Full-automatic quartz ring outer diameter measuring method and device thereof
Patent Information
- Application Number
- CN202310627440.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-05-31
- Publication Date
- 2026-09-04
- Estimated Expiration
- 2043-05-31
AI Technical Summary
[0004]本发明提供一种全自动石英环外径测量方法及其装置,可以有效解决上述背景技术中提出大部分均是采用人工测量的方式,因为石英环的直径大小均不相同,且数量均较多,人工检测时往往会存在遗漏的石英环未被检测,检测的结果也会存在误差的可能性存在,需要后续进行反复确认,从而造成人工检测效率也极为低下的问题
[0016]与现有技术相比,本发明的有益效果:本发明结构科学合理,使用安全方便,
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Figure CN116772772B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of quartz ring outer diameter measurement technology, specifically to a fully automatic method and apparatus for measuring the outer diameter of a quartz ring. Background Technology
[0002] Semiconductor-grade quartz rings are used in etching machines during chip manufacturing, so the requirements for their size, cylindricity, and ellipticity are extremely high. Precise measurement, and even multiple measurements and comparisons, are required during processing to meet the working standards. The original measuring device is a vernier caliper, which is inefficient due to the large size and quantity of the measurement, as well as the unstable reliability and the existence of missed detections. Therefore, the innovation of an automatic and precise detection device for quartz rings has become the main research direction.
[0003] However, most of the existing fully automatic quartz ring outer diameter measuring devices still rely on manual measurement. Since the diameters of quartz rings vary and there are many of them, manual inspection often results in some quartz rings being missed, and the results may contain errors. This requires repeated confirmation, making manual inspection extremely inefficient. Summary of the Invention
[0004] This invention provides a fully automatic method and apparatus for measuring the outer diameter of quartz rings, which can effectively solve the problem mentioned in the background art that most of the measurements are done manually. Because the diameters of quartz rings are different and there are many of them, manual inspection often results in some quartz rings being missed, and the inspection results may also have errors, requiring repeated confirmation, thus causing the efficiency of manual inspection to be extremely low.
[0005] To achieve the above objectives, the present invention provides the following technical solution: a fully automatic quartz ring outer diameter measuring device, comprising a feeding rack, wherein an outer diameter measuring mechanism is placed at the discharge end of the feeding rack; The outer diameter measuring mechanism includes a support rail, a conveyor table, a conveyor table rotating gear, a frustum, an electric cylinder, a pressure rod, a push plate slide rail, a spring-loaded tube, a buffer spring, a push plate, a displacement sensor slide rail, a push plate slide rod, a fixed table, a right-angle measuring frame, a clamping block slide groove, a spring-loaded spring, a clamping block, a clamping block limiting rod, a rotating motor, and a crescent-shaped tooth. The feeding rack has a support rail at the discharge end, a conveyor table is embedded at the top of the support rail, a conveyor table tooth is welded to the bottom surface of the conveyor table, a truncated cone is embedded in the middle of the inner side of the conveyor table, an electric cylinder is installed on the top surface of the truncated cone, and a pressure rod is connected to the transmission end of the electric cylinder. The pressure rod transmission end is equipped with a push plate slide rail on the top surface of the truncated cone. A push plate is slidably embedded in the inner side of the push plate slide rail. A spring tube is welded to the inner side of the inner surface of the push plate slide rail. A buffer spring is placed inside the spring tube. A push plate slide rod is welded to the top of the push plate. A fixed table is placed at one end of the support rail. A right-angle measuring frame is welded to the top of the fixed table. Two clamping block grooves are opened on the inner side of the right-angle measuring frame. A rebound spring is placed inside the clamping block groove. A clamping block is slidably embedded inside the clamping block groove. A clamping block limiting rod is welded to the top of the clamping block. A displacement sensor slide rail is sleeved on the outer side of the clamping block limiting rod and the push plate slide rod. A rotating motor is installed on the inner bottom surface of the support rail. A crescent tooth is installed on the transmission end of the rotating motor.
