A glass substrate alignment measurement system, method and apparatus

Abstract

This invention discloses a glass substrate alignment and measurement system, method, and apparatus. In the system, a host computer is connected to a first motion control module, which controls all line scan cameras to have their focal planes aligned on the same plane according to a first instruction from the host computer, and controls the line scan cameras to move along a first preset path. Alternatively, the host computer is connected to a second motion control module, which controls the glass substrate to move along a second preset path according to a second instruction from the host computer. The glass substrate is divided into n regions according to the resolution of the line scan cameras. After scanning the m-th region according to the first preset path, the line scan cameras form an image of the m-th region. The host computer obtains the position of each chip in the m-th region based on the image of the m-th region. Simultaneously, the line scan cameras continue to scan the (m+1)-th region in parallel according to the first preset path to form an image of the (m+1)-th region. Here, m and n are both positive integers, and m is less than n, to achieve rapid and accurate acquisition of the position of each chip.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor lithography technology, and in particular to a glass substrate alignment measurement system, method and apparatus. Background Technology

[0002] In semiconductor device fabrication, chips are first formed on a glass substrate. Although the chips themselves are regular, their overall layout on the glass substrate is irregular. This poses difficulties for subsequent processes such as forming other film layers or laying circuits (photolithography). Therefore, it is necessary to know the specific location of the chip before forming other film layers or laying circuits on it, so that the chip can be aligned and processed accordingly. Currently, each chip on the glass substrate is photographed using a single area scan camera to obtain its specific location. Since there are thousands of chips on a single glass substrate, photographing each chip is time-consuming and results in low product yield. Summary of the Invention

[0003] This invention provides a glass substrate alignment measurement system, method, and apparatus to quickly obtain the precise position of each chip on the glass substrate, with short processing time and high product yield.

[0004] To achieve the above objectives, a first aspect of the present invention provides a glass substrate alignment and measurement system, comprising:

[0005] A host computer, a first motion control module and / or a second motion control module, and at least one line scan camera;

[0006] The host computer is connected to the first motion control module. The first motion control module is used to control the focal planes of all the line scan cameras to be on the same plane according to the first instruction of the host computer, and to control the line scan cameras to step along a first preset path.

[0007] And / or, the host computer is connected to the second motion control module, the second motion control module is used to control the glass substrate to step along a second preset path according to the second instruction of the host computer, wherein the first preset path and the second preset path are opposite in direction;

[0008] The line scan camera is located on one side of the glass substrate carrying the chip. The glass substrate is divided into n regions. The line scan camera scans the m-th region according to the first preset path and forms an image of the m-th region. The host computer obtains the position of each chip in the m-th region based on the image of the m-th region. At the same time, the line scan camera continues to scan the (m+1)-th region in parallel according to the first preset path to form an image of the (m+1)-th region. m and n are both positive integers, and m is less than n.

[0009] According to an embodiment of the present invention, the glass substrate alignment and measurement system includes: a first motion control module and a second motion control module, and further includes: a synchronization control module, wherein the synchronization control module is connected to the first motion control module and the second motion control module respectively, and the synchronization control module is used to synchronously control the first motion control module and the second motion control module according to the instructions of the host computer, so as to control the acquisition speed of the line scan camera and the movement speed of the glass substrate to be the same.

[0010] According to one embodiment of the present invention, the area division on the glass substrate is based on the resolution of the line scan camera.

[0011] According to one embodiment of the present invention, the first preset path and the second preset path are both serpentine or straight.

[0012] According to one embodiment of the present invention, when there are multiple line scan cameras, the multiple line scan cameras are arranged at a predetermined number of regions along a first direction and / or a second direction, wherein the predetermined number of regions is greater than or equal to 0, the first direction is a direction parallel to one side of the glass substrate, the second direction is a direction parallel to the other side of the glass substrate, and one side of the glass substrate is perpendicular to the other side.

[0013] According to one embodiment of the present invention, a plurality of said line scan cameras are arranged in a matrix form.

[0014] According to one embodiment of the present invention, the glass substrate alignment measurement system further includes a position detection device for detecting the position of the glass substrate movement.

[0015] According to one embodiment of the present invention, the regions divided on the glass substrate have the same side length, which is the product of the pixel width of the linear scan camera and the resolution of the long side of a single scan.

[0016] To achieve the above objectives, a second aspect of the present invention provides a glass substrate alignment measurement method, which is based on the glass substrate alignment measurement system described above. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment measurement system includes a linear array camera.

[0017] The method includes the following steps:

[0018] The linear scan camera is controlled to traverse the (1, g)th region and acquire the image of the (1, g)th region;

[0019] The position of each chip in the (1, g) region is obtained based on the image of the (1, g) region. At the same time, the line scan camera is controlled to traverse the (1, g+1) region and obtain the image of the (1, g+1) region.

[0020] The process continues until the line scan camera traverses the (1, j) region to acquire an image of the (1, j) region; and the position of each chip in the (1, j) region is obtained based on the image of the (1, j) region.

[0021] The linear scan camera is controlled to traverse the (2, j)th region and acquire the image of the (2, j)th region;

[0022] The positions of each chip in the (2, j) region are obtained based on the image of the (2, j) region. At the same time, the line scan camera is controlled to traverse the (2, j-1) region and obtain the image of the (2, j-1) region.

[0023] The process continues until the line scan camera traverses the (2, 1) region to acquire an image of the (2, 1) region; and based on the image of the (2, 1) region, the position of each chip in the (2, 1) region is acquired.

[0024] The process continues until the line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, and g are all positive integers, and g is less than j.

[0025] To achieve the above objectives, a third aspect of the present invention provides a glass substrate alignment measurement method, which is based on the glass substrate alignment measurement system described above. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment measurement system includes a linear array camera.

[0026] The method includes the following steps:

[0027] The linear scan camera is controlled to traverse the (k, 1)th region and acquire the image of the (k, 1)th region;

[0028] The position of each chip in the (k, 1) region is obtained based on the image of the (k, 1) region. At the same time, the line scan camera is controlled to traverse the (k+1, 1) region and obtain the image of the (k+1, 1) region.

[0029] The process continues until the line scan camera traverses the (i, 1)th region to acquire an image of the (i, 1)th region; and the position of each chip in the (i, 1)th region is obtained based on the image of the (i, 1)th region.

[0030] The linear scan camera is controlled to traverse the (i, 2)th region and acquire the image of the (i, 2)th region;

[0031] The positions of each chip in the (i, 2) region are obtained based on the image of the (i, 2) region. At the same time, the line scan camera is controlled to traverse the (i-1, 2) region and obtain the image of the (i-1, 2) region.

