Vertical probe card device

Abstract

This invention discloses a vertical probe card device. The fence-shaped probe has a needle length between 5 mm and 8 mm. The fence-shaped probe includes a fence segment, a connecting segment, and a test segment. The fence segment is elongated and defines a length direction, forming a through groove and a first protrusion. The through groove is formed along the length direction, and the length of the through groove is greater than 65% of the needle length. The first protrusion extends from one long wall of the through groove by a first predetermined width and is separated from the other long wall of the through groove by a gap. The connecting segment and the test segment are respectively connected to the two ends of the fence segment. Accordingly, during operation, the fence segment of the fence-shaped probe can reduce the deformation of the fence segment through the first protrusion, thereby maintaining its mechanical and electrical properties.

Description

Technical Field

[0001] This invention relates to a probe card, and more particularly to a vertical probe card device and its fence-shaped probe. Background Technology

[0002] Existing vertical probe cards face increasingly stringent heat dissipation requirements, leading to structural design and improvements to the conductive probes within them. For example, the conductive probes can be shaped like a fence to enhance heat dissipation. However, when these fence-shaped conductive probes are in operation, their mechanical or electrical properties are easily altered due to deformation.

[0003] Therefore, the inventor believed that the above-mentioned defects could be improved, and thus devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects. Summary of the Invention

[0004] The purpose of this invention is to provide a vertical probe card device and its fence-shaped probe, which can effectively improve the defects that may occur in existing vertical probe cards.

[0005] This invention discloses a vertical probe card device, comprising: a first guide plate unit and a second guide plate unit, which are spaced apart from each other; and a plurality of fence-shaped probes passing through the first guide plate unit and the second guide plate unit; wherein, the needle length of each fence-shaped probe is between 5 mm and 8 mm, and includes: a fence segment, which is elongated and defines a length direction, the fence segment forming: a through groove formed along the length direction, and the length of the through groove is greater than 65% of the needle length; and a first protrusion, which extends from one long wall surface of the through groove by a first predetermined width and is separated from the other long wall surface of the through groove by a first gap; and a connecting segment and a test segment, which are respectively connected to the two ends of the fence segment and respectively passing through the first guide plate unit and the second guide plate unit; wherein, when the first guide plate unit and the second guide plate unit are misaligned, the fence segments of the plurality of fence-shaped probes elastically bend in the same direction.

[0006] Preferably, in each fence-shaped probe, the needle length is further limited to 6 mm to 8 mm, and the fence segment further includes a second protrusion that extends from one of the two long walls by a second predetermined width and is separated from the other of the two long walls by a second gap.

[0007] Preferably, the first protrusion and the second protrusion are spaced apart from each other in the length direction and are separated by a first distance.

[0008] Preferably, the first protrusion and the second protrusion are respectively equidistant from the two short wall surfaces of the through groove, and the first protrusion and the second protrusion are each separated from the corresponding short wall surface by a second distance not greater than the first distance.

[0009] Preferably, each fence-shaped probe includes a ceramic layer directly formed on the outer surface of the fence segment, which is not disposed within the first guide plate unit and the second guide plate unit, and the ceramic layer of each fence-shaped probe has an ASTM rating of at least 3B in the cross-cut method.

[0010] Preferably, in each fence-shaped probe, the ceramic layer fills the through-groove, and the through-groove, the first protrusion, and the second protrusion are all embedded within the ceramic layer.

[0011] Preferably, in each fence-shaped probe, a ceramic layer extends from the center of the fence segment toward the first protrusion and the second protrusion, respectively, and fills the first gap and the second gap.

[0012] Preferably, in each fence-shaped probe, the two long walls are parallel to each other and separated by an adjustment distance, and the first preset width is 10% to 90% of the adjustment distance and is between 5 micrometers (μm) and 10 micrometers.

[0013] Preferably, in each fence-shaped probe, when the first guide plate unit and the second guide plate unit are misaligned, one of the two long walls is located outside the other and extends to form a first protrusion.

