Mark recognition method, image stitching method, and control system

Abstract

Embodiments of the present application provide a mark identification method, a graphic splicing method and a control system, and relate to the technical field of workpiece positioning and photolithography. The mark identification method comprises: controlling a first workpiece to drive a sensor to scan and measure a measurement region on a surface of a second workpiece, the measurement region comprising at least two auxiliary measurement lines intersecting the measurement line of the sensor and passing through a target mark; obtaining the length of a measurement line segment of the measurement line of the sensor intercepted by at least one auxiliary measurement line; obtaining relevant information of the target mark corresponding to the measurement line segment; and obtaining the relevant relationship between the target mark and the measurement line segment based on the relevant information of the target mark corresponding to the measurement line segment and the length of the measurement line segment. In the present application, the scanning time of the sensor on the measurement region is reduced, the alignment speed between the workpieces is improved, thereby the measurement time can be reduced and the error caused by the spatial drift between the workpieces due to long-time scanning can be avoided as much as possible.

Description

Technical Field

[0001] This invention relates to the field of workpiece positioning and photolithography technology, specifically to a mark recognition method, a graphic stitching method, and a control system. Background Technology

[0002] When using a workpiece (including a measuring sensor) to measure or process a workpiece or sample placed on a worktable, it is necessary to align the two workpieces first. Currently, positioning marks can be set on the surface of the workpiece to allow the workpiece to identify the position of the positioning marks and thus align the two workpieces.

[0003] When processing a wafer coated with photoresist using a lithography machine's irradiation beam (or electron beam), the irradiation source (the workpiece) and the wafer (the workpiece) need to be aligned before exposure to achieve photolithography. Since the positioning accuracy of the positioning marks on the wafer surface is at the single nanometer or even sub-nanometer level, to achieve better positioning and alignment, scanning probe microscopes, electron beam lithography machines, or electron beams within scanning electron microscopes with positioning accuracy higher than sub-nanometer levels are generally used for measurement and positioning.

[0004] To determine the location of a positioning marker, a large area must first be measured around it with high precision. This means that the surface containing the marker needs to be measured for an extended period, such as performing a 3D topographic measurement on a surface containing a 3D positioning marker. For example, if measuring a 5μm x 5μm area with a 1nm step size, 5000 x 5000 pixels need to be measured. If each line measurement takes 1 second, it would take 5000 seconds to complete the entire image measurement, which is approximately 1.39 hours – an excessively long time. Furthermore, both the measuring sensor (e.g., a probe used in atomic force microscopy) and the sample being measured will drift over time. If this drift error is incorporated, there will be drift errors between different parts of the image measured sequentially, rendering the large-scale measurement used to find the positioning marker invalid.

[0005] When performing nanoimprint lithography on a wafer coated with photoresist using a nanoimprint template as the workpiece, the workpiece and the workpiece to be processed need to be aligned before the workpiece is brought into vertical contact with the photoresist surface. For example, a focused light source is placed on the workpiece, and positioning marks are placed on the workpiece. The light from the focused light source on the workpiece is focused onto the positioning marks on the workpiece, and the positioning marks are imaged (or measured by image scanning). The positioning marks on the surface of the workpiece are then located and aligned. Due to the limitations of optical wavelength, the positioning marks cannot be smaller than the wavelength order, resulting in optical accuracy limited to hundreds of nanometers or, through laser interferometry, accuracy down to tens of nanometers. However, if a probe measurement system, i.e., an atomic force microscope system, is installed on any workpiece to scan and measure the positioning marks on the workpiece, a measurement accuracy of less than 1 nanometer can be obtained.

[0006] However, the probe must scan a considerable image to encompass various alignment errors, especially those at the micrometer level, to include the positioning marks within the measurement range and thus locate their positions. But a large number of measurement points in a single image leads to longer measurement times, making spatial drift between workpieces an unpredictable factor.

[0007] Therefore, a high-speed positioning method is needed to quickly locate the position of the positioning mark, but it is very difficult to improve the measurement speed of the measuring sensor; based on this, the applicant proposed the technical solution of the present invention. Summary of the Invention

[0008] The purpose of this invention is to provide a mark recognition method, a graphic splicing method, and a control system. In the mark recognition process, multiple auxiliary measurement lines passing through the target mark are set up. Thus, the sensor only needs to scan one or more measurement lines to determine the position of the target mark, which reduces the scanning time of the sensor on the measurement area and improves the alignment speed between workpieces. This reduces the measurement time and minimizes the error caused by spatial drift between workpieces due to long scanning time.

[0009] To achieve the above objectives, the present invention provides a mark recognition method, comprising: controlling a first workpiece to drive a sensor to scan and measure a measurement area including a target mark on the surface of a second workpiece, wherein the measurement area includes: at least two auxiliary measurement lines passing through the target mark, the two auxiliary measurement lines forming an auxiliary measurement line pair, the auxiliary measurement lines intersecting the measurement line of the sensor; obtaining the length of a measurement line segment intercepted by at least one of the auxiliary measurement line pairs; obtaining relevant information of the target mark corresponding to the measurement line segment, and obtaining a correlation between the target mark and the measurement line segment based on the relevant information of the target mark corresponding to the measurement line segment and the length of the measurement line segment.

[0010] The present invention also provides a control system comprising: a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to the first workpiece and the sensor, respectively. The sensor is disposed on the first workpiece and faces the surface of the second workpiece. A measurement area is disposed on the surface of the second workpiece. At least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one target mark and at least two auxiliary measurement lines passing through the target mark, the auxiliary measurement lines intersecting the measurement line of the sensor. The controller is used to execute the above-described mark recognition method.

[0011] This invention also provides a graphic splicing method, comprising: controlling a first workpiece to drive a sensor to scan and measure a measurement area on the surface of a second workpiece, the measurement area including at least one pair of target marks and at least two auxiliary measurement lines passing through each of the target marks in the pair of target marks, the two auxiliary measurement lines passing through the same target mark forming an auxiliary measurement line pair, the auxiliary measurement lines intersecting with the measurement line of the sensor, and each pair of target marks containing two target marks respectively originating from two graphics to be spliced; for each pair of target marks, obtaining the length of the measurement line segment intercepted by the two auxiliary measurement line pairs passing through the two target marks in the pair of target marks; for each pair of target marks, obtaining relevant information of each target mark in the pair corresponding to each measurement line segment, and obtaining the correlation relationship between the two target marks in the pair based on the relevant information of each target mark corresponding to each measurement line segment and the length of each measurement line segment; and splicing the two graphics to be spliced ​​based on the correlation relationship between the two target marks in the pair of target marks.

[0012] The present invention also provides a control system comprising: a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to the first workpiece and the sensor, respectively. The sensor is disposed on the first workpiece and faces the surface of the second workpiece. A measurement area is disposed on the surface of the second workpiece. At least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the pair of target marks. The auxiliary measurement lines intersect with the measurement line of the sensor. The two target marks in each pair of target marks are respectively derived from two graphics to be spliced. The controller is used to execute the above-described graphic splicing method.

[0013] This invention provides a mark recognition method. A first workpiece is controlled to drive a sensor to scan a measurement area on the surface of a second workpiece, including a target mark. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The length of the measurement line segment intercepted by at least one pair of auxiliary measurement lines is obtained. Subsequently, relevant information about the target mark is acquired, and based on the relevant information and the length of the measurement line segment, the correlation between the target mark and the measurement line segment is obtained. This allows for the identification of the target mark's position, and subsequently, the positioning and alignment between the first and second workpieces can be achieved based on the target mark's position. Furthermore, during the mark recognition process, multiple auxiliary measurement lines passing through the target mark are set, so the sensor only needs to scan one or more measurement lines to determine the target mark's position, reducing the sensor's scanning time of the measurement area and improving the alignment speed between workpieces. This reduces measurement time and minimizes errors caused by spatial drift between workpieces due to prolonged scanning.

[0014] In one embodiment, the number of auxiliary test line pairs is greater than one pair; obtaining the length of the measurement line segment intercepted by at least one auxiliary test line pair of the sensor's measurement line includes: obtaining the lengths of multiple measurement line segments intercepted by multiple auxiliary test line pairs of the sensor's measurement line; obtaining the correspondence between the target marker and the measurement line segment based on the relevant information and the length of the measurement line segment includes: obtaining a reference correlation relationship between the target marker and the measurement line segment corresponding to each measurement line segment based on the relevant information of the target marker corresponding to each measurement line segment and the length of each measurement line segment; obtaining the correlation relationship between the target marker and the measurement line segment based on the reference correlation relationship corresponding to multiple measurement line segments.

[0015] In one embodiment, in the measurement area, a plurality of three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface, and the height of each three-dimensional block corresponds to a code; obtaining the relevant information of the target mark includes: for each measurement line, scanning each three-dimensional block on the measurement line by the sensor to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair passing through the target mark; based on the encoding information of each measurement line segment, obtaining the relevant information of the target mark corresponding to each measurement line segment.

[0016] In one embodiment, the number of auxiliary test lines is greater than two; multiple auxiliary test lines divide the measurement area into multiple auxiliary test areas, and in the measurement area, the height of each auxiliary test area in the height direction of the second workpiece surface corresponds to a code; obtaining the relevant information of the target mark includes: for each measurement line, scanning each auxiliary test area through which the measurement line passes by the sensor to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair through which the measurement line passes the target mark; based on the encoding information of each measurement line segment, obtaining the relevant information of the target mark corresponding to each measurement line segment.

[0017] In one embodiment, the number of auxiliary test lines is greater than two; the auxiliary test lines are three-dimensional lines formed on the surface of the second workpiece, and the height of each auxiliary test line corresponds to a code; obtaining the relevant information of the target mark includes: for each measurement line, scanning each auxiliary test line that the measurement line passes through with the sensor to obtain the code information of the measurement line segment intercepted by the auxiliary test line that the measurement line passes through the target mark; based on the code information of each measurement line segment, obtaining the relevant information of the target mark corresponding to each measurement line segment.

[0018] In one embodiment, the number of auxiliary test lines is greater than two and is even; after the multiple auxiliary test lines in the measurement area are sorted, the area between the Nth auxiliary test line and the (N+1)th auxiliary test line forms an auxiliary test band, where N is greater than or equal to 1 and is odd; each auxiliary test band is a three-dimensional band; in the measurement area, the height of each auxiliary test band in the height direction of the second workpiece surface corresponds to a code; obtaining the relevant information of the target mark includes: for each measurement line, scanning each auxiliary test band through which the measurement line passes by the sensor to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair through the target mark; the auxiliary test line pair consists of two auxiliary test lines respectively from two auxiliary test bands; based on the encoding information of each measurement line segment, obtaining the relevant information of the target mark corresponding to each measurement line segment.

[0019] In one embodiment, the relevant information of the measurement line segment includes the angle between the measurement line segment and the auxiliary measurement line that cuts the measurement line segment.

[0020] In one embodiment, in each pair of auxiliary test lines, one of the auxiliary test lines is perpendicular to the measurement line.

[0021] In one embodiment, for each target marker pair, obtaining the length of the measurement line segment intercepted by the sensor's measurement line through two auxiliary measurement line pairs of the two target markers in the target marker pair includes: for each target marker pair, obtaining the length of the measurement line segment intercepted by the multiple measurement lines of the sensor through two auxiliary measurement line pairs of the two target markers in the target marker pair; for each target marker pair, obtaining the correlation relationship between the two target markers in the target marker pair based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment, including: for each target marker pair, obtaining the reference correlation relationship between the two target markers in the target marker pair corresponding to each measurement line based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment intercepted by the multiple measurement lines through two auxiliary measurement line pairs of the two target markers in the target marker pair corresponding to each measurement line; for each target marker pair, obtaining the correlation relationship between the two target markers in the target marker pair based on the reference correlation relationship between the two target markers in the target marker pair corresponding to the multiple reference measurement lines.

[0022] In one embodiment, for each target mark pair, obtaining the length of the measurement line segment intercepted by the sensor's measurement line through two auxiliary test line pairs passing through the two target marks in the target mark pair includes: for each target mark pair, obtaining the length of two first measurement line segments intercepted by the sensor's measurement line through two auxiliary test line pairs passing through the two target marks in the target mark pair, and the length of a second measurement line segment intercepted by the measurement line through two non-adjacent auxiliary test line pairs; for each target mark pair, based on the relevant information of each target mark corresponding to each measurement line segment and the length of each measurement line segment, obtaining the length of the measurement line segment between the two target marks in the target mark pair. The correlation includes: for each target mark in each target mark pair, obtaining the vertical distance between the target mark and the measurement line based on the relevant information of the target mark corresponding to the first measurement line segment and the length of the first measurement line segment intercepted by the auxiliary measurement line pair passing through the target mark; for each target mark pair, obtaining the vertical spacing between the two target marks in the target mark pair based on the vertical distance between the two target marks in the target mark pair and the measurement line; and for each target mark pair, obtaining the spacing between the two target marks in the target mark pair along the measurement line based on the lengths of the two first measurement line segments and the length of the second measurement line segment.

