Stepless regulation low-power consumption complex amplitude optical waveguide chip and wavefront coding device

CN116841100BActive Publication Date: 2026-09-18XIDIAN UNIV
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Patent Information

Application Number
CN202310713109.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-06-15
Publication Date
2026-09-18
Estimated Expiration
2043-06-15

AI Technical Summary

Technical Problem

[0003]目前,快速调制的光波导相控阵多采用各通道配合独立相位控制器的设计方式,但受限于激光器工艺,随着芯片集成规模的扩大,该方式不可避免地带来全片调制功耗高的问题,也对TEC的瞬时精确恒温控制也带来了挑战,同时还会增加片上加热电极数、键合金线数目,为芯片封装带来困难

Benefits of technology

[0021] This invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip, which forms a first checkerboard region and a second checkerboard region through a bidirectional cross-shaped optical waveguide configuration, effectively reducing the number of phase shifters used for phase modulation from N 2 The power consumption of the optical waveguide phased array is reduced to 3N (including N cascaded dual-ring resonant cavities and 2N thermo-optical phase shifters), significantly reducing the modulation power consumption. Simultaneously, the chip incorporates a micro-ring modulator structure, effectively achieving stepless modulation of the output beam intensity of the optical waveguide phased array. When applied to a wavefront encoder, this chip effectively enhances the wavefront coding capability of the optical waveguide phased array, thereby enabling complex amplitude modulation of the output beam.

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Abstract

The application discloses a kind of stepless regulation low-power consumption complex amplitude optical waveguide chip and wavefront coding equipment, in the chip, 1x2 power divider array includes M level 1x2 multimode interference coupler, wherein, first multimode interference coupler is connected to the input end of first phase shifter array by first optical waveguide, second multimode interference coupler is connected to the input end of second phase shifter array by second optical waveguide, first optical waveguide and second optical waveguide intersect to form first checkerboard area, and first checkerboard area includes double-ring cascade resonant cavity array;The output end of first phase shifter array and second phase shifter array is connected with third optical waveguide and fourth optical waveguide respectively, and third optical waveguide and fourth optical waveguide intersect to form second checkerboard area, and second checkerboard area includes transmitting antenna array.The application can reduce the number of phase shifter for phase modulation from N 2 To 3N, reduce the modulation power consumption of chip.
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Description

Technical Field

[0001] This invention belongs to the field of optical phased array technology, specifically relating to a steplessly adjustable low-power complex amplitude optical waveguide chip and wavefront encoding device. Background Technology

[0002] Optical phased arrays have wide applications in imaging, laser ranging, and other fields. Among them, optical waveguides have received widespread attention in recent years due to their advantages such as fast response speed, low control voltage, and large scanning angle.

[0003] Currently, fast-modulated optical waveguide phased arrays mostly adopt a design approach where each channel is equipped with an independent phase controller. However, due to limitations in laser technology, as the chip integration scale increases, this approach inevitably leads to high power consumption of the entire chip modulation, which also poses a challenge to the instantaneous and precise temperature control of the TEC. Furthermore, it increases the number of on-chip heating electrodes and bonding wires, making chip packaging more difficult.

[0004] Existing wavefront coding devices, such as spatial light modulators, can only achieve single beam modulation, either modulating the light field intensity or the light field phase; optical waveguide phased arrays can only affect the light field phase output by each antenna of the chip through thermo-optic, electro-optic, and acousto-optic modulation, which cannot meet the modulation requirements of existing complex amplitude applications. Summary of the Invention

[0005] To address the aforementioned problems in the prior art, this invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip and a wavefront encoding device. The technical problem to be solved by this invention is achieved through the following technical solution:

[0006] In a first aspect, the present invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip, comprising: an input terminal, a polarization multiplexing unit, a 1×2 power divider array, a phase shifter array, a transmitting antenna array, and a dual-ring cascaded resonant cavity array, wherein the 1×2 power divider array is connected to the phase shifter array via an optical waveguide;

[0007] The 1×2 power divider array includes cascaded M-stage 1×2 multimode interference couplers. The M-stage 1×2 multimode interference coupler includes a first multimode interference coupler and a second multimode interference coupler. The phase shifter array includes a first phase shifter array and a second phase shifter array. The first multimode interference coupler is connected to the input end of the first phase shifter array through a first optical waveguide, and the second multimode interference coupler is connected to the input end of the second phase shifter array through a second optical waveguide. The first optical waveguide and the second optical waveguide intersect to form a first checkerboard region. The first checkerboard region includes a double-ring cascaded resonant cavity array.

