Methods for crucibles, distribution tubes, material deposition components, vacuum deposition systems, and manufacturing apparatus

Abstract

A material deposition assembly for depositing material onto a substrate in a vacuum deposition chamber is described. The material deposition assembly includes at least one material deposition source. The deposition source includes a dispensing tube configured to guide evaporated material onto the substrate, the dispensing tube having mating flanges having mating spherical surfaces that are rotationally symmetric about a circular axis of symmetry, the mating spherical surfaces having a first height along the axis. The deposition source includes a crucible for evaporating the material, the crucible having flanges having spherical surfaces that are rotationally symmetric about the axis, the spherical surfaces having a second height along the axis, wherein the second height differs from the first height, specifically differing by at least 20% relative to the first height.

Description

Technical Field

[0001] Embodiments of this disclosure relate to the sealing of high-temperature evaporators, particularly the sealing of high-temperature evaporators for the evaporation of metals or metal alloys. Furthermore, embodiments relate to the deposition of materials for OLED manufacturing. Specifically, embodiments relate to the evaporation of metals and metal alloys. More specifically, embodiments relate to methods of evaporation sources, material deposition assemblies (e.g., evaporation source arrays), and manufacturing apparatus. Additionally, embodiments of this disclosure relate to deposition apparatus for depositing one or more layers on a substrate, particularly layers comprising metals and metal alloys during OLED device manufacturing. Specifically, embodiments of this disclosure relate to methods of crucibles, dispensing tubes, material deposition assemblies, vacuum deposition systems, and manufacturing apparatus. Background Technology

[0002] Metal evaporators are tools used in the production of materials such as organic light-emitting diodes (OLEDs). However, evaporators are also used in other applications, such as to deposit metal layers on large-area substrates. OLEDs are a special type of light-emitting diode in which the emitting layer comprises a thin film of certain organic compounds. Organic light-emitting diodes (OLEDs) are used to manufacture television screens, computer monitors, mobile phones, and other handheld devices for displaying information. OLEDs can also be used for general spatial lighting. OLED displays may, for example, include layers of organic material disposed between two electrodes, which are deposited on a substrate in a manner that forms a matrix display panel with individually excitable pixels.

[0003] OLED display or OLED lighting applications include, for example, a stack of several organic materials and metals or metal alloys evaporated in a vacuum deposition system. To fabricate an OLED stack, co-evaporation of two or more metals or metal alloys is provided. For example, an OLED display may include a layer of organic material deposited on a substrate and disposed between two electrodes. One of these electrodes may include a transparent conductive layer (such as ITO) or other transparent conductive oxide (TCO) material. The second electrode may include a metal or metal alloy. As a protective layer or a layer used to reduce electron affinity, a very thin layer of lithium fluoride, cesium fluoride, or silver may typically be deposited between the cathode and the electron transport layer.

[0004] Given the high temperatures involved in metal evaporation, the heat load on the substrate and / or other components can be high during OLED manufacturing. Evaporating metal, especially sealing the crucible (which needs to be replaced and refilled), is very challenging. For example, document WO 2017 / 008838 describes evaporation crucibles and dispensing tubes that can be welded to each other, thus avoiding gaps or slits in the contact area between the evaporation crucible and the dispensing tube. Without providing the evaporation crucible and dispensing tube as a single component, gaps or slits may exist at the contact area between the evaporation crucible and the dispensing tube.

[0005] Accordingly, improved metal or metal alloy evaporation devices and improved metal or metal alloy evaporation are beneficial. Summary of the Invention

[0006] In view of the foregoing, methods are provided for the crucible, dispensing tube, material deposition assembly, vacuum deposition system, and manufacturing apparatus as described in the independent claims. Further aspects, benefits, and features of this disclosure will become apparent from the claims, description, and drawings.

[0007] According to one embodiment, a material deposition assembly is provided for depositing material onto a substrate in a vacuum deposition chamber. The material deposition assembly includes at least one material deposition source. The deposition source includes a dispensing tube configured to guide evaporated material onto the substrate, the dispensing tube having mating flanges having mating spherical surfaces that are rotationally symmetric about a circular axis of symmetry, the mating spherical surfaces having a first height along the axis. The deposition source includes a crucible for evaporating the material, the crucible having flanges having spherical surfaces that are rotationally symmetric about the axis, the spherical surfaces having a second height along the axis, wherein the second height differs from the first height, particularly differing by at least 20% relative to the first height.

[0008] According to one embodiment, a crucible for evaporating material is provided. The crucible includes: an enclosure for evaporating the material; and a flange coupled to the enclosure. The flange includes: a spherical surface that is rotationally symmetric about a circular axis of symmetry, the spherical surface having a second height along the axis; and an opening for the intrusion of the evaporated material, the opening having an opening size, wherein the second height is 30% or less relative to the opening size.

[0009] According to one embodiment, a dispensing tube is provided for guiding evaporating material in a vacuum processing system. The dispensing tube includes: a dispensing housing having one or more openings for guiding the evaporating material; and a mating flange coupled to the dispensing housing. The mating flange includes: a mating spherical surface, the mating spherical surface being rotationally symmetric about a circular axis of symmetry, the mating spherical surface having a second mating height along the axis; and a mating opening for the intrusion of the evaporating material, the opening having a mating opening size, wherein the second mating height is 30% or less than the mating opening size.