[0023] In one embodiment, in the measurement area, a plurality of three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface, and the height of each three-dimensional block corresponds to a code; for each target mark pair, obtaining the relevant information of each target mark in the target mark pair corresponding to each measurement line segment includes: for each target mark in the target mark pair, scanning each three-dimensional block on the measurement line by the sensor to obtain the code information of the measurement line segment intercepted by the auxiliary measurement line pair passing through the target mark; based on the code information of the measurement line segment intercepted by the auxiliary measurement line pair passing through each target mark, obtaining the relevant information of each target mark corresponding to each measurement line segment.

[0024] In one embodiment, the number of auxiliary test lines is greater than two; multiple auxiliary test lines divide the measurement area into multiple auxiliary test areas, and in the measurement area, the height of each auxiliary test area in the height direction of the second workpiece surface corresponds to a code; for each target mark pair, obtaining the relevant information of each target mark in the target mark pair corresponding to each measurement line segment includes: for each target mark in the target mark pair, scanning each auxiliary test area through which the measurement line passes by the sensor to obtain the code information of the measurement line segment intercepted by the auxiliary test line pair passing through the target mark; based on the code information of the measurement line segment intercepted by the auxiliary test line pair passing through each target mark, obtaining the relevant information of each target mark corresponding to each measurement line segment.

[0025] In one embodiment, the number of auxiliary test lines is greater than two; the auxiliary test lines are three-dimensional lines formed on the surface of the second workpiece, and the height of each auxiliary test line corresponds to a code; for each target mark pair, obtaining the relevant information of each target mark in the target mark pair corresponding to each measurement line segment includes: for each target mark in the target mark pair, scanning each auxiliary test line through which the measurement line passes by the sensor to obtain the code information of the measurement line segment intercepted by the auxiliary test line pair through which the measurement line passes by the target mark; based on the code information of the measurement line segment intercepted by the auxiliary test line pair through which the target mark passes by the target mark, obtaining the relevant information of each target mark corresponding to each measurement line segment.

[0026] In one embodiment, the number of auxiliary test lines passing through each target mark is greater than two and is even; after the multiple auxiliary test lines passing through each target mark in the measurement area are sorted, the area between the Nth auxiliary test line and the (N+1)th auxiliary test line forms an auxiliary test band, where N is greater than or equal to 1 and is odd, and each auxiliary test band is a three-dimensional band. In the measurement area, the height of each auxiliary test band in the height direction of the second workpiece surface corresponds to a code; obtaining the relevant information of the target mark includes: for each target mark in the target mark pair, scanning each auxiliary test band through which the measurement line passes by the sensor to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair through which the measurement line passes the target mark, wherein the auxiliary test line pair consists of two auxiliary test lines respectively derived from two auxiliary test bands passing through the target mark; based on the encoding information of the measurement line segment intercepted by the auxiliary test line pair through which each target mark passes, obtaining the relevant information of each target mark corresponding to each measurement line segment.

[0027] In one embodiment, the relevant information of the measurement line segment includes the angle between the measurement line segment and the auxiliary measurement line that cuts the measurement line segment.

[0028] In one embodiment, in each pair of auxiliary test lines, one of the auxiliary test lines is perpendicular to the measurement line.

[0029] In one embodiment, the target marker is a coordinate point, or a graphic containing a coordinate point.

[0030] In one embodiment, the target marker is any one of the following: a three-dimensional pit, a conical three-dimensional pit, a three-dimensional protrusion, a conical protrusion, and a three-dimensional graphic with a center point. Attached Figure Description

[0031] Figure 1 This is a detailed flowchart of the marker recognition method according to the first embodiment of the present invention;

[0032] Figure 2 This is a schematic diagram of the surface of a second workpiece to which the marking and identification method according to the first embodiment of the present invention is applied;

[0033] Figure 3 yes Figure 2 Figure 1 in the diagram is a schematic diagram of the measurement area;

[0034] Figure 4 This is a detailed flowchart of the marker recognition method according to the second embodiment of the present invention;

[0035] Figure 5This is a schematic diagram of the surface pattern 1 and the measurement area of ​​the second workpiece to which the marking and identification method is applied according to the second embodiment of the present invention;

[0036] Figure 6 This is a detailed flowchart of a marker recognition method according to a third embodiment of the present invention, wherein encoded information is added to the measurement line;

[0037] Figure 7 This is a schematic diagram of adding coded information to the measurement line according to the third embodiment of the present invention;

[0038] Figure 8 This is a detailed flowchart of the marker recognition method according to the third embodiment of the present invention, wherein encoded information is added to the auxiliary test area obtained by dividing the measurement area;

[0039] Figure 9 This is a schematic diagram of adding coded information to the auxiliary measurement area obtained by dividing the measurement area according to the third embodiment of the present invention;

[0040] Figure 10 This is a detailed flowchart of the marker recognition method according to the third embodiment of the present invention, wherein encoded information is added to the auxiliary test line;

[0041] Figure 11 This is a schematic diagram of adding coded information to the auxiliary test line in the measurement area according to the third embodiment of the present invention;

[0042] Figure 12 This is a detailed flowchart of the marker recognition method according to the third embodiment of the present invention, wherein encoded information is added to the auxiliary test strip;

[0043] Figure 13 This is a schematic diagram of adding coded information to the auxiliary test strip in the measurement area according to the third embodiment of the present invention;

[0044] Figure 14 This is a detailed flowchart of the graphic splicing method according to the fourth embodiment of the present invention;

[0045] Figure 15 This is a schematic diagram of the surface of the second workpiece to which the graphic splicing method according to the fourth embodiment of the present invention is applied;

[0046] Figure 16 yes Figure 15 A schematic diagram of Figures 1 and 2 and the measurement area;

[0047] Figure 17 yes Figure 14 The detailed flowchart of step 703 of the graphic splicing method in the image is shown below;

[0048] Figure 18 yes Figure 15A schematic diagram showing the result of combining the two spliced ​​graphics in the image;

[0049] Figure 19 This is a detailed flowchart of the graphic splicing method according to the fifth embodiment of the present invention;

[0050] Figure 20 This is a detailed flowchart of a graphic splicing method according to the sixth embodiment of the present invention, wherein coded information is added to the measurement line;

[0051] Figure 21 This is a schematic diagram of adding coded information to the measurement line according to the sixth embodiment of the present invention;

[0052] Figure 22 This is a detailed flowchart of a graphic stitching method according to the sixth embodiment of the present invention, wherein encoded information is added to the auxiliary measurement area obtained by dividing the measurement area;

[0053] Figure 23 This is a schematic diagram of adding coded information to the auxiliary measurement area obtained by dividing the measurement area according to the sixth embodiment of the present invention;

[0054] Figure 24 This is a detailed flowchart of a graphic splicing method according to the sixth embodiment of the present invention, wherein coded information is added to the auxiliary test line;

[0055] Figure 25 This is a schematic diagram of adding coded information to the auxiliary test line in the measurement area according to the sixth embodiment of the present invention;

[0056] Figure 26 This is a detailed flowchart of the marker recognition method according to the sixth embodiment of the present invention, wherein encoded information is added to the auxiliary test strip;

[0057] Figure 27 This is a schematic diagram of adding coded information to the auxiliary test strip in the measurement area according to the sixth embodiment of the present invention. Detailed Implementation

[0058] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings to provide a clearer understanding of the purpose, features, and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely illustrative of the essential spirit of the technical solution of the present invention.

[0059] In the following description, certain specific details are set forth for the purpose of illustrating various disclosed embodiments in order to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the art will recognize that embodiments may be practiced without one or more of these specific details. In other instances, well-known apparatuses, structures, and techniques associated with this application may not have been shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

[0060] Unless the context requires otherwise, throughout the specification and claims, the word “comprising” and its variations, such as “including” and “having”, shall be understood to have an open, inclusive meaning, that is, to be interpreted as “including, but not limited to”.

[0061] Throughout this specification, references to "an embodiment" or "an embodiment" indicate that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Therefore, the appearance of "in an embodiment" or "an embodiment" in various places throughout the specification does not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic may be combined in any manner in one or more embodiments.

[0062] The singular forms “a” and “” used in this specification and the appended claims include plural references unless otherwise expressly stated herein. It should be noted that the term “or” is generally used to mean “or / and” unless otherwise expressly stated herein.

[0063] In the following description, in order to clearly demonstrate the structure and working method of the present invention, a number of directional terms will be used. However, terms such as "front", "back", "left", "right", "outside", "inside", "outward", "inward", "up", and "down" should be understood as convenient terms and not as limiting terms.

[0064] The first embodiment of this invention relates to a marker recognition method applied to a controller in a control system. The controller can execute the marker recognition method in this embodiment to achieve positioning and alignment between the workpiece being processed and the workpiece being processed within the control system. The workpiece being processed is used to measure physical and chemical quantities at the nanometer-scale spatial resolution on the surface of the workpiece being processed (e.g., a wafer, silicon wafer, quartz wafer, etc.). It can also perform scanning probe lithography (SPL), electron emission, photon emission, and ion implantation on the surface of the workpiece being processed.

[0065] The specific process of the marker recognition method in this embodiment is as follows: Figure 1 As shown.

[0066] Step 101: Control the first workpiece to drive the sensor to scan and measure the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect with the measurement lines of the sensor.

[0067] Specifically, the first workpiece is the workpiece to be processed, and a sensor is provided on the surface of the first workpiece facing the second workpiece (i.e., the workpiece to be processed). The sensor is, for example, a photon sensor, a laser rangefinder, an electronic sensor, an ion sensor, or an atomic force sensor (scanning probe sensor).

[0068] A measurement area is provided on the surface of the second workpiece. The measurement area includes a target mark and at least two auxiliary measurement lines passing through the target mark. That is, starting from the target mark, multiple auxiliary measurement lines form a divergent structure, creating an auxiliary measurement pattern. At least one measurement line is provided in the measurement area on the surface of the second workpiece. The measurement line intersects with the auxiliary measurement lines, and at least one measurement line can simultaneously pass through at least two auxiliary measurement lines, meaning the auxiliary measurement lines are not parallel to the measurement lines. In one example, multiple auxiliary measurement lines can be located on the same side of a straight line passing through the target mark and parallel to the measurement lines. The target mark can be any point on the pattern to be machined on the surface of the second workpiece or a pattern containing a coordinate point. The target mark can be any of the following: a three-dimensional recess, a conical three-dimensional recess, a three-dimensional protrusion, a conical protrusion, or a three-dimensional pattern with a center point. The measurement line is a straight line, and the auxiliary measurement lines can be straight lines or curves. This embodiment and subsequent embodiments will use a straight auxiliary measurement line as an example for illustration.

[0069] The controller controls the first workpiece to drive the sensor to scan the measurement area along the preset measurement line. The measurement line may or may not intersect with the auxiliary measurement line.

[0070] Please refer to Figure 2 and Figure 3 Figure 1 shows the target graphic to be processed. Target A1 is a point A1 on Figure 1. The measurement area includes target A1 and two auxiliary measurement lines passing through target A1, namely auxiliary measurement line L1 and auxiliary measurement line L2. In the measurement area, the measurement lines are perpendicular to auxiliary measurement line L1. The dashed lines in the figure represent the measurement lines. The controller controls the first workpiece to drive the sensor to scan the measurement area sequentially according to the measurement lines. In this embodiment and subsequent embodiments, auxiliary measurement lines (…) are used. Figure 2 The example given is that the auxiliary survey line L1 is perpendicular to the measurement line. Alternatively, it can be set that there is no auxiliary survey line perpendicular to the measurement line.

[0071] Step 102: Obtain the length of the measurement line segment intercepted by at least one auxiliary measurement line pair of the sensor's measurement line.

[0072] Specifically, the auxiliary test line pair includes two auxiliary test lines. When the sensor scans according to the measurement line, both auxiliary test lines in the auxiliary test line pair can intersect with at least one measurement line, so that the measurement line can be intercepted by the two auxiliary test lines in the auxiliary test line pair to obtain a measurement line segment, and the length of the intercepted measurement line segment can be obtained.

[0073] In this embodiment, it can be set that in each selected pair of auxiliary test lines, one of the auxiliary test lines is perpendicular to the measurement line. That is, when selecting a pair of auxiliary test lines, if one of the multiple auxiliary test lines passing through the target mark is perpendicular to the measurement line, then each pair of auxiliary test lines includes the auxiliary test line perpendicular to the measurement line, and another auxiliary test line not perpendicular to the measurement line.

