Spectral confocal single-lens active centering device and method

Abstract

This invention provides a single-lens active centering device and method based on spectral confocal microscopy. The device includes: a turntable; a fixed lens mount for adjusting the lens mount's posture and the relative position of the turntable's axis to rotate the lens mount along its central axis; a spectral confocal sensor for detecting the height fluctuation of the upper surface of the single lens placed within the lens mount, used to determine the single lens's tilt and eccentricity; and a push rod for pushing the sidewall of the single lens placed within the lens mount to minimize the height fluctuation of the single lens's upper surface during rotation with the air-bearing turntable, thus achieving single-lens centering and adjustment. This invention uses a spectral confocal sensor to detect the eccentricity of the single lens surface, can collect reflected light signals over a wide angular range, is compatible with the adjustment of single lenses with different radii of curvature, facilitates the adjustment and centering of single lenses, achieves sub-micron adjustment accuracy, facilitates automated single-lens eccentricity adjustment, and is highly efficient for adapting to high-precision single-lens adjustments.

Description

Technical Field

[0001] This invention relates to the field of lens assembly and centering technology, specifically to a single-lens active centering device and method based on spectral confocalization. Background Technology

[0002] As optical imaging applications develop towards larger fields of view, higher resolution, and lower aberrations, the lens assemblies of optical lenses are becoming increasingly complex and precise. The mass production method of lenses commonly used in industry, which relies solely on mechanical precision for lens assembly, is only suitable for lenses with simple structures and a small number of lenses. High-magnification microscope lenses, high-resolution photolithography projection lenses, and large-aperture zoom lenses, which have a large number of lenses and large lens diameters, usually require active assembly and adjustment technology to ensure image quality and lens yield.

[0003] Active lens assembly technology, such as patents with publication numbers CN104007560B, CN102998767B and CN108732780B, discloses a single lens eccentricity detection method that uses an autocollimator to image and detect the spherical center image of the upper and lower surfaces of the single lens. The active assembly method that centers the single lens separately before assembling the lens assembly is mainly the centering turning method, that is, the optical axis of the single lens and the mechanical axis of the lens mount are aligned by turning the lens mount with diamond at a single point.

[0004] When using an autocollimator to find the spherical center image of a single lens, it is necessary to switch the front lens according to the curvature radius of the single lens, and prepare a large-stroke translation stage to move the autocollimator to find the spherical center image. The image finding process is relatively cumbersome and time-consuming. Summary of the Invention

[0005] The purpose of this invention is to provide a single-lens active centering device and method based on spectral confocalization, so as to facilitate the automatic adjustment of single-lens eccentricity and adapt to the high efficiency of high-precision single-lens assembly and adjustment.

[0006] To achieve the above objectives, the present invention provides a single-lens active centering device based on spectral confocalization, comprising: A turntable is used to fix the mirror mount and adjust the posture of the mirror mount, as well as the relative position of the turntable's axis of rotation with respect to the mirror mount, so that the mirror mount can rotate along the central axis of the mirror mount. A spectral confocal sensor detects the height fluctuation of the upper surface of a single lens placed inside the lens mount, which is used to determine the tilt and eccentricity of the single lens; The push rod pushes the side wall of the single lens placed inside the lens mount to adjust the position and orientation of the single lens, so that the height jump of the upper surface of the single lens is minimized during the rotation of the single lens with the air-bearing turntable, thereby achieving the centering and adjustment of the single lens.

[0007] Furthermore, the focal point of the spectral confocal sensor is located on the top surface of the outer single lens.

[0008] Furthermore, it also includes a slide rail for moving the spectral confocal sensor to one side of the lens mount and focusing on the outer side of the lens mount, so that the spectral confocal sensor can detect lens mount runout and determine that the lens mount rotates along the central axis of the lens mount.

[0009] Furthermore, it also includes a second spectral confocal sensor, which focuses on the outer surface of the lens mount so that the spectral confocal sensor detects lens mount runout and determines that the lens mount rotates along the central axis of the lens mount.

[0010] Furthermore, the push rod passes through the adjustment groove on the side wall of the lens mount, pushes the single lens, and adjusts the single lens.