[0014] This invention also discloses a fence-shaped probe for a vertical probe card device, which has a needle length between 5 mm and 8 mm. The fence-shaped probe includes: a fence segment, which is elongated and defines a length direction, and the fence segment forms: a through groove formed along the length direction, and the length of the through groove is greater than 65% of the needle length; a first protrusion formed by extending a first predetermined width from one long wall of the through groove and separated from the other long wall of the through groove by a gap; and a connecting segment and a test segment, which are respectively connected to the two ends of the fence segment.

[0015] In summary, the vertical probe card device disclosed in the embodiments of the present invention, through the structural design of the fence-shaped probe (e.g., the needle length is between 5 mm and 8 mm, and the length of the through groove is greater than 65% of the needle length), and the first protrusion formed in the through groove, allows the fence segment of the fence-shaped probe to reduce the deformation of the fence segment during operation through the first protrusion, thereby maintaining its mechanical and electrical properties.

[0016] To further understand the features and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, these descriptions and drawings are only for illustrating the invention and are not intended to limit the scope of protection of the invention in any way. Attached Figure Description

[0017] Figure 1 This is a planar schematic diagram of the vertical probe card according to Embodiment 1 of the present invention.

[0018] Figure 2 for Figure 1 A planar schematic diagram of a vertical probe card in a misaligned state.

[0019] Figure 3 for Figure 1 A schematic cross-sectional view along section line III-III.

[0020] Figure 4 This is a planar schematic diagram of another type of the fence-shaped probe according to Embodiment 1 of the present invention.

[0021] Figure 5 for Figure 4 A schematic diagram of its cross-section.

[0022] Figure 6 This is a planar schematic diagram of another type of fence-shaped probe according to Embodiment 1 of the present invention.

[0023] Figure 7 This is a planar schematic diagram of the vertical probe card according to Embodiment 2 of the present invention.

[0024] Figure 8 for Figure 7 A schematic cross-sectional view along section line VIII-VIII.

[0025] Figure 9 This is a cross-sectional schematic diagram of another type of fence-shaped probe according to Embodiment 2 of the present invention.

[0026] Figure 10 This is a planar schematic diagram of the vertical probe card according to Embodiment 3 of the present invention.

[0027] Figure 11 for Figure 10 A planar schematic diagram of a vertical probe card in a misaligned state.

[0028] Figure 12 for Figure 10 A cross-sectional view along section line XII-XII.

[0029] Figure 13 This is a cross-sectional schematic diagram of another embodiment of the fence-shaped probe of the present invention.

[0030] Figure 14This is a planar schematic diagram of another type of fence-shaped probe according to Embodiment 3 of the present invention.

[0031] Figure 15 This is a planar schematic diagram of the vertical probe card according to Embodiment 4 of the present invention.

[0032] Figure 16 for Figure 15 A planar schematic diagram of a vertical probe card in a misaligned state. Detailed Implementation

[0033] The following specific embodiments illustrate the implementation of the "vertical probe card device and its fence-like probe" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated in advance. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0034] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0035] [Example 1]

[0036] Please see Figures 1 to 6 As shown, this is an embodiment of the present invention. This embodiment discloses a vertical probe card, comprising a probe head 100 and a contact point abutting against one side of the probe head 100 (e.g.: Figure 1 A signal adapter board 200 on the top side of the probe head 100, and on the other side of the probe head 100 (e.g.: Figure 1 The probe tip 100 (bottom side) is used to press against a device under test (DUT) (not shown in the figure, such as a semiconductor wafer).

[0037] It should be noted that, for ease of understanding of this embodiment, the accompanying drawings only show a partial structure of the vertical probe card, so as to clearly illustrate the structure and connection relationship of the various components of the vertical probe card. However, the present invention is not limited to the accompanying drawings. The structure and connection relationship of each component of the probe head 100 will be described below.

