A transfer valve

Abstract

The application discloses a transmission valve, which comprises a valve body, a single-side sealing plate and a double-side sealing plate, the valve body is provided with a first port and a second port, the single-side sealing plate is used for sealing the first port, the double-side sealing plate comprises a first sealing plate and a second sealing plate, and the first sealing plate and the second sealing plate are used for sealing the first port and the second port; a lifting mechanism is arranged in the valve body, the first sealing plate and the second sealing plate are installed on the lifting mechanism through a transverse telescopic mechanism, and the first sealing plate and the second sealing plate are connected with the transverse telescopic mechanism through butt joint structures capable of being separated and combined. When a leakage point appears between adjacent chambers, the transmission valve can realize accurate positioning of the leakage point and improve the troubleshooting efficiency; when the valve body is disassembled, the vacuum environment in the chamber is not damaged, so that the stability of wafer production quality is ensured.

Description

Technical Field

[0001] This invention relates to the field of valve device technology, and more particularly to a transfer valve used in semiconductor manufacturing processes to achieve isolation and sealing between adjacent chambers, thereby enabling normal transfer of wafers under vacuum pressure. Background Technology

[0002] In the semiconductor industry, wafer transfer between adjacent chambers requires the use of valve devices to convert the chamber pressure.

[0003] Currently, most methods for achieving vacuum conversion between chambers use single-sided sealed transfer valves to seal and isolate the gas pressure between adjacent chambers, ultimately ensuring equal pressure on both sides for wafer transfer. However, a gas leak in this type of transfer valve will affect the vacuum conversion between chambers, preventing wafer transfer. Furthermore, troubleshooting leaks involves sequentially disassembling and reassembling each component of both chambers and the transfer valve, including sealing devices, locking devices, and connecting devices. This method is simplistic, prone to inaccurate positioning, difficult to troubleshoot, and extremely labor-intensive, increasing production costs. Disassembling the valve body also disrupts the vacuum in both chambers, allowing atmospheric pressure to fill the space and negatively impacting particle levels.

[0004] This situation is very serious in the field of high-precision semiconductors because disrupting the chamber environment is equivalent to contaminating the original nature of the chamber, which can introduce particles onto the wafer and affect product quality. Summary of the Invention

[0005] The purpose of this invention is to provide a transfer valve. This transfer valve can accurately locate leaks when troubleshooting leaks between adjacent chambers, improving troubleshooting efficiency. Furthermore, it does not disrupt the vacuum environment inside the chambers during valve assembly and disassembly, thereby ensuring the stability of wafer production quality.

[0006] To achieve the above objectives, the present invention provides a transmission valve, comprising a valve body and a single-sided sealing plate and a double-sided sealing plate disposed inside the valve body. The valve body has a first port corresponding to a first chamber and a second port corresponding to a second chamber. The single-sided sealing plate is used to seal the first port in a primary sealing state. The double-sided sealing plate includes a first sealing plate and a second sealing plate, which are used to seal the first port and the second port respectively in a secondary sealing state. A lifting mechanism is provided inside the valve body, which is used to drive the single-sided sealing plate, the first sealing plate, and the second sealing plate to move up and down. The first sealing plate and the second sealing plate are mounted on the lifting mechanism through a lateral telescopic mechanism, which is used to drive the first sealing plate and the second sealing plate to move laterally. The first sealing plate and the second sealing plate are respectively connected to the lateral telescopic mechanism through a separable and connectable docking structure.

[0007] In one embodiment, during the inspection state, the first sealing plate and the second sealing plate seal the first port and the second port using the pressure difference between the inside and outside of the first chamber and the second chamber.

[0008] In one embodiment, during the inspection state, the lateral telescopic mechanism can overcome the attraction force generated by the internal and external pressure difference through a retraction action to separate the docking structure, and can re-join the docking structure through an extension action.

[0009] In one embodiment, the docking structure includes a socket and an insertion part, the socket being disposed on the first sealing plate and the second sealing plate, and the insertion part being disposed on the telescopic end of the transverse telescopic mechanism.

[0010] In one embodiment, the socket is a ball-head plunger hole, and the insertion part is a ball-head plunger.

[0011] In one embodiment, the lateral telescopic mechanism includes a first cylinder and a second cylinder arranged symmetrically on the left and right sides. The piston rod of the first cylinder is connected to the first sealing plate through a docking structure, and the piston rod of the second cylinder is connected to the second sealing plate through a docking structure.