[0011] Furthermore, the push rod comprises a pneumatic rod, a piezoelectric ceramic, and a top column. The piezoelectric ceramic is mounted on the pneumatic rod, and a top column for pushing the single lens is mounted at the end of the piezoelectric ceramic.

[0012] Furthermore, the turntable is provided with a turntable shaft so that the mirror mount on the turntable rotates with the turntable shaft.

[0013] Furthermore, the upper surface of the turntable is provided with a multi-jaw chuck for fixing the mirror mount. Furthermore, the turntable is an air bearing, and the posture of the mirror mount fixed on the turntable is pneumatically adjusted.

[0014] To achieve the above objectives, the present invention further provides a single-lens active centering method based on spectral confocalization, characterized in that it includes: Adjust the position of the mirror stand so that the mirror stand rotates along the central axis of the mirror stand; Rotate the lens mount and use a spectral confocal sensor to detect the height runout of the single lens surface inside the lens mount, which is used to determine the tilt and eccentricity of the single lens. When the sidewall of the single lens is pushed, causing the single lens to rotate with the lens mount, the height jump of the upper surface of the single lens is minimized. Inject adhesive into the dispensing groove on the contact surface between the single lens and the lens mount to cure and bond the single lens and the lens mount.

[0015] Furthermore, the adjustment of the mirror seat posture includes fixing the mirror seat on a multi-jaw chuck at the top of the air bearing, and adjusting the translation, pitch and yaw of the air bearing to make the central axis of the mirror seat coaxial with the rotation axis of the air bearing.

[0016] Furthermore, the pushing of the single lens sidewall includes a push rod passing through the adjustment groove of the lens mount sidewall to push the single lens sidewall and adjust the single lens pose so as to minimize the height jump of the upper surface of the single lens.

[0017] This invention uses a spectral confocal sensor to detect, without contact, the surface height fluctuation caused by the eccentricity or tilt of the upper surface of a rotating single lens, and uses a push rod to finely adjust the horizontal position of the single lens to minimize the height fluctuation of the upper surface of the single lens, thereby achieving single lens centering.

[0018] This invention provides a single-lens active centering device and method based on spectral confocalization. It uses a spectral confocal sensor to detect the eccentricity of the single-lens surface, collecting reflected light signals over a wide angular range. It is insensitive to changes in the curvature radius of the single-lens surface, thus being compatible with the assembly and adjustment of single lenses with different curvature radii. A universal single-lens active centering device and method based on spectral confocalization is designed for commonly used single-lens types, facilitating the adjustment and centering of single lenses. A single-lens eccentricity adjustment device based on piezoelectric ceramics is designed, achieving sub-micron adjustment accuracy, facilitating automated single-lens eccentricity adjustment, and adapting to high-precision single-lens assembly and adjustment with high efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of a single-lens active centering device based on spectral confocalization disclosed in an embodiment of the present invention; Figure 2 This is a cross-sectional view of a single-lens active centering device based on spectral confocalization disclosed in an embodiment of the present invention; Figure 3 This is a structural diagram of a lens mount for a single-lens active centering device based on spectral confocalization, as disclosed in an embodiment of the present invention. Figure 4 This is a cross-sectional view of a single-lens active centering device based on spectral confocalization disclosed in an embodiment of the present invention. Figure 4 (A) in the diagram is a cross-sectional view of the meniscus lens. Figure 4 (B) in the diagram is a cross-sectional view of the biconcave lens. Figure 4 (C) in the diagram is a cross-sectional view of a plano-convex lens. Figure 4 (D) in the figure is a cross-sectional view of a plano-concave lens.

[0020] The markings in the diagram are: 101, turntable; 102, second spectral confocal sensor; 103, spectral confocal sensor; 104, lens mount; 105, single lens; 106, top column; 107, piezoelectric ceramic; 108, pneumatic rod; 109, multi-jaw chuck; 301, dispensing groove; 302, adjustment groove. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Currently, the main drawback of directly assembling and adjusting the entire lens assembly is its poor compatibility, making it unsuitable for industrial mass production. When the lens assembly structure is complex, the entire assembly and adjustment process needs to be redesigned. Furthermore, using an autocollimator to find the spherical center image of a single lens requires switching the front lens according to the single lens's radius of curvature and preparing a large-stroke translation stage to move the autocollimator for image finding, making the process cumbersome and time-consuming. The single-lens centering method using a centering carriage also uses an autocollimator for single-lens eccentricity detection, and suffers from the same drawbacks as the aforementioned methods. Moreover, the entire centering carriage equipment is complex and expensive, resulting in high costs for single-lens centering.