[0008] The output terminals of the first phase shifter array and the second phase shifter array are respectively connected to the third optical waveguide and the fourth optical waveguide, wherein the third optical waveguide and the fourth optical waveguide intersect to form a second chessboard area, and the second chessboard area includes the transmitting antenna array.

[0009] In one embodiment of the present invention, the number of the first multimode interference couplers is equal to the number of the second multimode interference couplers.

[0010] In one embodiment of the present invention, the transmitting antenna array includes N×N transmitting antennas, and the phase shifter array includes 2N thermo-optical phase shifters, wherein the first phase shifter array and the second phase shifter array contain the same number of thermo-optical phase shifters, N=2. M-1 .

[0011] In one embodiment of the present invention, the second optical waveguide includes a first sub-section, a second sub-section, and a third sub-section connected in sequence, and the third sub-section is connected to the input terminal of the second phase shifter array;

[0012] Wherein, the first optical waveguide extends along a first direction, the first sub-part and the third sub-part both extend along a first direction, the second sub-part extends along a second direction, and the first direction is perpendicular to the second direction.

[0013] In one embodiment of the present invention, the fourth optical waveguide includes a fourth sub-section and a fifth sub-section connected in sequence, and the fourth sub-section is connected to the output terminal of the second phase shifter array;

[0014] The third optical waveguide extends along a first direction, the fourth sub-section extends along a first direction, and the fifth sub-section extends along a second direction, wherein the first direction is perpendicular to the second direction.

[0015] In one embodiment of the present invention, the first chessboard area includes N×N chessboard squares, the dual-ring cascaded resonant cavity array includes N dual-ring cascaded resonant cavities, the N dual-ring cascaded resonant cavities are respectively located in the N chessboard squares on the diagonal of the first chessboard area, and each dual-ring cascaded resonant cavity includes two micro-ring modulators.

[0016] In one embodiment of the present invention, the second chessboard area includes N×N chessboard squares, and each chessboard square includes a transmitting antenna.

[0017] In one embodiment of the present invention, the materials used to fabricate the chip include silicon-based SOI, thin-film lithium niobate, or III-V compounds.

[0018] In one embodiment of the present invention, the polarization multiplexing unit includes a Mach-Zehnder interferometer, a polarization rotator, and a reverse polarization rotator connected in sequence.

[0019] Secondly, the present invention also provides a wavefront encoding device, including the above-mentioned continuously adjustable low-power complex amplitude optical waveguide chip.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] This invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip, which forms a first checkerboard region and a second checkerboard region through a bidirectional cross-shaped optical waveguide configuration, effectively reducing the number of phase shifters used for phase modulation from N 2 The power consumption of the optical waveguide phased array is reduced to 3N (including N cascaded dual-ring resonant cavities and 2N thermo-optical phase shifters), significantly reducing the modulation power consumption. Simultaneously, the chip incorporates a micro-ring modulator structure, effectively achieving stepless modulation of the output beam intensity of the optical waveguide phased array. When applied to a wavefront encoder, this chip effectively enhances the wavefront coding capability of the optical waveguide phased array, thereby enabling complex amplitude modulation of the output beam.

[0022] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the stepless adjustable low-power complex amplitude optical waveguide chip provided in an embodiment of the present invention;

[0024] Figure 2 This is a partial schematic diagram of the first chessboard area provided in an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of micro-ring modulation provided in an embodiment of the present invention;

[0026] Figure 4 This is a partial schematic diagram of the second chessboard area provided in an embodiment of the present invention;

[0027] Figure 5a This is a schematic diagram of intensity modulation provided in an embodiment of the present invention;

[0028] Figure 5b This is a schematic diagram of intensity modulation and phase modulation provided in an embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram of the wavefront coding device provided in an embodiment of the present invention. Detailed Implementation

[0030] The present invention will be further described in detail below with reference to specific embodiments, but the implementation of the present invention is not limited thereto.

