A pulsed laser damage assessment system

Abstract

This application relates to the field of damage threshold testing, specifically to a pulsed laser damage determination system, comprising: a laser, used to emit pulsed laser light directed towards the sample under test; a beam splitter, used to split the laser light emitted by the laser into a first beam and a second beam; a first energy detection module, used to detect the energy of the first beam; a second energy detection module, used to detect the energy of the second beam after it penetrates the sample under test; and a camera, used to capture the flash generated by the laser incident surface of the sample under damage. The system further includes: a controller, used to acquire the first energy value detected by the first energy detection module, the second energy value detected by the second energy detection module, and the flash information acquired by the camera, and to determine whether the sample under test is damaged based on the first energy value, the second energy value, and the flash information. This system combines the flash method and the transmission method, which can improve the accuracy of damage detection.

Description

Technical Field

[0001] This application relates to the field of damage threshold testing, specifically to a pulsed laser damage assessment system for determining whether an optical device is damaged under the action of a pulsed laser. Background Technology

[0002] In high-energy laser applications, there are high requirements for the damage resistance of various optical devices. Therefore, it is essential to test the laser damage threshold to improve fabrication methods and obtain optical devices with higher thresholds. Because short-pulse lasers have strong peak energy, they are highly susceptible to damaging devices; therefore, testing the damage threshold of short-pulse lasers is of great significance. Online determination of damage points is a crucial step in determining the accuracy of the tested damage threshold and whether automation of the testing is possible. The existing plasma flash method is a commonly used method for determining whether a test point is damaged. However, this method has several problems: 1. A single method cannot confirm whether a test point has been misjudged; subsequent offline methods are needed to determine whether misjudgments have occurred, greatly affecting testing efficiency; 2. The plasma flash method itself has a certain probability of misjudgment due to the absence of flashes or weak flashes at the time of damage, which may not be captured. The existing transmission method is also a method for determining whether a test point is damaged. Transmission methods typically use continuous probe light to detect changes in the energy of transmitted light. This approach only obtains changes in the transmittance at the damage point, making it difficult to determine some small damage points based on transmittance changes. Summary of the Invention

[0003] This application provides a pulsed laser damage assessment system, which can solve the technical problem of low damage assessment accuracy in the prior art.

[0004] The pulsed laser damage assessment system provided in this application includes components arranged sequentially along the optical path:

[0005] A laser is used to emit pulsed laser light that is directed at the sample to be tested.

[0006] A beam splitter is used to split the pulsed laser emitted by a laser into a first beam and a second beam.

[0007] A first energy detection module is used to detect the energy of the first beam; and

[0008] The second energy detection module is used to detect the energy of the second beam after it penetrates the sample to be tested;

[0009] A camera is used to capture the flashes produced by the laser incident surface of a sample under damage.

[0010] The pulsed laser damage assessment system also includes a controller, which is used to acquire the first energy value detected by the first energy detection module, the second energy value detected by the second energy detection module, and the flash information acquired by the camera, and to determine whether the sample under test is damaged based on the first energy value, the second energy value, and the flash information.

[0011] According to the aforementioned embodiments of this application, the controller makes a first judgment on whether the sample to be tested is damaged based on the flash information, and makes a second judgment on whether the sample to be tested is damaged based on the first energy value and the second energy value. If the judgment results of the first judgment and the second judgment are both that there is damage, the controller finally determines that the sample to be tested is damaged.

[0012] According to any of the foregoing embodiments of this application, the flashing information includes flashing and no flashing. If the flashing information is flashing, the first judgment made by the controller is that there is damage.

[0013] According to any of the foregoing embodiments of this application, the controller is used to calculate the original energy value of the second beam before it penetrates the sample to be tested based on the first energy value and the splitting ratio of the splitting element. The controller is also used to calculate the energy difference between the original energy value and the second energy value. If the energy difference is greater than the preset energy loss value, the second judgment made by the controller is that there is damage.

[0014] The controller is also used to calculate the preset energy loss value according to the following formula:

[0015] TH1 = P1 - P1 × TR

[0016] Where TH1 is the preset energy loss value, P1 is the original energy value, and TR is the transmittance of the sample to be tested.

[0017] According to any of the foregoing embodiments of this application, the controller is used to calculate the original energy value of the second beam before it penetrates the sample to be tested based on the first energy value and the splitting ratio of the splitting element. The controller is also used to calculate a preset transmitted energy value based on the original energy value and the transmittance of the sample to be tested. If the second energy value is less than the preset transmitted energy value, the controller determines that the sample to be tested is damaged.