[0012] In one embodiment, a positioning structure is provided for holding the first sealing plate and the second sealing plate at the first port and the second port, respectively.

[0013] In one embodiment, the positioning structure includes pins disposed around the first port and the second port, and the sealing mating surfaces of the first sealing plate and the second sealing plate are provided with pin holes corresponding to the pins.

[0014] In one embodiment, the sealing mating surface of the single-sided sealing plate and the sealing mating surface of the first port are generally located on the same vertical plane, and the single-sided sealing plate reaches the sealing position by rising or leaves the sealing position by falling.

[0015] In one embodiment, the single-sided sealing plate and the double-sided sealing plate are disposed on the same lifting mechanism, the double-sided sealing plate is positioned higher than the single-sided sealing plate, and the single-sided sealing plate is located below the first sealing plate.

[0016] In one embodiment, the lifting mechanism includes a cylinder and a lifting arm. The cylinder is arranged vertically, and the lifting arm is installed on the upper end of the piston rod of the cylinder. One set of lifting arms extends upward for installing a single-sided sealing plate, and the other set of lifting arms extends upward for installing a lateral telescopic mechanism.

[0017] In one embodiment, the top of the valve body is provided with a purification hole for introducing gas to blow away particles.

[0018] In one embodiment, the lower part of the valve body is provided with an air hole, which can be filled with gas to make the internal pressure match the atmospheric pressure.

[0019] In one embodiment, the purification hole and the air hole are located at opposite ends of the valve body diagonally.

[0020] In one embodiment, the sealing mating surfaces of the single-sided sealing plate, the first sealing plate, and the second sealing plate that move up and down are respectively provided with sealing rings.

[0021] The transmission valve provided by this invention has both a single-sided sealing plate and a double-sided sealing plate inside the valve body. Under normal use, the single-sided sealing plate seals the first port, providing a primary sealing state to ensure normal wafer transmission. When leakage occurs, the double-sided sealing plates simultaneously seal the first and second ports, providing a secondary sealing state. Then, the chambers on both sides are evacuated. If either chamber fails to reach a vacuum state, it indicates a leak in that chamber; these non-vacuum chambers are checked one by one. If the chamber pressures on both sides are stable, it indicates no leaks. Only oxygen or other gases need to be introduced into the valve body to equalize the internal pressure with atmospheric pressure. The valve body can then be disassembled for inspection. Because the first and second sealing plates are connected to the lateral telescopic mechanism via separable and connectable docking structures, they can automatically separate or connect during disassembly and assembly, thus avoiding damage to their position and sealing performance. It is evident that the activation of the secondary seal enables accurate location of leaks, improving troubleshooting efficiency. Furthermore, the docking structure, which can automatically separate and reassemble, maintains the environment of the transmission chamber during valve body disassembly and assembly, without disrupting the vacuum conditions inside the chamber. This ensures that particles are less likely to appear in the first and second chambers, thereby guaranteeing the stability of wafer production quality. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a transmission structure in a first-level sealed state, provided by an embodiment of the present invention. Figure 2 for Figure 1 Top view of the transmission valve shown; Figure 3 for Figure 1 Right view of the transmission valve shown; Figure 4 This is a schematic diagram of the lateral telescopic mechanism; Figure 5 This is a schematic diagram of the lateral telescopic mechanism when it is separated from the first and second sealing plates. Figure 6This is a schematic diagram of the structure of the ball-head plunger and the ball-head plunger bore. Figure 7 for Figure 1 The diagram shows the structure of the transmission valve when it is in a secondary sealing state and the docking structure is not separated. Figure 8 for Figure 1 The diagram shows the structure of the transmission valve in a two-stage sealing state when the docking structure has been separated.

[0023] In the picture: 10. Valve body 11. First port 12. Second port 13. Purification hole 14. Air hole 20. Single-sided sealing plate 21. Primary sealing ring 31. First chamber 32. Second chamber 41. First sealing plate 42. Second sealing plate 43. Secondary sealing ring 51. Double-stroke cylinder 52. Lifting arm 60. Lateral telescopic mechanism 61. First cylinder 62. Second cylinder 63. Housing 70. Docking structure 71. Ball plunger hole 72. Slot 73. Ball plunger 74. Spring 81. Pin 82. Pin hole Detailed Implementation

[0024] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In this document, terms such as "upper," "lower," "inner," and "outer" are established based on the positional relationships shown in the accompanying drawings. Depending on the drawings, the corresponding positional relationships may also change. Therefore, they should not be interpreted as an absolute limitation on the scope of protection. Moreover, relational terms such as "first" and "second" are only used to distinguish one component from another that has the same name, and do not necessarily require or imply any such actual relationship or order between these components.

