A flexible hinge structure and a precision fine adjustment mechanism

Abstract

The application provides a flexible hinge structure and a precision fine adjustment mechanism. The precision fine adjustment mechanism comprises a mounting platform, a base and at least two flexible hinge structures connected between the mounting platform and the base. The flexible hinge structure comprises a support main body and two hinge groups symmetrically arranged at both ends of the support main body. The hinge group comprises a plurality of arc hinge units. One end of each arc hinge unit is sequentially and spacedly arranged along the width direction of the support main body and is integrally connected with the support main body, and the other end is gathered and connected. The thickness of the arc hinge unit gradually increases from the middle to both ends, and has two arc surfaces arranged in symmetry along the thickness direction, and the central angle of the arc surface is less than 30 degrees. In the application, the thickness variation range of the arc hinge unit is small, and stress concentration does not occur, so that the flexible hinge structure can adapt to a larger angle rotation range. And the arrangement of the plurality of arc hinge units makes the mechanism have high rigidity, and can realize higher precision and stability.

Description

Technical Field

[0001] This application belongs to the field of precision optical and mechanical technology, and more specifically, relates to a flexible hinge structure and a precision fine-tuning mechanism. Background Technology

[0002] Synchrotron radiation beamlines utilize KB focusing mirrors to achieve aberration-free ideal imaging in both horizontal and vertical directions, offering advantages such as high reflectivity and high compression ratio, making them widely used in synchrotron radiation micron or nanometer focusing beamlines. With increasingly stringent requirements for mirror surface accuracy and spatial orientation collimation precision, the development of nanometer or nanoradian precision fine-tuning mechanisms is imperative. With the development of free-electron lasers and diffraction-limited synchrotron radiation sources, the required beam spot size for experiments is mostly in the tens of nanometers to micrometers range. This necessitates extremely high adjustment precision for the KB focusing mirror system, i.e., motion precision at the nanometer or nanoradian level; furthermore, the KB mirror mechanism needs sufficient stability. Structural instability can lead to minute wobbles in the KB focusing mirror, causing a shift in the mirror's center position or the angle of the emitted light, resulting in unacceptable wobbling of the beam spot at the sample, affecting the quality of experimental data. Therefore, to achieve high stability in synchrotron light, the design of the precision fine-tuning mechanism must combine high precision and high rigidity.

[0003] Flexible hinge mechanisms utilize the elastic deformation of materials to transmit or convert motion. They offer advantages such as small size, high motion resolution, frictionless operation, and zero backlash, effectively avoiding motion nonlinearity and achieving highly stable, precise angular motion. Therefore, they can be used in the precision fine-tuning mechanisms of precision optical components such as KB focusing lenses. Current flexible hinge mechanisms offer high adjustment accuracy and can handle precise adjustments with relatively light loads. However, with the increasing demand for larger adjustment angle ranges in multilayer lenses and other applications, stress concentration easily occurs, the material's yield stress limit is easily reached, and the angular range is limited. Furthermore, as the load increases, the system stiffness becomes relatively low, significantly impacting structural stability. Consequently, they cannot meet the requirements of current precision optical components for heavy-load, highly stable, and highly precise adjustment mechanisms. Summary of the Invention

[0004] The purpose of this application is to provide a flexible hinge structure and a precision fine-tuning mechanism to solve the technical problems of poor stability and small adjustable angle range of the flexible hinge mechanism in the prior art.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows: a flexible hinge structure is provided, including a support body and two hinge groups, the two hinge groups being symmetrically arranged at both ends of the support body along its length direction; each hinge group includes at least one arc hinge unit, when the number of arc hinge units is multiple, one end of each arc hinge unit is sequentially spaced along the width direction of the support body and integrally connected to the support body, and the other ends of each arc hinge unit converge and connect; the thickness of each arc hinge unit gradually increases from the middle to both ends, and each arc hinge unit has two back-to-back symmetrically arranged arc surfaces along its thickness direction, the central angle of the arc surfaces being less than 30 degrees.

