一种相对波前测量精度的测试装置及方法

By moving the sensor position and changing the wavelength of the light source, the relative wavefront measurement accuracy of the Hartmann-Shack wavefront sensor is directly measured, which solves the problem of insufficient accuracy in existing technologies that rely on laser interferometers and realizes accurate measurement in different wavebands.

CN116952392BActive Publication Date: 2026-07-17SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
Filing Date
2023-07-26
Publication Date
2026-07-17

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Abstract

本发明涉及波前测量技术领域,公开了一种相对波前测量精度的测试装置及方法,方法包括:控制传感器与球面波前的中心等高,并记录传感器的初始位置;按照预设轨迹及预设步长移动传感器至预设位置,记录预设位置下的波前像差测量值;根据预设位置下的波前像差测量值,计算获得相对波前测量精度。本发明通过移动传感器的位置改变球面波前与传感器接收端的距离,可以直接测量传感器的相对波前测量精度,无需依赖激光干涉仪与像差相位板,不依赖测试器具的精度和测量环境即可精确测量哈特曼‑夏克波前传感器的相对波前测量精度,操作简便,功能丰富。
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