[0032] The process continues until the line scan camera traverses the (1, 2) region to acquire the image of the (1, 2) region; and based on the image of the (1, 2) region, the position of each chip in the (1, 2) region is acquired.

[0033] The process continues until the line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, k are all positive integers, and k is less than i.

[0034] According to one embodiment of the present invention, before controlling the line scan camera to traverse the divided region, the method further includes:

[0035] The surface of the glass substrate is controlled to be on the focal plane of the line scan camera.

[0036] To achieve the above objectives, a fourth aspect of the present invention provides a glass substrate alignment measurement method, which is based on the glass substrate alignment measurement system described above. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment measurement system includes multiple linear array cameras. The multiple linear array cameras are arranged along a first direction with a preset number of regions between them, and the first linear array camera is located above the (1, 1)th region.

[0037] The method includes the following steps:

[0038] Control all the line scan cameras to scan along the first direction until the next line scan camera traverses the initial area where the previous line scan camera is located, and control all the line scan cameras to step along the second direction.

[0039] Control all the line scan cameras to scan in the opposite direction along the first direction until the area where all the line scan cameras are located along the second direction is aligned with the initial area where each line scan camera is located, and control all the line scan cameras to step along the second direction;

[0040] These two steps are repeated until all the divided regions on the glass substrate have been traversed, wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

[0041] According to one embodiment of the present invention, if all the line scan cameras cannot traverse all the divided regions on the glass substrate after scanning based on the method described in the previous embodiment four, then the paths of all the line scan cameras are replanned according to the remaining divided regions on the glass substrate, and all the line scan cameras are controlled to traverse the remaining divided regions on the glass substrate according to the replanned paths.

[0042] To achieve the above objectives, a fifth aspect of the present invention provides a glass substrate alignment measurement method, which is based on the glass substrate alignment measurement system described above. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment measurement system includes multiple linear array cameras. The multiple linear array cameras are arranged in a matrix above the glass substrate along a first direction and a second direction. Along the first direction, each linear array camera is spaced apart by a first preset number of regions, and along the second direction, each linear array camera is spaced apart by a second preset number of regions. The first linear array camera is located above the (1, 1)th region.

[0043] The method includes the following steps:

[0044] Control all the line scan cameras to scan along the first direction until the rear line scan camera arranged along the first direction traverses to the initial area where the front line scan camera is located, and control all the line scan cameras to step along the second direction.

[0045] Control all the line scan cameras to scan in the opposite direction along the first direction until the area where all the line scan cameras arranged along the first direction are located along the second direction is aligned with the initial area where each of the line scan cameras is located along the first direction; control all the line scan cameras to step along the second direction.

[0046] These two steps are repeated until the rear array cameras arranged along the second direction are located in the initial area where the front array cameras are located, or until the rear array cameras arranged along the second direction are located in the first direction where the initial area where the front array cameras are located; wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

[0047] According to one embodiment of the present invention, before the line scan camera traverses the divided region, the method further includes:

[0048] Control the focal planes of all the line scan cameras to be on the same plane; and control the surface of the glass substrate to be on the plane.

[0049] According to an embodiment of the present invention, after the linear scan camera traverses the previous region of the glass substrate, while traversing the next region of the glass substrate, the method further includes:

[0050] The image stitched together from the previous region becomes the complete image of the previous region;

[0051] The alignment position of each chip in the previous region is obtained based on the overall image of the previous region.

[0052] According to one embodiment of the present invention, the images of adjacent divided regions overlap.

[0053] To achieve the above objectives, a sixth aspect of the present invention provides a glass substrate alignment measurement device, including the glass substrate alignment measurement system as described above.

[0054] According to embodiments of the present invention, a glass substrate alignment measurement system, method, and apparatus are provided, wherein the system includes: a host computer, a first motion control module and / or a second motion control module, and at least one line scan camera; the host computer is connected to the first motion control module, which controls all line scan cameras to have their focal planes on the same plane according to a first instruction from the host computer, and controls the line scan cameras to step along a first preset path; and / or, the host computer is connected to the second motion control module, which controls the glass substrate to step along a second preset path according to a second instruction from the host computer; wherein the line scan camera is located on one side of the glass substrate carrying the chip; the glass substrate is divided into n regions according to the resolution of the line scan camera, and the line scan camera forms an image of the m-th region after scanning the m-th region according to the first preset path; the host computer obtains the position of each chip in the m-th region based on the image of the m-th region, and simultaneously, the line scan camera continues to scan the (m+1)-th region in parallel according to the first preset path to form an image of the (m+1)-th region, where m and n are both positive integers, and m is less than n, so as to achieve rapid acquisition of the accurate position of each chip on the glass substrate, with short time consumption and high product yield. Attached Figure Description

[0055] Figure 1 This is a block diagram of the glass substrate alignment and measurement system proposed in an embodiment of the present invention;

[0056] Figure 2 This is a schematic diagram of the chip on the glass substrate in the glass substrate alignment and measurement system of this invention.

[0057] Figure 3 This is a motion path diagram of a linear array camera in a glass substrate alignment and measurement system according to an embodiment of the present invention.

[0058] Figure 4 This is a diagram showing the region division of a glass substrate in a glass substrate alignment and measurement system according to an embodiment of the present invention.

[0059] Figure 5This is a motion path diagram of a linear array camera in a glass substrate alignment and measurement system according to another embodiment of the present invention;

[0060] Figure 6 This is a block diagram of a glass substrate alignment and measurement system according to an embodiment of the present invention;

[0061] Figure 7 This is a motion path diagram of a linear array camera in a glass substrate alignment and measurement system according to another embodiment of the present invention;

[0062] Figure 8 This is a motion path diagram of a linear array camera in a glass substrate alignment and measurement system according to another embodiment of the present invention.

[0063] Figure 9 This is a motion path diagram of a linear array camera in a glass substrate alignment and measurement system according to another embodiment of the present invention.

[0064] Figure 10 This is a flowchart of a glass substrate alignment measurement method according to an embodiment of the present invention;

[0065] Figure 11 This is a flowchart of a glass substrate alignment and measurement method according to another embodiment of the present invention;

[0066] Figure 12 This is a flowchart of a glass substrate alignment and measurement method according to another embodiment of the present invention;

[0067] Figure 13 This is a flowchart of a glass substrate alignment measurement method proposed in another embodiment of the present invention;

[0068] Figure 14 This is a layout diagram of the linear array camera in the glass substrate alignment and measurement system of this invention.

[0069] Figure 15 This is a region division diagram of the glass substrate in the glass substrate alignment and measurement system of this invention.

[0070] Figure 16 This is a graph showing the relationship between alignment time and glass substrate movement speed when the glass substrate alignment measurement system of this invention includes multiple linear array cameras.