[0038] like Figures 1 to 5 As shown, the probe head 100 includes a first guide plate unit 1 and a second guide plate unit 2 arranged at intervals from each other, a spacer plate 3 sandwiched between the first guide plate unit 1 and the second guide plate unit 2, and a plurality of fence-shaped probes 4 passing through the first guide plate unit 1 and the second guide plate unit 2.

[0039] It should be noted that the fence-shaped probe 4 in this embodiment is described in conjunction with the first guide plate unit 1, the second guide plate unit 2, and the spacer plate 3, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the fence-shaped probe 4 may also be used independently (e.g., for sale) or in conjunction with other components.

[0040] In this embodiment, the first guide plate unit 1 and the second guide plate unit 2 are spaced apart from each other, and the first guide plate unit 1 includes a first guide plate, and the second guide plate unit 2 includes a second guide plate. However, in other embodiments of the present invention not shown, the first guide plate unit 1 may include a plurality of first guide plates (and spacers sandwiched between two adjacent first guide plates), and the second guide plate unit 2 may also include a plurality of second guide plates (and spacers sandwiched between two adjacent second guide plates). The plurality of first guide plates can be staggered relative to each other, the plurality of second guide plates can also be staggered relative to each other, and the first guide plate unit 1 can be staggered relative to the second guide plate unit 2.

[0041] The spacer 3 may be an annular structure, and the spacer 3 is clamped to the corresponding peripheral portions of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the spacer 3 of the vertical probe card may be omitted or replaced by other components.

[0042] Furthermore, a plurality of the fence-shaped probes 4 are disposed between the first guide plate unit 1 and the second guide plate unit 2, and the needle length L4 of each fence-shaped probe 4 is limited to between 5 mm and 8 mm. It should be noted that the plurality of fence-shaped probes 4 in this embodiment have substantially the same structure (e.g., the plurality of fence-shaped probes 4 have the same needle length L4), so for ease of explanation, a single fence-shaped probe 4 will be described below, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the structure of the plurality of fence-shaped probes 4 included in the probe head 100 (or the vertical probe card) may also differ slightly.

[0043] Furthermore, to facilitate understanding of the structure of the fence-shaped probe 4, the following description will assume that the first guide plate unit 1 is not yet misaligned relative to the second guide plate unit 2.

[0044] The fence-shaped probe 4 is generally linear and defines a length direction L. The fence-shaped probe 4 includes a fence segment 41, a ceramic layer 42 formed on the fence segment 41, a connecting segment 43 connected to one end of the fence segment 41, and a test segment 44 connected to the other end of the fence segment 41. It should be further noted that in this embodiment, the fence-shaped probe 4 is limited to using the ceramic layer 42 instead of a known insulating layer made of polymer material (that is, the fence-shaped probe 4 does not contain any polymer material). Therefore, any conductive probe formed with polymer material is not the fence-shaped probe 4 referred to in this embodiment.

[0045] The fence segment 41 is elongated and located between the first guide plate unit 1 and the second guide plate unit 2. In this embodiment, the length direction L can also be defined by the elongated fence segment 41. The fence segment 41 forms a through groove 411 along the length direction L, and the length L411 of the through groove 411 is greater than 65% of the needle length L4. The through groove 411 has two long walls 4111 and two short walls 4112. The two long walls 4111 face each other and are parallel to the length direction L, while the two short walls 4112 face each other and are perpendicular to the length direction L.

[0046] In other words, the fence segment 41 includes two arms 412 located on opposite sides of the through groove 411; that is, each of the two arms 412 has two long wall surfaces 4111. The two arms 412 have the same cross-sectional area in the direction perpendicular to the length L, and are separated by an adjustment distance W412, which is between 10 micrometers (μm) and 120 micrometers. More specifically, the two long wall surfaces 4111 of the fence segment 41 are separated by the adjustment distance W412 in a width direction W perpendicular to the length direction L; or, the adjustment distance W412 is the width of the through groove 411. Furthermore, the two side surfaces of the fence segment 41 that are far apart from each other in the width direction W are separated by a needle width W41 between 50 micrometers and 160 micrometers.

