A semiconductor sintering furnace

Abstract

The present invention provides a semiconductor sintering furnace, comprising a sintering machine base, a furnace cover device, a sintering device, a material pushing mechanism, and a frame material box mechanism. The sintering device is arranged on the sintering machine base along the X-axis. The sintering device includes a sintering platform for sintering the frame and a steel bar conveying mechanism for conveying the frame along the X-axis. One end of the sintering platform is connected to a furnace entry platform, and the other end of the sintering platform is connected to a material discharging platform. The furnace entry platform, sintering platform, and material discharging platform are arranged in sequence along the X-axis. The beneficial effects of the present invention are: on the basis of realizing automatic sintering of the frame, the structure is improved, making the entire equipment more compact, reducing the volume, and requiring less space. In addition, two groups of welding zones can be independently fed and sintered, and automatically collected, resulting in a faster production cycle and improved production efficiency.

Description

Technical Field

[0001] The invention relates to a sintering furnace, in particular to a semiconductor sintering furnace. Background Art

[0002] Semiconductors are small in size and easy to use, and are widely used in household appliances and industrial electronic circuits.

[0003] During the preparation of existing semiconductors, a frame with chips and jumper wires mounted thereon needs to be sintered in a sintering furnace. However, the existing sintering furnace has a complex structure, a large volume, and requires a large space. Summary of the Invention

[0004] In order to solve the problems in the prior art, the present invention provides a semiconductor sintering furnace.

[0005] The present invention provides a semiconductor sintering furnace, comprising a sintering machine base, a furnace cover device, a sintering device, a material pushing mechanism and a frame material box mechanism, wherein the sintering device is arranged on the sintering machine base along the X-axis, the sintering device comprises a sintering platform for sintering the frame and a steel bar conveying mechanism for conveying the frame along the X-axis, one end of the sintering platform is connected to a furnace entry platform, and the other end of the sintering platform is connected to a material discharging platform, the furnace entry platform, the sintering platform and the material discharging platform are arranged in sequence along the X-axis, and the furnace cover device is rotated with the sintering device The pushing mechanism is arranged on the sintering machine base along the Y-axis, the pushing mechanism is suspended above the discharging platform, the frame material box mechanism is arranged on the sintering machine base along the X-axis, the frame material box mechanism is docked with the discharging platform along the Y-axis, the steel bar conveying mechanism conveys the frame to be sintered on the furnace entry platform to the sintering platform for sintering along the X-axis, and then conveys it to the discharging platform, the pushing mechanism pushes the sintered frame on the discharging platform to the frame material box mechanism along the Y-axis to complete the material collection.

[0006] As a further improvement of the present invention, the sintering platform includes a platform mounting base plate, a sintering mounting plate, at least two heating blocks and a cooling block for realizing independent heating control, the sintering mounting plate is mounted on the platform mounting base plate, the heating blocks are flatly laid on the sintering mounting plate and arranged in sequence along the X direction to form a heating zone, the cooling blocks are flatly laid on the sintering mounting plate to form a cooling zone, the heating zone and the cooling zone are arranged in sequence along the X direction, the steel bar conveying mechanism includes a steel bar mounting frame, steel bars and a steel bar XZ transmission mechanism, at least two of the steel bars are located in the same plane and tensioned on the steel bar mounting frame, the steel bars are arranged along the X direction, the steel bar XZ transmission mechanism is connected to the steel bar mounting frame, the steel bar XZ transmission mechanism is mounted on the platform mounting base plate, the steel bar mounting frame is located between the sintering mounting plate and the platform mounting base plate, the heating block and the cooling block are both provided with steel bar accommodating grooves for accommodating the steel bars, and there are two steel bar XZ transmission mechanisms that are symmetrically arranged at both ends of the steel bar mounting frame.

[0007] As a further improvement of the present invention, the steel bar mounting frame includes a steel bar mounting base plate and a first steel bar mounting side plate and a second steel bar mounting side plate arranged at both ends of the steel bar mounting base plate, one end of the steel bar is fixed on the first steel bar mounting side plate, and the other end of the steel bar is mounted on the second steel bar mounting side plate through a spring tensioning mechanism, the spring tensioning mechanism includes a steel bar pull rod, a steel bar tensioning spring and a steel bar adjustment nut, the steel bar pull rod is fixed to the end of the steel bar, the steel bar pull rod passes through the second steel bar mounting side plate along the X direction and then engages with the steel bar adjustment nut threadably, and the steel bar tensioning spring is clamped between the second steel bar mounting side plate and the steel bar adjustment nut.

[0008] As a further improvement of the present invention, the steel bar XZ transmission mechanism includes a steel bar lifting plate, a steel bar X-axis guide shaft, a steel bar X-axis movable plate, a steel bar X-axis transmission mechanism and a steel bar Z-axis lifting mechanism. The steel bar Z-axis lifting mechanism is fixed on the platform mounting base plate, and the steel bar Z-axis lifting mechanism is connected to the steel bar lifting plate. The steel bar lifting plate and the steel bar X-axis guide shaft are in X-direction sliding fit. An X-direction hollow channel is provided on the steel bar mounting base plate, and the steel bar X-axis guide shaft is arranged within the X-direction hollow channel. One end of the steel bar X-axis guide shaft is connected to the steel bar mounting base plate, and the other end of the steel bar X-axis guide shaft is connected to the steel bar X-direction movable plate, and the steel bar X-direction movable plate is connected to the steel bar X-axis transmission mechanism.