[0074] by Figure 2 and Figure 3 For example, auxiliary measurement lines L1 and L2 are selected to form an auxiliary measurement line pair. When the first workpiece is controlled to drive the sensor to scan the measurement area according to the preset measurement line, the intersection point of measurement line M1 and auxiliary measurement line L1 is B1, and the intersection point of measurement line M1 and auxiliary measurement line L2 is C1. Measurement line M1 is intercepted by auxiliary measurement lines L1 and L2 to obtain measurement line segment B1C1. During the scanning process, the sensor can obtain the length d of measurement line segment B1C1. 11 .

[0075] Step 103: Obtain relevant information about the target marker corresponding to the measurement line segment, and based on the relevant information about the target marker corresponding to the measurement line segment and the length of the measurement line segment, obtain the correlation between the target marker and the measurement line segment.

[0076] Specifically, the controller has preset information about the target mark. This information is used to indicate the angle between each auxiliary test line and the measurement line of the target mark. After obtaining the length of the measurement line segment intercepted by at least one pair of auxiliary test lines, the included angle between the two auxiliary test lines in the pair and the measurement line segment can be obtained, which is the relevant information of the target mark corresponding to the measurement line segment. Based on this, the vertical distance between the target mark and the measurement line segment and the horizontal distance between the target mark and the two endpoints of the measurement line segment can be calculated. It should be noted that the horizontal distance referred to here is the distance along the direction of the measurement line.

[0077] by Figure 2 and Figure 3 For example, obtain the angle θ between the auxiliary survey line L2 passing through the target mark A1 and the measurement line segment B1C1. 11 The auxiliary survey line L1 is perpendicular to the measurement line segment B1C1, and the angle between the auxiliary survey line L1 and the measurement line segment B1C1 is 90°. The vertical distance h between the target mark A1 and the measurement line segment B1C1 is... 11 It is equal to the length of side A1B1 of triangle A1B1C1, i.e., h. 11 =d 11 *tanθ 11 The horizontal distance between target mark A1 and endpoint C1 of measurement line segment B1C1 is equal to the length d of measurement line segment B1C1. 11 .

[0078] The horizontal distance d between the target mark A1 and the measured line segment is obtained. 11 and vertical spacing h 11 Then, the position of target mark A1 can be determined, thereby enabling the alignment of the first workpiece with the second workpiece.

[0079] This embodiment provides a mark recognition method. A first workpiece is controlled to drive a sensor to scan a measurement area on the surface of a second workpiece, including a target mark. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The length of the measurement line segment intercepted by at least one pair of auxiliary measurement lines is obtained. Subsequently, relevant information about the target mark is acquired, and based on the relevant information and the length of the measurement line segment, the correlation between the target mark and the measurement line segment is obtained. That is, the position of the target mark can be identified, and the positioning and alignment between the first and second workpieces can be achieved based on the position of the target mark. Furthermore, during the mark recognition process, multiple auxiliary measurement lines passing through the target mark are set, so the sensor only needs to scan one or more measurement lines to determine the position of the target mark, reducing the scanning time of the sensor on the measurement area, improving the alignment speed between workpieces, thereby reducing measurement time and minimizing errors caused by spatial drift between workpieces due to long scanning times.

[0080] The second embodiment of the present invention relates to a marker recognition method. The main improvement of this embodiment compared with the first embodiment is that: in this embodiment, multiple auxiliary test line pairs are used to determine the correlation between the target marker and the measured line segment.

[0081] The specific process of the marker recognition method in this embodiment is as follows: Figure 4 As shown.

[0082] Step 201: Control the first workpiece to drive the sensor to scan and measure the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect the measurement lines of the sensor. This is largely the same as step 101 in the first embodiment, with the main difference being that in this embodiment, the number of auxiliary measurement lines in the measurement area is greater than two. Please refer to [reference needed]. Figure 5 The target is marked as point A1. The measurement area includes the target A1 and four auxiliary measurement lines passing through the target A1, namely auxiliary measurement line L1, auxiliary measurement line L2, auxiliary measurement line L3 and auxiliary measurement line L4. The measurement line is perpendicular to the auxiliary measurement line L1 in the measurement area. The dashed line in the figure is the measurement line. The controller controls the first workpiece to drive the sensor to scan the measurement area in sequence according to the measurement line.

[0083] Step 202: Obtain the lengths of multiple measurement line segments intercepted by multiple auxiliary measurement line pairs of the sensor's measurement line.

[0084] Step 203 includes the following sub-steps:

[0085] Sub-step 2031: Obtain the relevant information of the target marker corresponding to each measurement line segment, and based on the relevant information of the target marker corresponding to each measurement line segment and the length of each measurement line segment, obtain the reference correlation relationship between the target marker and the measurement line segment corresponding to each measurement line segment.

[0086] Sub-step 2032: Based on the reference correlation relationships corresponding to multiple measurement line segments, obtain the correlation relationship between the target marker and the measurement line segments.

[0087] Specifically, the auxiliary test line pair includes two auxiliary test lines. When the sensor scans according to the measurement line, both auxiliary test lines in the auxiliary test line pair can intersect with at least one measurement line, so that the measurement line can be intercepted by the two auxiliary test lines in the auxiliary test line pair to obtain a measurement line segment, and the length of the intercepted measurement line segment can be obtained.

[0088] by Figure 5 For example, in this embodiment, among the multiple auxiliary test line pairs selected, each auxiliary test line pair includes at least one auxiliary test line L1 perpendicular to the measurement line. Three auxiliary test line pairs are selected: auxiliary test line pair 12 includes auxiliary test line L1 and auxiliary test line L2; auxiliary test line pair 13 includes auxiliary test line L1 and auxiliary test line L3; and auxiliary test line pair 14 includes auxiliary test line L1 and auxiliary test line L4. The measurement line M1 passes through auxiliary test line L1 to auxiliary test line L4 simultaneously. The measurement line M1 and auxiliary test line L1... The intersection point of measurement line M1 and auxiliary measurement line L2 is B1; the intersection point of measurement line M1 and auxiliary measurement line L3 is D1; ​​the intersection point of measurement line M1 and auxiliary measurement line L4 is E1. Measurement line M1 is intersected by auxiliary measurement line pair 12 to obtain measurement line segment B1C1; measurement line M1 is intersected by auxiliary measurement line pair 13 to obtain measurement line segment B1D1; measurement line M1 is intersected by auxiliary measurement line pair 14 to obtain measurement line segment B1E1. Obtain the length d of measurement line segment B1C1. BC Measure the length d of line segment B1D1 BD And the length d of the line segment B1E1. BE .

[0089] Subsequently, target marker A1 corresponds to relevant information for each measurement line segment, namely, obtaining the angle θ between auxiliary measurement line L2 and measurement line segment B1C1. BC The angle θ between auxiliary survey line L3 and survey line segment B1D1 BD The angle θ between auxiliary survey line L4 and survey line segment B1E1 BE The auxiliary test line L1 is perpendicular to the measurement line segment B1C1, and the angle between the auxiliary test line L1 and the measurement line segment B1C1 is 90°.

[0090] The angle between the auxiliary measuring line and the measuring line segment mentioned above is part of the graphic formed by the auxiliary measuring lines, and is predetermined and known when the auxiliary measuring lines are set. Therefore, as long as the measurement is performed on the first workpiece and the length of each measuring line segment on the measuring line is obtained, the coordinate position of the target mark can be calculated using the following method.

[0091] The reference correlation between target mark A1 and each measurement line segment is obtained respectively. Taking measurement line segment B1C1 as an example, the vertical distance h between target mark A1 and measurement line segment B1C1 is obtained. BC It is equal to the length of side A1B1 of triangle A1B1C1, i.e., h. BC =d BC *tanθ BC The horizontal distance between target mark A1 and endpoint C1 of measurement line segment B1C1 is equal to the length d of measurement line segment B1C1. BC Similarly, the vertical distance h between target mark A1 and measurement line segment B1D1 can be obtained. BD =d BD *tanθ BD The horizontal distance between target mark A1 and endpoint D1 of measurement line segment B1D1 is equal to the length d of measurement line segment B1D1. BD The vertical distance h between target mark A1 and measurement line segment B1E1 BE =d BE *tanθ BE The horizontal distance between target mark A1 and endpoint E1 of measurement line segment B1E1 is equal to the length d of measurement line segment B1E1. BE .

[0092] Subsequently, the average vertical distance between the target mark A1 and each measurement line segment can be calculated as the vertical distance between the target mark A1 and the measurement line segment, i.e., the vertical distance h between the target mark A1 and the measurement line segment. A1 =(h BC +h BD +h BE ) / 3; and select one of the measurement line segments as the reference, for example, select measurement line segment B1C1 as the reference, then the horizontal distance d between the target mark A1 and the endpoint C1 of the measurement line segment B1C1 is used. BC The horizontal distance between the target mark A1 and the measuring line segment is used as the reference. This determines the position of the target mark A1, enabling the alignment of the first and second workpieces.

[0093] In this embodiment, multiple auxiliary test line pairs are used to determine the correlation between the target mark and the measured line segment, thereby improving the accuracy of locating the target mark position.

[0094] The third embodiment of the present invention relates to a marker recognition method. The main improvement of this embodiment compared with the first embodiment is that it provides a specific implementation method for obtaining relevant information of the target marker.

[0095] This embodiment provides three specific implementation methods for obtaining relevant information of target markers, as follows:

[0096] Method 1 involves adding coded information to the measurement line. The specific process of the marker recognition method is as follows: Figure 6 As shown.

[0097] Step 301: Control the first workpiece to drive the sensor to scan and measure the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect with the measurement lines of the sensor. This is largely the same as step 101 in the first embodiment, and will not be described again here.

[0098] Step 302: Obtain the length of the measurement line segment intercepted by at least one auxiliary measurement line pair of the sensor's measurement line. This is largely the same as step 102 in the first embodiment and will not be described again here.

[0099] Step 303 includes the following sub-steps:

[0100] Sub-step 3031: For each measurement line, the sensor scans each solid block on the measurement line to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line that the measurement line passes through the target mark.

[0101] Sub-step 3032: Based on the encoding information of each measurement line segment, obtain the relevant information of the target mark corresponding to each measurement line segment.

[0102] Specifically, in the measurement area, multiple three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface. These blocks can be protruding blocks above the second workpiece surface or recessed blocks formed on the second workpiece surface. The shapes of the blocks can be cubes, spheres, etc., and the height of each block corresponds to a code. For example, if a block is a protruding block above the second workpiece surface, a block with a preset height above the second workpiece surface is represented by code "1," and a position without a block is represented by code "0." When the controller controls the first workpiece to scan the measurement area along the measurement line, it can sequentially scan the three-dimensional blocks on the measurement line, obtaining the combination of three-dimensional blocks formed on the measurement line segment intercepted by the auxiliary measurement line. The code of the combination of three-dimensional blocks on the measurement line segment forms the code information of the measurement line segment.

[0103] In one example, the encoding information of the measurement line segment includes the angle between the measurement line segment and the intersecting auxiliary measurement line. That is, the controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary measurement lines that intercept the measurement line segment.

[0104] Please refer to Figure 7 ,exist Figure 5 Based on this, multiple cubic blocks are set on the measurement line M1. The presence of cubic blocks on the measurement line M1 is represented by the code "1", and the absence of cubic blocks is represented by the code "0". After the sensor scans each cubic block on the measurement line M1, the code information of the measurement line segment B1C1 can be read from point B1 toward point C1 as "010", the code information of the measurement line segment B1D1 read from point B1 toward point D1 as "010101", and the code information of the measurement line segment B1E1 read from point B1 toward point E1 as "01010101010".

[0105] Sub-step 3033 involves obtaining the correlation between the target marker and the measured line segment based on the relevant information of the target marker corresponding to the measured line segment and the length of the measured line segment. This is largely the same as step 103 in the first embodiment and will not be described again here.

[0106] Method 2 involves adding coded information to the auxiliary measurement area obtained by dividing the measurement area. The specific process of the marker recognition method is as follows: Figure 8 As shown.

[0107] Step 401: Control the first workpiece to drive the sensor to scan the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect the measurement lines of the sensor. This is largely the same as step 101 in the first embodiment, and will not be described again here.

[0108] Step 402: Obtain the length of the measurement line segment intercepted by at least one auxiliary measurement line pair of the sensor's measurement line. This is largely the same as step 102 in the first embodiment and will not be described again here.

[0109] Step 403 includes the following sub-steps:

[0110] Sub-step 4031: For each measurement line, the sensor scans each auxiliary measurement area that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line marked by the target through which the measurement line passes.

[0111] Sub-step 4032: Based on the encoding information of each measurement line segment, obtain the relevant information of the target marker corresponding to each measurement line segment.