[0023] Therefore, the centering and adjustment method provided by this invention is based on the detection of the eccentricity of the single lens surface by a spectral confocal sensor. It can collect reflected light signals over a wide angle range and is insensitive to changes in the curvature radius of the single lens surface, thus being compatible with the adjustment of single lenses with different curvature radii. Furthermore, a single lens eccentricity adjustment device based on piezoelectric ceramics is designed for commonly used single lens types, achieving sub-micron adjustment accuracy and facilitating automated single lens eccentricity adjustment.

[0024] See Figure 1 , 2 This invention provides a schematic diagram of a single-lens active centering device based on spectral confocalization, which includes: The turntable 101 is used to fix the mirror base 104, adjust the position of the mirror base 104, and adjust the relative position of the turntable axis and the mirror base 104 so that the mirror base 104 rotates along the central axis of the mirror base; the turntable 101 is provided with a turntable axis so that the mirror base 104 on the turntable 101 rotates with the turntable axis.

[0025] The second spectral confocal sensor 102 is placed horizontally, with its focal point located on the side of the mirror mount 104. It detects the height fluctuation of the side of the mirror mount 104 and is used to adjust the central axis of the mirror mount to be coaxial with the rotation axis of the turntable 101.

[0026] The upper surface of the turntable 101 is provided with a multi-jaw chuck 109 for fixing the mirror mount 104.

[0027] The spectral confocal sensor 103 detects the height fluctuation of the upper surface of the single lens 105 placed inside the lens mount 104, and is used to determine the tilt and eccentricity of the single lens 105. The basic principle for determining the tilt and eccentricity of the single lens 105 is that the spectral confocal sensor 103 non-contactly detects the height fluctuation of the upper surface of the rotating single lens 105 caused by eccentricity or tilt, and, in conjunction with a push rod, finely adjusts the horizontal position of the single lens 105 within the lens mount 104, thereby centering the single lens 105 by adjusting the height fluctuation of the upper surface.

[0028] The focal point of the spectral confocal sensor 103 is located on the top surface of the outer single lens 105. The spectral confocal sensor 103 is placed at an angle, with its focal point located at the edge of the upper surface of the single lens 105 to be adjusted, to detect the tilt and eccentricity of the upper surface of the single lens 105.

[0029] A push rod pushes the side wall of the single lens 105 placed inside the lens mount 104 to adjust the position and orientation of the single lens 105, so that the height fluctuation of the upper surface of the single lens 105 is minimized during the rotation of the turntable 101, thereby achieving centering and adjustment of the single lens 105. The push rod passes through the adjustment groove 302 on the side wall of the lens mount 104 to push and adjust the single lens 105.

[0030] The push rod comprises a pneumatic rod 108, a piezoelectric ceramic 107, and a top post 106. The piezoelectric ceramic 107 is mounted on the push rod, and the top post 106 for pushing the single lens 105 is mounted at the end of the piezoelectric ceramic 107. The push rod consists of a pneumatic rod 108, a long-stroke piezoelectric ceramic 107, and a thin top post 106 at its top. Multiple adjustment slots 302 penetrating the lens mount 104 are provided on the outer side of the lens mount 104. The push rod can be inserted into the adjustment slots 302 on the side of the lens mount 104 to directly push the sidewall of the single lens 105, adjusting the eccentricity of the single lens 105 with sub-micron resolution. The push rod pushes the sidewall of the single lens 105, avoiding contact between the push rod and the upper and lower optical surfaces of the single lens 105, thus preventing damage to the optical surfaces.

[0031] It also includes a second spectral confocal sensor 102, which focuses on the outer surface of the lens mount 104 so that the second spectral confocal sensor 102 detects the runout of the lens mount 104 and determines that the lens mount 104 rotates along the central axis of the lens mount.

