System for transfer of goods, system and method for transfer across a manufacturing plant

Abstract

Embodiments of the invention provide a system for transferring goods, the system comprising: a first automated material handling system (AMHS) comprising: a first overhead transfer (OHT) track, and a first vehicle movable along the first OHT track, wherein the first vehicle is operable to simultaneously carry the first goods container and the second goods container. Embodiments of the invention also provide a system for transferring across a manufacturing plant and a method for transferring across a manufacturing plant.

Description

Technical Field

[0001] Embodiments of the present invention relate to systems for cargo transfer systems, systems and methods for transfers across manufacturing plants. Background Technology

[0002] During the manufacturing of semiconductor devices, the device is typically handled at numerous workstations or processing tools. To accommodate these workstations or processing tools, many semiconductor manufacturing facilities / plants, or "FABs," can be constructed. Semiconductor manufacturing facilities clustered in a site location or industrial park can be referred to as an FAB cluster. The transport or delivery of partially completed devices or work-in-process (WIP) parts is a crucial aspect of the entire manufacturing process. Due to the fragile nature of chips, the transport of semiconductor wafers is particularly important in the manufacture of integrated circuit (IC) chips. Furthermore, multiple manufacturing steps are typically performed to complete the manufacturing process when manufacturing IC products. The manufacturing process often necessitates cross-stage transfers within a single FAB and / or cross-fab transfers between FABs within an FAB cluster.

[0003] Automated material handling systems (“AMHS”) have been widely used in manufacturers to automate the transfer and transport of groups or large quantities of wafers between various processing tools used in chip manufacturing. While existing systems and methods are generally sufficient to meet their intended purpose, they are not entirely satisfactory in all respects. Summary of the Invention

[0004] Some embodiments of the present invention provide a system for inter-manufacturing plant transfer, the inter-manufacturing plant transfer system comprising: a first manufacturing plant (FAB) building, the first FAB building including: a first set of manufacturing tools, a first overhead transfer (OHT) track serving the first set of manufacturing tools, and a first vehicle operable to carry a first container and move along the first OHT track; a second FAB building, the second FAB building including: a second set of manufacturing tools, a second OHT track serving the second set of manufacturing tools, and a second vehicle operable to carry the first container and move along the second OHT track; and a first bridging area located between the first FAB building and the second FAB building, wherein the first OHT track includes a first portion located in the first FAB building and a second portion located in the first bridging area, the second OHT track includes a first portion located in the second FAB building and a second portion located in the first bridging area, the second portion of the second OHT track being at least partially parallel to the second portion of the first OHT track, wherein, while both the first vehicle and the second vehicle are moving in the first bridging area, the second vehicle is operable to directly receive the first container from the first vehicle.

[0005] Other embodiments of the present invention provide a system for cargo transfer, the cargo transfer system comprising: a first automated material handling system (AMHS), the first automated material handling system comprising: a first overhead transfer (OHT) track, and a first vehicle movable along the first overhead transfer track, wherein the first vehicle is operable to simultaneously carry a first cargo container and a second cargo container.

[0006] Further embodiments of the present invention provide a method for cross-manufacturing plant transfer, the method comprising: providing a first manufacturing plant building and a second manufacturing plant building connected via a bridging region, wherein the first manufacturing plant building includes a first set of manufacturing tools configured to perform a first plurality of manufacturing processes, and the second manufacturing plant building includes a second set of manufacturing tools configured to perform a second plurality of manufacturing processes; performing one or more of the first plurality of manufacturing processes on a wafer in the first manufacturing plant building; configuring a first vehicle of the first manufacturing plant building to travel along a first overhead transfer (OHT) track and transport the wafer to the bridging region, wherein the first overhead transfer... The first portion of the transfer track is located at the bridging area; the second vehicle of the second manufacturing plant is configured to travel along the second overhead transfer (OHT) track and reach the bridging area, wherein the second portion of the second overhead transfer track is located at the bridging area and is parallel to the first portion of the first overhead transfer track; the first vehicle is configured to transfer the wafer to the second vehicle, provided that the first vehicle and the second vehicle are aligned and travel along the first portion of the first overhead transfer track and the second portion of the second overhead transfer track in the same direction at the same speed; and one or more manufacturing processes of a second plurality of manufacturing processes are performed on the wafer in the second manufacturing plant. Attached Figure Description

[0007] This disclosure is best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with standard industry practice, the various components are not drawn to scale and are for illustrative purposes only. In fact, the dimensions of the various components may be arbitrarily increased or decreased for clarity of discussion.