[0047] Furthermore, in this embodiment, the fence segment 41 is described as having a generally rectangular through-slot 411, but the invention is not limited thereto. For example, in other embodiments not shown in this invention, the number of through-slots 411 formed in the fence segment 41 may be multiple, and any of the long wall surfaces 4111 or any of the short wall surfaces 4112 of the through-slots 411 may be arc-shaped or other shapes.

[0048] The ceramic layer 42 is directly formed on the outer surface of the fence segment 41 and covers the two long wall surfaces 4111 (and two short wall surfaces 4112) of the through groove 411. The ceramic layer 42 is not disposed within the first guide plate unit 1 and the second guide plate unit 2 (or, the ceramic layer 42 is not disposed within the connecting segment 43 and the test segment 44) to avoid dust generation from friction between the ceramic layer 42 and the first guide plate unit 1 or the second guide plate unit 2.

[0049] Accordingly, the fence-shaped probe 4 disclosed in this embodiment, through its structural design (e.g., the needle length L4 is between 5 mm and 8 mm, and the length L411 of the through groove 411 is greater than 65% of the needle length L4), allows the existing polymer insulating layer to be replaced by the ceramic layer 42 at a specific location on the fence segment 41 (e.g., the ceramic layer 42 is not disposed within the first guide plate unit 1 and the second guide plate unit 2), thereby effectively improving the heat dissipation effect of the fence-shaped probe 4.

[0050] In this embodiment, the ceramic layer 42 of the fence-shaped probe 4 has an ASTM rating of at least 3B in the cross-cut method. The manner in which the ceramic layer 42 is formed on the fence segment 41 can be adjusted and varied according to design requirements, provided that the above requirements are met. For example, it can be formed using sputtering, evaporation, or electroplating methods, but the present invention is not limited thereto.

[0051] More specifically, the ceramic layer 42 extends from the center of the fence segment 41 toward the connecting segment 43 and the test segment 44, respectively, and at least 50% of the area of ​​the fence segment 41 is embedded within the ceramic layer 42. In other words, the ceramic layer 42 can be as follows: Figure 1 and Figure 3 The through groove 411 is not completely filled; or, the ceramic layer 42 can also be as shown. Figure 4 and Figure 5The through groove 411 is filled to embed it within the ceramic layer 42. Alternatively, in other embodiments not shown in this invention, the ceramic layer 42 may only cover a portion of each of the long wall surfaces 4111 of the through groove 411, but not the two short wall surfaces 4112.

[0052] The connecting segment 43 and the test segment 44 are respectively connected to the two ends of the fence segment 41 and pass through the first guide plate unit 1 and the second guide plate unit 2. In this embodiment, the connecting segment 43 and the test segment 44 extend from the two ends of the fence segment 41, forming a single-piece metal structure. Furthermore, the connecting segment 43 is used to fix to the signal adapter board 200, while the test segment 44 is used to detachably abut against the object under test.

[0053] The above describes a single fence-shaped probe 4 in this embodiment. Because the fence segment 41, with a roughly square cross-section, has the through groove 411 formed, the cross-section of each support arm 412 can be roughly rectangular, thus facilitating control of the bending direction of the fence segment 41. Furthermore, when the first guide plate unit 1 and the second guide plate unit 2 are misaligned, the fence segments 41 of the plurality of fence-shaped probes 4 bend elastically in the same direction.

[0054] Furthermore, although the fence-like probe 4 is described in this embodiment as being roughly in a straight line, its specific structure can be adjusted and varied according to design requirements. For example, such as... Figure 6 As shown, the fence segment 41 of the fence-shaped probe 4 may be curved, and the two arms 412 are parallel to each other, each arm 412 having two curved portions 4121 arranged in opposite directions. In the width direction W, the connecting segment 43 (or the test segment 44) of the fence-shaped probe 4 is separated from the vertex of an adjacent curved portion 4121 by a lateral distance W4121 between 10 micrometers and 150 micrometers.