[0026] Please refer to Figures 1 to 3 , Figure 1 This is a schematic diagram of a transmission structure in a first-level sealed state, provided by an embodiment of the present invention. Figure 2 for Figure 1 Top view of the transmission valve shown; Figure 3 for Figure 1 The right view of the transmission valve shown.

[0027] As shown in the figure, in one specific embodiment, the transmission valve provided by the present invention mainly consists of a valve body 10 and components such as a single-sided sealing plate 20 and a double-sided sealing plate disposed inside the valve body. The valve body 10 has a first chamber 31 and a second chamber 32 respectively on both sides. The first chamber 31 is generally rectangular in shape, and its internal cavity is also rectangular. The second chamber 32 is generally hexagonal in shape, and its internal cavity is circular. The valve body 10 has a first port 11 corresponding to the first chamber 31 and a second port 12 corresponding to the second chamber 32. The single-sided sealing plate 20 is used to seal the first port 11 so that the transmission valve is in a first-level sealing state. The double-sided sealing plate has a first sealing plate 41 and a second sealing plate 42 respectively located on the left and right sides. The first sealing plate 41 and the second sealing plate 42 are used to seal the first port 11 and the second port 12 respectively so that the transmission valve is in a second-level sealing state.

[0028] The valve body 10 is equipped with a lifting mechanism, which is used to drive the single-sided sealing plate 20, the first sealing plate 41 and the second sealing plate 42 to move up and down. The first sealing plate 41 and the second sealing plate 42 are installed on the lifting mechanism through the lateral telescopic mechanism 60. The single-sided sealing plate 20 and the double-sided sealing plate are located in the same lifting mechanism. The position of the double-sided sealing plate is higher than that of the single-sided sealing plate 20, and the single-sided sealing plate 20 is located below the first sealing plate 41.

[0029] Specifically, the lifting mechanism mainly consists of a double-stroke cylinder 51 and a lifting arm 52. The double-stroke cylinder 51 is vertically arranged, roughly in the middle position. The lifting arm 52 is installed on the upper end of the piston rod of the double-stroke cylinder 51. One set of lifting arms 52 extends upward to install the single-sided sealing plate 20, and the other set of lifting arms 52 extends upward to install the transverse telescopic mechanism 60. The first sealing plate 41 and the second sealing plate 42 are respectively installed on the left and right sides of the transverse telescopic mechanism 60. When the piston rod of the double-stroke cylinder 51 moves up and down, it can drive the single-sided sealing plate 20, the first sealing plate 41, and the second sealing plate 42 to rise or fall simultaneously. Using the double-stroke cylinder 51 makes it easier to switch between the primary and secondary sealing states.

[0030] The sealing mating surface of the single-sided sealing plate 20 and the sealing mating surface of the first port 11 are roughly located on the same vertical plane. Driven by the lifting mechanism, the single-sided sealing plate 20 can reach the sealing position corresponding to the first port 11 by rising, or disengage from the sealing position by falling.

[0031] In this embodiment, the sealing surface of the single-sided sealing plate 20 is provided with a rectangular primary sealing ring 21. The single-sided sealing plate 20 is always in sealing contact with the inner surface of the left side of the valve body 10 through the primary sealing ring 21. When the single-sided sealing plate 20 moves up and down, it will have a certain friction with the inner surface of the left side of the valve body 10. When the single-sided sealing plate 20 rises to the position of the first port 11, it gradually covers the first port 11, thereby achieving the effect of sealing the first port 11. This structure does not require driving the single-sided sealing plate 20 to move laterally, so it is simpler in structure.

[0032] Considering that the primary sealing ring 21 of the single-sided sealing plate 20 will generate particles due to friction and vibration during the process of reaching the designated position, this embodiment provides a purification hole 13 on the top of the valve body 10. After the single-sided sealing plate 20 seals the first port 11, gas can be introduced through the purification hole 13 to blow away the particles and achieve the purification function.