[0009] As a further improvement of the present invention, the steel bar X-axis transmission mechanism includes a steel bar X-axis servo motor, a steel bar X-axis screw assembly and a steel bar X-axis driving support, the steel bar X-axis servo motor is connected to the steel bar X-axis driving support through the steel bar X-axis screw assembly, the steel bar X-axis driving support is provided with a movable plate groove for accommodating the steel bar X-axis movable plate, bearing rolling shafts are respectively installed on both sides of the movable plate groove, and deep groove ball bearings are provided on the bearing rolling shafts, the steel bar X-axis movable plate is inserted into the movable plate groove, and the deep groove ball bearings are tightly attached to both sides of the steel bar X-axis movable plate, the steel bar Z-axis jacking mechanism includes a steel bar Z-axis servo motor and a steel bar Z-axis screw assembly connected to the steel bar Z-axis servo motor, the steel bar Z-axis screw assembly includes a steel bar Z-axis screw and a steel bar Z-axis screw nut installed on the steel bar Z-axis screw, and anti-collision rubber pads are installed on the upper and lower ends of the steel bar Z-axis screw nut.

[0010] As a further improvement of the present invention, each of the heating blocks is embedded with a heating tube and a temperature measuring head with independent heating control, each of the cooling blocks is embedded with a cooling water pipe, the sintering mounting plate is evenly distributed with nitrogen pipes, the nitrogen pipes are densely covered with pinholes, and both ends of the platform mounting base are respectively provided with sealing side plates parallel to the horizontal plane.

[0011] As a further improvement of the present invention, the furnace cover device includes a crane, a furnace cover body and a furnace cover side sealing assembly located at the left and right ends of the furnace cover body. The rear end of the furnace cover body is rotatably connected to the sintering platform through a hinge, and the front end of the furnace cover body is provided with a furnace cover lifting assembly. The crane is connected to the furnace cover lifting assembly through a crane steel rope. The furnace cover side sealing assembly includes a side cover plate, a Z-direction sealing side plate and a Z-direction sealing side plate lifting drive mechanism for driving the Z-direction sealing side plate to perform Z-direction lifting. The Z-direction sealing side plate lifting drive mechanism is installed on the side cover plate, and the Z-direction sealing side plate lifting drive mechanism is connected to the Z-direction sealing side plate. In the closed state, the Z-direction sealing side plate is tightly attached to the sealing side plate.

[0012] As a further improvement of the present invention, the pushing mechanism includes a Y-axis pushing belt assembly and a pushing assembly, the Y-axis pushing belt assembly is connected to the pushing assembly, the pushing assembly includes a Z-axis pushing slide cylinder, a pushing seat, a pushing rod and a pushing buffer protection mechanism, the Z-axis pushing slide cylinder is connected to the Y-axis pushing belt assembly, the pushing seat is connected to the Z-axis pushing slide cylinder, the pushing rod is connected to the pushing seat through the pushing buffer protection mechanism, and the pushing buffer protection mechanism includes a pushing buffer linear bearing installation The push buffer linear bearing is mounted on the pusher seat, the push buffer linear bearing is mounted on the push buffer linear bearing mounting block, the push buffer linear bearing mounting block is connected to the pusher rod, the push buffer linear bearing is slidably fitted with the push buffer guide shaft, the push buffer spring is clamped between the push buffer linear bearing mounting block and the pusher seat, and the push buffer sensor is mounted on the pusher seat.

[0013] As a further improvement of the present invention, the frame material box mechanism includes a material box storage mechanism, a material box lifting platform for transporting material boxes, and a material box lifting drive mechanism for driving the material box lifting platform to perform lifting movements. The material box lifting drive mechanism is connected to the material box lifting platform. The material box storage mechanism includes an empty material box feeding layer and a full material box cache layer. The empty material box feeding layer includes an empty material box placing platform for placing empty material boxes, an empty material box pushing mechanism for pushing empty material boxes from the empty material box placing platform to the material box lifting platform. The full material box cache layer includes a full material box placing platform for placing full material boxes, and a full material box pushing mechanism for pushing full material boxes from the material box lifting platform to the full material box placing platform.

[0014] As a further improvement of the present invention, the material box pressing mechanism includes a material box pressing cylinder and a material box pressing block connected to the material box pressing cylinder. The top of the material box lifting platform is connected to a cylinder mounting seat, and the material box pressing cylinder is installed on the cylinder mounting seat.

[0015] The beneficial effects of the present invention are: through the above-mentioned scheme, on the basis of realizing automatic sintering of the frame, the structure is improved, making the overall equipment more compact, reducing the volume, requiring less space, and automatically sintering and automatically collecting materials without stopping the machine, the production cycle is faster, and the production efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other solutions can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 It is an overall schematic diagram of a semiconductor sintering furnace of the present invention.

[0018] Figure 2 The invention discloses a schematic diagram of an assembly of a furnace cover device for a semiconductor sintering furnace.

[0019] Figure 3 It is a schematic diagram of a furnace cover device of a semiconductor sintering furnace according to the present invention.

[0020] Figure 4 The present invention is a schematic diagram of a furnace cover side sealing assembly of a furnace cover device of a semiconductor sintering furnace.

[0021] Figure 5 It is a schematic diagram of a furnace cover side sealing assembly of a furnace cover device of a semiconductor sintering furnace of the present invention from another perspective.

[0022] Figure 6 The present invention is a partial schematic diagram of a furnace cover side sealing assembly of a furnace cover device of a semiconductor sintering furnace.

[0023] Figure 7 It is a schematic diagram of a closed state of a furnace cover device of a semiconductor sintering furnace according to the present invention.

[0024] Figure 8 It is a schematic diagram of a sintering device of a semiconductor sintering furnace of the present invention.

[0025] Figure 9 The present invention is a schematic diagram of a steel bar conveying mechanism of a sintering device of a semiconductor sintering furnace.

[0026] Figure 10 The present invention is a front view of a steel bar conveying mechanism of a sintering device of a semiconductor sintering furnace.

[0027] Figure 11 The present invention is a schematic diagram of the steel bar portion of a steel bar conveying mechanism of a sintering device of a semiconductor sintering furnace.