[0055] [Example 2]

[0056] Please see Figures 7 to 9 As shown, this is Embodiment Two of the present invention. Since this embodiment is similar to Embodiment One described above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment One lies in the construction of the fence segment 41 of the fence-shaped probe 4. It should be noted that the plurality of fence-shaped probes 4 in this embodiment also have approximately the same construction. Therefore, for ease of explanation, only a single fence-shaped probe 4 will be described below, but the present invention is not limited thereto.

[0057] In this embodiment, the fence segment 41 has two support arms 412 and at least one inner arm 413 located between the two support arms 412. The structural features of the two support arms 412 are as described in Embodiment 1 above, and will not be repeated here. The number of at least one inner arm 413 is described as one in this embodiment, but the invention is not limited thereto.

[0058] Furthermore, at least one of the inner arm bodies 413 is parallel to the length direction L (or parallel to any of the support arms 412) and located within the through groove 411, and both ends of at least one of the inner arm bodies 413 are respectively connected to the two short wall surfaces 4112 of the through groove 411. Moreover, the two support arms 412 have the same cross-sectional area in the direction perpendicular to the length direction L, which is different from (e.g., smaller than) the cross-sectional area of ​​at least one inner arm body 413 in the direction perpendicular to the length direction L.

[0059] From another perspective, the ceramic layer 42 can be as follows: Figure 8 The through groove 411 is not completely filled; or, the ceramic layer 42 can also be as shown. Figure 9 The through groove 411 is filled as shown so that both of the support arms 412 and at least one of the inner arm bodies 413 are embedded within the ceramic layer 42, but the invention is not limited thereto.

[0060] [Example 3]

[0061] Please see Figures 11 to 14 As shown, this is Embodiment 3 of the present invention. Since this embodiment is similar to Embodiment 1 described above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiment 1 lies in the construction of the fence segment 41 of the fence-shaped probe 4. It should be noted that the plurality of fence-shaped probes 4 in this embodiment also have approximately the same construction. Therefore, for ease of explanation, a single fence-shaped probe 4 will be described first, but the present invention is not limited thereto.

[0062] In this embodiment, the needle length L4 of the fence-shaped probe 4 is further limited to 6 mm to 8 mm, and the fence segment 41 is formed with a first protrusion 414 and a second protrusion 415 spaced apart from each other (in the length direction L). The first protrusion 414 extends a first predetermined width W414 from one of the long wall surfaces 4111 (in the width direction W) of the through groove 411 and is separated from the other long wall surface 4111 of the through groove 411 by a first gap G1. Furthermore, the second protrusion 415 extends a second predetermined width W415 from one of the long wall surfaces 4111 (in the width direction W) of the through groove 411 and is separated from the other long wall surface 4111 of the through groove 411 by a second gap G2.

[0063] More specifically, the first preset width W414 and the second preset width W415 are preferably each 10% to 90% of the adjustment distance W412 between the two long wall surfaces 4111, and are between 5 micrometers (μm) and 10 micrometers. In this embodiment, the first preset width W414 and the second preset width W415 have the same value so that the width of the first gap G1 is equal to the width of the second gap G2, but this invention is not limited thereto. For example, in other embodiments of this invention not shown, the first preset width W414 may be different from the second preset width W415.

[0064] Furthermore, the first protrusion 414 and the second protrusion 415 have roughly the same shape (e.g., rectangle) in this embodiment, but their specific shapes can be adjusted and changed according to design requirements (e.g., square, trapezoid, or semicircle), and are not limited to the drawings of this embodiment.

[0065] More specifically, the first protrusion 414 and the second protrusion 415 are spaced apart from each other along the length direction L by a first distance H1. The first protrusion 414 and the second protrusion 415 are respectively equally spaced adjacent to the two short wall surfaces 4112 of the through groove 411, and each of the first protrusion 414 and the second protrusion 415 is separated from the corresponding short wall surface 4112 by a second distance H2 not greater than the first distance H1.