[0033] The lower part of the valve body 10 is provided with an air hole 14 that can be filled with oxygen or other gases to make the internal pressure consistent with the atmospheric pressure. In order to obtain a better purification effect, the purification hole 13 and the air hole 14 are located at the two ends of the diagonal direction of the valve body 10, so as to better guide the airflow to sweep the entire inner cavity of the valve body 10.

[0034] The lateral telescopic mechanism 60 is used to drive the first sealing plate 41 and the second sealing plate 42 to move laterally. The first sealing plate 41 and the second sealing plate 42 are respectively connected to the lateral telescopic mechanism 60 through a docking structure 70 that can be separated and joined.

[0035] The lateral telescopic mechanism 60 mainly consists of a housing 63 and a first cylinder 61 and a second cylinder 62 disposed within the housing. The first cylinder 61 and the second cylinder 62 are arranged symmetrically in opposite directions. Their rod chamber and rodless chamber are respectively connected to air intake pipes. The telescopic rod can be pushed to extend and retract in the horizontal direction by air pressure. The telescopic rod of the first cylinder 61 is connected to the first sealing plate 41 through a docking structure, and the telescopic rod of the second cylinder 62 is connected to the second sealing plate 42 through a docking structure.

[0036] The sealing mating surfaces of the first sealing plate 41 and the second sealing plate 42 are provided with rectangular secondary sealing rings 43. When the first sealing plate and the second sealing plate 42 reach the positions corresponding to the first port 11 and the second port 12, the lateral telescopic mechanism 60 drives the first sealing plate 41 and the second sealing plate 42 to press against the first port 11 and the second port 12 respectively, thereby sealing the first port 11 and the second port 12.

[0037] In the troubleshooting state, by evacuating the first chamber 31 and the second chamber 32, the first sealing plate 41 and the second sealing plate 42 can seal the first port 11 and the second port 12 using the pressure difference between the inside and outside of the first chamber 31 and the second chamber 32. At this time, if a leak is found in the first chamber 31 or the second chamber 32, and the valve body 10 is ruled out as a leak, the lateral telescopic mechanism 60 will remain connected to the first sealing plate 41 and the second sealing plate 42 and does not need to be separated. If no leak is found in the first chamber 31 and the second chamber 32, the leak may be in the valve body 10. In this case, the lateral telescopic mechanism 60 needs to be activated. The first sealing plate 41 and the second sealing plate 42 are separated. Since the attraction force generated by the internal and external pressure difference of the first sealing plate 41 and the second sealing plate 42 is large, while the bonding force between the transverse telescopic mechanism 60 and the first sealing plate 41 and the second sealing plate 42 is relatively small, the transverse telescopic mechanism 60 can separate the docking structure by retracting the telescopic rod. During the assembly process, it can re-join the docking structure by extending the telescopic rod, thereby realizing the automatic separation and joining of the first sealing plate 41 and the second sealing plate 42 without manual operation, ensuring the independence of the first sealing plate 41 and the second sealing plate 42.

[0038] Furthermore, this embodiment also includes a positioning structure for holding the first sealing plate 41 and the second sealing plate 42 at the first port 11 and the second port 12, respectively.

[0039] This positioning structure has pins 81 located around the first port 11 and the second port 12. The sealing mating surfaces of the first sealing plate 41 and the second sealing plate 42 are provided with pin holes 82 corresponding to the pins 81. After the pins 81 and the pin holes 82 are engaged, the first sealing plate 41 and the second sealing plate 42 can be tightly fixed on the sealing surfaces of the left and right chamber ports, preventing the first sealing plate 41 and the second sealing plate 42 from shifting due to various reasons, which would lead to sealing failure.

[0040] Please refer to this as well. Figures 4 to 6 , Figure 4 This is a schematic diagram of the structure of the ball-head plunger and the ball-head plunger bore. Figure 5 This is a schematic diagram of the lateral telescopic mechanism when it is separated from the first and second sealing plates. Figure 6 This is a schematic diagram of the structure of the ball-head plunger and the ball-head plunger hole.

