Measuring device

Abstract

The present invention solves the problem of providing a measuring device that can more accurately measure the flatness of a measurement object even when the shape of the measurement object is relatively thin. The present invention is a measuring device (20) that measures a disk (10) and includes an A-surface measuring section (23) that measures the A-surface of the disk (10), and a first conveying section (24) that conveys the disk (10). The A-surface measuring section (23) includes a measurement reference surface (61a) that is inclined at an inclination angle θ with respect to the vertical direction. The first conveying section (24) includes a holding section (81) that holds the disk (10) in a manner such that the disk (10) is parallel to the measurement reference surface (61a). The holding section (81) holds the disk (10) and moves the disk (10) in the vertical direction while holding the disk (10) in an inclined attitude at the inclination angle θ, and also performs the uploading and downloading of the disk (10) to and from the A-surface measuring section (23).

Description

Technical Field

[0001] This invention relates to a measuring device for measuring objects having a plate-like shape. Background Technology

[0002] As a measuring device of this type, it has been disclosed Figure 13 The apparatus shown in (a) and (b) (see Patent Document 1) includes: a base 1; a measuring stage 2 disposed on the base 1 for horizontally holding a measurement object D, such as a disc-shaped dish, thereon; and a sensor 3. The measuring apparatus is configured to measure the surface flatness of the measurement object D by moving the sensor in a non-contact manner parallel to the surface of the measurement object D held on the measuring stage 2.

[0003] Reference List

[0004] Patent documents

[0005] Patent Document 1: JPH11-183115A Summary of the Invention

[0006] Technical issues

[0007] However, in the measuring device disclosed in Patent Document 1, since the object being measured, D, is held horizontally on the measuring platform 2, the direction of gravity causes D to sag. In other words, D sags due to its own weight. When the object D is relatively thick and the sag caused by its own weight is small, it can be measured well. However, when the object D is relatively thin, the sag caused by its own weight is large, causing D to deform, thus making it impossible to accurately measure flatness.

[0008] To address the aforementioned problems, the present invention aims to provide a measuring device that can accurately measure the flatness of a measuring object even when the object being measured is relatively thin.

[0009] Problem Solution

[0010] (1) The measuring device of the present invention is a measuring device for measuring an object, comprising: a measuring element for measuring the shape of at least one of the front or back sides of the object; and a conveying element for conveying the object. The measuring element includes a measuring reference surface tilted at a predetermined angle relative to the vertical direction. The conveying element includes a holding portion for holding the object in a manner that makes the object parallel to the measuring reference surface. While maintaining the object tilted at the predetermined angle, the holding portion uploads the object to the measuring element or downloads it from the measuring element.

[0011] (2) The measuring device of the present invention is the measuring device described in (1), wherein the transmitting element includes an upload holding part for uploading the measuring object to the measuring element and a download holding part for downloading the measuring object from the measuring element.

[0012] (3) The measuring device of the present invention is the measuring device described in (1) or (2), wherein when the transmitting element transmits the measuring object toward the measuring element, the measuring object is transmitted parallel to the measuring reference plane.

[0013] (4) The measuring device of the present invention is the measuring device described in (1), wherein the measuring elements include a first measuring element and a second measuring element arranged opposite to each other.

[0014] (5) The measuring device of the present invention is the measuring device described in (4), wherein the transmitting element includes a first transmitting element that transmits the measuring object toward the first measuring element and a second transmitting element that transmits the measuring object toward the second measuring element, and the transmitting direction of the first transmitting element and the transmitting direction of the second transmitting element are opposite to each other.

[0015] (6) The measuring device of the present invention is any one of (1) to (5) and includes a junction for switching between the vertical posture of the measuring object set in the vertical direction and the tilted posture of the measuring object tilted at a predetermined angle relative to the vertical direction.

[0016] (7) The measuring device of the present invention is the measuring device described in (1), including a driving element for driving the transmission element, the driving element being disposed below the measuring element along the vertical direction.

[0017] (8) The measuring device of the present invention is the measuring device described in (1), wherein the conveying element is configured to reciprocate along the horizontal direction and in a direction perpendicular to the measuring reference plane, and the measuring object is conveyed by the conveying element from the inlet side to the outlet side of the measuring device while keeping the main surface of the measuring object facing the measuring reference plane.

[0018] (9) The measuring device of the present invention is the measuring device described in (1), wherein the measuring object has a through hole extending along the thickness direction, and the holding part holds the inner wall portion of the through hole.

[0019] (10) The measuring device of the present invention is the measuring device described in (1), wherein the measuring reference surface includes a support member supporting the measuring object and a fixed support that contacts the measuring object supported by the support member.

[0020] According to the measuring apparatus of the present invention as described in (1), the measuring apparatus includes: a measuring element for measuring the shape of at least one of the front or back sides of the object being measured; and a conveying element for conveying the object being measured. The measuring element includes a measuring reference surface tilted at a predetermined angle relative to the vertical direction. The conveying element includes a holding portion for holding the object being measured in a manner that makes the object being measured parallel to the measuring reference surface. The holding portion, while maintaining the orientation of the object being tilted at the predetermined angle, uploads the object being measured to the measuring element or downloads it from the measuring element.

[0021] This configuration solves the problems of existing measuring devices by effectively suppressing the sagging of the object being measured due to holding it horizontally on the measuring platform, and also addresses the issue of decreased flatness measurement accuracy when the object is thin. According to this setup, since the object is held at a predetermined angle of inclination and the shape of at least one of its front or back is measured, sagging caused by the object's own weight can be suppressed, and the shape of the object can be measured more accurately.

[0022] Furthermore, the holding unit is configured to upload or download the object to the measuring element while maintaining the object in a tilted posture at the predetermined angle. This configuration allows for highly accurate maintenance of the tilted posture and smooth uploading and downloading of the object to the measuring element. Additionally, it suppresses the effects of sagging due to the weight of the object and stabilizes its posture when placed within the measuring device.

[0023] According to the measuring device of the present invention described in (2), the upload and transfer unit uploads the object to be measured to the measuring element, and the download and transfer unit downloads the object to be measured from the measuring element. This configuration allows for rapid transmission of the object, smooth uploading and downloading of the object to the measuring element, and efficient transmission of the object.

[0024] According to the measuring device of the present invention described in (3), when the conveying element conveys the object to be measured toward the measuring element, the object to be measured is conveyed parallel to the measuring reference plane. With this configuration, a large number of objects to be measured can be effectively conveyed without generating excessive stress on the objects, and a large number of objects to be measured can be measured quickly.

[0025] According to the measuring device of the present invention as described in (4), the measuring elements include a first measuring element and a second measuring element disposed opposite to each other. This reduces the component placement space of the measuring device and decreases its overall size.

[0026] According to the measuring device of the present invention as described in (5), the conveying element includes a first conveying element that conveys the object to be measured toward the first measuring element and a second conveying element that conveys the object to be measured toward the second measuring element, and the conveying direction of the first conveying element and the conveying direction of the second conveying element are opposite to each other. This configuration reduces the installation space required for the first conveying element and the first measuring element, as well as the installation space required for the second conveying element and the second measuring element, and also reduces the size of the measuring device.

[0027] According to the measuring device of the present invention as described in (6), the measuring device includes a junction that converts the vertical posture of the object being measured along the vertical direction to an inclined posture of the object being measured at a predetermined angle relative to the vertical direction. With this configuration, the junction can smoothly convert the vertical posture of the object being transported to an inclined posture, and the junction can also smoothly convert the inclined posture of the object being transported to a vertical posture. Thus, the measuring device does not need to perform a conversion process from the transport section to the inclined posture, which can suppress the generation of excessive stress on the object being measured during transport and stabilize the posture of the object being measured when it is placed in the measuring device.

[0028] According to the measuring device of the present invention as described in (7), the measuring device includes a driving element for driving the transmission element, the driving element being disposed below the measuring element along the vertical direction. With this configuration, fine dust generated by the driving element is less likely to adhere to the substrate or other components of the measuring element, and the substrate or other components are less likely to be contaminated.

[0029] According to the measuring apparatus of the present invention described in (8), since the conveying element is configured to reciprocate in both the horizontal direction and the direction perpendicular to the measuring reference plane, the measuring object can be conveyed quickly and efficiently. Furthermore, since the conveying element conveys the measuring object from the inlet side to the outlet side of the measuring apparatus while keeping the main surface of the measuring object facing the measuring reference plane, a large number of measuring objects can be measured and conveyed quickly without unnecessary movement.

[0030] According to the measuring device of the present invention described in (9), since the measuring object has a through hole extending along the thickness direction and the holding part holds the inner wall of the through hole, the measuring object can be stably held, and excessive stress is not generated on the measuring object in the tilted state.

[0031] According to the measuring device of the present invention described in (10), since the measuring reference surface includes a support member supporting the measuring object and a fixed support, the deflection of the measuring object can be suppressed, the measuring object can be kept still, and its posture can be stabilized, thereby improving the flatness measurement accuracy.