[0008] Figure 1 A simplified block diagram of a FAB cluster according to one or more embodiments of the present invention is shown.

[0009] Figure 2A and Figure 2B This is a simplified partial schematic diagram illustrating different stages of a cross-fab transfer process in a FAB cluster according to one or more embodiments of the present invention.

[0010] Figure 3 A simplified partial schematic diagram illustrating an optional FAB cluster according to one or more embodiments of the present invention is shown.

[0011] Figure 4 The description illustrates the situation as follows. Figure 3 The flowchart illustrates an exemplary method for implementing cross-fab transfer processes in a FAB cluster.

[0012] Figure 5 A simplified partial schematic diagram illustrating another optional FAB cluster according to one or more embodiments of the present invention is shown.

[0013] Figure 6A An exemplary vehicle according to one or more embodiments of the present invention is depicted.

[0014] Figure 6B A simplified schematic diagram of two vehicles operating in different modes during a cross-fab transfer process is shown, according to one or more embodiments of the present invention.

[0015] Figure 7 A flowchart illustrating an exemplary method for configuring a vehicle to perform operations for a cross-fab transfer process, according to one or more embodiments of the present invention, is depicted.

[0016] Figure 8 A block diagram depicts a vehicle control system according to one or more embodiments of the present invention.

[0017] Figure 9 This is a simplified block diagram of another optional FAB cluster according to an embodiment of the present invention.

[0018] Figure 10 This is a simplified partial schematic diagram of another FAB cluster according to another embodiment of the present invention. Detailed Implementation

[0019] The following disclosure provides numerous different embodiments or instances of various components for implementing the provided subject matter. Specific examples of components and arrangements are described below to simplify this disclosure. Of course, these are merely examples and are not intended to be limiting. For example, in the following description, forming a first component on or over a second component may include embodiments where the first and second components are in direct contact, and may also include embodiments where an additional component may be formed between the first and second components, such that the first and second components are not in direct contact. Furthermore, reference numerals and / or characters may be repeated in various instances of this disclosure. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0020] Furthermore, for ease of description, spatial relative terms such as “below,” “under,” “lower,” “above,” and “upper” may be used to describe the relationship between one element or component and another (or other) element or component as shown in the figure. In addition to the orientation shown in the figure, spatial relative terms are intended to include different orientations of the device during use or operation. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptors used herein can be interpreted accordingly.

[0021] Furthermore, as those skilled in the art will understand, when using terms such as "about," "approximately," etc., to describe numerical values ​​or ranges, the term is intended to encompass values ​​within a reasonable range that takes into account variations inherent during manufacturing. For example, based on known manufacturing tolerances associated with manufacturing a part having characteristics related to that value, a numerical value or range encompasses a reasonable range including the described value, such as within + / - 10% of the described value. For instance, a material layer with a thickness of "about 5 nm" can encompass a size range from 4.25 nm to 5.75 nm, where, as is known to those skilled in the art, manufacturing tolerances associated with the deposited material layer are known to be ±15%.

[0022] A manufacturing plant (FAB) cluster may include multiple FABs built at a site location or industrial park. During the manufacturing process, payloads (e.g., wafers) can be placed in payload containers / carriers (e.g., front-opening wafer transport boxes "FOUP") and can be transferred between FABs for different steps in the manufacturing process. "Cross-fab transfer" covers the transfer of payloads from one FAB to another. Two FABs in a FAB cluster can be connected by bridging areas (e.g., walkways, viaducts). "Cross-AMHS transfer" covers the transfer of payloads from one Automated Material Handling System ("AMHS") to another, whether the AMHS is a standalone system within a single FAB or a system within a standalone FAB. Each FAB may include multiple stages. "Cross-stage transfer" covers the transfer of payloads from one stage to another. Each stage of an FAB includes multiple bays, which may include handling tools or equipment. The equipment within each bay can be interconnected by an intrabay overhead transport ("OHT") system. The processing area can be interconnected with other processing areas via an interbay OHT system. As is familiar to those skilled in the art, the OHT systems within the processing area and the interbay OHT systems include overhead tracks on which OHT vehicles typically transport cargo containers (e.g., FOUPs) containing goods to be processed (e.g., large quantities of wafers) to and from equipment in the processing area via stockers.