[0006] Preferably, the middle position of the conveyor table is hollow, the highest point of the truncated cone is on the same horizontal plane as the highest point of the conveyor table, and the top of the truncated cone is embedded in the inner side of the conveyor table's rotating teeth.
[0007] Preferably, the extension end of the pressure rod is welded to the inside of the spring tube, and one end surface of the pressure rod is connected to the buffer spring, and one end surface of the push plate is in contact with the top surface of the conveyor table.
[0008] Preferably, one end of the right-angle measuring frame is V-shaped, and the surface of one end of the right-angle measuring frame is smooth with rounded corners, and one end of the clamping block is connected to the rebound spring.
[0009] Preferably, the thickness of the crescent tooth is less than that of the conveyor table rotating tooth, the outer surface of the crescent tooth meshes with the outer surface of the conveyor table rotating tooth, and the top diameter of the conveyor table is greater than the diameter of the supporting rotating track.
[0010] Preferably, a feeding and discharging mechanism is connected to the inner side of the feeding rack; The feeding and discharging mechanism includes a conveyor motor, a conveyor shaft, a conveyor belt, a limit plate holder, a limit plate, a return spring, a discharge plate, a receiving rack, a fitting plate, a buffer pad, and a buffer plate. A conveyor motor is installed on the outer surface of one end of the feeding rack, and two conveyor shafts are embedded in the inner side of the feeding rack. A conveyor belt is sleeved on the outer side of the two conveyor shafts. The inner surface of the feeding rack is equipped with several limiting plate holders, the inner side of the limiting plate holders is fitted with limiting plates, one end of the limiting plate is sleeved with a reset spring, and the feeding rack outlet end is equipped with a discharge plate. A receiving rack is placed at one end of the conveyor table. A fitting plate is installed at the feeding end of the receiving rack. Three buffer plates are embedded inside the receiving rack. Several buffer pads are installed at the bottom inside the receiving rack.
[0011] Preferably, the transmission end of the conveyor motor is connected to one end of a conveyor shaft, the discharge end of the feed rack is in contact with the top surface of the conveyor table, and the feed end of the fitting plate is fitted with the outer surface of the conveyor table.
[0012] Preferably, the inner width of the feeding rack is the same as the maximum width of the right-angle measuring rack, the receiving rack is Z-shaped, and holes are provided at the corners of the receiving rack.
[0013] Preferably, the discharge directions of the three buffer plates are in opposite directions, and the inclination angles of the three buffer plates are all the same. The inner diameter of the receiving rack is the same as the inner diameter of the feeding rack.
[0014] Preferably, the power input terminals of the electric cylinder, the rotary motor, and the transmission motor are all connected to the power output terminal of an external control terminal, and a pressure sensor is connected to the signal input terminal of the electric cylinder.
[0015] Preferably, a fully automatic method for measuring the outer diameter of a quartz ring is based on the method of using a fully automatic quartz ring outer diameter measuring device.
[0016] Compared with the prior art, the advantages of this invention are: the invention has a scientific and reasonable structure, and is safe and convenient to use. Equipped with a support rail, conveyor table, conveyor table gear, frustum, electric cylinder, push plate slide rail, and push plate, it can limit and sort the quartz rings to be inspected before inspection, create a safe distance while ensuring uninterrupted conveying, and automate the inspection of quartz rings. This greatly improves the inspection efficiency, increases the accuracy of the inspection results, and automatically records the inspection results. It can also limit and fix the quartz rings to be inspected, reduce the occurrence of defects, and reduce the input of processing costs.
[0017] Equipped with a rotating motor, crescent-shaped gear, conveyor belt, limit plate holder, and limit plate, it can stop the conveying during quartz ring testing without interfering with the motor controller. Intermittent conveying ensures the integrity of the testing process. Automatic feeding reduces manual input and speeds up the testing process. It can uniformly limit quartz rings of different sizes and standardize the conveying position.
[0018] Equipped with a receiving rack, interlocking plate, buffer pad, and buffer plate, it can collect the discharged quartz rings without damaging them. It can also match the discharge and collection sequence of quartz rings with the testing sequence, making it convenient to remove quartz rings with abnormal data and simplifying the use of the testing device.