[0028] Figure 12 The present invention is a schematic diagram of a steel bar Z-axis lifting mechanism of a steel bar conveying mechanism of a sintering device of a semiconductor sintering furnace.

[0029] Figure 13 The present invention is a schematic diagram of a steel bar X-axis transmission mechanism of a steel bar conveying mechanism of a sintering device of a semiconductor sintering furnace.

[0030] Figure 14 This is a layout diagram of a sintering device of a semiconductor sintering furnace according to the present invention.

[0031] Figure 15It is a schematic diagram of a feeding area of ​​a sintering device of a semiconductor sintering furnace according to the present invention.

[0032] Figure 16 It is a schematic diagram of a pushing area of ​​a sintering device of a semiconductor sintering furnace according to the present invention.

[0033] Figure 17 The present invention is a schematic diagram of a sintering mounting plate of a sintering device of a semiconductor sintering furnace.

[0034] Figure 18 It is a schematic diagram of a heating block of a sintering device of a semiconductor sintering furnace of the present invention.

[0035] Figure 19 It is a schematic diagram of a material pushing mechanism of a semiconductor sintering furnace of the present invention.

[0036] Figure 20 The present invention is a perspective schematic diagram of a pushing assembly of a pushing mechanism of a semiconductor sintering furnace.

[0037] Figure 21 The present invention is a front view of a pushing assembly of a pushing mechanism of a semiconductor sintering furnace.

[0038] Figure 22 It is a front view of a frame magazine mechanism of the present invention.

[0039] Figure 23 It is a three-dimensional diagram of a frame magazine mechanism of the present invention.

[0040] Figure 24 It is a schematic diagram of an empty material box pushing mechanism of a frame material box mechanism of the present invention.

[0041] Figure 25 It is a schematic diagram of an empty material box placement platform of a frame material box mechanism of the present invention.

[0042] Figure 26 It is a schematic diagram of a full material box placement platform of a frame material box mechanism of the present invention.

[0043] Figure 27 It is a schematic diagram of an unpressed material box of a frame material box mechanism of the present invention.

[0044] Figure 28 It is a schematic diagram of a compacting material box of a frame material box mechanism of the present invention. DETAILED DESCRIPTION

[0045] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0046] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0047] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0048] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0049] like Figure 1 As shown, a semiconductor sintering furnace includes a sintering machine base 27, a furnace cover device 22, a sintering device, a pushing mechanism 25 and a frame material box mechanism 26. The sintering device is arranged on the sintering machine base 27 along the X-axis. The sintering device includes a sintering platform 23 for sintering the frame and a steel bar conveying mechanism 24 for conveying the frame along the X-axis. One end of the sintering platform 23 is connected to a furnace entry platform, and the other end of the sintering platform 23 is connected to a discharge platform. The furnace entry platform, sintering platform 23 and discharge platform are arranged in sequence along the X-axis. The furnace cover device 22 is rotatably connected to the sintering device. It can be opened and closed by rotation. The pushing mechanism 25 is arranged on the sintering machine base 27 along the Y-axis. The pushing mechanism 25 is suspended above the discharging platform. The frame material box mechanism 26 is arranged on the sintering machine base 27 along the X-axis. The frame material box mechanism 26 is docked with the discharging platform along the Y-axis. The steel bar conveying mechanism 24 conveys the frame to be sintered on the furnace entry platform to the sintering platform 23 for sintering along the X-axis, and then conveys it to the discharging platform. The pushing mechanism 25 pushes the frame that has completed sintering on the discharging platform to the frame material box mechanism 26 along the Y-axis to complete the material collection.

[0050] like Figures 2 to 7 As shown, the furnace cover device 22 includes a crane 2216 , a furnace cover body 221 , and furnace cover side sealing components 225 located at the left and right ends of the furnace cover body 221 .

[0051] The rear end of the furnace cover body 221 is rotatably connected to the sintering platform 23 via three hinges 224 , and the front end of the furnace cover body 221 is provided with a furnace cover lifting assembly 223 and a handle 222 .

[0052] The crane 2216 is connected to the furnace cover lifting assembly 223 via a crane steel rope 2217 , and the furnace cover body 221 can be controlled to open and close via the crane 2216 .

[0053] The furnace cover side sealing assembly 225 includes a side cover plate 226, a Z-direction sealing side plate 2215 and a Z-direction sealing side plate lifting drive mechanism that drives the Z-direction sealing side plate 2215 to move up and down in the Z direction. The Z-direction sealing side plate lifting drive mechanism is installed on the side cover plate 226, and the Z-direction sealing side plate lifting drive mechanism is connected to the Z-direction sealing side plate 2215.

[0054] The inner side of the side cover plate 226 is closely connected to the furnace cover body 221 , and the outer side of the side cover plate 226 is closely connected to the Z-direction sealing side plate 2215 .

[0055] The Z-direction sealing side panel lifting drive mechanism includes a side panel driving cylinder 2210, a side panel driving cylinder mounting plate 227 and a heat insulation plate 228. The side panel driving cylinder 2210 is installed on the heat insulation plate 228, the heat insulation plate 228 is installed on the side panel driving cylinder mounting plate 227, and the side panel driving cylinder mounting plate 227 is installed on the side cover plate 226. The side panel driving cylinder 2210 is connected to the Z-direction sealing side panel 2215, and the Z-direction sealing side panel 2215 can be driven by the side panel driving cylinder 2210 to perform lifting movements. When the side panel driving cylinder 2210 contracts, the Z-direction sealing side panel 2215 rises, and the furnace cover side sealing assembly 225 is in an open state. When the side panel driving cylinder 2210 is expanded, the Z-direction sealing side panel 2215 descends, and the furnace cover side sealing assembly 225 is in a closed state.