[0066] Additionally, the ceramic layer 42 can extend from the center of the fence segment 41 toward the first protrusion 414 and the second protrusion 415 respectively, and fill the first gap G1 and the second gap G2. The ceramic layer 42 can be as follows: Figure 12 The through groove 411 is not completely filled; or, the ceramic layer 42 can also be as shown. Figure 13The through groove 411 is filled as shown, and the through groove 411, the first protrusion 414 and the second protrusion 415 are all embedded in the ceramic layer 42, but the present invention is not limited thereto.

[0067] For example, such as Figure 14 As shown, when the needle length L4 of the fence-shaped probe 4 is less than 6 mm, the second protrusion 415 can be omitted, while the first protrusion 414 is formed by extending approximately from the center of one of the long wall surfaces 4111 along the width direction W. The ceramic layer 42 can fill the through groove 411, and both the through groove 411 and the first protrusion 414 are embedded within the ceramic layer 42.

[0068] The above describes a single fence-shaped probe 4 in this embodiment. Since the fence segment 41, with a roughly square cross-section, forms the through groove 411, the cross-section of each support arm 412 can be roughly rectangular, thus facilitating control of the bending direction of the fence segment 41. Furthermore, when the first guide plate unit 1 and the second guide plate unit 2 are misaligned, the fence segments 41 of the plurality of fence-shaped probes 4 elastically bend in the same direction, and one of the two long wall surfaces 4111 of each fence-shaped probe 4 is located outside the other and extends to form the first protrusion 414 (and the second protrusion 415).

[0069] That is, in each of the fence-like probes 4, the first protrusion 414 and the second protrusion 415 are preferably formed on the outer elongated wall surface 4111 to avoid excessive stress concentration, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the first protrusion 414 and the second protrusion 415 of any one of the fence-like probes 4 may also be formed on two separate elongated wall surfaces 4111.

[0070] As described above, the fence-shaped probe 4 disclosed in this embodiment, through its structural design (e.g., the needle length L4 is between 5 mm and 8 mm, and the length L411 of the through groove 411 is greater than 65% of the needle length L4), and with the first protrusion 414 formed in the through groove 411, allows the fence segment 41 of the fence-shaped probe 4 to reduce the deformation of the fence segment 41 during operation through the first protrusion 414, thereby maintaining its mechanical and electrical properties.

[0071] Furthermore, when the needle length L4 of the fence-shaped probe 4 is 6 mm to 8 mm, the through groove 411 is preferably provided with the second protrusion 415, and it can have a specific correspondence with the first protrusion 414 (e.g., the second distance H2 is not greater than the first distance H1) in order to effectively maintain the mechanical and electrical characteristics of the fence-shaped probe 4.

[0072] Furthermore, the vertical probe card in this embodiment can also be referred to as a vertical probe card device. Moreover, the ceramic layer 42 of each of the fence-shaped probes 4 can be omitted or replaced with other materials (such as silicon carbide, aluminum nitride, alumina, silicon nitride, or other high-heat-dissipation, high-voltage-resistant insulating materials) depending on design requirements.

[0073] [Example 4]

[0074] Please see Figure 15 and Figure 16 As shown, this is Embodiment 4 of the present invention. Since this embodiment is similar to Embodiments 1 to 3 above, the similarities between the two embodiments will not be repeated. The main difference between this embodiment and Embodiments 1 to 3 above is that the plurality of fence-shaped probes 4 can have different structures in this embodiment. However, when the first guide plate unit 1 and the second guide plate unit 2 are misaligned, the fence segments 41 of the plurality of fence-shaped probes 4 are preferably still elastically bent in the same direction.

