A layout splitting method, device, computer readable medium and apparatus

Abstract

The present application relates to the technical field of integrated circuit mask splitting, and particularly relates to a layout splitting method, device, computer readable medium and equipment.The layout splitting method comprises the following steps: obtaining an initial layout, dividing the initial layout into multiple initial units according to a preset rule; classifying the initial units into large units or small units based on a preset standard; performing re-division processing on the large units to obtain sub-units; and performing operation on the small units and the sub-units and outputting a split layout.Through multiple times of division on the initial layout with large area and complex image, the initial layout is divided into smaller operation units, and then operation is performed on the operation units, so that the utilization rate of the computing resources can be effectively improved and the operation time can be effectively reduced.

Description

[Technical Field]

[0001] This invention relates to the field of integrated circuit mask splitting technology, and in particular to a layout splitting method, apparatus, computer-readable medium, and device. [Background Technology]

[0002] With the development of integrated circuit manufacturing technology, the size of layout features is constantly shrinking, the complexity of design patterns is constantly increasing, and the number of transistors is also greatly increasing within the same area. However, the resolution of photolithography has its limits. Due to the imperfections of the optical system and diffraction effects, the pattern on the mask is not completely consistent with the pattern on the photoresist. This not only affects the electrical performance of the circuit but can even lead to functional failure.

[0003] To solve this problem, a double-pattern technology, or DPT (double pattern technology), is typically used, which involves using the original mask as a template. Figure 1 By dividing it into two, the minimum spacing problem will not occur on the resulting pattern, thus avoiding the defects caused by the limit of a single exposure of the lithography machine, thereby ensuring the quality of pattern transfer.

[0004] In the optical proximity correction process, the design board Figure 1 The splitting process is crucial, as the quality of the split significantly impacts the final result. Since splitting requires calculating the spatial relationships between patterns, it necessitates extensive computation. Existing DPT splitting techniques, due to the dense layout patterns, consume significant computational resources. Furthermore, with increasingly complex designs in advanced node processes, the computation process requires multiple iterations and is highly dependent on hardware resources, resulting in a prolonged mask splitting cycle. [Summary of the Invention]

[0005] To address the issues of high computational resource consumption and long computation time in existing map partitioning operations, this invention provides a map partitioning method, apparatus, computer-readable medium, and device.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a layout splitting method, the layout splitting method comprising the following steps:

[0007] Obtain the initial layout and divide it into multiple initial units according to preset rules;

[0008] The initial units are classified into large units or small units based on preset criteria;

[0009] The large unit is further divided to obtain sub-units;

[0010] Perform calculations on the small units and sub-units and output the split layout.

[0011] Preferably, dividing the initial layout into multiple initial units according to preset rules includes the following steps:

[0012] Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics.

[0013] Adjacent graphics with a spacing less than a preset value are grouped into the same initial unit.

[0014] Preferably, the initial unit with a number of graphics and / or unit area exceeding a preset value is defined as a large unit, and vice versa.

[0015] Preferably, before further subdividing the large unit, the relationships between the graphics within the large unit are established.

[0016] Preferably, establishing the relationships between graphics within a large unit includes the following steps:

[0017] To obtain the spatial relationships of graphics within a large unit;

[0018] The graphics are marked as conflicting or non-conflicting according to preset rules.

[0019] Preferably, the process of further dividing the large unit into sub-units includes the following steps:

[0020] Get the area and number of shapes in the large unit;

[0021] Large units whose area and / or number of graphics meet a preset threshold are further divided into sub-units.

[0022] Preferably, performing calculations on the small units and sub-units and outputting the split layout includes the following steps:

[0023] Perform graphical logical operations on small units and sub-units;

[0024] Summarize the calculation results of all units;

[0025] The graphical spatial relationships of the initial layout are updated based on the calculation results;

[0026] The initial layout is split into two mask layouts based on the updated initial layout's spatial relationships.

[0027] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a layout splitting device, the layout splitting device comprising the following modules:

[0028] Acquisition module: Used to acquire the initial layout;

[0029] Division module: Used to divide the initial layout into preset units;

[0030] Processing module: Used to perform calculations on the units and generate a split layout.