[0018] The controller is also used to calculate the preset transmittance energy value according to the following formula:

[0019] TH2 = P1 × TR

[0020] Where TH2 is the preset transmission energy value, P1 is the original energy value, and TR is the transmittance of the sample to be tested.

[0021] According to any of the foregoing embodiments of this application, the controller is further configured to issue a prompt message indicating that there is a doubt if the judgment results of the first judgment and the second judgment are inconsistent.

[0022] According to any of the foregoing embodiments of this application, the controller is further configured to issue a prompt message to adjust the energy when the judgment results of the first judgment and the second judgment are both that there is no damage, or to mark the energy density value of the pulsed laser emitted by the current laser as a low energy density value that cannot cause damage to the sample under test.

[0023] According to any of the foregoing embodiments of this application, the pulsed laser damage determination system further includes an energy control optical path disposed between the laser and the beam splitter, the energy control optical path being used to modulate the energy of the pulsed laser emitted by the laser.

[0024] According to any of the foregoing embodiments of this application, the energy modulation optical path includes a first polarizing plate beam splitter, a half-wave plate, and a second polarizing plate beam splitter arranged sequentially along the optical path direction.

[0025] According to any of the foregoing embodiments of this application, the pulsed laser damage determination system further includes an adjustable aperture disposed between the laser and the beam splitter, the adjustable aperture being used to adjust the size of the pulsed laser spot emitted by the laser.

[0026] According to any of the foregoing embodiments of this application, the pulsed laser damage determination system further includes a focusing lens disposed between the laser and the beam splitter, the focusing lens being used to focus the pulsed laser at the sample to be tested.

[0027] According to any of the foregoing embodiments of this application, the beam splitter is used to split the pulsed laser emitted by the laser into a first beam, a second beam, and a third beam, wherein the second beam is transmitted light, and the first and third beams are reflected light.

[0028] The pulsed laser damage assessment system also includes

[0029] A beam quality analyzer is used to detect the spot size of a third beam.

[0030] The optical path between the spectrometer and the sample under test is a conjugate optical path with the optical path between the spectrometer and the beam quality analyzer.

[0031] According to any of the foregoing embodiments of this application, the controller is further configured to acquire the spot size detected by the beam quality analyzer and calculate the energy density of the pulsed laser based on the spot size and the first energy value.

[0032] According to any of the foregoing embodiments of this application, the pulsed laser damage assessment system further includes a light source for illuminating the sample to be tested.

[0033] According to any of the foregoing embodiments of this application, an optical switch is also provided between the laser and the beam splitter, and the optical switch is used to control whether the pulsed laser emitted by the laser enters the beam splitter.

[0034] According to any of the foregoing embodiments of this application, the beam splitting element is an optical wedge.

[0035] The controller in the pulsed laser damage assessment system of this application embodiment is communicatively connected to a first energy detection module, a second energy detection module, and a camera. It acquires a first energy value detected by the first energy detection module, a second energy value detected by the second energy detection module, and flash information acquired by the camera. Based on the first energy value, the second energy value, and the flash information, it determines whether the sample under test is damaged. When the second beam irradiates the laser incident surface of the sample under test, if damage occurs to the laser incident surface, part of the pulsed laser energy will be converted into thermal / mechanical energy, thereby destroying the sample under test, and part of the energy will be converted into plasma flash, which will be captured by the camera. Given the transmittance of the sample under test and the splitting ratio of the beam splitter, the relationship between the first and second energy values ​​can also determine whether the sample is damaged. Therefore, combining the flash information with the information from the first and second energy values ​​for assessment can improve the accuracy of damage assessment. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the structure of a pulsed laser damage assessment system according to an embodiment of this application. Detailed Implementation

[0037] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.

[0038] Please refer to the figure. This application provides a pulsed laser damage assessment system for assessing damage to a sample. The sample can be various transmissive optical devices, such as lenses, transparent substrate materials, and transmissive light field modulation devices.

[0039] The pulsed laser damage assessment system of this application includes a laser, a beam splitter, a first energy detection module, a second energy detection module, a camera, and a controller.

[0040] The laser in the pulsed laser damage assessment system is used to emit pulsed laser light directed at the sample under test. For example, it can be a pulsed laser with a center wavelength of 1064 nm and a pulse width of 6 ns, which can provide a pulse pump source to provide laser pulses that damage the sample under test.

