Boat structure and sheet transport device

Abstract

This invention discloses a boat structure and a sheet transport device. The boat structure includes a body and a handle, with the handle connected to a side wall opposite to the body. The handle is used to mate with a support member of the transport boat structure and / or a support rod for transporting the boat structure. The handle has a mating surface, which serves as a guide and limiter when the boat structure mates with the support member or support rod. This boat structure can be directly placed on the support member or support rod, and its position can be automatically corrected during installation, ensuring that the boat structure is stably placed in the center of the support member or support rod. This reduces the strength requirements of the support member and support rod, and helps to reduce manufacturing costs.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a boat structure and a sheet transport device. Background Technology

[0002] In the semiconductor industry chain, the structure of the quartz boat directly affects its stability when placed on the boat-pushing mechanism, significantly impacting the production process and consequently affecting the quality of the silicon wafers. Currently, the common practice is to first place the boat on a boat support, and then place the boat support on a support or rod. Because the boat relies on the boat support to be placed on the support or rod, the total weight of the boat and boat support is significant, placing high demands on the strength of the support and rod, resulting in a high overall cost. Although existing technologies also include structures that directly mount the boat to the support or rod, positioning the boat is difficult, and it is very easy for the boat to deviate from the center of the support or rod during placement, leading to poor boat stability. Summary of the Invention

[0003] The purpose of this invention is to provide a boat structure that can be directly placed on a support or bracket and can automatically correct its position during installation, ensuring that the boat structure can be stably placed in the center of the support or bracket, reducing the strength requirements of the support and bracket, and helping to reduce manufacturing costs.

[0004] A second objective of this invention is to provide a sheet transport device that can stably transport sheets and has a low manufacturing cost.

[0005] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0006] This invention discloses a boat structure, including a body and a handle. The handle is connected to a side wall opposite to the body. The handle is used to cooperate with a support member for transporting the boat structure and / or a support rod for carrying the boat structure. The handle has a mating surface, which can guide and limit the movement when the boat structure is placed into the support member or the support rod.

[0007] In some embodiments, the handle portion is provided with a mating space, which can mate with a first protrusion on the support member or a second protrusion on the support rod.

[0008] In some specific embodiments, the handle portion includes at least two spaced-apart support columns, with the mating space defined between the two support columns.

[0009] In some more specific embodiments, the handle portion further includes a mounting portion, the two ends of which are connected to two adjacent grooved rods of the body and connected to two adjacent support columns.

[0010] In some more specific embodiments, the handle portion further includes a connecting portion connected to two adjacent support columns, and the connecting portion has a mating surface formed on the side away from the body.

[0011] In some optional embodiments, the support column is a cylinder, and the connecting portion includes two arc-shaped portions and a second straight portion at both ends that respectively mate with the two arc-shaped portions. The mating surface is arranged around the support column and extends radially outward to the arc-shaped portions and the connecting portion.

[0012] In some embodiments, the handle portion includes a first handle portion and a second handle portion, the first handle portion having a first mating surface, the second handle portion having a second mating surface, the first handle portion mating with the support member, and the second handle portion mating with the bracket.

[0013] In some specific embodiments, the second handle portion is located above the first handle portion.

[0014] In some specific embodiments, the distance between the bottom edge of the first mating surface and the groove rod of the boat structure is D1, and the distance between the bottom edge of the second mating surface and the groove rod is D2, where D1 is greater than D2.

[0015] The present invention also discloses a sheet transport device, including the boat structure, the support rod and the support member described above, wherein the boat structure is provided with a handle portion that cooperates with the support rod and the support member.

[0016] The beneficial effects of the boat structure of the present invention are as follows: Since the handle portion provided on the boat structure can directly engage with the support member of the transport boat structure or the support rod for handling the boat structure, in this embodiment, the boat structure does not need to use the boat support and support member and support rod of the prior art, thereby reducing the strength requirements of the support member and support rod and helping to reduce manufacturing costs. Because the handle portion has mating surfaces, and the handle portion is located on opposite sides of the main body, when the boat structure is placed on the support member or support rod, the two mating surfaces can guide and correct the boat structure, allowing it to move to the center position of the support member or support rod during installation, thereby ensuring that the boat structure can be stably placed at the center of the support member or support rod.