[0071] Figure 17 This is a graph showing the relationship between alignment time and the speed of glass substrate movement when the glass substrate alignment measurement system of this invention includes a single linear array camera. Detailed Implementation

[0072] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0073] Figure 1 This is a block diagram of the glass substrate alignment and measurement system proposed in an embodiment of the present invention. Figure 1 As shown, the glass substrate alignment and measurement system 100 includes:

[0074] The host computer 101, the first motion control module 102 and / or the second motion control module 103, and at least one line scan camera 104;

[0075] The host computer 101 is connected to the first motion control module 102. The first motion control module 102 is used to control the focal plane of all line scan cameras 104 to be on the same plane according to the first instruction of the host computer 101, and to control the line scan cameras 104 to step along the first preset path.

[0076] And / or, the host computer 101 is connected to the second motion control module 103, which is used to control the glass substrate 105 to step along the second preset path according to the second instruction of the host computer 101;

[0077] Among them, the line scan camera 104 is located on one side of the glass substrate 105 carrying the chip 106 (e.g., Figure 1 and Figure 2 (As shown); the glass substrate 105 is divided into n regions according to the resolution of the line scan camera 104. The line scan camera 104 scans the m-th region according to the first preset path and forms an image of the m-th region; the host computer 101 obtains the position of each chip 106 in the m-th region according to the image of the m-th region. At the same time, the line scan camera 104 continues to scan the (m+1)-th region in parallel according to the first preset path to form an image of the (m+1)-th region. m and n are both positive integers, and m is less than n.

[0078] It should be noted that when the line scan camera 104 traverses the (m+1)th region and forms the image of the (m+1)th region, the host computer 101 acquires the position of each chip in the mth region based on the image of the mth region formed by the line scan camera 104. This avoids the area scan camera taking pictures of each chip one by one to obtain the specific position of each chip. The host computer 101 and the line scan camera 104 process in parallel, making it faster to obtain the specific position of each chip.

[0079] It is understood that there can be one or more line scan cameras 104, and both the line scan cameras 104 and the glass substrate 105 can move, or only the line scan cameras 104 can move, or only the glass substrate 105 can move, so as to realize the acquisition of images of the area on the glass substrate 105 by the line scan cameras 104.

[0080] like Figure 3 and Figure 4 As shown, when there is only one line scan camera 104 and only the line scan camera 104 moves, the host computer 101 controls the first motion control module 102 to control the movement of the line scan camera 104. The glass substrate 105 is divided into i*j regions in matrix form along the first direction (x direction, the same below) and the second direction (negative y direction, the same below). The line scan camera 104 scans along the first direction to the j-th region of the first row of the glass substrate 105. The line scan camera 104 steps along the second direction and then continues to scan in the reverse direction along the first direction until it scans the first column and second row of the glass substrate 105. Then it steps along the second direction and continues to scan along the first direction to the j-th region of the third row, and so on, until the line scan camera 104 traverses the i-th row and j-th column region, and the scanning ends. Each time the line scan camera 104 finishes scanning an area, it uploads an image to the host computer 101. Thus, when the line scan camera 104 scans the next area, the host computer 101 can process the image in parallel, obtain the position of each chip in the area, save time, and obtain the position of multiple chips from one image, making the processing speed faster.

[0081] In other embodiments, such as Figure 4 and Figure 5 As shown, the line scan camera 104 can first scan along the second direction and then step along the first direction, that is, the first preset path can be serpentine.

[0082] When there is only one line scan camera 101, and only the glass substrate 105 moves, the host computer 101 controls the second motion control module 103 to control the movement of the glass substrate 105. The glass substrate 105 moves along the first direction. When the area of ​​the first row and j column on the glass substrate 105 is below the line scan camera 104, the host computer controls the glass substrate 105 to step in the opposite direction of the second direction, and then scans in the opposite direction of the first direction. When the area of ​​the second row and first column on the glass substrate 105 is below the line scan camera 104, the host computer controls the glass substrate 105 to step in the opposite direction of the second direction, and then scans in the first direction, until the line scan camera 104 has traversed each divided area on the glass substrate 105, and the scanning ends. Each time the line scan camera 104 traverses an area, the host computer 101 processes one image, obtaining the position of each chip within that area. The host computer 101 and the line scan camera 104 process in parallel, increasing the processing speed. Furthermore, the movement path of the glass substrate 105 is serpentine, that is, the second preset path is serpentine.

[0083] In another embodiment, scanning can be performed along the second direction and stepping along the first direction, without being specifically limited here.

[0084] When there is one line scan camera 104, and both the glass substrate 105 and the line scan camera 104 are moving, the host computer 101 controls the first motion control module 102 to control the movement of the line scan camera 104, and at the same time controls the second motion control module 103 to control the movement of the glass substrate 105. The line scan camera 104 can move along a first direction, and the glass substrate 105 can move in the opposite direction. When the line scan camera 104 traverses the first row and j column region on the glass substrate 105, the host computer 101 controls the line scan camera 104 to step along a second direction and controls the glass substrate 105 to step in the opposite direction along the second direction. Then, the host computer controls the line scan camera 104 to scan in the opposite direction along the first direction while simultaneously controlling the glass substrate 105 to scan along the first direction, until the line scan camera 104 scans the second row and first column of the glass substrate 105. The host computer then continues to control the line scan camera 104 to step along the second direction while simultaneously controlling the glass substrate 105 to step in the opposite direction along the second direction. This process is repeated until the line scan camera 104 traverses the i row and j column region on the glass substrate 105, at which point the scanning ends. Because the glass substrate 105 and the line scan camera 104 move simultaneously, the overall movement time is shortened, improving scanning efficiency.

[0085] In this embodiment, such as Figure 6 As shown, to ensure that the image scanned by the line scan camera 104 is free from trailing, stretching, and compression, the glass substrate alignment measurement system 100 includes: a first motion control module 102 and a second motion control module 103, and a synchronization control module 107. The synchronization control module 107 is connected to both the first and second motion control modules 102 and 103 respectively. The synchronization control module 107 is used to synchronously control the first and second motion control modules 102 and 103 according to the instructions from the host computer 101, so as to control the acquisition speed of the line scan camera 104 and the movement speed of the glass substrate 105 to be the same. This controls the synchronization process between the line scan data acquired by the line scan camera 104 and the glass substrate 105, avoiding image stretching due to the line scan camera 104's acquisition speed being higher than the movement speed of the glass substrate 105, or image compression due to the line scan camera 104's acquisition speed being lower than the movement speed of the glass substrate 105. In other words, the synchronization between the two is the key factor in achieving high precision.

[0086] In other embodiments, scanning can be performed along the second direction and stepping along the first direction, without specific limitations.