[0056] The heat insulation plate 228 can prevent the side plate driving cylinder 2210 from being affected by high temperature.

[0057] The side plate driving cylinder mounting plate 227 is L-shaped.

[0058] The Z-direction sealing side plate 2215 is provided with a card slot, and the side plate driving cylinder 2210 is connected to a cylinder external puller 229. The cylinder external puller 229 is snap-connected to the card slot, which can realize the rapid disassembly and assembly of the Z-direction sealing side plate 2215.

[0059] The side cover plate 226 is connected to the Z-direction sealing side plate 2215 via a Z-direction guide mechanism, which can ensure the smooth movement of the Z-direction sealing side plate 221.

[0060] The Z-direction guide mechanism includes a ball bushing 2211 , a ball bushing mounting plate 2212 , a guide post 2213 and a sealing side plate pull plate 2214 . The sealing side plate pull plate 2214 is mounted on the sealing side plate 2215 and the guide post 2213 .

[0061] The furnace cover device 22 includes a steel rope hanger 2218 fixed to the outer shell, and the crane steel rope 2217 passes through the steel rope hanger 2218.

[0062] The furnace cover device 22 includes horizontally arranged sealing side plates 2312 installed on both sides of the sintering platform 23. In the closed state, the Z-direction sealing side plates 2215 are tightly attached to the sealing side plates 2312 to prevent the loss of heat and nitrogen.

[0063] The furnace cover device 22 can, on the one hand, control the opening and closing of the furnace cover body by a crane, thus avoiding the problem of burns caused by manual operation; on the other hand, in the closed state, it can be sealed by the furnace cover side sealing assembly to prevent the loss of heat and nitrogen.

[0064] like Figures 8 to 18 As shown, the sintering platform 23 and the steel bar conveying mechanism 24 are main mechanisms of the sintering device. The sintering platform 23 is used for sintering and cooling the frames, and the steel bar conveying mechanism 24 is used for conveying the frames 401 and 402.

[0065] The sintering platform 23 includes a platform mounting base plate 2322, a sintering mounting plate 2321, at least two heating blocks 233 for realizing independent heating control, and a cooling block 2316. The sintering mounting plate 2321 is mounted on the platform mounting base plate 2322. The heating blocks 233 are laid flat on the sintering mounting plate 2321 and arranged in sequence along the X direction to form a heating zone 2323. The cooling blocks 2316 are laid flat on the sintering mounting plate 2321 to form a cooling zone 2324. The heating zone 2323 and the cooling zone 23224 are arranged in sequence along the X direction.

[0066] The steel bar conveying mechanism 24 includes a steel bar installation frame, steel bars 2410 and a steel bar XZ transmission mechanism. The steel bar installation frame and steel bars 2410 constitute a steel bar assembly 241.

[0067] There are at least two steel bars 2410 located in the same plane and tensioned on the steel bar installation frame. The steel bars 2410 are arranged along the X direction.

[0068] The steel bar XZ transmission mechanism is connected to the steel bar mounting frame, and the steel bar XZ transmission mechanism is installed on the platform mounting base plate 2322. The steel bar mounting frame is located between the sintering mounting plate 2321 and the platform mounting base plate 2322. The heating block 233 is provided with a steel bar accommodating groove 2325 for accommodating the steel bar 2310. The structure of the cooling block 2316 is the same as that of the heating block 233, and is also provided with a steel bar accommodating groove for accommodating the steel bar 2310.

[0069] The steel bar mounting frame includes a steel bar mounting base plate 244 and a first steel bar mounting side plate 245 and a second steel bar mounting side plate 2414 arranged at both ends of the steel bar mounting base plate 244. One end of the steel bar 2410 is fixed on the first steel bar mounting side plate 245, and the other end of the steel bar 2410 is mounted on the second steel bar mounting side plate 2414 through a spring tensioning mechanism.

[0070] The spring tensioning mechanism includes a steel bar pull rod 2413, a steel bar tensioning spring 2433 and a steel bar adjusting nut 2415. The steel bar pull rod 2413 is fixed at the end of the steel bar 2410. The steel bar pull rod 2413 passes through the second steel bar mounting side plate 2414 along the X direction and is threadedly engaged with the steel bar adjusting nut 2415. The steel bar tensioning spring 2433 is clamped between the second steel bar mounting side plate 2414 and the steel bar adjusting nut 2415.

[0071] The steel bar XZ transmission mechanism includes a steel bar lifting plate 247, a steel bar X-axis guide shaft 2412, a steel bar X-axis moving plate 249, a steel bar X-axis transmission mechanism 243 and a steel bar Z-axis lifting mechanism 242. The steel bar Z-axis lifting mechanism 242 is fixed on the platform mounting base plate 2322. The steel bar Z-axis lifting mechanism 242 is connected to the steel bar lifting plate 247. The steel bar lifting plate 247 and the steel bar X-axis guide shaft 2412 are in X-direction sliding cooperation. The steel bar mounting base plate 244 is provided with an X-direction hollow channel. The steel bar X-axis guide shaft 2412 is arranged in the X-direction hollow channel. One end of the steel bar X-axis guide shaft 2412 is connected to the steel bar mounting base plate 244, and the other end of the steel bar X-axis guide shaft 2412 is connected to the steel bar X-direction moving plate 249. The steel bar X-direction moving plate 249 is connected to the steel bar X-axis transmission mechanism 243.

[0072] The steel bar mounting base plate 244 is enclosed by aluminum profiles 2411 .

[0073] The steel bar lifting plate 247 is provided with a Z-direction guide shaft 246 and a linear bearing 248 for Z-direction guidance.