[0112] Specifically, there are more than two auxiliary measurement lines. Multiple auxiliary measurement lines divide the measurement area into multiple auxiliary measurement areas. Each auxiliary measurement area is equivalent to a three-dimensional area formed in the measurement area. It can be a protruding area above the surface of the second workpiece or a recessed area formed on the surface of the second workpiece. In the measurement area, the height of each auxiliary measurement area in the height direction of the second workpiece surface corresponds to a code. For example, an auxiliary measurement area that is higher than the surface of the second workpiece by a preset height is represented by code "1", and an auxiliary measurement area that is not higher than the surface of the second workpiece by a preset height is represented by code "0". When the controller controls the first workpiece to scan the measurement area according to the measurement lines, the code of the auxiliary measurement area through which the measurement line segment intercepted by the auxiliary measurement line passes can be obtained and used to represent the code information of the measurement line segment.

[0113] In one example, the encoding information of the measurement line segment includes the angle between the measurement line segment and the intersecting auxiliary measurement line. The controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary measurement lines that intercept the measurement line segment.

[0114] Please refer to Figure 9 ,exist Figure 5 Based on this, the measurement area is divided into three auxiliary measurement areas by four auxiliary measurement lines: auxiliary measurement area X1 between auxiliary measurement lines L1 and L2 (ignoring width), auxiliary measurement area X2 between auxiliary measurement lines L2 and L3, and auxiliary measurement area X3 between auxiliary measurement lines L3 and L4. Auxiliary measurement areas X1 and X3 are flush with the surface of the second workpiece, which is represented by code "0". Auxiliary measurement area X2 is higher than the surface of the second workpiece by a preset height, which is represented by code "1". After the sensor scans the auxiliary measurement areas through which the measurement line M1 passes, reading from point B1 toward point C1 shows that the measurement line segment B1C1 passes through auxiliary measurement area X1, and its encoding information is "0"; reading from point B1 toward point D1 shows that the measurement line segment B1D1 passes through auxiliary measurement areas X1 and X2 in sequence, and its encoding information is "01"; reading from point B1 toward point E1 shows that the measurement line segment B1E1 passes through auxiliary measurement areas X1, X2, and X2 in sequence, and its encoding information is "010".

[0115] Sub-step 4033 involves obtaining the correlation between the target marker and the measured line segment based on the relevant information of the target marker corresponding to the measured line segment and the length of the measured line segment. This is largely the same as step 103 in the first embodiment and will not be described again here.

[0116] Method 3: Add encoded information to the auxiliary test line. The specific process of the marker recognition method is as follows: Figure 10 As shown.

[0117] Step 501: Control the first workpiece to drive the sensor to scan the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect the measurement lines of the sensor. This is largely the same as step 101 in the first embodiment, and will not be described again here.

[0118] Step 502: Obtain the length of the measurement line segment intercepted by at least one auxiliary measurement line pair of the sensor's measurement line. This is largely the same as step 102 in the first embodiment and will not be described again here.

[0119] Step 503 includes the following sub-steps:

[0120] Sub-step 5031: For each measurement line, the sensor scans each auxiliary measurement line that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line marked by the target through which the measurement line passes.

[0121] Sub-step 5032: Based on the encoding information of each measurement line segment, obtain the relevant information of the target mark corresponding to each measurement line segment.

[0122] Specifically, in the measurement area, the auxiliary measurement lines are three-dimensional lines formed on the surface of the second workpiece. That is, the auxiliary measurement lines are either protruding edges or recessed edges formed on the surface of the second workpiece. The width of each auxiliary measurement line can be the same, and the height of each auxiliary measurement line corresponds to a code. For example, if an auxiliary measurement line is a protruding edge formed on the surface of the second workpiece, setting an auxiliary measurement line that is higher than a preset height on the surface of the second workpiece represents code "1". When the controller controls the first workpiece to scan the measurement area according to the measurement lines, it obtains the codes of the auxiliary measurement lines through which the measurement line segments intercepted by the auxiliary measurement lines pass, which can then be used to represent the code information of that measurement line segment.

[0123] In one example, the encoding information of the measurement line segment includes the angle between the measurement line segment and the intersecting auxiliary measurement line. That is, the controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary measurement lines that intercept the measurement line segment.

[0124] Please refer to Figure 11 ,exist Figure 5Based on this, auxiliary test lines L1 to L4 with a certain width are set as protruding edges that are higher than the preset height of the second workpiece surface and represent the code "1". The area between the auxiliary test lines is not at the same height as the auxiliary test lines and is not included in the code calculation. After the sensor scans along measurement line M1, measurement line segment B1C1 is obtained by intersecting the auxiliary measurement lines L1 and L2. It passes through the auxiliary measurement lines L1 and L2. Reading from point B1 toward point C1, the encoding information of measurement line segment B1C1 is "11". Similarly, measurement line segment B1D1 passes through the auxiliary measurement lines L1, L2 and L3. Reading from point B1 toward point D1, the encoding information of measurement line segment B1D1 is "111". Measurement line segment B1E1 passes through the auxiliary measurement lines L1, L2, L3 and L4. Reading from point B1 toward point E1, the encoding information of measurement line segment B1E1 is "1111".

[0125] Sub-step 5033 involves obtaining the correlation between the target marker and the measured line segment based on the relevant information of the target marker corresponding to the measured line segment and the length of the measured line segment. This is largely the same as step 103 in the first embodiment and will not be described again here.

[0126] Method 4: Add encoded information to the auxiliary test line. The specific process of the marker recognition method is as follows: Figure 12 As shown.

[0127] Step 601: Control the first workpiece to drive the sensor to scan the measurement area including the target mark on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target mark. The two auxiliary measurement lines form an auxiliary measurement line pair, and the auxiliary measurement lines intersect the measurement lines of the sensor. This is largely the same as step 101 in the first embodiment, and will not be described again here.

[0128] Step 602: Obtain the length of the measurement line segment intercepted by at least one auxiliary measurement line pair of the sensor's measurement line. This is largely the same as step 102 in the first embodiment and will not be described again here.

[0129] Step 603 includes the following sub-steps:

[0130] Sub-step 6031: For each measurement line, the sensor scans each auxiliary measurement zone that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair that the measurement line passes through the target mark; the auxiliary measurement line pair consists of two auxiliary measurement lines that come from two auxiliary measurement zones respectively.

[0131] Sub-step 6032: Based on the encoding information of each measurement line segment, obtain the relevant information of the target mark corresponding to each measurement line segment.

[0132] Specifically, in the measurement area, the number of auxiliary measurement lines passing through the target mark is greater than two, and the number of auxiliary measurement lines is even. After sorting the multiple auxiliary measurement lines, the area between the Nth auxiliary measurement line and the (N+1)th auxiliary measurement line forms an auxiliary measurement band, where N is greater than or equal to 1 and is an odd number. In the measurement area, each auxiliary measurement band is a three-dimensional strip-shaped pattern formed on the surface of the second workpiece, that is, the auxiliary measurement band is a protruding or recessed strip-shaped pattern formed on the surface of the second workpiece. The width of each auxiliary measurement band is determined based on the spacing between the two auxiliary measurement lines forming the auxiliary measurement band, and the height of each auxiliary measurement band corresponds to a code. For example, if the auxiliary measurement band is a protruding strip-shaped pattern formed on the surface of the second workpiece, setting an auxiliary measurement band that is higher than a preset height on the surface of the second workpiece represents code "1". When the controller controls the first workpiece to scan the measurement area according to the measurement lines, it obtains the code of the auxiliary measurement band through which the measurement line segment intercepted by the auxiliary measurement line passes, which can then be used to represent the code information of the measurement line segment. In the measurement area, an auxiliary measurement area between two adjacent auxiliary measurement bands can be set to represent a code. For example, the auxiliary measurement band is a raised strip-shaped pattern formed on the surface of the second workpiece. If the auxiliary measurement band that is higher than the surface of the second workpiece is set to represent code "1", then the auxiliary measurement area between two adjacent auxiliary measurement bands that is lower than the raised height of the auxiliary measurement band is represented by code "0". At this time, when the controller controls the first workpiece to scan the measurement area according to the measurement line, the code of the auxiliary measurement band and the auxiliary measurement area through which the measurement line segment intercepted by the auxiliary measurement line pair passes can be obtained and used to represent the code information of the measurement line segment. The auxiliary measurement line pair is composed of two auxiliary measurement lines that come from two auxiliary measurement bands respectively, and the two auxiliary measurement lines that make up the auxiliary measurement line pair are not adjacent.

[0133] In one example, the encoding information of the measurement line segment includes the angle between the measurement line segment and the intersecting auxiliary measurement line. That is, the controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary measurement lines that intercept the measurement line segment.

[0134] Please refer to Figure 13 ,exist Figure 5Based on this, the area between auxiliary test lines L1 and L2 forms an auxiliary test band 12, and the area between auxiliary test lines L3 and L4 forms an auxiliary test band 34. The area between auxiliary test bands 12 and 34 forms an auxiliary test area X1. Each auxiliary test band (including auxiliary test bands 12 and 34) is set as a protruding strip-shaped graphic higher than a preset height on the surface of the second workpiece and is represented by the code "1". The auxiliary test area X1, being lower than the protruding strip-shaped graphic, is represented by the code "0". Two auxiliary test lines (i.e., auxiliary test lines L1 and L4) with the largest spacing from auxiliary test bands 12 and 34 are selected to form an auxiliary test line pair. The auxiliary test lines L1 and L4... Line L4 is used to cut through measurement line M1 to obtain measurement line segment B1E1. Measurement line segment B1E1 passes through auxiliary measurement zone 12, auxiliary measurement zone 34 and auxiliary measurement area X1. Reading from point B1 toward point E1, the encoding information of measurement line segment B1E1 is "101". Alternatively, auxiliary measurement line L1 is selected from auxiliary measurement zone 12 and auxiliary measurement line L3 is selected from auxiliary measurement zone 34. Auxiliary measurement line pair L1 and auxiliary measurement line L3 are formed by cutting through measurement line M1 to obtain measurement line segment B1D1. Measurement line segment B1D1 passes through auxiliary measurement zone 12 and auxiliary measurement area X1. Reading from point B1 toward point D1, the encoding information of measurement line segment B1D1 is "10".

[0135] Sub-step 6033 involves obtaining the correlation between the target marker and the measured line segment based on the relevant information of the target marker corresponding to the measured line segment and the length of the measured line segment. This is largely the same as step 103 in the first embodiment and will not be described again here.

[0136] In this embodiment, by pre-setting encoding information in the measurement area, the encoding information of each measurement line segment can be obtained during the sensor scanning process, and then the relevant information of the target mark corresponding to each measurement line segment can be obtained, thereby enabling faster acquisition of the relevant information of the target mark corresponding to different measurement line segments.

[0137] The fourth embodiment of the present invention relates to a pattern stitching method applied to a controller of a control system. The controller can execute the pattern stitching method of this embodiment to achieve accurate pattern stitching of the processed workpiece on the surface of the workpiece being processed in the control system. The processed workpiece is used to measure physical and chemical quantities at the nanometer-scale spatial resolution on the surface of the workpiece being processed (e.g., a wafer, silicon wafer, quartz wafer, etc.). It can also perform scanning probe lithography (SPL), electron emission, photon emission, and ion formation / ion implantation on the surface of the workpiece being processed.

[0138] The specific process of the graphic splicing method in this embodiment is as follows: Figure 14 As shown.

[0139] Step 701: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one target mark pair and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks contained in each target mark pair are respectively from two graphics to be spliced.

[0140] Specifically, the first workpiece is the workpiece to be processed, and a sensor is provided on the surface of the first workpiece facing the second workpiece (i.e., the workpiece to be processed). The sensor is, for example, a photon sensor, a laser rangefinder, an electronic sensor, an ion sensor, or an atomic force sensor (scanning probe sensor).

[0141] Two graphics to be spliced ​​are set on the surface of the second workpiece. To splice these two graphics, at least one pair of target marks needs to be selected from these two graphics. Each pair of target marks contains two target marks that come from the two graphics to be spliced. The target mark is a coordinate point in the graphics to be spliced, or a graphic containing a coordinate point in the graphics to be spliced.

[0142] A measurement area is set on the surface of the second workpiece. The measurement area includes selected target mark pairs and at least two auxiliary measurement lines passing through each target mark in the target mark pair. That is, starting from the target mark, multiple auxiliary measurement lines form a divergent structure, forming an auxiliary measurement pattern corresponding to each target mark. At least one measurement line is set in the measurement area on the surface of the second workpiece. The measurement line intersects with the auxiliary measurement lines and the sensor's measurement lines. At least one measurement line can pass through two pairs of auxiliary measurement lines simultaneously. The two pairs of auxiliary measurement lines correspond to the two target marks in the target mark pair, and the two auxiliary measurement lines in the pair pass through the corresponding target marks. In one example, the multiple auxiliary measurement lines passing through each target mark can be set to be located on the same side of a straight line that passes through the target mark and is parallel to the measurement line.