[0019] In summary, this invention replaces manual detection with automatic detection in traditional detection devices, ensures smooth feeding and discharging, increases detection efficiency and accuracy, reduces errors, and lowers labor costs, thereby reducing additional detection costs. It can simultaneously detect quartz rings of different specifications, increasing the device's versatility. Attached Figure Description
[0020] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof.
[0021] In the attached diagram: Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the outer diameter measuring mechanism of the present invention; Figure 3 This is a schematic diagram of the cross-sectional structure of the displacement sensor slide rail of the present invention; Figure 4 This is the invention Figure 3 A schematic diagram of the enlarged structure of A; Figure 5 This is a schematic diagram of the motor mounting structure of the present invention; Figure 6 This is a schematic diagram of the feeding and discharging mechanism of the present invention; Figure 7 This is a schematic diagram of the limiting plate installation structure of the present invention; Labels in the diagram: 1. Feed rack; 2. Outer diameter measuring mechanism; 201. Support rail; 202. Conveyor table; 203. Conveyor table gear; 204. Frustum; 205. Electric cylinder; 206. Pressure rod; 207. Push plate slide rail; 208. Springback tube; 209. Buffer spring; 210. Push plate; 211. Displacement sensor slide rail; 212. Push plate slide rod; 213. Fixed table; 214. Right angle measuring frame; 215. Clamping block slide groove; 216. Springback spring; 217. Clamping block; 218. Clamping block limit rod; 219. Rotary motor; 220. Crescent tooth; 3. Feeding and discharging mechanism; 301. Conveyor motor; 302. Conveyor shaft; 303. Conveyor belt; 304. Limit plate holder; 305. Limit plate; 306. Return spring; 307. Discharge plate; 308. Receiving rack; 309. Clamping plate; 310. Buffer pad; 311. Buffer plate. Detailed Implementation
[0022] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.
[0023] Example: Figure 1-7 As shown, the present invention provides a fully automatic method and device for measuring the outer diameter of a quartz ring. The fully automatic quartz ring outer diameter measuring device includes a feeding rack 1, and an outer diameter measuring mechanism 2 is placed at the discharge end of the feeding rack 1. The outer diameter measuring mechanism 2 includes a support rotating rail 201, a conveying table 202, a conveying table rotating gear 203, a frustum 204, an electric cylinder 205, a pressure rod 206, a push plate slide rail 207, a spring tube 208, a buffer spring 209, a push plate 210, a displacement sensor slide rail 211, a push plate slide rod 212, a fixed table 213, a right-angle measuring frame 214, a clamping block slide groove 215, a spring spring 216, a clamping block 217, a clamping block limiting rod 218, a rotating motor 219, and a crescent tooth 220. To allow sufficient time for inspection without interrupting the conveying process, a support rail 201 is placed at the discharge end of the feed rack 1. A conveyor table 202 is embedded at the top of the support rail 201. Conveyor table teeth 203 are welded to the bottom surface of the conveyor table 202. A frustum 204 is embedded in the middle of the inner side of the conveyor table 202. The middle of the conveyor table 202 is hollow. The highest point of the frustum 204 is at the same level as the highest point of the conveyor table 202. The top of the frustum 204 is embedded inside the conveyor table teeth 203. An electric cylinder 20 is installed on the top surface of the frustum 204. 