[0041] In the pulsed laser damage assessment system, the beam splitting element is set in the output light path of the laser to split the pulsed laser emitted by the laser into a first beam and a second beam. The second beam can be transmitted light, which is directed toward the sample to be tested and used to damage the sample. The first beam can be reflected light, which is directed toward the first energy module described later and can be used to calculate the energy of the second beam.

[0042] In the pulsed laser damage assessment system, the first energy detection module is positioned along the propagation path of the first laser beam to detect its energy and obtain its energy value. The first energy detection module can be a laser energy meter, laser energy sensor, laser energy detector, or other similar device or equipment.

[0043] In a pulsed laser damage assessment system, the second energy detection module is located on the light-emitting side of the sample under test. It detects the energy of the second beam after it penetrates the sample, obtaining the energy value of the second beam transmitted from the sample. Similarly, the second energy detection module can be a laser energy meter, laser energy sensor, laser energy detector, or other similar device or equipment.

[0044] In a pulsed laser damage assessment system, the camera is positioned near the laser incident surface of the sample under test to capture the flashes generated on the laser incident surface when the sample is damaged. When a second beam irradiates the laser incident surface of the sample, if damage occurs to the laser incident surface, some of the energy is converted into plasma flashes, which are then captured by the camera. Therefore, whether the sample is damaged can be determined by whether the camera captures the flash information.

[0045] The controller in the pulsed laser damage assessment system is communicatively connected to a first energy detection module, a second energy detection module, and a camera. It acquires the first energy value detected by the first energy detection module, the second energy value detected by the second energy detection module, and flash information acquired by the camera. Based on the first energy value, the second energy value, and the flash information, it determines whether the sample under test is damaged. When the second laser beam irradiates the laser incident surface of the sample under test, if damage occurs to the laser incident surface, part of the pulsed laser energy will be converted into thermal / mechanical energy, thus destroying the sample, while part of the energy will be converted into plasma flash, which will be captured by the camera. Given the transmittance of the sample and the splitting ratio of the beam splitter, the relationship between the first and second energy values ​​can also determine whether the sample is damaged. Therefore, combining the flash information with the information from the first and second energy values ​​improves the accuracy of damage assessment.

[0046] In some embodiments, the controller makes a first judgment on whether the sample under test is damaged based on flash information. During testing, a flash occurs when the sample is damaged by a pulsed laser. If the camera captures the flash, it can be determined that the sample under test has been damaged at the current energy level. The controller makes a second judgment on whether the sample under test is damaged based on a first energy value and a second energy value. If both the first and second judgments indicate damage, the controller ultimately determines that the sample under test is damaged. When the sample under test is undamaged, the transmittance of the pulsed laser passing through the sample is consistent with that of the sample. When the sample under test is damaged, some of the energy of the pulsed laser causing the damage is lost during the damage process, resulting in a significant decrease in the transmitted energy value of the second beam. By comparing the change in energy value before and after the sample is transmitted, it can be determined whether the sample is damaged. After determining damage in this way, the result of the flash determination captured by the camera is compared to verify the accuracy of the flash determination result.

[0047] As mentioned above, if the camera captures a flash, it indicates that the sample under test is damaged; if the camera does not capture a flash, it indicates that the sample under test is not damaged. Therefore, flash information can include flashes and no flashes. If the flash information indicates that there is a flash, the controller's first judgment result is that there is damage.

[0048] In some embodiments, the controller calculates the original energy value of the second beam before it penetrates the sample under test based on the first energy value and the splitting ratio of the beam splitter. For example, if the splitting ratio of the beam splitter is 1:32, then the ratio of the first energy value to the original energy value is 1:32, and the original energy value is 32 times the first energy value. The controller also calculates the energy difference between the original energy value and the second energy value. If the energy difference is greater than a preset energy loss value, the controller's second judgment result is that damage exists. Due to the influence of the transmittance of the sample under test, the second energy value is necessarily less than the original energy value. The energy loss caused by the transmittance of the sample under test is the preset energy loss value. If the energy difference calculated by the controller is greater than the preset energy loss value, it indicates that part of the energy of the second beam has undergone energy conversion, and this part of the energy has caused damage to the sample under test.

[0049] Traditional transmission methods involve setting up a separate continuous test light source at the laser incident surface of the sample and a power detector at the laser exit surface to detect the power of the transmitted light after passing through the sample. The presence of damage is then determined by comparing the transmitted light power with the original power of the test light source. A drawback of this method is that small damage points show minimal changes in transmittance and may not be detected. In contrast, this application utilizes the pump pulse laser energy values ​​before and after transmission through the sample to determine damage. This eliminates the need for a separate light source and allows for accurate detection even at very small damage points, thus improving the accuracy of damage assessment.