[0041] The docking structure 70 can take many forms. In this embodiment, the docking structure 70 is mainly composed of a socket and an insertion part. The socket is a ball-head plunger hole 71 located on the back of the first sealing plate 41 and the second sealing plate 42. It has a certain depth and has slots 72 on both sides of the inner wall. The insertion part is a ball-head plunger 73 located at one end of the telescopic rod of the transverse telescopic mechanism 60. The telescopic rod has an inner cavity for accommodating the ball-head plunger 73. It has holes corresponding to the ball-head plunger 73 and a spring 74 supporting the ball-head plunger 73 inside.

[0042] When the ball plunger 73 is inserted into the slot 72, docking can be achieved; when the ball plunger 73 is disengaged from the slot 72 under the action of insertion and extraction force, separation can be achieved.

[0043] In other embodiments, the docking structure 70 can also be magnetically attracted. For example, magnets can be provided on the first sealing plate 41 and the second sealing plate 42 respectively, and magnets with opposite magnetic poles can be provided at the end of the telescopic rod of the transverse telescopic mechanism 60. They can be joined by magnetic force and can also be separated by external force. In order to ensure that the first sealing plate 41 and the second sealing plate 42 are accurately docked with the transverse telescopic mechanism 60, corresponding centering components can be provided between them.

[0044] Please continue to refer to this. Figure 7 , Figure 8 , Figure 7 for Figure 1 The diagram shows the structure of the transmission valve when it is in a secondary sealing state and the docking structure is not separated. Figure 8 for Figure 1 The diagram shows the structure of the transmission valve in a two-stage sealing state when the docking structure has been separated.

[0045] During normal operation, the double-stroke cylinder 51 drives the single-sided sealing plate 20 to rise through the piston rod. When the single-sided sealing plate 20 reaches the height of the first port 11, it seals the first port 11, putting the transmission valve in a first-level sealing state, thus achieving the isolation and sealing of the first chamber 31 and the second chamber 32. At this time, the functions of the purification hole 13 and the air hole 14 are closed, and the vacuum pump is turned on, so that the cavity pressure of the first chamber 31 and the second chamber 32 on both sides reaches a vacuum, ensuring the normal transmission of the wafer.

[0046] When a leak is detected and needs to be investigated, the single-sided sealing plate 20, which achieves primary sealing, falls to a lower position. The piston rod of the double-stroke cylinder 51 further descends, causing the first sealing plate 41 and the second sealing plate 42 to fall to the height of the first port 11 and the second port 12. Then, the telescopic rods of the first cylinder 61 and the second cylinder 62 of the transverse telescopic mechanism 60 extend, extending the first sealing plate 41 and the second sealing plate 42 to the two ports, achieving isolation and sealing between the chamber and the valve body 10. Then, a vacuum is drawn into both chambers, and the telescopic rods of the transverse telescopic mechanism 60 retract independently. The first sealing plate 41 and the second sealing plate 42 are individually fixed at the port positions, and the transmission valve changes from primary sealing to secondary sealing.

[0047] The specific process for identifying and eliminating leaks is as follows: When the valve body is in a secondary sealing state, both chambers are evacuated. If neither chamber reaches a vacuum state, it indicates a leak in either the first chamber 31 or the second chamber 32. The non-vacuum chambers should be checked one by one. If the chamber pressures in both chambers are stable, it indicates no leaks. The leak may be in the valve body 10 itself. In this case, oxygen should be introduced through the vent 14 to equalize the internal pressure of the valve body 10 with atmospheric pressure. Then, the valve body 10 should be disassembled and inspected.

[0048] The above embodiments are merely preferred embodiments of the present invention and are not limited thereto. Based on these, targeted adjustments can be made according to actual needs to obtain different implementation methods. For example, the lateral telescopic mechanism 60 can also have other forms, or the single-sided sealing plate 20 can also be driven by the lateral telescopic mechanism, and so on. Since there are many possible implementation methods, they will not be listed here.

[0049] Since the first sealing plate 41 and the second sealing plate 42 are respectively connected to the lateral telescopic mechanism 60 through a detachable and connectable docking structure 70, during disassembly and assembly, the first sealing plate 41 and the second sealing plate 42 can automatically separate or connect with the lateral telescopic mechanism 60, thereby avoiding the involvement of the first sealing plate 41 and the second sealing plate 42 during disassembly and assembly, and preventing damage to the position and sealing performance of the first sealing plate 41 and the second sealing plate 42. It is evident that the activation of the secondary seal can achieve accurate location of leaks, improve troubleshooting efficiency, and the detachable and connectable docking structure 70 can maintain the transmission chamber environment during valve body 10 disassembly and assembly, without disrupting the vacuum conditions inside the chamber, ensuring that particles are less likely to appear in the first chamber 31 and the second chamber 32, thereby ensuring the stability of wafer production quality and effectively improving the product competitiveness of equipment manufacturers.