[0023] In some technologies, "cross-fab" transfers may include placing interface devices (e.g., storage compartments) at bridging areas and selecting interface devices accessible to both first and second FAB OHT vehicles. This configures vehicles of the first OHT system to transport cargo containers from the first FAB's handling equipment or facilities to the selected interface device used for temporary holding of the cargo containers, and vehicles of the second OHT system to transport cargo containers from the selected interface device to the second FAB's process equipment or facilities. Such "cross-fab" transfers increase throughput and can cause traffic congestion. Furthermore, more cleanroom space is required to accommodate the interface devices for implementing "cross-fab" transfers. Similar problems arise for "cross-AMHS" transfers and "cross-stage transfers."

[0024] This disclosure provides systems and methods for performing cross-fab transfers. The FAB cluster includes multiple FABs having different processing tools configured to perform, for example, different manufacturing steps. In some embodiments, transistors can be formed in a first FAB, and transistor testing can be performed in a second FAB. The OHT tracks of the OHT system of the first FAB are partially parallel to the OHT tracks of the OHT system of the second FAB. The partially parallel portion of the OHT tracks is located at a bridging region between the first and second FABs. After completing the manufacturing steps to be performed in the first FAB, a vehicle of the first FAB can pick up cargo and transfer it to a vehicle of the second FAB without temporarily placing the cargo on an interface device located at the bridging region. Therefore, the cross-fab transfer process is simplified, and the efficiency of the cross-fab transfer process can be advantageously improved. Additionally, less cleanroom space is occupied by the interface device. In some embodiments, the vehicle can be operable to simultaneously carry / hold two cargo containers, thereby further improving transfer efficiency and reducing traffic congestion. This disclosure can also be applied to cross-stage transfers and cross-AMHS transfers.

[0025] Figure 1A simplified block diagram of a FAB cluster 100 is shown. In this embodiment, the FAB cluster 100 includes FAB 102 and FAB 104 connected by a bridging region 106. In some embodiments, FAB 102 and FAB 104 may each include one or more buildings. In one embodiment, FAB 102 includes a first building, and FAB 104 includes a second building spaced apart from the first building, and the bridging region 106 is a bridge connecting the first and second buildings. FAB 102 includes a Manufacturing Execution System (“MES”) 108, a Material Control System (MCS) 110, and an Automated Material Handling System (AMHS) 112. FAB 104 includes MES 114, MCS 116, and AMHS 118. When a cargo container (e.g., a front-opening wafer transfer box (“FOUP”)) is to be transferred, the MES (e.g., MES 108 or MES 114) determines which destination within the FAB (e.g., FAB 102 or FAB 104) should be transferred. Once the destination decision is made, the MES sends a transfer request to the MCS (e.g., MCS 110 or MCS 116), which uses a route search engine to calculate a detailed transfer route and then notifies, for example, AMHS to execute the transfer step by step. It should be understood that MES 108 and MES 114, MCS 110 and MCS 116, and AMHS 112 and AMHS 118 may include multiple components known in the art. For example, but not limited to, each of AMHS 112 and AMHS 118 may include multiple control modules, such as a mask storage bin controller, a storage bin controller, an overhead buffer controller, a processing area OHT controller, an in-processing area OHT controller, and / or an elevator controller. In some embodiments, AMHS 112 and AMHS 118 may include additional, fewer, and different control modules. It should be understood that FAB cluster 100 may have a different number of FABs.

[0026] Bridging area 106 represents the connection between FAB 102 and FAB 104. In some embodiments, bridging area 106 may be, for example, a walkway or viaduct. The length of bridging area 106 may be greater than 10 meters. Bridging area 106 connects FABs to allow cargo containers to be transferred from one FAB to another. Thus, in some embodiments, bridging area 106 is an area where two or more AMHSs can operate together. In this way, cargo containers can be transferred across multiple FABs by transferring control of cargo containers from one FAB to another at bridging area 106. Bridging area 106 can facilitate the transfer of cargo containers from FAB 102 to FAB 104, from FAB 104 to FAB 102, or from FAB 102 to FAB 104 and from FAB 104 to FAB 102. In some embodiments, bridging area 106 can connect two or more FABs to each other. In some other embodiments, bridging region 106 may also represent a connection between two AMHSs. In embodiments, AMHS 112 and AMHS 118 may be from different vendors.