[0031] Figure 1This is a schematic diagram of the structure of the steplessly adjustable low-power complex amplitude optical waveguide chip provided in an embodiment of the present invention. Figure 1 As shown, this embodiment of the invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip, including: an input terminal 10, a polarization multiplexing unit 20, a 1×2 power divider array 30, a phase shifter array 40, a transmitting antenna array 50, and a dual-ring cascaded resonant cavity array 60. The 1×2 power divider array 30 is connected to the phase shifter array 40 through an optical waveguide 70.

[0032] The 1×2 power divider array 30 includes cascaded M-stage 1×2 multimode interference couplers. The M-stage 1×2 multimode interference coupler includes a first multimode interference coupler 301 and a second multimode interference coupler 302. The phase shifter array 40 includes a first phase shifter array 401 and a second phase shifter array 402. The first multimode interference coupler 301 is connected to the input end of the first phase shifter array 401 through a first optical waveguide 701, and the second multimode interference coupler 302 is connected to the input end of the second phase shifter array 402 through a second optical waveguide 702. The first optical waveguide 701 and the second optical waveguide 702 intersect to form a first checkerboard region A1. The first checkerboard region A1 includes a double-ring cascaded resonant cavity array 60.

[0033] The output terminals of the first phase shifter array 401 and the second phase shifter array 402 are respectively connected to the third optical waveguide 703 and the fourth optical waveguide 704. The third optical waveguide 703 and the fourth optical waveguide 704 intersect to form a second chessboard area A2, which includes a transmitting antenna array 50.

[0034] In this embodiment, the steplessly adjustable low-power complex amplitude optical waveguide 70 chip includes an input terminal 10, a polarization multiplexing unit 20, a 1×2 power divider array 30, a phase shifter array 40, and a transmitting antenna array 50. The polarization multiplexing unit 20 includes a Mach-Zehnder interferometer, a polarization rotator, and a reverse polarization rotator connected in sequence. The polarization multiplexing unit 20 can guide light of different polarization states into subsequent waveguide devices. The 1×2 power divider array 30 includes cascaded M-stage 1×2 multimode interference couplers for splitting a single beam into multiple beams.

[0035] Taking a 1×2 power divider array 30, which includes 5 cascaded 1×2 multimode interferometric couplers, as an example, please refer to [link to relevant documentation]. Figure 1The fifth-stage 1×2 multimode interference coupler includes a first multimode interference coupler 301 and a second multimode interference coupler 302. The phase shifter array 40 includes a first phase shifter array 401 and a second phase shifter array 402. The first multimode interference coupler 301 is connected to the input of the first phase shifter array 401 via a first optical waveguide 701, and the second multimode interference coupler 302 is connected to the input of the second phase shifter array 402 via a second optical waveguide 702. The first optical waveguide 701 and the second optical waveguide 702 extend in different directions, thus intersecting to form a first checkerboard area A1, i.e. Figure 1 From a visual perspective, the chessboard structure on the left side of the phase shifter array 40 has a double-ring cascaded resonant cavity array 60 set in the first chessboard area A1.

[0036] Of course, in some other embodiments of the present invention, the 1×2 power divider array 30 may also be composed of cascaded 3-stage, 4-stage, 6-stage, 7-stage or 8-stage 1×2 multimode interference couplers, and the present invention does not limit this.

[0037] The output terminals of the first phase shifter array 401 and the second phase shifter array 402 are respectively connected to the third optical waveguide 703 and the fourth optical waveguide 704. Similarly, the extension directions of the third optical waveguide 703 and the fourth optical waveguide 704 are also different. Figure 1 From a viewing angle, a second checkerboard area A2 is formed on the right side of the phase shifter array 40, and a transmitting antenna array 50 is disposed within the second checkerboard area A2. In this embodiment, the phase shifter array 40 is used to adjust the phase of the output light field.

[0038] In this embodiment, the number of first multimode interference couplers 301 is equal to the number of second multimode interference couplers 302. Further, the transmitting antenna array 50 includes N×N transmitting antennas, and the phase shifter array 40 includes 2N thermo-optical phase shifters, wherein the number of thermo-optical phase shifters included in the first phase shifter array 401 and the second phase shifter array 402 is equal, N=2. M-1 .