[0074] The steel bar X-axis transmission mechanism 243 includes a steel bar X-axis servo motor 2431, a steel bar X-axis screw assembly and a steel bar X-axis drive support 2426. The steel bar X-axis servo motor 2431 is connected to the steel bar X-axis drive support 2426 through the steel bar X-axis screw assembly. The steel bar X-axis drive support 2426 is provided with a moving plate groove 2432 for accommodating the steel bar X-axis moving plate 249. Bearing rolling shafts 2425 are respectively installed on both sides of the moving plate groove 2432. Deep groove ball bearings 2424 are provided on the bearing rolling shaft 2425. The steel bar X-axis moving plate 249 is inserted into the moving plate groove 2432, and the deep groove ball bearings 2424 are tightly attached to both sides of the steel bar X-axis moving plate 249.

[0075] The steel bar X-axis servo motor 2431 is installed on the X-direction motor mounting plate 2430.

[0076] The steel bar X-axis screw assembly includes a screw support 2423, an X-direction screw nut 2427, an X-direction screw 2428 and a screw support 2429.

[0077] The steel bar Z-axis lifting mechanism 242 includes a steel bar Z-axis servo motor 2416 and a steel bar Z-axis screw assembly connected to the steel bar Z-axis servo motor 2416. The steel bar Z-axis screw assembly includes a steel bar Z-axis screw 2422 and a steel bar Z-axis screw nut 2420 installed on the steel bar Z-axis screw 2422. Anti-collision rubber pads 2419 and 2421 are installed at the upper and lower ends of the steel bar Z-axis screw nut 2420.

[0078] The steel bar Z-axis servo motor 2416 is mounted on the Z-axis motor mounting support 2417 .

[0079] The steel bar Z-axis screw rod 2422 is installed on the screw rod support 2418.

[0080] There are two steel bar XZ transmission mechanisms which are symmetrically arranged at both ends of the steel bar installation frame.

[0081] Each of the heating blocks 233 is embedded with a heating tube 232 and a temperature measuring head 231 with independent heating control, and each of the cooling blocks 2316 is embedded with a cooling water pipe 2317 .

[0082] Nitrogen tubes 2318 are evenly distributed on the sintering mounting plate 2321 . The nitrogen tubes 2318 are densely covered with pinholes. The nitrogen tubes 2318 are connected to nitrogen pipe connectors 2319 , which are installed on the nitrogen pipe seat 2320 .

[0083] Sealing side plates 238 and 2312 are respectively provided at both ends of the platform mounting base plate 2322 to reduce heat loss.

[0084] The sintering device adopts two groups of sintering platforms 23 to improve the sintering efficiency. One end of the sintering platform 23 is provided with a furnace entry platform 234, 237, and the other end of the sintering platform 23 is provided with a discharge platform 2310, 2315, which realizes alternating furnace entry and alternating discharge, and can realize independent feeding and sintering of two groups of welding areas.

[0085] A frame sensor 235 and a sensor mounting plate 236 are provided on the furnace entry platforms 234 and 237 for sensing the presence of the frame.

[0086] The discharging platforms 2310 and 2315 are provided with a frame-to-material baffle 2311, a frame sensor 2313 and a sensor mounting plate 2314. The frame sensor 2313 and the sensor mounting plate 2314 are used to sense the presence of the frame, and the frame-to-material baffle 2311 is used to limit the position of the frame.

[0087] The furnace entry platforms 234 and 237 are mounted on the square tube 239 .

[0088] The sintering device is respectively arranged with a heating zone 2323 and a cooling zone 23224 through a heating block 233 and a cooling block 2316, and the heating zone 2323 can be arranged into a plurality of temperature zones with different temperatures through a heating block 233 with independent temperature control, so that the frame can be heated in each temperature zone for a period of time and then transferred to the cooling zone 23224, which is beneficial to improving the sintering effect and sintering efficiency.

[0089] The sintering device can lift the steel bar assembly 241 by the steel bar Z-axis lifting mechanism 242 (such as Figure 1 The frame 401 in the sintering process is lifted up), and the steel bar assembly 241 is transported to the next temperature zone by the steel bar X-axis transmission mechanism 243. After it is in place, the steel bar Z-axis lifting mechanism 242 drives the steel bar assembly 241 to descend, and the steel bar 2310 enters the steel bar accommodating groove, thereby placing the frame on the heating block 233 or the cooling block 2316 in the target temperature zone, and then the steel bar X-axis transmission mechanism 243 drives the steel bar assembly 241 to reset. This process is repeated to complete the transportation of the frame on the sintering platform 23. The sintering process has the advantages of simple transmission structure, compact structure, small parts and small space occupation.

[0090] like Figures 19 to 21As shown, the pushing mechanism 25 includes a Y-axis pushing belt assembly and a pushing assembly, the Y-axis pushing belt assembly is connected to the pushing assembly, the pushing assembly includes a Z-axis pushing slide cylinder 2514, a pushing seat 2520, a pushing rod 2513 and a pushing buffer protection mechanism, the Z-axis pushing slide cylinder 2514 is connected to the Y-axis pushing belt assembly, the pushing seat 2520 is connected to the Z-axis pushing slide cylinder 2514, the pushing rod 2513 is connected to the pushing seat 2520 through the pushing buffer protection mechanism, the pushing buffer protection mechanism includes a pushing buffer linear bearing mounting block 2512, a pushing buffer linear bearing 2511, a pushing The material buffer spring 2510, the material buffer guide shaft 259 and the material buffer sensor 257, the material buffer guide shaft 259 is installed on the material pushing seat 2520, the material buffer linear bearing 2511 is installed on the material buffer linear bearing mounting block 2512, the material buffer linear bearing mounting block 2512 is connected to the material pushing rod 2513, the material buffer linear bearing 2511 and the material buffer guide shaft 259 are in a sliding fit, the material buffer spring 2510 is clamped between the material buffer linear bearing mounting block 2512 and the material pushing seat 2520, and the material buffer sensor 257 is installed on the material pushing seat 2520.

