Method of installing a radio frequency rod of a shielded coil assembly and jig used in the installation process

Abstract

A method of installing a radio frequency (RF) stick with a shield coil assembly and a jig used in the process of installing the RF stick with the shield coil assembly are disclosed, wherein the jig includes a coil segment and a coil holder protruding from a sidewall of the coil segment, wherein a portion of the coil holder is cut away so that an interior of a screw hole in an inner seat can be viewed.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a method for mounting an RF bar with a coil-shield assembly and a jig for use in the RF bar mounting process. Background Technology

[0002] It is known that physical vapor deposition (PVD) is often used in semiconductor manufacturing processes to deposit metal thin films such as tantalum (Ta) or tantalum nitride (TaN) on semiconductor substrates, which can serve as a barrier layer for copper interconnects.

[0003] Common physical vapor deposition reactors, such as DC magnetron vacuum reactors, typically include an RF coil for supplying plasma power, which, along with an RF connector housing and an RF bar, is screwed onto the reactor's inner shield. RF and DC power can be supplied to the RF coil via the RF bar and screws.

[0004] However, during operation, the phenomenon of RF reflected power often occurs, leading to problems such as screw melting and increased costs. Summary of the Invention

[0005] The main objective of this invention is to provide a method for installing an RF rod with a shielded coil assembly and a fixture for use in the RF rod installation process, so as to overcome the shortcomings and disadvantages of the prior art.

[0006] This invention provides a method for mounting an RF rod of a shielded coil assembly. First, a fixture is provided, comprising a coil segment and a coil support protruding from the sidewall of the coil segment, wherein a portion of the coil support is cut away to allow inspection of the interior of a screw hole within the inner seat of the coil support. Next, an RF connector housing including a through-hole is provided, allowing a rotatable insulating sleeve of the RF rod to pass through it. The RF connector housing and the RF rod are then mounted onto the fixture, secured to the fixture using screws. The engagement between the coil support and the rotatable insulating sleeve is verified by checking whether the rotatable insulating sleeve can rotate. Then, the screws are removed. Finally, the RF connector housing and the RF rod are mounted onto the RF coil of the shielded coil assembly.

[0007] According to an embodiment of the present invention, the rotatable insulating sleeve is made of ceramic.

[0008] According to an embodiment of the present invention, the radio frequency coil is a tantalum coil used in a DC magnetron vacuum physical vapor deposition reactor.

[0009] According to an embodiment of the present invention, the coil support includes an outer cup surrounding the inner seat, and wherein a well is provided between the outer cup and the inner seat.

[0010] According to an embodiment of the present invention, the screw is an austenitic steel screw.

[0011] According to an embodiment of the present invention, a quarter portion of the coil support and a quarter portion of the inner seat of the fixture are removed.

[0012] The present invention also provides a fixture for the installation process of an RF rod in a shielded coil assembly, comprising: a coil segment; and a coil support protruding from the sidewall of the coil segment, wherein a portion of the coil support is cut off to allow inspection of the interior of the screw holes within the inner seat.

[0013] According to an embodiment of the present invention, a quarter portion of the coil support and a quarter portion of the inner seat of the fixture are removed.

[0014] According to an embodiment of the present invention, the fixture is made of tantalum. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the appearance of the radio frequency coil as illustrated in an embodiment of the present invention;

[0016] Figure 2 This is a schematic cross-sectional view of the coil support structure for the radio frequency coil;

[0017] Figure 3 This is a schematic diagram illustrating an abnormal contact situation after the RF rod and screw are secured to the RF coil.

[0018] Figure 4 This is a schematic diagram showing a good contact situation after the RF rod and screw are locked to the RF coil;

[0019] Figure 5 This is an external view of the fixture;

[0020] Figure 6 A schematic diagram illustrating the steps for confirming the installation of the RF rod with a fixture before formally installing the shielded coil assembly.

