High-frequency reciprocating precision displacement device and its guiding method

Abstract

A high-frequency reciprocating precision displacement device and a guiding method thereof, the high-frequency reciprocating precision displacement device comprising a driving mechanism and a guiding mechanism, the driving mechanism comprising an output end reciprocating along a first straight line; the guiding mechanism comprising a base and a guiding piece connected with the base, the guiding piece being connected with the output end and being capable of causing at least part of the guiding piece to deform and recover along the first straight line relative to the base under the action of the output end to guide the output end. The high-frequency reciprocating movement of the load is realized by driving the load with the output end, and the output end also drives the guiding piece to move, so that the guiding piece deforms and recovers along the first straight line under stress, and the deformation and recovery along the first straight line act on the output end and the load, so that the load does not deviate during movement, thereby realizing the guiding function of the output end and the load and realizing higher control precision in high-frequency reciprocating movement.

Description

Technical Field

[0001] This invention relates to the field of high-frequency precision drive technology, and in particular to a high-frequency reciprocating precision displacement device and its guiding direction. Background Technology

[0002] In fields such as micromechanics, semiconductor lithography, precision measurement, ultra-precision machining, micro-assembly, biological cell manipulation, and nanotechnology, high-performance ultra-precision positioning stages are required as technical support. The positioning accuracy of ultra-precision positioning stages often reaches the sub-micron level, thus requiring drive components with corresponding precision. The design and manufacturing costs of these drive components limit the use of ultra-precision positioning stages.

[0003] High-frequency and high-precision reciprocating motion is required in ultra-precision machining operations. Reciprocating motion is a common type of mechanical transmission, and traditional drive components struggle to achieve high-frequency (greater than 50Hz) reciprocating motion with real-time controllable stroke distance. Common combinations of lead screws and motors, such as linear motors, can achieve real-time controllable reciprocating distance, but increasing the reciprocating frequency is limited by factors such as motor speed, transmission ratio, and stroke length, making it difficult to achieve stable output of the reciprocating frequency. High-frequency reciprocating precision position control typically uses high-frequency motor drives, often requiring high-acceleration motion control, demanding large motor thrust and high energy consumption. The high energy consumption under high acceleration and deceleration with high-frequency motor drives can lead to wear on the guide rails due to frequent movement; therefore, appropriate guiding mechanisms are required when the drive motor is operating.

[0004] In short-stroke, high-frequency, and high-precision reciprocating motion, traditional guiding methods involve connecting the guide rail or bushing to the load. The friction generated by these methods leads to wear between workpieces and reduced lifespan after prolonged operation. Therefore, for high-frequency motion (frequency > 100 Hz / s), determining the appropriate guiding method and mechanism for the drive motor to prevent workpiece wear and reduced lifespan is a pressing issue. Furthermore, the design and arrangement of the drive motor's guiding mechanism present significant challenges. Summary of the Invention

[0005] Therefore, it is necessary to provide a high-frequency reciprocating precision displacement device and its guiding method to address the above problems.

[0006] A first aspect of the present invention provides a high-frequency reciprocating precision displacement device, comprising: a driving mechanism and a guiding mechanism. The driving mechanism includes an output end that reciprocates along a first straight line. The guiding mechanism includes a base and a guide member connected to the base. The guide member is connected to the output end. Under the action of the output end, at least a portion of the guide member can deform relative to the base along the first straight line and recover the deformation along the first straight line to guide the output end.

[0007] In one embodiment, the base includes a connecting surface, and a guide extends from the connecting surface along a second straight line toward the output end. The second straight line is perpendicular to the connecting surface, and the first straight line is parallel to the connecting surface. The guide is symmetrically arranged about the plane containing the first and second straight lines.

[0008] In one embodiment, the guide includes a first guide portion connected to a base, a connecting portion connected to the first guide portion, and a second guide portion connected to the connecting portion. The second guide portion is connected to an output end. The output end is used to drive the first guide portion and the second guide portion to reciprocate relative to the base along a first straight line. The first guide portion and the second guide portion are deformed along the first straight line by the force exerted by the output end along the first straight line and then recover the deformation along the first straight line, thereby guiding the reciprocating motion of the output end.