[0010] According to one embodiment, a vacuum deposition system is provided. The vacuum deposition system includes: a vacuum deposition chamber; and a material deposition assembly according to any of the embodiments described herein, the material deposition assembly being located within the vacuum deposition chamber. The vacuum deposition system includes a substrate support configured to support the substrate during material deposition.

[0011] According to one embodiment, a method for manufacturing an apparatus is provided. The apparatus has at least one metal layer, and the apparatus has a material deposition assembly having at least one material deposition source, the at least one material deposition source having a crucible and a dispensing tube as described in any of the embodiments described herein. The method includes: inserting the crucible into a compartment of the at least one material deposition source; applying a contact force at a connection between the crucible and the dispensing tube; and evaporating metal to deposit the at least one metal layer. Attached Figure Description

[0012] To gain a more detailed understanding of the features described above in this disclosure, reference can be made to embodiments to obtain a more specific description of the disclosure briefly outlined above. The accompanying drawings illustrate embodiments of this disclosure and are described below:

[0013] Figure 1A A schematic cross-sectional side view of the lower portion of a material deposition assembly according to an embodiment described herein is shown, wherein the crucible retaining arrangement is detached from the material deposition source;

[0014] Figure 1B A schematic cross-sectional side view of the lower portion of a material deposition assembly according to an embodiment described herein is shown, wherein the crucible is held in place and fixed to the material deposition source;

[0015] Figure 2A A cross-sectional view is shown of a portion of a flange, particularly a flange of a crucible having a sealing surface, according to embodiments described herein;

[0016] Figure 2B A cross-sectional view is shown of a portion of a flange, particularly a flange of a crucible having a sealing surface, according to embodiments described herein;

[0017] Figure 2C A cross-sectional view is shown of a portion of a flange, particularly a flange of a crucible having a sealing surface, according to embodiments described herein;

[0018] Figure 3A A schematic diagram of a pressing mechanism for high temperature according to an embodiment described herein is shown;

[0019] Figure 3B A schematic cross-sectional side view of a material deposition assembly according to an embodiment described herein is shown;

[0020] Figure 4 A schematic side view of a material deposition assembly according to another embodiment described herein is shown;

[0021] Figure 5 Showing according to such Figure 4 A more detailed schematic cross-sectional top view of a material deposition assembly of another embodiment described herein is shown as an example.

[0022] Figure 6 A schematic diagram of a vacuum deposition system according to an embodiment described herein is shown, wherein the valve is in the open state; and

[0023] Figure 7 A flowchart illustrating a method of manufacturing an apparatus according to an embodiment described herein. Detailed Implementation

[0024] Reference will now be made in detail to various embodiments, each illustrated in one or more examples of these embodiments. Each example is provided for illustrative purposes and is not intended to be limiting. For example, a feature of a portion illustrated or described as an embodiment may be used in or in combination with any other embodiment to produce yet another embodiment. This disclosure is intended to include such modifications and variations.

[0025] In the following description of the accompanying drawings, the same reference numerals denote the same or similar parts. Generally, only differences with respect to individual embodiments are described. Unless otherwise specified, the description of parts or aspects of one embodiment may be applied to corresponding parts or aspects of another embodiment.

[0026] Before describing the various embodiments of this disclosure in more detail, some aspects of the terminology and expressions used herein are explained.

[0027] In this disclosure, a "material deposition assembly" will be understood as an arrangement configured to deposit material on a substrate as described herein. Specifically, a "material deposition assembly" can be understood as an assembly configured to deposit material on a large-area substrate (e.g., for use in OLED display manufacturing). For example, a "large-area substrate" may have an area of ​​0.5 μm. 2 Or larger, especially 1m 2 Or a larger main surface area. In some embodiments, the large-area substrate can be a 4.5 generation (corresponding to approximately 0.67m²). 2 Substrate (0.73m × 0.92m), Generation 5 (corresponding to approximately 1.4m) 2 Substrate (1.1m × 1.3m), Generation 7.5 (corresponding to approximately 4.29m) 2 Substrate (1.95m × 2.2m), Generation 8.5 (corresponding to approximately 5.7m) 2 Substrate (2.2m × 2.5m) or even the 10th generation (corresponding to approximately 8.7m) 2 The substrate is 2.85m × 3.05m. Similarly, even higher generations (such as the 11th and 12th generations) and corresponding substrate areas can be implemented.

[0028] As used herein, the term "substrate" should specifically encompass generally non-flexible substrates, such as wafers, slices of transparent crystals (such as sapphire or the like), or glass plates. However, this disclosure is not limited thereto, and the term "substrate" may also encompass flexible substrates (such as rolls or foils). The term "generally non-flexible" should be understood as distinct from "flexible." Specifically, a generally non-flexible substrate may have a degree of flexibility, such as a glass plate with a thickness of 0.5 mm or less, wherein the flexibility of a generally non-flexible substrate is less than that of a flexible substrate. According to the embodiments described herein, the substrate may be made of any material suitable for material deposition. For example, the substrate may be made of materials selected from the group consisting of: glass (e.g., sodium silicate glass, borosilicate glass, etc.), metals, polymers, ceramics, compound materials, carbon fiber materials, or any other material or combination of materials that can be coated by a deposition process.