[0032] The second spectral confocal sensor 102 is placed horizontally with its focal point located on the side of the mirror mount 104. It detects the height fluctuation of the side of the mirror mount 104 and is used to adjust the central axis of the mirror mount 104 to be coaxial with the rotation axis of the turntable 101.

[0033] This invention provides another schematic diagram of a single-lens active centering device based on spectral confocalization. It should be noted that the similarities between the active centering device described in this embodiment and the active centering device described in the previous embodiment can be referred to each other, and will not be described in detail here.

[0034] The active centering device contains only one spectral confocal sensor 103.

[0035] It also includes a slide rail for moving the spectral confocal sensor 103 to one side of the lens mount 104, whereby the spectral confocal sensor 103 focuses on the outer side of the lens mount 104 to detect the runout of the lens mount 104 and determine whether the lens mount 104 rotates along the central axis of the lens mount.

[0036] The turntable 101 fixes the mirror mount 104 via the multi-jaw chuck 109 at the top of the turntable 101; the spectral confocal sensor 103 is moved to one side of the mirror mount 104 via the slide rail. At this time, the focal point of the spectral confocal sensor 103 is located on the side of the mirror mount 104. The height jump of the side of the mirror mount 104 is detected, and the turntable 101 is adjusted so that the rotation axis of the turntable 101 is relative to the mirror mount 104, so that the mirror mount 104 rotates along the central axis of the mirror mount.

[0037] This invention provides another single-lens active centering device based on spectral confocalization. It should be noted that the similarities between the active centering device described in this embodiment and the detection method described in the previous embodiment can be referred to each other, and will not be described in detail here.

[0038] The turntable 101 is an air bearing, and the position of the mirror mount 104 fixed on the air bearing by the multi-jaw chuck 109 is pneumatically adjusted.

[0039] The air bearing has a rotational runout of better than 100 nm and can perform horizontal two-dimensional movement and pitch and yaw angle adjustment on its top multi-jaw chuck 109, thereby completing the coaxial adjustment of the central axis of the mirror mount 104 and the rotating axis of the turntable 101.

[0040] The present invention provides a single-lens active centering method based on spectral confocalization. The active centering method described below can be referred to in conjunction with the active centering device described above.

[0041] This invention provides a single-lens active centering method based on spectral confocalization, comprising: Adjust the position of the mirror mount 104 so that the mirror mount 104 rotates along the central axis of the mirror mount; See Figure 2 First, the mirror mount 104 is fixed to the turntable 101 using a multi-jaw chuck 109. The rotation axis of the turntable 101 is a straight line M1M2. The bearing of the turntable 101 has a built-in motor, which drives the entire turntable 101 to rotate around M1M2.

[0042] The adjustment of the position of the mirror mount 104 includes fixing the mirror mount 104 to the multi-jaw chuck 109 at the top of the turntable 101, and adjusting the translation, pitch and yaw of the turntable 101 to make the central axis of the mirror mount coaxial with the rotation axis of the turntable 101.

[0043] During rotation, the second spectral confocal sensor 102 or spectral confocal sensor 103 is used to continuously detect the change in height difference on the side of the mirror mount 104, that is, the offset between the central axis and the rotation axis M1M2 of the mirror mount 104. By adjusting the translation, pitch and yaw knobs on the turntable 101, this offset is adjusted to within the ellipticity tolerance range of the side of the mirror mount 104, thus completing the coaxial adjustment of the central axis and the rotation axis M1M2 of the mirror mount 104.

[0044] Rotate the mirror mount 104 and use the spectral confocal sensor 103 to detect the height jump of the upper surface of the single lens 105 inside the mirror mount 104, which is used to determine the tilt and eccentricity of the single lens 105. The bottom of the inner hole of the single lens 105 and the lens mount 104 are in convex or planar contact. After the single lens 105 is installed into the lens mount 104, the mechanical self-centering of the lens can be used to offset the center of the ball on the lower surface of the single lens 105 by X1, that is, the distance from the center of the ball C1 on the lower surface of the single lens 105 to the rotation axis M1M2, which is controlled within 10um of the coaxiality between the inner and outer circles of the lens mount 104.