[0009] In one embodiment, the first guide portion and the second guide portion have the same dimensions along the length direction, which is perpendicular to the reciprocating motion direction of the output end.

[0010] In one embodiment, the first guide portion and the second guide portion have a first thickness, and the connecting portion has a second thickness, which is different from the first thickness.

[0011] In one embodiment, the first thickness is less than 0.5 mm, and the second thickness is more than 5 times the first thickness.

[0012] In one embodiment, two guide members are provided at intervals along a first straight line. Both guide members are connected to the base, and a support member is provided between the two guide members to support them. The support member is connected to the output end.

[0013] In one embodiment, the connection between the guide and the base is arc-shaped, and the connection between the guide and the support is arc-shaped.

[0014] In one embodiment, a limiting member is provided between the two guide members to limit the reciprocating motion stroke of the output end. The limiting member includes a base connected to the base, a limiting groove disposed on the end face of the base, and a limiting block connected to the output end. The limiting block reciprocates within the limiting groove to limit the reciprocating motion stroke of the output end.

[0015] In one embodiment, the high-frequency reciprocating precision displacement device further includes a through hole that passes through the guide and the base along a first straight line.

[0016] In one embodiment, the high-frequency reciprocating precision displacement device further includes a grating for feedback of the motion stroke at the output end and a read head for sensing the parameters of the grating.

[0017] A second aspect of the present invention also provides a guiding method for a high-frequency reciprocating precision displacement device: the method includes the following steps:

[0018] The guide component is driven to reciprocate along the first straight line by controlling the output end;

[0019] The guide member is subjected to a force along the first straight line from the output end. At least a portion of the guide member deforms along the first straight line and then recovers the deformation along the first straight line to guide the output end.

[0020] In the high-frequency reciprocating precision displacement device of the present invention, the high-frequency reciprocating motion of the load is achieved by driving the load through the output end. Simultaneously, the output end also drives the guide member to move, causing the guide member to deform along a first straight line and recover its deformation under force. This deformation and recovery deformation along the first straight line act on the output end and the load, preventing the load from shifting during movement. This achieves the guiding function for the output end and the load, realizing high control precision in high-frequency reciprocating motion, especially for high-frequency reciprocating motion with a 5mm stroke, greatly improving the motion precision during high-frequency motion. Since there is no direct connection between the guide member and the load, there is no contact or friction between them, avoiding the influence of friction on the load during high-frequency reciprocating motion, thereby improving the motion precision and service life of the drive mechanism, guide mechanism, and load. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a high-frequency reciprocating precision displacement device in one embodiment of the present invention;

[0022] Figure 2 This is a bottom view of the guide mechanism in one embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the structure of the guide member in the guide mechanism according to an embodiment of the present invention;

[0024] Figure 4 for Figure 1 Enlarged view of the structure at point F;

[0025] Figure 5 This is a schematic diagram of the symmetrical structure of the guide member and the through hole in a guide mechanism according to an embodiment of the present invention.

[0026] The components include a drive mechanism 10, a drive mechanism body 11, an output end 12, a guide mechanism 20, a base 21, a first mounting position 211, a second mounting position 212, a guide member 22, a first guide part 221, a semi-circular arc 2211, a streamlined arc 2212, a connecting part 222, a second guide part 223, a support member 23, a limiting member 24, a base 241, a limiting groove 242, a limiting block 243, a through hole 25, a grating 26, and a reading head 27. Detailed Implementation

[0027] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of the present invention. However, the present invention can be practiced in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0030] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0032] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0033] refer to Figure 1 As shown, the high-frequency reciprocating precision displacement device includes a drive mechanism 10 and a guide mechanism 20. The drive mechanism 10 includes a guide mechanism along a first straight line (such as...). Figure 1 The output end 12 (shown as Z-axis) reciprocating motion outputs driving force; the guide mechanism 20 includes a base 21 and a guide member 22, the guide member 22 being connected to the base 21, the base 21 supporting the guide member 22, and the guide member 22 guiding the output end 12 and the load. The driving force of the output end 12 acts on the guide member 22 and the load: the output end 12 drives the load to achieve rapid, high-frequency up-and-down reciprocating motion (e.g., ...). Figure 1 The Z-axis of the output terminal 12 is used to drive the load in reciprocating motion. Simultaneously, it drives the guide member 22. The guide member 22 deforms along the first straight line under the force of the output terminal 12 and then recovers its deformation along the first straight line. The deformation and recovery processes ensure that the output terminal 12 and the load do not deviate in other directions, thus achieving the function of guiding the load to reciprocate along the first straight line. In this embodiment, the guide mechanism 20 is used in high-precision, small-stroke, micro-deformation mechanisms, such as high-frequency reciprocating flexible servo platforms handling displacements of 5mm (±2.5mm).