[0029] In this disclosure, "vacuum deposition chamber" will be understood as a chamber configured for vacuum deposition. As used herein, the term "vacuum" can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. The pressure in a vacuum chamber as described herein can be 10 mbar. -5 millibars and about 10 -8 Between millibars, and more specifically at 10 -5 millibars and 10 -7 Between millibars, and even more specifically at about 10 -6 millibars and about 10-7 Between millibars. According to some embodiments, the pressure in the vacuum chamber can be considered as the partial pressure or total pressure of the material evaporating within the vacuum chamber (the two can be approximately the same when only the evaporating material is present as the component to be deposited in the vacuum chamber). In some embodiments, the total pressure in the vacuum chamber can be around 10... -4 millibars to approximately 10 -7 Within the range of millibars, especially when there is a second component (such as a gas or the like) in the vacuum chamber besides the evaporated material.

[0030] In this disclosure, a "material deposition source" can be understood as a means or assembly configured to provide a source of material to be deposited on a substrate. Specifically, a "material deposition source" can be understood as a means or assembly having a crucible configured to evaporate the material to be deposited and a dispensing tube (such as a dispensing assembly) configured to provide the evaporated material to the substrate. The tube may have any shape providing a cover for the evaporated material, the cover having an opening to guide the evaporated material to the substrate. The statement "dispensing tube configured to provide the evaporated material to the substrate" can be understood as a dispensing assembly configured to provide material to the substrate. Figure 3B The gaseous source material is guided in the deposition direction, exemplarily indicated by an arrow passing through outlet 326. Accordingly, the gaseous source material, such as that of an OLED device (e.g., material for depositing a thin film, such as a metal-containing film), is guided within the dispensing tube and exits through one or more outlets 326. For example, one or more outlets of the dispensing assembly (e.g., the dispensing tube) may be nozzles extending in the evaporation direction. The evaporation direction may be substantially horizontal; for example, a horizontal direction may correspond to... Figure 3B The x-direction indicated in the middle.

[0031] In this disclosure, a "crucible" can be understood as an apparatus having a reservoir for evaporating material by heating the crucible. Accordingly, a "crucible" can be understood as a source material reservoir that can be heated to vaporize source material into a gas by at least one of evaporation and sublimation. The crucible includes a heater to vaporize the source material in the crucible into a gaseous source material. The reservoir may have an internal volume for receiving the source material (e.g., a metallic material) to be evaporated. For example, the volume of the crucible may be 100 cm³. 2 With 4000cm 2 Between, especially at 1000cm 2 With 3000cm 2 Between and more specifically 2800cm 2Specifically, the crucible may include a heating unit configured to heat source material provided within the internal volume of the crucible to a temperature at which the source material evaporates. For example, the crucible may be a crucible for evaporating metallic materials (e.g., metallic materials having an evaporation temperature above 800°C).

[0032] The dispensing assembly or dispensing tube can be a linear dispensing nozzle, for example, a linear dispensing nozzle having multiple openings (or extending slits) disposed within it. The nozzle, as understood herein, can have a housing, hollow space, or tube in which evaporated material can be supplied or guided, for example, from an evaporation crucible to a substrate. According to embodiments that can be combined with any other embodiments described herein, the length of the dispensing tube can at least correspond to the height of the substrate to be deposited. In particular, the length of the dispensing tube can be at least 10% or even 20% longer than the height of the substrate to be deposited. For example, the length of the dispensing tube can be 1.3 m or greater, such as 2.5 m or greater. Accordingly, uniform deposition can be provided at the upper end and / or the lower end of the substrate. According to an alternative configuration, the dispensing tube or dispensing assembly can include one or more point sources that can be arranged along a vertical axis.

[0033] Accordingly, the “dispensing tube” or “dispensing assembly” as described herein may be configured to provide a line source that extends substantially vertically. In this disclosure, the term “substantially vertical” is specifically understood, when referring to substrate orientation, to allow a deviation of 10° or less from the vertical direction. This deviation is permissible because a substrate support with a deviation from the vertical orientation may result in a more stable substrate position or may cause fewer particles on the substrate during substrate processing. However, the substrate orientation during the deposition of metallic materials is considered substantially vertical, which is considered different from a horizontal substrate orientation. Accordingly, the surface of the substrate can be coated by a line source extending in a direction corresponding to one substrate size and by translational movement along another direction corresponding to another substrate size.

[0034] Embodiments of this disclosure relate to an evaporation source including an evaporation fitting or evaporation tube and a crucible. According to some embodiments that can be combined with other embodiments described herein, a sealing concept is provided, namely a flange of the crucible and / or a corresponding flange of the distribution tube. This sealing concept is particularly useful for high temperatures of 800°C or higher, such as 1000°C to 1500°C or even 1200°C to 1500°C. The sealing surface includes a spherical notch, i.e., two or more spherical surfaces. A spherical notch seal is provided for a high-temperature metal evaporation source.