[0087] Therefore, taking the glass substrate 105 with dimensions of 405mm*515mm as an example, where each chip 106 is 7mm*7mm with a spacing of 0.1mm, it is initially estimated that there are approximately 4100 chips (57*72) to be aligned. Using the traditional area scan camera imaging mode, processing one chip every 1.5 seconds would take 1.7 hours. Currently, using a single line scan camera scanning mode, with a pixel size of 10um and a single scan of 1*16K, for parallel processing, the area is divided into regions of 16mm*16mm, which can be divided into 25*32 regions. Assuming the stage movement speed is Vms = 50mm / s, then 515 / 50*25 ≈ 250 seconds. Adding the stage movement preparation and the 50-second budget for region partitioning, the overall time cost is 5 minutes; a 20-fold increase in processing time.

[0088] like Figure 7 As shown, when there are multiple line scan cameras 104, the multiple line scan cameras 104 are arranged along a first direction at intervals of a preset number of regions, wherein the number of preset number of regions can be 0. When only the movement of multiple line scan cameras 104 is controlled, the multiple line scan cameras 104 scan along the first direction, and when the next line scan camera 104 in the first direction moves to the initial position of the previous line scan camera 104, the multiple line scan cameras 104 are controlled to move along a second direction. Then, the multiple line scan cameras 104 are controlled to scan in reverse along the first direction, and when the multiple line scan cameras 104 move to align with the initial positions of each line scan camera 104 along the second direction, the multiple line scan cameras 104 continue to be controlled to step along the second direction, and so on, until the region in the i-th row and j-th column on the glass substrate 105 is traversed, and the scanning ends. Since multiple line scan cameras 104 are arranged in this embodiment, the scanning efficiency can be improved.

[0089] It should be noted that when multiple line scan cameras 104 are arranged along the first direction, it is also possible to control the movement of only the glass substrate 105, or to control the movement of multiple line scan cameras 104 and the glass substrate 105 simultaneously. The movement path can refer to the movement path of one line scan camera 104, that is, the preset path of each line scan camera 104 is serpentine.

[0090] In another embodiment, such as Figure 8 and Figure 9 As shown, line scan cameras 104 can be arranged along both the first and second directions to form a matrix of line scan cameras 104. Figure 8 One embodiment involves installing line scan cameras 104 in adjacent areas, such as... Figure 9As shown, when only the line scan camera 104 moves, multiple line scan cameras 104 scan along a first direction. When a subsequent line scan camera 104 moves to the initial position of the preceding line scan camera 104 along the first direction, the multiple line scan cameras 104 are controlled to step along a second direction. Then, the multiple line scan cameras 104 are controlled to scan in the opposite direction of the first direction. When the positions of each line scan camera 104 are aligned with their initial positions along the second direction, the multiple line scan cameras 104 continue to step along the second direction until the initial positions of the subsequent line scan camera 104 and the preceding line scan camera 104 in the second direction coincide, at which point the scanning ends. In this embodiment, since the multiple line scan cameras 104 form a matrix, the range of movement of each line scan camera 104 is narrower, resulting in higher scanning efficiency.

[0091] Understandably, in order to comprehensively consider cost and scanning efficiency, the number of line scan cameras 104 can be reasonably selected according to the actual situation to avoid too many line scan cameras, resulting in excessive cost, or too few line scan cameras, resulting in decreased efficiency.

[0092] When line scan cameras 104 are arranged along both the first and second directions to form a matrix of line scan cameras 104, the movement can be achieved by only the glass substrate 105, or by the simultaneous movement of the line scan cameras 104 and the glass substrate 105. The specific movement path can be referred to the movement path of a single line scan camera 104, which will not be elaborated here.

[0093] In the aforementioned embodiments, the regions divided on the glass substrate 105 have the same side length, which is the product of the pixel width of the line scan camera 104 and the resolution of the long side of a single scan.

[0094] For example, if the pixel width of the line scan camera 104 is 10µm and the resolution of a single scan is 1*16k, then the side length of the area divided on the glass substrate 105 is 10µm*16k = 16mm. That is, the area divided on the glass substrate 105 is a 16mm*16mm square.

[0095] Therefore, when the glass substrate 105 moves, and there are multiple linear array cameras 104 arranged in one direction, taking the size of the glass substrate 105 as 405mm*515mm as an example, each chip 106 is 7mm*7mm with a spacing of 0.1mm. It is estimated that there are approximately 4100 chips in total, 57*72, aligned. According to the traditional area array camera imaging mode, processing one chip every 1.5 seconds, it would take 1.7 hours. After optimization, based on the linear scan camera scanning mode and the optimal path planning calculation, assuming a linear scan camera pixel size of 10µm and a single scan of 1*16K, each scan is 16mm. To save costs, the shorter side is used as the scanning edge, requiring approximately 405 / 16 ≈ 25 linear scan cameras. Assuming each camera scans five times, this can be distributed among 5 cameras. Dividing the area into 16*16 regions results in 25*32 regions. Assuming the glass substrate 105 moves at a speed of Vws = 50mm / s, the time is approximately 515 / 50*5 ≈ 50s. Adding the 5s for glass substrate 105 movement preparation and region partitioning, the overall time cost is 1 minute; a 100-fold improvement in time.

[0096] Figure 10 This is a flowchart of a glass substrate alignment and measurement method according to an embodiment of the present invention. The method is based on the previously described glass substrate alignment and measurement system. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment and measurement system includes a linear array camera.

[0097] like Figure 10 , Figure 3 and Figure 4 As shown, the method includes the following steps:

[0098] S101, control the linear scan camera to traverse the (1, g)th region and acquire the image of the (1, g)th region;

[0099] S102, obtain the position of each chip in the (1, g) region based on the image of the (1, g) region, and at the same time, control the linear scan camera to traverse the (1, g+1) region and obtain the image of the (1, g+1) region;

[0100] S103, until the control line scan camera traverses the (1, j) region and acquires the image of the (1, j) region; and obtains the position of each chip in the (1, j) region based on the image of the (1, j) region;

[0101] S104, control the linear scan camera to traverse the (2, j)th region and acquire the image of the (2, j)th region;

[0102] S105, obtain the position of each chip in the (2,j) region based on the image of the (2,j) region, and at the same time, control the linear scan camera to traverse the (2,j-1) region and obtain the image of the (2,j-1) region;

[0103] S106, until the control line scan camera traverses the (2,1) region and acquires the image of the (2,1) region; and obtains the position of each chip in the (2,1) region based on the image of the (2,1) region;

[0104] S107, until the control line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, g are all positive integers, and g is less than j.