[0031] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a computer-readable storage medium storing computer program instructions thereon, wherein the computer program instructions, when executed, implement the layout splitting method as described in any of the preceding claims.

[0032] To solve the above-mentioned technical problems, the present invention provides another technical solution as follows: a computer device, including a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the layout splitting method as described in any of the preceding claims.

[0033] Compared with the prior art, the layout splitting method, apparatus, computer-readable medium, and device provided by the present invention have the following beneficial effects:

[0034] 1. A layout splitting method provided by an embodiment of the present invention includes the following steps:

[0035] Obtain the initial layout and divide it into multiple initial units according to preset rules;

[0036] The initial units are classified into large units or small units based on preset criteria;

[0037] The large unit is further divided to obtain sub-units;

[0038] Perform calculations on the small units and sub-units and output the split layout.

[0039] By dividing the initial layout into multiple small computational units and then performing operations on these units, the utilization rate of computing resources can be effectively improved and the computation time can be effectively reduced.

[0040] 2. The embodiment of the present invention divides the initial layout into multiple initial units according to preset rules, including the following steps:

[0041] Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics.

[0042] Adjacent graphics with a spacing less than a preset value are grouped into the same initial unit.

[0043] Using graphic spacing as an indicator, the initial layout is divided into multiple computational units, which improves computational efficiency and provides a basis for subsequent layout re-division.

[0044] 3. In this embodiment of the invention, initial units with a number of graphics and / or unit area exceeding a preset value are defined as large units, and vice versa. The initial units are divided based on indicators affecting computation speed and time, such as the number of graphics and area, into fast-computing small units and slow-computing large units, providing targets for subsequent layout re-division.

[0045] 4. In this embodiment of the invention, before further subdividing large units, the relationships between graphics within the large units are established. The relationships between graphics within the large units are marked in advance to prevent conflicting graphics from being assigned to the same layout for photolithography.

[0046] 5. In this embodiment of the invention, the large unit is further divided to obtain sub-units, including the following steps:

[0047] Get the area and number of shapes in the large unit;

[0048] Large units whose area and / or number of graphics meet a preset threshold are further divided into sub-units.

[0049] By dividing the graphics within a large unit, smaller sub-units that require less computational resources are obtained, thereby further improving computational utilization and reducing computation time.

[0050] 6. The embodiment of the present invention performs calculations on the small units and sub-units and outputs the split layout, including the following steps:

[0051] Perform graphical logical operations on small units and sub-units;

[0052] Summarize the calculation results of all units;

[0053] The graphical spatial relationships of the initial layout are updated based on the calculation results;

[0054] The initial layout is split into two mask layouts based on the updated initial layout's spatial relationships.

[0055] By dividing the layout multiple times, the computational resources and computation time required by the units that finally enter the computation step are smaller and more evenly distributed, thus improving the overall computational efficiency.

[0056] 7. This invention also provides a layout splitting device, comprising the following modules:

[0057] Acquisition module: Used to acquire the initial layout;

[0058] Division module: Used to divide the initial layout into preset units;

[0059] Processing module: Used to perform calculations on the units and generate a split layout.

[0060] The layout splitting device has the same beneficial effects as the layout splitting method described above, and will not be repeated here.

[0061] 8. Embodiments of the present invention also provide a computer-readable storage medium storing computer program instructions thereon, which, when executed, implement the layout partitioning method as described in any of the preceding claims. The computer-readable storage medium has the same beneficial effects as the aforementioned layout partitioning method, and will not be repeated here.

[0062] 9. Embodiments of the present invention also provide a computer device, including a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the layout partitioning method as described in any of the preceding embodiments. The computer device has the same beneficial effects as the above-described layout partitioning method, and will not be repeated here. [Attached Image Description]

[0063] Figure 1 This is a flowchart of the layout splitting method provided in an embodiment of the present invention.

[0064] Figure 2 This is a flowchart of the initial unit division provided in an embodiment of the present invention.

[0065] Figure 3 This is a flowchart of a graphic conflict marker provided in an embodiment of the present invention.

[0066] Figure 4 This is a flowchart of the large unit re-division provided in the embodiments of the present invention.

[0067] Figure 5 This is a flowchart of unit operation and split layout output provided in the embodiments of the present invention.

