Voice coil deformable mirror and optical system for simultaneous correction of tilt and higher order aberrations

Abstract

This invention discloses a voice coil deformable mirror and optical system for simultaneous correction of tilt and higher-order aberrations, belonging to the field of adaptive optics. By designing a voice coil deformable mirror structure capable of simultaneously correcting tilt and higher-order aberrations, the structure of the adaptive optics system is simplified. This voice coil deformable mirror consists of a higher-order wavefront distortion correction subsystem and a micro-biasing rotor system. The micro-biasing rotor system comprises a flexible hinge, a deflection stage, and a driver. The flexible hinge uses both a universal flexible hinge and a reed-type flexible hinge to support the deflection stage, thereby reducing the influence of gravity on the deflection stage. This optical system eliminates the need for a separate detector for tilt detection, reducing the number of lenses, improving system energy efficiency, and simplifying the control process.

Description

Technical Field

[0001] This invention relates to a voice coil deformable mirror and optical system for simultaneous correction of tilt and higher-order aberrations, belonging to the field of adaptive optics. Background Technology

[0002] Deformable mirrors and tilting mirrors are wavefront correction units in adaptive optics systems, capable of compensating for wavefront distortion caused by atmospheric turbulence, thermal corona, and other disturbances. Apart from liquid crystal spatial light modulators and phase-modulated deformable mirrors, most deformable mirrors are reflective, their principle being to introduce an additional optical path through mirror deformation to eliminate phase differences. Examples include piezoelectric deformable mirrors, micro-electro-mechanical system (MEMS) deformable mirrors, magnetofluid deformable mirrors, and voice coil deformable mirrors; among these, voice coil deformable mirrors possess advantages such as hysteresis-free operation, large modulation amplitude, and good linearity, and are widely used in astronomical observation and laser communication.

[0003] In 1993, Piero Salinari of the Cetelli Observatory in Italy first proposed using voice coil actuators to control deformable secondary mirrors in adaptive optics systems [P. Salinari, C. Del Vecchio and V. Biliotti, A study of an adaptive secondary mirror [C]. in Proc. ESO Conference, ICO-16 Satellite Conference, Active and Adaptive Optics, August 1993]. Under the conditions at the time, they were able to reduce the actuator diameter to within 25 mm and estimated the power range of a single actuator to be 0.3 W to 0.5 W. This novel deformable mirror based on voice coil actuators simplified adaptive optics systems and improved imaging resolution. In 2012, a deformable secondary mirror with 1170 actuators was installed on a VLT (Very Large Telescope) [BIASI R, ANDRIGHETTONIM, ANGERER G. VLT deformable secondary mirror: integration and electromechanical tests results[C] / / Adaptive Optics Systems III. International Society for Optics and Photonics, 2012, 8447:84472G.], with a mirror diameter of 1.12m and a response time of 0.5ms.

[0004] Currently, the modulation of a single deformable mirror is insufficient to meet the requirements of full-order aberration correction. Therefore, researchers cascade two deformable mirrors in the optical path to form a "high-low frequency" system: one deformable mirror with a large modulation and low actuator density is used to correct low-order aberrations, and the other deformable mirror with a small modulation and high actuator density is used to correct high-order aberrations [YANG SJ, KEX Z. Experimental study on adaptive optical wavefront correction with dual mirrors in free space optical communication. Optik, 2021, 242: 167146.]. Both the "tilt mirror-deformable mirror" combination and the "high-low frequency" system can significantly improve the correction effect of adaptive optics systems, but they bring more complex optical paths and higher costs. Domestic scholars have also conducted some research on deformable mirrors capable of correcting aberrations of all orders. Wu Zhizheng et al. from Shanghai University proposed a magnetofluid deformable mirror with a dual-layer actuator layout. The small-sized, high-density upper actuator is used to compensate for small-amplitude high-order aberrations, while the large-sized, low-density lower actuator is used to correct large-amplitude low-order aberrations. The residual value of this deformable mirror for typical aberrations can be corrected to 5% of the original root mean square (RMS) value of the wavefront [ZHANG Z, WEI X, WU ZZ, et al. Modeling and evaluation of magnetic fluid deformable mirror with dual-layer actuators[J]. Int JOptomechatronics, 2019, 13(1): 1-17.]. However, one of the important components of a magnetofluid deformable mirror is a fluid, which means that the deformable mirror must be placed horizontally. Light is reflected to the deformable mirror through a folding mirror, so the application scenarios of the magnetofluid deformable mirror are limited. Summary of the Invention