[0105] In other words, when there is only one line scan camera 104 and only the line scan camera 104 moves, the host computer 101 controls the first motion control module 102 to control the movement of the line scan camera 104. The glass substrate 105 is divided into i*j regions in the form of a matrix along the first direction and the second direction. The line scan camera 104 scans along the first direction to the j-th region of the first row of the glass substrate 105. The line scan camera 104 steps along the second direction and then continues to scan in the reverse direction along the first direction until it scans to the first column and second row of the glass substrate 105. Then it steps along the second direction and continues to scan along the first direction to the j-th region of the third row, and so on, until the line scan camera 104 traverses the i-th row and j-th column region, and the scanning ends. Each time the line scan camera 104 finishes scanning an area, it uploads an image to the host computer 101. Thus, when the line scan camera 104 scans the next area, the host computer 101 can process the image in parallel, obtain the position of each chip in the area, save time, and obtain the position of multiple chips from one image, making the processing speed faster.

[0106] Figure 11 This is a flowchart of a glass substrate alignment and measurement method according to another embodiment of the present invention. The method is based on the previously described glass substrate alignment and measurement system. The glass substrate is divided into i*j regions according to the resolution of the linear array camera, where i*j = n. The glass substrate alignment and measurement system includes a linear array camera.

[0107] like Figure 11 , Figure 4 and Figure 5 As shown, the method includes the following steps:

[0108] S201, control the linear scan camera to traverse the (k, 1)th region and acquire the image of the (k, 1)th region;

[0109] S202, obtain the position of each chip in the (k,1) region based on the image of the (k,1) region, and at the same time, control the linear scan camera to traverse the (k+1,1) region and obtain the image of the (k+1,1) region.

[0110] S203, until the control line scan camera traverses the (i, 1)th region and acquires the image of the (i, 1)th region; and obtains the position of each chip in the (i, 1)th region based on the image of the (i, 1)th region;

[0111] S204, control the linear scan camera to traverse the (i, 2)th region and acquire the image of the (i, 2)th region;

[0112] S205, obtain the position of each chip in the (i, 2) region based on the image of the (i, 2) region, and at the same time, control the linear scan camera to traverse the (i-1, 2) region and obtain the image of the (i-1, 2) region;

[0113] S206, until the control line scan camera traverses the (1,2) region and acquires the image of the (1,2) region; and obtains the position of each chip in the (1,2) region based on the image of the (1,2) region;

[0114] S207, until the control line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, k are all positive integers, and k is less than i.

[0115] In other words, when there is only one line scan camera 104 and only the line scan camera 104 moves, the host computer 101 controls the first motion control module 102 to control the movement of the line scan camera 104. The glass substrate 105 is divided into i*j regions in the form of a matrix along the first direction and the second direction. The line scan camera 104 scans along the second direction to the i-th region of the first column of the glass substrate 105. The line scan camera 104 steps along the first direction and then continues to scan in the reverse direction along the second direction until it scans to the first row of the second column of the glass substrate 105. Then it steps along the first direction and continues to scan along the second direction to the i-th region of the third column, and so on, until the line scan camera 104 traverses the i-th row and j-th column region, and the scanning ends. Each time the line scan camera 104 finishes scanning an area, it uploads an image to the host computer 101. Thus, when the line scan camera 104 scans the next area, the host computer 101 can process the image in parallel, obtain the position of each chip in the area, save time, and obtain the position of multiple chips from one image, making the processing speed faster.

[0116] According to one embodiment of the present invention, before controlling the linear scan camera to traverse the divided region, the method further includes:

[0117] The surface of the control glass substrate is positioned on the focal plane of the line scan camera.

[0118] In other words, to ensure clear image acquisition, it is necessary to first adjust the chip on the glass substrate to be on the focal plane of the line scan camera, and then use the line scan camera to acquire images of each area on the glass substrate.

[0119] Therefore, taking the glass substrate 105 with dimensions of 405mm*515mm as an example, where each chip 106 is 7mm*7mm with a spacing of 0.1mm, it is initially estimated that there are approximately 4100 chips (57*72) to be aligned. Using the traditional area scan camera imaging mode, processing one chip every 1.5 seconds would take 1.7 hours. Currently, using a single line scan camera scanning mode, with a pixel size of 10um and a single scan of 1*16K, for parallel processing, the area is divided into regions of 16mm*16mm, which can be divided into 25*32 regions. Assuming the stage movement speed is Vms = 50mm / s, then 515 / 50*25 ≈ 250 seconds. Adding the stage movement preparation and the 50-second budget for region partitioning, the overall time cost is 5 minutes; a 20-fold increase in processing time.

[0120] Figure 12 This is a flowchart of a glass substrate alignment and measurement method proposed in another embodiment of the present invention. The method is based on the glass substrate alignment and measurement system described above. The glass substrate is divided into i*j regions according to the resolution of the line scan camera, where i*j = n. The glass substrate alignment and measurement system includes multiple line scan cameras. The multiple line scan cameras are arranged along a first direction with a preset number of regions between them, and the first line scan camera is located above the (1, 1)th region.

[0121] like Figure 12 and Figure 7 As shown, the method includes the following steps:

[0122] S301, control all line scan cameras to scan along the first direction until the next line scan camera traverses the initial area where the previous line scan camera is located, and control all line scan cameras to step along the second direction.

[0123] S302, control all line scan cameras to scan in the opposite direction along the first direction until the area where all line scan cameras are located along the second direction is aligned with the initial area where each line scan camera is located, and control all line scan cameras to step along the second direction;

[0124] S303, repeat these two steps until all the divided regions on the glass substrate have been traversed, wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

[0125] In other words, when there are multiple line scan cameras 104, they are arranged along a first direction at intervals of a predetermined number of regions, where the predetermined number of regions can be 0. When only the movement of multiple line scan cameras 104 is controlled, the multiple line scan cameras 104 scan along the first direction. When the next line scan camera 104 in the first direction moves to the initial position of the previous line scan camera 104, the multiple line scan cameras 104 are controlled to move along a second direction. Then, the multiple line scan cameras 104 are controlled to scan in reverse along the first direction. When the multiple line scan cameras 104 move to align with the initial positions of each line scan camera 104 along the second direction, the multiple line scan cameras 104 continue to move along the second direction, and so on, until the i-th row and j-th column region on the glass substrate 105 is traversed, and the scanning ends. Since multiple line scan cameras 104 are arranged in this embodiment, the scanning efficiency can be improved.

[0126] In another embodiment, scanning can be performed along the second direction and stepping in the first direction, or a line scan camera can be arranged along the second direction, scanning along the first direction and stepping in the second direction, or scanning along the second direction and stepping in the first direction. The present invention does not impose specific limitations on this.