[0068] Figure 6 This is a schematic diagram of the layout splitting device provided in an embodiment of the present invention.

[0069] Figure 7 This is a schematic diagram of the computer device structure provided in an embodiment of the present invention.

[0070] Explanation of reference numerals in the attached diagram:

[0071] 100. Layout splitting device; 110. Acquisition module; 120. Division module; 130. Processing module;

[0072] 200. Computer equipment; 210. Memory; 220. Input device; 230. Processor; 240. Output device.

Detailed Implementation Methods

[0073] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0074] In the embodiments provided by this invention, it should be understood that "B corresponding to A" means that B is associated with A, and B can be determined based on A. However, it should also be understood that determining B based on A does not mean determining B solely based on A; B can also be determined based on A and / or other information.

[0075] It should be understood that the phrase "one embodiment" or "an embodiment" throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the invention. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Those skilled in the art should also recognize that the embodiments described in the specification are optional embodiments, and the actions and modules involved are not necessarily essential to the invention.

[0076] In various embodiments of the present invention, it should be understood that the sequence number of each process does not necessarily imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0077] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, or they may sometimes be executed in reverse order, depending on the functions involved. It is particularly important to note that each block in a block diagram and / or flowchart, and combinations of blocks in block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.

[0078] Please see Figure 1 The first embodiment of the present invention provides a layout splitting method including the following steps:

[0079] S1: Obtain the initial layout and divide the initial layout into multiple initial units according to preset rules;

[0080] S2: Classify the initial units into large units or small units based on preset standards;

[0081] S3: Further divide the large unit to obtain sub-units;

[0082] S4: Perform calculations on the small units and sub-units and output the split layout.

[0083] It should be noted that processing a large area layout with a large number of images consumes significant computing resources and is time-consuming. Furthermore, due to the current resolution of lithography, some dense patterns cannot be etched onto a single mask because the spacing between the patterns is smaller than the minimum resolution that the lithography machine can resolve. Therefore, the DPT (Distributed Photolithography) technique is typically used to split the layout into two masks. This ensures that the minimum spacing issue does not exist between the patterns on each mask, thus avoiding defects that may occur within the limits of a single exposure of the lithography machine and guaranteeing the quality of pattern transfer.

[0084] Specifically, in a specific embodiment of the present invention, the initial layout is divided multiple times to obtain multiple unit layouts. The graphics at different locations are grouped using their spatial relationships, and the grouped graphics are then processed to obtain two mask layouts that achieve relative density balance and do not have a minimum spacing problem. It should be understood that any method of splitting based on the design layout should be considered an alternative to this solution.

[0085] Understandably, by dividing the initial layout multiple times, the initial layout is divided into multiple computing units that consume less computing resources and have shorter computing time, thereby effectively improving computing efficiency and reducing computing time.

[0086] For further details, please refer to Figure 2 Dividing the initial layout into multiple initial units according to preset rules includes the following steps:

[0087] S11: Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics.

[0088] S12: Divide adjacent graphics with a spacing less than the preset value into the same initial unit.

[0089] It should be noted that the spatial relationships of graphics include the shape and size of the graphics, the distance between the graphics, and the position of the graphics on the map.

[0090] Understandably, obtaining the spatial relationships of the initial layout primarily involves acquiring the distance relationships between the graphics. The layout is initially divided using the graphic spacing as an indicator. A preset value is set as the criterion to divide the initial layout into multiple initial units. In this embodiment, the preset value is set to 300nm. The initial layout is divided into multiple initial units based on whether the graphic spacing is less than 300nm. Performing calculations on units improves computational efficiency and provides a basis for subsequent re-division of the layout.

[0091] Specifically, the preset values ​​can be 200, 250, 300, 350, 400, etc. The above data are only a partial list for illustration. The specific values ​​can be set according to the actual situation, and no further restrictions are imposed here.

[0092] Furthermore, initial cells with a number of graphics and / or an area exceeding a preset value are defined as large cells, and those with less are defined as small cells.

[0093] It's important to note that due to the complexity of the layout design, the graphics are not uniformly distributed throughout the entire layout; the density of graphics varies across different areas. Therefore, the graphic density within each initial unit differs, resulting in varying unit sizes. It should be understood that smaller units will be processed more quickly in subsequent logical operations, while larger units will consume more resources and time in logical operations.