[0005] To address the issue that traditional adaptive optics systems require tilt mirrors and deformable mirrors for full-order aberration correction, this application proposes a voice coil deformable mirror structure design that can simultaneously correct tilt aberrations and higher-order aberrations. This design simplifies the structure of the adaptive optics system, eliminates the need for a separate detector for tilt detection, reduces the number of lenses, improves system energy efficiency, and simplifies the control process.

[0006] A voice coil deformable mirror for simultaneous correction of tilt and higher-order aberrations, the voice coil deformable mirror comprising a higher-order wavefront distortion correction subsystem and a micro-bias rotor system, wherein the micro-bias rotor system consists of a flexible hinge, a deflection stage, and a driver; the higher-order wavefront distortion correction subsystem is implemented using a compact voice coil deformable mirror composed of a micro voice coil driver with a diameter on the order of millimeters and a spring fixing structure.

[0007] Optionally, the voice coil deformable mirror includes: a compact voice coil deformable mirror 17 for correcting higher-order aberrations, a deflection stage 18, a universal flexible hinge 19, a reed flexible hinge 20, and a voice coil driver 21.

[0008] The compact voice coil deformable mirror 17 used to correct higher-order aberrations is mounted on a deflection stage 18, which is supported by a universal flexible hinge 19 and a reed flexible hinge 20. Four voice coil drivers 21 arranged in a cross shape are arranged below the deflection stage 18. The mover of the voice coil driver 21 is connected to the deflection stage 18, driving the deflection stage 18 to generate a micro-deflection around the universal flexible hinge 19.

[0009] Optionally, the voice coil deformable mirror further includes: a front cover 16, a base plate 22 and a rear cover 23, wherein the universal flexible hinge 19 and the voice coil driver 21 are both mounted on the base plate 22, and the base plate 22 is provided with a positioning groove at the corresponding position.

[0010] The substrate 22 is in direct contact with the rear cover 23; the edge of the front cover 16 is connected and sealed to the rear cover 23 to prevent dust from entering the voice coil deformable mirror.

[0011] Optionally, a light-transmitting hole is provided at the center of the front cover 16.

[0012] Optionally, the voice coil driver 21 drives the deflection stage 18 to generate a deflection in a certain direction in two working modes: single-sided driving mode and double-sided driving mode.

[0013] Optionally, the diameter d3 of the universal flexible hinge 19 shall not exceed 5.5 mm, and the height of the hinge shall be limited to 10 mm; the waist diameter d1 of the hinge shall not be less than 1 mm.

[0014] Optionally, the diameter d3 of the universal flexible hinge 19 is 5 mm, the slit length d2 of the hinge is 9 mm, and the waist diameter d1 of the hinge is 1 mm.

[0015] Optionally, the thickness of the omnidirectional flexible hinge 19 is less than the thickness of the deflection stage 18.

[0016] This application also provides an optical system for simultaneous correction of tilt and higher-order aberrations, the system comprising: a telescope 1, a first lens 2, a beam splitter or dichroic separator 9, a data processor 8, a second lens 10, a camera 11, a third lens 12, a fourth lens 13, a Shaker-Hartmann wavefront detector 14, and a deformable mirror 15; wherein the deformable mirror 15 is the aforementioned voice coil deformable mirror for simultaneous correction of tilt and higher-order aberrations.

