A sensor based on a gas-permeable pseudo-capacitive electrode and a method for manufacturing the same

Abstract

The application provides a sensor based on a breathable pseudo-capacitance electrode and a preparation method thereof, which comprises a flexible breathable carbon cloth / MnO2 / MoS2 electrode, a cotton cloth isolation layer and an ionic dielectric layer, the ionic dielectric layer is attached between the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes, and the cotton cloth isolation layer is arranged between the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes and the ionic dielectric layer. The carbon cloth with breathability is used as the electrode, and the wearing effect is more comfortable. The carbon cloth / MnO2 / MoS2 pseudo-capacitance electrode is used as the symmetrical electrode of the sensor, so that the unit capacitance of the electrode is improved; the face washing towel with a microstructure is used as the dielectric layer, so that a larger variable contact area can be obtained, a higher capacitance can be obtained, and the sensitivity is improved. The sensor of the application has a high sensitivity of S~27 kPa ‑1 in a stress range of 0-1200 kPa, and a linearity R 2 ~0.99.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and in particular to a sensor based on a gas-permeable pseudocapacitive electrode and its fabrication method. Background Technology

[0002] Flexible pressure sensors, a typical transducer, convert changes in external stress into visible electrical signals, such as current, voltage, resistance, and capacitance. They are widely used to check and track people's physical health, and after analyzing and processing the data, they can provide people with an assessment of their physical health.

[0003] Based on different sensing mechanisms, flexible pressure sensors can be divided into four types: piezoresistive sensors, capacitive sensors, piezoelectric sensors, and triboelectric sensors. Among them, capacitive sensors have advantages such as high stability in sensing static pressure, small performance drift with temperature changes, relatively simple device structure, and low power consumption. Therefore, they are considered as a candidate sensor for high-quality physiological signal monitoring and motion detection applications.

[0004] However, the dielectric materials used in traditional capacitive sensors have very low dielectric constants, typically relying on variable compression distances of the dielectric layer to achieve higher capacitance changes. This results in small capacitance signals, severely limiting sensitivity. Furthermore, the capacitance is usually in the picofarad range, making it susceptible to external parasitic capacitance. To achieve higher sensitivity, researchers have adopted the electric double-layer theory of supercapacitors, employing an ion-modulated dielectric layer to increase the capacitance of the electrode-dielectric layer contact cross-section under electrostatic interaction, thus reducing the influence of parasitic capacitance.

[0005] While current ion-capacitive sensors have achieved extremely high sensitivity and linearity, they are typically limited to a finite stress range. It's difficult to maintain good linearity across an ultra-wide stress range while also ensuring good breathability and wearing comfort. To meet the requirements of human health monitoring and human-computer interaction, ion-capacitive sensors not only need high sensitivity but also a wider stress range, good linearity, and a comfortable wearing experience. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this invention provides a sensor based on a gas-permeable pseudocapacitive electrode and its fabrication method.

[0007] The technical solution of the present invention is as follows: a sensor based on a breathable pseudocapacitive electrode, comprising a flexible breathable carbon cloth / MnO2 / MoS2 electrode, a cotton cloth insulating layer, and an ion dielectric layer. The ion dielectric layer is attached between two flexible breathable carbon cloth / MnO2 / MoS2 electrodes, and the cotton cloth insulating layer is disposed between the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes and the ion dielectric layer. The conductive lines of the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes are led out using silver paste and copper wire.

