氧化铈粒子、其制造方法及其在化学机械研磨中的用途
By preparing spherical cerium oxide particles, the problems of low grinding efficiency and high defect rate in existing technologies have been solved, achieving a high-efficiency and simple chemical mechanical grinding effect that is suitable for industrial production.
CN116964003BActive Publication Date: 2026-07-17RHODIA OPERATIONS SAS
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- RHODIA OPERATIONS SAS
- Filing Date
- 2022-03-10
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Existing cerium oxide particles suffer from low grinding efficiency and high defect rate in chemical mechanical polishing, and their preparation methods are complex and costly, making them difficult to implement on an industrial scale.
Method used
Spherical cerium oxide particles are prepared by mixing an alkali, an aqueous solution containing NO3- and CeIII, and an organic acid under an inert atmosphere, followed by heat treatment and acidification, and optionally mechanical treatment to deagglomerate, to form cerium oxide particles with a high roughness index and spherical morphology.
Benefits of technology
It improves the efficiency of chemical mechanical grinding, reduces defects, simplifies the preparation process, and is suitable for industrial-scale applications.
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Figure CN116964003B_ABST
Abstract
本发明涉及粗糙度指数RI至少为5的氧化铈粒子、其制造方法、以及其在化学机械研磨应用中的用途。
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