[0032] Invention Effects

[0033] According to the present invention, a measuring device is provided that can accurately measure the flatness of a measuring object even when the object being measured is relatively thin. Attached Figure Description

[0034] Figure 1 The diagram shows a disc measured using the measuring apparatus of the first to third embodiments of the present invention, wherein... Figure 1 Image (a) in the image is a three-dimensional view of the disc. Figure 1 (b) in the figure is a cross-sectional view of the disc.

[0035] Figure 2 This is a process diagram illustrating the manufacturing process of the disc according to the first to third embodiments of the present invention.

[0036] Figure 3 This is a schematic diagram of the measuring device according to the first embodiment of the present invention.

[0037] Figure 4 This is a front view of the measuring device according to the first embodiment of the present invention.

[0038] Figure 5 This is a schematic diagram of the measuring device according to the first embodiment of the present invention, wherein, Figure 5 (a) in the figure is an enlarged front view of the measuring device. Figure 5 (b) in the figure is an enlarged side view of the measuring device.

[0039] Figure 6 This is a schematic diagram of the measuring device according to the first embodiment of the present invention, wherein, Figure 6 Image (a) shows the disk holding part of the robot's transfer unit and a front view of the disk. Figure 6 Image (b) shows the disk holding part of the robot's transfer unit and a side view of the disk. Figure 6 (c) is a front view of the disc support and fixing bracket, located on one side of the measurement reference plane of the A-side measurement section, and the disc itself. Figure 6 (d) in the figure is a side view of the disc support and the disc located on one side of the measurement reference plane of the measuring part on surface A. Figure 6 (e) in the figure is a front view of the holding part of the upload or download transfer mechanism and the disc. Figure 6 (f) in the figure is a side view of the holding part of the upload or download mechanism and the disc.

[0040] Figure 7 This is a schematic diagram of the operation of the measuring device according to the first embodiment of the present invention, wherein, Figure 7 (1) shows the holding unit in a waiting state, separated from the disc. Figure 7 (2) shows the state where the holding part is close to the disc. Figure 7 (3) shows the state where the holding part moves upward. Figure 7 (4) shows the state in which the holding part holds the disc.

[0041] Figure 8 This is a schematic diagram of the operation of the measuring device according to the first embodiment of the present invention, wherein, Figure 8 Image (a) shows the state in which the disk holding part of the robot transfer unit hands the disk over to the inlet-side handover part. Figure 8 Image (b) shows the state where the entry-side junction hands the disc to the upload transfer mechanism of the first transfer unit. Figure 8 (c) shows the state in which the loading and transfer mechanism loads the disc to the disc holding section of the A-side measuring section.

[0042] Figure 9 This is a schematic diagram of the operation of the measuring device according to the first embodiment of the present invention, wherein, Figure 9 Image (a) shows the state where the loading and conveying mechanism of the first conveying unit is away from the measuring unit on surface A. Figure 9 (b) shows the state after the first conveyor unit's loading and conveying mechanism approaches the A-side measuring unit and loads the disc onto the disc holding part of the A-side measuring unit.

[0043] Figure 10 This is a schematic diagram of the operation of the measuring device according to the first embodiment of the present invention, wherein, Figure 10 Image (a) shows the state of the A-side measuring unit after the sensor is near the inlet-side junction and measures the A-side of the disc. Figure 10 Image (b) shows the state in which the download transfer mechanism of the first transfer unit hands the disc to the exit-side handover unit. Figure 10 (c) shows the state in which the exit-side transfer section hands the disc to the disc holding section of the third transfer section.

[0044] Figure 11 This is a schematic diagram of the measuring device according to the second embodiment of the present invention.

[0045] Figure 12 This is a schematic diagram of the measuring device according to the third embodiment of the present invention.

[0046] Figure 13 The diagram shows an existing measuring device, in which, Figure 13 (a) in the figure is a three-dimensional view of the measuring device. Figure 13(b) in the figure is a plan view of the measuring device.

[0047] List of reference numerals

[0048] 10 discs (object of measurement)

[0049] 11A Surface Measurement Unit

[0050] 12 B-side measurement units

[0051] 13. Forward and reverse flipping mechanism

[0052] 14. Tilting State Conversion Mechanism

[0053] 14a, 51 Entrance Side Intersection (Intersection)

[0054] 14b, 52 Exit-side junction (junction)

[0055] 20, 20A, 20B Measuring Devices

[0056] 21st Robotic Transport Department

[0057] 22 First handover section (handover section)

[0058] 23A Surface Measurement Unit (Measuring Element, First Measuring Element)

[0059] 24 First transmission unit (transmission element, first transmission element)

[0060] 25 First drive unit (drive element)

[0061] 31 Second Robotic Transport Department

[0062] 32 Second handover section (handover section)

[0063] 33. B-side measuring section (measuring element, second measuring element)

[0064] 34 Second transmission unit (transmission element, second transmission element)

[0065] 35 Second drive unit (drive element)

[0066] 36 Third Teleportation Department

[0067] 41, 42 Conveyor Arms

[0068] 43 Disc holding section

[0069] 43a Top Connector

[0070] 43b Slotted hook

[0071] 61 Measurement Unit Body

[0072] 61a Measurement reference surface

[0073] 61b Support section

[0074] 62 Support components

[0075] 63 Sensors

[0076] 64 Fixed Shelves

[0077] 71. Upload and transfer mechanism (first upload and transfer unit)

[0078] 72. Download and transmission mechanism (Second download and transmission unit)

[0079] 81. Maintenance Department

[0080] 81a Hook (Retaining Part)

[0081] 81b Bottom plate holder (retaining part)

[0082] 81c Top plate holder (retaining part)

[0083] 81d frame

[0084] 91 Horizontal Moving Unit (Transmission Drive Unit)

[0085] 92 Width direction moving part

[0086] θ is the tilt angle (predetermined angle). Detailed Implementation

[0087] Hereinafter, with reference to the accompanying drawings, measuring devices 20, 20A, and 20B employing the measuring device of the present invention according to the first, second, and third embodiments will be described.

[0088] First, the disk 10, which is the object to be measured, is described as the measuring device 20, 20A, 20B in the first embodiment, the second embodiment, and the third embodiment. Figure 1 (a) and Figure 1 As shown in (b), the disk 10 has a disc-like shape, which has a thickness th, an outer diameter D, and a central through-hole h, the central through-hole h having an inner diameter d. It should be noted that the shape of the disk 10 is not limited to a disk and can be a shape other than a disc-like shape, such as a rectangle or an ellipse. Although the disk 10 in this embodiment, the second embodiment, and the third embodiment is a disk for a hard disk, it can also be a disk for other purposes.

[0089] The disc 10 has a thickness th of approximately 0.3 mm to 2 mm, an outer diameter D of approximately 30 mm to 270 mm, and an inner diameter d of approximately 10 mm to 70 mm. Specifically, the disc 10 has a disc shape with a thickness th selected from 1.75 mm, 1.6 mm, 1.27 mm, 1.0 mm, 0.8 mm, 0.635 mm, 0.6 mm, 0.5 mm, 0.38 mm, or 0.3 mm, an outer diameter D of 3.5 inches, 2.8 inches, or 2.5 inches, and an inner diameter d of 20 mm or 25 mm.

[0090] The disc 10 is constructed from an aluminum substrate made of an aluminum plate or aluminum alloy plate. The disc 10 has a smooth surface and high surface hardness, and possesses stiffness and impact resistance capable of suppressing vibrations caused by high-speed rotation. Furthermore, the disc 10 has, for example, the stiffness to maintain its own orientation when vertically supported by a support member inserted into the through-hole h. To possess these characteristics, the disc 10 is made of a rigid material, and may be a glass substrate made of a glass plate.

[0091] The following is for reference. Figure 2 This section briefly describes one embodiment of the manufacturing process of the disc 10.

[0092] First, the aluminum blank, which serves as the base material, is machined on a lathe, including chamfering (step S1), to form a disc with a dish shape. The formed disc is then annealed (step S2).

[0093] Next, the disk undergoes a first grinding process (step S3) and a second grinding process (step S4) to grind both sides of the disk, followed by annealing (step S5). After annealing, both sides of the disk are pretreated and electrolessly plated with nickel-phosphorus (NiP) to form a nickel-phosphorus plating layer on the disk (step S6), followed by annealing (step S7).

[0094] Next, the disc is subjected to a first polishing process (step S8) and a second polishing process (step S9) sequentially using a polishing pad to precisely polish both sides of the disc. After finishing polishing, the disc is finally cleaned and dried, thus completing disc 10 (step S10). The final cleaning may include, for example, precise ultrasonic cleaning with a cleaning agent.

[0095] After final cleaning, the flatness of all discs 10 is measured using the measuring device 20 of the first embodiment. Flatness is an evaluation value that represents the flatness of the front and back sides of the disc 10, and can be, for example, a degree value similar to the flatness defined by Japanese Industrial Standard (JIS) (JISB0621-1984).