[0075] Specifically, in this embodiment, the plurality of fence-shaped probes 4 include a first probe 4a and a second probe 4b having the same contact force but used for different electrical transmission requirements. The sum of the minimum cross-sectional areas of the fence segments 41 of the first probe 4a is equal to the sum of the minimum cross-sectional areas of the fence segments 41 of the second probe 4b, and the shape of the through groove 411 of the first probe 4a is different from the shape of the through groove 411 of the second probe 4b. For example, in this embodiment, the first probe 4a has a smaller adjustment distance W412 than the second probe 4b, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the through groove 411 of the first probe 4a may be of length L411 or have a shape different from the through groove 411 of the second probe 4b.

[0076] In other words, each of the fence-shaped probes 4 in this embodiment has the same structural design as the fence-shaped probes 4 in embodiments one to three. However, multiple fence-shaped probes 4 (such as the first probe 4a and the second probe 4b) can be used to meet different electrical transmission requirements through the shape design of the through slot 411.

[0077] More specifically, the electrical transmission requirement may include two dissimilar signal transmission requirements, with the first probe 4a and the second probe 4b corresponding to the two signal transmission requirements and having dissimilar shapes formed by their through-slots 411 to achieve impedance matching. Alternatively, the electrical transmission requirement may include two dissimilar current transmission requirements, with the first probe 4a and the second probe 4b respectively corresponding to the two current transmission requirements and having dissimilar shapes formed by their through-slots 411 to respectively possess load current values ​​corresponding to the two current transmission requirements.

[0078] Furthermore, although the first probe 4a and the second probe 4b are based on this embodiment... Figure 15 The following description illustrates the structure, but is not limited thereto. For example, the first probe 4a can also be constructed as described in Embodiment 1 or Embodiment 3, and the second probe 4b can be constructed as described in Embodiment 2, which will not be elaborated here.

[0079] It should be noted that, in this embodiment, the first probe 4a and the second probe 4b may be further paired with a rectangular probe 5 that has not formed any perforations, and the rectangular probe 5 has the same contact needle pressure as the first probe 4a (or the second probe 4b), thereby meeting more electrical transmission requirements.

[0080] Furthermore, in the direction perpendicular to the length L, the cross-sectional area of ​​the rectangular probe 5 is equal to the sum of the minimum cross-sectional areas of the fence segments 41 (e.g., the two support arms 412) of the first probe 4a, and also equal to the sum of the minimum cross-sectional areas of the fence segments 41 (e.g., the two support arms 412) of the second probe 4b, but the rectangular probe 5, the first probe 4a, and the second probe 4b each have different outer surface areas.

[0081] Furthermore, the vertical probe card in this embodiment can also be referred to as a multi-needle vertical probe card. Moreover, the ceramic layer 42 of each of the fence-shaped probes 4 can be omitted or replaced with other materials (such as silicon carbide, aluminum nitride, alumina, silicon nitride, or other high-heat-dissipation, high-voltage-resistant insulating materials) depending on design requirements.

[0082] As described above, the multi-needle vertical probe card disclosed in this embodiment has a specific structural design through multiple fence-shaped probes 4 (e.g., the needle length L4 is between 5 mm and 8 mm, the length L411 of the through groove 411 is greater than 65% of the needle length, and the sum of the minimum cross-sectional areas of the fence segments 41 of the first probe 4a is equal to the sum of the minimum cross-sectional areas of the fence segments 41 of the second probe 4b), so that the shape of the through groove 411 can be adjusted within the adjustment distance W412, thereby meeting different electrical transmission requirements and effectively shortening the detection time.

[0083] [Technical Effects of the Embodiments of the Invention]

[0084] In summary, the vertical probe card disclosed in the embodiments of the present invention, through the structural design of the fence-shaped probe (e.g., the needle length is between 5 mm and 8 mm, and the length of the through groove is greater than 65% of the needle length), allows the ceramic layer (e.g., the ceramic layer is not disposed within the first guide plate unit and the second guide plate unit) to replace the existing polymer insulating layer at specific locations on the fence segment, thereby effectively improving the heat dissipation effect of the fence-shaped probe.