[0050] In some embodiments, the controller is also configured to calculate a preset energy loss value according to the following formula:

[0051] TH1=P1-P1×TR (1)

[0052] Where TH1 is the preset energy loss value, P1 is the original energy value, and TR is the transmittance of the sample to be tested.

[0053] In some embodiments, the controller calculates the original energy value of the second beam before it penetrates the sample under test based on the first energy value and the splitting ratio of the beam splitter. For example, if the splitting ratio of the beam splitter is 1:32, then the ratio of the first energy value to the original energy value is 1:32, and the original energy value is 32 times the first energy value. The controller also calculates a preset transmitted energy value based on the original energy value and the transmittance of the sample under test. If the second energy value is less than the preset transmitted energy value, the controller determines that the sample under test is damaged. Due to the influence of the transmittance of the sample under test, the second energy value is necessarily less than the original energy value. The energy value that the pulsed laser transmitted from the sample under test should have is the preset transmitted energy value, only affected by the transmittance of the sample under test. If the second energy value is less than the preset transmitted energy value, it means that part of the energy of the second beam exerted a force on the sample under test, causing damage to the sample.

[0054] In some embodiments, the controller is also configured to calculate a preset transmittance energy value according to the following formula:

[0055] TH2=P1×TR (2)

[0056] Where TH2 is the preset transmission energy value, P1 is the original energy value, and TR is the transmittance of the sample to be tested.

[0057] In some embodiments, the controller calculates the original energy value of the second beam before it penetrates the sample under test based on the first energy value and the splitting ratio of the beam splitter. For example, if the splitting ratio of the beam splitter is 1:32, then the ratio of the first energy value to the original energy value is 1:32, and the original energy value is 32 times the first energy value. The controller also calculates the ratio of the second energy value to the original energy value. If this ratio is less than the transmittance of the sample under test, the controller's second judgment result is that damage exists. If the sample under test is not damaged, the ratio of the second energy value to the original energy value should be equal to the transmittance of the sample under test. Therefore, if the ratio of the second energy value to the original energy value is less than the transmittance of the sample under test, it indicates that part of the energy of the second beam exerted a force on the sample under test, causing damage to the sample.

[0058] In some embodiments, the controller is further configured to issue a warning message indicating the presence of a suspected point if the judgment results of the first judgment and the second judgment are inconsistent. If the judgment results of the first judgment and the second judgment are inconsistent, it means that one of the first judgment and the second judgment results in the presence of damage, while the other judgment results in the absence of damage. In this case, the current pulsed laser irradiation point of the sample under test can be marked as a suspected point, and the controller will issue a warning message indicating the presence of a suspected point.

[0059] In some embodiments, the controller is further configured to, if both the first and second determinations result in no damage, issue an energy adjustment prompt or mark the current pulsed laser energy density value as a low energy density value that cannot damage the sample under test. If both the first and second determinations result in no damage, it indicates that the pulsed laser energy of the second beam is insufficient to damage the sample under test. In this case, the controller can issue an energy adjustment prompt to allow the operator or automatic control device to adjust the energy of the pulsed laser emitted by the laser, or mark the current pulsed laser energy density value as a low energy density value that cannot damage the sample under test.

[0060] In some embodiments, the pulsed laser damage assessment system further includes an energy control optical path disposed between the laser and the beam splitter, the energy control optical path being used to modulate the energy of the pulsed laser emitted by the laser. During the damage assessment of the sample under test, pulsed lasers of different energy densities need to be irradiated onto the surface of the sample to analyze the critical laser energy density value that can cause damage to the sample. Therefore, by setting the beam splitter, the energy density of the pulsed laser emitted by the laser can be adjusted as needed.

[0061] In some embodiments, the energy modulation optical path includes a first polarizing plate beam splitter, a half-wave plate, and a second polarizing plate beam splitter arranged sequentially along the optical path direction. The pulsed laser emitted by the laser passes through the first polarizing plate beam splitter to obtain a pulsed laser with a defined polarization direction. Then, the polarization direction of the laser pulse is changed by the half-wave plate, and finally, the second polarizing plate beam splitter splits the beam, thereby controlling the energy of the pulsed laser. Pulsed lasers with different polarization directions have different energies when passing through the second polarizing plate beam splitter, so the energy of the pulsed laser can be adjusted by changing the polarization direction of the half-wave plate.