[0127] Based on the current glass substrate 105 size of 405mm*515mm, with each chip 106 being 7mm*7mm and spaced 0.1mm apart, it is initially estimated that there are approximately 4100 chips (57*72) aligned. According to the traditional area scan camera imaging mode, processing one chip every 1.5 seconds, it would take 1.7 hours. After optimization, based on the linear scan camera scanning mode and the optimal path planning calculation, assuming a linear scan camera pixel size of 10µm and a single scan of 1*16K, each scan is 16mm. To save costs, the shorter side is used as the scanning edge, requiring approximately 405 / 16 ≈ 25 linear scan cameras. Assuming each camera scans five times, this can be distributed among 5 cameras. Dividing the area into 16*16 regions results in 25*32 regions. Assuming the glass substrate 105 moves at a speed of Vws = 50mm / s, the time is approximately 515 / 50*5 ≈ 50s. Adding the 5s for glass substrate 105 movement preparation and region partitioning, the overall time cost is 1 minute; a 100-fold improvement in time.

[0128] Figure 13This is a flowchart of a glass substrate alignment measurement method proposed in another embodiment of the present invention. The method is based on the previously described glass substrate alignment measurement system. The glass substrate is divided into i*j regions according to the resolution of the linear array cameras, where i*j = n. The glass substrate alignment measurement system includes multiple linear array cameras. The multiple linear array cameras are arranged in a matrix above the glass substrate along a first direction and a second direction. Along the first direction, each linear array camera is spaced apart by a first preset number of regions, and along the second direction, each linear array camera is spaced apart by a second preset number of regions. The number of preset number of regions can be 0. The first linear array camera is located above region (1, 1).

[0129] like Figure 13 and Figure 8 As shown, the method includes the following steps:

[0130] S401, control all line scan cameras to scan along the first direction until the rear line scan camera arranged along the first direction traverses to the initial area where the front line scan camera is located, and control all line scan cameras to step along the second direction.

[0131] S402, control all line scan cameras to scan in the opposite direction along the first direction until the area where all line scan cameras arranged along the first direction are located along the second direction is aligned with the initial area where each line scan camera is located along the first direction, and control all line scan cameras to step along the second direction.

[0132] S403, repeat these two steps until the rear array camera arranged along the second direction is located in the initial area where the front array camera is located, or until the rear array camera arranged along the second direction is located in the first direction where the initial area where the front array camera is located; wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

[0133] In another embodiment, line scan cameras 104 can be arranged along both a first direction and a second direction to form a matrix of line scan cameras 104. When only the line scan cameras 104 are moving, multiple line scan cameras 104 scan along the first direction. When a subsequent line scan camera 104 along the first direction moves to the initial position of the preceding line scan camera 104, the multiple line scan cameras 104 are controlled to step along the second direction. Then, the multiple line scan cameras 104 are controlled to scan in the opposite direction of the first direction. When the positions of each line scan camera 104 along the second direction are aligned with their initial positions, the multiple line scan cameras 104 continue to step along the second direction until the initial positions of the subsequent line scan cameras 104 and the preceding line scan cameras 104 in the second direction coincide, at which point the scanning ends. In this embodiment, because multiple line scan cameras 104 form a matrix, the range of movement of each line scan camera 104 is narrower, resulting in higher scanning efficiency.

[0134] Understandably, in order to comprehensively consider cost and scanning efficiency, the number of line scan cameras 104 can be reasonably selected according to the actual situation to avoid too many line scan cameras, resulting in excessive cost, or too few line scan cameras, resulting in decreased efficiency.

[0135] When line scan cameras 104 are arranged along both the first and second directions to form a matrix of line scan cameras 104, the movement can be achieved by only the glass substrate 105, or by the simultaneous movement of the line scan cameras 104 and the glass substrate 105. The specific movement path can be referred to the movement path of a single line scan camera 104, which will not be elaborated here.

[0136] According to one embodiment of the present invention, before the line scan camera traverses the divided region, the method further includes:

[0137] Control the focal planes of all line scan cameras to be on the same plane; and control the surface of the glass substrate to be on a plane.

[0138] In other words, in order to ensure that the images captured by each line scan camera are clear, the focal planes of all line scan cameras are controlled to be on the same plane as much as possible, and the chips on the glass substrate are controlled to be on that plane to ensure that the chips are all on the focal planes of each line scan camera.

[0139] This invention also proposes a glass substrate alignment measurement device, including the glass substrate alignment measurement system 100 as described above.

[0140] In this system, the host computer 101 acts as the main logic control brain, coordinating and controlling the overall alignment and measurement logic; the first motion control module 102 can control the movement of the line scan camera 104, driving it to perform xyz three-dimensional motion and move it to various positions above the glass substrate 105, while ensuring that multiple line scan cameras 104 are on the same focal plane relative to the glass substrate 105 (e.g., ...). Figure 14 (As shown). The line scan camera 104 can be a high-frequency line scan camera. Additionally, the system 100 also includes a light source. The second motion control module 103 primarily moves the glass substrate 105, ensuring the target position moves below the field of view of the line scan camera 104 for image acquisition. It also features an interferometer position detection device that can return the current movement position in real time. The glass substrate 105 is the object being aligned and measured by the system. The substrate is relatively large, and the internal chip distribution may have slight differences. Due to these differences, coordinate translation calculations cannot be performed according to the design specifications. Assuming the coordinates of the i-th chip are (x... i y i If ), then the coordinates of the j-th chip are (x... j y j )=(x i +offset, y i+offset), where the value of offset varies between individual chips.

[0141] The image acquisition method is as follows: First, due to the large size of the substrate, typically n*m [mm*mm], measurements are taken in sections according to the substrate size, such as... Figure 15 The diagram illustrates a simple partitioning method. In practice, based on the current field of view of the camera and the position of the glass substrate 105, the partitioning is optimized according to the current layout of each line scan camera 104. An optimal path can be obtained through a path planning algorithm, and partitioned scanning alignment is performed using this optimal path method. Based on the current camera configuration, multiple line scan cameras 104 are configured to optimize productivity. The line scan cameras 104 are distributed as follows: Figure 14 As shown, the line scan camera 104 is driven by a motion device (first motion control module 102) and can move in three dimensions (x, y, z). The glass substrate 105 is placed on a motion stage and can move in six dimensions. To fully utilize the scanning capabilities of the line scan camera 104, an optimal path method is used to divide the area into n parts. Obviously, to ensure optimal camera utilization and maximum image acquisition efficiency, the size of each region should be equal (the division of regions can be freely adjusted according to actual conditions). Figure 15 As shown, the region is divided into 4*6=24 areas. Obviously, to ensure maximum efficiency, each area must be equal, satisfying A. (i，j)ares =B (i，j)ares =…=E (i，j)ares Based on the specific linear scan camera layout and the path optimization algorithm, the camera scanning plan is as follows: Figure 7 As shown, during the scanning process, where X corresponds to (i，j)ares The cameras in the area scan simultaneously; that is, during the uniform motion of the motion table, the linear scan camera 104 acquires images based on the synchronization signal and stitches them together to obtain an image of the glass substrate, which is then X-rayed. (i+1，j)ares Image processing of the previous area is performed during the area scanning process, which improves the acquisition efficiency.