[0094] Specifically, preset values ​​are defined for the number of graphics and the area of ​​each graphic. When the number of graphics and / or the area of ​​the initial unit exceed the preset values, the initial unit is defined as a large unit; when both the number of graphics and the area of ​​the initial unit are less than the preset values, the initial unit is defined as a small unit. The range of preset values ​​is not limited here and can be adjusted according to actual needs.

[0095] Understandably, large units are essentially areas with a denser distribution of graphics in the initial block. Due to the density of graphics, they will occupy more computing resources and require longer processing time in subsequent logical operations. Conversely, small units are areas with a sparser distribution of graphics in the initial block, so the logical operation processing speed of small units will be faster.

[0096] Specifically, this method roughly divides the initial unit into large and small units, providing targets for subsequent map subdivision.

[0097] Furthermore, before further subdividing the large units, the relationships between the graphics within the large units are established.

[0098] Specifically, because the patterns within a large unit are densely distributed, the spacing between patterns may even be less than the lithographic limit. Therefore, before dividing the patterns within a large unit, it is necessary to identify the relationships between the patterns to provide a basis for the final pattern splitting. It should be understood that implementing conflict identification does not participate in the unit division process.

[0099] Further, please refer to Figure 3 Establishing the relationships between graphics within a large unit includes the following steps:

[0100] S31: Obtain the spatial relationships of graphics within a large unit;

[0101] S32: Mark the graphics as conflict or non-conflict according to preset rules.

[0102] It should be noted that the patterns within a large unit are densely distributed. When the spacing between these patterns is less than the lithographic limit, the pattern cannot be lithographically reproduced. Therefore, it is necessary to mark these patterns to prevent conflicting patterns from being assigned to the same mask during layout splitting, which could lead to lithographic failure due to patterns smaller than the lithographic limit appearing on the lithographic layout.

[0103] In one feasible implementation, a conflict spacing is first preset. This conflict spacing is used to define whether graphics conflict, and the result is marked. It should be understood that the marking of whether graphics conflict or not will be retained in subsequent graphic logic operations, only serving as an indicator to determine whether the adjacent edges of adjacent graphics are too close, and does not participate in the calculation process.

[0104] For further details, please refer to Figure 4 The process of further dividing large units to obtain sub-units includes the following steps:

[0105] S33: Get the area and number of shapes in the large unit;

[0106] S34: Divide large units whose area and / or number of graphics meet a preset threshold into sub-units.

[0107] In one feasible implementation, large units are further subdivided based on their area and the number of graphics. Specifically, large units with an area greater than 15µm or a number of graphics greater than 100,000 are re-divided, i.e., further subdivided. This involves dividing large units that meet either of the aforementioned two conditions into two sub-units. Furthermore, if the area of ​​a large unit is less than 15µm and the number of graphics is less than 100,000, the large unit is re-divided into smaller units for subsequent calculations.

[0108] Understandably, the number of graphics and the size of the cells are important factors affecting the speed of graphics logic operations. Dividing large cells into multiple smaller sub-cells based on the number of graphics and cell size further improves computational utilization and reduces computation time.

[0109] For further details, please refer to Figure 5 The process of performing calculations on the small units and sub-units and outputting the split layout includes the following steps:

[0110] S41: Perform graphical logical operations on small units and sub-units;

[0111] S42: Summarize the calculation results of all units;

[0112] S43: Update the graphic spatial relationships of the initial layout based on the calculation results;

[0113] S44: Split the initial layout into two mask layouts based on the updated initial layout graphic space relationships.

[0114] Understandably, by dividing the data multiple times to obtain multiple small units and sub-units to share the computation of different nodes, the computational resources and computation time required by the units that finally enter the computation step are relatively small and relatively even. At the same time, the units are operated in parallel, which reduces the overall computation time and improves the computational efficiency. Furthermore, the computational units are reorganized according to the computation results to obtain two relatively balanced mask patterns.

