vertical movement driving mechanism for moving the elastic rod up and down and a horizontal movement driving mechanism for moving the elastic rod radially are installed at the lower end of the elastic rod, a plurality of cleaning cloths are sequentially arranged on one side of the elastic rod from bottom to top, the cleaning cloths are detachably mounted on a cleaning block, a plurality of nozzles are mounted on the cleaning block, the cleaning block is connected to the elastic rod through an elastic plate, a water pipe is mounted on the elastic rod, the nozzles are respectively connected to the water pipe through a hose, and the water pipe is connected to the cleaning liquid through a booster pump; The structure of the external cleaning mechanism is the same as that of the internal cleaning mechanism. The cleaning cloth on the external cleaning mechanism faces the axis of the center hole. The upper end of the elastic rod of the external cleaning mechanism is hinged with a push-pull cylinder on the side away from the axis of the center hole. A fixed frame is provided on one side of the external cleaning mechanism. A transverse rail is installed on the fixed frame. A transverse slider is installed on the transverse rail. The transverse slider is driven by the transverse cylinder to move on the transverse rail. The push-pull cylinder is hinged on the transverse slider. The elastic rod is composed of a plurality of rod sections connected in sequence. Adjacent rod sections are hinged. Adjacent rod sections are connected The spring sheet, the two sides of the rod section are bent to form side guard plates, and a clamping groove is formed between the side guard plates. The water pipe is located in the clamping groove. The clamping groove and the spring sheet are respectively located on both sides of the rod section. The vertical movement drive mechanism includes a vertical cylinder, and the horizontal movement drive mechanism includes a horizontal cylinder. The lower end of the elastic rod of the internal cleaning mechanism is provided with a cross bar, one end of the cross bar is fixedly connected to the lower end of the elastic rod, and the other end is fixedly connected to the output shaft of the vertical cylinder. The output shaft of the horizontal cylinder is fixedly connected to a slider, and the slider is installed on the slide rail. The vertical cylinder is fixedly connected to the slider. The rotating table is provided with a plurality of positioning blocks, each of which includes a plurality of positioning blocks. The circle formed by each positioning block is coaxial with the central hole, and the outer side of the positioning block gradually tilts toward the rotating table to form an inclined curved surface.

2. The quartz bell jar cleaning device according to claim 1, characterized in that: The lower lifting drive mechanism and the upper lifting drive mechanism are lifting cylinders respectively, and vacuum tubes are installed inside the lower lifting rod and the upper lifting rod respectively. One end of the vacuum tube is connected to the lower suction cup or the upper suction cup, and the other end is connected to the vacuum pumping equipment. A pressure relief valve is installed on the vacuum tube.

3. The quartz bell jar cleaning device according to claim 1, characterized in that: The rotary drive mechanism includes a rotary motor, a gear ring is connected to the rotary table, an output shaft of the rotary motor is connected to a gear, and the gear is meshed with the gear ring.

4. The quartz bell jar cleaning device according to claim 1, characterized in that: Hot air pipes are respectively installed on the elastic rods, the hot air pipes are connected to the fans, heating devices are arranged on the hot air pipes, and a plurality of air nozzles are connected to the hot air pipes.

5. A quartz bell jar cleaning method, characterized in that: Using the quartz bell jar cleaning device according to any one of claims 1 to 4, comprising the following steps: Step 1: Place the quartz bell jar on the rotating table, drive the upper lifting rod to descend by the upper lifting drive mechanism, and use the upper suction cup to suck the upper outer surface of the quartz bell jar to fix the quartz bell jar on the rotating table; Step 2: The rotary drive mechanism drives the rotating table to rotate, driving the quartz bell jar to rotate together; Step 3: The vertical movement driving mechanism drives the elastic rod of the inner cleaning mechanism to pass through the center hole and rise a certain distance, and then the horizontal movement driving mechanism drives the elastic rod of the inner cleaning mechanism to move radially, so that the cleaning cloth on the elastic rod is close to the inner wall of the quartz bell jar, the booster pump is started, and the cleaning liquid is sprayed from the nozzle on the elastic rod of the inner cleaning mechanism to the inner wall of the quartz bell jar, and the vertical movement driving mechanism drives the elastic rod of the inner cleaning mechanism to continue to rise an end distance, and utilizes the guiding effect of the arc-shaped top of the quartz bell jar to make the upper end of the elastic rod bend along the top of the quartz bell jar until the upper end of the elastic rod extends to the vertical inner wall on the other side of the quartz bell jar; Step 4: After cleaning is completed, the vertical movement drive mechanism drives the elastic rod of the inner cleaning mechanism to gradually descend, and the elastic rod of the inner cleaning mechanism returns to a vertical state. The horizontal movement drive mechanism drives the elastic rod of the inner cleaning mechanism to move radially toward the center direction of the center hole, so that the cleaning cloth is away from the inner wall of the quartz bell jar; Step 5. The rotary drive mechanism is closed, the quartz bell jar is stationary, and then the lower lifting drive mechanism drives the lower lifting rod in the internal fixing mechanism to rise, so that the lower suction cup sucks the top of the quartz bell jar from the inside; the upper suction cup is depressurized, and the upper lifting drive mechanism drives the upper lifting rod to rise, so that the upper suction cup is separated from the quartz bell jar; the horizontal movement drive mechanism in the external cleaning mechanism drives the elastic rod of the external cleaning mechanism to move radially, so that the cleaning cloth on the elastic rod is close to the outer wall of the quartz bell jar; the push-pull cylinder and the transverse movement cylinder are started, so that the upper end of the elastic rod in the external cleaning mechanism is attached to the top of the quartz bell jar; the booster pump is started, and the cleaning liquid is sprayed from the nozzle on the elastic rod of the external cleaning mechanism to the outer wall of the quartz bell jar; the rotary drive mechanism is turned on, the quartz bell jar rotates, and the outer surface of the quartz bell is cleaned; Step 6. After the outer surface of the quartz bell jar is cleaned, the push-pull cylinder, the horizontal movement drive mechanism and the transverse movement cylinder are started, so that the elastic rod in the outer cleaning mechanism is away from the quartz bell jar; the lower suction cup is depressurized, and the lower lifting drive mechanism drives the lower lifting rod to descend, so that the lower suction cup is separated from the quartz bell jar, completing the cleaning of the quartz bell jar.

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