[0006] In one possible design, the radius of the arc surface ranges from 50mm to 150mm.

[0007] In one possible design, the hinge assembly includes 3 to 5 of the circular arc hinge units.

[0008] In one possible design, the included angle between two adjacent circular arc hinge units is between 0 and 30 degrees.

[0009] In one possible design, the flexible hinge structure includes two connecting parts, which are rotating bodies. The ends of the circular arc hinge units in the two hinge groups that are away from the support body are integrally connected to the outer walls of the two connecting parts, and the circular arc hinge units are distributed in a fan shape with the central axis of the connecting part as the center.

[0010] In one possible design, the surface of the support body used to integrally connect the various arc hinge units is an arc-shaped surface, and the central axis of the arc-shaped surface coincides with the central axis of the connecting part.

[0011] In one possible design, the flexible hinge structure is symmetrical along its length.

[0012] And / or, the flexible hinge structure is symmetrical along its width direction.

[0013] The beneficial effects of the flexible hinge structure provided in this application are as follows: The flexible hinge structure provided in this application, by setting the central angle of the arc surface to less than 30 degrees (i.e., the central angle of the arc hinge unit is much less than 180 degrees), corresponds to a segment of an arc within a large circle. When the arc lengths of the arc hinge units are consistent, the smaller the central angle of the arc hinge unit, the smaller the arc variation of that segment. Therefore, when the minimum thickness of the arc hinge unit is constant, the thickness variation of the pair of arc hinge units will be smaller, resulting in a more uniform stress distribution. When the flexible hinge structure rotates, stress concentration will not occur at the point of minimum thickness of the arc hinge unit, thus enabling the flexible hinge structure to adapt to a larger range of angle rotation. Furthermore, both hinge groups are integrally connected to the support body. The support body further increases the overall structural rigidity of the flexible hinge structure, improves support stability, and increases adjustment precision. Moreover, changing the dimensions of the support body can adapt to different angle adjustment requirements, demonstrating excellent adaptability.

[0014] On the other hand, this application also provides a precision fine-tuning mechanism, including a mounting platform, a base, a driving device, and at least two of the above-mentioned flexible hinge structures; the mounting platform and the base are opposite to each other and spaced apart, and each of the flexible hinge structures is respectively connected between the mounting platform and the base; the driving device is mounted on the base, and the output end of the driving device is connected to the mounting platform and is used to drive the mounting platform to rotate or translate.

[0015] In one possible design, the flexible hinge structure is separately connected to the mounting platform and separately connected to the base.

[0016] In one possible design, the two hinge groups of the flexible hinge structure are a first hinge group and a second hinge group. In the first hinge group, the ends of each arc hinge unit facing away from the support body converge at a first center point, and each arc hinge unit is connected to the mounting platform at the first center point. In the second hinge group, the ends of each arc hinge unit facing away from the support body converge at a second center point, and each arc hinge unit is connected to the base at the second center point.

[0017] In one possible design, the precision fine-tuning mechanism includes multiple sets of flexible hinge structures, each set of flexible hinge structures being spaced apart along a first direction; each set of flexible hinge structures includes two flexible hinge structures spaced apart along a second direction, the first direction and the second direction being perpendicular to each other;

[0018] The line connecting the first center point and the second center point in the flexible hinge structure is the center line of the flexible hinge structure. The two center lines of the two flexible hinge structures in each group intersect at the intersection point above the mounting platform. The line connecting the intersection points of each group of flexible hinge structures passes through the center of the part to be installed.