[0021] Explanation of main component symbols

[0022] 10 RF coils

[0023] 11. Ring-shaped metal structure

[0024] 12 Coil Support

[0025] 121 inner seat

[0026] 122 outer cup

[0027] Well 123

[0028] 124 screw hole

[0029] 13 gaps

[0030] 20 RF connector housing

[0031] 210 through hole

[0032] 30 RF rods

[0033] 310 Insulating Sleeve

[0034] 40 screws

[0035] 50 fixtures

[0036] 51 coil segment

[0037] 52 Coil Support

[0038] 521 inner seat

[0039] 522 outer cup

[0040] Well 523

[0041] 524 screw hole

[0042] G Micro-gap Detailed Implementation

[0043] In the following description, details will be illustrated with reference to the accompanying drawings, which also form part of the detailed description of the specification, and which are depicted in a manner that describes specific examples in which the embodiments may be practiced. The embodiments described below are given sufficient detail to enable those skilled in the art to implement them.

[0044] Of course, other embodiments may be adopted, or any structural, logical, and electrical changes may be made without departing from the embodiments described herein. Therefore, the following detailed description should not be regarded as limiting; rather, the embodiments included therein will be defined by the appended claims.

[0045] Please see Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram illustrating the appearance of a radio frequency coil according to an embodiment of the present invention. Figure 2A schematic cross-sectional view of the coil support structure for an RF coil is shown. Figure 1 and Figure 2 As shown, the radio frequency coil 10 includes an annular metal structure 11 and several coil supports 12 protruding outward from the sidewalls of the metal structure 11. The annular metal structure 11 is discontinuous, having gaps 13. According to an embodiment of the invention, the radio frequency coil 10 is a tantalum (Ta) coil used in a DC magnetron vacuum physical vapor deposition reactor. Figure 2 As shown, the coil support 12 includes an outer cup 122 surrounding an inner seat 121, and a well 123 is provided between the outer cup 122 and the inner seat 121. A screw hole 124 is provided in the inner seat 121.

[0046] Figure 3 This example illustrates a situation where abnormal contact occurs after the RF bar and screws are secured to the RF coil. For example... Figure 3 As shown, when the screw 40 secures the RF rod 30 to the coil support 12 through the through-hole 210 of the RF connector housing 20, a tiny gap G may form between the end face of the insulated feed through 310 and the end face of the coil support 12. This results in high contact resistance and high temperature during operation, causing the screw to melt. According to an embodiment of the present invention, the screw 40 is an austenitic steel screw.

[0047] Figure 4 This example illustrates a scenario where the RF rod and screws are securely fastened to the RF coil, resulting in good contact. For example... Figure 4 As shown, when the screw 40 tightly locks the RF rod 30 to the coil bracket 12 through the through hole 210 of the RF connector housing 20, there is no gap between the end face of the insulating sleeve 310 and the end face of the coil bracket 12. This avoids high contact resistance and high temperature during operation, solving the problem of screw melting or wear. However, as Figure 3 The tiny gaps in the G are difficult to detect with a high resistance meter alone.

[0048] To address the aforementioned technical problems, this invention provides a method for mounting an RF rod with a shielded coil assembly. Please refer to [link / reference]. Figure 5 and Figure 6 ,in, Figure 5 Example of the appearance of the fixture, Figure 6 This example illustrates the steps for verifying the contact between the RF rod and screws and the RF coil after they are secured, using a fixture, before formally installing the shielded coil assembly.

[0049] First, provide 50 jigs, such as Figure 5 As shown, the fixture 50 includes a coil segment 51 and a coil support 52 protruding from the side wall of the coil segment 51, wherein the structure of the coil support 52 and Figures 1-2 The coil support 12 of the radio frequency coil 11 is the same. According to an embodiment of the invention, the coil support 52 also includes an outer cup 522 surrounding the inner seat 521, and has a well 523 between the outer cup 522 and the inner seat 521.

[0050] According to an embodiment of the invention, a portion of the coil support 52 is removed to allow inspection of the interior of the screw hole 524 within the inner seat 521 of the coil support 52. According to an embodiment of the invention, a quarter portion of the coil support 52 and a quarter portion of the inner seat 521 are removed.