[0085] Furthermore, the vertical probe card device disclosed in the embodiments of the present invention, through the structural design of the fence-shaped probe (e.g., the needle length is between 5 mm and 8 mm, and the length of the through groove is greater than 65% of the needle length), and the first protrusion is formed in the through groove, so that when the fence segment of the fence-shaped probe is in operation, the deformation of the fence segment can be reduced by the first protrusion, thereby maintaining its mechanical and electrical properties.

[0086] Furthermore, the multi-needle vertical probe card disclosed in this embodiment of the invention has a specific structural design through multiple fence-shaped probes (e.g., the needle length is between 5 mm and 8 mm, the length of the through groove is greater than 65% of the needle length, and the sum of the minimum cross-sectional areas of the fence segments of the first probe is equal to the sum of the minimum cross-sectional areas of the fence segments of the second probe), so that the shape of the through groove can be adjusted within the adjustment distance range to meet different electrical transmission requirements, thereby effectively shortening the detection time.

[0087] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the patent scope of the present invention.

Claims

1. A vertical probe card device, characterized in that, The vertical probe card device includes: A first guide plate unit and a second guide plate unit are arranged at intervals from each other; and Multiple fence-shaped probes are disposed between the first guide plate unit and the second guide plate unit; wherein, the needle length of each fence-shaped probe is between 5 mm and 8 mm, and includes: A fence segment, elongated and defined in a length direction, is formed as follows: A through groove is formed along the length direction, and the length of the through groove is greater than 65% of the needle length; and A first protrusion is formed by extending a first predetermined width from one long wall of the through groove and being separated from the other long wall of the through groove by a first gap; and A connecting segment and a test segment are respectively connected to the two ends of the fence segment and respectively pass through the first guide plate unit and the second guide plate unit; When the first guide plate unit and the second guide plate unit are misaligned, the fence segments of the plurality of fence-shaped probes bend elastically in the same direction.

2. The vertical probe card device according to claim 1, characterized in that, In each of the fence-shaped probes, the needle length is further defined as 6 mm to 8 mm, and the fence segment further includes a second protrusion that extends from one of the two long walls by a second predetermined width and is separated from the other of the two long walls by a second gap.

3. The vertical probe card device according to claim 2, characterized in that, The first protrusion and the second protrusion are spaced apart from each other along the length direction and are separated by a first distance.

4. The vertical probe card device according to claim 3, characterized in that, The first protrusion and the second protrusion are respectively equidistant from the two short wall surfaces of the through groove, and each of the first protrusion and the second protrusion is separated from the corresponding short wall surface by a second distance not greater than the first distance.

5. The vertical probe card device according to claim 2, characterized in that, Each of the fence-shaped probes includes a ceramic layer directly formed on the outer surface of the fence segment, which is not disposed within the first guide plate unit and the second guide plate unit, and the ceramic layer of each of the fence-shaped probes has an ASTM rating of at least 3B in the cross-cut test.

6. The vertical probe card device according to claim 5, characterized in that, In each of the fence-shaped probes, the ceramic layer fills the through-groove, and the through-groove, the first protrusion, and the second protrusion are all embedded within the ceramic layer.

7. The vertical probe card device according to claim 5, characterized in that, In each of the fence-shaped probes, the ceramic layer extends from the center of the fence segment toward the first protrusion and the second protrusion, respectively, and fills the first gap and the second gap.

8. The vertical probe card device according to claim 1, characterized in that, In each of the fence-shaped probes, the two long walls are parallel to each other and separated by an adjustment distance, and the first preset width is 10% to 90% of the adjustment distance and is between 5 micrometers and 10 micrometers.

9. The vertical probe card device according to claim 1, characterized in that, In each of the fence-shaped probes, when the first guide plate unit and the second guide plate unit are misaligned with each other, one of the two long walls is located outside the other and extends to form the first protrusion.

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