[0019] The beneficial effects of the precision fine-tuning mechanism provided in this application are as follows: the precision fine-tuning mechanism provided in this application embodiment, through the setting of the above-mentioned flexible hinge structure, makes the adjustable angle range of the precision fine-tuning mechanism larger, the support stability better, and the angle adjustment accuracy higher. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a three-dimensional schematic diagram of the flexible hinge structure provided in the embodiments of this application;

[0022] Figure 2 This is a front view of the flexible hinge structure provided in an embodiment of this application;

[0023] Figure 3 A three-dimensional schematic diagram of the precision fine-tuning mechanism provided in the embodiments of this application;

[0024] Figure 4 A front view of the precision fine-tuning mechanism provided in the embodiments of this application;

[0025] Figure 5 A schematic diagram showing the connection of the center lines of the precision fine-tuning mechanism provided in the embodiments of this application;

[0026] Figure 6 This is a schematic diagram of the structure of a precision fine-tuning mechanism in the prior art.

[0027] The following are the labeling elements in the figure:

[0028] 1. Flexible hinge structure; 11. Support body; 111. Arc surface; 12. Hinge group; 12a. First hinge group; 12b. Second hinge group; 121. Arc hinge unit; 1211. Arc surface; 13. Connecting part; 131. First center point; 132. Second center point; 14. Center line; 2. Mounting platform; 3. Base; 4. Drive device; 41. Push rod; 42. Motor; 5. First connecting piece; 6. Second connecting piece; X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0029] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0030] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0031] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0033] Please see Figures 1 to 3 The flexible hinge structure 1 provided in this application embodiment will now be described. This flexible hinge structure 1 connects the first structural member and the second structural member. When the first structural member rotates or translates, the rotation or translation of the first structural member is transmitted or converted through the elastic deformation of the flexible hinge structure 1. In this application, the first structural member is the mounting platform 2, and the second structural member is the base 3. It is understood that in other embodiments of this application, the first and second structural members can also be two arbitrary structures, such as two rods or two blocks, etc., and are not limited to a single structure here.

[0034] Please see Figure 1 and Figure 2The flexible hinge structure 1 includes a support body 11 and two hinge groups 12. The two hinge groups 12 are symmetrically arranged at both ends of the support body 11 along its length direction. The hinge group 12 includes at least one arc hinge unit 121. When there are multiple arc hinge units 121, one end of each arc hinge unit 121 is arranged sequentially at intervals along the width direction of the support body 11 and is integrally connected to the support body 11. The other ends of each arc hinge unit 121 converge and connect. The thickness of the arc hinge unit 121 gradually increases from the middle to both ends. The arc hinge unit 121 has two arc surfaces 1211 arranged symmetrically back to back along its thickness direction. The central angle range of the arc surfaces 1211 is less than 30 degrees.

[0035] The length direction of the supporting body 11 is... Figure 2 The vertical direction of the support body 11 is the width direction. Figure 2 The left-right direction in the middle, and the thickness direction of the supporting body 11 are respectively. Figure 2 The front and back directions in the middle.

[0036] For each hinge group 12, the number of arc hinge units 121 can be one or more. For example, the number of arc hinge units 121 can be one, two, three, four, five, six, seven, eight, nine, or ten, etc. One end of each arc hinge unit 121 is sequentially and integrally connected to the support body 11 at intervals. The other ends of each arc hinge unit 121 converge and connect. Taking the convergence point as the center point, the arc hinge units 121 have a fan-shaped distribution structure with the center point as the center. The thickness direction of the arc hinge unit 121 refers to the circumferential direction centered on the center point. This circumferential direction and the width direction of the support body 11 can be located in the same plane.