[0096] After the overall flatness measurement, the surface of the disc 10 is inspected using a surface inspection machine (step S11). Discs 10 that are identified as defective products (step S11) are treated as defective products, while discs 10 that are identified as qualified products are first vacuum-packed (step S12), then packed into cartons (step S13), and transported to the predetermined destination.

[0097] Simultaneously, depending on the specifications of the disc 10, the disc 10 that passes the surface inspection is subject to a factory inspection (step S14). Discs 10 that pass the factory inspection are treated as defective products, while discs 10 that pass the inspection are shipped to their intended destination in predetermined packaging.

[0098] Hereinafter, the measuring device 20 of this embodiment will be described with reference to the accompanying drawings.

[0099] like Figure 3 , Figure 4 , Figure 5 As shown, the measuring device 20 includes a first robot transfer unit 21, a first transfer unit 22, an A-side measuring unit 23, a first transfer unit 24, and a first drive unit 25.

[0100] In addition, the measuring device 20 includes a third transfer unit 36, a second transfer unit 32, a second transfer unit 34, a second drive unit 35, a B-side measuring unit 33, a second robot transfer unit 31, and a controller (not shown) for controlling the operation of each component.

[0101] The measuring device 20 introduces the disk 10 from a predetermined position via the first robot transfer unit 21, and measures the shape of the front side of the disk 10, i.e., the flatness of the A side, using the A-side measuring unit 23. Subsequently, the measuring device 20 transfers the disk 10 from the A-side measuring unit 23 to the B-side measuring unit 33, and measures the shape of the back side of the disk 10, i.e., the flatness of the B side, using the B-side measuring unit 33. After this, the measuring device 20 is configured to export the measured disk 10 to a predetermined position via the second robot transfer unit 31. The measuring device 20 can operate completely automatically when introducing the disk 10 from the predetermined position, measuring the flatness of the A and B sides, and exporting the measured disk 10 to the predetermined position.

[0102] It should be noted that, in this embodiment, the first conveying section 24 and the second conveying section 34 of the measuring device 20 correspond to the first conveying element and the second conveying element constituting the conveying device of the present invention, respectively. The first junction section 22 and the second junction section 32 correspond to the junction section of the conveying device of the present invention, the A-side measuring section 23 and the B-side measuring section 33 correspond to the first measuring element and the second measuring element constituting the measuring element of the conveying device of the present invention, respectively, and the first driving section 25 and the second driving section 35 correspond to the driving element of the conveying device of the present invention.

[0103] like Figure 4As shown, the first robot transfer unit 21 includes transfer arms 41 and 42 and a disc holding unit 43. The first robot transfer unit 21 is configured to transfer the disc 10 from a predetermined position and deliver it to the entrance-side transfer unit 51.

[0104] The first robot transfer unit 21 is composed of a small multi-joint robot. This multi-joint robot may be, for example, a vertical multi-joint robot capable of taking various postures and operating over a wide range in the direction of gravity, or a horizontal multi-joint robot with a transfer arm that operates in the horizontal direction.

[0105] like Figure 6 As shown in (a) and (b), the disc holding part 43 of the first robot transfer unit 21 includes a top receiving device 43a and a slotted hook 43b, and is configured to hold the disc 10 in a vertical direction, i.e., to hold the disc 10 vertically. The slotted hook 43b of the disc holding part 43 can move up and down, and the disc holding part 43 clamps the disc 10 between the top receiving device 43a and the slotted hook 43b.

[0106] like Figure 3 As shown, the first transfer section 22 includes an inlet-side transfer section 51 and an outlet-side transfer section 52. The inlet-side transfer section 51 is located on the inlet side of the first drive section 25 and is configured to receive the disc 10 from the disc holding section 43 of the first robot transfer section 21, move it in the X direction, and deliver the disc 10 to the loading and conveying mechanism 71 of the first transfer section 24.

[0107] When holding the disc 10 received from the disc holding section 43, the inlet-side junction section 51 is configured to convert the vertical orientation of the disc 10 held vertically by the disc holding section 43 into a vertical orientation relative to the disc 10. Figure 5 (b) and Figure 6 The disc 10 is held in an inclined posture with an angle θ in the vertical direction, as shown in (c) to (f). That is, when the disc 10 held vertically by the disc holding part 43 is received, the inlet-side junction 51 tilts the disc 10 held vertically, and holds the disc 10 in an inclined posture with an angle θ. It should be noted that the angle θ in this embodiment corresponds to a predetermined angle of the measuring device of the present invention, and the angle θ is, for example, in the range of greater than 0° and less than 15°, and is preferably set to an angle of about 5° to 10°.

[0108] The exit-side transfer unit 52 is provided on the exit side of the first drive unit 25 and is configured to receive the disc 10 from the first transfer unit 24, and move along the X direction while holding the disc 10 in an inclined posture at an angle θ. Subsequently, the exit-side transfer unit 52 is configured to change the inclined posture of the disc 10 to a vertical posture and hand the disc 10 to the third transfer unit 36.

[0109] The inlet-side junction 51 and the outlet-side junction 52 have the function of converting the orientation of the disc 10 to a vertical orientation and an inclined orientation independently of the conveying mechanism described below. Therefore, they can suppress the generation of excessive stress when the disc 10 is conveyed by the conveying mechanism, so that the orientation of the disc 10, including the disc angle, is stabilized when the disc 10 is placed on the measuring device 20, and the accuracy of flatness measurement is increased.

[0110] For example, when the thickness of the disc allows it to support itself in a vertical orientation but sags due to its own weight in a horizontal orientation, stress may act on the disc 10 when the orientation changes from vertical to tilted, causing instability in the disc 10's orientation. In contrast, in this embodiment, the inlet-side junction 51 and the outlet-side junction 52 pre-change the orientation of the disc 10 and deliver the disc with the same orientation to the A-side measurement unit 23 and the B-side measurement unit 33. Therefore, it can suppress the sagging effect caused by its own weight and stabilize the orientation of the object being measured when attached to the A-side measurement unit 23 and the B-side measurement unit 33, thereby enabling more accurate measurements.

[0111] Furthermore, in this embodiment, the inlet-side junction 51 and the outlet-side junction 52 are configured to move along the X direction. However, the inlet-side junction 51 and the outlet-side junction 52 may not be configured to move along the X direction, but may only have the function of converting the orientation of the disk 10 to a vertical orientation and an inclined orientation. By conveying the disk 10 along the X direction with the drive unit of the junction, the operational efficiency of the conveying operation can be improved, especially when the distance between the first robot conveying unit 21 and the second robot conveying unit 31 and the conveying mechanism is long.

[0112] like Figure 5 As shown in (a) and (b), the A-side measuring unit 23 includes a measuring unit body 61, a support member 62, a sensor 63, a fixed support 64, and a sensor moving mechanism (not shown). The A-side measuring unit 23 is configured to hold the disc 10 on the measuring reference surface 61a of the measuring unit body 61, and move the sensor 63, which faces the measuring reference surface 61a, along the measuring reference surface 61a, thereby measuring the flatness of the A-side, which is the front side of the disc 10.

[0113] The measuring unit body 61 is equipped with a sensor moving mechanism that supports the sensor 63 and moves the sensor 63 along the measuring reference surface 61a. The measuring reference surface 61a is the surface used as a reference when measuring the flatness of the front surface of the disc 10 with the A-side measuring unit 23, and the flatness value of the measuring reference surface 61a is essentially zero. The disc 10 is supported by the support member 62 in such a way that the B-side faces the measuring reference surface 61a and the A-side is exposed.

[0114] The support member 62 is inserted into the through hole h of the disk 10 to suspend the disk 10 thereon, thereby supporting the disk 10 in a suspended state facing the measurement reference surface 61a. In this embodiment, the support member 62 is composed of a pair of components. As shown in Figures 6(c) and (d), the support member 62 includes a chamfered portion at the top corner in the vertical direction, which contacts the inner wall of the through hole h of the disk 10 (a portion of the through hole excluding the main surface of the disk). That is, the disk 10 is suspended on the chamfered portion of the support member 62.

[0115] The fixed support 64 prevents the disc 10 from rotating when it is supported by the support member 62 on the measuring reference surface 61a, and supports the disc 10 at a preset tilt angle θ. The fixed support 64 is provided on the measuring reference surface 61a. Figure 6 As shown in (c) and (d), the fixed shelf 64 includes a chamfered portion at the top corner in the vertical direction, and the chamfered portion is connected to the outer wall portion of the disc (a portion of the peripheral end face other than the main surface of the disc). Figure 6 As shown in (c), the fixed supports 64 are arranged in pairs to contact the left and right sides of the bottom of the disc 10, respectively. The fixed supports 64 maintain and stabilize the orientation of the disc 10 when it is supported by the support member 62, and also improve the flatness measurement accuracy of the sensor 63. The distance between the pair of fixed supports 64 is set such that the bottom receiving device 81b of the holding part 80 provided for each of the following upload and download mechanisms 71 and 72 can pass vertically through the space between the pair of fixed supports 64.