[0143] Please refer to Figure 15 and Figure 16 Figure 1 and Figure 2 are two figures that need to be spliced ​​on the surface of the second workpiece. Target mark A10 (corresponding to point A) is selected on Figure 1. 10 On Figure 2, target marker A20 (corresponding to point A) was selected. 20 ), where the coordinates of target marker A10 are (X A10 Y A10 The coordinates of target marker A20 are (X... A10 +ΔX, Y A10 +ΔY).

[0144] The measurement area includes a target marker pair consisting of target marker A10 and target marker A20, three auxiliary measurement lines passing through target marker A10 (L11, L12, and L13), and two auxiliary measurement lines passing through target marker A20 (L21, L22, and L23). Within the measurement area, the measurement line is perpendicular to auxiliary measurement lines L11 and L21. The dashed lines in the diagram represent the measurement lines. Figure 16 Measurement lines M1 and M2 are schematically marked. The controller controls the first workpiece to drive the sensor to scan the measurement area sequentially along the measurement lines. This embodiment and subsequent embodiments are illustrated using the example of an auxiliary measurement line perpendicular to the measurement line; however, it is also possible to set the case where no auxiliary measurement line is perpendicular to the measurement line.

[0145] Step 702: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs of the sensor's measurement line passing through the two target marks in the target mark pair respectively.

[0146] Specifically, for each target marker pair, the lengths of the two first measurement line segments intercepted by the sensor's measurement line through the two auxiliary measurement line pairs passing through the two target markers in the target marker pair are obtained, as well as the lengths of the second measurement line segments intercepted by the measurement line through the two non-adjacent auxiliary measurement lines between the two auxiliary measurement line pairs. Taking any target marker pair as an example, two auxiliary measurement lines are selected from multiple auxiliary measurement lines passing through one target marker to form an auxiliary measurement line pair, and then two auxiliary measurement lines are selected from multiple auxiliary measurement lines passing through the other target marker to form another auxiliary measurement line pair. When the sensor scans along the measurement line, these two auxiliary measurement line pairs can intersect the same measurement line simultaneously. Thus, the measurement line can be intercepted by these two auxiliary measurement line pairs to obtain three measurement line segments, and the lengths of the three intercepted measurement line segments can be obtained.

[0147] In this embodiment, it can be set that in each selected pair of auxiliary test lines, one of the auxiliary test lines is perpendicular to the measurement line. That is, when selecting a pair of auxiliary test lines, if one of the multiple auxiliary test lines passing through the target mark is perpendicular to the measurement line, then each pair of auxiliary test lines includes the auxiliary test line perpendicular to the measurement line, and another auxiliary test line not perpendicular to the measurement line.

[0148] by Figure 15 and Figure 16 For example, auxiliary test lines L11 and L12, which pass through target mark A10, are selected to form auxiliary test line pair 10. Auxiliary test lines L21 and L22, which pass through target mark A20, are selected to form auxiliary test line pair 20. Measurement line M1 passes through both auxiliary test line pair 10 and auxiliary test line pair 20. The intersection point of measurement line M1 and auxiliary test line L11 is B. 11 The intersection point of measurement line M1 and auxiliary measurement line L12 is C. 11The intersection point of measurement line M1 and auxiliary measurement line L21 is B. 21 The intersection point of measurement line M1 and auxiliary measurement line L22 is C. 21 The three measurement segments obtained by measuring line M1 being intercepted by auxiliary measuring line pair 10 and auxiliary measuring line pair 20 are as follows: the first measurement segment B intercepted by auxiliary measuring line pair 10. 11 C 11 The first measuring line segment B intercepted by the auxiliary measuring line 20 21 C 21 And the second measurement line segment C obtained by the auxiliary measurement line L12 and the auxiliary measurement line L22 11 C 21 When the sensor scans along the measurement line M1, it can acquire the first measurement line segment B intercepted by the auxiliary measurement line pair 10. 11 C 11 Length d B11C11 The first measurement segment B, intercepted by the auxiliary survey line 20. 21 C 21 Length d B21C21 and the second measuring line segment C 11 C 21 Length d C11C21 .

[0149] Step 703: For each target mark pair, obtain the relevant information of each target mark in the target mark pair corresponding to each measurement line segment, and obtain the correlation between the two target marks in the target mark pair based on the relevant information of each target mark corresponding to each measurement line segment and the length of each measurement line segment.

[0150] Please refer to Figure 17 Step 503 includes the following sub-steps:

[0151] Sub-step 7031: For each target mark pair, obtain the relevant information of each target mark in the target mark pair corresponding to each measurement line segment.

[0152] Specifically, the controller has pre-set information about each target marker. This information indicates the angle between each auxiliary test line and the measurement line of the target marker. After obtaining the length of the measurement line segment intercepted by at least one pair of auxiliary test lines, the included angle between the two auxiliary test lines in the pair and the measurement line segment can be obtained, which is the information about the target marker corresponding to the measurement line segment. In this embodiment, the information about the target marker corresponding to each first measurement line segment can be obtained.

[0153] Sub-step 7032: For each target mark in each target mark pair, based on the relevant information of the target mark corresponding to the first measurement line segment and the length of the first measurement line segment intercepted by the auxiliary measurement line pair passing through the target mark, the vertical distance between the target mark and the measurement line is obtained.

[0154] Sub-step 7033: For each target mark pair, the vertical distance between the two target marks in the target mark pair is obtained based on the vertical distance between the two target marks in the target mark pair and the measurement line.

[0155] Sub-step 7034: For each target mark pair, based on the lengths of the two first measurement line segments and the length of the second measurement line segment, obtain the spacing between the two target marks in the target mark pair along the measurement line.

[0156] Specifically, for each target marker pair, the correlation between the two target markers in the pair is the vertical distance between the two target marker points and the distance between the two target markers along the measurement line. The following combines... Figure 15 and Figure 16 The correlation between two target tags in the target tag pair is described in detail.

[0157] The angle between the auxiliary measuring line and the measuring line segment mentioned above is part of the graphic formed by the auxiliary measuring lines, and is predetermined and known when the auxiliary measuring lines are set. Therefore, as long as the measurement is performed on the first workpiece and the length of each measuring line segment on the measuring line is obtained, the coordinate position of the target mark can be calculated using the following method.

[0158] The acquired target marker A10 corresponds to the first measured line segment B. 11 C 11 The relevant information includes: the first measuring line segment B 11 C 11 The angle θ between the auxiliary survey line L12 and the auxiliary survey line L12 C11 Auxiliary survey line L11 and the first survey line segment B 11 C 11 Perpendicular, auxiliary survey line L11 and the first survey line segment B 11 C 11 The included angle between them is 90°. Target mark A10 and the first measurement line segment B 11 C 11 The vertical distance h between (i.e., between measurement lines M1) A10 Equal to triangle A 10 B 11 C 11 edge A 10 B 11 The length of h A10 =d B11C11 *tanθ C11 Similarly, target marker A20 corresponds to the first measurement line segment B. 21 C 21 The relevant information includes: the first measuring line segment B 21 C 21The angle θ between the auxiliary survey line L22 and the auxiliary survey line L22 C21 Auxiliary survey line L21 and the first survey line segment B 21 C 21 Perpendicular, auxiliary survey line L21 and the first survey line segment B 21 C 21 The included angle between them is 90°. Target mark A20 and the first measurement line segment B 21 C 21 The vertical distance h between (i.e., the measuring line M1) A20 Equal to triangle A 20 B 21 C 21 edge A 20 B 21 The length of h A20 =d B21C21 *tanθ C21 , where θ C21 Indicates the first measuring line segment B 21 C 21 The angle between the auxiliary survey line L22 and the auxiliary survey line L22.

[0159] The vertical distance h between the target mark A10 and the measurement line M1 is obtained. A10 The vertical distance h between target mark A20 and measurement line M1 A20 Then, the vertical distance ΔY = h between target mark A10 and target mark A20 can be obtained. A20 -h A10 .

[0160] Subsequently, based on the first measurement segment B intercepted from the auxiliary survey line 10, 11 C 11 Length d B11C11 The first measurement segment B, intercepted by the auxiliary survey line 20. 21 C 21 Length d B21C21 and the second measuring line segment C 11 C 21 Length d C11C21 The distance ΔX = d between target mark A10 and target mark A20 along measurement line M1 can be obtained. C11C21 -(d B11C11 +d B21C21 ).

[0161] The coordinates of target marker A10 are (X A10 Y A10 Based on the ΔX and ΔY calculated using the above process, the coordinates (X, Y) of the target mark A20 can be calculated. A10 +ΔX, Y A10 +ΔY).

[0162] Step 704: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together.

[0163] Specifically, for two graphics to be stitched together, after obtaining the correlation between two target marks in at least one pair of target marks on the two graphics, the two graphics can be stitched together according to a set stitching rule based on the correlation between the two target marks in the target mark pair. The preset stitching rule may be, for example, to overlap the two target marks in each target mark pair, or to move the two target marks to the same horizontal straight line.

[0164] by Figure 15 and Figure 16 For example, the splicing rule between Figure 1 and Figure 2 is to align target mark A10 with target mark A20. At this point, Figure 1, where target mark A10 is located, can be shifted to the right by ΔX along the measurement line direction, and target mark A10 can be shifted upwards by a vertical distance ΔY in the direction perpendicular to the measurement line. This allows for the splicing of Figure 1 and Figure 2. Figure 18 As shown. As previously stated, the coordinates of target marker A10 are (X... A10 Y A10 The coordinates of target marker A20 are (X... A10 +ΔX, Y A10 +ΔY).

[0165] In one example, for each pair of target markers, multiple auxiliary line pairs passing through one target marker (denoted as the first auxiliary line pair) and multiple auxiliary line pairs passing through the other target marker (denoted as the second auxiliary line pair) can be selected. Based on this, the multiple first auxiliary line pairs and multiple second auxiliary line pairs are combined pairwise. Then, based on the above process, multiple sets of correlation parameters between the two target markers in the target marker pair can be calculated. Then, by averaging these multiple sets of correlation parameters, the correlation between the two target markers in the target marker pair can be calculated. Figure 15 and Figure 16For example, auxiliary test lines L11 and L12 passing through target mark A10 are selected to form auxiliary test line pair 10, and auxiliary test lines L11 and L13 are selected to form auxiliary test line pair 11. Auxiliary test lines L21 and L22 passing through target mark A20 are selected to form auxiliary test line pair 20, and auxiliary test lines L21 and L23 are selected to form auxiliary test line pair 21. Measurement line M1 passes through auxiliary test line pair 10, auxiliary test line pair 11, auxiliary test line pair 20, and auxiliary test line pair 21 simultaneously. Auxiliary test line pair 10 and auxiliary test line pair 20 are grouped together, and a set of correlation parameters between target mark A10 and target mark A20 can be calculated. Similarly, auxiliary test line pair 11 and auxiliary test line pair 21 are grouped together, and a set of correlation parameters between target mark A10 and target mark A20 can be calculated. Then, by averaging these two sets of correlation parameters, the correlation between target mark A10 and target mark A20 can be obtained.

[0166] In this embodiment, when splicing two graphics to be joined on the surface of the second workpiece, at least one pair of target marks is set on these two graphics. Each pair of target marks contains two target marks that originate from the two graphics to be joined. A measurement area is also set on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the pair of target marks. First, the first workpiece is controlled to drive the sensor to scan the measurement area on the surface of the second workpiece and obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs that pass through the two target marks in each pair of target marks. Then, the relevant information of each target mark in each pair of target marks corresponding to each measurement line segment is obtained. Based on the relevant information of each target mark in each pair of target marks corresponding to each measurement line segment and the length of each measurement line segment, the correlation between the two target marks in each pair of target marks is obtained. The correlation between the two target marks in each pair of target marks indicates the positional relationship between the two graphics to be joined. Therefore, the two graphics to be joined can be spliced ​​based on the correlation between the two target marks in each pair of target marks. Therefore, the sensor only needs to scan one or more measurement lines to determine the positional relationship between two graphics to be stitched together, which reduces the scanning time of the sensor on the measurement area, increases the speed of graphic stitching, and thus reduces measurement time and minimizes errors caused by spatial drift between workpieces due to long scanning time.

[0167] The fifth embodiment of the present invention relates to a graphic stitching method. The main improvement of this embodiment compared with the fourth embodiment is that multiple measurement lines are used to determine the correlation between two target marks in a target mark pair.

[0168] The specific process of the graphic splicing method in this embodiment is as follows: Figure 19 As shown.

[0169] Step 801: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be stitched together. This is roughly the same as step 601 in the fourth embodiment and will not be described again here.

[0170] Step 802: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs of the two target marks in the target mark pair, respectively, through the multiple measurement lines of the sensor. This is largely the same as step 702 in the fourth embodiment, with the main difference being that in this embodiment, when the sensor scans along the measurement lines, the length of the measurement line segment intercepted by the two auxiliary measurement line pairs of the two target marks in the target mark pair is obtained.