[0037] Furthermore, it should be noted that when the circular arc hinge unit 121 has two back-to-back symmetrically arranged circular arc surfaces 1211 along its thickness direction, then the circular arc hinge unit 121 is a double-sided circular arc hinge. The central angle of the circular arc surface 1211 is less than 30 degrees. For example, the central angle of the circular arc surface 1211 can be 5 degrees, 10 degrees, 15 degrees, 20 degrees, 25 degrees, or 30 degrees. That is, the central angle of the circular arc hinge unit 121 is much less than 180 degrees. Therefore, the circular arc surface 1211 of the circular arc hinge unit 121 corresponds to a segment of an arc within a large circle. When the arc lengths of the circular arc hinge units 121 are consistent, the smaller the central angle of the circular arc hinge unit 121, the smaller the arc variation of that segment of the circular arc hinge unit 121. Therefore, when the minimum thickness of the circular arc hinge unit 121 is constant, the thickness variation of that pair of circular arc hinge units 121 will be smaller, and the stress distribution of the circular arc hinge unit 121 will be more uniform. When the flexible hinge structure 1 rotates, stress concentration will not occur at the point of minimum thickness of the circular arc hinge unit 121. This makes the flexible hinge structure 1 more effective than existing straight circular hinges (such as...). Figure 6 In the case of the arc surface (with a central angle of 180 degrees), it can accommodate a wider range of angular rotation. In addition, both hinge groups 12 are integrally connected to the support body 11. The support body 11 further increases the overall structural rigidity of the flexible hinge structure 1, and by changing the size of the support body 11, it can adapt to different angle adjustment requirements, making it highly adaptable.

[0038] In one embodiment, the radius of the arc surface 1211 ranges from 50mm to 150mm. Specifically, the radius of the arc surface 1211 can be 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm, or 150mm, etc. For a circle, when the central angle is determined, the larger the arc radius, the larger the arc length of the arc surface 1211. When two arc surfaces 1211 are arranged back-to-back, when the minimum distance between the two arc surfaces 1211 is determined, the larger the length and arc curvature of the arc surface 1211, the smaller the maximum distance between the two arc surfaces 1211, thus reducing the thickness variation of the arc hinge unit 121 and minimizing stress concentration.

[0039] In one specific embodiment, the arc hinge unit 121 has an arc radius of 100 mm, a central angle of 8.6 degrees, an arc length of 10 mm, and a minimum thickness of 0.3 mm. Furthermore, the arc hinge unit 121 is made of 55SiMnVB spring steel, with a yield strength greater than 1225 MPa, good elastic properties, and low stress concentration.

[0040] In a preferred embodiment, the hinge assembly 12 includes 3-5 circular arc hinge units 121. Through multiple experiments, the inventors have demonstrated that when the mounting platform 2 is pushed by a displacement of 100 μm, the rotation angle of the mounting platform 2 with hinge assembly 12 including 3 circular arc hinge units 121 is 0.035 degrees, and the rotation angle of the mounting platform 2 with hinge assembly 12 including 5 circular arc hinge units 121 is 0.034 degrees. However, the maximum stress of 3 circular arc hinge units 121 is 62 MPa, and its modal analysis result shows a first-order mode of 90 Hz; the maximum stress of 5 circular arc hinge units 121 is 57 MPa, and its modal analysis result shows a first-order mode of 139 Hz. In summary, increasing the number of parallel circular arc hinge units 121 does not affect the rotational performance of the entire precision fine-tuning mechanism, but it can greatly improve the stiffness of the precision fine-tuning mechanism, increasing the stability and accuracy of the mechanism. Therefore, given the width of the connecting portion 13, the more arc hinge units 121 there are, the better the stability and the higher the precision of the fine-tuning mechanism. Of course, if the mechanism's stability is already sufficient and cost is taken into consideration, the number of arc hinge units 121 cannot be too large. Therefore, in this application, setting the number of arc hinge units 121 to 3-5 is preferred.

[0041] Optionally, the included angle between adjacent arc hinge units 121 is 0 to 30 degrees. In order for the hinge group 12 to have sufficient elastic performance, there needs to be a certain angular distance between adjacent arc hinge units 121. However, in order to avoid the included angle between adjacent arc hinge units 121 being too large and affecting the support strength of the hinge group 12, the included angle between adjacent arc hinge units 121 cannot be too large. Therefore, this application sets the included angle between adjacent arc hinge units 121 between 0 and 30 degrees, specifically 5 degrees, 10 degrees, 15 degrees, 20 degrees, 25 degrees or 30 degrees, etc.