[0008] Preferably, the present invention also provides a method for preparing a sensor based on a gas-permeable pseudocapacitive electrode, comprising the following steps: S1) Hydrophilic treatment of carbon cloth The cut carbon cloth material is cleaned in an air environment using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material. S2), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation The hydrophilic carbon cloth is electroplated in a potassium permanganate solution of a certain concentration for a certain period of time. After electroplating, it is cleaned with ethanol and dried, and then annealed. The annealed electrode was placed in a solution of ammonium heptamolybdate tetrahydrate, thiourea and deionized water to grow a layer of MoS2; a flexible, breathable carbon cloth / MnO2 / MoS2 electrode with good pseudocapacitance was obtained. S3) Method for preparing ion dielectric layer 1-Ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide are placed in a beaker in a certain weight ratio, and then the beaker spout is sealed with fresh plastic wrap to prevent evaporation and exchange with substances from external sources. Then, heat and stir the solution mixture in an oil bath until a clear solution is obtained; After soaking the cut silk fabric in the solution for a period of time, it is taken out and dried to obtain the ion dielectric layer material. S4) Cut the cotton cloth to a suitable size to serve as an isolation layer; S5) Packaging of off-electric sensors The flexible carbon cloth / MnO2 / MoS2 electrode is cut to a suitable size, and the ion dielectric layer and the isolation layer are sandwiched between the two electrodes to obtain an ultrawide linear ion capacitive sensor.

[0009] Preferably, in step S1), the carbon cloth material substrate is cleaned using a plasma cleaner for 30 minutes.

[0010] Preferably, in step S2), the annealing temperature is 200°C and the annealing rate is 5°C / min.-1 Annealing time: 1 hour.

[0011] Preferably, in step S2), the preparation of the flexible carbon cloth / MnO2 / MoS2 electrode is as follows: S21) Cut the carbon cloth substrate that has been cleaned by the cleaning machine into a suitable size; S22) The hydrophilic carbon cloth substrate, after being cleaned by an ion cleaner, is electroplated in a 0.03 mmol potassium permanganate aqueous solution for 100-700 s. After electroplating, it is cleaned multiple times with ethanol and deionized water. Then, the electroplated electrode is annealed at high temperature in an oven at 200 ℃ for 2 hours. S23) Place 1 mmol of heptamolybdate tetrahydrate, 30 mmol of thiourea and 1-2 mol of aqueous solution in a beaker and stir for 30 min. After stirring, place the mixed solution and annealed carbon in a high-pressure reactor and heat. S24) After heat treatment, it is placed in a 55℃ oven to dry.

[0012] Preferably, the method for preparing the ion dielectric layer in step S3) is as follows: S31), 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide were placed in a beaker in a weight ratio of 0-5:1:10. The beaker was sealed with plastic wrap to prevent solvent evaporation and foreign substances from entering. The prepared solution was placed in an oil bath and heated and stirred at 70℃ and 100rpm for 2.5h to obtain a transparent ionic solution. S32) Cut cotton cloth, non-woven fabric, and washcloth into appropriate sizes; S33) The cut silk fabric is soaked in a transparent ionic solution for 20 minutes to obtain a dielectric layer, and then the dielectric layer is dried on a 40°C heating plate.

[0013] Preferably, in step S5), copper conductive wires are soldered to the carbon cloth / MnO2 / MoS2 electrode using silver paste, and an ion dielectric layer is glued between the two flexible and breathable carbon cloth / MnO2 / MoS2 electrodes.

[0014] Preferably, in step S22), the electroplating is performed using a three-electrode system of an electrochemical workstation, with the electrodes being hydrophilically treated carbon cloth, silver / silver chloride, and a carbon rod, and the electroplating time being 600s.

[0015] Preferably, in step S23), carbon is arranged in a high-pressure reactor and heated at 200°C for 24 hours.

[0016] The beneficial effects of this invention are as follows: 1. This invention uses breathable carbon cloth as electrodes, providing people with a more comfortable wearing experience.

[0017] 2. According to the electric double-layer theory: C EDL =U AC ×A, where U AC The main factor is related to the electrode material. In this invention, a pseudocapacitive electrode made of carbon cloth / MnO2 / MoS2 is used as the symmetrical electrode of the sensor, which improves the unit capacitance of the electrode. Furthermore, A represents the contact area between the electrode and the dielectric layer. Using a microstructured washcloth as the dielectric layer allows for a larger variable contact area, which is beneficial for achieving higher capacitance and thus improving sensitivity. Therefore, the sensor of this invention achieves S~27kPa within a stress range of 0-1200kPa. -1 High sensitivity and linearity R 2 ~0.99; 3. The high sensitivity and wide linear monitoring range of the sensor of this invention also bring a wider range of applications. It can be used for pulse detection, walking correction, limb movement recognition, weight calibration and micro-weight recognition. It can meet the requirements of micro-stress detection and can also be applied to scenarios with greater stress. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the ion capacitive sensor prepared in Example 1 of the present invention; In the figure, 1-flexible breathable carbon cloth / MnO2 / MoS2 electrode; 2-cotton cloth isolation layer; 3-ion dielectric layer.