[0115] For further details, please refer to Figure 6 This invention also provides a layout splitting device 100, comprising the following modules:

[0116] Module 110: Used to obtain the initial layout;

[0117] Division module 120: used to divide the initial layout into preset units;

[0118] Processing module 130: Used to perform calculations on the cells and generate a split layout.

[0119] Understandably, after the acquisition module 110 acquires the initial layout, it assigns the initial layout to the partitioning module 120. The partitioning module 120 divides it into multiple preset units according to certain rules. Finally, the processing module 130 processes the preset units to obtain two mask layouts.

[0120] Specifically, the layout splitting device 100 has the same beneficial effects as the layout splitting method described above, and will not be repeated here.

[0121] For further details, please refer to Figure 7The present invention also provides a computer device 200, including a memory 210, a processor 230 and a computer program stored on the memory 210, wherein the processor 230 executes the computer program to implement the layout splitting method as described in any of the preceding claims.

[0122] In one possible implementation, the number of processors 230 in this invention can be one or more.

[0123] In another feasible implementation, the computer device 200 may further include an input device 220 and an output device 240, wherein the memory 210, the processor 230, the input device 220 and the output device 240 may be electrically connected or connected in other ways, without specific limitations.

[0124] It should be noted that the memory 210, as a computer-readable storage medium, can be used to store software programs, computer-executable programs, and various modules. For example, the program or module corresponding to the layout splitting method of this invention. The processor 230 executes various functional applications and data processing of the computer device 200 by running the software, computer-executable programs, or various modules stored in the memory 210.

[0125] Understandably, input device 220 can be used to receive input numbers, graphics, or signals. Output device 240 can be a display device including a screen, such as a computer or mobile phone.

[0126] Specifically, the computer device 200 has the same beneficial effects as the above-described layout splitting method, which will not be repeated here.

[0127] Furthermore, embodiments of the present invention also provide a computer-readable storage medium having stored thereon computer program instructions, which, when executed, implement the layout splitting method as described in any of the preceding claims.

[0128] It should be understood that the computer-readable storage medium has the same beneficial effects as the above-described layout splitting method, and will not be described again here.

[0129] Compared with the prior art, the layout splitting method, apparatus, computer-readable medium, and device provided by the present invention have the following beneficial effects:

[0130] 1. A layout splitting method provided by an embodiment of the present invention includes the following steps:

[0131] Obtain the initial layout and divide it into multiple initial units according to preset rules;

[0132] The initial units are classified into large units or small units based on preset criteria;

[0133] The large unit is further divided to obtain sub-units;

[0134] Perform calculations on the small units and sub-units and output the split layout.

[0135] By dividing the initial layout into multiple small computational units and then performing operations on these units, the utilization rate of computing resources can be effectively improved and the computation time can be effectively reduced.

[0136] 2. The embodiment of the present invention divides the initial layout into multiple initial units according to preset rules, including the following steps:

[0137] Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics.

[0138] Adjacent graphics with a spacing less than a preset value are grouped into the same initial unit.

[0139] Using graphic spacing as an indicator, the initial layout is divided into multiple computational units, which improves computational efficiency and provides a basis for subsequent layout re-division.

[0140] 3. In this embodiment of the invention, initial units with a number of graphics and / or an area exceeding a preset value are defined as large units, and those with fewer graphics are defined as small units. The initial units are divided based on indicators affecting computation speed and time, such as the number of graphics and area, into small units with fast computation speed and large units with slow computation speed, providing targets for subsequent layout re-division.

[0141] 4. In this embodiment of the invention, before further subdividing large units, the relationships between graphics within the large units are established. The relationships between graphics within the large units are marked in advance to prevent conflicting graphics from being assigned to the same layout for photolithography.

[0142] 5. In this embodiment of the invention, the large unit is further divided to obtain sub-units, including the following steps:

[0143] Get the area and number of shapes in the large unit;

[0144] Large units whose area and / or number of graphics meet a preset threshold are further divided into sub-units.

[0145] By dividing the graphics within a large unit, smaller sub-units that require less computational resources are obtained, thereby further improving computational utilization and reducing computation time.

[0146] 6. The embodiment of the present invention performs calculations on the small units and sub-units and outputs the split layout, including the following steps:

[0147] Perform graphical logical operations on small units and sub-units;

[0148] Summarize the calculation results of all units;

[0149] The graphical spatial relationships of the initial layout are updated based on the calculation results;

[0150] The initial layout is split into two mask layouts based on the updated initial layout's spatial relationships.