[0017] The beneficial effects of the sheet transport device of the present invention are as follows: due to the boat structure described above, the sheet transport device can transport sheets stably and has a low manufacturing cost.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] Figure 1 This is a three-dimensional structural diagram of the boat structure according to an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the boat structure in the first direction according to an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the boat structure in the second direction according to an embodiment of the present invention;

[0022] Figure 4 This is a third-angle structural diagram of the boat structure according to an embodiment of the present invention;

[0023] Figure 5 This is a schematic diagram of the sheet transport device of the present invention;

[0024] Figure 6 This is a partial structural schematic diagram of the sheet transport device of the present invention.

[0025] Figure label:

[0026] 100. Body; 110. End plate; 120. Groove rod;

[0027] 200. Handle portion; 210. Support column; 211. Mating space; 220. Mounting portion; 221. Tapered portion; 222. First straight portion; 230. Connecting portion; 231. Arc-shaped portion; 232. Second straight portion; 201. First handle portion; 202. Second handle portion; 203. Mating surface; 2031. First mating surface; 2032. Second mating surface; 2032;

[0028] 300, support rod; 310, mounting groove; 320, mounting block; 321, second protrusion;

[0029] 400, Support component; 410, First protrusion. Detailed Implementation

[0030] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0031] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] The following is for reference. Figures 1-4 The specific structure of the boat structure according to an embodiment of the present invention is described.

[0035] This invention discloses a boat structure, such as Figures 1-2 As shown, the boat structure includes a body 100 and a handle 200. The body 100 includes two spaced-apart end plates 110 and a plurality of grooved rods 120 connecting the two end plates 110. The handle 200 is connected to the opposite sidewalls of the body 100. Figure 5 As shown, the handle 200 is used to cooperate with the support member 400 of the transport boat structure and / or the support rod 300 of the handling boat structure. The handle 200 is provided with a mating surface 203. When the boat structure is with the support member 400 or the support rod 300, the mating surface 203 can play a guiding role.

[0036] Understandably, since the handle 200 on the boat structure can directly mate with the support member 400 of the transport boat structure or the carrier rod 300 of the handling boat structure, in this embodiment, the boat structure does not need to use the boat support and support member 400 and carrier rod 300 of the prior art, thereby reducing the strength requirements of the support member 400 and carrier rod 300 and helping to reduce manufacturing costs. Since the handle 200 is provided with mating surfaces 203, and the handle 200 is provided on both sides of the body 100, when the boat structure is placed on the support member 400 or carrier rod 300, the two mating surfaces 203 can guide and correct the boat structure, so that it can move to the center position of the support member 400 or carrier rod 300 during the installation process, thereby ensuring that the boat structure can be stably placed at the center of the support member 400 and carrier rod 300.

[0037] It should be noted that in some embodiments, the boat structure is provided with a handle 200, which can cooperate with both the support member 400 and the support rod 300; in some embodiments, the boat structure is provided with two handles 200, one of which cooperates with the support member 400 and the other handle 200 cooperates with the support rod 300.

[0038] In some embodiments, such as Figure 1 As shown, the handle portion 200 has a chamfer on the side opposite to the body 100, and the beveled surface of the chamfer forms a mating surface 203. This facilitates the guiding and correction of the position of the boat structure by the mating surface 203, and also facilitates the machining of the mating surface 203.

[0039] In some embodiments, such as Figure 2 As shown, the handle 200 is provided with a mating space 211, which can mate with the first protrusion 410 on the support member 400 or the second protrusion 321 on the support rod 300. It can be understood that the mating space 211 and the first protrusion 410 or the second protrusion 321 can restrict the boat structure along the length of the support member 400 or the support rod 300, thereby preventing the boat structure from shifting along the length of the support member 400 or the support rod 300, which helps ensure the stability of the boat structure on the support member 400 and the support rod 300.

[0040] In some specific embodiments, such as Figures 2-4 As shown, the handle portion 200 includes at least two spaced-apart support columns 210, with a mating space 211 defined between the two support columns 210. It can be understood that defining the mating space 211 by the spaced-apart support columns 210 allows the support member 400 or the support rod 300 of the transport boat structure to have at least two separate support points with the handle portion 200 of the boat structure, thereby improving the stability of handling and placement.