[0050] The transmission valve provided by this invention has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are merely for the purpose of helping to understand the core ideas of this invention. It should be noted that those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this invention.

Claims

1. A transfer valve, characterized in that, The valve body includes a valve body and a single-sided sealing plate and a double-sided sealing plate disposed inside the valve body. The valve body has a first port corresponding to a first chamber and a second port corresponding to a second chamber. The single-sided sealing plate is used to seal the first port in a first-level sealing state. The double-sided sealing plate includes a first sealing plate and a second sealing plate, which are used to seal the first port and the second port respectively in a second-level sealing state. The valve body is provided with a lifting mechanism, which is used to drive the single-sided sealing plate, the first sealing plate, and the second sealing plate to move up and down. The first sealing plate and the second sealing plate are mounted on the lifting mechanism through a lateral telescopic mechanism, which is used to drive the first sealing plate and the second sealing plate to move laterally. The first sealing plate and the second sealing plate are respectively connected to the lateral telescopic mechanism through a separable and reconnectable docking structure. The first sealing plate and the second sealing plate seal the first port and the second port using the internal and external pressure difference of the first chamber and the second chamber. In the troubleshooting state, the lateral telescopic mechanism can overcome the attraction force generated by the internal and external pressure difference by retracting, thereby separating the docking structure, and can reconnect the docking structure by extending.

2. The transmission valve according to claim 1, characterized in that, The docking structure includes a socket and an insertion part. The socket is located on the first sealing plate and the second sealing plate, and the insertion part is located at the telescopic end of the transverse telescopic mechanism.

3. The transmission valve according to claim 2, characterized in that, The socket is a ball-head plunger hole, and the insertion part is a ball-head plunger.

4. The transmission valve according to any one of claims 1 to 3, characterized in that, The lateral telescopic mechanism includes a first cylinder and a second cylinder arranged symmetrically on the left and right sides. The piston rod of the first cylinder is connected to the first sealing plate through a docking structure, and the piston rod of the second cylinder is connected to the second sealing plate through a docking structure.

5. The transmission valve according to any one of claims 1 to 3, characterized in that, A positioning structure is provided for holding the first sealing plate and the second sealing plate at the first port and the second port, respectively.

6. The transmission valve according to claim 5, characterized in that, The positioning structure includes pins disposed around the first port and the second port, and the sealing mating surfaces of the first sealing plate and the second sealing plate are provided with pin holes corresponding to the pins.

7. The transmission valve according to any one of claims 1 to 3, characterized in that, The sealing mating surface of the single-sided sealing plate is generally located on the same vertical plane as the sealing mating surface of the first port. The single-sided sealing plate reaches the sealing position by rising or leaves the sealing position by falling.

8. The transmission valve according to claim 7, characterized in that, The single-sided sealing plate and the double-sided sealing plate are located on the same lifting mechanism. The double-sided sealing plate is positioned higher than the single-sided sealing plate, and the single-sided sealing plate is located below the first sealing plate.

9. The transmission valve according to any one of claims 1 to 3, characterized in that, The lifting mechanism includes a cylinder and a lifting arm. The cylinder is arranged vertically, and the lifting arm is installed on the upper end of the piston rod of the cylinder. One set of lifting arms extends upward for installing a single-sided sealing plate, and the other set of lifting arms extends upward for installing a lateral telescopic mechanism.

10. The transmission valve according to any one of claims 1 to 3, characterized in that, The valve body has a purification hole at the top for introducing gas to blow away particles.

11. The transmission valve according to claim 10, characterized in that, The lower part of the valve body is provided with an air hole, which can be filled with gas to make the internal pressure match the atmospheric pressure.

12. The transmission valve according to claim 11, characterized in that, The purification hole and the air hole are located at opposite ends of the valve body diagonally.

13. The transmission valve according to any one of claims 1 to 3, characterized in that, The sealing surfaces of the single-sided sealing plate, the first sealing plate, and the second sealing plate, which move up and down, are each provided with a sealing ring.

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