[0034] The guiding mechanism 20 is specifically a flexible guiding mechanism. Under the action of driving force, the flexible guiding mechanism 20 realizes the transmission of force and energy through its own flexible elastic deformation and obtains partial or complete motion. When the flexible mechanism moves, some energy can be stored in the flexible mechanism in the form of strain energy. When resetting, the strain energy is released to realize dynamic application, which is the guiding function in this invention.

[0035] In some embodiments, the guide mechanism 20 can also be applied to high-precision environments such as ultra-precision positioning worktables, ultra-precision machining, printheads, optical autofocus, piezoelectric motors, air bearings, and micro grippers.

[0036] The guiding mechanism also includes a support member 23, which supports the guide member 22, mounts the output end 12, and the load. The output end 12 is connected to the guide member 22 via the support member 23, and is also connected to the load via the support member 23. The output end 12 drives the load to reciprocate through the support member 23. Simultaneously, the output end 12 causes the guide member 22 to deform under the force of the movement through the support member 23, thus guiding the output end 12 and the load. The load is mounted on the support member 23, and there is no contact between the load and the guide member 22, thereby effectively avoiding the problem of wear caused by friction during the movement of the load.

[0037] When the output terminal 12 drives the load and guide member 22 to reciprocate up and down via the support member 23, the guide member 22 deforms under force. The direction of deformation is consistent with the direction of up and down movement. That is, when the output terminal 12 drives the support member 23 to move upward, the guide member 22 deforms upward; when the output terminal 12 drives the support member 23 to move downward, the guide member 22 deforms downward. This deformation guides the load to move upward or downward. After the guide member 22 deforms upward, it will return to its downward deformation; after the guide member 22 deforms downward, it will return to its upward deformation. This deformation recovery process also guides the movement of the output terminal 12 and the load.

[0038] Combination Figure 2 , Figure 3 As shown, the base 21 is provided with a first mounting position 211 and a second mounting position 212. The first mounting position 211 is used to mount the drive mechanism body 11, and the second mounting position 212 is a product mounting position for mounting the entire guide mechanism 20 onto the required work platform. The base includes a connecting surface (not shown), and the guide member 22 extends from the connecting surface along a second straight line (e.g., ...). Figure 3 The X-axis (as shown) extends towards the output end 12. The second straight line is perpendicular to the connecting surface, and the first straight line is parallel to the connecting surface. The guide members are symmetrically arranged about the plane containing the first and second straight lines. The X-axis and Z-axis are on the same plane and perpendicular to each other. The guide mechanism 20 can be installed through the second mounting position 212 with the X-axis facing left or right, greatly improving the versatility of the guide mechanism 20.

[0039] In some embodiments, the drive mechanism 10 employs a voice coil motor capable of reciprocating up and down motion. The voice coil motor includes a drive mechanism body 11, a stator, and a mover. The drive mechanism body 11 is mounted on the first mounting position 211 of the base 21. The mover is the output end 12 of the drive mechanism 10 and is mounted on a support member 23. The support member 23 has an input and an output. The input is located at the end of the support member 23 facing the drive mechanism 10, and the output is located at the end of the support member 23 away from the drive mechanism 10. The input is located below the output and is used to mount the output end 12 (motor) of the drive mechanism 10 to transmit driving force. Specifically, the input consists of two shaft holes on the support member 23. The output is used to mount a load, and the output end 12 drives the load to perform high-frequency reciprocating up and down motion via the support member 23.

[0040] In some embodiments, the drive mechanism 10 only needs to be able to drive the load to achieve high-frequency reciprocating motion with a short stroke, such as hydraulic drive.

