A heatable coating platform
Patent Information
- Application Number
- CN202210388338.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-04-13
- Publication Date
- 2026-09-25
- Estimated Expiration
- 2042-04-13
AI Technical Summary
[0003]本发明所要解决的技术问题在于,提供一种可加热的涂布平台,在保证涂布平台的平面度的前提下,满足了涂布过程中的加热需求,解决了涂布过程中现有的涂布平台加热后无法满足平面度的问题
[0009]与现有技术相比,本发明的可加热的涂布平台,包括底座以及设置在底座上的涂布底板,在底座上还设置至少三个支撑杆,在每个支撑杆的顶部分别设置用于悬浮支撑涂布底板的气浮装置,涂布底板悬浮在气浮装置的顶部。在每个支撑杆上分别设置弹性臂,每个弹性臂的另一端分别固定在涂布底板的侧面上。设置弹性臂使得涂布底板悬浮设置,便于涂布底板受热后伸展变形,保证其平面度在受热后不变。在涂布底板内设置用于给涂布底板加热的加热装置,在涂布底板的四周边缘分别设置多个用于定位涂布基板的基板定位装置。本发明在在保证涂布平台的平面度的前提下,满足了涂布过程中的加热需求,解决了涂布过程中现有的涂布平台加热后无法满足平面度的问题。另一方面,在涂布平台四周设置用于顶升涂布基板的顶杆孔,与机械臂配合以实现机器人的自动上料,便于实现基板涂布产线的自动化。
Smart Images

Figure CN116943973B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of coating equipment technology, and specifically relates to a heatable coating platform. Background Technology
[0002] In existing perovskite solar cell fabrication processes, extrusion-type flat-plate coating is the primary method. Flat-plate coating requires extremely high platform flatness, typically around 5μm; therefore, extrusion-type flat-plate coating machines generally use marble as the coating platform. However, when the process requires simultaneous coating and heating, the poor thermal conductivity of the marble coating platform fails to meet the requirements. If stainless steel or aluminum alloy is used as the coating platform, improper structural design can easily lead to thermal deformation, resulting in unsatisfactory flatness. Furthermore, when production lines need automation, numerous holes for the movement of ejector pins must be drilled in the platform; drilling these holes in marble platforms is costly and difficult to implement. Summary of the Invention
[0003] The technical problem to be solved by the present invention is to provide a heatable coating platform that meets the heating requirements during the coating process while ensuring the flatness of the coating platform, thus solving the problem that existing coating platforms cannot meet the flatness requirements after heating during the coating process.
[0004] The present invention is implemented as follows: a heatable coating platform is provided, including a base and a coating base plate disposed on the base. At least three support rods are also disposed on the base. An air flotation device for suspending and supporting the coating base plate is disposed on the top of each support rod. An elastic arm is disposed on each support rod. The other end of each elastic arm is fixed to the coating base plate. A heating device for heating the coating base plate is disposed inside the coating base plate. A plurality of substrate positioning devices for positioning the coating substrate are disposed on the four edges of the coating base plate.
[0005] Furthermore, the coating platform also includes a lifting device, which includes several limiting rods and at least three lifting cylinders respectively disposed on the base, and a lifting platform disposed between the limiting rods and the coating base plate. The extended end of each lifting cylinder is fixed to the bottom surface of the lifting platform. The lifting cylinders simultaneously drive the lifting platform to move up and down. The limiting rods limit the descent height of the lifting platform. Multiple lifting rods are respectively disposed between the lifting platform and the coating base plate. Multiple rod through holes corresponding to the lifting rods are disposed on the coating base plate. The lower end of each lifting rod is movably and magnetically attracted to the lifting platform, and its upper end is located in the corresponding rod through hole of the coating base plate.
[0006] Furthermore, the elastic arm includes a positioning rod and an elastic rod. One end of the positioning rod is fixed to the support rod, and the elastic rod is disposed on the other end of the positioning rod. The elastic rod is connected to the side of the coating substrate.
[0007] Furthermore, the substrate positioning device includes a positioning cylinder and a baffle. The positioning cylinder is fixed on the bottom surface of the base, and the baffle is disposed on the extended end of the positioning cylinder.