[0042] In one specific embodiment, the hinge group 12 includes five parallel arc hinge units 121, with an included angle of 20 degrees between adjacent arc hinge units 121. This ensures that the entire hinge group 12 has high support stability and good elastic performance.

[0043] In one specific embodiment, the hinge assembly 12 includes five parallel-connected arc hinge units 121, and the arc hinge units 121 are made of 55SiMnVB material.

[0044] In one embodiment, see Figure 1 and Figure 2The flexible hinge structure 1 includes two connecting parts 13, which are rotating bodies. The ends of the arc hinge units 121 in the two hinge groups 12 that are away from the supporting body 11 are integrally connected to the outer walls of the two connecting parts 13, and the arc hinge units 121 are distributed in a fan shape with the central axis of the connecting part 13 as the center.

[0045] It should be noted that a rotating body refers to a body with two points at both ends of a connecting part 13, and the two points are connected by a line that passes through the connecting part 13. The connecting part 13 uses this line as its rotation center, and each part of it has the same shape when it rotates to a fixed position.

[0046] In this embodiment, the connecting portion 13 allows the other ends of each arc hinge unit 121 to converge and connect, enhancing the support strength of each arc hinge unit 121 and also strengthening the connection between the other end of each arc hinge unit 121 and the mounting platform 2 or base 3. Furthermore, by making the connecting portion 13 cylindrical, each arc hinge unit 121 can be distributed around the central axis of the connecting portion 13 and along the circumferential direction, thereby improving the structural symmetry of the entire hinge assembly 12.

[0047] In one embodiment, the connecting portion 13 is cylindrical. In other embodiments of this application, the connecting portion 13 may also be frustum-shaped, drum-shaped with small ends and a large middle, conical, or other arbitrary rotating body structure.

[0048] In one embodiment, see Figure 1 and Figure 2 The supporting body 11 is block-shaped, and the surface of the supporting body 11 used to integrally connect each arc hinge unit 121 is an arc surface 111. The central axis of the arc surface 111 coincides with the central axis of the connecting part 13, that is, the arc surface 111 extends in a circumferential direction with the central axis of the connecting part 13 as the center. When one end of each arc hinge unit 121 is integrally connected to the arc surface 111, and the other end of each arc hinge unit 121 is connected to the outer wall of the connecting part 13, the arc hinge units 121 are arranged in a fan shape, and the length of each arc hinge unit 121 is the same, and their bearing capacity is the same. The supporting capacity of the hinge group 12 is the sum of the supporting strength of each arc hinge unit 121.

[0049] In one embodiment, see Figure 1 and Figure 2The flexible hinge structure 1 is symmetrical along its length. Specifically, the supporting body 11 is symmetrical along its length, and two hinge groups 12 are symmetrically connected to opposite sides of the supporting body 11, making the entire flexible hinge structure 1 symmetrical. This symmetrical design ensures that the hinge groups 12 at both ends of the flexible hinge structure 1 experience uniform stress and deformation when under load. Let the two hinge groups 12 be the first hinge group 12a and the second hinge group 12b. The ends of the arc hinge units 121 in the first hinge group 12a that are away from the supporting body 11 converge at the first center point 131, and the second hinge group 12b converges at the second center point 132. The line connecting the first center point 131 and the second center point 132 is the centerline 14 of the flexible hinge structure 1, and the length direction of the supporting body 11 is parallel to the centerline 14.

[0050] Please see Figure 1 and Figure 2 The flexible hinge structure 1 is also symmetrical along its width direction, so that the flexible hinge structure 1 will not tilt to one side when bearing external force.

[0051] On the other hand, please see Figure 3 and Figure 4 This application also provides a precision fine-tuning mechanism, mainly used to support the KB focusing lens and to fine-tune the angle or position of the KB focusing lens. It is understood that in other embodiments of this application, this precision fine-tuning mechanism can also be used in other scenarios, such as for fine-tuning the angle or position of cameras, LiDAR, etc., and is not limited to this application here.