[0091] A U-shaped groove 2521 is provided on the pushing seat 2520, and the two ends of the pushing buffer guide shaft 259 are respectively installed on both sides of the U-shaped groove 2521. The pushing buffer linear bearing mounting block 2512, the pushing buffer linear bearing 2511, and the pushing buffer spring 2510 are all arranged in the U-shaped groove 2521. The pushing rod 2513 is located on one side of the U-shaped groove 2521, and the pushing buffer sensor 257 is located on the other side of the U-shaped groove 2521.

[0092] The notch of the U-shaped groove 2521 is arranged downward.

[0093] There are two push buffer guide shafts 259 and they are parallel to the horizontal plane. A push buffer spring 2510 is correspondingly installed on each push buffer guide shaft 259 .

[0094] The pushing rod 2513 includes a pushing main plate 2522 parallel to the horizontal plane and pushing side plates 2523 bent downward from both ends of the pushing main plate 2522, which can better push the frame.

[0095] The bottom of the pusher buffer linear bearing mounting block 2512 protrudes from the U-shaped groove 2521 , and the bottom of the pusher buffer linear bearing mounting block 2512 is in close contact with the pusher main body plate 2522 .

[0096] The Y-axis pushing belt assembly includes a Y-axis pushing beam 252, a Y-axis pushing synchronous belt mechanism, a Y-axis pushing guide rail assembly 253 and a Y-axis pushing platform 258. The Y-axis pushing synchronous belt mechanism and the Y-axis pushing guide rail assembly 253 are respectively installed on the Y-axis pushing beam 252, the Y-axis pushing synchronous belt mechanism is connected to the Y-axis pushing platform 258, the Y-axis pushing platform 258 is connected to the Y-axis pushing guide rail assembly 253, and the Y-axis pushing platform 258 is connected to the Z-axis pushing slide cylinder 2514.

[0097] Both ends of the Y-axis pushing beam 252 are connected to profile die-casting support feet 2515 respectively.

[0098] The Y-axis push synchronous belt mechanism includes a servo motor 251 , a synchronous wheel 256 , a synchronous wheel 2516 , a pulley rolling shaft 2517 , a bearing pressure plate 2518 and a synchronous wheel mounting plate 2519 .

[0099] The pushing mechanism 25 can drive the pushing rod 2513 to descend through the Z-axis pushing slide cylinder 2514 to reach the discharge area of ​​the sintering platform, and then drive the pushing rod 2513 along the Y-axis through the Y-axis pushing belt assembly to push the material, thereby pushing the frame to the receiving station, such as the product frame box mechanism. The mechanism is also provided with a pushing buffer function. When the pushing material encounters resistance and reaches a certain amount, the sensor will be triggered, that is, the pushing action will be stopped, protecting the pushing mechanism and the product frame.

[0100] like Figures 22 to 28 As shown, the frame magazine mechanism 26 includes a magazine storage mechanism, a magazine lifting platform 263 for transporting magazines, and a magazine lifting drive mechanism for driving the magazine lifting platform 263 to perform lifting movements.

[0101] The material box lifting drive mechanism is connected to the material box lifting platform 263.

[0102] The material box lifting drive mechanism includes a main bracket, a servo motor screw assembly 261 and a fiber optic sensor 262 for sensing the frame above the frame feed port.

[0103] The material box storage mechanism is a double-layer structure, mainly including an empty material box feeding layer 2634 and a full material box buffer layer 2634, the empty material box feeding layer 2634 is the upper layer, and the full material box buffer layer 2634 is the lower layer.

[0104] The empty material box feeding layer 2634 includes an empty material box placement platform for placing the empty material box 265 and an empty material box pushing mechanism 266 for pushing the empty material box 265 from the empty material box placement platform to the material box lifting platform 263.

[0105] The full box buffer layer 2635 includes a full box placement platform for placing the full box 269 and a full box pushing mechanism 268 for pushing the full box 269 from the box lifting platform 263 to the full box placement platform.

[0106] The empty box placement platform includes an empty box placement plate 2636 and an empty box guide rail 2623 arranged on the empty box placement plate 2636. Empty box baffles 2622 for limiting the position of the empty box are respectively provided on both sides of the empty box placement plate 2636.

[0107] The empty box pushing mechanism 266 includes an empty box pushing synchronous belt conveyor mechanism 267 and an empty box push rod 2617 connected to the empty box pushing synchronous belt conveyor mechanism 267 . The empty box pushing synchronous belt conveyor mechanism 267 is installed on the empty box placement plate 2636 .

[0108] The empty box pushing synchronous belt conveyor mechanism 267 is installed on the bottom surface of the empty box placing plate 2636, and the empty box guide rail 2623 is installed on the top surface of the empty box placing plate 2636. The empty box placing plate 2636 is provided with an empty box push rod channel for the empty box push rod 2617 to pass through.

[0109] The empty material box pushing synchronous belt conveying mechanism 267 includes a synchronous pulley 2610, a synchronous belt, a servo motor mounting seat 2611, a servo motor 2612, a buffer guide column 2613, a linear bearing mounting plate 2614, a synchronous belt pressure block 2615, a linear guide assembly 2618, a synchronous pulley mounting seat 2619 and a synchronous pulley 2620. The synchronous pulley 2620 is mounted on the synchronous pulley mounting seat 2619 through a rolling shaft 2621. The servo motor 2612 is mounted on the servo motor mounting seat 2611. The servo motor 2612 is connected to the synchronous pulley 2610. The empty material box push rod 2617 is mounted on the push rod mounting plate 2616. The push rod mounting plate 2616 is mounted on the linear bearing mounting plate 2614. The linear guide assembly 2618 is used to guide the linear bearing mounting plate 2614.