[0008] Furthermore, multiple casters are provided at the bottom of the base.
[0009] Compared with existing technologies, the heatable coating platform of the present invention includes a base and a coating substrate mounted on the base. At least three support rods are also provided on the base, and an air flotation device for suspending and supporting the coating substrate is provided at the top of each support rod, with the coating substrate suspended above the air flotation device. An elastic arm is provided on each support rod, with the other end of each elastic arm fixed to the side of the coating substrate. The elastic arms allow the coating substrate to be suspended, facilitating its expansion and deformation after heating and ensuring its flatness remains unchanged after heating. A heating device for heating the coating substrate is provided inside the coating substrate, and multiple substrate positioning devices for positioning the coating substrate are provided around the perimeter of the coating substrate. The present invention satisfies the heating requirements during the coating process while maintaining the flatness of the coating platform, solving the problem that existing coating platforms cannot maintain flatness after heating. Furthermore, push rod holes for lifting the coating substrate are provided around the coating platform, which, in conjunction with a robotic arm, enables automatic loading by a robot, facilitating the automation of the substrate coating production line. Attached Figure Description
[0010] Figure 1 This is a three-dimensional schematic diagram of a preferred embodiment of the heatable coating platform of the present invention; Figure 2 for Figure 1 Another perspective 3D illustration; Figure 3 for Figure 1 The main view; Figure 4 for Figure 3 A plan view of the lifting device in the lifting state. Detailed Implementation
[0011] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.
[0012] Please refer to the following at the same time Figures 1 to 4 As shown, a preferred embodiment of the heatable coating platform of the present invention includes a base 1, a coating base plate 2 disposed on the base 1, and a lifting device 3.
[0013] At least three support rods 4 are also provided on the base 1, and an air flotation device 5 for suspending and supporting the coating substrate 2 is provided on the top of each support rod 4. The coating substrate 2 is suspended on the top of the air flotation device 5. An elastic arm 6 is provided on each support rod 4. The other end of each elastic arm 6 is fixed to the side of the coating substrate 2. A heating device 7 for heating the coating substrate 2 is provided inside the coating substrate 2. Multiple substrate positioning devices 8 for positioning the coating substrate A are provided around the four edges of the coating substrate 2.
[0014] In this embodiment, four support rods 4 are provided on the base 1. The four support rods 4 are respectively located at the bottom of the four corners of the coating base plate 2.
[0015] The stress of the coating substrate 2 during heating is fully released by the air flotation device 5, thereby minimizing the thermal deformation of the coating substrate and ensuring that the flatness of the coating substrate 2 remains unchanged under heating. The elastic arm 6 not only ensures that the position of the coating substrate 2 using the air flotation device 8 is fixed, but also allows the thermal stress and thermal deformation of the coating substrate 2 to be fully released, further reducing the adverse effects of the coating substrate 2 on flatness under heating.
[0016] The air flotation device 5 includes an air inlet, a pressure reducing valve, an air volume regulating valve, and an air outlet. During installation and commissioning, the pressure reducing valve and the air volume regulating valve are adjusted to suspend the coating substrate 2 by 1mm to 2mm. A high-precision level is used to check the levelness of the coating substrate 2, and the suspension height of each air flotation device 5 is adjusted to ensure that the coating substrate 2 is level.
[0017] Specifically, the lifting device 3 includes a plurality of limiting rods 31 and at least three lifting cylinders 32 respectively disposed on the base 1, and a lifting platform 33 disposed between the limiting rods 31 and the coating base plate 2. The protruding end of each lifting cylinder 32 is fixed to the bottom surface of the lifting platform 33, and the lifting cylinder 32 simultaneously drives the lifting platform 33 to move up and down. The limiting rods 31 limit the descent height of the lifting platform 33.
[0018] In this embodiment, the lifting device 3 is equipped with four lifting cylinders 32, which are located at the bottom of the four corners of the lifting platform 33, thereby enhancing the stability of the lifting platform 33 as it moves up and down.