[0041] In some more specific embodiments, such as Figures 2-4 As shown, the handle portion 200 also includes a mounting portion 220, the two ends of which are connected to two adjacent grooved rods 120 of the body 100 and connected to two adjacent support columns 210. It can be understood that the mounting portion 220 can stably mount at least two support columns 210 on the body 100, thereby indirectly ensuring the stability of the boat structure.

[0042] In some alternative embodiments, such as Figures 2-4 As shown, the mounting portion 220 includes two tapered portions 221 and a first straight portion 222 that mates with the two tapered portions 221 at both ends. The width of the tapered portions 221 gradually decreases in the direction away from the grooved rod 120. It can be understood that the first straight portion 222 provides mounting space for at least two support columns 210, and the two tapered portions 221 can reduce stress concentration at the connection between the mounting portion 220 and the grooved rod 120, thereby reducing the probability of breakage at the connection between the mounting portion 220 and the grooved rod 120 and extending the service life of the boat structure.

[0043] In some more specific embodiments, such as Figures 2-4 As shown, the handle portion 200 also includes a connecting portion 230, which connects to two adjacent support columns 210. A mating surface 203 is formed on the side of the connecting portion 230 away from the body 100. It can be understood that the connecting portion 230 can improve the stability of the support column 210 on the one hand, and the mating surface 203 formed on the other hand can guide and correct the boat structure, so that it is stably placed at the center of the support member 400 or the bracket 300.

[0044] In some alternative embodiments, such as Figures 2-4 As shown, the support column 210 is a cylinder, and the connecting part 230 includes two arc-shaped parts 231 and a second straight part 232 that mates with the two arc-shaped parts 231 at both ends. The mating surface 203 is arranged around the support column 210 and extends radially outward to the arc-shaped parts 231 and the connecting part 230. It can be understood that the support column 210 is a cylinder, and the mating surface 203 is arranged around the support column 210. The mating surface 203 is formed as an inclined surface extending from the outer peripheral surface of the support column 210 to the arc-shaped parts 231 and the connecting part 230. This facilitates the installation of the boat structure, allowing the boat structure to be placed without precise positioning during placement. Through the guiding and restraining effect of the inclined mating surface 203, it is stably placed at the center of the support member 400 or the support rod 300. The second straight section 232 ensures the strength of the handle section 200, extends the service life of the boat structure, and can form line contact with the support 400 or the support rod 300, enhancing the stability of handling and placement.

[0045] Of course, it should be noted that in other embodiments of the present invention, the shape of the support column 210 is not limited to a cylinder, but can also be a cuboid, a triangular prism or other shapes, which can be selected according to actual needs.

[0046] In some optional embodiments, a chamfer is formed on the side of the connecting portion 230 away from the body 100, and the inclined surface of the chamfer constitutes a mating surface 203. Providing a chamfer on the connecting portion 230 to form the mating surface 203 facilitates processing, and the inclined mating surface 203 effectively guides and restricts movement, ensuring that even if the boat structure is not precisely positioned during placement, it can be stably placed at the center of the support member 400 or the bracket 300.

[0047] Optionally, the chamfer angle is 30°-60°. This ensures the guiding and restraining function of the mating surface 203. Of course, in other embodiments of the present invention, the chamfer angle can be selected according to actual needs, and is not limited to 30°-60° in this embodiment.

[0048] In some embodiments, such as Figure 1 and Figure 5 As shown, the handle portion 200 includes a first handle portion 201 and a second handle portion 202. The first handle portion 201 cooperates with the support member 400, and the second handle portion 202 cooperates with the support rod 300. It can be understood that by setting the first handle portion 201 and the second handle portion 202 to cooperate with the support member 400 and the support rod 300 respectively, in actual operation, multiple boat structures are first placed on the support rod 300, and then the multiple boat structures are transferred to the support member 400, thereby realizing the transfer and transportation of multiple boat structures in a single operation.

[0049] In some specific embodiments, such as Figure 1 As shown, the second handle portion 202 is located above the first handle portion 201. It can be understood that in actual operation, multiple boat structures are first placed on the support rod 300, and then transported above the support member 400, with the handle portion 200 supported on the support member 400. When multiple boat structures are on the support member 400, it is only necessary to insert the support rod 300 between the two handle portions 200 and abut the support rod 300 against the upper handle portion 200, thus facilitating the transfer and transportation of the entire boat structure.