[0171] Please refer to Figure 15 and Figure 16 Taking measurement line M1 and measurement line M2 as examples, measurement line M1 passes through both auxiliary measurement line pair 10 and auxiliary measurement line pair 20. The intersection point of measurement line M1 and auxiliary measurement line L11 is B. 11 The intersection point of measurement line M1 and auxiliary measurement line L12 is C. 11 The intersection point of measurement line M1 and auxiliary measurement line L21 is B. 21 The intersection point of measurement line M1 and auxiliary measurement line L22 is C. 21 The three measurement segments obtained by measuring line M1 being intercepted by auxiliary measuring line pair 10 and auxiliary measuring line pair 20 are as follows: the first measurement segment B intercepted by auxiliary measuring line pair 10. 11 C 11 The first measuring line segment B intercepted by the auxiliary measuring line 20 21 C 21 And the second measurement line segment C obtained by the auxiliary measurement line L12 and the auxiliary measurement line L22 11 C 21 When the sensor scans along the measurement line M1, it can acquire the first measurement line segment B intercepted by the auxiliary measurement line pair 10. 11 C 11 Length d B11C11 The first measurement segment B, intercepted by the auxiliary survey line 20. 21 C 21 Length d B21C21 and the second measuring line segment C 11 C 21 Length d C11C21 .

[0172] Measurement line M2 passes through both auxiliary measurement line pair 10 and auxiliary measurement line pair 20. The intersection point of measurement line M2 and auxiliary measurement line L11 is B. 12 The intersection point of measuring line M2 and auxiliary measuring line L12 is C. 12 The intersection point of measurement line M2 and auxiliary measurement line L21 is B. 22 The intersection point of measuring line M2 and auxiliary measuring line L22 is C. 22 The three measurement segments obtained by measuring line M2 being intercepted by auxiliary measuring line pair 10 and auxiliary measuring line pair 20 are as follows: the first measurement segment B intercepted by auxiliary measuring line pair 10. 12 C 12 The first measuring line segment B intercepted by the auxiliary measuring line 20 22 C 22 And the second measurement line segment C obtained by the auxiliary measurement line L12 and the auxiliary measurement line L22 12 C 22 When the sensor scans along the measurement line M2, it can acquire the first measurement line segment B intercepted by the auxiliary measurement line pair 10. 12 C 12 Length d B12C12 The first measurement segment B, intercepted by the auxiliary survey line 20. 22 C 22 Length d B22C22 and the second measuring line segment C 12 C 22 Length d C12C22 .

[0173] Step 803 includes the following sub-steps:

[0174] Sub-step 8031: For each target mark pair, obtain the relevant information of each target mark in the target mark pair corresponding to each measurement line segment.

[0175] Sub-step 8032: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment intercepted by the two auxiliary measurement line pairs passing through each target marker of multiple measurement lines, the reference correlation between the two target markers in the target marker pair corresponding to each measurement line is obtained.

[0176] Sub-step 8033: For each target marker pair, based on the reference correlation between the two target markers in the target marker pair corresponding to multiple reference measurement lines, obtain the correlation between the two target markers in the target marker pair.

[0177] Specifically, the controller has pre-set information about each target marker. This information indicates the angle between each auxiliary test line and the measurement line of the target marker. After obtaining the length of the measurement line segment intercepted by at least one pair of auxiliary test lines, the included angle between the two auxiliary test lines in the pair and the measurement line segment can be obtained, which is the information about the target marker corresponding to the measurement line segment. In this embodiment, the information about the target marker corresponding to each first measurement line segment can be obtained.

[0178] For each target marker pair, the correlation between the two target markers in the pair is the vertical distance between the two target marker points and the distance between the two target markers along the measurement line.

[0179] Similar to calculating the vertical distance ΔY between target mark A10 and target mark A20, and the distance ΔX between target mark A10 and target mark A20 along measurement line M1 in the fourth embodiment, in this embodiment, the vertical distance h between target mark A10 and measurement line M2 can be calculated. A11 The vertical distance h between target mark A20 and measurement line M2 A21 Then, the vertical distance ΔY' = h between target mark A10 and target mark A20 can be obtained. A21 -h A11 .

[0180] Similarly, based on the first measurement line segment B intercepted by the auxiliary measurement line pair 10 from the measurement line M2... 12 C 12 Length d B12C12 The first measuring segment B intercepted by the auxiliary measuring line 20 on the measuring line M2 22 C 22 Length d B22C22 and the second measuring line segment C 12 C 22 Length d C12C22 The distance ΔX' between target mark A10 and target mark A20 along measurement line M2 can be obtained as d. C11C21 -(d B11C11 +d B21C21 ).

[0181] As shown above, the coordinates of target marker A10 can be represented as (X... A10 Y A10 If the coordinates of target marker A20 are (X...), then the coordinates of target marker A20 are (X...). A10 +ΔX',Y A10 +ΔY').

[0182] Then, by averaging, the distance ΔX between target mark A10 and target mark A20 along the measurement line can be obtained. M1M2= (△X + △X') / 2, the distance △Y between target mark A10 and target mark A20 in the direction perpendicular to the measurement line. M1M2 = (△Y+△Y') / 2, that is, the coordinates of the target mark A10 are represented as (X... A10 Y A10 When ), the final coordinates of the target marker A20 are (X). A10 +△X M1M2 Y A10 +△Y M1M2 ).

[0183] Step 804: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together. This is largely the same as step 704 in the fourth embodiment, and will not be described again here.

[0184] In this embodiment, multiple measurement lines are used to determine the correlation between two target marks in a target mark pair, thereby improving the accuracy of the positional relationship between the two graphics and enhancing the accuracy of graphic splicing.

[0185] The sixth embodiment of the present invention relates to a graphic splicing method. The main improvement of this embodiment compared with the fourth embodiment is that this embodiment provides a specific implementation method for obtaining relevant information of the target marker.

[0186] This embodiment provides two specific implementation methods for obtaining relevant information of target markers, as follows:

[0187] Method 1 involves adding coded information to the measurement line. The specific process of the graphic splicing method is as follows: Figure 20 As shown.

[0188] Step 901: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be stitched together. This is roughly the same as step 701 in the fourth embodiment and will not be described again here.

[0189] Step 902: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs that pass through the two target marks in the target mark pair. This is largely the same as step 702 in the fourth embodiment and will not be described again here.

[0190] Step 903 includes the following sub-steps:

[0191] Sub-step 9031: For each target mark in the target mark pair, the sensor scans each solid block on the measurement line to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair that passes through the target mark.

[0192] Sub-step 9032: Based on the encoding information of the measurement line segments intercepted by the auxiliary measurement line pairs passing through each target mark, obtain the relevant information of each target mark corresponding to each measurement line segment.

[0193] Specifically, in the measurement area, multiple three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface. These blocks can be protruding blocks above the second workpiece surface or recessed blocks formed on the second workpiece surface. The shapes of the blocks can be cubes, spheres, etc., and the height of each block corresponds to a code. For example, if a block is a protruding block above the second workpiece surface, a block with a preset height above the second workpiece surface is represented by code "1," and a position without a block is represented by code "0." When the controller controls the first workpiece to scan the measurement area along the measurement line, it can sequentially scan the three-dimensional blocks on the measurement line, obtaining the combination of three-dimensional blocks formed on the measurement line segment intercepted by the auxiliary measurement line. The code of the combination of three-dimensional blocks on the measurement line segment forms the code information of the measurement line segment.

[0194] Please refer to Figure 21 ,exist Figure 16 Based on this, multiple cubic blocks were set on the measurement line M1. The presence of a cubic block on measurement line M1 was represented by the code "1", and the absence of a cubic block was represented by the code "0". After the sensor scanned each cubic block on measurement line M1, the signal was received from point B. 11 Orientation point C 11 The first measured line segment B can be obtained by reading. 11 C 11 The encoded information is "0101", from point B 21 Orientation point C 21 The first measured line segment B can be obtained by reading. 21 C 21 The encoding information is "10101".

[0195] In this embodiment, the encoding information of the measurement line segment includes the angle between the measurement line segment and the auxiliary test line in the auxiliary test line pair that cuts the measurement line segment. The controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary test lines that cut the measurement line segment.

[0196] Sub-step 9033: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment, obtain the correlation between the two target markers in the target marker pair. This is largely the same as step 703 in the fourth embodiment, and will not be described again here.

[0197] Step 904: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together. This is largely the same as step 704 in the fourth embodiment, and will not be described again here.

[0198] Method 2 involves adding coded information to the auxiliary test areas obtained from the division of the measurement area. The specific process of the marker recognition method is as follows: Figure 22 As shown.

[0199] Step 1001: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be stitched together. This is roughly the same as step 701 in the fourth embodiment and will not be described again here.

[0200] Step 1002: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs of the sensor's measurement line passing through the two target marks in the target mark pair. This is largely the same as step 702 in the fourth embodiment and will not be described again here.

[0201] Step 1003 includes the following sub-steps:

[0202] Sub-step 10031: For each target mark in the target mark pair, the measurement line is scanned by the sensor through each auxiliary measurement area through which the measurement line passes, and the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair through the target mark is obtained.

[0203] Sub-step 10032: Based on the encoding information of the measurement line segments intercepted by the auxiliary measurement line pairs passing through each target mark, obtain the relevant information of each target mark corresponding to each measurement line segment.

[0204] Specifically, there are more than two auxiliary measurement lines. Multiple auxiliary measurement lines divide the measurement area into multiple auxiliary measurement areas. In the measurement area, the height of each auxiliary measurement area in the height direction of the second workpiece surface corresponds to a code. For example, an auxiliary measurement area that is higher than the preset height of the second workpiece surface is represented by code "1", and an auxiliary measurement area that is not higher than the preset height of the second workpiece surface is represented by code "0". When the controller controls the first workpiece to scan the measurement area according to the measurement lines, the code of the auxiliary measurement area through which the measurement line segment intercepted by the auxiliary measurement line is obtained can be used to represent the code information of the measurement line segment.

[0205] Please refer to Figure 23 ,exist Figure 16 Based on this, the measurement area is divided into two auxiliary measurement areas by three auxiliary measurement lines passing through target mark A10: auxiliary measurement area X1 between auxiliary measurement lines L11 and L12, and auxiliary measurement area X2 between auxiliary measurement lines L12 and L13. Similarly, the measurement area is divided into two auxiliary measurement areas by three auxiliary measurement lines passing through target mark A20: auxiliary measurement area X3 between auxiliary measurement lines L21 and L22, and auxiliary measurement area X4 between auxiliary measurement lines L22 and L23. Auxiliary measurement areas X1 and X4 being flush with the surface of the second workpiece are coded as "0," while auxiliary measurement areas X2 and X3 being higher than a preset height on the surface of the second workpiece are coded as "1." After the sensor scans each auxiliary measurement area through which measurement line M1 passes, measurement line segment B can be obtained. 11 C 11 Passing through auxiliary measurement area X1, its encoded information is "0"; measuring line segment B 11 D 11 Passing through auxiliary measurement regions X1 and X2, from point B 11 Orientation to point D 11 The reading can obtain the measurement line segment B. 11 D 11 The encoding information is "01"; the measurement line segment B 21 C 21 Passing through auxiliary measurement area X3, its encoded information is "1"; measuring line segment B 21 D 21 Passing through auxiliary measurement regions X3 and X4, from point B 21 Orientation to point D 21 The reading can obtain the measurement line segment B. 21 D 21 The encoding information is "10".

[0206] In this embodiment, the encoding information of the measurement line segment includes the angle between the measurement line segment and the auxiliary test line in the auxiliary test line pair that cuts the measurement line segment. The controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary test lines that cut the measurement line segment.

[0207] Sub-step 10033: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment, obtain the correlation between the two target markers in the target marker pair. This is largely the same as step 703 in the fourth embodiment, and will not be described again here.

[0208] Step 1004: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together. This is largely the same as step 704 in the fourth embodiment, and will not be described again here.

[0209] Method 3: Add encoded information to the auxiliary test line. The specific process of the marker recognition method is as follows: Figure 24 As shown.

[0210] Step 1101: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be stitched together. This is roughly the same as step 701 in the fourth embodiment and will not be described again here.

[0211] Step 1102: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs that pass through the two target marks in the target mark pair. This is largely the same as step 702 in the fourth embodiment and will not be described again here.

[0212] Step 1103 includes the following sub-steps:

[0213] Sub-step 11031: For each target mark in the target mark pair, the measurement line is scanned by the sensor through each auxiliary measurement line that the measurement line passes through, and the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair that passes through the target mark is obtained.

[0214] Sub-step 11032: Based on the encoding information of the measurement line segments intercepted by the auxiliary measurement line pairs passing through each target mark, obtain the relevant information of each target mark corresponding to each measurement line segment.