[0041] The guide member 22 includes a first guide portion 221 connected to the base 21, a connecting portion 222 connected to the first guide portion 221, and a second guide portion 223 connected to the connecting portion 222. The output end 12 is connected to the second guide portion 223 via a support member 23. The output end 12 drives the support member 23, causing the first guide portion 221 and the second guide portion 223 to move under force. The first guide portion 221 and the second guide portion 223 are used to generate deformation to flexibly guide the output end 12 and the load. The first guide portion 221 and the second guide portion 223 replace the guiding method of conventional guide rails, using their own deformation to achieve the guiding function. They have zero contact with the load and excellent zero-friction performance, avoiding static, rolling, or sliding friction, thereby avoiding the problem of frictional heat and wear of parts, which reduces the life of the parts. The connecting portion 222 adopts a reinforced structure to connect the first guide portion 221 and the second guide portion 223, thereby ensuring the rigidity of the first guide portion 221 and the second guide portion 223 on the second straight line.

[0042] The end of the first guide part 221 connected to the base 21 is the fixed end of the guide member 22, and the end of the support member 23 connected to the guide member 22 is the movable end of the guide member 22. When the output end 12 reciprocates, it drives the support member 23, the first guide part 221 and the second guide part 223 to reciprocate up and down with the output end 12. The fixed end is not affected by the movement of the output end 12.

[0043] In some embodiments, the first guide portion 221 and the second guide portion 223 are flexible thin diaphragms, which are processed by slow wire EDM. The guide member 22 and the base 21 can be integrally machined, thereby improving the manufacturing accuracy of the entire guide mechanism 20.

[0044] The first guide portion 221 and the second guide portion 223 are along the length direction (e.g. Figure 3 The dimensions of the Y-axis shown are the same, and the length direction is perpendicular to the Z-axis. The same size is used to ensure the consistency of the deformation of the first guide part 221 and the deformation of the second guide part 223 under force, and to avoid the internal structure of the guide part 22 from breaking.

[0045] The first guide portion 221 and the second guide portion 223 have a first thickness, and the connecting portion 222 has a second thickness, which is different from the first thickness. The thickness settings of the first guide portion 221, the second guide portion 223, and the connecting portion 222 ensure the rigidity of the entire guide member 22 along the X-axis, resulting in a large difference in rigidity between the guide member along the X-axis and the Z-axis. This prevents deformation or displacement along the X-axis when the guide member is subjected to a force along the Z-axis. It also ensures the guiding stability of the flexible servo platform, exhibiting excellent properties of high rigidity, high load-bearing capacity, and wear resistance.

[0046] In some embodiments, preferably, the first thickness is less than 0.5 mm, and the second thickness is more than 5 times the first thickness.

[0047] There are two guide members 22, which are spaced apart along the Z-axis. This allows for a compact overall structure of the guide mechanism 20. By simultaneously guiding the movement of the load through the two guide members 22, displacement of the first guide part 221 and the second guide part 223 along the X-axis is avoided, and they are only subjected to force along the Z-axis. This enables the first guide part 221 and the second guide part 223 to guide the output end 12 and the load along the Z-axis, which is beneficial for improving the guiding accuracy of short-stroke high-frequency reciprocating motion, especially for high-frequency reciprocating motion with a stroke of 5mm.

[0048] A limiting member 24 is provided between the two guide members 22 to guide the reciprocating motion of the output end 12. The limiting member 24 includes a base 241 connected to the base 21, a limiting groove 242 disposed on the end face of the base 241, and a limiting block 243 disposed on the support member 23. The base 241 serves as a support and is a block / plate / plate-like object with a certain length, width, and height, the length, width, and height of which are not limited. The limiting groove 242 is suspended on the end face of the base 241, and has a first limiting end and a second limiting end spaced apart along the Z-axis at both ends. The limiting block 243 is specifically a protrusion. When the output end 12 drives the support member 23 to reciprocate up and down, the limiting block 243 reciprocates up and down synchronously with the support member 23. The movement path of the limiting block 243 is within the limiting groove 242 formed between the first limiting end and the second limiting end. Its upper limit of movement is the position of the second limiting end, and its lower limit of movement is the position of the first limiting end. The movement stroke of the output end 12 is limited by the first limiting end and the second limiting end, thereby limiting the reciprocating motion of the load.