5. The transmission end of the electric cylinder 205 is connected to a pressure rod 206. The transmission end of the pressure rod 206 is mounted on the top surface of the frustum 204 with a push plate slide rail 207. A push plate 210 is slidably embedded in the inner side of the push plate slide rail 207. The extension end of the pressure rod 206 is welded to the inner side of the spring tube 208. One end of the pressure rod 206 is connected to a buffer spring 209. One end of the push plate 210 is in contact with the top surface of the conveyor table 202. A spring tube 208 is welded to the inner side of the inner side of the push plate 210 on the inner side of the push plate slide rail 207. A buffer spring 209 is placed inside the spring tube 208. To achieve automated testing, a push plate slide rod 212 is welded to the top of the push plate 210. A fixed table 213 is placed at one end of the support rail 201. A right-angle measuring frame 214 is welded to the top of the fixed table 213. Two clamping block grooves 215 are opened on the inner side of the right-angle measuring frame 214. A return spring 216 is placed inside the clamping block groove 215. A clamping block 217 is slidably embedded inside the clamping block groove 215. One end of the right-angle measuring frame 214 is V-shaped, and the surface of one end of the right-angle measuring frame 214 is smooth with rounded corners. The clamping block 217... One end is connected to the rebound spring 216. A clamping block limiting rod 218 is welded to the top of the clamping block 217. A displacement sensor slide rail 211 is sleeved on the outside of the clamping block limiting rod 218 and the push plate slide rod 212. A rotating motor 219 is installed on the inner bottom surface of the support rail 201. A crescent tooth 220 is installed on the transmission end of the rotating motor 219. The thickness of the crescent tooth 220 is smaller than that of the conveyor table rotating tooth 203. The outer side of the crescent tooth 220 meshes with the outer surface of the conveyor table rotating tooth 203. The top diameter of the conveyor table 202 is larger than the diameter of the support rail 201. The feeding rack 1 is connected to the feeding and discharging mechanism 3 on its inner side; The feeding and discharging mechanism 3 includes a conveyor motor 301, a conveyor shaft 302, a conveyor belt 303, a limit plate holder 304, a limit plate 305, a reset spring 306, a discharge plate 307, a receiving rack 308, a fitting plate 309, a buffer pad 310, and a buffer plate 311. To accelerate the feeding and receiving efficiency, a conveyor motor 301 is installed on the outer surface of one end of the feeding rack 1. Two conveyor shafts 302 are embedded inside the feeding rack 1. The transmission end of the conveyor motor 301 is connected to one end of one conveyor shaft 302. The discharge end of the feeding rack 1 is in contact with the top surface of the conveyor table 202. The feeding end of the fitting plate 309 is fitted with the outer surface of the conveyor table 202. A conveyor belt 303 is sleeved on the outer side of the two conveyor shafts 302. Several limit plate holders 304 are installed on the inner surface of one end of the feeding rack 1. Limit plates 305 are embedded inside the limit plate holders 304. A return spring 306 is sleeved on one end of the limit plate 305. A discharge plate 307 is installed on the discharge end of the feeding rack 1. A receiving rack 308 is placed at one end of the conveyor table 202. The inner width of the feed rack 1 is the same as the maximum width of the right-angle measuring rack 214. The take-up rack 308 is Z-shaped, and holes are provided at the corners of the take-up rack 308. A fitting plate 309 is installed at the feed end of the take-up rack 308. Three buffer plates 311 are embedded in the inner side of the take-up rack 308. The discharge directions of the three buffer plates 311 are opposite in sequence, and the inclination angles of the three buffer plates 311 are the same. The inner diameter of the take-up rack 308 is the same as the inner diameter of the feed rack 1. Several buffer pads 310 are installed at the bottom inner side of the take-up rack 308. The power input terminals of the electric cylinder 205, the rotary motor 219, and the conveyor motor 301 are all connected to the power output terminal of the external control terminal. A pressure sensor is connected to the signal input terminal of the electric cylinder 205.