[0017] Optionally, the third lens 12 and the fourth lens 13 form a beam contraction or expansion system, and the deformable mirror 15 and the Shaker-Hartmann wavefront detector 14 are conjugate.

[0018] The beneficial effects of this invention are:

[0019] By providing a novel voice coil deformable mirror that simultaneously corrects for tilt and higher-order aberrations, the optical path of the adaptive optics system is simplified, eliminating the need for a separate tilt detector. This simplifies the system structure, reduces the complexity of the control system, lowers costs, and improves energy efficiency. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a typical optical path diagram of a traditional adaptive optics system, consisting of the following parts: 1. Telescope; 2. Lens; 3. Tilt mirror; 4. Beam splitter or dichroic separator; 5. Deformable mirror; 6. Lens; 7. Quadrant detector; 9. Beam splitter or dichroic separator; 10. Lens; 11. Camera; 12. Lens; 13. Lens; 14. Shackhartmann wavefront detector conjugate.

[0022] Figure 2 This application provides a schematic diagram of the optical path of a novel voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations. The mirror includes: 1. Telescope; 2. Lens; 9. Beam splitter or dichroic separator; 10. Lens; 11. Camera; 12. Lens; 13. Lens; 14. Shackhartmann wavefront detector conjugate; 15. Novel voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations.

[0023] Figure 3 The exploded 3D view of the voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations provided in this application is shown. The voice coil deformable mirror mainly includes 8 parts: 16 front cover, 17 deformable mirror for correcting higher-order aberrations, 18 deflection stage, 19 universal flexible hinge, 20 reed flexible hinge, 21 voice coil driver, 22 substrate, and 23 rear cover.

[0024] Figure 4a A schematic diagram of a deflection stage driven by a voice coil driver using a one-sided drive configuration.

[0025] Figure 4b This is a schematic diagram of a deflection stage driven by a voice coil driver using a two-sided drive method, where one side is a thrust and the other side is a pull, forming a force coupling.

[0026] Figure 5 The simulation diagram shows the deflection amplitude of the deflection table when a force F = 1 N is applied.

[0027] Figure 6 Simulation diagrams comparing drift phenomena under different driving methods.

[0028] Figure 7 This is a diagram illustrating the parameters of a universal flexible hinge structure.

[0029] Figure 8a Simulation plot of the deflection amplitude and normalized drift as a function of d1 in the parameters of the flexible hinge;

[0030] Figure 8b Simulation plot of the deflection amplitude and normalized drift as a function of d2 in the parameters of the flexible hinge;

[0031] Figure 8c The simulation results show the variation of deflection amplitude and normalized drift with d3 in the parameters of the flexible hinge.

[0032] Figure 9 The simulation plot shows the changes in deflection amplitude and normalized drift as a function of h1.

[0033] Figure 10 The simulation diagram shows the impact of load on the performance of the micro-deflection system.

[0034] Figure 11a Simulation of the fitting effect of the voice coil deformable mirror, which includes the fitting effect of the first 9 Zernike mode distortions.

[0035] Figure 11b Simulation of the fitting effect of the voice coil deformable mirror, which includes the fitting effect of the first 35 Zernike mode distortions.

[0036] Figure 12 Random aberration fitting and comparison simulation diagram. Detailed Implementation

[0037] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0038] Early reports indicated that tilt mirrors and deformable mirrors were two units in an adaptive optics system, responsible for tilt and higher-order aberration correction, respectively. A four-quadrant detector was also needed for tilt detection, along with auxiliary components and optical paths, such as... Figure 1 As shown, the overall structure is complex and costly. This real-time example presents a voice coil deformable mirror for simultaneous correction of tilt and higher-order aberrations, combining the two into one, simplifying the optical path. Furthermore, it optimizes the structure and materials of the micro-deflection section, resulting in a voice coil deformable mirror with superior overall performance.