[0027] FAB 102 includes multiple devices 120 (e.g., processing tools, storage bins). The processing tools in FAB 102 can be used to perform multiple manufacturing processes on the wafer (e.g., front-end process (FEOL) processes related to the manufacture of integrated circuit (IC) devices (such as transistors)). The devices 120 in FAB 102 are serviced by AMHS 112. FAB 104 also includes multiple devices 122 (e.g., processing tools, storage bins). The processing tools in FAB 104 can be implemented for multiple manufacturing processes (e.g., back-end process (BEOL) processes related to the manufacture of multilayer interconnect (MLI) structures (whose interconnects are manufactured by FEOL processes) that differ from the manufacturing processes performed in FAB 102. The devices 122 in FAB 104 are serviced by AMHS 118.

[0028] FAB cluster 100 also includes a unified control unit 126. In this embodiment, the unified control unit 126 is configured to communicate with each of FABs 102 and 104 and to facilitate and / or organize the transfer of goods between FABs 102 and 104. In this regard, the unified control unit 126 may act as a server to receive information and / or instructions and provide information and / or instructions to each of FABs 102 through 104. The unified control unit 126 may also act as a communication link between FABs, enabling the MES, MCS, and / or other systems of each FAB to communicate with the systems of another FAB. The unified control unit 126 may include hardware, software, or a combination thereof. In some embodiments, the unified control unit 126 is a separate unit isolated from the MES, MCS, and other systems of each FAB. In other embodiments, the unified control unit 126 may be a component or part of at least one FAB. In at least some embodiments, communication between the unified control unit 126 and FAB 102 through FAB 104 is performed via a Common Object Request Broker Architecture (“CORBA”). Furthermore, communication between components of the unified control unit 126 and between components of FAB 102 and FAB 104 may employ CORBA. However, in other embodiments, other communication protocols and / or middleware may be used. In this embodiment, the unified control unit 126 is configured to synchronize MES 108 and MES 114, MCS 110 and MCS 116, and / or AMHS 112 and AMHS 118 of FAB 102 and FAB 104 to facilitate the transfer of cargo between FAB 102 and FAB 104. In some embodiments, the unified control unit 126 may be configured to facilitate the transfer of empty cargo containers between FAB 102 and FAB 104.

[0029] exist Figure 1In the illustrated embodiment, the unified control unit 126 includes a microprocessor 130 configured to operate to perform cargo transfers or cargo container transfers between different FABs. The microprocessor 130 can receive and transmit data from MCS 110 and MCS 116 of FAB 102 and FAB 104, respectively. Specifically, the microprocessor 130 is configured to communicate with each of MCS 110 and MCS 116 to enable synchronized cross-FAB transfers across different FABs 102 and FAB 104 by sending appropriate signals to the MCS. For example, the microprocessor 130 determines whether a vehicle associated with AMHS 112 in FAB 102 can directly transfer cargo to a vehicle associated with AMHS 118 in FAB 104 without using the interface device at bridging area 106.

[0030] Microprocessor 130 is coupled to data storage 132. Data storage 132 may include program instructions to generate commands for MCSs 110 and 116. For example, data storage 132 may store instructions that, when executed by microprocessor 130, cause microprocessor 130 to perform operations to provide sub-route requests to each MCS. (See reference...) Figures 2A to 2B A detailed description of the operations that can be performed by the microprocessor 130 is provided. The data storage 132 may include non-volatile memory (NVM), one or more databases containing information about the available transfer modes for each FAB, the available transfer modes between FABs, information about the MES and / or AMHS mapping for each FAB, and / or other information related to the transfer of goods.

[0031] A transfer pattern can represent an available route for transferring goods between a first location in a first FAB and a second location in a second FAB. In some embodiments, the transfer pattern is dynamic and can be updated by factors such as static and dynamic traffic conditions, batch information, batch priority, available routes, route distance, maintenance schedules, and / or other factors. In some embodiments, a cross-fab transfer route can be decomposed into sub-routes consisting of transfers within a single FAB and transfers across bridging areas. Multiple sub-routes can be associated together to create a complete transfer route. In some embodiments, the transfer pattern can be based on the available combination of sub-routes to achieve the desired transfer. Microprocessor 130 can be configured to synchronize multiple AMHSs to facilitate the transfer of goods. In some embodiments, to perform a cross-fab transfer, microprocessor 130 can be configured to provide a selected complete transfer route formed by multiple sub-routes, and then microprocessor 130 communicates sub-route requests associated with the respective sub-routes to the corresponding AMHSs for execution. By coordinating AMHSs, cross-fab transfer requests can be executed correctly.