[0116] The sensor 63 is composed of a known sensor capable of measuring the flatness of surface A of the disc 10. The sensor 63 is moved parallel to the measurement reference plane 61a of the measuring unit body 61 by the sensor moving mechanism, and during this period, it measures the flatness of surface A of the disc 10, which is suspended on the support 62 and held on the measurement reference plane 61a.

[0117] The sensors include, for example, a laser displacement sensor capable of measuring flatness with high precision by detecting the amount of displacement of surface A of disk 10 in the height direction while the sensor moves in a non-contact manner, and an eddy current displacement sensor capable of measuring flatness with high precision by detecting the intensity of induced current flowing through the coil generated by electromagnetic induction while the sensor moves in a non-contact manner.

[0118] The sensor moving mechanism includes known drive mechanisms, such as a linear motor (not shown) that generates power in a straight line. It should be noted that the drive mechanism is not limited to mechanisms that generate power in a straight line, but may include moving mechanisms, such as rotary electric machines like motors, and conversion mechanisms such as synchronous pulleys and belts, ball screws, etc., that convert the rotational motion of the rotary electric machine into linear motion.

[0119] The first conveying unit 24 is configured to convey the disk 10 parallel to the measuring reference plane 61a when conveying the disk 10 in a manner facing the measuring unit 23 on surface A. For example... Figure 3 and Figure 4 As shown, the first transfer unit 24 is configured to reciprocate between the inlet-side junction 51 and the outlet-side junction 52 along the X direction, and is capable of transferring the disc 10 back and forth. An upload transfer mechanism 71 and a download transfer mechanism 72 are attached to the first transfer unit 24. Each of the upload transfer mechanism 71 and the download transfer mechanism 72 includes a holding part 81 for holding the disc 10. The upload transfer mechanism 71 performs the operation of receiving the disc 10 from the inlet-side junction 51 and placing the disc 10 on the measurement reference surface 61a of the measurement unit body 61. The download transfer mechanism 72 performs the operation of downloading the disc 10 from the measurement reference surface 61a of the measurement unit body 61 and handing the disc 10 to the outlet-side junction 52. The upload transfer mechanism 71 and the download transfer mechanism 72 hold and transfer the disc 10 such that the A-side of the disc 10 away from the measurement unit body 61 is exposed and the B-side of the disc 10 close to the measurement unit body 61 faces the measurement unit body 61.

[0120] like Figure 5 (a) Figure 6 As shown in (e) and (f), the retaining part 81 includes a hook 81a, a bottom plate holder 81b, a top plate holder 81c, and a frame 81d. The hook 81a is configured to insert into the through hole h of the disc 10 to suspend the inner wall of the through hole h thereon, thereby retaining the disc 10. The bottom plate holder 81b is configured to retain the disc 10 by placing the bottom of the disc 10 thereon. The top plate holder 81c is fixed to the frame 81d and configured to contact the top of the disc 10 to restrict upward movement of the disc 10. The hook 81a and the bottom plate holder 81b are integrally formed to be movable relative to the frame 81d. The hook 81a and the bottom plate holder 81b work together with the top plate holder 81c to retain the disc 10, or to release the disc 10 by movement of a moving element (not shown) in the Z and Y directions.

[0121] The upload transmission mechanism 71 and the download transmission mechanism 72 are integrally fixed to the first transmission unit 24 of the first drive unit 25, and are driven by the first transmission unit 24 along the horizontal direction (i.e. Figure 4 The first conveying unit 24 reciprocates in the X direction (as shown), and is moved by the horizontal moving part 91 of the first driving unit 25. Furthermore, the first driving unit 25 includes a width-direction moving part 92 located between the first conveying unit 24 and the horizontal moving part 91. By moving the first conveying unit 24 in the width-direction moving part 92, the loading conveying mechanism 71 and the downloading conveying mechanism 72 can be moved in a direction perpendicular to the measurement reference plane 61a (i.e.,...). Figure 5(b) shown in the figure shows the reciprocating motion in the Y direction to move closer to or further away from the measurement reference surface 61a.

[0122] The loading and conveying mechanism 71 can use the horizontal moving part 91 of the first drive part 25 to position the holding part 81 so that the holding part 81 faces the entrance-side junction part 51 (see...). Figure 7 (1)). Furthermore, the upload transfer mechanism 71 can move the holding part 81 in the Y direction via the width direction moving part 92 of the first drive part 25, insert the hook part 81a into the through hole h of the disc 10, place the bottom receiving device 81b below the disc 10, and place the top receiving device 81c facing the top of the disc 10 (see [reference]). Figure 7 (2)). Subsequently, the loading and conveying mechanism 71 can lift the hook 81a and the bottom receiving plate 81b in the Z direction (see (2)). Figure 7 (3)) and together with the top receiving device 81c, clamp and lift the dish 10, thereby receiving the dish 10 from the inlet-side junction 51 and holding it in the holding part 81 (see (3)). Figure 7 (4) in the middle.

[0123] Following this, the loading and transfer mechanism 71 moves along the X direction by the horizontal moving part 91 of the first drive part 25, positioning the holding part 81 so that it faces the measurement reference surface 61a, and moves the holding part 81 along the Y direction to bring it close to the measurement reference surface 61a of the measuring part body 61. Accordingly, the loading and transfer mechanism 71 can insert the support member 62 of the measuring part body 61 into the through hole h of the disc 10. Afterward, the loading and transfer mechanism 71 lowers the hook part 81a and the bottom receiving plate 81b along the Z direction and releases the disc 10 held by the holding part 81. Accordingly, the disc 10 is held on the measurement reference surface 61a by the support member 62 suspended in the through hole h and on the fixed support 64 that contacts the bottom of the disc 10 (see Figure 6 (c) and (d) in the text.

[0124] When the loading and conveying mechanism 71 holds the disk 10, which is held by the holding part 81, on the measuring reference surface 61a of the measuring part body 61, the first conveying part 24 moves from the outlet-side junction 52 to the inlet-side junction 51 by the horizontal moving part 91 of the first driving part 25, and the holding part 81 is positioned so that the holding part 81 faces the inlet-side junction 51. It should be noted that when the first conveying part 24 moves from the outlet-side junction 52 to the inlet-side junction 51, the sensor 63 moves from the inlet-side junction 51 side to the outlet-side junction 52 side, or from the outlet-side junction 52 side to the inlet-side junction 51 side, and the disk 10 held on the measuring reference surface 61a undergoes A-surface flatness measurement.

[0125] Similar to the upload transfer mechanism 71, the download transfer mechanism 72 includes a holding part 81. When the download transfer mechanism 72 is moved in the X direction by the horizontal moving part 91 of the first drive part 25 and the holding part 81 of the upload transfer mechanism 71 is positioned so that the holding part 81 faces the entrance-side junction part 51, the holding part 81 of the download transfer mechanism 72 is positioned so that the holding part 81 faces the measurement reference surface 61a.

[0126] With the holding part 81 positioned so that it faces the measurement reference surface 61a, the downloading and transferring mechanism 72 moves the holding part 81 along the Y direction via the width-direction moving part 92 of the first drive part 25. Then, the downloading and transferring mechanism 72 inserts the hook part 81a into the through hole h of the disc 10 held on the measurement reference surface 61a, places the bottom receiving device 81b below the disc 10, and positions the top receiving device 81c facing the top of the disc 10. Subsequently, the downloading and transferring mechanism 72 lifts the hook part 81a and the bottom receiving device 81b along the Z direction, clamping and lifting the disc 10 together with the top receiving device 81c, thereby downloading the disc 10 from the measurement reference surface 61a and holding it within the holding part 81.

[0127] Following this, the download conveying mechanism 72 moves along the X direction by the horizontal moving part 91 of the first drive part 25, and positions the holding part 81 so that it faces the exit-side junction part 52. Then, the download conveying mechanism 72 lowers the hook part 81a and the bottom receiving plate 81b along the Z direction, and releases the holding of the disc 10 by the holding part 81, which works in conjunction with the top receiving plate 81c. Accordingly, the disc 10 is held by the exit-side junction part 52.

[0128] like Figure 9 As shown, the first drive unit 25 includes a horizontal moving part 91 and a width-direction moving part 92. The horizontal moving part 91 includes a known drive mechanism, such as a linear motor (not shown) that generates power in a straight direction. It should be noted that the drive mechanism is not limited to a mechanism that generates power in a straight direction, but may include a mechanism that includes a rotary electric machine such as an electric motor and a conversion mechanism such as a synchronous pulley and synchronous belt, or a ball screw that converts the rotational motion of the rotary electric machine into linear motion.

[0129] The horizontal moving part 91 is configured to reciprocate the first conveying part 24 along the X direction. The width moving part 92 is configured to move the holding part 81 along a direction perpendicular to the measuring reference plane 61a (i.e., Figure 4 (As shown in the Y direction) moves back and forth.

[0130] like Figure 3 As shown, the disc 10 is transferred from the outlet-side junction 52 to the third transfer section 36, then to the opposite second junction 32, and then to the inlet-side junction 51 of the second junction 32.