[0019] Figure 2 Example 2 of this invention is a cyclic voltammetry test performed on carbon cloth after different MnO2 electroplating times; Figure 3 The image shows the carbon cloth / MnO2 prepared in Example 2 of this invention under a scanning electron microscope. Figure 4 The image shown is a scanning electron microscope image of the carbon cloth / MnO2 / MoS2 prepared in Example 2 of this invention. Figure 5 The capacitance change rate and stress change diagrams are shown for the sensors prepared in Examples 5 and 6 of this invention. Figure 6 The capacitance change rate versus stress change diagram of the ion capacitive sensor prepared in Example 7 of this invention; Figure 7 This is a schematic diagram illustrating the working principle of the ion capacitive sensor prepared in Example 7 of the present invention. Detailed Implementation

[0020] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings: Example 1

[0021] like Figure 1 As shown, this embodiment provides a sensor based on a breathable pseudocapacitive electrode, including a flexible breathable carbon cloth / MnO2 / MoS2 electrode 1, a cotton cloth insulating layer 2, and an ion dielectric layer 3. The ion dielectric layer 3 is attached between two flexible breathable carbon cloth / MnO2 / MoS2 electrodes 1, and the cotton cloth insulating layer 2 is disposed between the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes 1 and the ion dielectric layer 3. The conductive lines of the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes 1 are led out with silver paste and copper wire. Example 2

[0022] This embodiment provides a method for preparing a flexible, breathable carbon cloth / MnO2 / MoS2 electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material. S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; (S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes. Electroplating is performed using a three-electrode system on an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride, and a carbon rod. Electroplating times are 300 s, 400 s, 500 s, 600 s, and 700 s. Figure 2 From this, we can see that the electrode has the maximum unit capacitance at an electroplating time of 600s. S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) The dried carbon cloth is transferred to an oven for annealing at a temperature of 200℃ and a rate of 5℃ / min. -1 Annealing time: 1 hour; S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 35ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and the carbon that had been electroplated for 600s and annealed were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), the carbon cloth / MnO2 / MoS2 electrode after heating is completed is placed in a 55℃ oven to dry.

[0023] Figure 2The constant current charge-discharge wires for carbon cloth / MnO2 at different electroplating times in this embodiment are tested using an electrochemical workstation. The test uses a three-electrode system of the electrochemical workstation, with carbon cloth / MnO2, platinum electrode and saturated calomel electrode as the electrodes. As can be seen from the figure, the optimal electroplating time is 600s.

[0024] from Figure 3 As can be seen, MnO2 is uniformly grown on the surface of the carbon cloth.

[0025] Figure 4 The image shows a scanning electron microscope image of the carbon cloth / MnO2 / MoS2 electrode prepared in this embodiment. As can be seen from the image, MoS2 grows uniformly on the surface of the carbon cloth / MnO2, forming a flower-like shape. Example 3

[0026] This embodiment provides a method for preparing a flexible, breathable carbon cloth / MnO2 / MoS2 electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material.

[0027] S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes for later use. Electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride and carbon rod. The electroplating time is 600 s. S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) After drying, the carbon cloth is transferred to an oven for annealing at a temperature of 200℃ (5℃ min). -1 ); S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 70ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and annealed carbon were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), the carbon cloth / MnO2 / MoS2 electrode after heating is completed is placed in a 55℃ oven to dry. Example 4

[0028] This embodiment provides a method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material.

[0029] S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes for later use. Electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride and carbon rod. The electroplating time is 600 s.