[0050] In some more specific embodiments, such as Figure 1As shown, the second handle portion 202 has a second mating surface 2032, and the first handle portion 201 has a first mating surface 2031. The distance between the bottom edge of the first mating surface 2031 and the groove rod 120 of the boat structure is D1, and the distance between the bottom edge of the second mating surface 2032 and the groove rod 120 of the boat structure is D2, where D1 is greater than D2. It can be understood that because the second handle portion 202 mates with the support rod 300, in actual operation, the support rod 300 moves the boat structure a relatively long distance. The smaller distance between the second mating surface 2032 and the groove rod 120 shortens the lever arm, ensuring stable support of the boat structure while reducing the probability of damage to the second handle portion 202 and extending its service life. Meanwhile, since the first handle 201 cooperates with the support 400, in the actual working process, the support 400 supports the boat structure in the furnace body of the hot furnace. On the one hand, the distance for moving the boat structure is relatively short (the distance for entering and exiting the hot furnace body). On the other hand, it can avoid the support 400 being too close to the silicon wafer on the boat structure, which would affect the uniformity of the airflow in the furnace body near the support 400, thus affecting the normal processing of the silicon wafer.

[0051] Optional, such as Figure 5 As shown, the maximum distance between the two first mating surfaces 2031 is D4 (the first mating surface 2031 is an inclined surface, and the maximum distance between the two first mating surfaces 2031 is the distance between the top edges of the two inclined surfaces), and the distance between the support members 400 is D3, where D4 is less than D3. It can be understood that because D4 is less than D3, when the boat structure is placed on the support member 400, the boat structure can be better fixed, making the boat structure more stable during transportation and preventing the silicon wafers in the boat structure from shaking or tipping over.

[0052] Optional, such as Figure 5 As shown, the maximum distance between the two second mating surfaces 2032 is D6 (the second mating surface 2032 is an inclined surface, and the maximum distance between the two second mating surfaces 2032 is the distance between the top edges of the two inclined surfaces), and the distance between the support rods 300 is D5, where D6 is less than D5. It can be understood that because D5 is less than D6, during the process of the support rods 300 clamping the boat structure to achieve the transport of the boat structure, the second mating surfaces 2032 can better guide and restrict the boat structure, and ensure that the support rods 300 can stably clamp the boat structure, making the boat structure more stable during transportation and preventing the silicon wafers of the boat structure from shaking or tipping over.

[0053] The present invention also discloses a sheet transport device, such as Figures 5-6 As shown, the sheet transport device includes the boat structure described above, the support rod 300, and the support member 400. The boat structure is provided with a handle portion 200 that cooperates with the support rod 300 and the support member 400. Due to the boat structure described above, this sheet transport device can transport sheets stably and has a low manufacturing cost.

[0054] In some embodiments, such as Figure 6 As shown, the support member 400 has a first protrusion 410, and the handle portion 200 is provided with a mating space 211, which can mate with the first protrusion 410. It can be understood that the mating space 211 and the first protrusion 410 can restrict the boat structure in the length direction of the support member 400, thereby preventing the boat structure from moving along the length direction of the support member 400 or the support rod 300, which helps to ensure the stability of the boat structure on the support member 400.

[0055] Optionally, the first protrusion 410 is connected to the support member 400 by adhesive bonding or welding. This facilitates the installation of the first protrusion 410 and the support member 400, and also improves the connection strength between them. It should also be noted that in other embodiments of the invention, the first protrusion 410 can also be connected to the support member 400 by screws, pins, or snap-fit ​​structures.

[0056] Optionally, the first protrusion 410 is provided on the upper end surface of the support member 400. Thus, the first protrusion 410 is merely an additional component on the support member 400 and will not affect the overall strength of the support member 400, thereby helping to extend the service life of the support member 400.

[0057] Optionally, the first protrusion 410 can be made of the same material as the support 400, such as silicon carbide or quartz, which are resistant to high temperatures and corrosion.

[0058] In some embodiments, such as Figure 6 As shown, the support rod 300 has a second protrusion 321, and the handle 200 has a mating space 211, which can mate with the second protrusion 321. It can be understood that the mating space 211 and the second protrusion 321, through their interaction, can restrict the boat structure along the length of the support rod 300, thereby preventing the boat structure from shifting along the length of the support rod 300 and ensuring the stability of the boat structure on the support rod 300.