[0045] The spherical center offset X2 of the upper surface of the single lens 105, i.e., the distance from the spherical center C2 of the upper surface of the single lens 105 to the rotation axis M1M2, is continuously detected by the single-spectrum confocal sensor 103. When the spherical center offset X2 is not zero, as the single lens 105 rotates, the single-spectrum confocal sensor 103 will measure the change in height difference of the upper surface of the single lens 105, with a measurement resolution of less than 1 μm. The spherical center offsets X1 and X2 characterize the magnitude of the eccentricity of the optical axis C1C2 of the single lens 105 relative to the central axis of the lens mount 104. The spherical center offset X1 is guaranteed by the machining accuracy of the lens mount 104; only the spherical center offset X2 needs to be adjusted to complete the centering of the single lens 105.

[0046] During the process of pushing the sidewall of the single lens 105 so that the single lens 105 rotates with the lens mount 104, the height jump of the upper surface of the single lens 105 is minimized. The pushing of the side wall of the single lens 105 includes a push rod passing through the adjustment groove 302 of the side wall of the lens base 104 to push the side wall of the single lens 105 and adjust the position of the single lens 105 so as to minimize the height jump of the upper surface of the single lens 105.

[0047] Adhesive is injected into the dispensing groove 301 on the contact surface between the single lens 105 and the lens mount 104 to cure and bond the single lens 105 and the lens mount 104. After centering, the single lens 105 needs to be fixed in the lens mount 104. UV adhesive can be dispensed into multiple dispensing grooves 301 of the lens mount 104 and irradiated with ultraviolet light to complete the firm bonding between the single lens 105 and the lens mount 104.

[0048] The bottom of the inner sidewall of the lens mount 104 is provided with an inwardly extending lens base to support the single lens 105 placed inside the lens mount 104; the lens mount 104 is provided with an adjustment groove 302 and an adhesive dispensing groove 301. The adjustment groove 302 penetrates the sidewall of the lens mount 104 and is used for the top post 106 of the push rod to pass through and push the single lens 105; the adhesive dispensing groove 301 is located at the top inner side of the lens mount 104 and is used for the injection, curing and bonding of adhesive between the single lens 105 and the lens mount 104.

[0049] The thin top post 106 at the front end of the push rod can be inserted into the adjustment slot 302. When the lens mount 104 is rotated to the point where the adjustment slot 302 is directly opposite the top post 106, the pneumatic rod 108 controls the rapid insertion and withdrawal of the top post 106. The piezoelectric ceramic 107 pushes the single lens 105 through the top post 106 to perform horizontal eccentric adjustment.

[0050] This completes the optical centering of the single lens 105.

[0051] This invention provides another schematic diagram of a single-lens active centering device based on spectral confocalization. It should be noted that the similarities between the active centering device described in this embodiment and the detection method described in the previous embodiment can be referred to each other, and will not be described in detail here.

[0052] See Figure 3 The lens mount 104 has four adjustment slots 302 and four glue dispensing slots 301, which are arranged in a circular matrix with staggered intervals along the lens mount 104. A push rod drives the single lens 105 to perform horizontal eccentricity adjustment, including: The turntable 101 rotates one revolution, aligning the top post 106 with the four adjustment slots 302 sequentially. The four adjustment slots are numbered k1, k2, k3, and k4. When the top post 106 is aligned with adjustment slots k1, k2, k3, and k4, the heights of the upper surface of the single lens 105 measured by the spectral confocal sensor 103 are h1, h2, h3, and h4, respectively.

[0053] If the height h1 is the smallest among these four heights, rotate the turntable 101 until the top column 106 and the adjustment slot k3 are aligned, insert the top column 106, and use the piezoelectric ceramic 107 to fine-tune the position of the single lens 105 with submicron resolution so that the reading of the spectral confocal sensor 103 is (h1+h3) / 2.

[0054] Repeat this step until the maximum height difference of these four heights is less than the resolution of the spectral confocal sensor 103, thus indirectly achieving the minimization adjustment of the spherical center offset X2 on the upper surface of the single lens 105.

[0055] This invention provides another schematic diagram of a single-lens active centering device based on spectral confocalization. It should be noted that the similarities between the active centering device described in this embodiment and the detection method described in the previous embodiment can be referred to each other, and will not be described in detail here.

[0056] See Figure 4 The single lens 105 is one of the following: a biconvex lens, a meniscus lens 401, a biconcave lens 402, a plano-convex lens 403, and a plano-concave lens 404.

