一种可实现熔石英微透镜阵列CO2激光精密抛光的初始微结构临界尺寸设计方法
By establishing a simulation model of fused silica CO2 laser polishing, the initial microstructure parameters of the fused silica microlens array were determined, solving the problem of unclear surface morphology and microlens array shape control in the existing technology, and realizing efficient and precise microlens array processing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HARBIN INST OF TECH
- Filing Date
- 2023-07-28
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing technology, the formation mechanism of the surface morphology of fused silica CO2 laser polishing and the shape control mechanism of the microlens array are unclear. As a result, it may not be possible to obtain a target microlens array structure that meets the quality requirements by determining the structural parameters and laser parameters through trial and error, and the trial and error method is inefficient.
A simulation model of the initial microstructure of fused silica was established using CO2 laser melting and polishing based on thermodynamics and fluid mechanics theories. The relationship between the stable temperature of the fused silica surface and the laser power and laser radius was determined. By simulating the polishing process with different structural parameters, the critical size of the initial microstructure was determined to achieve the processing of high-quality microlens arrays.
It provides a clear range of initial microstructure parameters, avoiding the problems of large workload and low efficiency of trial and error methods, establishing the selection of laser parameters during CO2 laser polishing, improving processing efficiency and quality, and filling the gap in the control of surface morphology and microlens array shape in fused silica CO2 laser polishing.
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Figure CN116956775B_ABST