[0030] S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) After drying, the carbon cloth is transferred to an oven for annealing at a temperature of 200℃ (5℃ min). -1 Annealing time: 1 hour; S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 35ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and annealed carbon were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), After heating, place the carbon cloth / MnO2 / MoS2 electrode in a 55℃ oven to dry; S3), Preparation of ion dielectric layer S31) Place 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide in a weight ratio of 3:1:10 into beakers. Seal the beakers with plastic wrap to prevent solvent evaporation and foreign substances from entering. Place the prepared solution in an oil bath and heat and stir at 70℃ and 100rpm for 2.5h to obtain a transparent solution. S32) Cut the cotton fabric into 2×3cm pieces; S33) Soak the cut cotton fabrics in transparent ionic liquids of different concentrations for 20 minutes, and then dry the dielectric layer on a 40°C heating plate.

[0031] S4) The isolation layer is cotton cloth. S41) Cut the cotton cloth into thin strips and attach them to one side of the dielectric layer of the cotton cloth. S5), sensor packaging S51) Solder copper conductive wires onto carbon cloth / MnO2 / MoS2 electrodes using silver paste; S53) Adhere the dielectric layer to the middle of the two carbon cloth / MnO2 / MoS2 electrodes with glue. Example 5

[0032] This embodiment provides a method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material.

[0033] S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes for later use. Electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride and carbon rod. The electroplating time is 600 s.

[0034] S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) After drying, the carbon cloth is transferred to an oven for annealing at a temperature of 200℃ (5℃ min). -1 Annealing time: 1 hour; S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 35ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and annealed carbon were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), After heating, place the carbon cloth / MnO2 / MoS2 electrode in a 55℃ oven to dry; S3), Preparation of ion dielectric layer S31) Place 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide in a beaker with a weight ratio of 3:1:10. Seal the beaker opening with plastic wrap to prevent solvent evaporation and foreign substances from entering. Place the prepared solution in an oil bath and heat and stir at 70℃ and 100rpm for 2.5h to obtain a transparent solution. S32) Cut the cotton fabric into 2×3cm pieces; S33) Soak the cut cotton fabrics in transparent ionic liquids of different concentrations for 20 minutes, and then dry the dielectric layer on a 40°C heating plate.

[0035] S4) The isolation layer is cotton cloth. S41) Cut the cotton cloth into thin strips and attach them to one side of the dielectric layer of the cotton cloth. S5) Sensor packaging, as detailed below: S51) Solder copper conductive wires onto carbon cloth / MnO2 / MoS2 electrodes using silver paste; S53) Adhere the dielectric layer to the middle of the two carbon cloth / MnO2 / MoS2 electrodes with glue. Example 6

[0036] This embodiment provides a method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material.

[0037] S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes for later use. Electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride and carbon rod. The electroplating time is 600 s.

[0038] S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) After drying, the carbon cloth is transferred to an oven for annealing at a temperature of 200℃ (5℃ min). -1 Annealing time: 1 hour; S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 35ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and annealed carbon were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), After heating, place the carbon cloth / MnO2 / MoS2 electrode in a 55℃ oven to dry; S3), Preparation of ion dielectric layer S31) Place 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide in a beaker with a weight ratio of 3:1:10. Seal the beaker opening with plastic wrap to prevent solvent evaporation and foreign substances from entering. Place the prepared solution in an oil bath and heat and stir at 70℃ and 100rpm for 2.5h to obtain a transparent solution. S32) Cut the non-woven fabric into 2×3cm pieces; S33) The cut nonwoven fabrics are immersed in transparent ionic liquids of different concentrations for 20 minutes, and then the dielectric layer is dried on a 40°C heating plate. S4) The isolation layer is cotton cloth. S41) Cut the cotton cloth into thin strips and attach them to one side of the dielectric layer of the non-woven fabric. S5), sensor packaging S51) Solder copper conductive wires onto carbon cloth / MnO2 / MoS2 electrodes using silver paste; S53) Adhere the dielectric layer to the middle of the two carbon cloth / MnO2 / MoS2 electrodes with glue.