[0062] Of course, other optical path structures can also be used to achieve the above-mentioned energy modulation optical path function. For example, by using a continuous neutral density filter, different proportions of absorption (or reflection) can be achieved by rotating the coating area to provide linearly adjustable energy attenuation, thereby adjusting the energy of the pulsed laser.

[0063] In some embodiments, the pulsed laser damage assessment system further includes an adjustable aperture disposed between the laser and the beam splitter. The adjustable aperture is used to adjust the size of the pulsed laser spot emitted by the laser. The adjustable aperture is used to control the diameter of the pulsed laser beam emitted by the laser, thereby achieving the purpose of adjusting the size of the laser spot at the focal point, and can also eliminate side lobes of the spot, obtaining a better Gaussian spot at the focal point.

[0064] In some embodiments, the pulsed laser damage assessment system further includes a focusing lens disposed between the laser and the beam splitter. The focusing lens is used to focus the pulsed laser at the sample to be tested. That is, the sample to be tested is placed at the focal point of the focusing lens. Since a large spot size is required for damage testing, a focusing lens of 1m to 2m can be selected for focusing.

[0065] In some embodiments, a beam splitter is used to split the pulsed laser emitted by the laser into a first beam, a second beam, and a third beam. The second beam is transmitted light, while the first and third beams are reflected light. As mentioned earlier, the second beam is the beam that penetrates the sample under test, the first beam is the beam used to measure the energy value of the pulsed laser, and the third beam is used to measure the spot size of the second beam irradiating the sample under test. Therefore, the pulsed laser damage assessment system also includes a beam quality analyzer, which is used to detect the spot size of the third beam. The optical paths between the beam splitter and the sample under test are conjugate optical paths with the optical path between the beam splitter and the beam quality analyzer. That is, the sample under test is located at the focal point of the second beam, and the beam quality analyzer is located at the focal point of the third beam. Therefore, the spot size of the third beam measured by the beam quality analyzer is equal to the spot size at the focal point of the second beam. By using the measured spot size and the first energy value detected by the first energy detection module, the energy density of the pulsed laser emitted by the laser can be calculated. This allows for real-time recording, in conjunction with the controller's assessment results, of whether the pulsed laser with the current energy density value can cause damage to the sample under test.

[0066] In some embodiments, the controller is also configured to acquire the spot size detected by the beam quality analyzer and calculate the energy density of the pulsed laser based on the spot size and a first energy value.

[0067] In some embodiments, the pulsed laser damage assessment system further includes a light source for illuminating the sample under test. The light source is placed behind and to the side of the sample under test (in the direction of the light-emitting side) to illuminate the sample. When no damage test is performed, after illuminating the sample under test with the light source, the camera can image the surface of the sample under test, observe the state and morphology of the sample surface, and also verify whether the test points are damaged.

[0068] In some embodiments, an optical switch is also provided between the laser and the beam splitter. The optical switch is used to control whether the pulsed laser emitted by the laser enters the beam splitter. Specifically, the optical switch can be an electronically controlled shutter.

[0069] In some embodiments, the beam splitter is an optical wedge. The optical wedge can split the pulsed laser emitted by the laser into three beams as described above: a first beam, a second beam, and a third beam. The third beam also requires a neutral density filter to attenuate its energy and prevent damage to the beam quality analyzer. The optical wedge has a specific splitting ratio, ensuring that the energy ratio of the first beam to the second beam is a specific value. Therefore, after the first energy detection module detects the first energy value of the first beam, it can calculate the energy value of the second beam.

[0070] The pulsed laser damage assessment system of this application uses a combination of flash laser method and transmission laser method to determine whether the sample under test is damaged. They can verify each other, which not only improves the accuracy of damage assessment, but also identifies suspicious points. Only suspicious points can be verified offline, without having to check them one by one, thus improving efficiency.

[0071] The pulsed laser damage assessment system of this application uses short-pulse pump light (second beam) to determine whether the sample is damaged by the change in energy value before and after the damage. It utilizes the energy loss due to thermal and optical conversion when the short-pulse laser damages the sample to enhance the difference in energy value before and after the damage. This has a higher accuracy rate than determining damage by detecting light transmittance alone.

[0072] The pulsed laser damage assessment system of this application embodiment can also determine the degree of damage to the sample under test by measuring the magnitude of the change in the energy value of the second beam.