[0039] For example, such as Figure 1 As shown, for a 16×16 transmitting antenna array, the 1×2 power divider array 30 includes 5 cascaded 1×2 multimode interference couplers, with 16 of each of the first multimode interference couplers 301 and the second multimode interference couplers 302. Correspondingly, the phase shifter array 40 includes 32 thermo-optical phase shifters, with 16 of each of the first phase shifter array 401 and the second phase shifter array 402.

[0040] Optionally, the second optical waveguide 702 includes a first sub-section, a second sub-section, and a third sub-section connected in sequence, and the third sub-section is connected to the input terminal of the second phase shifter array 402;

[0041] The first optical waveguide 701 extends along the first direction X, the first sub-part and the third sub-part both extend along the first direction X, and the second sub-part extends along the second direction Y. The first direction X and the second direction Y are perpendicular.

[0042] Please continue reading Figure 1 The plurality of first optical waveguides 701 connected to the first multimode interference coupler 301 extend along the first direction X and are arranged along the second direction Y. The plurality of second optical waveguides 702 connected to the second multimode interference coupler 302 are in an "S" shape. Specifically, the second optical waveguide 702 includes a first sub-section, a second sub-section and a third sub-section connected in sequence. The first sub-section and the third sub-section both extend along the first direction X, the second sub-section extends along the second direction Y, and finally the third sub-section is connected to the input end of the second phase shifter array 402.

[0043] Figure 2 This is a partial schematic diagram of the first chessboard area provided in an embodiment of the present invention. Figure 2 As shown, the first chessboard area A1 includes N×N chessboard squares, and the dual-ring cascaded resonant cavity array 60 includes N dual-ring cascaded resonant cavities 601. The N dual-ring cascaded resonant cavities 601 are located in the N chessboard squares on the diagonal of the first chessboard area, and each dual-ring cascaded resonant cavity includes two micro-ring modulators.

[0044] In this embodiment, the first direction X is perpendicular to the second direction Y. Therefore, in each grid cell on the diagonal of the first grid area A1, each double-ring cascaded resonant cavity encloses two micro-ring modulators to modulate the output light field intensity of the transmitting antenna. This specific structure along the diagonal allows for stepless adjustment of the output light field intensity of the entire antenna array. Specifically, in the first direction X, the input light field, after being modulated by the micro-ring modulator, combines with the light field in the second direction Y to form a new light field that propagates along the second direction Y. Conversely, in the second direction Y, the input light field, after being modulated by the micro-ring modulator, combines with the light field in the first direction X to form a new light field that propagates along the first direction X.

[0045] Figure 3 This is a schematic diagram of micro-ring modulation provided in an embodiment of the present invention. Please refer to... Figure 2 and Figure 3 Taking the first direction X as an example, the relationship between the input and output optical fields of the double-ring cascaded resonant cavity can be derived using the transfer matrix method as follows:

[0046]

[0047]

[0048]

[0049] In the formula, This represents the input optical field of the optical waveguide in the first direction X. This represents the output optical field of the optical waveguide in the first direction X after modulation by a double-ring cascaded resonant cavity. This represents the input optical field of the optical waveguide in the second direction Y (this part of the light is not included in the calculation during the modulation process). This represents the output optical field of the optical waveguide in the second direction Y after modulation by the double-ring cascaded resonant cavity, where K and K0 represent the coupling coefficients of the micro-ring modulator and the optical waveguide, respectively.

[0050] The same principle applies to the second direction Y, so it will not be repeated here.

[0051] Therefore, when using a dual-ring cascaded resonant cavity for phase modulation, flexible control is possible. and The two components change the intensity of the transmitted light field in the corresponding row and column, thereby changing the complex amplitude of the light field emitted by the transmitting antenna array 50, and thus modulating the intensity of the output light field of the chip.

[0052] The above analysis shows that introducing a micro-ring modulator at the diagonal position of the first chessboard region A1 can change the phase of adjacent waveguides, thereby changing the intensity of the output light field of the transmitting antenna. In this method, only N phase shifters for intensity modulation are needed to achieve N... 2 The light intensity of the path is modulated. Furthermore, to achieve independent phase control, this embodiment also introduces 2N thermo-optical phase shifters, each controlling the phase of one row / column. Through the coordinated combination of the micro-ring modulator array and the phase shifter array 40, the above chip can modulate N... 2 The complex amplitude of the output light field of each antenna.