[0039] Example 1:

[0040] This embodiment provides a voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations, and an optical system using the voice coil deformable mirror;

[0041] A typical optical path of a traditional adaptive optics system is as follows: Figure 1 As shown, the system includes: a telescope 1 for receiving parallel light from a space target; a lens 2 for collimating the beam; a tilting mirror 3 for correcting tilt distortion caused by atmospheric turbulence and suppressing beam jitter; a beam splitter or dichroic separator 4, which splits a portion of the light for tilt detection; a deformable mirror 5 for correcting higher-order aberrations; a lens 6 for converging the incident beam; a four-quadrant detector 7 for photoelectric motion measurement; a beam splitter or dichroic separator 9 for splitting the beam into two parts, used for wavefront detection and imaging respectively; a lens 10 for converging the incident beam; a camera 11 for imaging; and lenses 12 and 13, which together form a beam contraction or expansion system, making the deformable mirror 5 and the Shakhartmann wavefront detector 14 conjugate. It can be seen that the optical path structure of a traditional adaptive optics system is complex.

[0042] The optical path of the optical system using the novel voice coil deformable mirror with simultaneous tilt and higher-order aberration correction provided in this application is as follows: Figure 2 As shown, 15 is the voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations provided in this application. (And...) Figure 1 Compared to the typical optical path of traditional adaptive optics systems, this reduces the number of optical components and detectors, simplifies the system structure, reduces the complexity of the control system, lowers costs, and improves energy efficiency.

[0043] The 3D exploded view of the novel voice coil deformable mirror that simultaneously corrects tilt and higher-order aberrations provided in this application is shown below. Figure 3 As shown. This novel voice coil deformable mirror mainly comprises eight parts: a front cover 16, a deformable mirror 17 for correcting higher-order aberrations, a deflection stage 18, a universal flexible hinge 19, a reed flexible hinge 20, a voice coil driver 21, a substrate 22, and a rear cover 23.

[0044] Although research on traditional deformable mirrors and voice coil actuators is relatively mature, as described in the literature [Cao Shuo, Zhang Zhigao, Zhao Ziyun, et al. Structural optimization design of high-efficiency voice coil actuator for deformable mirrors [J]. Liquid Crystals & Displays, 2020, 35(11):1110-1119.], their size and weight are relatively large, making them unsuitable for use in the novel voice coil deformable mirror structure designed in this invention. Therefore, the deformable mirror 17 used in this application to correct higher-order aberrations will adopt the compact voice coil deformable mirror provided in the compact voice coil deformable mirror based on a micro voice coil actuator disclosed in the inventor's previously filed invention patent CN 115718364A; the deformable mirror 17 is mounted on the deflection stage 18, which is supported by a universal flexible hinge 19 and a spring-type flexible hinge 20. This structure reduces the influence of gravity on the deflection stage 18, enabling the voice coil deformable mirror to have good stability in the optical path, whether placed vertically or horizontally. Four voice coil drivers 21 are arranged in a cross shape below the deflection stage 18. The movers of the voice coil drivers 21 are connected to the deflection stage, driving the deflection stage 18 to produce micro-deflection around the universal flexible hinge 19. The universal flexible hinge 19 and the voice coil drivers 21 are both mounted on the base plate 22, and the base plate 22 has positioning grooves at corresponding positions. The base plate 22 is in direct contact with the rear cover 23, which facilitates heat dissipation of the voice coil drivers. A light-transmitting hole is left in the center of the front cover 16, and the edge is connected to the rear cover 23 to prevent dust from entering the interior of the deformable mirror.

[0045] It should be noted that the inventor's previously filed invention patent CN 115718364 A discloses a compact voice coil deformable mirror based on a micro voice coil driver, which includes several micro voice coil drivers and a spring fixing structure. The micro voice coil drivers have a diameter on the order of millimeters and include: a thin mirror, a support, a permanent magnet, a voice coil, and a spring. The permanent magnet is connected to the thin mirror through the support, and the spring is sleeved on the support. The voice coil is coaxial with the permanent magnet and is located below it, with a gap between them.

