料盘移载装置以及具有料盘移载装置的作业设备

By designing an automated tray transfer device, the high cost and inaccuracy of manual handling in semiconductor production were solved, realizing automated tray delivery and precise positioning, thus improving production efficiency and safety.

CN116946687BActive Publication Date: 2026-07-17KING YUAN ELECTRONICS

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
KING YUAN ELECTRONICS
Filing Date
2022-04-15
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In current semiconductor manufacturing, the transport of material trays relies on manual labor, resulting in high labor costs, inaccurate transport, lack of systematic management, and difficulty in quickly locating the material trays, which affects production efficiency and accuracy.

Method used

Design a tray transfer device including a push rod mechanism, a transport structure, a pressing mechanism and a control unit. Through slide rails, drive wheels, position sensors and automatic control, the device can realize the automated conveying and precise positioning of the tray.

Benefits of technology

It enables automated tray delivery, reduces labor costs, increases loading and unloading speed, ensures accurate tray positioning and systematic management, reduces vibration and shaking during transportation, and protects semiconductor components.

✦ Generated by Eureka AI based on patent content.

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Abstract

本发明公开了一种料盘移载装置以及具有料盘移载装置的作业设备,料盘移载装置包括有一主架体、一推杆机构以及一运载结构。推杆机构包括一连接杆以及一第一摇杆,可通过第一摇杆的第一接触部朝料盘的侧面施力而推动料盘,进而将料盘推送至生产机台。运载结构包括一基座、多个驱动轮、一运载动力模块以及多个料盘位置感测器,可通过多个驱动轮带动料盘移动,并利用其上的料盘位置感测器判断料盘目前的所在位置,以提供更为准确的定位。因此,本发明可达成料盘的自动化输送作业,有效取代传统人工搬运,大幅降低人力成本,较传统人工搬运节省时间。
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