[0142] Since the synchronization signal is transmitted at the nanosecond level, and the transmission of a single synchronization signal is generated by hardware, the uncontrollability of the hardware signal in high-precision systems will accumulate and introduce certain errors when acquiring images in a large field of view. By dividing the measurement object into zones and controlling the field of view of a single stitched image, the alignment accuracy can be improved. Simultaneously, parallel processing can be implemented to improve the alignment rate; the partitioned field of view is the alignment scanning field of view of a single line scan camera, which needs to be image stitched together. The images within the field of view are stitched together into a single whole for image processing; the single images within each field of view range after the final scanning of the partitioned field of view may have overlapping areas, and theoretically, the synthesized image from a single image is not exactly equal to the actual substrate area; the partitioned field of view is finally captured by the line scan camera 104. The scanning process is driven by the motion stage to scan the glass substrate 105, triggered by different information by the synchronous control system. The line scan camera 104 can perform optimal path movement according to the path planning algorithm. The motion stage movement scheme is to drive the glass substrate 105 into the field of view of the line scan camera 104 according to the partitioned field of view to perform scanning movement until the line scan camera 104 has completed the image position within the partition; if there are parts of the partitioned field of view that cannot be acquired by multiple scans by multiple line scan cameras, the line scan cameras that are planned to scan multiple times during the path planning process can be used to acquire images again to complete the final acquisition (e.g. Figure 7 (As shown); To ensure rapid data processing, for each partition's data acquisition and stitching, during the data acquisition of the next partition, the alignment processing of the previous partition's data is completed simultaneously, and the alignment result is calculated. The serial time overhead of the entire process is the motion acquisition time plus the last data processing time, thus ensuring optimal efficiency and yield requirements. The image error control in the entire process is composed of the inherent errors of the motion stage and interferometer system in the motion acquisition system. The system is 100, and its accuracy can be controlled at the nm level as required. This error is the overall image translation error. The nm-level translation error in the entire glass substrate 105 alignment measurement system can be ignored.

[0143] Furthermore, by employing a multi-line array camera and a motion system to scan and acquire images, image information within the target's field of view can be quickly obtained, improving alignment efficiency. A synchronous control system ensures that the platform position data acquired by the interferometer matches the line scan position acquired by the camera, guaranteeing the accuracy of the stitched image. The line array camera, equipped with a small motion system, allows for local adjustments and control of the multi-line array cameras to be on the same focal plane, enabling movement of the multi-line array cameras within the defined target field of view. Partitioned measurement of the test glass substrate improves testing accuracy, reduces errors, and enables parallel processing, ensuring that image acquisition and processing occur concurrently, achieving optimal alignment efficiency. The glass substrate can be freely divided into regions as needed. This system and method achieves alignment efficiency more than 20 times that of traditional area array cameras, and using a multi-line array camera for scanning alignment can increase efficiency by 20N times.

[0144] Figure 16 This is a graph showing the relationship between alignment time (i.e., measurement time) and the speed of glass substrate movement when the system includes multiple line scan cameras. Figure 17 This graph shows the relationship between alignment time (i.e., measurement time) and the speed of the glass substrate when the system includes a single linear scan camera. As can be seen from the graph, the faster the glass substrate moves, the shorter the alignment time.

[0145] In summary, the glass substrate alignment measurement system, method, and apparatus proposed in the embodiments of the present invention include: a host computer, a first motion control module and / or a second motion control module, and at least one line scan camera; the host computer is connected to the first motion control module, which is used to control the focal planes of all line scan cameras to be on the same plane according to a first instruction from the host computer, and to control the line scan cameras to step along a first preset path; and / or, the host computer is connected to the second motion control module, which is used to control the glass substrate to step along a second preset path according to a second instruction from the host computer. The system follows a preset path for stepping; a line scan camera is located on one side of the glass substrate carrying the chip; the glass substrate is divided into n regions according to the resolution of the line scan camera; the line scan camera scans the m-th region according to the first preset path to form an image of the m-th region; the host computer obtains the position of each chip in the m-th region based on the image of the m-th region; simultaneously, the line scan camera continues to scan the (m+1)-th region in parallel according to the first preset path to form an image of the (m+1)-th region, where m and n are both positive integers, and m is less than n, in order to quickly obtain the accurate position of each chip on the glass substrate, with short processing time and high product yield.

[0146] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A glass substrate alignment and measurement system, characterized in that, include: The system comprises a host computer, a first motion control module, a second motion control module, a synchronization control module, and at least one line scan camera. The host computer is connected to the first motion control module. The first motion control module is used to control the focal planes of all the line scan cameras to be on the same plane according to the first instruction of the host computer, and to control the line scan cameras to step along a first preset path. The host computer is connected to the second motion control module, which is used to control the glass substrate to step along a second preset path according to the second instruction of the host computer, wherein the first preset path and the second preset path are opposite in direction; The synchronization control module is connected to the first motion control module and the second motion control module respectively. The synchronization control module is used to synchronously control the first motion control module and the second motion control module according to the instructions of the host computer, so as to control the acquisition speed of the line scan camera and the movement speed of the glass substrate to be the same. The linear array camera is located on one side of the glass substrate carrying the chip; the glass substrate is divided into n regions according to the resolution of the linear array camera, and the side lengths of the regions on the glass substrate are the same. The line scan camera scans the m-th region according to the first preset path and forms an image of the m-th region; the host computer obtains the position of each chip in the m-th region based on the image of the m-th region. At the same time, the line scan camera continues to scan the (m+1)-th region in parallel according to the first preset path and forms an image of the (m+1)-th region. m and n are both positive integers, and m is less than n.

2. The glass substrate alignment and measurement system according to claim 1, characterized in that, The side length is the product of the pixel width of the linear array camera and the resolution of the long side in a single scan.

3. The glass substrate alignment and measurement system according to claim 1, characterized in that, The first preset path and the second preset path are both serpentine or straight.

4. The glass substrate alignment and measurement system according to claim 1, characterized in that, When there are multiple line scan cameras, the multiple line scan cameras are arranged at a predetermined number of regions along a first direction and / or a second direction, wherein the predetermined number of regions is greater than or equal to 0, the first direction is a direction parallel to one side of the glass substrate, the second direction is a direction parallel to the other side of the glass substrate, and one side of the glass substrate is perpendicular to the other side.