[0019] Multiple lifting rods 34 are respectively arranged between the lifting platform 33 and the coating substrate 2, and multiple lifting rod through holes 21 corresponding to the lifting rods 34 are provided on the coating substrate 2. The lower end of each lifting rod 34 is magnetically attached to the lifting platform 33, and its upper end is located in the corresponding lifting rod through hole 21 of the coating substrate 2. The upper end of each lifting rod 34 moves up and down simultaneously with the lifting platform 33 along the corresponding lifting rod through hole 21, and the multiple lifting rods 34 simultaneously lift the coating substrate A placed on the coating substrate 2.
[0020] The lifting rod 34 is magnetically attached to the lifting platform 33, allowing the lifting rod 34 to slide on the surface of the lifting platform 33 during the heating and deformation of the coating substrate. This ensures that the lifting rod 34 can move up and down within the lifting rod through-hole 21 of the coating substrate 2, successfully achieving the lifting function. When the robot places the coating substrate A on the lifting rod 34, as... Figure 4 As shown, the lifting device 3 descends, and the coating substrate A is stably placed on the coating base plate 1. The substrate positioning device 8 then positions and fixes the periphery of the coating substrate A, thereby realizing the automatic feeding of the robot.
[0021] In this embodiment, the lifting device 3 includes twelve lifting rods 34, which are evenly distributed around the four perimeters of the lifting platform 33.
[0022] Specifically, the elastic arm 6 includes a positioning rod 61 and an elastic rod 62. One end of the positioning rod 61 is fixed to the support rod 4, and the elastic rod 62 is disposed on the other end of the positioning rod 61, and the elastic rod 62 is connected to the side of the coating base plate 2. The elastic rod 62 is made of rubber or silicone.
[0023] Specifically, the substrate positioning device 8 includes a positioning cylinder 81 and a baffle 82. The positioning cylinder 81 is fixed on the bottom surface of the base 1, and the baffle 82 is disposed on the extended end of the positioning cylinder 81. After the lifting rod 34 descends and places the coated substrate A on the coating base plate 1, the substrate positioning device 8 precisely positions the coated substrate A, thereby ensuring that the placement position of each coated substrate A on the coating base plate 1 remains consistent, and the coated substrate A is accurately positioned on the coating base plate 1.
[0024] Multiple casters 9 are provided at the bottom of the base 1. The casters 9 can roll or be fixed. The casters 9 facilitate the movement of the coating platform.
[0025] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A heatable coating platform, comprising a base and a coating substrate disposed on the base, characterized in that, At least three support rods are also provided on the base. An air flotation device for suspending and supporting the coating substrate is provided on the top of each support rod. An elastic arm is provided on each support rod. The other end of each elastic arm is fixed to the coating substrate. A heating device for heating the coating substrate is provided inside the coating substrate. Multiple substrate positioning devices for positioning the coating substrate are provided on the four edges of the coating substrate. The coating platform also includes a lifting device, which includes several limiting rods and at least three lifting cylinders respectively set on the base, and a lifting platform set between the limiting rods and the coating base plate. The extended end of each lifting cylinder is fixed to the bottom surface of the lifting platform. The lifting cylinders simultaneously drive the lifting platform to move up and down. The limiting rods limit the descent height of the lifting platform. Multiple lifting rods are respectively set between the lifting platform and the coating base plate. Multiple rod through holes corresponding to the lifting rods are set on the coating base plate. The lower end of each lifting rod is magnetically attracted to the lifting platform, and its upper end is located in the corresponding rod through hole of the coating base plate.
2. The heatable coating platform as described in claim 1, characterized in that, The elastic arm includes a positioning rod and an elastic rod. One end of the positioning rod is fixed to the support rod, and the elastic rod is set on the other end of the positioning rod. The elastic rod is connected to the side of the coating substrate.
3. The heatable coating platform as described in claim 1, characterized in that, The substrate positioning device includes a positioning cylinder and a baffle. The positioning cylinder is fixed on the bottom surface of the base, and the baffle is disposed on the extended end of the positioning cylinder.
4. The heatable coating platform as described in claim 1, characterized in that, Multiple casters are provided at the bottom of the base.
Citation Information
Patent Citations
Supporting mechanism and coating supporting device
CN203578136U
Vacuum adsorption platform and proton membrane coating equipment
CN213000966U
Substrate heating device
WO2015156529A1