[0131] Similar to the first transfer section 22, the second transfer section 32 includes an inlet-side transfer section 51 and an outlet-side transfer section 52, and is configured to receive the disc 10 from the third transfer section 36 via the inlet-side transfer section 51, and transfer the disc 10 to the second robot transfer section 31 via the outlet-side transfer section 52.

[0132] like Figure 3 As shown, the B-side measuring unit 33 is configured to face the A-side measuring unit 23. Consistent with the A-side measuring unit 23, the B-side measuring unit 33 includes a measuring unit body 61, a support member 62, a sensor 63, a fixed support 64, and a sensor moving mechanism (not shown). The B-side measuring unit 33 holds the disc 10 on the measuring reference surface 61a of the measuring unit body 61, and moves the sensor 63, configured to face the measuring reference surface 61a, along the measuring reference surface 61a, thereby measuring the flatness of the B-side, which is the reverse side of the disc 10.

[0133] The second transfer unit 34 is configured to transfer the disk 10 parallel to the measurement reference plane 61a when transferring the disk 10 facing the B-side measurement unit 33. Similar to the first transfer unit 24, the second transfer unit 34 is configured to reciprocate along the X-direction between the inlet-side junction 51 and the outlet-side junction 52, and is capable of transferring the disk 10 back and forth. The upload transfer mechanism 71 and the download transfer mechanism 72 are attached to the second transfer unit 34.

[0134] The upload transmission mechanism 71 and the download transmission mechanism 72 are integrally fixed to the second transmission section 34 of the second drive section 35, and are reciprocated by the second transmission section 34 in the X direction. The second transmission section 34 is moved by the horizontal movement section 91 of the second drive section 35. In addition, the second drive section 35 includes a width direction movement section 92 located between the second transmission section 34 and the horizontal movement section 91. By moving the second transmission section 34 in the width direction, the upload transmission mechanism 71 and the download transmission mechanism 72 can reciprocate in a direction perpendicular to the measurement reference plane 61a of the B-plane measurement section 33 (i.e., the Y direction) to move closer to or away from the measurement reference plane 61a.

[0135] The third transfer unit 36 ​​includes a disc holding unit (not shown) and a transfer drive unit (not shown). The disc holding unit is configured in the same manner as the disc holding unit 43 of the first robot transfer unit 21. The third transfer unit 36 ​​is configured to receive the disc 10 in a vertical orientation from the exit-side transfer unit 52, hold the disc 10 while maintaining the vertical orientation through the disc holding unit, and hand the disc 10 to the entrance-side transfer unit 51 of the second transfer unit 32.

[0136] like Figure 3 As shown, the transmission drive unit of the third transmission unit 36 ​​is configured to reciprocate the disk holding unit of the third transmission unit 36 ​​along the Y direction.

[0137] The controller includes a central processing unit that performs operation processing and a memory that stores control programs, and is configured to control the operation of various components of the measuring device 20, namely, the operation of receiving the disc 10 from the first robot transfer unit 21, the operation of measuring the flatness of the A and B surfaces of the disc 10, and the operation of delivering the disc 10 to the second robot transfer unit 31 after measurement.

[0138] Hereinafter, the operation of the measuring device 20 of this embodiment will be described with reference to the accompanying drawings.

[0139] It should be noted that since the operation of each component of the measuring device 20 is controlled by the controller, the following mainly describes the operation of each component, and omits the description of the controller's control over the operation of each component. All operations of each component of the measuring device 20 are executed automatically.

[0140] First, the measuring device 20 measures the flatness of the A-side of the disc 10 using the A-side measuring unit 23, and then measures the flatness of the B-side of the disc 10 using the B-side measuring unit 33.

[0141] (Measurement of the flatness of surface A)

[0142] In the measuring device 20, firstly, the disc 10, which is in a predetermined position, is... Figure 3 The disc holding part 43 of the first robot transfer unit 21 shown is held in Figure 6 The vertical orientation shown in (a) and (b) is then moved from the predetermined position along the X, Y and Z directions and transmitted to the entrance-side junction 51 of the first junction 22.

[0143] like Figure 8 As shown in (a), the delivered disc 10 is delivered from the disc holding part 43 to the entrance side connection part 51 of the first connection part 22. During the delivery process, the disc 10 is converted to an inclined posture with the disc 10 tilted at, for example, 5° relative to the vertical direction, and then held by the entrance side connection part 51 of the first connection part 22.

[0144] Subsequently, as Figure 8 As shown in (b), the entrance-side junction 51 moves along the X direction from the horizontal moving part 91 to the loading and conveying mechanism 71 of the first conveying part 24, and then the disc 10 is handed from the entrance-side junction 51 to the holding part 81 of the loading and conveying mechanism 71. At the same time, the delivered disc 10 is held in an inclined position.

[0145] Then, the first conveyor unit 24 moves along the X direction by the horizontal moving unit 91, and as... Figure 8 (c) and Figure 9As shown in (a), the holding part 81 of the loading and conveying mechanism 71 is positioned so that the holding part 81 faces the measurement reference surface 61a of the A-surface measuring part 23. Thereafter, the holding part 81 of the loading and conveying mechanism 71... Figure 9 The position shown in (a) is temporarily moved upwards along the Z direction indicated by arrow a, and continues to move along the a direction, so as... Figure 9 In (b) shown in the figure, the Y direction is close to the measurement reference surface 61a, and then the disk 10 is placed in a position that allows the support 62 to be inserted into the through hole h of the disk 10.

[0146] After stopping, the holding part 81 of the upload and transfer mechanism 71 moves downward in the Z direction and holds the disk 10 on the measurement reference plane 61a by suspending the disk 10 on the support member 62. Subsequently, the first transfer part 24 moves in the Y direction by the width direction moving part 92 to move away from the measurement reference plane 61a, and the upload and transfer mechanism 71 returns to the starting position. Figure 9 The position shown in (a) is as follows. After this, as... Figure 10 As shown in (a), the first transmission unit 24 is moved along the X direction by the horizontal moving unit 91, and the holding unit 81 of the download transmission mechanism 72 is positioned so that the holding unit 81 faces the measurement reference surface 61a of the A-surface measuring unit 23.

[0147] When the upload transmission mechanism 71 returns Figure 10 At the position shown in (a), the sensor 63 of the A-side measuring unit 23 is moved along by the sensor moving mechanism. Figure 5 The sensor moves in the direction of arrow a shown in (a) and scans surface A of the disk 10. While scanning surface A of the disk 10, the sensor 63 measures the flatness of surface A. It should be noted that... Figure 5 In the description of example (a), sensor 63 moves in the direction of arrow a when it is waiting at a position where the distance between sensor 63 and the inlet-side junction 51 is closer than the distance between sensor 63 and the holding portion 81. However, when sensor 63 is waiting at a position where the distance between sensor 63 and the outlet-side junction 52 is closer than the distance between sensor 63 and the holding portion 81, sensor 63 moves in the opposite direction of arrow a to measure flatness.

[0148] When the holding part 81 of the download transmission mechanism 72 is positioned by the first drive part 25 on the support member 62 so that the holding part 81 faces the measurement reference surface 61a of the A-surface measurement part 23, and the sensor 63 completes the flatness measurement of the A-surface, according to... Figure 9In the same manner as shown in (a) and (b) of the above, the holding part 81 of the download transfer mechanism 72 is moved in the Y direction by the width direction moving part 92 in a direction close to the measurement reference plane 61a. Subsequently, the hook part 81a is inserted into the through hole h of the disk 10, the bottom receiving device 81b is placed below the disk 10, and the top receiving device 81c is positioned so that the top receiving device 81c faces the top of the disk 10.

[0149] Following this, the holding part 81 of the download transfer mechanism 72 lifts the hook part 81a and the bottom receiving plate 81b along the Z direction, and clamps and lifts the disc 10 together with the top receiving plate 81c, thereby downloading and holding the disc 10 from the measuring reference surface 61a. Then, in the same manner as the holding part 81 of the upload transfer mechanism 71, the download transfer mechanism 72 downloads the disc 10 from the support member 62 by lifting the holding part 81 along the Z direction, and moves it in the Y direction away from the measuring reference surface 61a. Further, the download transfer mechanism 72 moves the holding part 81 downward along the Z direction, returns it, and stops it at... Figure 9 The position shown in (a) is shown in the image.

[0150] In this state, the disc 10 is held in an inclined position within the holding portion 81 of the download transfer mechanism 72. Furthermore, the holding portions 81 of the upload transfer mechanism 71 and the download transfer mechanism 72 have the function of improving transfer efficiency by completing the upload preparation of the next disc 10 to be tested while downloading the measured disc 10 in the case of continuously measuring a large number of discs 10.