[0049] A precision grating 26 is provided on one side of the support member 23. When the output end 12 drives the support member 23 to move, the precision grating 26 moves up and down synchronously with the output end 12. The precision grating 26 is used to feedback the motion displacement of the output end 12. The grating 26 is equipped with a sensing head 27. The sensing head 27 is set on an external device. The sensing head 27 is fixed and stationary relative to the grating. The sensing head 27 scans the grating 26 and senses the grating pitch of the grating 26, thereby providing feedback on the linear displacement of the output end 12 and the load.

[0050] In some embodiments, the read head 27 and the grating 26 may also be replaced by a displacement sensor, which only needs to be able to provide feedback on high-precision linear displacement.

[0051] refer to Figure 4As shown, the connection between the first guide portion 221 and the base 21 is arc-shaped. Specifically, both sides of the connection are set as semi-circular arcs 2211. The connection between the first guide portion 221 and the connecting portion 222 is arc-shaped. Specifically, both sides of the connection are set as streamlined arcs 2212. The connection between the second guide portion 223 and the connecting portion 222 is arc-shaped. Specifically, both sides of the connection are set as streamlined arcs. The connection between the second guide portion 223 and the support portion 224 is arc-shaped. Specifically, both sides of the connection are set as semi-circular arcs, the same structure as the connection at both ends of the first guide portion 221. When the first guide portion 221 and the second guide portion 223 deform under the driving force of the output end 12, the stress can be concentrated in the arc-shaped part, that is, the semi-circular and streamlined part, which plays a transition role, rather than the traditional right-angle connection. This is used to improve the fatigue resistance of the surface of the first guide portion 221 and the second guide portion 223 when deformed, thereby enhancing the overall structural strength of the guide member 22 under the guiding load.

[0052] refer to Figure 5 As shown, the middle part of the guide mechanism 20 is hollowed out, forming a through hole 25. The through hole 25 is symmetrical about the second straight line and passes through the base 21, the two guide members 22, and the limiting member 24 along the reciprocating motion direction. The first guide part 221 is symmetrically distributed on both sides of the through hole 25 along the second straight line, with a dimension A on the Y-axis on both sides. The dimension of the second guide part 223 is B, i.e., 2A = B. The through hole 25 is used to reduce the weight of the entire guide mechanism 20. Because the flexible guide mechanism 20 performs high-frequency, large-displacement motion, its acceleration during acceleration and deceleration is extremely high, reaching over 100G. Therefore, in order to overcome the influence of the extremely high acceleration and deceleration on the flexible guide mechanism 20, its middle part is hollowed out to reduce the overall weight.

[0053] An embodiment of the present invention also provides a guiding method for a high-frequency reciprocating precision displacement device, the method comprising the following steps:

[0054] S100, drive the guide member 22 to reciprocate along the first straight line by controlling the output terminal 12.

[0055] The guide member 22 includes a first guide portion 221, a connecting portion 222, and a second guide portion 223. The first guide portion 221 is fixedly connected to the base 21, and the second guide portion is connected to the support member 23. The support member 23 is provided with an input and an output. The input is connected to the output end 12 of the drive mechanism 10 to transmit power, and the output is connected to the load. The support member 23 is driven by the output end 12 to output displacement, thereby realizing the reciprocating motion of the load.

[0056] Specifically, S100 also includes:

[0057] S101. Install the drive mechanism body 11 onto the base 21, connect the output end 12 to the input of the support member 23, and install the base 21 onto the preset platform;

[0058] S102. Start the drive mechanism body 11, and drive the support member 23 to reciprocate through the control output end 12 to realize the high-frequency up and down reciprocating motion of the load. At the same time, the output end 12 drives the first guide part 221 and the second guide part 223 to reciprocate up and down through the support member 23.

[0059] S200, the output end 12 is subjected to a force along the first straight line through the guide member 22, the guide member 22 deforms along the first straight line and restores the deformation along the first straight line to guide the output end 12.

[0060] When the output end 12 moves upward, the first guide part 221 and the second guide part 223 deform upward due to the upward force. After deforming upward, they recover their deformation downward. At the same time, when the output end 12 moves downward, the first guide part 221 and the second guide part 223 deform downward. After deforming downward, they recover their deformation upward. By using the force on the guide member 22 to generate deformation corresponding to the reciprocating motion direction and to recover deformation corresponding to the reciprocating motion direction, the reciprocating motion of the load is guided, and the load is prevented from deviating in other directions.