[0035] According to one embodiment, a crucible for evaporating a material is provided. The crucible includes a housing for evaporating the material and a flange coupled to the housing to provide a sealing surface for the crucible. The sealing surface includes a first spherical surface having a portion of a first spherical body and a second spherical surface having a portion of a second spherical body, wherein the second spherical body is different from the first spherical body. According to some embodiments, the sealing surface is self-sealing, i.e., it avoids the need for separate seals.

[0036] Example reference Figure 1A and Figure 1B According to embodiments that can be combined with any other embodiments described herein, at least one material deposition source may include a crucible compartment 115 having a closable opening 116 configured for crucible replacement. Such a configuration can be particularly advantageous for convenient maintenance and easy and quick crucible replacement or substitution. The crucible holding arrangement may include a heating arrangement 160 configured to provide heat to the crucible to evaporate the material. Specifically, as... Figure 1A and Figure 1B As exemplarily shown, the heating arrangement 160 can be configured such that at least a portion of the crucible can be placed inside the heating arrangement. For example, the heating arrangement can be configured to hold or support the crucible in a lateral direction. The heating arrangement can be configured to provide heat to the crucible to evaporate the metallic material provided inside the crucible, for example, a metallic material having an evaporation temperature of about 800°C to about 1600°C.

[0037] According to some embodiments that can be combined with other embodiments described herein, the crucible and optionally the crucible compartment components may include refractory metals (e.g., Mo, W, Ta, and alloys or compounds of the aforementioned metals). For example, MoLa may be used. Accordingly, high temperatures can be provided during crucible operation.

[0038] Accordingly, according to an embodiment that can be combined with any other embodiment described herein, an actuator 130 may be provided to press the crucible toward the dispensing tube 120. The actuator may include at least one element of a spring and a pneumatic actuator.

[0039] like Figure 1A As shown, according to an embodiment that can be combined with any other embodiment described herein, the connection between the crucible 110 and the dispensing tube can be provided by the mating sealing surface 112A of the dispensing tube and the sealing surface 112B of the crucible. For example, as Figure 1A As exemplarily shown, the mating sealing surface 112A may be a concave contact surface, and the sealing surface 112B may be a mating convex contact surface.

[0040] like Figure 1BAs exemplarily illustrated, according to an embodiment that can be combined with any other embodiment described herein, actuator 130 may be connected to crucible holding arrangement 140. For example, crucible holding arrangement 140 may include mounting assembly 141 configured to mount the crucible holding arrangement to the wall of at least one material deposition source, such as... Figure 1B As exemplarily illustrated. In particular, mounting assembly 141 may include mounting plate 142 and one or more fixing elements 143, such as screws. The wall 111 of the material deposition source (for mounting to the retaining arrangement) may include corresponding receiving portions for the one or more fixing elements 143.

[0041] Figure 2A and Figure 2B A crucible 110 and a dispensing tube 120 are shown. The crucible has a flange. The dispensing tube has mating flanges, particularly corresponding mating flanges. The flange of the crucible includes a sealing surface 112B. The mating flange of the dispensing tube includes a mating sealing surface 112A. The sealing surface is a spherical surface 212 or may include a spherical surface 212. The mating sealing surface is a mating spherical surface or may include a mating spherical surface.

[0042] The spherical surface of the crucible is symmetrical about the axis of circularity (e.g. Figure 2A and Figure 2B The crucible is rotationally symmetric along its vertical axis. The height of the spherical surface is referred to herein as the second height 264. The height of the paired spherical surfaces is referred to herein as the first height 262. Furthermore, the flange of the crucible includes an opening with an opening size 254. The opening is configured to allow material evaporating in the crucible 110 to intrude toward the dispensing tube 120. The opening size 254 of the crucible flange (e.g., the diameter of the opening) is greater than the second height 264. Furthermore, the flange of the dispensing tube may include an opening with an opening size 252.

[0043] The mating spherical surfaces of the dispensing tube are rotationally symmetric, specifically about the same circular axis of symmetry as the crucible. The first height 262 of the mating spherical surfaces is greater than the second height 264 of the spherical surfaces. According to some embodiments that can be combined with other embodiments described herein, the second height may differ from the first height by at least 20%. For example, for a first height of 10 mm, the second height may be 8 mm or less, or the second height may be 12 mm or greater.

[0044] Figure 2BThe flange of the crucible 110 shown further includes an additional spherical surface 214. The spherical surface 212 is part of a first sphere, and the additional spherical surface 214 is part of a second sphere. The second sphere differs from the first sphere. Specifically, the radius of the first sphere along its semi-axis differs from the radius of the second sphere along the same semi-axis. Accordingly, it can be as follows: Figure 2B As shown and in more detail as Figure 2C The diagram shows steps.

[0045] According to some embodiments that can be combined with other embodiments described herein, the spherical body or spherical surface mentioned herein is understood to be a quadratic surface obtained by rotating an ellipse. For example, the spherical body may be a flattened spheroid or an oblate spheroid. According to some embodiments that can be combined with other embodiments described herein, the spherical body may be a sphere.

[0046] According to one embodiment, a crucible for evaporating material is provided. The crucible includes: a shell for evaporating material; and a flange coupled to the shell. The flange includes: a spherical surface, the spherical surface being rotationally symmetric about a circular axis of symmetry, the spherical surface having a second height along the axis; and an opening for the intrusion of the evaporating material, the opening having an opening size, wherein the second height is 30% or less relative to the opening size. For example, for an opening size of 100 mm, the second height may be 30 mm or less.