[0039] The capacitance change rate versus stress change graphs of the sensors prepared in Examples 5 and 6 are shown below. Figure 5 As shown, from Figure 5 As can be seen, the sensors prepared in Examples 5 and 6 have low sensitivity, with the sensitivity S being much lower than 10 kPa. -1 Furthermore, the stress range is limited (0-300kPa), and the process is not linear. Example 7

[0040] This embodiment provides a method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode, including the following steps: S1) Hydrophilic treatment of carbon cloth Hydrophobic carbon cloth material was cut into 2×3cm pieces and then cleaned in air for 30 minutes using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material.

[0041] S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode S21), flexible breathable carbon cloth / MnO2 electrode preparation; S211) Dissolve 118.5 mg of potassium permanganate solution in 250 ml of deionized water and stir for 30 minutes for later use. Electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride and carbon rod. Electroplating time is 600 s.

[0042] S212) The electrodes electroplated in potassium permanganate solution are cleaned three times with ethanol and then dried at room temperature; S213) After drying, the carbon cloth is transferred to an oven for annealing at a temperature of 200℃ (5℃ min). -1 Annealing time: 1 hour; S22), flexible breathable carbon cloth / MnO2 / MoS2 electrode preparation S221) 1.235g of heptamolybdate tetrahydrate, 12.28g of thiourea and 35ml of deionized water were placed in a beaker and stirred for 30min. After stirring, the mixed solution and annealed carbon were placed in a high-pressure reactor and heated at 200℃ for 24h. S222), After heating, place the carbon cloth / MnO2 / MoS2 electrode in a 55℃ oven to dry; S3), Preparation of ion dielectric layer S31) Place 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide in a beaker with a weight ratio of 3:1:10. Seal the beaker opening with plastic wrap to prevent solvent evaporation and foreign substances from entering. Place the prepared solution in an oil bath and heat and stir at 70℃ and 100rpm for 2.5h to obtain a transparent solution. S32) Cut the washcloth into 2×3cm pieces; S33) Soak the cut face towels in transparent ionic liquids of different concentrations for 20 minutes, and then place the dielectric layer on a 40°C heating plate to dry.

[0043] S4) The isolation layer is cotton cloth. S41) Cut the cotton cloth into thin strips and attach them to one side of the dielectric layer of the washcloth. S5), sensor packaging S51) Solder copper conductive wires onto carbon cloth / MnO2 / MoS2 electrodes using silver paste; S53) Adhere the dielectric layer to the middle of the two carbon cloth / MnO2 / MoS2 electrodes with glue.

[0044] Figure 6 This is a graph showing the capacitance change rate versus stress change of the ion-capacitive sensor prepared in this embodiment. Figure 6 As can be seen, the sensor prepared by this method has high sensitivity, ranging from S to 27 kPa. -1 Ultra-wide stress range (0-1200kPa) and good linearity R 2 ~0.99.

[0045] Figure 7 This is a schematic diagram illustrating the working principle of the ion capacitive sensor prepared in this embodiment.

[0046] Without external stress, the contact area between the electrode and the dielectric layer is relatively small, resulting in a weak electrostatic force. Therefore, the ions in the dielectric layer are nearly randomly arranged, leading to a small unit capacitance C0. When an external stress is applied to the electrode, the insulating cloth and the dielectric layer are compressed, increasing the contact area A between the electrode and the dielectric layer. According to the electric double-layer theory, C... EDL It will also increase, so ΔC will also increase; according to the sensitivity formula: S=δ(ΔC / C0) / δP, the sensitivity will increase as ΔC increases.