[0151] Subsequently, the upload transmission mechanism 71 and download transmission mechanism 72 of the first transmission unit 24 are moved in the X direction by the horizontal moving unit 91 along the direction close to the exit-side junction 52, and as Figure 10 As shown in (b), the holding part 81 of the download transfer mechanism 72 of the first transfer unit 24 is stopped in a position where the holding part 81 faces the exit-side transfer part 52. Subsequently, the disc 10 is handed from the holding part 81 of the download transfer mechanism 72 to the exit-side transfer part 52. Furthermore, in this state, the disc 10 is held in an inclined posture by the exit-side transfer part 52.

[0152] After that, as Figure 10 As shown in (c), the outlet-side junction 52 moves away from the download conveyor 72 and stops. Simultaneously, the disc 10 changes from an inclined position to a vertical position. Thereafter, as... Figure 3 As shown, the disc 10 is handed over from the exit-side transfer section 52 to the disc holding section (not shown) of the third transfer section 36.

[0153] The third conveying unit 36 ​​is moved in the Y direction away from the exit-side junction 52 by the conveying drive unit (not shown), and arrives at the entrance-side junction 51 on the side of the B-side measuring unit 33 that measures the B-side. Thereafter, the disc 10 is transferred from the disc holding unit of the third conveying unit 36 ​​to the entrance-side junction 51 on the side of the B-side measuring unit 33.

[0154] (Measurement of the flatness of surface B)

[0155] The B-side measurement is performed in the same manner as the A-side measurement. Since the A-side measurement unit 23 and the B-side measurement unit 33 are positioned opposite to each other, the conveying direction of the disk 10 in the first conveying unit 24 is opposite to that in the second conveying unit 34. However, throughout the entire conveying process, from the start of the first robot conveying unit 21 through the first conveying unit 24, the third conveying unit, and the second conveying unit 34 until the second robot conveying unit 31 completes the conveying, the disk 10 itself is conveyed and transferred in a constant direction along each corresponding conveying direction with a fixed disk 10 conveying direction.

[0156] During the measurement process on side B, firstly, as Figure 3 As shown, when the disc 10 is received from the third transfer unit 36, the inlet-side transfer unit 51 converts the disc 10's orientation to an inclined orientation, for example, 5° relative to the vertical direction, on the side of the B-side measuring unit 33. Subsequently, the inlet-side transfer unit 51 moves along the X-direction towards the outlet side of the second drive unit 35 and transfers the disc 10 to the loading transfer mechanism 71 of the second transfer unit 34. The disc 10 is maintained in the inclined orientation, 5° relative to the vertical direction, and is transferred from the inlet-side transfer unit 51 to the holding part 81 of the loading transfer mechanism 71 of the second transfer unit 34.

[0157] Following this, the second conveying unit 34 moves along the X direction toward the outlet side of the second drive unit 35, while the holding part 81 of the loading conveying mechanism 71 stops at a position where the holding part 81 faces the support member 62 provided on the measurement reference surface 61a of the B-side measuring unit 33. Then, the holding part 81 of the loading conveying mechanism 71 temporarily moves upward along the Z direction and continues to move along the Y direction toward the support member 62, and then stops at a position where the support member 62 is inserted into the through hole h of the disk 10.

[0158] After stopping, the holding part 81 of the loading and conveying mechanism 71 moves downward and loads the disk 10 onto the support member 62 by suspending the disk 10 on the support member 62. Then, the loading and conveying mechanism 71 moves in the Y direction away from the measurement reference plane 61a and returns to its original position. Afterward, the second conveying part 34 moves in the X direction toward the entrance side of the second drive part 35, while the holding part 81 of the downloading and conveying mechanism 72 returns to its original position facing the measurement reference plane 61a of the B-plane measurement part 33.

[0159] When the upload and transfer mechanism 71 returns to its original position, the sensor 63 of the B-side measurement unit 33 is moved by the sensor moving mechanism and scans the B-side of the disk 10. While scanning the B-side of the disk 10, the sensor 63 measures the flatness of the B-side.

[0160] When the holding part 81 of the download transfer mechanism 72 is positioned by the second drive part 35 on the support member 62 on the measurement reference surface 61a of the B-surface measurement part 33, and the sensor 63 completes the flatness measurement of the B-surface, the holding part 81 of the download transfer mechanism 72 is moved in the Y direction by the width direction moving part 92 in a direction close to the measurement reference surface 61a. Subsequently, the hook part 81a is inserted into the through hole h of the disc 10, the bottom receiving device 81b is placed below the disc 10, and the top receiving device 81c is positioned so that the top receiving device 81c faces the top of the disc 10.

[0161] Following this, the download transfer mechanism 72 removes the disc 10 from the support 62 by lifting the holding part 81 in the Z direction, and moves it in the Y direction away from the measurement reference plane 61a. Furthermore, the download transfer mechanism 72 moves the holding part 81 downward in the Z direction and returns it to its original position. In this state, the disc 10 is held in an inclined position within the holding part 81 of the download transfer mechanism 72.

[0162] Subsequently, the second conveying unit 34 moves along the X direction toward the outlet side of the second drive unit 35, while the holding part 81 of the download conveying mechanism 72 stops at a position where the holding part 81 faces the outlet-side junction 52. Then, the disc 10 is delivered from the holding part 81 of the download conveying mechanism 72 to the outlet-side junction 52. In this state, the disc 10 is held in an inclined position by the outlet-side junction 52.

[0163] Then, the exit-side junction 52 moves away from the download conveyor 72 and stops. Subsequently, as... Figure 3 As shown, the disc 10 is transferred from the exit-side transfer section 52 to the disc holding section 43 of the second robot transfer section 31.

[0164] At this time, the disc 10 changes from an inclined position to a vertical position, and the second robot transfer unit 31 transfers the disc 10 to the predetermined position. Then, the operation is repeated from the start of transfer by the first robot transfer unit 21 to the completion of transfer by the second robot transfer unit 31, and the measuring device 20 ends the operation after the flatness measurement of the A and B surfaces of all discs 10 is completed.

[0165] The effects of the measuring device 20 in this embodiment will be explained below.

[0166] (I) The measuring device 20 of this embodiment includes an A-side measuring unit 23 and a B-side measuring unit 33 for measuring the disc 10, a first conveying unit 24, and a second conveying unit 34. Each of the A-side measuring unit 23 and the B-side measuring unit 33 includes a measuring reference surface 61a inclined at an angle θ° relative to the vertical direction, and each of the first conveying unit 24 and the second conveying unit 34 includes a holding part 81 for holding the disc 10 parallel to the measuring reference surface 61a. The holding part 81 is configured to load or download the disc 10 to the A-side measuring unit 23 or the B-side measuring unit 33 while holding the disc 10 in an inclined posture at an angle θ°.

[0167] In the measuring apparatus 20 of this embodiment, each of the A-side measuring unit 23 and the B-side measuring unit 33 includes a measuring reference surface 61a inclined at an angle θ° relative to the vertical direction, and the disc 10 is supported along the measuring reference surface 61a. In this way, the problems of existing measuring apparatuses can be solved, that is, the effect of effectively suppressing the disc from sagging due to being held horizontally on the measuring stage can be obtained, and flatness can be measured more accurately.

[0168] Furthermore, the holding unit 81 is configured to load and download the disk 10 to the A-side measuring unit 23 or the B-side measuring unit 33 while holding the disk 10 in an inclined posture at an angle θ°. This achieves the effect of maintaining the inclined posture with high precision and smoothly loading and downloading the disk 10 to the A-side measuring unit 23 or the B-side measuring unit 33. In addition, it suppresses the effects of sagging due to its own weight and stabilizes the posture of the object being measured when placed within the measuring device.

[0169] In addition, the measuring device 20 in the first embodiment is configured to include a first robot transfer unit 21 and a second robot transfer unit 31, and automatically measures the disc 10 during the process of transferring the disc 10 from the first robot transfer unit 21 to the second robot transfer unit 31, thereby producing the effect of being able to measure a large number of discs 10 at a relatively high speed.

[0170] (ii) In the measuring device 20 of this embodiment, the first transfer unit 24 includes an upload transfer mechanism 71 and a download transfer mechanism 72. The disc 10 is uploaded to the A-side measuring unit 23 or the B-side measuring unit 33 by the upload transfer mechanism 71, and downloaded from the A-side measuring unit 23 or the B-side measuring unit 33 by the download transfer mechanism 72. In this way, the measuring device 20 can quickly transfer the disc 10, smoothly upload and download to the A-side measuring unit 23 or the B-side measuring unit 33, and effectively transfer the disc 10.

[0171] (iii) In the measuring apparatus 20 of this embodiment, when the first conveying unit 24 conveys the disc 10 facing the measuring unit 23 on surface A, and when the second conveying unit 34 conveys the disc 10 facing the measuring unit 33 on surface B, the disc 10 is configured to be conveyed in a manner parallel to the measuring reference plane 61a. In this way, the effect of effectively conveying a large number of discs 10 can be obtained without generating excessive stress on the disc 10.

[0172] (iv) In the measuring device 20 of this embodiment, since the A-side measuring part 23 and the B-side measuring part 33 are arranged opposite to each other, the component installation space of the measuring device 20 can be reduced and the size of the measuring device 20 can be reduced.