[0047] refer to Figure 2A and Figure 2B The described embodiments involve a crucible flange with a smaller height at the sealing surface compared to a dispensing tube flange with a greater height having a sealing surface. According to some embodiments that can be combined with other embodiments described herein, the functions of the sealing surface and the mating sealing surface are interchangeable. Furthermore, the crucible is described as having a convex sealing surface, and the dispensing tube is described as having a concave sealing surface. According to some embodiments that can be combined with other embodiments described herein, additional functions of the sealing surface and the mating sealing surface are interchangeable. The characteristic details and specific embodiments described in this disclosure can be similarly applied to the interchangeable functions and / or the interchangeable additional functions.

[0048] Embodiments of this disclosure are specifically configured for high-temperature applications, such as the evaporation of metals with an evaporation temperature of 800°C or higher. Accordingly, the sealing surface and the mating sealing surface experience a large temperature range during heating from room temperature to the evaporation temperature. Accordingly, it is advantageous to provide a sealing surface or a spherical surface with a relatively small height (e.g., relative to the opposing sealing surface or the relative spherical surface) during thermal expansion. In particular, small tilting movements have a reduced or no effect on the sealing characteristics of the flange and the mating flange. Advantageously, seals for high-temperature applications can be provided. Additionally or alternatively, a relatively small height of the spherical surface relative to the opening diameter can be provided.

[0049] Figure 2C The crucible is shown with an additional flange 200, and the crucible is, for example, as shown in the figure. Figure 1A and Figure 1B The crucible shown. Figure 2C Corresponding to Figure 2B The crucible shown has steps provided. Figure 2C The illustration shows an optional specific embodiment of the spherical surface, namely a spherical sealing surface with a relatively small height. The flange includes a sealing surface 112B. The sealing surface includes a first spherical surface 212, such as a first spherical surface, having a portion of a first spherical body (e.g., a first sphere). Additionally, a second spherical surface 214, such as a second spherical surface, having a portion of a second spherical body (e.g., a second sphere), may be provided. According to some embodiments that can be combined with other embodiments described herein, the second spherical surface may provide a guiding surface, such as a surface for improving the alignment of the crucible relative to the dispensing tube. Additionally or alternatively, particularly for small step sizes, the second spherical surface may provide sealing properties and therefore may be part of the sealing surface.

[0050] The first sphere and the second sphere are different. For example, the semi-axial radius of the first sphere may be different from that of the second sphere. A step with different radii may be provided between the first sphere and the second sphere. The step may extend along the periphery (i.e., circle) of the flange.

[0051] Common vacuum sealing concepts like ConFlat (CF) or KleinFlange (KF) are not suitable for high temperatures. In particular, ordinary sealing materials are not suitable for high temperatures. According to embodiments of this disclosure, sealing is achieved using metallic surfaces. At least one of the sealing surface and the mating sealing surface has a height smaller than the other sealing surface and / or its height is smaller than the opening size of the opening for the material to evaporate. Optionally, at least one of the sealing surface and the mating sealing surface may have two different spherical surfaces. The sealing concept according to embodiments of this disclosure can be used at temperatures, for example, up to 1500°C. Flanges are configured for temperatures of 800°C or higher.

[0052] According to some embodiments that can be combined with other embodiments described herein, the sealing surface comprises a refractory metal, particularly Mo, W, Ta, an alloy, or a compound. For example, MoLa can be used. Furthermore, additionally or alternatively, the sealing surface has a roughness of Rz = 3.0 or lower, particularly Rz = 2.5 or lower.

[0053] Figure 2C A flange of a crucible having a first spherical surface and a second spherical surface is shown. A similar concept can be applied to the mating sealing surfaces of a dispensing tube. According to one embodiment, a dispensing tube for guiding evaporating material in a vacuum processing system is provided. The dispensing tube includes: a dispensing housing having one or more openings for guiding evaporating material; and a mating flange coupled to the dispensing housing. The mating flange includes mating spherical surfaces that are rotationally symmetric about a circular axis of symmetry. The mating spherical surfaces have a second mating height along the axis. The mating flange includes a mating opening for the intrusion of the evaporating material, the mating opening having an opening size wherein the second mating height is 30% or less of the mating opening size. According to some embodiments that can be combined with other embodiments described herein, such as those relating to… Figure 2C The design of the sealing surface can alternatively provide a mating sealing surface. For example, the radius of the first mating sphere or mating ball may differ from that of the second mating sphere. A step may be provided between the first mating sphere and the second mating sphere.

[0054] Implementation reference for material deposition assembly Figure 3A and Figure 3B Description. According to an embodiment, a material deposition assembly is provided for depositing material onto a substrate in a vacuum deposition chamber. Figure 3BA material deposition assembly 300 is illustrated exemplary. At least one material deposition source 305 is provided. The material deposition source includes a dispensing tube 120 configured to guide evaporated material onto a substrate, wherein the dispensing tube has mating flanges having at least a first mating spherical surface. Furthermore, a crucible for evaporating material according to any embodiment described herein is provided.