[0151] By dividing the layout multiple times, the computational resources and computation time required by the units that finally enter the computation step are smaller and more evenly distributed, thus improving the overall computational efficiency.

[0152] 7. This invention also provides a layout splitting device, comprising the following modules:

[0153] Acquisition module: Used to acquire the initial layout;

[0154] Division module: Used to divide the initial layout into preset units;

[0155] Processing module: Used to perform calculations on the units and generate a split layout.

[0156] The layout splitting device has the same beneficial effects as the layout splitting method described above, and will not be repeated here.

[0157] 8. Embodiments of the present invention also provide a computer-readable storage medium storing computer program instructions thereon, which, when executed, implement the layout partitioning method as described in any of the preceding claims. The computer-readable storage medium has the same beneficial effects as the aforementioned layout partitioning method, and will not be repeated here.

[0158] 9. Embodiments of the present invention also provide a computer device, including a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the layout partitioning method as described in any of the preceding embodiments. The computer device has the same beneficial effects as the above-described layout partitioning method, and will not be repeated here.

[0159] The foregoing has provided a detailed description of a layout splitting method, apparatus, computer-readable medium, and device disclosed in the embodiments of the present invention. Specific examples have been used to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. At the same time, for those skilled in the art, there will be changes in specific implementation methods and application scope based on the ideas of the present invention. Therefore, the content of this specification should not be construed as a limitation of the present invention. Any modifications, equivalent substitutions, and improvements made within the principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for partitioning a map, characterized in that: The map splitting method includes the following steps: Obtain the initial layout and divide it into multiple initial units according to preset rules; The initial units are classified into large units or small units based on preset criteria; The large unit is further divided to obtain sub-units; Perform calculations on the small units and sub-units and output the split layout; Dividing the initial layout into multiple initial units according to preset rules includes the following steps: Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics. Adjacent graphics with a spacing less than a preset value are grouped into the same initial unit; The initial unit with a number of graphics and / or unit area exceeding a preset value is defined as a large unit, and vice versa.

2. The layout splitting method as described in claim 1, characterized in that: Before further dividing the large unit, establish the relationships between the graphics within the large unit.

3. The layout splitting method as described in claim 2, characterized in that: Establishing the relationships between graphics within a large unit includes the following steps: To obtain the spatial relationships of graphics within a large unit; The graphics are marked as conflicting or non-conflicting according to preset rules.

4. The layout splitting method as described in claim 1, characterized in that: The process of further dividing large units to obtain sub-units includes the following steps: Get the area and number of shapes in the large unit; Large units whose area and / or number of graphics meet a preset threshold are further divided into sub-units.

5. The layout splitting method as described in claim 1, characterized in that: Performing calculations on the small units and sub-units and outputting the split layout includes the following steps: Perform graphical logical operations on small units and sub-units; Summarize the calculation results of all units; The graphical spatial relationships of the initial layout are updated based on the calculation results; The initial layout is split into two mask layouts based on the updated initial layout's spatial relationships.

6. A layout splitting device, characterized in that: Includes the following modules: Acquisition module: Used to acquire the initial layout; The partitioning module is used to divide the initial layout into multiple initial units according to preset rules, classify the initial units into large units or small units based on preset standards, and further partition the large units to obtain sub-units. Dividing the initial layout into multiple initial units according to preset rules includes the following steps: Scan the initial layout to obtain the spatial relationships of the graphics, including the spacing between graphics. Adjacent graphics with a spacing less than a preset value are grouped into the same initial unit; The initial unit with a number of graphics and / or unit area exceeding a preset value is defined as a large unit, and the other is defined as a small unit. Processing module: Used to perform calculations on the units and generate a split layout.

7. A computer-readable storage medium, characterized in that: It stores computer program instructions, which, when executed, implement the layout splitting method as described in any one of claims 1-5.

8. A computer device, characterized in that: It includes a memory, a processor, and a computer program stored in the memory, wherein the processor executes the computer program to implement the layout splitting method as described in any one of claims 1-5.

Images