[0110] The full box placement platform includes a full box placement base plate 2637 and a full box guide rail 2625 arranged on the full box placement base plate 2637. A box sensor 2624 is provided on the full box placement base plate 2637. The box sensor 2624 can sense whether the full boxes 269 stored on the full box placement base plate 2637 are full. When full, they can be collected in a centralized manner.

[0111] The full box pushing mechanism 268 includes a full box pushing dual-axis cylinder 2630 and a full box push rod 2629 connected to the full box pushing dual-axis cylinder 2630. The full box pushing dual-axis cylinder 2630 is installed on the groove of the full box placement bottom plate 2637, which can avoid interference between the full box pushing dual-axis cylinder 2630 and the full box 269, thereby realizing smooth discharge of the full box 269.

[0112] The full box pushing dual-axis cylinder 263 is preferably a TR dual-axis cylinder.

[0113] The material box lifting platform 263 is provided with a material box pressing mechanism 264 .

[0114] The material box pressing mechanism 264 includes a material box pressing cylinder 2632 and a material box pressing block 2633 connected to the material box pressing cylinder 2632. The top of the material box lifting platform 263 is connected to a cylinder mounting seat 2631, and the material box pressing cylinder 2632 is mounted on the cylinder mounting seat 2631.

[0115] The material box pressing cylinder 2632 is preferably an SDA cylinder.

[0116] The material box pressing cylinder 2632 is arranged to be inclined relative to the horizontal plane.

[0117] Since the servo motor screw assembly 261 drives the material box lifting platform 263 to move downward along the Z axis at a certain speed, in order to avoid shaking of the material box during the material receiving process along the Z axis, the material box clamping mechanism 264 is used to clamp the material box.

[0118] The material box pressing mechanism 264 uses an SDA cylinder to drive the material box pressing block 2633 to achieve pressing of the material box.

[0119] When the rod of the SDA cylinder is extended, the two pressing surfaces of the material box pressing block 2633 can be close to the two sides of the material box, thereby pressing the material box.

[0120] The material box lifting platform 263 includes a material box top plate 2627 and a material box fork 2626 located at the bottom of the material box top plate 2627. The material box fork 2626 can avoid interference with the full material box push rod 2629, thereby achieving smooth discharge of the full material box 269.

[0121] The product frame material box mechanism 26 can push the empty material box 265 from the empty material box placement platform to the material box lifting platform 263 through the empty material box pushing mechanism 266. After completing the feeding of the frame, the material box lifting platform 263 is driven to descend by the servo motor screw assembly 261. After it is in place, the full material box 269 is pushed from the material box lifting platform 263 to the full material box placement platform through the full material box pushing mechanism 268, thereby completing the automatic material receiving work of the frame.

[0122] The product frame material box mechanism 26 adopts a double-layer structure, with empty material boxes placed in the upper layer and full material boxes being centrally processed in the lower layer; several material boxes can be placed at one time, reducing frequent operations, improving production rhythm, and having the advantages of high production efficiency, compact layout, and small size.

[0123] The above is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention should not be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.

Claims

1. A semiconductor sintering furnace, characterized in that: It includes a sintering machine base, a furnace cover device, a sintering device, a pushing mechanism and a frame material box mechanism. The sintering device is arranged on the sintering machine base along the X-axis. The sintering device includes a sintering platform for sintering the frame and a steel bar conveying mechanism for conveying the frame along the X-axis. One end of the sintering platform is connected to the furnace entry platform, and the other end of the sintering platform is connected to the discharge platform. The furnace entry platform, sintering platform and discharge platform are arranged in sequence along the X-axis. The furnace cover device is rotatably connected to the sintering device. The pushing mechanism is arranged on the sintering machine base along the Y-axis. The pushing mechanism is suspended above the discharge platform, the frame magazine mechanism is arranged on the sintering machine base along the X-axis, the frame magazine mechanism is docked with the discharge platform along the Y-axis, the steel bar conveying mechanism conveys the frame to be sintered on the furnace entry platform to the sintering platform for sintering along the X-axis, and then conveys it to the discharge platform, the pushing mechanism pushes the frame that has been sintered on the discharge platform to the frame magazine mechanism along the Y-axis to complete the material collection, the sintering platform includes a platform mounting base, a sintering mounting plate, and at least two heating blocks that realize independent heating control and cooling blocks, the sintering mounting plate is mounted on the platform mounting bottom plate, the heating blocks are laid flat on the sintering mounting plate and arranged in sequence along the X direction to form a heating zone, the cooling blocks are laid flat on the sintering mounting plate to form a cooling zone, the heating zone and the cooling zone are arranged in sequence along the X direction, the steel bar conveying mechanism includes a steel bar mounting frame, steel bars and a steel bar XZ transmission mechanism, the steel bars have at least two and are located in the same plane and are tensioned on the steel bar mounting frame, the steel bars are arranged along the X direction, and the steel bar XZ transmission mechanism is connected to the steel bar mounting frame Then, the steel bar XZ transmission mechanism is installed on the platform mounting base plate, and the steel bar mounting frame is located between the sintering mounting plate and the platform mounting base plate. The heating block and the cooling block are both provided with steel bar accommodating grooves for accommodating the steel bars. There are two steel bar XZ transmission mechanisms and they are symmetrically arranged at both ends of the steel bar mounting frame. The material box clamping mechanism includes a material box clamping cylinder and a material box clamping block connected to the material box clamping cylinder. The top of the material box lifting platform is connected to a cylinder mounting seat, and the material box clamping cylinder is mounted on the cylinder mounting seat.