Claims

1. A pulsed laser damage assessment system, characterized in that: Including those set sequentially along the optical path direction A laser is used to emit pulsed laser light that is directed at the sample being tested. A beam splitter is used to split the pulsed laser emitted by the laser into a first beam and a second beam. The first energy detection module is used to detect the energy of the first beam, and The second energy detection module is used to detect the energy of the second beam after it penetrates the sample under test. A camera is used to capture the flashes produced by the laser incident surface of the sample under damage. The pulsed laser damage assessment system also includes The controller is used to acquire the first energy value detected by the first energy detection module, the second energy value detected by the second energy detection module, and the flash information acquired by the camera, and to determine whether the sample to be tested is damaged based on the first energy value, the second energy value, and the flash information. The controller makes a first judgment on whether the sample under test is damaged based on the flash information, and makes a second judgment on whether the sample under test is damaged based on the first energy value and the second energy value. If the judgment results of the first judgment and the second judgment are both that there is damage, the controller finally determines that the sample under test is damaged. The controller is also used to issue a prompt message indicating that there is a doubt if the judgment results of the first judgment and the second judgment are inconsistent. The controller is also used to issue a prompt message to adjust the energy when both the first and second judgments result in no damage, or to mark the energy density value of the pulsed laser emitted by the current laser as a low energy density value that will not cause damage to the sample under test.

2. The pulsed laser damage assessment system according to claim 1, characterized in that: The flashing information includes flashing and no flashing. If the flashing information indicates that there is flashing, the controller makes a first judgment indicating that there is damage.

3. The pulsed laser damage assessment system according to claim 1, characterized in that: The controller is used to calculate the original energy value of the second beam before it penetrates the sample under test based on the first energy value and the splitting ratio of the splitting element. The controller is also used to calculate the energy difference between the original energy value and the second energy value. If the energy difference is greater than a preset energy loss value, the second judgment made by the controller is that there is damage. The controller is also used to calculate a preset energy loss value according to the following formula: ； in, To preset the energy loss value, This is the original energy value. The transmittance of the sample to be tested is denoted as .

4. The pulsed laser damage assessment system according to claim 1, characterized in that: The controller is used to calculate the original energy value of the second beam before it penetrates the sample under test based on the first energy value and the splitting ratio of the splitting element. The controller is also used to calculate a preset transmission energy value based on the original energy value and the transmittance of the sample under test. If the second energy value is less than the preset transmission energy value, the controller determines that the sample under test is damaged. The controller is also used to calculate a preset transmitted energy value according to the following formula: ； in, To preset the energy value, This is the original energy value. The transmittance of the sample to be tested is denoted as .

5. The pulsed laser damage assessment system according to claim 1, characterized in that: It also includes an energy control optical path disposed between the laser and the beam splitter, the energy control optical path being used to modulate the energy of the pulsed laser emitted by the laser.

6. The pulsed laser damage assessment system according to claim 5, characterized in that: The energy control optical path includes a first polarizing plate beam splitter, a half-wave plate, and a second polarizing plate beam splitter arranged sequentially along the optical path direction.

7. The pulsed laser damage assessment system according to claim 1, characterized in that: It also includes an adjustable aperture disposed between the laser and the beam splitter, the adjustable aperture being used to adjust the size of the pulsed laser spot emitted by the laser.

8. The pulsed laser damage assessment system according to claim 1, characterized in that: It also includes a focusing lens disposed between the laser and the beam splitter, the focusing lens being used to focus the pulsed laser at the sample to be tested.

9. The pulsed laser damage assessment system according to claim 1, characterized in that: The beam splitter is used to split the pulsed laser emitted by the laser into a first beam, a second beam, and a third beam, wherein the second beam is transmitted light, and the first and third beams are reflected light. The pulsed laser damage assessment system also includes A beam quality analyzer is used to detect the spot size of the third beam. The optical path between the beam splitter and the sample under test is a conjugate optical path with the optical path between the beam splitter and the beam quality analyzer.

10. The pulsed laser damage assessment system according to claim 9, characterized in that: The controller is also used to acquire the spot size detected by the beam quality analyzer and to calculate the energy density of the pulsed laser based on the spot size and the first energy value.

11. The pulsed laser damage assessment system according to claim 1, characterized in that: It also includes a light source for illuminating the sample to be tested.

12. The pulsed laser damage assessment system according to claim 1, characterized in that: An optical switch is also provided between the laser and the beam splitter, and the optical switch is used to control whether the pulsed laser emitted by the laser enters the beam splitter.

13. The pulsed laser damage assessment system according to claim 1, characterized in that: The beam splitter is an optical wedge.

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