[0024] The working principle and usage process of this invention are as follows: First, the operator needs to start the electric cylinder 205, the rotating motor 219, and the conveyor motor 301. Then, the quartz ring is placed on the top of the conveyor belt 303 at the top of the feeding rack 1. At that time, the conveyor belt 303 will drive the quartz ring to feed and convey it. During this process, the quartz ring will be limited by the limiting plate 305, so that the quartz ring is conveyed on one side of the inside of the feeding rack 1. This facilitates subsequent testing. Then, the quartz ring will slide down to the top of the conveyor table 202 through the unloading plate 307 at the discharge end of the feeding rack 1. Because the speed of the conveyor motor 301 is relatively slow, there is an equal interval between each pair of quartz rings that slide down to the conveyor table 202, which facilitates subsequent testing. The quartz ring that falls onto the top of the conveyor table 202 is then driven by the rotating motor 219 to rotate the crescent-shaped tooth 220. The crescent-shaped tooth 220 drives the meshing conveyor table rotating tooth 203 to rotate intermittently, giving the detection mechanism sufficient measurement time. The circumference of the tooth surface of the crescent-shaped tooth 220 is one-quarter of the diameter of the tooth surface of the conveyor table rotating tooth 203. Thus, after the crescent-shaped tooth 220 rotates four times, the conveyor table 202 rotates one time. The circumference from the discharge end of the feed rack 1 to the right-angle measuring frame 214 is exactly one-quarter of the circumference of the top of the conveyor table 202. This ensures that each material transfer will be to the inside of the right-angle measuring frame 214. When the conveyor table 202 stops rotating, the electric cylinder 205 will start due to the motor controller. The electric cylinder 205 pushes the push plate 210 through the pressure rod 206 to push the quartz ring towards the inside of the right-angle measuring frame 214. In order not to damage the quartz ring, the buffer spring 209 will provide a buffer force to the pressure rod 206 during the pushing process to ensure the safety of the quartz ring. During the pressing process, after the quartz ring enters the inner side of the right-angle measuring frame 214, the clamping block 217 inside the right-angle measuring frame 214 will be pushed back into the clamping block groove 215. During this period, the clamping block limiting rod 218 at the top of the clamping block 217 and the push plate slide rod 212 at the top of the push plate 210 will slide inside the displacement sensor slide rail 211. The displacement sensor slide rail 211 will send the sliding distance of the push plate slide rod 212 to the control terminal. The control terminal calculates the diameter of the quartz ring. The vertical position of the inner track end of the displacement sensor slide rail 211 is the same as the vertical position of the outer surface when the clamping block 217 is fully embedded in the clamping block groove 215. Therefore, the control terminal can obtain the diameter of the quartz ring by subtracting the sliding length of the push plate slide rod 212 from the length of the inner track of the displacement sensor slide rail 211. Subsequently, the control terminal will automatically number and store the detection data of the quartz ring in the computer according to the detection sequence for subsequent inspection. After the test is completed, the electric cylinder 205 will retract the pressure rod 206. At that time, the clamping block 217 will push out the quartz ring located on the right-angle measuring frame 214 due to the return spring 216. Then, the quartz ring will be conveyed to the inside of the receiving rack 308 by the rotating conveyor table 202. The fitting plate 309 at the feeding end of the receiving rack 308 can ensure the safe feeding. The buffer pad 310 and the buffer plate 311 can ensure that the quartz ring will not break while the downward slide is uninterrupted. At the same time, the receiving is carried out in the order of testing, which makes it more convenient to conduct spot checks later.
[0025] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A fully automatic quartz ring outer diameter measuring device, comprising a feed rack (1), characterized in that: The feed rack (1) has an outer diameter measuring mechanism (2) placed at the discharge end; The outer diameter measuring mechanism (2) includes a support turntable (201), a conveyor table (202), a conveyor table rotating tooth (203), a frustum (204), an electric cylinder (205), a pressure rod (206), a push plate slide rail (207), a spring tube (208), a buffer spring (209), a push plate (210), a displacement sensor slide rail (211), a push plate slide rod (212), a fixed table (213), a right-angle measuring frame (214), a clamping block slide groove (215), a spring spring (216), a clamping block (217), a clamping block limiting rod (218), a rotating motor (219), and a crescent tooth (220). The feeding rack (1) has a support rail (201) at the discharge end. A conveyor table (202) is embedded at the top of the support rail (201). A conveyor table tooth (203) is welded to the bottom surface of the conveyor table (202). A frustum (204) is embedded in the middle of the inner side of the conveyor table (202). An electric cylinder (205) is installed on the top surface of the frustum (204). A pressure rod (206) is connected to the transmission end of the electric cylinder (205). The transmission end of the pressure rod (206) is equipped with a push plate slide rail (207) on the top surface of the truncated cone (204). A push plate (210) is slidably embedded in the inner side of the push plate slide rail (207). A spring tube (208) is welded to the inner side of the push plate slide rail (207) on one end surface of the inner side of the push plate (210). A buffer spring (209) is placed inside the spring tube (208). The push plate (210) is welded with a push plate slide rod (212) at the top. A fixed table (213) is placed at one end of the support rail (201). A right-angle measuring frame (214) is welded to the top of the fixed table (213). Two clamping block grooves (215) are opened on the inner side of the right-angle measuring frame (214). A rebound spring (216) is placed on the inner side of the clamping block groove (215). A clamping block (217) is slidably embedded in the inner side of the clamping block groove (215). A clamping block limiting rod (218) is welded to the top of the clamping block (217). A displacement sensor slide rail (211) is sleeved on the outer side of the clamping block limiting rod (218) and the push plate slide rod (212). A rotating motor (219) is installed on the inner bottom surface of the support rail (201). A crescent tooth (220) is installed on the transmission end of the rotating motor (219). The feeding rack (1) is connected to the feeding and discharging mechanism (3) on its inner side; The feeding and discharging mechanism (3) includes a conveyor motor (301), a conveyor shaft (302), a conveyor belt (303), a limit plate holder (304), a limit plate (305), a reset spring (306), a discharge plate (307), a receiving rack (308), a fitting plate (309), a buffer pad (310), and a buffer plate (311). A conveyor motor (301) is installed on the outer surface of one end of the feed rack (1), and two conveyor shafts (302) are embedded in the inner side of the feed rack (1). A conveyor belt (303) is sleeved on the outer side of the two conveyor shafts (302). The inner surface of the feed rack (1) is equipped with several limiting plate holders (304), the inner side of the limiting plate holders (304) is fitted with limiting plates (305), one end of the limiting plate (305) is sleeved with a reset spring (306), and the discharge end of the feed rack (1) is equipped with a discharge plate (307). A receiving rack (308) is placed at one end of the conveyor table (202). A fitting plate (309) is installed at the feeding end of the receiving rack (308). Three buffer plates (311) are embedded inside the receiving rack (308). Several buffer pads (310) are installed at the bottom inside the receiving rack (308).
2. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The middle position of the conveyor table (202) is hollow. The highest point of the truncated cone (204) is on the same horizontal plane as the highest point of the conveyor table (202). The top of the truncated cone (204) is embedded in the inner side of the conveyor table's rotating teeth (203).
3. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The extension end of the pressure rod (206) is welded to the inside of the spring tube (208), and one end of the pressure rod (206) is connected to the buffer spring (209). One end of the push plate (210) is in contact with the top surface of the conveyor table (202).
4. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The right-angle measuring frame (214) has a V-shaped angle at one end, and the surface of the right-angle measuring frame (214) is smooth with rounded corners. One end of the clamping block (217) is connected to the spring (216).
5. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The thickness of the crescent tooth (220) is less than that of the conveyor table tooth (203), the outer side of the crescent tooth (220) meshes with the outer surface of the conveyor table tooth (203), and the top diameter of the conveyor table (202) is greater than that of the support rail (201).
6. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The transmission end of the conveyor motor (301) is connected to one end of a conveyor shaft (302), the discharge end of the feed rack (1) is attached to the top surface of the conveyor table (202), and the feed end of the fitting plate (309) is fitted to the outer surface of the conveyor table (202).
7. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The inner width of the feeding rack (1) is the same as the maximum width of the right-angle measuring rack (214). The receiving rack (308) is Z-shaped, and holes are provided at the corners of the receiving rack (308).
8. The fully automatic quartz ring outer diameter measuring device according to claim 1, characterized in that, The discharge directions of the three buffer plates (311) are opposite in sequence, and the inclination angles of the three buffer plates (311) are the same. The inner diameter of the receiving rack (308) is the same as the inner diameter of the feeding rack (1). The power input terminals of the electric cylinder (205), the rotating motor (219), and the transmission motor (301) are all connected to the power output terminal of an external control terminal, and a pressure sensor is connected to the signal input terminal of the electric cylinder (205).
9. A fully automatic method for measuring the outer diameter of a quartz ring, characterized in that, The method of using a fully automatic quartz ring outer diameter measuring device according to any one of claims 1-8.
Citation Information
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