[0173] (v) In the measuring device 20 of this embodiment, the first conveying unit 24 is configured to face the measuring unit 23 on surface A and the second conveying unit 34 is configured to face the measuring unit 33 on surface B, and the conveying directions of the first conveying unit 24 and the second conveying unit 34 are arranged opposite to each other. In this way, it is possible to obtain the effect of reducing the installation space of the first conveying unit 24 and the measuring unit 23 on surface A, as well as the installation space of the second conveying unit 34 and the measuring unit 33 on surface B, and reducing the size of the measuring device 20.

[0174] (vi) The measuring device 20 of this embodiment includes a first junction 22 and a second junction 32 for switching between a vertical posture and an inclined posture. In the vertical posture, the disk 10 is arranged in the vertical direction. In the inclined posture, the disk 10 is set to be inclined at a certain angle relative to the vertical direction. Thus, the first junction 22 can smoothly convert the vertical posture of the disk 10 conveyed from the first robot transfer unit 21 to the inclined posture, and the second junction 32 can smoothly convert the inclined posture of the conveyed disk 10 to the vertical posture. That is to say, it is possible to obtain the effect of suppressing excessive stress on the disk 10 without the need for a process of conversion from the transfer unit to the inclined posture, and to stabilize the posture of the object being measured when it is placed in the measuring device.

[0175] (vii) In this embodiment, the measuring device 20 includes a horizontally moving part 91 that drives the first conveying part 24, and a first driving part 25 is disposed vertically below the measuring part body 61. With this configuration, fine dust generated by the first driving part 25 falls directly downwards, making it difficult for it to adhere to the measuring part body 61 disposed above the first driving part 25. Thus, the measuring part body 61 is less likely to be contaminated by the generated dust.

[0176] (viii) In the measuring device 20 of this embodiment, since the first conveying unit 24 is configured to reciprocate in both the horizontal direction and the direction perpendicular to the measuring reference plane, it is possible to effectively and quickly convey the disc 10 and suspend it on the support member 62 of the A-side measuring unit 23. Furthermore, since the first conveying unit 24 conveys the disc 10 from the inlet side to the outlet side of the measuring device while keeping the main surface of the disc 10 facing the measuring reference plane, it is possible to quickly measure and convey the disc 10 without unnecessary movement.

[0177] (ix) In the measuring device 20 of this embodiment, since the disk 10 has a through hole that extends through the thickness direction, and the holding part 81 of the loading transfer mechanism 71 and the holding part 81 of the download transfer mechanism 72 hold the inner wall of the through hole, it is possible to obtain the effect of keeping the disk 10 stably in an inclined posture without generating excessive stress.

[0178] (x) In the measuring device 20 of this embodiment, the measuring reference surface 61a includes a support member 62 that supports the disk 10 and a fixed support 64 that contacts the disk 10 supported by the support member 62. In this way, the flatness measurement accuracy of the sensor 63 can be improved by suppressing the deflection of the disk 10 supported by the support member 62 and by maintaining and stabilizing the posture of the disk 10.

[0179] It should be noted that although the measuring device 20 of the first embodiment described above is configured with an A-side measuring unit 23 and a B-side measuring unit 33 arranged opposite to each other, the measuring device of the present invention may also be configured with a structure other than the structure in which the A-side measuring unit 23 and the B-side measuring unit 33 are arranged opposite to each other.

[0180] For example, the measuring device of the present invention can be a measuring device 20A configured to have an A-side measuring section 23 and a B-side measuring section 33 arranged side by side in the same direction, or a measuring device 20B configured to have an A-side measuring section 23 and a B-side measuring section 33 arranged side by side in different directions.

[0181] Furthermore, although the embodiment of the measuring device 20 described above is configured to include both the A-side measuring unit 23 and the B-side measuring unit 33, the measuring device 20 may also include either the A-side measuring unit 23 or the B-side measuring unit 33, or may include at least one of the A-side measuring unit 23 or the B-side measuring unit 33.

[0182] (Second Implementation)

[0183] Hereinafter, the measuring device 20A of the second embodiment will be described with reference to the accompanying drawings.

[0184] like Figure 11As shown, the difference between the measuring device 20A of the second embodiment and the measuring device 20 of the first embodiment is that the measuring section 23 on surface A and the measuring section 33 on surface B are arranged side by side in the same direction. It should be noted that components identical to those in the measuring device 20 of the first embodiment are labeled with the same reference numerals as those in the measuring device 20 of the first embodiment, and will not be described again.

[0185] The measuring device 20A according to the second embodiment includes an A-side measuring unit 11, a B-side measuring unit 12, and a forward / reverse flipping mechanism 13. The measuring device 20A is configured to measure the flatness of the A-side of the disc 10 by the A-side measuring unit 11, flip the disc 10 to both sides by the forward / reverse flipping mechanism 13, and measure the flatness of the B-side of the disc 10 by the B-side measuring unit 12.

[0186] The A-side measurement unit 11 includes an inlet-side junction 51, a first conveying unit 24, an A-side measurement unit 23, and a horizontal moving unit 91. The B-side measurement unit 12 includes a B-side measurement unit 33, a second conveying unit 34, and an outlet-side junction 52.

[0187] The forward and reverse flipping mechanism 13 is composed of a known flipping mechanism (not shown). The forward and reverse flipping mechanism 13 is configured such that when it receives a disk 10 from the A-side measurement unit 11 with its A-side facing the measurement reference surface 61a of the A-side measurement unit 23, it maintains the disk 10 in an orientation such that its B-side faces the measurement reference surface 61a of the B-side measurement unit 33, and then transfers the disk 10 to the B-side measurement unit 12. The A-side and B-side of the disk 10 are flipped by the forward and reverse flipping mechanism 13.

[0188] Hereinafter, the operation of the measuring device 20A according to the second embodiment will be described with reference to the accompanying drawings. Components labeled with the same reference numerals as those in the measuring device 20 of the first embodiment operate in the same manner as those in the measuring device 20, and therefore their operation will only be briefly described.

[0189] In the measuring device 20A, firstly, when Figure 11 When the inlet-side junction 51 receives the disc 10, it converts the disc 10 into an inclined position, and while keeping the disc 10 in this inclined position, it moves in the X direction along the first conveyor 24 via the horizontal moving part 91, and then stops at the position where the disc 10 is handed over to the first conveyor 24.

[0190] After the disc 10 stops, it is handed over to the holding part 81 of the loading and conveying mechanism 71 of the first conveying unit 24, while the loading and conveying mechanism 71 is moved by the horizontal moving part 91, and the disc 10 is suspended on the support member 62 of the A-side measuring unit 23. Then, the sensor 63 is moved to measure the flatness of the A-side of the disc 10. After this, the downloading and conveying mechanism 72 removes the disc 10 from the support member 62, and the downloading and conveying mechanism 72 is moved by the horizontal moving part 91 and stops at the position to transfer the disc 10 to the forward and reverse flipping mechanism 13.

[0191] After the disc 10 stops, it is passed to the reversing mechanism 13 to flip both sides of the disc 10. After the disc 10 is flipped, the reversing mechanism 13 converts the tilt posture of the disc 10 into a tilt posture towards the B-side measuring unit 33. Accordingly, the tilt posture of the disc 10 is maintained in the same direction as before it was transferred to the reversing mechanism 13.

[0192] After being flipped over, the disc 10, while maintaining the aforementioned tilted posture, is transferred to the holding part 81 of the loading and conveying mechanism 71 of the second conveying unit 34. The disc 10 is suspended by the loading and conveying mechanism 71 on the support member 62 of the B-side measuring unit 33.

[0193] After this, the sensor 63 is moved, and the flatness of surface B of the disc 10 is measured. Subsequently, the disc 10 is removed from the support member 62 by the download transfer mechanism 72, which is moved by the horizontal moving part 91 and stops at the position to transfer the disc 10 to the subsequent processing.

[0194] The effects of the measuring device 20A according to the second embodiment will be described below. The configuration of the measuring device 20A is the same as that of the measuring device 20 in the first embodiment, and its operation is also the same as that of the measuring device 20. Therefore, the measuring device 20A can produce the same effects as the measuring device 20.

[0195] In other words, the measuring device 20A of the second embodiment can solve the problem of disc sagging caused by existing measuring devices. Furthermore, since the disc 10 does not sag, flatness can be measured more accurately.

[0196] Furthermore, in the second embodiment, the holding section 81 of the first transfer section 24 of the measuring device 20A is configured to hold the disk 10, moving it vertically while holding the disk 10 in an inclined posture at an angle θ°, and loading and unloading the disk 10 to the A-side measuring section 23 or the B-side measuring section 33. This achieves the effect of smoothly loading and unloading the disk 10 to the A-side measuring section 23 or the B-side measuring section 33. Furthermore, it suppresses the effect of sagging due to its own weight and stabilizes the posture of the object being measured when placed inside the measuring device.