[0059] In some specific embodiments, such as Figure 6As shown, the support rod 300 is provided with a mounting groove 310, and a mounting block 320 is provided in the mounting groove 310. The second protrusion 321 is provided on the mounting block 320. It is understood that during multiple transportation processes, the side wall where the second protrusion 321 mates with the handle 200 will wear. When the width of the second protrusion 321 (the width of the second protrusion 321 is the maximum dimension of the second protrusion 321 along the length direction of the support rod 300) is less than the width of the mating space 211, the connection stability between the support rod 300 and the handle 200 will be reduced. If the entire support rod 300 is replaced at this time, the replacement cost will be too high. In this embodiment, the support rod 300 is provided with a mounting groove 310, and a mounting block 320 is provided in the mounting groove 310. The second protrusion 321 is provided on the mounting block 320. When the second protrusion 321 is excessively worn, only the mounting block 320 needs to be replaced, resulting in lower usage costs.

[0060] Preferably, the mounting block 320 and the mounting groove 310 are interference-fitted. This eliminates the need for connecting parts or clips, simplifying the structure of the mounting block 320 and the mounting groove 310. It also facilitates the installation of the mounting block 320 onto the support rod 300, making the installation and removal of the mounting block 320 easier.

[0061] Of course, it should be noted that in other embodiments of the present invention, the mounting block 320 can also be connected to the mounting groove 310 by screws, pins or other connectors, or by adhesive bonding, or by a snap-fit ​​structure. The specific connection structure between the mounting block 320 and the support rod 300 can be selected according to actual needs.

[0062] Optionally, the mounting block 320 can be made of the same material as the bracket 300, such as silicon carbide or quartz, which are resistant to high temperatures and corrosion.

[0063] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0064] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A boat structure, characterized in that, The device includes a body (100) and a handle (200). The handle (200) is connected to a side wall opposite to the body (100). The handle (200) is used to cooperate with a support member (400) of the transport boat structure and / or a support rod (300) for carrying the boat structure. The handle (200) has a mating surface (203). When the boat structure cooperates with the support member (400) or the support rod (300), the mating surface (203) can play a guiding and limiting role. The handle portion (200) includes a first handle portion (201) and a second handle portion (202). The first handle portion (201) has a first mating surface (2031), and the second handle portion (202) has a second mating surface (2032). The first handle portion (201) mates with the support member (400), and the second handle portion (202) mates with the support rod (300). The second handle portion (202) is located above the first handle portion (201). The distance between the bottom edge of the first mating surface (2031) and the groove rod (120) of the boat structure is D1, and the distance between the bottom edge of the second mating surface (2032) and the groove rod (120) is D2. D1 is greater than D2.

2. The boat structure according to claim 1, characterized in that, The handle (200) is provided with a mating space (211), which mates with a first protrusion (410) on the support (400) or a second protrusion (321) on the support rod (300).

3. The boat structure according to claim 2, characterized in that, The handle (200) includes at least two spaced-apart support posts (210), and the two support posts (210) define the mating space (211).

4. The boat structure according to claim 3, characterized in that, The handle (200) also includes a mounting part (220), the two ends of which are connected to two adjacent grooved rods (120) of the body (100) and connected to two adjacent support columns (210).

5. The boat structure according to claim 3, characterized in that, The handle (200) also includes a connecting part (230), which is connected to two adjacent support columns (210). The connecting part (230) has a mating surface (203) on the side away from the body (100).

6. The boat structure according to claim 5, characterized in that, The support column (210) is a cylinder, and the connecting part (230) includes two arc-shaped parts (231) and a second straight part (232) at both ends respectively cooperating with the two arc-shaped parts (231). The mating surface (203) is arranged around the support column (210) and extends outward along the radial direction of the support column (210) to the arc-shaped parts (231) and the connecting part (230).

7. A sheet conveying device, characterized in that, The boat structure includes a boat structure, a support rod (300), and a support member (400) as described in any one of claims 1-6, wherein the boat structure is provided with a handle (200) that cooperates with the support rod (300) and the support member (400).

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