[0055] Figure 3A Actuator 130 is shown. A material deposition assembly may include at least one actuator to provide contact force at the connection between a flange (e.g., the flange of a crucible) and a mating flange (e.g., the flange at a dispensing tube). A temperature-resistant pricing mechanism for sealing is advantageous considering the heat load at very high temperatures. The actuator may include a spring 330 in a housing 332. The housing may reduce heat radiation to the spring 330. According to some embodiments that can be combined with other embodiments described herein, a pneumatic actuator may be used instead of a spring. A guide pin 340 transmits the force of the actuator from a remote location to the crucible. For example, a guide pin may be used to contact a mounting plate 142 supporting the crucible 110. According to some embodiments that can be combined with other embodiments described herein, one or more point contacts 342 may be provided. Point contacts reduce heat transfer between the crucible 110 and the mechanism providing the force of the actuator (e.g., a spring).

[0056] Figure 3B A crucible 110 is shown engaging with the dispensing tube 120. An actuator provides a contact force Fc for the connection between the flange and the mating flange. According to some embodiments, the surface of the spheres may be a convex contact surface, and the surfaces of the mating spheres may be concave contact surfaces. Figure 3A As shown, the actuator can be pin-coupled to the crucible to provide the actuator within the crucible housing (e.g., Figure 1A The crucible compartment 115 shown is located outside.

[0057] According to some embodiments that can be combined with other embodiments described herein, the sealing concept with a ball-cut sealing surface is self-centering. The seal is unaffected by strain and / or bending during source heating and is insensitive to small-amplitude misalignment, especially when considering the small height of one of the mating spherical surfaces. The sealing function can be maintained at high temperatures, particularly in the absence of additional sealing elements (such as seals that may need to be replaced during maintenance).

[0058] The sealing surfaces are made of a high-temperature stable metallic material, such as Mo, Ta, W, alloys of the above materials, or combinations or compositions thereof. The two mating sealing surfaces have spherical cutout shapes (convex and concave) and are pressed together by a pressing mechanism (such as actuator 130). The pneumatic pressing mechanism also allows the sealing surfaces (e.g., crucible and tube) to be separated while hot.

[0059] According to some embodiments that can be combined with other embodiments described herein, the contact area of ​​the two mating portions is reduced to a spherical segment or spherical region, see, for example... Figure 2C Surface 212 is provided to ensure good self-centering and prevent clamping and / or bonding of the two components of the evaporation source. Similarly, spherical segments or spherical regions can be provided. A vacuum evaporator with a sealing concept for high-temperature sealing can be provided. The crucible is removable for refilling the material to be evaporated during maintenance.

[0060] Figure 3B A schematic cross-sectional view of a material deposition assembly 300 according to an embodiment described herein is shown. Specifically, the material deposition assembly is configured to deposit material onto a substrate in a vacuum deposition chamber. Figure 3B As exemplarily shown, the material deposition assembly includes at least one material deposition source 305 having a crucible 110 configured for evaporating material. Furthermore, the material deposition assembly includes a dispensing tube 120 configured to provide the evaporated material to a substrate. Figure 3B As exemplarily shown, at least one deposition source distribution pipe 120 may include a distribution pipe having one or more outlets 326 provided along the length of the distribution pipe.

[0061] An opening 313 may be provided at the bottom of the dispensing pipe 120. For example, the opening 313 provided at the bottom of the dispensing pipe 120 may be arranged and configured to allow fluid communication with the crucible 110 (e.g., via an opening provided in the top wall of the crucible). For example, the diameter D of the opening may be selected from a range having a lower limit D = 10 mm, particularly a lower limit D = 15 mm, more particularly a lower limit D = 20 mm, and an upper limit D = 100 mm, particularly an upper limit D = 80 mm, more particularly an upper limit D = 50 mm.

[0062] In addition, such as Figure 3A and Figure 3B As exemplarily shown, the material deposition assembly 300 may include an actuator 130 configured to apply a contact force F at the connection 312 between the crucible 110 and the dispensing tube 120. c .like Figure 3BAs exemplarily shown by the arrows, the force applicator or actuator is configured to apply a force F in a direction toward the connection 312 between the crucible 110 and the dispensing tube 120. For example, the force F can be a force in a generally vertical direction, such as a force in the opposite direction to gravity. For example, the actuator 130 can be configured to provide a force of 100 N, such as a contact force at the connection between the crucible and the dispensing tube.

[0063] According to embodiments that can be combined with other embodiments described herein, at least one material deposition source may include at least a first deposition source 305A and a second deposition source 305B. Additionally, a third deposition source 305C may be provided, such as... Figure 4 As exemplarily shown in the diagram. A first deposition source 305A includes a first crucible 110A configured to evaporate a first material, a first dispensing pipe 120A configured to supply the first evaporated material to a substrate, and a first actuator 130A configured to apply a contact force at the connection between the first crucible 110A and the first dispensing pipe 120A. A second deposition source 305B includes a second crucible 110B configured to evaporate a second material, a second dispensing pipe 120B configured to supply the second evaporated material to a substrate, and a second actuator 130B configured to apply a contact force at the connection between the second crucible 110B and the second dispensing pipe 120B. A third deposition source 305C includes a third crucible 110C configured to evaporate a third material, a third dispensing pipe 120C configured to supply the third evaporated material to a substrate, and a third actuator 130C configured to apply a contact force at the connection between the third crucible 110C and the third dispensing pipe 120C.

