一种用于高分辨力光学成像系统的波像差标定装置及方法
By replacing the measured element with a random ball and rotating it multiple times in the optical imaging system, environmental and adjustment errors are eliminated. Combined with wavefront sensor measurement, the problem of systematic error in high-resolution optical imaging systems is solved, and high-precision wavefront aberration calibration is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- INST OF OPTICS & ELECTRONICS CHINESE ACAD OF SCI
- Filing Date
- 2023-07-17
- Publication Date
- 2026-07-17
AI Technical Summary
Existing high-resolution optical imaging systems suffer from systematic errors in wavelet aberration measurement, especially in reference plane accuracy, making it difficult to meet the requirements of higher-precision lithography projection lenses.
The random sphere method in absolute detection is adopted. By replacing the component under test in the optical path, the random sphere is rotated multiple times to eliminate environmental and adjustment errors. Combined with wavefront sensor measurement, the systematic error is calibrated and subtracted to obtain the high-precision wavefront aberration of the objective lens under test.
It achieves high-precision wavelet aberration measurement, reduces adjustment errors caused by inconsistencies in environment and surface shape, is easy to operate, and is suitable for error calibration of various interferometer systems.
Smart Images
Figure CN116839873B_ABST