[0061] In summary, the high-frequency reciprocating precision displacement device in one embodiment of the present invention drives the load to reciprocate through the output end 12. Simultaneously, the output end 12 also drives the guide member 22 to reciprocate. Under the action of the output end 12, the guide member 22 is subjected to a reciprocating force and undergoes flexible deformation in the same direction as the force to guide the load's movement. Subsequently, it recovers its deformation in the same direction as the force to guide the load's movement. The guide member 22 is a flexible guide. In positioning technologies such as nanotechnology or semiconductors, the guide member 22 of the present invention, through the thickness settings and symmetrical structure settings of the first guide portion 221, the second guide portion 223, and the connecting portion 222, achieves a 5mm high-precision reciprocating drive positioning task along the Z-axis.

[0062] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0063] The above embodiments merely illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A high-frequency reciprocating precision displacement device, characterized in that, include: The drive mechanism includes an output end that reciprocates along a first linear path; and A guiding mechanism includes a base and a guide member connected to the base. The guide member is connected to the output end. Under the action of the output end, at least a portion of the guide member deforms relative to the base along a first straight line and then recovers the deformation along the first straight line to guide the output end. Two guide members are arranged at intervals along the first straight line, and both guide members are connected to the base. The guide includes a first guide portion connected to the base, a connecting portion connected to the first guide portion, and a second guide portion connected to the connecting portion. The second guide portion is connected to the output end. The output end is used to drive the first guide portion and the second guide portion to reciprocate along a first straight line relative to the base. The first guide portion and the second guide portion are deformed along the first straight line by the force exerted by the output end along the first straight line and then recover the deformation along the first straight line, thereby guiding the reciprocating motion of the output end. The first guide portion and the second guide portion have a first thickness, and the connecting portion has a second thickness, which is different from the first thickness; the first thickness is less than 0.5 mm, and the second thickness is more than 5 times the first thickness.

2. The high-frequency reciprocating precision displacement device according to claim 1, characterized in that, The base includes a connecting surface, and the guide extends from the connecting surface along a second straight line toward the output end. The second straight line is perpendicular to the connecting surface, and the first straight line is parallel to the connecting surface. The guide is symmetrically arranged about the plane containing the first straight line and the second straight line.

3. The high-frequency reciprocating precision displacement device according to claim 1, characterized in that, The first guide portion and the second guide portion have the same dimensions along the length direction, which is perpendicular to the reciprocating motion direction of the output end.

4. The high-frequency reciprocating precision displacement device according to claim 1, characterized in that, A support member is provided between the two guide members to support the two guide members, and the support member is connected to the output end.

5. The high-frequency reciprocating precision displacement device according to claim 4, characterized in that, The connection between the guide member and the base is arc-shaped, and the connection between the guide member and the support member is arc-shaped.

6. The high-frequency reciprocating precision displacement device according to claim 4, characterized in that, A limiting member is provided between the two guide members, and the limiting member is used to limit the reciprocating motion stroke of the output end.

7. The high-frequency reciprocating precision displacement device according to claim 6, characterized in that, The limiting member includes a base connected to the base, a limiting groove disposed on the end face of the base, and a limiting block connected to the output end. The limiting block reciprocates inside the limiting groove to limit the reciprocating stroke of the output end.

8. The high-frequency reciprocating precision displacement device according to claim 7, characterized in that, The high-frequency reciprocating precision displacement device also includes a through hole that runs through the guide and the base along a first straight line.

9. The high-frequency reciprocating precision displacement device according to claim 1, characterized in that, The high-frequency reciprocating precision displacement device also includes a grating for feeding back the motion stroke of the output end and a read head for sensing the parameters of the grating.

10. A guiding method for a high-frequency reciprocating precision displacement device as described in any one of claims 1-9, characterized in that, The method includes: The guide component is driven to reciprocate along the first straight line by controlling the output end; The guide member is subjected to a force along the first straight line from the output end. The guide member deforms along the first straight line and then returns to its original shape to guide the output end.

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