[0051] According to an embodiment of the present invention, the constituent materials of the jig 50 and Figure 1 and Figure 2 The RF coil 11 is the same as that in the fixture; for example, the fixture 50 is made of tantalum. According to an embodiment of the invention, the coil segment 51 and the coil support 52 are integrally formed. According to an embodiment of the invention, the fixture 50 may be cut from a used RF coil 11, but is not limited thereto.

[0052] Next, as Figure 6 As shown, an RF connector housing 20 is provided, including a through-hole 210, through which a rotatable insulating sleeve 310 of an RF rod 30 passes. According to an embodiment of the invention, the rotatable insulating sleeve 310 is made of ceramic. The RF connector housing 20 and the RF rod 30 are then mounted onto a fixture 50, and screws 40 are used to secure the RF connector housing 20 and the RF rod 30 to the fixture 50. According to an embodiment of the invention, the screws 40 are austenitic steel screws.

[0053] According to an embodiment of the present invention, the engagement between the coil support 52 and the rotatable insulating sleeve 310 is verified by checking whether the rotatable insulating sleeve 310 can rotate. According to an embodiment of the present invention, if the insulating sleeve 310 can rotate, the check is passed, indicating that the RF rod 30 can make tight contact with the RF coil, and the subsequent installation steps can proceed. After removing the screws 40, the RF connector housing 20 and the RF rod 30 are then installed onto the RF coil 10 of the shielded coil assembly, as follows. Figure 2 As shown. According to an embodiment of the present invention, the radio frequency coil 10 is a tantalum coil used in a DC magnetron vacuum physical vapor deposition reactor.

[0054] The advantages of this invention include at least the following: Inspection using the jig 50 is very simple and convenient. Before the actual installation of the RF rod, it can be determined whether the RF rod can make tight contact with the RF coil, effectively avoiding problems such as screw melting or wear. Therefore, this invention can ensure installation quality and reduce the cost of replacing screws.

[0055] The above description is only a preferred embodiment of the present invention. All equivalent changes and modifications made in accordance with the claims of the present invention should be included within the scope of the present invention.

Claims

1. A method for mounting an RF rod with a shielded coil assembly, comprising: A fixture is provided, the fixture including a coil segment and a coil support protruding from the side wall of the coil segment, wherein a portion of the coil support is cut off to allow inspection of the interior of a screw hole within the inner seat of the coil support; A radio frequency connector housing including a through-hole allows a rotatable insulating sleeve of a radio frequency rod to pass through it; The RF connector housing and the RF rod are mounted onto the fixture; Use screws to secure the RF connector housing and the RF rod to the fixture; The engagement between the coil support and the rotatable insulating sleeve is verified by checking whether the rotatable insulating sleeve can be rotated; Remove the screws; as well as The RF connector housing and the RF rod are mounted onto the RF coil of the shielded coil assembly. In this embodiment, a quarter of the coil support and a quarter of the inner seat of the fixture are removed.

2. The method according to claim 1, wherein, The rotatable insulating sleeve is made of ceramic.

3. The method according to claim 1, wherein, The radio frequency coil is a tantalum coil used in a DC magnetron vacuum physical vapor deposition reactor.

4. The method according to claim 1, wherein, The coil support includes an outer cup surrounding the inner seat, and a well is provided between the outer cup and the inner seat.

5. The method according to claim 1, wherein, The screw is an austenitic steel screw.

6. The method according to claim 1, wherein, The position of one-quarter portion of the coil support corresponds to the position of one-quarter portion of the inner seat of the fixture.

7. A fixture for mounting an RF rod in a shielded coil assembly, comprising: Coil segment; as well as A coil support protrudes from the side wall of the coil segment, a portion of which is cut away to allow inspection of the interior of the screw holes within the inner housing. In this embodiment, a quarter of the coil support and a quarter of the inner seat of the fixture are removed.

8. The fixture according to claim 7, wherein, The position of one-quarter portion of the coil support corresponds to the position of one-quarter portion of the inner seat of the fixture.

9. The fixture according to claim 7, wherein, The fixture is made of tantalum.

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