[0047] The embodiments and descriptions above are merely illustrative of the principles and preferred embodiments of the present invention. Various changes and modifications may be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode, characterized in that: The sensor includes flexible breathable carbon cloth / MnO2 / MoS2 electrodes, a cotton cloth insulating layer, and an ion dielectric layer. The ion dielectric layer is attached between two flexible breathable carbon cloth / MnO2 / MoS2 electrodes. The cotton cloth insulating layer is disposed between the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes and the ion dielectric layer. The conductive wires of the two flexible breathable carbon cloth / MnO2 / MoS2 electrodes are led out with silver paste and copper wire. The preparation method includes the following steps: S1) Hydrophilic treatment of carbon cloth The cut carbon cloth material is cleaned in an air environment using a plasma cleaner to obtain a single-sided hydrophilic flexible carbon cloth substrate material. S2), Fabrication of flexible breathable carbon cloth / MnO2 / MoS2 electrode The hydrophilic carbon cloth is electroplated in a potassium permanganate solution of a certain concentration for a certain period of time. After electroplating, it is cleaned with ethanol and dried, and then annealed. The annealed electrode was placed in a solution of ammonium heptamolybdate tetrahydrate, thiourea and deionized water to grow a layer of MoS2; a flexible, breathable carbon cloth / MnO2 / MoS2 electrode with good pseudocapacitance was obtained. S3) Method for preparing ion dielectric layer 1-Ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide are placed in a beaker in a certain weight ratio, and then the beaker spout is sealed with fresh plastic wrap to prevent evaporation and exchange with substances from external sources. Then, heat and stir the solution mixture in an oil bath until a clear solution is obtained; After soaking the cut silk fabric in the solution for a period of time, it is taken out and dried to obtain the ion dielectric layer material. S4) Cut the cotton cloth to a suitable size to serve as an isolation layer; S5) Packaging of off-electric sensors The flexible carbon cloth / MnO2 / MoS2 electrode is cut to a suitable size, and the ion dielectric layer and the isolation layer are sandwiched between the two electrodes to obtain an ultrawide linear ion capacitive sensor.

2. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S1), the carbon cloth material substrate is cleaned using a plasma cleaner for 30 minutes.

3. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S2), the annealing temperature is 200°C and the annealing rate is 5°C / min. -1 .

4. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S2), the preparation of the flexible carbon cloth / MnO2 / MoS2 electrode is as follows: S21) Cut the carbon cloth substrate that has been cleaned by the cleaning machine into a suitable size; S22) The hydrophilic carbon cloth substrate, after being cleaned by an ion cleaner, is electroplated in a 0.03 mmol potassium permanganate aqueous solution for 100-700 s. After electroplating, it is cleaned multiple times with ethanol and deionized water. Then, the electroplated electrode is annealed at high temperature in an oven at 200 ℃ for 2 hours. S23) Place 1 mmol of heptamolybdate tetrahydrate, 30 mmol of thiourea and 1-2 mol of aqueous solution in a beaker and stir for 30 min. After stirring, place the mixed solution and annealed carbon in a high-pressure reactor and heat. S24) After heat treatment, it is placed in a 55℃ oven to dry.

5. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S3), the specific method for preparing the ion dielectric layer is as follows: S31), 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide, polyvinylidene fluoride, and N,N-dimethylformamide were placed in a beaker in a weight ratio of 0-5:1:

10. The beaker was sealed with plastic wrap to prevent solvent evaporation and foreign substances from entering. The prepared solution was placed in an oil bath and heated and stirred at 70℃ and 100rpm for 2.5h to obtain a transparent ionic solution. S32) Cut cotton cloth, non-woven fabric, and washcloth into appropriate sizes; S33) The cut silk fabric is soaked in a transparent ionic solution for 20 minutes to obtain a dielectric layer, and then the dielectric layer is dried on a 40°C heating plate.

6. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S5), copper conductive wires are soldered onto the carbon cloth / MnO2 / MoS2 electrode using silver paste, and an ion dielectric layer is glued between the two flexible and breathable carbon cloth / MnO2 / MoS2 electrodes.

7. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S22), the electroplating is performed using a three-electrode system of an electrochemical workstation. The electrodes are hydrophilically treated carbon cloth, silver / silver chloride, and a carbon rod. The electroplating time is 600s.

8. The method for fabricating a sensor based on a gas-permeable pseudocapacitive electrode according to claim 1, characterized in that: In step S23), carbon is placed in a high-pressure reactor and heated at 200°C for 24 hours.

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