[0053] Please continue reading Figure 1 The fourth optical waveguide 704 includes a fourth sub-section and a fifth sub-section connected in sequence, and the fourth sub-section is connected to the output end of the second phase shifter array 402;

[0054] The third optical waveguide 703 extends along the first direction X, the fourth sub-section extends along the first direction X, and the fifth sub-section extends along the second direction Y. The first direction X and the second direction Y are perpendicular.

[0055] Optionally, the second chessboard area A2 includes N×N chessboard squares, each of which includes a transmitting antenna.

[0056] Specifically, the third optical waveguide 703 extending along the first direction X intersects with the fifth sub-section extending along the second direction Y to form a checkerboard pattern, and is coupled to the transmitting antenna through a directional coupler, thereby enabling the transmitting antenna to transmit the light in the chip into space.

[0057] Figure 4This is a partial schematic diagram of the second chessboard area provided in an embodiment of the present invention. Figure 5a This is a schematic diagram of intensity modulation provided in an embodiment of the present invention. Figure 5b This is a schematic diagram of intensity modulation and phase modulation provided in an embodiment of the present invention. Further, in conjunction with... Figure 4 , Figure 5a and Figure 5b This invention explains the working principle of the checkerboard-style optical waveguide 70 arrangement. Ignoring the influence of the phase shifter array 40 on the phase modulation of the optical field in the optical waveguide 70, the intersection of the n-row third waveguide and the n-column fourth waveguide forms a second checkerboard region A2. Each checkerboard grid in the second checkerboard region A2 is equipped with a transmitting antenna. The optical energy of the formed transmitting antenna array 50 is input through the fifth sub-sections of its corresponding third optical waveguide 703 and fourth optical waveguide 704 via a directional coupler. Assume the optical field expression entering the m-th row is... The expression for the light field entering the k-th column is: Among them, a m b k Let ζ represent the light field amplitudes in the m-th row and k-th column, respectively. m η k These represent the optical field phases in the m-th row and k-th column, respectively. The transmitting antenna is placed in a checkerboard pattern formed by the intersection of the third optical waveguide 703 and the fourth optical waveguide 704, and is combined with a directional coupler and a Y-type waveguide, and then transmitted into space through a grating antenna.

[0058] Assuming that, based on structural optimization, the light field entering the transmitting antenna is not modulated by amplitude and phase modulators, the phase factor difference between the input light fields of the antenna in row m, column k and the antenna in row m, column k+1 can be expressed as:

[0059]

[0060] The above equation shows that by changing the light field intensity and phase in the two types of waveguides (row and column), the phase of the output light field of adjacent antennas in these two directions can be changed.

[0061] Furthermore, when using an amplitude modulator to change the phase in the waveguide, the inherent phase may exist when the amplitude of the optical field in the waveguide changes due to the modulation mechanism of the device itself. Therefore, this embodiment adds a corresponding phase modulator to the chip to independently change the phase of the output optical field. Through the coordination between the amplitude modulator and the phase modulator, the phase of the output optical field of the transmitting antenna can be changed more flexibly. After adding the phase modulator, the output optical field distribution of the transmitting antenna can be expressed as: The phase factor difference between the input optical fields of the antenna in the m-th row, k-th column and the antenna in the m-th row, k+1-th column can be expressed as:

[0062]

[0063] In the formula, a m b k ζ m and ζ k+1 All are fixed values. These represent the phase factors added by phase modulation. By comparing formulas (4) and (5), it can be seen that in the actual control process, two types of modulators need to cooperate to achieve stepless adjustment of the amplitude and phase of the antenna output light field.

[0064] Optionally, the materials used to fabricate the aforementioned chips include silicon-based SOI, thin-film lithium niobate, III-V compounds, or any material that can be processed using planar optical waveguide technology.

[0065] Figure 6 This is a schematic diagram of the wavefront coding device provided in an embodiment of the present invention. Figure 6 As shown, this embodiment of the invention also provides a wavefront encoding device, including the above-mentioned continuously adjustable low-power complex amplitude optical waveguide chip.