[0064] Figure 5 Showing according to such Figure 4 A more detailed schematic cross-sectional top view of a material deposition assembly of another embodiment described herein is shown as exemplarily illustrated. In particular, Figure 5 A cross-sectional top view of a material deposition assembly including a first deposition source 305A, a second deposition source 305B, and a third deposition source 305C is shown.

[0065] Accordingly, from Figure 4 and Figure 5 It should be understood that the three dispensing components (e.g., dispensing tubes) and corresponding evaporation crucibles can be provided adjacent to each other. Accordingly, the material deposition assembly can be provided as an array of evaporation sources, for example, in which more than one type of material can be evaporated simultaneously. In particular, exemplary reference is made to... Figure 5At least one material deposition source of the material deposition assembly 300 may include three deposition sources, such as a first deposition source 305A, a second deposition source 305B, and a third deposition source 305C. Each deposition source may include a dispensing tube as described herein and a crucible as described herein, wherein a sealing surface and a mating sealing surface are provided. According to embodiments of this disclosure, at least one of the sealing surface and the mating sealing surface is provided, i.e., a height smaller than the mating sealing surface or a height that is 30% or less of the opening size or opening diameter relative to an opening in the flange, wherein the opening is for the intrusion of evaporated material.

[0066] It should be understood that, regarding reference figures 1 to... Figure 3B The description of the features of at least one material deposition source 305 is not limited thereto, and can also be applied to the first deposition source 305A, the second deposition source 305B and the third deposition source 305C.

[0067] According to embodiments that can be combined with any other embodiments described herein, the evaporator control housing 580 may be provided adjacent to at least one material deposition source, for example having a first distribution pipe 120A, a second distribution pipe 120B, and a third distribution pipe 120C, such as Figure 5 As exemplarily illustrated. In particular, the evaporator control housing may be configured to maintain atmospheric pressure therein and is configured to house at least one element selected from the group consisting of switches, valves, controllers, cooling units, cooling control units, heating control units, power supplies, and measuring devices.

[0068] exist Figure 5 In the diagram, for illustrative purposes, the source material exiting the outlet of the distribution assembly is indicated by arrows. Due to the essentially triangular shape of the distribution assembly, the evaporation cones originating from the three distribution assemblies are close to each other, thus improving the mixing of source materials from different distribution assemblies. In particular, the shape of the cross-section of the distribution tubes allows for the placement of the outlets or nozzles of adjacent distribution tubes close to each other.

[0069] According to one aspect of this disclosure, a vacuum deposition system 600 is provided, such as... Figure 6 As exemplarily illustrated herein, the vacuum deposition system includes a vacuum deposition chamber 610, a material deposition assembly 300 in the vacuum deposition chamber 610 according to any of the embodiments described herein, and a substrate support configured to support a substrate 601 during material deposition.

[0070] Specifically, the material deposition assembly 300 can be provided on the track or linear guide 622, such as Figure 6As exemplarily illustrated, the linear guide 622 can be configured for translational movement of the material deposition assembly 300. Additionally, a driver can be provided for providing translational movement of the material deposition assembly 300. In particular, a transport device for non-contact transport of the material deposition assembly can be provided within the vacuum deposition chamber. Figure 6 As exemplarily shown, the vacuum deposition chamber 610 may have a gate valve 615, which may be connected to an adjacent routing module. The routing module may be configured to transport the substrate to another vacuum deposition system for further processing.

[0071] Example reference Figure 6 According to an embodiment that can be combined with any other embodiment described herein, two substrates, such as a first substrate 601A and a second substrate 601B, may be supported on corresponding transport tracks within the vacuum deposition chamber 610. Additionally, two tracks may be provided for providing a mask 633 on these two tracks.

[0072] Example reference Figure 6 A source support 631 may be provided, configured for translational movement of the material deposition assembly 300 along the linear guide 622. The source support 631 supports the crucible 110 and the distribution pipe 120 provided above the evaporation crucible, as... Figure 6 This is schematically illustrated. Accordingly, the vapor generated in the evaporation crucible can move upward and exit from one or more outlets of the distribution tube. Accordingly, as described herein, the distribution tube is configured to provide a plume of evaporated material, particularly evaporated metallic material, from the distribution tube 120 to the substrate 601.

[0073] According to one embodiment, a vacuum deposition system is provided. The vacuum deposition system includes a vacuum deposition chamber and a material deposition assembly according to any of the embodiments described herein. In particular, a flange having a sealing surface according to the embodiments described herein is provided. A substrate support is configured to support a substrate during material deposition, particularly in a substantially vertical orientation.

[0074] According to one implementation method, such as Figure 7 As shown, a method 700 is provided to manufacture an apparatus having at least one metal layer using a material deposition assembly. The material deposition assembly includes at least one material deposition source having a crucible and a dispensing tube according to embodiments described herein. According to operation 710, the method includes inserting the crucible into a compartment of the at least one material deposition source. At operation 720, a contact force is applied at the connection between the crucible and the dispensing tube. At operation 730, metal for depositing at least one metal layer is evaporated.