[0046] I. Principle Analysis:

[0047] The voice coil deformable mirror provided in this embodiment mainly comprises two parts: one is a high-order wavefront distortion correction subsystem, which uses a compact voice coil deformable mirror 17 with 97 elements for high-order wavefront distortion correction; the other is a micro-deflection rotor system, which is a key component of the voice coil deformable mirror for correcting tilt aberrations, and consists of three parts: a flexible hinge, a deflection stage, and a driver. The flexible hinge structure can generate elastic deformation under the action of force, causing relative movement between the two rigid components connected to it. In this application, the micro-deflection system has two flexible hinges: a universal flexible hinge 19 and a spring-type flexible hinge 20. The flexible hinge is made of titanium alloy, and its material parameters are shown in Table 1. The structural parameters of the flexible hinge affect the accuracy of the micro-deflection system and need to be optimized one by one. The optimization is evaluated using deflection amplitude and normalized drift. Normalized drift refers to the deflection amplitude in the orthogonal direction when the deflection direction produces a peak-to-valley value of 1 micrometer.

[0048] Table 1 Material Parameters

[0049]

[0050] The voice coil driver 21 drives the deflection stage 18 to produce deflection in a certain direction. There are two operating modes: one where only one side of the driver operates, and the other side does not, such as... Figure 4a As shown; another type has two actuators that both work, one side generating thrust and the other side generating pull, forming a couple, as shown. Figure 4b As shown. Single-sided force drives typically use variable reluctance actuators. These actuators have low magnetic leakage and high efficiency, but their drawback is that they can only generate tension, not thrust. Couple drives typically use voice coil actuators. While these actuators are less efficient, they can generate both tension and thrust, and have better linearity.

[0051] II. Parameter Optimization

[0052] Figure 5 The deflection amplitude of the deflection stage when a force F = 1 N is applied is given. The deflection PV value is 5.822 micrometers when driven by a single force, and 11.644 micrometers when driven by a couple. The deflection amplitude of the couple-driven stage is exactly twice that of the single-force driven stage. This indicates that from the perspective of driving force efficiency, there is no difference between single-force and couple-driven stages; both driving methods can cause the deflection stage to deflect symmetrically around its center in the deflection direction. Assuming the other pair of actuators is not working, i.e., no deflection occurs in the orthogonal direction of the deflection direction, but in reality, the flexible hinge has mechanical coupling, and the deflection stage will deflect to a certain extent in the orthogonal direction, which is the mirror drift phenomenon in the tilting mirror. We use whether the central path of the deflection stage deviates from its initial position to determine whether drift has occurred.

[0053] Figure 6The comparison of drift phenomena under different driving methods is shown. Under unilateral force driving, the center position drift is minimal, with a downward drift of 0.014 micrometers. This is because the center position is connected to the universal flexible hinge 19, which restricts the large-scale movement of the deflection stage 18. The drift is greatest at the two edges of the deflection stage 18, exceeding 0.020 micrometers, and the drift points are not on the same straight line, indicating that the deflection stage 18 not only drifts but also deforms. Although the maximum deformation is only 7 nanometers, the traditional deformable mirror mounted on the deflection stage 18 is a high-precision optical instrument, requiring minimal inherent error. Under couple driving, the deflection stage 18 shows almost no deformation, with the drift points on the same straight line. The maximum drift is only 0.7 nanometers, and the center position deviates from its original position by only 0.01 nanometers. This demonstrates that couple driving effectively solves the deflection drift problem and reduces the complexity of the deflection control system.

[0054] The universal flexible hinge 19 is formed by rotary cutting of a cylindrical raw material, and its structural parameters are as follows: Figure 7 To allow for installation space for the actuator, the hinge diameter d3 should not exceed 5.5 mm, and the hinge height should be limited to 10 mm, i.e., d2 + 2d4 = 10 mm. The hinge waist diameter d1 should not be too small, otherwise it will not be able to support the deflection stage. Therefore, the lower limit is set to 1 mm.