[0066] As can be seen from the above embodiments, the beneficial effects of the present invention are as follows:

[0067] This invention provides a steplessly adjustable low-power complex amplitude optical waveguide chip, which forms a first checkerboard region and a second checkerboard region through a bidirectional cross-shaped optical waveguide configuration, effectively reducing the number of phase shifters used for phase modulation from N 2 The power consumption of the optical waveguide phased array is reduced to 3N (including N cascaded dual-ring resonant cavities and 2N thermo-optical phase shifters), significantly reducing the modulation power consumption. Simultaneously, the chip incorporates a micro-ring modulator structure, effectively achieving stepless modulation of the output beam intensity of the optical waveguide phased array. When applied to a wavefront encoder, this chip effectively enhances the wavefront coding capability of the optical waveguide phased array, thereby enabling complex amplitude modulation of the output beam.

[0068] In the description of this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0069] The use of terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples" indicates that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0070] Although this application has been described herein in conjunction with various embodiments, other variations of the disclosed embodiments can be understood and implemented by those skilled in the art in carrying out the claimed application by reviewing the accompanying drawings, the disclosure, and the appended claims.

[0071] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A steplessly adjustable low-power complex amplitude optical waveguide chip, characterized in that, include: The system includes an input terminal, a polarization multiplexing unit, a 1×2 power divider array, a phase shifter array, a transmitting antenna array, and a dual-ring cascaded resonant cavity array, wherein the 1×2 power divider array is connected to the phase shifter array via an optical waveguide. The 1×2 power divider array includes cascaded M-stage 1×2 multimode interference couplers. The M-stage 1×2 multimode interference coupler includes a first multimode interference coupler and a second multimode interference coupler. The phase shifter array includes a first phase shifter array and a second phase shifter array. The first multimode interference coupler is connected to the input end of the first phase shifter array through a first optical waveguide, and the second multimode interference coupler is connected to the input end of the second phase shifter array through a second optical waveguide. The first optical waveguide and the second optical waveguide intersect to form a first checkerboard region. The first checkerboard region includes a double-ring cascaded resonant cavity array. The output terminals of the first phase shifter array and the second phase shifter array are respectively connected to the third optical waveguide and the fourth optical waveguide, wherein the third optical waveguide and the fourth optical waveguide intersect to form a second chessboard area, and the second chessboard area includes the transmitting antenna array.

2. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 1, characterized in that, The number of the first multimode interference couplers is equal to the number of the second multimode interference couplers.

3. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 2, characterized in that, The transmitting antenna array includes N×N transmitting antennas, and the phase shifter array includes 2N thermo-optical phase shifters, wherein the first phase shifter array and the second phase shifter array contain the same number of thermo-optical phase shifters, N=2. M-1 .

4. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 3, characterized in that, The second optical waveguide includes a first sub-section, a second sub-section, and a third sub-section connected in sequence, and the third sub-section is connected to the input terminal of the second phase shifter array; Wherein, the first optical waveguide extends along a first direction, the first sub-part and the third sub-part both extend along a first direction, the second sub-part extends along a second direction, and the first direction is perpendicular to the second direction.

5. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 3, characterized in that, The fourth optical waveguide includes a fourth sub-section and a fifth sub-section connected in sequence, and the fourth sub-section is connected to the output end of the second phase shifter array; The third optical waveguide extends along a first direction, the fourth sub-section extends along a first direction, and the fifth sub-section extends along a second direction, wherein the first direction is perpendicular to the second direction.

6. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 5, characterized in that, The first chessboard area includes N×N chessboard squares, and the dual-ring cascaded resonant cavity array includes N dual-ring cascaded resonant cavities. The N dual-ring cascaded resonant cavities are respectively located in the N chessboard squares on the diagonal of the first chessboard area, and each dual-ring cascaded resonant cavity includes two micro-ring modulators.

7. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 6, characterized in that, The second chessboard area comprises N×N chessboard squares, and each chessboard square includes a transmitting antenna.

8. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 1, characterized in that, The materials used to fabricate the chip include silicon-based SOI, thin-film lithium niobate, or III-V compounds.

9. The steplessly adjustable low-power complex amplitude optical waveguide chip according to claim 1, characterized in that, The polarization multiplexing unit includes a Mach-Zehnder interferometer, a polarization rotator, and a reverse polarization rotator connected in sequence.

10. A wavefront encoding device, characterized in that, Including the stepless adjustable low-power complex amplitude optical waveguide chip as described in any one of claims 1 to 9.