[0215] Specifically, in the measurement area, the auxiliary measurement lines are three-dimensional lines formed on the surface of the second workpiece. That is, the auxiliary measurement lines are protruding edges or recessed edges formed on the surface of the second workpiece. The width of each auxiliary measurement line can be the same, and the height of each auxiliary measurement line corresponds to a code. For example, if the auxiliary measurement line is a protruding edge formed on the surface of the second workpiece, setting an auxiliary measurement line that is higher than a preset height on the surface of the second workpiece represents the code "1". When the controller controls the first workpiece to scan the measurement area according to the measurement lines, the code of the auxiliary measurement line through which the measurement line segment intercepted by the auxiliary measurement line is obtained can be used to represent the code information of the measurement line segment.

[0216] Please refer to Figure 25 ,exist Figure 16 Based on this, auxiliary measurement lines L11, L12, L13, and L21 are set with a certain width. These are protruding ridges formed at a preset height on the surface of the second workpiece and are coded "1". Auxiliary measurement lines L22 and L23 are recessed ridges formed at a preset depth on the surface of the second workpiece and are coded "0". However, the area between adjacent auxiliary measurement lines is not included in the coding calculation. After the sensor scans along measurement line M1, measurement line segment B can be obtained. 11 C 11 Passing through auxiliary survey lines L11 and L12, from point B 11 Orientation point C 11 The reading can obtain the measurement line segment B. 11 C 11 The encoding information is "11"; the measurement line segment B 11 D 11 Passing through auxiliary survey lines L11, L12, and L13, from point B 11 Orientation to point D 11 The reading can obtain the measurement line segment B. 11 D 11 The encoding information is "111"; the measurement line segment B 21 C 21 Passing through auxiliary survey lines L21 and L22, from point B 21 Orientation point C 21 The reading can obtain the measurement line segment B. 21 C 21 The encoding information is "10"; the measurement line segment B 21 D 21 Passing through auxiliary survey lines L21, L22, and L23, from point B 21 Orientation to point D 21 The reading can obtain the measurement line segment B. 21 D 21 The encoding information is "100".

[0217] In this embodiment, the encoding information of the measurement line segment includes the angle between the measurement line segment and the auxiliary test line in the auxiliary test line pair that cuts the measurement line segment. The controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary test lines that cut the measurement line segment.

[0218] Sub-step 11033: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment, obtain the correlation between the two target markers in the target marker pair. This is largely the same as step 703 in the fourth embodiment, and will not be described again here.

[0219] Step 1104: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together. This is largely the same as step 704 in the fourth embodiment, and will not be described again here.

[0220] Method 4: Add encoded information to the auxiliary test strip. The specific process of the marker recognition method is as follows: Figure 26 As shown.

[0221] Step 1201: Control the first workpiece to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The two auxiliary measurement lines passing through the same target mark form an auxiliary measurement line pair. The auxiliary measurement lines intersect with the measurement lines of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be stitched together. This is roughly the same as step 701 in the fourth embodiment and will not be described again here.

[0222] Step 1202: For each target mark pair, obtain the length of the measurement line segment intercepted by the two auxiliary measurement line pairs that pass through the two target marks in the target mark pair. This is largely the same as step 702 in the fourth embodiment and will not be described again here.

[0223] Step 1203 includes the following sub-steps:

[0224] Sub-step 12031: For each target mark in the target mark pair, the measurement line is scanned by the sensor through each auxiliary test strip, and the encoding information of the measurement line segment intercepted by the auxiliary test line pair passing through the target mark is obtained. The auxiliary test line pair consists of two auxiliary test lines respectively from the two auxiliary test strips passing through the target mark.

[0225] Sub-step 12032: Based on the encoding information of the measurement line segments intercepted by the auxiliary measurement line pairs passing through each target mark, obtain the relevant information of each target mark corresponding to each measurement line segment.

[0226] Specifically, in the measurement area, the number of auxiliary test lines passing through each target mark is greater than two, and the number of auxiliary test lines is even. After the multiple auxiliary test lines passing through each target mark in the measurement area are sorted, the area between the Nth auxiliary test line and the (N+1)th auxiliary test line forms an auxiliary test band, where N is greater than or equal to 1 and is an odd number. In the measurement area, each auxiliary test band is a three-dimensional strip-shaped pattern formed on the surface of the second workpiece, that is, the auxiliary test band is a protruding strip-shaped pattern or a recessed strip-shaped pattern formed on the surface of the second workpiece. The width of each auxiliary test band is determined based on the spacing between the two auxiliary test lines forming the auxiliary test band, and the height of each auxiliary test band corresponds to a code. For example, the auxiliary measurement band is a raised strip-shaped pattern formed on the surface of the second workpiece. The auxiliary measurement band that is set to a preset height above the surface of the second workpiece represents the code "1". When the controller controls the first workpiece to scan the measurement area according to the measurement line, the code of the auxiliary measurement band through which the measurement line segment intercepted by the auxiliary measurement line pair passes can be obtained and used to represent the code information of the measurement line segment. For each target mark, the auxiliary measurement line pair consists of two auxiliary measurement lines from two auxiliary measurement bands that pass through the target mark, and the two auxiliary measurement lines that make up the auxiliary measurement line pair are not adjacent. In one example, the measurement area can also be set to represent an auxiliary measurement area that passes through the same target mark and is between two adjacent auxiliary measurement zones, for example, the auxiliary measurement zone is a raised strip-shaped pattern formed on the surface of the second workpiece. Setting the auxiliary measurement zone that protrudes from the surface of the second workpiece by a preset height represents the code "1". Then, the auxiliary measurement area that passes through the same target mark and is between two adjacent auxiliary measurement zones that is not in the raised area represents the code "0". At this time, when the controller controls the first workpiece to scan the measurement area according to the measurement line, the code of the auxiliary measurement zone and the auxiliary measurement area that the measurement line segment intercepted by the auxiliary measurement line pair passes through can be obtained and used to represent the code information of the measurement line segment.

[0227] Please refer to Figure 27The six auxiliary test lines passing through target mark A10 are (excluding width) auxiliary test line L11, auxiliary test line L12, auxiliary test line L13, auxiliary test line L14, auxiliary test line L15, and auxiliary test line L16. The six auxiliary test lines passing through target mark A20 are auxiliary test line L21, auxiliary test line L22, auxiliary test line L23, auxiliary test line L24, auxiliary test line L25, and auxiliary test line L26. The area between auxiliary test line L11 and auxiliary test line L12 forms an auxiliary test zone 11; the area between auxiliary test line L13 and auxiliary test line L14 forms an auxiliary test zone 12; the area between auxiliary test line L15 and auxiliary test line L16 forms an auxiliary test zone 13; the area between auxiliary test line L21 and auxiliary test line L22 forms an auxiliary test zone 21; and the area between auxiliary test line L23 and auxiliary test line L24 forms an auxiliary test zone. 22. The area between auxiliary test line L25 and auxiliary test line L26 forms an auxiliary test band 23. Auxiliary test bands 11, 21, and 22 are protruding strip-shaped graphics that are higher than the preset height of the second workpiece surface and represent the code "1". Auxiliary test bands 12, 13, and 23 are recessed strip-shaped graphics that are formed at a preset depth on the second workpiece surface and represent the code "0". The area outside the auxiliary test bands is not at the same height as the auxiliary test bands and is not included in the code calculation, but it can highlight the "high" or "low" of the auxiliary test bands. Taking the selection of the two auxiliary test lines (i.e., auxiliary test line L11 and auxiliary test line L16) with the largest distance between auxiliary test lines from auxiliary test bands 11 and 13 respectively (which pass through the target mark A10) to form an auxiliary test line pair as an example, auxiliary test lines L11 and L16 cut the measurement line M1 to obtain the measurement line segment B. 11 G 11 Measure line segment B 11 G 11 Passing through auxiliary survey strips 11, 12, and 13, from point B 11 Orientation point C 11 The reading can obtain the measurement line segment B. 11 C 11 The encoding information is "100"; taking the selection of two auxiliary test lines (i.e., auxiliary test line L21 and auxiliary test line L24) from the two auxiliary test lines with the largest spacing from auxiliary test lines 21 and 22 respectively, which pass through the target mark A20, as an example, auxiliary test lines L21 and L24 cut off the measurement line M1 to obtain the measurement line segment B. 21 E 21 Measure line segment B 21 E 21 Passing through auxiliary survey strips 21 and 22, from point B 21 Orientation point E 21 The reading can obtain the measurement line segment B. 21 E 21 The encoding information is "11".

[0228] In this embodiment, the encoding information of the measurement line segment includes the angle between the measurement line segment and the auxiliary test line in the auxiliary test line pair that cuts the measurement line segment. The controller has a preset correspondence between the encoding information of the measurement line segment and related information. Thus, after obtaining the encoding information of each measurement line segment, the relevant information of the target mark corresponding to each measurement line segment can be obtained based on the correspondence. The relevant information includes the angle between the measurement line segment and the two auxiliary test lines that cut the measurement line segment.

[0229] Sub-step 12033: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment, obtain the correlation between the two target markers in the target marker pair. This is largely the same as step 703 in the fourth embodiment, and will not be described again here.

[0230] Step 1204: Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together. This is largely the same as step 704 in the fourth embodiment, and will not be described again here.

[0231] In this embodiment, by pre-setting encoding information in the measurement area, the encoding information of each measurement line segment can be obtained during the sensor scanning process, and then the relevant information of the target mark corresponding to each measurement line segment can be obtained, thereby enabling faster acquisition of the relevant information of the target mark corresponding to different measurement line segments.

[0232] The seventh embodiment of the present invention relates to a control system, comprising: a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to the first workpiece and the sensor, respectively. The sensor is disposed on the first workpiece and faces the surface of the second workpiece. A measurement area is disposed on the surface of the second workpiece. At least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one target mark and at least two auxiliary measurement lines passing through the target mark, the auxiliary measurement lines intersecting the measurement line of the sensor. The controller is used to execute the mark recognition method of any one of the first to third embodiments.

[0233] In this example, the first workpiece is the workpiece to be processed, and a sensor is provided on the surface of the first workpiece facing the second workpiece (i.e., the workpiece to be processed). The sensor is, for example, a photon sensor, a laser rangefinder, an electronic sensor, an ion sensor, or an atomic force sensor (scanning probe sensor), etc.

[0234] The processing equipment is used to measure physical and chemical quantities at the nanometer-scale spatial resolution on the surface of workpieces (such as wafers, silicon wafers, quartz wafers, etc.). It can also perform scanning probe lithography (SPL), electron emission, photon emission, and ion formation / ion implantation on the surface of the workpiece.

[0235] The target is marked as any one of the following: a three-dimensional pit, a conical three-dimensional pit, a three-dimensional protrusion, a conical protrusion, and especially a three-dimensional structure graphic with a center point.

[0236] The eighth embodiment of the present invention relates to a control system, comprising: a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to the first workpiece and the sensor, respectively. The sensor is disposed on the first workpiece and faces the surface of the second workpiece. A measurement area is disposed on the surface of the second workpiece. At least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one pair of target marks and at least two auxiliary measurement lines passing through each target mark in the pair of target marks. The auxiliary measurement lines intersect with the measurement line of the sensor. The two target marks contained in each pair of target marks are respectively derived from two graphics to be spliced. The controller is used to execute the graphic splicing method of any one of the fourth to sixth embodiments.

[0237] The target is marked as any one of the following: a three-dimensional pit, a conical three-dimensional pit, a three-dimensional protrusion, a conical protrusion, and especially a three-dimensional structure graphic with a center point.

[0238] In this example, the first workpiece is the workpiece to be processed, and a sensor is provided on the surface of the first workpiece facing the second workpiece (i.e., the workpiece to be processed). The sensor is, for example, a photon sensor, a laser rangefinder, an electronic sensor, an ion sensor, or an atomic force sensor (scanning probe sensor), etc.

[0239] The processing equipment is used to measure physical and chemical quantities at the nanometer-scale spatial resolution on the surface of workpieces (such as wafers, silicon wafers, quartz wafers, etc.). It can also perform scanning probe lithography (SPL), electron emission, photon emission, and ion formation / ion implantation on the surface of the workpiece.

[0240] It should be noted that the control system in the seventh embodiment can be the same control system as the control system in the eighth embodiment, that is, the above method implementation example can be implemented using the same control system.

[0241] The preferred embodiments of the present invention have been described in detail above, but it should be understood that, if necessary, aspects of the embodiments can be modified to utilize aspects, features, and concepts from various patents, applications, and publications to provide other embodiments.

[0242] In light of the detailed description above, these and other changes can be made to the embodiments. Generally, the terminology used in the claims should not be considered limited to the specific embodiments disclosed in the specification and claims, but should be understood to include all possible embodiments together with the full scope of equivalents enjoyed by these claims.