2. The semiconductor sintering furnace according to claim 1, wherein: The steel bar mounting frame includes a steel bar mounting base plate and a first steel bar mounting side plate and a second steel bar mounting side plate arranged at both ends of the steel bar mounting base plate. One end of the steel bar is fixed to the first steel bar mounting side plate, and the other end of the steel bar is mounted on the second steel bar mounting side plate through a spring tensioning mechanism. The spring tensioning mechanism includes a steel bar pull rod, a steel bar tensioning spring and a steel bar adjusting nut. The steel bar pull rod is fixed to the end of the steel bar, and the steel bar pull rod passes through the second steel bar mounting side plate along the X direction and then engages with the steel bar adjusting nut with a thread. The steel bar tensioning spring is clamped between the second steel bar mounting side plate and the steel bar adjusting nut.

3. The semiconductor sintering furnace according to claim 1, wherein: The steel bar XZ transmission mechanism includes a steel bar lifting plate, a steel bar X-axis guide shaft, a steel bar X-direction movable plate, a steel bar X-axis transmission mechanism and a steel bar Z-axis lifting mechanism. The steel bar Z-axis lifting mechanism is fixed to the platform mounting base plate, the steel bar Z-axis lifting mechanism is connected to the steel bar lifting plate, the steel bar lifting plate and the steel bar X-axis guide shaft are in X-direction sliding fit, an X-direction hollow channel is provided on the steel bar mounting base plate, the steel bar X-axis guide shaft is arranged within the X-direction hollow channel, one end of the steel bar X-axis guide shaft is connected to the steel bar mounting base plate, the other end of the steel bar X-axis guide shaft is connected to the steel bar X-direction movable plate, and the steel bar X-direction movable plate is connected to the steel bar X-axis transmission mechanism.

4. The semiconductor sintering furnace according to claim 1, wherein: The steel bar X-axis transmission mechanism includes a steel bar X-axis servo motor, a steel bar X-axis screw assembly and a steel bar X-axis driving support. The steel bar X-axis servo motor is connected to the steel bar X-axis driving support through the steel bar X-axis screw assembly. The steel bar X-axis driving support is provided with a movable plate groove for accommodating the steel bar X-axis movable plate, and bearing rolling shafts are respectively installed on both sides of the movable plate groove. Deep groove ball bearings are provided on the bearing rolling shafts. The steel bar X-axis movable plate is inserted into the movable plate groove, and the deep groove ball bearings are tightly attached to both sides of the steel bar X-axis movable plate. The steel bar Z-axis jacking mechanism includes a steel bar Z-axis servo motor and a steel bar Z-axis screw assembly connected to the steel bar Z-axis servo motor. The steel bar Z-axis screw assembly includes a steel bar Z-axis screw and a steel bar Z-axis screw nut installed on the steel bar Z-axis screw, and anti-collision rubber pads are installed on the upper and lower ends of the steel bar Z-axis screw nut.

5. The semiconductor sintering furnace according to claim 1, wherein: Each heating block is embedded with a heating tube and a temperature measuring head with independent heating control, each cooling block is embedded with a cooling water pipe, the sintering mounting plate is evenly distributed with nitrogen pipes, and the nitrogen pipes are densely covered with pinholes, and both ends of the platform mounting base are respectively provided with sealing side plates parallel to the horizontal plane.

6. The semiconductor sintering furnace according to claim 5, characterized in that: The furnace cover device includes a crane, a furnace cover body and furnace cover side sealing assemblies located at the left and right ends of the furnace cover body. The rear end of the furnace cover body is rotatably connected to the sintering platform through a hinge, and the front end of the furnace cover body is provided with a furnace cover lifting assembly. The crane is connected to the furnace cover lifting assembly through a crane steel rope. The furnace cover side sealing assembly includes a side cover plate, a Z-direction sealing side plate and a Z-direction sealing side plate lifting drive mechanism for driving the Z-direction sealing side plate to perform Z-direction lifting. The Z-direction sealing side plate lifting drive mechanism is installed on the side cover plate, and the Z-direction sealing side plate lifting drive mechanism is connected to the Z-direction sealing side plate. In the closed state, the Z-direction sealing side plate is tightly attached to the sealing side plate.

7. The semiconductor sintering furnace according to claim 1, characterized in that: The pushing mechanism includes a Y-axis pushing belt assembly and a pushing assembly, the Y-axis pushing belt assembly is connected to the pushing assembly, the pushing assembly includes a Z-axis pushing slide cylinder, a pushing seat, a pushing rod and a pushing buffer protection mechanism, the Z-axis pushing slide cylinder is connected to the Y-axis pushing belt assembly, the pushing seat is connected to the Z-axis pushing slide cylinder, the pushing rod is connected to the pushing seat through the pushing buffer protection mechanism, the pushing buffer protection mechanism includes a pushing buffer linear bearing mounting block, a pushing buffer linear bearing, a pushing buffer spring, a pushing buffer guide shaft and a pushing buffer sensor, the pushing buffer guide shaft is mounted on the pushing seat, the pushing buffer linear bearing is mounted on the pushing buffer linear bearing mounting block, the pushing buffer linear bearing mounting block is connected to the pushing rod, the pushing buffer linear bearing and the pushing buffer guide shaft are slidingly matched, the pushing buffer spring is clamped between the pushing buffer linear bearing mounting block and the pushing seat, and the pushing buffer sensor is mounted on the pushing seat.

8. The semiconductor sintering furnace according to claim 1, characterized in that: The frame material box mechanism includes a material box storage mechanism, a material box lifting platform for transporting material boxes, and a material box lifting drive mechanism for driving the material box lifting platform to perform lifting movements. The material box lifting drive mechanism is connected to the material box lifting platform. The material box storage mechanism includes an empty material box feeding layer and a full material box buffer layer. The empty material box feeding layer includes an empty material box placing platform for placing empty material boxes, an empty material box pushing mechanism for pushing the empty material boxes from the empty material box placing platform to the material box lifting platform. The full material box buffer layer includes a full material box placing platform for placing full material boxes, and a full material box pushing mechanism for pushing the full material boxes from the material box lifting platform to the full material box placing platform.

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