[0055] Figures 8a-8c The optimization results of the omnidirectional flexible hinge 19 are shown. From Figure 8a It can be seen that as the waist diameter increases, the deflection amplitude of the deflection stage continuously decreases, while the normalized drift first decreases and then increases. Although the normalized drift when d1 equals 2 mm is reduced by a quarter compared to 1 mm, the deflection amplitude is only one-third of the original, so d1 is chosen as 1 mm. The optimization of the cut length d2 is as follows... Figure 8b The deflection amplitude is positively correlated with d2, and the normalized drift hardly changes with d2 except when d2 equals 9 mm, so d2 is chosen to be 9 mm. The diameter optimization of the omnidirectional flexible hinge 19 is as follows... Figure 8c As d3 increases, the deflection amplitude gradually decreases. The normalized drift does not exhibit a clear pattern of change; however, it reaches a minimum when d3 equals 5 mm. .

[0056] The spring-type flexible hinge 20 is generally formed from a metal sheet by wire cutting or CNC cutting. Because the flexible hinge is directly connected to the deflection stage 18, to prevent deformation at the connection point from being transmitted to the upper and lower surfaces of the deflection stage during deflection, the thickness of the flexible hinge must be less than the thickness of the deflection stage. The optimization result is as follows: Figure 9As the thickness of the flexible hinge increases, the deflection amplitude of the deflection stage continuously decreases, and the normalized drift first decreases and then increases. Considering all factors, a thickness h1 of 0.8 mm is chosen for the spring-type flexible hinge. At this point, the deflection amplitude is 48.05 μm, and the normalized drift is... .

[0057] The optimized parameters are as follows: Deformable mirror 17: diameter 26mm, height 4.88mm; Deflection stage 18: diameter 26mm, height 2mm; Universal flexible hinge 19: d1 is 1mm, d2 is 9mm, d3 is 5mm, d4 is 0.5mm; Spring flexible hinge 20: outer diameter 36mm; inner diameter 32mm; height 5mm; Voice coil driver outer dimensions 21: diameter 10mm, height 10mm.

[0058] The micro-deflection system needs to support the traditional deformable mirror responsible for correcting higher-order aberrations, and the weight of the traditional deformable mirror will degrade the performance of the micro-deflection system. Figure 10 This study demonstrates the gravitational deformation of the deflection stage and the relationship between the resonant frequency of the micro-deflection system and the load mass. When the load is 0 grams, i.e., the micro-deflection system is unloaded, the gravitational deformation of the deflection stage is 7.46 nanometers, and the first resonant frequency is 549 Hz. As the load mass increases, the gravitational deformation becomes more severe, and the resonant frequency of the system decreases accordingly. This means that the heavier the conventional deformable mirror installed in the micro-deflection system, the lower the operating bandwidth of the voice coil deformable mirror.

[0059] III. Comparative Verification

[0060] In many wavefront aberrations, higher-order aberration terms account for a relatively low proportion. However, for the same wavefront aberration, within the modulation range of the deformable mirror, correcting higher-order aberrations as much as possible can reduce the residual wavefront RMS. Eighty random aberrations were generated using MATLAB code, grouped into sets of 10. Each group of random aberrations contained the same Zernike terms but different Zernike coefficients. The first group contained Z1–Z5 Zernike terms, the second group Z1–Z9, the third group Z1–Z14, the fourth group Z1–Z20, the fifth group Z1–Z27, the sixth group Z1–Z35, the seventh group Z1–Z44, and the eighth group Z1–Z54. Random aberrations were corrected using a DM97-15 and a VCDM, and the residual RMS was recorded. Figures 11(a) and (b) show the fitting effect of VCDM on two of the random wavefronts, demonstrating that VCDM can fit wavefronts of varying complexity.