Claims

1. A marker recognition method, characterized in that, include: The first workpiece is controlled to drive the sensor to scan and measure a measurement area including target marks on the surface of the second workpiece. The measurement area includes at least two auxiliary measurement lines passing through the target marks, the two auxiliary measurement lines forming an auxiliary measurement line pair, the auxiliary measurement lines intersecting with the measurement lines of the sensor, and the measurement area includes at least one pair of target marks, each pair of target marks containing two target marks respectively originating from two graphics to be spliced. Obtain the length of the measurement line segment intercepted by at least one of the auxiliary measurement line pairs of the sensor's measurement line; Obtain relevant information about the target marker corresponding to the measured line segment, and based on the relevant information about the target marker corresponding to the measured line segment and the length of the measured line segment, obtain the correlation between the target marker and the measured line segment; When it is necessary to join two of the aforementioned graphics: Obtain the relevant information of each target mark in the target mark pair corresponding to each measurement line segment, and based on the relevant information of each target mark corresponding to each measurement line segment and the length of each measurement line segment, obtain the correlation relationship between the two target marks in the target mark pair; Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together.

2. The marker recognition method according to claim 1, characterized in that, The number of auxiliary test line pairs is greater than one pair; obtaining the length of the measurement line segment intercepted by at least one auxiliary test line pair of the sensor's measurement line includes: Obtain the lengths of multiple measurement line segments intercepted by multiple auxiliary measurement line pairs of the sensor's measurement line; The step of obtaining the correspondence between the target marker and the measured line segment based on the relevant information and the length of the measured line segment includes: Based on the relevant information of the target marker corresponding to each of the measured line segments and the length of each of the measured line segments, a reference correlation relationship between the target marker corresponding to each of the measured line segments and the measured line segments is obtained; Based on the reference correlations corresponding to multiple measurement line segments, the correlation between the target marker and the measurement line segments is obtained.

3. The marker recognition method according to claim 1, characterized in that, In the measurement area, a plurality of three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface, and the height of each three-dimensional block corresponds to a code. The step of obtaining the relevant information corresponding to the target mark and the measured line segment includes: For each measurement line, the sensor scans each of the three-dimensional blocks on the measurement line to obtain the encoded information of the measurement line segment intercepted by the auxiliary measurement line pair that passes through the target mark; Based on the encoding information of each of the measured line segments, the relevant information of the target mark corresponding to each of the measured line segments is obtained.

4. The marker recognition method according to claim 1, characterized in that, The number of auxiliary test lines is greater than two; the multiple auxiliary test lines divide the measurement area into multiple auxiliary test areas, and in the measurement area, the height of each auxiliary test area in the height direction of the second workpiece surface corresponds to a code; The step of obtaining the relevant information corresponding to the target mark and the measured line segment includes: For each measurement line, the sensor scans each of the auxiliary measurement areas that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair through which the measurement line passes the target mark; Based on the encoding information of each of the measured line segments, the relevant information of the target mark corresponding to each of the measured line segments is obtained.

5. The marker recognition method according to claim 1, characterized in that, The number of auxiliary test lines is greater than two; in the measurement area, the auxiliary test lines are three-dimensional lines formed on the surface of the second workpiece, and the height of each auxiliary test line corresponds to a code; The step of obtaining the relevant information corresponding to the target mark and the measured line segment includes: For each measurement line, the sensor scans each of the auxiliary measurement lines that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement lines that the measurement line passes through the target mark; Based on the encoding information of each of the measured line segments, the relevant information of the target mark corresponding to each of the measured line segments is obtained.

6. The marker recognition method according to claim 1, characterized in that, The number of auxiliary test lines is greater than two and is even; after the multiple auxiliary test lines in the measurement area are sorted, the area between the Nth auxiliary test line and the (N+1)th auxiliary test line forms an auxiliary test band, where N is greater than or equal to 1 and is odd. Each auxiliary test band is a three-dimensional band. In the measurement area, the height of each auxiliary test band in the height direction of the second workpiece surface corresponds to a code. The step of obtaining the relevant information corresponding to the target mark and the measured line segment includes: For each measurement line, the sensor scans each of the auxiliary test strips that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair that the measurement line passes through the target mark; the auxiliary test line pair consists of two auxiliary test lines respectively from two of the auxiliary test strips; Based on the encoding information of each of the measured line segments, the relevant information of the target mark corresponding to each of the measured line segments is obtained.

7. The marker recognition method according to claim 1, characterized in that, The target marker is a coordinate point, or a graphic containing a coordinate point.

8. The marker recognition method according to any one of claims 1 to 7, characterized in that, The relevant information of the measurement line segment includes the angle between the measurement line segment and the auxiliary measurement line that cuts the measurement line segment.

9. The marker recognition method according to any one of claims 1 to 7, characterized in that, For each pair of auxiliary test lines, one of the auxiliary test lines in the pair is perpendicular to the measurement line.

10. A method for stitching graphics, characterized in that, include: The first workpiece is controlled to drive the sensor to scan and measure the measurement area on the surface of the second workpiece. The measurement area includes at least one target mark pair and at least two auxiliary test lines passing through each target mark in the target mark pair. The two auxiliary test lines passing through the same target mark form an auxiliary test line pair. The auxiliary test lines intersect with the measurement lines of the sensor. The two target marks contained in each target mark pair are respectively derived from two graphics to be spliced. For each target mark pair, the length of the measurement line segment intercepted by the sensor's measurement line through the two auxiliary measurement line pairs of the two target marks in the target mark pair is obtained; For each target marker pair, obtain the relevant information of each target marker in the target marker pair corresponding to each measurement line segment, and obtain the correlation relationship between the two target markers in the target marker pair based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment; Based on the correlation between the two target markers in each target marker pair, the two graphics to be stitched together are stitched together.

11. The graphic splicing method according to claim 10, characterized in that, For each target marker pair, the length of the measurement line segment intercepted by the sensor's measurement line through the two auxiliary measurement line pairs of the two target markers in the target marker pair is obtained, including: For each target mark pair, the length of the measurement line segment intercepted by the two auxiliary measurement line pairs of the multiple measurement lines of the sensor passing through the two target marks in the target mark pair is obtained; For each target marker pair, based on the relevant information corresponding to each target marker for each measured line segment and the length of each measured line segment, the correlation between the two target markers in the target marker pair is obtained, including: For each target marker pair, based on the relevant information of each target marker corresponding to each measurement line segment and the length of each measurement line segment intercepted by the two auxiliary measurement line pairs passing through each target marker of the multiple measurement lines, the reference correlation relationship between the two target markers in the target marker pair corresponding to each measurement line is obtained; For each target marker pair, the correlation between the two target markers in the target marker pair is obtained based on the reference correlation between the two target markers in the target marker pair corresponding to the multiple measurement lines.

12. The graphic splicing method according to claim 10, characterized in that, For each of the target marker pairs, obtaining the length of the measurement line segment intercepted by the sensor's measurement line through the two auxiliary measurement line pairs of the two target markers in the target marker pair includes: For each target mark pair, the lengths of the two first measurement line segments intercepted by the two auxiliary measurement line pairs that pass through the two target marks in the target mark pair are obtained, as well as the lengths of the second measurement line segments intercepted by the two auxiliary measurement lines that are not adjacent between the two auxiliary measurement line pairs. For each target marker pair, based on the relevant information corresponding to each target marker for each measured line segment and the length of each measured line segment, the correlation between the two target markers in the target marker pair is obtained, including: For each target mark in each of the target mark pairs, the vertical distance between the target mark and the measurement line is obtained based on the relevant information of the target mark corresponding to the first measurement line segment and the length of the first measurement line segment intercepted by the auxiliary measurement line pair passing through the target mark. For each target mark pair, the vertical spacing between the two target marks in the target mark pair is obtained based on the vertical distance between the two target marks in the target mark pair and the measurement line; For each target mark pair, the spacing between the two target marks in the target mark pair along the measurement line is obtained based on the lengths of the two first measurement line segments and the length of the second measurement line segment.

13. The graphic splicing method according to claim 10, characterized in that, In the measurement area, a plurality of three-dimensional blocks are formed along the measurement line in the height direction of the second workpiece surface, and the height of each three-dimensional block corresponds to a code. For each of the target marker pairs, obtaining relevant information corresponding to each of the measured line segments for each target marker in the target marker pair includes: For each target mark in the target mark pair, the sensor scans each of the three-dimensional blocks on the measurement line to obtain the encoded information of the measurement line segment intercepted by the auxiliary measurement line pair that passes through the target mark; Based on the encoding information of the measurement line segments intercepted by the auxiliary test line pairs passing through each of the target marks, the relevant information of each target mark corresponding to each of the measurement line segments is obtained.

14. The graphic splicing method according to claim 10, characterized in that, The number of auxiliary test lines is greater than two; the multiple auxiliary test lines divide the measurement area into multiple auxiliary test areas, and in the measurement area, the height of each auxiliary test area in the height direction of the second workpiece surface corresponds to a code; For each of the target marker pairs, obtaining relevant information corresponding to each of the measured line segments for each target marker in the target marker pair includes: For each target mark in the target mark pair, the sensor scans each of the auxiliary measurement areas through which the measurement line passes to obtain the encoding information of the measurement line segment intercepted by the auxiliary measurement line pair that passes through the target mark; Based on the encoding information of the measurement line segments intercepted by the auxiliary test line pairs passing through each of the target marks, the relevant information of each target mark corresponding to each of the measurement line segments is obtained.

15. The graphic splicing method according to claim 10, characterized in that, The number of auxiliary test lines is greater than two; the auxiliary test lines are three-dimensional lines formed on the surface of the second workpiece, and the height of each auxiliary test line corresponds to a code; For each of the target marker pairs, obtaining relevant information corresponding to each of the measured line segments for each target marker in the target marker pair includes: For each target mark in the target mark pair, the sensor scans each of the auxiliary test lines that the measurement line passes through to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair that passes through the target mark; Based on the encoding information of the measurement line segments intercepted by the auxiliary test line pairs passing through each of the target marks, the relevant information of each target mark corresponding to each of the measurement line segments is obtained.

16. The graphic splicing method according to claim 10, characterized in that, The number of auxiliary test lines passing through each target mark is greater than two and is even; after the multiple auxiliary test lines passing through each target mark in the measurement area are sorted, the area between the Nth auxiliary test line and the (N+1)th auxiliary test line forms an auxiliary test band, where N is greater than or equal to 1 and is odd, and each auxiliary test band is a three-dimensional band. In the measurement area, the height of each auxiliary test band in the height direction of the second workpiece surface corresponds to a code. For each of the target marker pairs, obtaining relevant information corresponding to each of the measured line segments for each target marker in the target marker pair includes: For each target mark in the target mark pair, the sensor scans each of the auxiliary test strips through which the measurement line passes to obtain the encoding information of the measurement line segment intercepted by the auxiliary test line pair that passes through the target mark. The auxiliary test line pair consists of two auxiliary test lines respectively derived from two auxiliary test strips that pass through the target mark. Based on the encoding information of the measurement line segments intercepted by the auxiliary test line pairs passing through each of the target marks, the relevant information of each target mark corresponding to each of the measurement line segments is obtained.

17. The graphic splicing method according to claim 10, characterized in that, The target marker is a coordinate point, or a graphic containing a coordinate point.

18. The graphic splicing method according to any one of claims 10 to 17, characterized in that, The relevant information of the measurement line segment includes the angle between the measurement line segment and the auxiliary measurement line that cuts the measurement line segment.

19. The graphic splicing method according to any one of claims 10 to 17, characterized in that, For each pair of auxiliary test lines, one of the auxiliary test lines in the pair is perpendicular to the measurement line.

20. A control system, characterized in that, include: The system includes a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to both the first workpiece and the sensor. The sensor is mounted on the first workpiece and faces the surface of the second workpiece. A measurement area is provided on the surface of the second workpiece, and at least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one target mark and at least two auxiliary measurement lines passing through the target mark, and the auxiliary measurement lines intersect with the measurement line of the sensor. The controller is used to execute the mark recognition method according to any one of claims 1 to 9.

21. The control system according to claim 20, characterized in that, The target marker is any one of the following: a three-dimensional pit, a conical three-dimensional pit, a three-dimensional protrusion, a conical protrusion, and a three-dimensional graphic with a center point.

22. A control system, characterized in that, include: The system includes a controller, a first workpiece, a sensor, and a second workpiece. The controller is connected to both the first workpiece and the sensor. The sensor is mounted on the first workpiece and faces the surface of the second workpiece. A measurement area is provided on the surface of the second workpiece. At least one measurement line of the sensor is preset on the measurement area. The measurement area includes at least one target mark pair and at least two auxiliary measurement lines passing through each target mark in the target mark pair. The auxiliary measurement lines intersect with the measurement line of the sensor. The two target marks in each target mark pair are respectively derived from two graphics to be spliced. The controller is used to execute the graphic splicing method according to any one of claims 10 to 19.

23. The control system according to claim 22, characterized in that, The target marker is any one of the following: a three-dimensional pit, a conical three-dimensional pit, a three-dimensional protrusion, a conical protrusion, and a three-dimensional graphic with a center point.

Images