[0052] The precision fine-tuning mechanism includes a mounting platform 2, a base 3, a drive device 4, and at least two flexible hinge structures 1; the mounting platform 2 and the base 3 are opposite to each other and spaced apart, and each flexible hinge structure 1 is connected between the mounting platform 2 and the base 3; the drive device 4 is mounted on the base 3, and the output end of the drive device 4 is connected to the mounting platform 2 and is used to drive the mounting platform 2 to rotate or translate.

[0053] The base 3 is connected to the fixing mechanism, thus the base 3 is fixedly installed, and its position and posture will not change. The mounting platform 2 is used to support the KB focusing lens. When the angle of the KB focusing lens needs to be adjusted, the mounting platform 2 is driven to rotate by the driving device 4. Since the flexible hinge structure 1 is connected between the mounting platform 2 and the base 3, the flexible hinge structure 1 will rotate accordingly with the mounting platform 2. The connection between the flexible hinge structure 1 and the mounting platform 2 will generate elastic deformation to adapt to the rotation and displacement of the connection. Similarly, the connection between the flexible hinge structure 1 and the base 3 will generate elastic deformation to adapt to the rotation and displacement of the connection. That is, the motion is transmitted or converted by the elastic deformation of the material. It occupies a small volume, has high motion resolution, can effectively avoid motion nonlinearity, and achieve high stability and large rotation angle.

[0054] In one embodiment, see Figure 3 and Figure 4 The flexible hinge structure 1 is separately connected to the mounting platform 2, and also separately connected to the base 3. This allows the mounting platform 2, flexible hinge structure 1, and base 3 to be processed simultaneously, greatly improving the processing efficiency of the entire precision fine-tuning mechanism, while also increasing material utilization and reducing processing costs. Furthermore, the flexible hinge structures 1 can be combined in different forms, such as trapezoidal or parallelogram arrangements, to achieve translational or rotational movements, offering high flexibility and strong adaptability.

[0055] In one embodiment, see Figure 3 and Figure 4 The flexible hinge structure 1 has two hinge groups 12, namely the first hinge group 12a and the second hinge group 12b. In the first hinge group 12a, the ends of each arc hinge unit 121 that are away from the support body 11 converge at the first center point 131, and each arc hinge unit 121 is connected to the mounting platform 2 at the first center point 131. In the second hinge group 12b, the ends of each arc hinge unit 121 that are away from the support body 11 converge at the second center point 132, and each arc hinge unit 121 is connected to the base 3 at the second center point 132.

[0056] In one embodiment, see Figures 3 to 5 The precision fine-tuning mechanism includes multiple sets of flexible hinge structures 1, each set of multiple sets of flexible hinge structures 1 is distributed at intervals along the first direction X; each set of flexible hinge structures 1 includes two flexible hinge structures 1 arranged at intervals along the second direction Y, wherein the first direction X and the second direction Y are perpendicular to each other.

[0057] Furthermore, the mounting platform 2 and the base 3 are spaced apart along the third direction Z, with the first direction X, the second direction Y, and the third direction Z being mutually perpendicular. The specific directions of the first direction X, the second direction Y, and the third direction Z can be referenced. Figure 3The XOYZ coordinates in the equation.

[0058] The mounting platform 2 is flat, and the base 3 is flat. The mounting platform 2 is positioned above the base 3. The length of the mounting platform 2 along the first direction X is equal to the length of the base 3 along the first direction X. The length of the mounting platform 2 along the second direction Y is less than the length of the base 3 along the second direction Y. The centerline of the mounting platform 2 coincides with the centerline of the base 3 along the second direction Y. One end of the flexible hinge structure 1 is connected to the mounting platform 2, and the other end is connected to the base 3. Each set of flexible hinge structures 1, mounting platform 2, and base 3 forms a trapezoid, and adjacent flexible hinge structures 1 are arranged parallel and spaced apart along the first direction X.