[0075] Therefore, in view of the embodiments described herein, improved material deposition components and improved vacuum deposition systems are provided, particularly for high-temperature evaporation applications, such as during OLED device manufacturing. The sealing concepts described herein are applicable to high-temperature sealing of evaporation crucibles, and can also be used for material deposition applications on flexible substrates (i.e., roll-to-roll (WEB)) or for material deposition applications on wafers (e.g., for semiconductor manufacturing).

[0076] While the foregoing describes embodiments of this disclosure, other and further embodiments of this disclosure may be conceived without departing from the basic scope of this disclosure, and the scope of this disclosure is defined by the appended claims.

[0077] In particular, this written description uses examples to disclose this disclosure, including best practices, and also enables any person skilled in the art to practice the described subject matter, including making and using any apparatus or system and performing any combined methods. Although various specific embodiments have been disclosed in the foregoing, the non-mutually exclusive features of the embodiments described above can be combined with each other. The scope of patentability is defined by the claims, and other examples are contemplated within the scope of the claims, provided that the claims have structural elements that are not different from the literal language of the claims, or as long as the claims include equivalent structural elements that are not substantially different from the literal language of the claims.

Claims

1. A material deposition assembly for depositing material onto a substrate in a vacuum deposition chamber, comprising: At least one material deposition source, said at least one material deposition source comprising: A dispensing tube configured to guide evaporated material to the substrate, the dispensing tube having mating flanges having mating spherical surfaces that are rotationally symmetric about a circular axis of symmetry, the mating spherical surfaces having a first height along the axis; and A crucible for evaporating the material, the crucible having a flange having a spherical surface that is rotationally symmetric about the axis, the spherical surface having a second height along the axis, wherein: The surface of the spherical body is a convex contact surface, the surface of the paired spherical bodies is a concave contact surface, and the first height is greater than the second height; or The surface of the spherical body is a concave contact surface, the surface of the paired spherical bodies is a convex contact surface, and the first height is less than the second height.

2. The material deposition assembly of claim 1, wherein the second height differs from the first height by at least 20%.

3. The material deposition assembly of claim 1, wherein the flange further comprises: An opening for the intrusion of evaporating material, the opening having an opening size, wherein the second height is 30% or less than the opening size.

4. The material deposition assembly according to claim 1, further comprising: An actuator for providing contact force at the connection between the flange and the mating flange.

5. The material deposition assembly of claim 4, wherein the actuator comprises at least one element of a spring or a pneumatic actuator.

6. The material deposition assembly of claim 4, wherein the actuator is pin-coupled to the crucible to provide the actuator outside the crucible housing.

7. The material deposition assembly of claim 1, wherein the concave contact surface is configured to engage with the convex contact surface.

8. The material deposition assembly of claim 1, wherein the crucible comprises: A housing for evaporating the material; The flange is coupled to the housing, and the flange further includes: An opening for the intrusion of evaporating material, the opening having an opening size, wherein the second height is 30% or less relative to the opening size.

9. The material deposition assembly of claim 8, wherein the spherical surface is part of a first spherical body, and wherein the flange further comprises: The additional spherical surface has a portion of a second sphere, which is different from the first sphere.

10. The material deposition assembly of claim 9, wherein the first radius of the first sphere along the semi-axis is different from the second radius of the second sphere along the semi-axis.

11. The material deposition assembly of claim 9, wherein a step is provided between the first sphere and the second sphere.

12. The material deposition assembly according to any one of claims 8 to 11, wherein the surface of the sphere comprises a refractory metal.

13. The material deposition assembly of claim 12, wherein the surface of the sphere comprises Mo, W, Ta, or an alloy of the aforementioned metals.

14. The material deposition assembly of claim 12, wherein the surface of the sphere comprises Mo, W, Ta, or a composite of the above metals.

15. The material deposition assembly according to any one of claims 8 to 11, wherein the surface of the sphere has a roughness of Rz = 3.0 or lower.

16. The material deposition assembly according to any one of claims 8 to 11, wherein the surface of the sphere has a roughness of Rz = 2.5 or lower.

17. The material deposition assembly according to any one of claims 8 to 11, wherein the flange is configured for a temperature of 800°C or higher.

18. The material deposition assembly of claim 1, wherein the distribution tube comprises: A dispensing housing having one or more openings for guiding the evaporating material; The mating flange is coupled to the dispensing housing, and the mating flange further includes: A pairing opening for the intrusion of evaporating material, the pairing opening having a pairing opening size, wherein the first height is 30% or less compared to the pairing opening size.

19. A vacuum deposition system, comprising: Vacuum deposition chamber; The material deposition assembly according to any one of claims 1 to 5, wherein the material deposition assembly is located in the vacuum deposition chamber; and A substrate support member configured to support the substrate during material deposition.

20. A method for manufacturing an apparatus having at least one metal layer using a material deposition assembly according to any one of claims 8 to 11, the method comprising: The crucible is inserted into the compartment of the at least one material deposition source; A contact force is applied at the connection between the crucible and the dispensing pipe; and Evaporate the metal to deposit the at least one metal layer.

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