5. The glass substrate alignment and measurement system according to claim 4, characterized in that, Multiple line scan cameras are arranged in a matrix.

6. The glass substrate alignment and measurement system according to claim 1, characterized in that, Also includes: A position detection device is used to detect the position of the glass substrate movement.

7. A method for aligning and measuring a glass substrate, characterized in that, Based on the glass substrate alignment measurement system as described in any one of claims 1-6, wherein the glass substrate is divided into i*j regions, i*j = n; The glass substrate alignment and measurement system includes a linear array camera; The method includes the following steps: The linear scan camera is controlled to traverse the (1, g)th region and acquire the image of the (1, g)th region; The position of each chip in the (1, g) region is obtained based on the image of the (1, g) region. At the same time, the line scan camera is controlled to traverse the (1, g+1) region and obtain the image of the (1, g+1) region. The process continues until the line scan camera traverses the (1, j) region to acquire an image of the (1, j) region; and the position of each chip in the (1, j) region is obtained based on the image of the (1, j) region. The linear scan camera is controlled to traverse the (2, j)th region and acquire the image of the (2, j)th region; The positions of each chip in the (2, j) region are obtained based on the image of the (2, j) region. At the same time, the line scan camera is controlled to traverse the (2, j-1) region and obtain the image of the (2, j-1) region. The process continues until the line scan camera traverses the (2, 1) region to acquire an image of the (2, 1) region; and based on the image of the (2, 1) region, the position of each chip in the (2, 1) region is acquired. The process continues until the line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, and g are all positive integers, and g is less than j.

8. A method for aligning and measuring a glass substrate, characterized in that, Based on the glass substrate alignment measurement system as described in any one of claims 1-6, wherein the glass substrate is divided into i*j regions, i*j = n; The glass substrate alignment and measurement system includes a linear array camera; The method includes the following steps: The linear scan camera is controlled to traverse the (k, 1)th region and acquire the image of the (k, 1)th region; The positions of each chip in the (k, 1) region are obtained based on the image of the (k, 1) region. Simultaneously, the line scan camera is controlled to traverse the (k+1, 1) region and obtain the image of the (k+1, 1) region. This process continues until the line scan camera is controlled to traverse the (i, 1) region and obtain the image of the (i, 1) region. The positions of each chip in the (i, 1) region are then obtained based on the image of the (i, 1) region. The linear scan camera is controlled to traverse the (i, 2)th region and acquire the image of the (i, 2)th region; The positions of each chip in the (i, 2) region are obtained based on the image of the (i, 2) region. At the same time, the line scan camera is controlled to traverse the (i-1, 2) region and obtain the image of the (i-1, 2) region. The process continues until the line scan camera traverses the (1, 2) region to acquire the image of the (1, 2) region; and based on the image of the (1, 2) region, the position of each chip in the (1, 2) region is acquired. The process continues until the line scan camera traverses the (i, j)th region, acquires the image of the (i, j)th region, and acquires the position of each chip in the (i, j)th region based on the image of the (i, j)th region, where i, j, and k are all positive integers, and k is less than i.

9. The glass substrate alignment measurement method according to claim 7 or 8, characterized in that, Before controlling the linear scan camera to traverse the defined region, the following steps are also included: The surface of the glass substrate is controlled to be on the focal plane of the line scan camera.

10. A method for aligning and measuring a glass substrate, characterized in that, Based on the glass substrate alignment measurement system as described in any one of claims 1-6, wherein the glass substrate is divided into i*j regions, i*j = n; The glass substrate alignment measurement system includes multiple linear array cameras; the multiple linear array cameras are arranged along a first direction with a preset number of regions between them, and the first linear array camera is located above the (1, 1)th region. The method includes the following steps: Control all the line scan cameras to scan along the first direction until the next line scan camera traverses the initial area where the previous line scan camera is located, and control all the line scan cameras to step along the second direction. Control all the line scan cameras to scan in the opposite direction along the first direction until the area where all the line scan cameras are located along the second direction is aligned with the initial area where each line scan camera is located, and control all the line scan cameras to step along the second direction; These two steps are repeated until all the divided regions on the glass substrate have been traversed, wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

11. The glass substrate alignment measurement method according to claim 10, characterized in that, If all the line scan cameras cannot traverse all the divided regions on the glass substrate after scanning according to the method of claim 10, then the paths of all the line scan cameras are replanned according to the remaining divided regions on the glass substrate, and all the line scan cameras are controlled to traverse the remaining divided regions on the glass substrate according to the replanned paths.

12. A method for aligning and measuring a glass substrate, characterized in that, Based on the glass substrate alignment measurement system as described in any one of claims 1-6, wherein the glass substrate is divided into i*j regions, i*j = n; The glass substrate alignment measurement system includes multiple line array cameras; the multiple line array cameras are arranged in a matrix above the glass substrate along a first direction and a second direction, with a first preset number of regions between each line array camera along the first direction and a second preset number of regions between each line array camera along the second direction; the first line array camera is located above the (1, 1) region. The method includes the following steps: Control all the line scan cameras to scan along the first direction until the rear line scan camera arranged along the first direction traverses to the initial area where the front line scan camera is located, and control all the line scan cameras to step along the second direction. Control all the line scan cameras to scan in the opposite direction along the first direction until the area where all the line scan cameras arranged along the first direction are located along the second direction is aligned with the initial area where each of the line scan cameras is located along the first direction; control all the line scan cameras to step along the second direction. These two steps are repeated until the rear array cameras arranged along the second direction are located in the initial area where the front array cameras are located, or until the rear array cameras arranged along the second direction are located in the first direction where the initial area where the front array cameras are located; wherein the first direction and the second direction are perpendicular to each other, the first direction is parallel to one side of the glass substrate, and the second direction is parallel to the other side of the glass substrate.

13. The glass substrate alignment measurement method according to claim 10 or 12, characterized in that, Before the line scan cameras traverse the defined area, the method further includes controlling the focal planes of all the line scan cameras to be on the same plane; and controlling the surface of the glass substrate to be on the plane.

14. The glass substrate alignment measurement method according to claim 10 or 12, characterized in that, After the linear scan camera traverses the previous region of the glass substrate, while traversing the next region of the glass substrate, the following is also included: The image stitched together from the previous region becomes the complete image of the previous region; The alignment position of each chip in the previous region is obtained based on the overall image of the previous region.

15. The glass substrate alignment measurement method according to claim 14, characterized in that, The images of adjacent divided regions overlap.

16. A glass substrate alignment and measuring device, characterized in that, Includes the glass substrate alignment measurement system as described in any one of claims 1-6.

Images