[0057] Among them, the planar steps of the meniscus lens 401, biconcave lens 402, plano-convex lens 403, and plano-concave lens 404 are in direct contact with the lens base of the lens mount 104. The centering of the single lens 105 can be completed by simply adjusting the spherical center of the upper surface of the single lens 105 to the minimum.

[0058] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0059] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A single-lens active centering device based on spectral confocal, characterized in that, include: A turntable is used to fix the mirror mount and adjust the posture of the mirror mount, as well as the relative position of the turntable's axis of rotation with respect to the mirror mount, so that the mirror mount can rotate along the central axis of the mirror mount. A spectral confocal sensor detects the height fluctuation of the upper surface of a single lens placed inside the lens mount, which is used to determine the tilt and eccentricity of the single lens; A push rod pushes the side wall of a single lens placed inside the lens mount to adjust the position and orientation of the single lens, so that the height jump of the upper surface of the single lens is minimized during the rotation of the single lens with the air-bearing turntable, thereby achieving centering and adjustment of the single lens; the push rod includes a pneumatic rod, a piezoelectric ceramic and a top column, the piezoelectric ceramic is mounted on the pneumatic rod, and the top column for pushing the single lens is mounted at the end of the piezoelectric ceramic; The bottom of the inner sidewall of the lens mount is provided with an inwardly extending lens base to support the single lens placed inside the lens mount; the lens mount is provided with an adjustment groove and an adhesive dispensing groove. The adjustment groove runs through the sidewall of the lens mount and is used for the top post of the push rod to pass through and push the single lens; the adhesive dispensing groove is located at the top of the inner side of the lens mount and is used for the injection, curing and bonding of adhesive between the single lens and the lens mount.

2. The single-lens active centering device based on spectral confocal according to claim 1, characterized in that, The focal point of the spectral confocal sensor is located on the top surface of the outer single lens.

3. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, It also includes a slide rail for moving the spectral confocal sensor to one side of the lens mount and focusing on the outer side of the lens mount, so that the spectral confocal sensor can detect lens mount runout and determine that the lens mount rotates along the central axis of the lens mount.

4. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, It also includes a second spectral confocal sensor, which focuses on the outer side of the lens mount so that the spectral confocal sensor can detect lens mount runout and determine that the lens mount rotates along the central axis of the lens mount.

5. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, The push rod passes through the adjustment groove on the side wall of the lens mount, pushes the single lens, and adjusts the single lens.

6. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, The turntable is equipped with a turntable shaft so that the mirror mount on the turntable rotates with the turntable shaft.

7. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, The upper surface of the turntable is provided with a multi-jaw chuck for fixing the mirror mount.

8. The single-lens active centering apparatus based on spectral confocal according to claim 1, characterized in that, The turntable is equipped with an air bearing, and the fixed mirror seat position on the turntable is pneumatically adjusted.

9. A single-lens active centering method based on spectral confocalization, using the centering device according to any one of claims 1-8 for centering, characterized in that, include: Adjust the position of the mirror stand so that the mirror stand rotates along the central axis of the mirror stand; Rotate the lens mount and use a spectral confocal sensor to detect the height fluctuation of the upper surface of the single lens inside the lens mount, which is used to determine the tilt and eccentricity of the single lens. Pushing the sidewall of the single lens minimizes the height jump of the upper surface of the single lens during the rotation of the single lens with the lens mount; Inject adhesive into the dispensing groove on the contact surface between the single lens and the lens mount to cure and bond the single lens and the lens mount.

10. The single-lens active centering method based on spectral confocalization according to claim 9, characterized in that, The adjustment of the mirror seat posture includes fixing the mirror seat on a multi-jaw chuck at the top of the air bearing, and adjusting the translation, pitch and yaw of the air bearing to make the central axis of the mirror seat coaxial with the rotation axis of the air bearing.

11. The single-lens active centering method based on spectral confocalization according to claim 9, characterized in that, The method of pushing the single lens sidewall includes a push rod passing through the adjustment groove of the lens mount sidewall to push the single lens sidewall and adjust the single lens position so as to minimize the height jump of the upper surface of the single lens.

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