[0061] Figure 12This paper compares the fitting accuracy of the voice coil deformable mirror (VCDM) designed in this invention with that of a conventional VCDM for 80 random aberrations. It can be seen that the residual wavefront RMS tends to increase with increasing aberration component complexity, but the maximum RMS value does not exceed 80 nanometers. This indicates that both deformable mirrors can effectively correct Zernike random aberrations with aberration components up to order 9. Furthermore, for the same random aberration, the residual wavefront RMS after correction by the conventional VCDM is lower than that of the VCDM designed in this invention. The average reduction rate of residual wavefront RMS in the first and second groups reaches 20%, the third group reaches 10%, the fourth group reaches 9%, the fifth group is close to 4%, the sixth group is 2.69%, the seventh group is 1.09%, and the eighth group is less than 1%. This shows that the VCDM designed in this paper improves the correction accuracy compared to the traditional deformable mirror, but the improvement gradually decreases with increasing aberration component complexity. Overall, the correction capability of the VCDM is consistently superior to that of the traditional deformable mirror.

[0062] Some steps in the embodiments of the present invention can be implemented using software, and the corresponding software program can be stored in a readable storage medium, such as an optical disc or a hard disk.

[0063] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A voice coil deformable mirror for simultaneous correction of tilt and higher-order aberrations, characterized in that, The voice coil deformable mirror includes a high-order wavefront distortion correction subsystem and a micro-biased rotor system. The micro-biased rotor system consists of three parts: a flexible hinge, a deflection stage, and a driver. The high-order wavefront distortion correction subsystem is implemented using a compact voice coil deformable mirror composed of a micro voice coil driver with a diameter on the order of millimeters and a spring fixing structure. The voice coil deformable mirror includes: a compact voice coil deformable mirror (17) for correcting higher-order aberrations, a deflection stage (18), a universal flexible hinge (19), a reed flexible hinge (20), and a voice coil driver (21). The compact voice coil deformable mirror (17) used to correct higher-order aberrations is mounted on the deflection stage (18). The deflection stage (18) is supported by a universal flexible hinge (19) and a reed flexible hinge (20). Four voice coil actuators (21) arranged in a cross shape are provided below the deflection stage (18). The mover of the voice coil actuator (21) is connected to the deflection stage (18) and drives the deflection stage (18) to generate a micro-deflection with the universal flexible hinge (19) as the center. The voice coil deformable mirror also includes: a front cover (16), a base plate (22) and a rear cover (23), wherein the universal flexible hinge (19) and the voice coil driver (21) are both mounted on the base plate (22), and the base plate (22) is provided with a positioning groove at the corresponding position; The substrate (22) is in direct contact with the rear cover (23); the edge of the front cover (16) is connected and sealed to the rear cover (23) to prevent dust from entering the voice coil deformable mirror; A light-transmitting hole is provided in the center of the front cover (16); The voice coil driver (21) drives the deflection stage (18) to produce a deflection in a certain direction in two working modes: single-sided driving mode and double-sided driving mode; The universal flexible hinge (19) has a diameter d3 of 5 mm, a slit length d2 of 9 mm, and a waist diameter d1 of 1 mm.

2. The voice coil deformable mirror according to claim 1, characterized in that, The thickness of the universal flexible hinge (19) is less than the thickness of the deflection stage (18).

3. An optical system for simultaneous correction of tilt and higher-order aberrations, characterized in that, The system includes: a telescope (1), a first lens (2), a beam splitter or dichroic filter (9), a data processor (8), a second lens (10), a camera (11), a third lens (12), a fourth lens (13), a Shaker-Hartmann wavefront detector (14), and a deformable mirror (15); wherein the deformable mirror (15) is a voice coil deformable mirror for simultaneous correction of tilt and higher-order aberrations as described in any one of claims 1-2.

4. The optical system according to claim 3, characterized in that, The third lens (12) and the fourth lens (13) form a beam contraction or expansion system for the beam, and make the deformable mirror (15) and the Shaker-Hartmann wavefront detector (14) conjugate.

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