[0059] The drive device 4 includes a motor 42 and a push rod 41. The motor 42 is mounted on the base 3. One end of the push rod 41 is connected to the output end of the motor 42, and the other end of the push rod 41 is connected to the mounting platform 2. The push rod 41 is vertically set and is located on the center line of the mounting platform 2 along the first direction X. The push rod 41 is located at a distance of 31mm from the center line of the mounting platform 2 along the second direction Y. When the push rod 41 pushes the mounting platform 2 upward, the mounting platform 2 rotates clockwise. When the push rod 41 pulls the mounting platform 2 downward, the mounting platform 2 rotates counterclockwise.

[0060] For details, please refer to Figure 5 The line connecting the first center point 131 and the second center point 132 of the flexible hinge structure 1 is the center line 14 of the flexible hinge structure 1. The two center lines 14 of the two flexible hinge structures 1 in each group intersect at the intersection point P above the mounting platform 2. The line connecting each intersection point P of each group of flexible hinge structures 1 is set to pass through the center of the part to be installed, so that the part to be installed (e.g., the mirror body) can make pure rotational motion when fine adjustment is performed.

[0061] Optionally, the distance between the first center point 131 and the second center point 132 is 60mm, and the included angle between the two flexible hinge structures 1 is 74 degrees. It is understood that in other embodiments of this application, the included angle and width of the two flexible hinge structures 1 can also be limited according to the center line of the mirror body, and no unique limitation is made here.

[0062] In one embodiment, see Figure 3 and Figure 4The precision fine-tuning mechanism also includes a first connecting member 5, which is cylindrical and installed on the four corners of the mounting platform 2. The inner and outer diameters of the first connecting member 5 and the connecting part 13 above are equal. The first connecting member 5 and the connecting part 13 are coaxially arranged. The locking member passes through the first connecting member 5 and the connecting part 13 in sequence to lock the first connecting member 5 and the connecting part 13, thereby locking the mounting platform 2 and the flexible hinge structure 1. At the same time, since the first connecting member 5 and the connecting part 13 are coaxially arranged, the connection point between the mounting platform 2 and the flexible hinge structure 1 is also located at the first center point 131.

[0063] Similarly, the precision fine-tuning mechanism also includes a second connecting member 6, which is cylindrical and installed on the four corners of the base 3. The inner and outer diameters of the second connecting member 6 and the connecting part 13 below are equal. The second connecting member 6 and the connecting part 13 are coaxially arranged. The locking member passes through the second connecting member 6 and the connecting part 13 in sequence to lock the second connecting member 6 and the connecting part 13, thereby locking the base 3 and the flexible hinge structure 1. At the same time, since the second connecting member 6 and the connecting part 13 are coaxially arranged, the connection point between the base 3 and the flexible hinge structure 1 is also located at the second connection point.

[0064] In one specific embodiment, the mounting platform 2 has dimensions of 100mm × 100mm × 5mm and is made of 45 steel. The material, size, and shape of the mounting platform 2 can be adjusted according to the size of the mirror body. The push rod 41 has dimensions of 4mm × 8mm × 45mm.

[0065] In one specific embodiment, the base 3 has dimensions of 150mm × 100mm × 5mm and is made of 45 steel. The dimensions of the base 3 can be adjusted according to the dimensions of the mounting platform 2 and the flexible hinge unit.

[0066] In addition, a limiting device is provided, which is located on the periphery of the mounting platform 2 and is used to limit the rotation angle of the mounting platform 2.

[0067] like Figure 3 As shown, base 3 is set as a fixed constraint, and the motor model is selected as PI L220, which is fixed on base 3. The finite element method is used to analyze the embodiments provided in this application and the comparative examples of the prior art, and the results are shown in Table 2. Among them, Table 1 shows the material performance parameters.