[0197] It should be noted that in the measuring device 20A of the second embodiment, the forward and reverse flipping mechanism 13 can be configured to: flip the front and back sides of the disc 10 without changing the tilt posture of the disc 10; or face the disc 10 toward the A-side measuring unit 23; and to transfer the disc 10 to the first conveying unit 24 of the A-side measuring unit 11 so that the A-side measuring unit 23 can measure the flatness of the B-side of the disc 10. With this configuration, it is possible to achieve the effect of eliminating the need for a B-side measuring unit 12 to measure the B-side and simplifying the results.

[0198] (Third Implementation)

[0199] like Figure 12 As shown, the difference between the measuring device 20B of the third embodiment and the measuring device 20 of the first embodiment and the measuring device 20A of the second embodiment is that the measuring part 23 on the A side and the measuring part 33 on the B side are arranged side by side in different directions. Components that are the same as those in the measuring device 20 of the first embodiment are labeled with the same reference numerals as those in the measuring device 20 of the first embodiment, and will not be described again.

[0200] like Figure 12 As shown, the measuring device 20B in the third embodiment includes an A-side measuring unit 11, a B-side measuring unit 12, and a tilt state conversion mechanism 14. The measuring device 20B is configured to measure the flatness of the A-side of the disc 10 using the A-side measuring unit 11, convert the tilt attitude of the disc 10 using the tilt state conversion mechanism 14, and measure the flatness of the B-side of the disc 10 using the B-side measuring unit 12.

[0201] The A-side measurement unit 11 includes an inlet-side junction 51, a first conveying unit 24, an A-side measurement unit 23, and a horizontal moving unit 91. The B-side measurement unit 12 includes a B-side measurement unit 33, a second conveying unit 34, and an outlet-side junction 52. The A-side measurement unit 23 and the B-side measurement unit 33 are located on opposite sides of the horizontal moving unit 91 in the direction of movement, that is, on the right side of the width direction and the left side of the width direction.

[0202] The tilt state conversion mechanism 14 includes an inlet-side junction 14a, an outlet-side junction 14b, and a known conversion mechanism (not shown). This conversion mechanism receives the disc 10 from the A-side measurement unit 11 in an orientation where the A-side of the disc 10 faces a measurement reference plane parallel to the A-side measurement unit 23. Subsequently, the conversion mechanism is configured to convert the orientation of the disc 10 to an orientation where the B-side faces a plane parallel to the B-side measurement unit 33, and then transfer the disc 10 to the B-side measurement unit 12.

[0203] Hereinafter, the operation of the measuring device 20B according to the third embodiment will be described with reference to the accompanying drawings. Components labeled with the same reference numerals as those in the measuring device 20 of the first embodiment operate in the same manner as those in the measuring device 20, and therefore their operation will only be briefly described.

[0204] In the measuring device 20B, firstly, when the inlet-side junction 51 receives the disc 10, it converts the orientation of the disc 10 to an inclined orientation tilted toward the A-side measuring unit 23. Subsequently, while maintaining the disc 10 in the inclined orientation, the inlet-side junction 51 moves in the X direction toward the first conveying unit 24 and stops at a position to hand the disc 10 to the first conveying unit 24.

[0205] After the disc 10 stops, it is handed over to the holding part 81 of the loading and conveying mechanism 71 of the first conveying unit 24, while the disc 10 is suspended on the support member 62 of the A-side measuring unit 23. Then, the sensor 63 is moved to measure the flatness of the A-side of the disc 10. After this, the disc 10 is removed from the support member 62 by the downloading and conveying mechanism 72, which is moved by the horizontal moving part 91 and stops at the position where it will transfer the disc 10 to the inlet-side transfer part 14a of the tilt state conversion mechanism 14.

[0206] After the disc 10 stops, it is transferred to the inlet-side junction 14a of the tilt state conversion mechanism 14 to convert the tilt state of the disc 10 to a tilt state facing the opposite side. That is, the tilt posture of the disc 10 tilting towards the A-side measuring unit 23 is converted to the tilt posture of the disc 10 tilting towards the B-side measuring unit 33. Subsequently, the disc 10 is transferred to the outlet-side junction 14b of the tilt state conversion mechanism 14. After the disc 10 is transferred from the outlet-side junction 14b to the loading conveyor 71, the loading conveyor 71 suspends the disc 10 on the support member 62 of the B-side measuring unit 33.

[0207] Subsequently, the sensor 63 is moved, and the flatness of surface B of the disc 10 is measured. Then, the disc 10 is removed from the support member 62 by the download transfer mechanism 72, which is moved by the horizontal moving part 91 and stops at the position to transfer the disc 10 to the subsequent processing.

[0208] The effects of the measuring device 20B according to the third embodiment will be described below.

[0209] The configuration of measuring device 20B is the same as that of measuring device 20A and measuring device 20 in the first embodiment, and its operation is also the same as that of measuring device 20. Therefore, measuring device 20B can produce the same effect as measuring device 20.

[0210] In other words, the measuring device 20B of the third embodiment can solve the problem of disc sagging caused by existing measuring devices. Furthermore, since the disc 10 does not sag, flatness can be measured more accurately.

[0211] Furthermore, in the third embodiment, the holding part 81 of the first transfer part 24 of the measuring device 20B is configured to hold the disk 10, and while holding the disk 10 in an inclined posture at an angle θ°, it moves in the vertical direction and loads and downloads the disk 10 to the A-side measuring part 23 or the B-side measuring part 33. This achieves the effect of smoothly loading and downloading the disk 10 to the A-side measuring part 23 or the B-side measuring part 33. In addition, it can suppress the effect of sagging due to its own weight and stabilize the posture of the object being measured when placed inside the measuring device.

[0212] Although the first to third embodiments of the present invention have been described in detail above, the present invention is not limited to the first to third embodiments described above. Various design changes can be made as long as they fall within the scope of the present invention as defined in the claims.

[0213] Specifically, in each of the above embodiments, the measuring device of the present invention is described as a measuring device for measuring an object. However, the measuring device of the present invention is not limited to this, but can be used, for example, as an inspection device for inspecting the object, or as a sorting device for sorting the object into qualified and defective products after inspection.

Claims

1. A measuring device for measuring a measured object, characterized in that, include: A measuring element for measuring the shape of at least one side of the front or back of the object being measured; as well as A transmission element for transmitting the object being measured. in: The measuring element includes a measuring reference surface tilted at a predetermined angle relative to a vertical direction; The transmission element includes a holding portion that holds the measuring object in a manner that makes the measuring object parallel to the measuring reference plane; and The holding unit, while maintaining the orientation of the object being measured at the predetermined angle, uploads the object to the measuring element or downloads the object from the measuring element. The conveying element is configured to reciprocate along a horizontal direction and in a direction perpendicular to the measurement reference plane. The measurement object is conveyed by the conveying element from the inlet side to the outlet side of the measuring device while keeping the main surface of the measurement object facing the measurement reference plane.

2. A measuring device for measuring a measured object, characterized in that, include: A measuring element for measuring the shape of at least one side of the front or back of the object being measured; as well as A transmission element for transmitting the object being measured. in: The measuring element includes a measuring reference surface tilted at a predetermined angle relative to a vertical direction; The transmission element includes a holding portion that holds the measuring object in a manner that makes the measuring object parallel to the measuring reference plane; and The holding unit, while maintaining the orientation of the object being measured at the predetermined angle, uploads the object to the measuring element or downloads the object from the measuring element. The measurement reference surface includes a support member that supports the object being measured and a fixed support that contacts the object being measured, which is supported by the support member. The support member is inserted into the through hole of the measuring object to support the measuring object in a suspended state, and the fixed bracket supports the measuring object suspended by the support member at a preset tilt angle.

3. The measuring device according to claim 1 or 2, characterized in that, The transmission element includes an upload holding section for uploading the measurement object to the measurement element and a download holding section for downloading the measurement object from the measurement element.

4. The measuring device according to claim 1 or 2, characterized in that, When the transmission element transmits the object to be measured toward the transmission element, the object to be measured is transmitted parallel to the measurement reference plane.

5. The measuring device according to claim 1 or 2, characterized in that, The measuring elements include a first measuring element and a second measuring element arranged opposite to each other.

6. The measuring device according to claim 5, characterized in that, The transmission element includes a first transmission element for transmitting the object to be measured toward the first transmission element and a second transmission element for transmitting the object to be measured toward the second transmission element, wherein the transmission direction of the first transmission element and the transmission direction of the second transmission element are opposite to each other.

7. The measuring device according to claim 1 or 2, characterized in that, It includes a junction for switching between the vertical posture of the measured object set along the vertical direction and the tilt posture of the measured object tilted at a predetermined angle relative to the vertical direction.

8. The measuring device according to claim 1 or 2, characterized in that, It includes a driving element for driving the transmitting element, the driving element being disposed below the measuring element along the vertical direction.

9. The measuring device according to claim 1 or 2, characterized in that, The measuring object has a through hole extending along a thickness direction, and the retaining part retains the inner wall portion of the through hole.

Images