[0068] Table 1

[0069]

[0070] Table 2

[0071]

[0072] As can be seen from Table 2, the embodiments provided in this application are far superior to the comparative examples of the prior art in terms of both rotation angle and first-order natural frequency. Therefore, they have a significant advantage in the field of synchrotron radiation fine-tuning devices.

[0073] Understandably, in other embodiments of this application, when two flexible hinge structures 1 in each group of flexible hinge structures 1 are arranged parallel to each other, and the mounting platform 2 can be translated by the driving device 4, the translation of the mounting platform 2 is then converted by the flexible hinge structure 1. That is, the precision fine-tuning mechanism can realize the translation or rotation adjustment of the mirror body according to the different installation conditions of each flexible hinge structure 1.

[0074] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A flexible hinge structure, characterized in that, The device includes a support body and two hinge groups, which are symmetrically arranged at both ends of the support body along its length. Each hinge group includes multiple arc hinge units, one end of which is sequentially spaced along the width of the support body and integrally connected to it. The other ends of each arc hinge unit converge and connect. The included angle between two adjacent arc hinge units is 0 to 30 degrees. The thickness of each arc hinge unit gradually increases from the middle to both ends. Each arc hinge unit has two back-to-back symmetrical arc surfaces along its thickness direction, and the central angle of each arc surface is less than 30 degrees.

2. The flexible hinge structure as described in claim 1, characterized in that, The radius of the arc surface ranges from 50mm to 150mm.

3. The flexible hinge structure as described in claim 1, characterized in that, The hinge assembly includes 3 to 5 of the aforementioned circular arc hinge units.

4. The flexible hinge structure as described in any one of claims 1 to 3, characterized in that, The flexible hinge structure includes two connecting parts, each of which is a rotating body. The ends of the arc hinge units in the two hinge groups that are away from the supporting body are integrally connected to the outer walls of the two connecting parts, and each arc hinge unit is distributed in a fan shape with the central axis of the connecting part as the center.

5. The flexible hinge structure as described in claim 4, characterized in that, The surface of the supporting body used to integrally connect each arc hinge unit is an arc-shaped surface, and the central axis of the arc-shaped surface coincides with the central axis of the connecting part.

6. The flexible hinge structure as described in claim 4, characterized in that, The flexible hinge structure is symmetrical along its length. And / or, the flexible hinge structure is symmetrical along its width direction.

7. A precision fine-tuning mechanism, characterized in that, The device includes a mounting platform, a base, a drive device, and at least two flexible hinge structures as described in any one of claims 1 to 6; the mounting platform and the base are opposite to each other and spaced apart, and each of the flexible hinge structures is connected between the mounting platform and the base; the drive device is mounted on the base, and the output end of the drive device is connected to the mounting platform and is used to drive the mounting platform to rotate or translate.

8. The precision fine-tuning mechanism as described in claim 7, characterized in that, The flexible hinge structure is separately connected to the mounting platform and separately connected to the base.

9. The precision fine-tuning mechanism as described in claim 7, characterized in that, The flexible hinge structure has two hinge groups, namely a first hinge group and a second hinge group. In the first hinge group, the ends of each arc hinge unit that are away from the supporting body converge at a first center point, and each arc hinge unit is connected to the mounting platform at the first center point. In the second hinge group, the ends of each arc hinge unit that are away from the supporting body converge at a second center point, and each arc hinge unit is connected to the base at the second center point.

10. The precision fine-tuning mechanism as described in claim 9, characterized in that, The precision fine-tuning mechanism includes multiple sets of flexible hinge structures, each set of flexible hinge structures being spaced apart along a first direction; each set of flexible hinge structures includes two flexible hinge structures spaced apart along a second direction, the first direction and the second direction being perpendicular to each other; The line connecting the first center point and the second center point in the flexible hinge structure is the center line of the flexible hinge structure. The two center lines of the two flexible hinge structures in each group intersect at the intersection point above the mounting platform. The line connecting the intersection points of each group of flexible hinge structures passes through the center of the part to be installed.

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