[0032] The MES and AMHS mapping provides static information about available routes within each FAB and AMHS, which is combined to form a global mapping across multiple MES and AMHS. In this regard, the MES and AMHS mapping can include the locations of various tools and equipment that can be used between FABs and AMHSs in route planning and evaluation. While in some embodiments described below, a single route may appear to exist between locations, this is merely for clarity and illustration and should not be considered limiting. Rather, it is entirely conceivable that multiple routes exist for transferring cargo containers from one location to another between AMHSs.

[0033] While FAB cluster 100 is described as a specific combination of components, it should be understood that FAB cluster 100 may have fewer or more components, as will be apparent to those skilled in the art. For example, unified control unit 126 may also include a user interface engine coupled to microprocessor 130. For example, a user may input data through the user interface to select / configure different settings or different parameters. Additionally, the functionality of some of the various components may be combined into a single component, and / or the functionality of a single component may be split into multiple components. In other embodiments, FAB cluster 100 may include additional FABs communicating with unified control unit 126. Cross-fab transfers may be extended to additional FABs in a manner similar to that described above with respect to FABs 102 and 104. (Refer to...) Figures 3 to 5 The description includes a detailed description of the FAB cluster, which includes additional FABs that communicate with the unified control unit 126.

[0034] Figure 2A and Figure 2B This is a simplified partial schematic diagram illustrating different stages of a cross-fab cargo transfer process. In this example, the "cross-fab transfer operation" involves transferring cargo container 202 from FAB 104 to FAB 102. Cargo container 202 may include a front-opening wafer transfer cassette (FOUP), a front-opening shipping cassette (FOSB), a mask container, a tray cassette, a frame cassette, a magazine cassette, or other suitable carrier. Cargo container 202 is operable to carry cargo 204. Cargo 204 may include wafers, photomasks (or photomasks), or other suitable cargo. In this embodiment, cargo container 202 containing cargo 204 is transferred from FAB 104 to FAB 102.

[0035] refer to Figure 2A FAB 102 may include multiple processing zones, and each processing zone includes equipment 120 (e.g., processing tools, storage bins, or other equipment). The equipment 120 within each processing zone of FAB 102 is interconnected via an intra-processing zone overhead transport (“OHT”) system, and the processing zones of FAB 102 may be interconnected via an inter-processing zone OHT system. FAB 104 may include multiple processing zones, and each processing zone includes equipment 122 (e.g., processing tools, storage bins, or other equipment). Similarly, the equipment 122 within each processing zone of FAB 104 is interconnected via another intra-processing zone overhead transport (“OHT”) system, and the processing zones of FAB 104 may be interconnected via another inter-processing zone OHT system. The intra-processing zone OHT system and the inter-processing zone OHT system may be collectively referred to as the OHT system, or individually as the OHT system.

[0036] In this embodiment, AMHS 112's OHT system 206 includes an overhead track or rail (such as overhead track 207), on which a first type of OHT vehicle (such as vehicle 208) transports cargo containers to or from device 120. AMHS 118's OHT system 209 includes an overhead track or rail (such as overhead track 210), on which a second type of OHT vehicle (such as vehicle 212) transports cargo containers to or from device 122. OHT systems 206 and 209 may be provided by different suppliers. Figure 2AIn the illustrated embodiment, the overhead track 207 of the OHT system 206 includes a portion 207a disposed within FAB 102 and a portion (i.e., a combination of portions 207b and 207c) disposed in the bridging region 106. That is, the service area of ​​the OHT system 206 includes both portions of FAB 102 and the bridging region 106. The overhead track 210 of the OHT system 209 includes a portion 210a disposed within FAB 104 and a portion (i.e., a combination of portions 210b and 210c) disposed in the bridging region 106. That is, the service area of ​​the OHT system 209 includes both portions of FAB 104 and the bridging region 106. In this embodiment, portion 207b of the overhead track 207 is adjacent to portion 210b of the overhead track 210. More specifically, portion 207b of the overhead track 207 is adjacent to and parallel to portion 210b of the overhead track 210.

[0037] As described above, FAB cluster 100 includes a unified control unit 126. To transfer cargo 204 from device 122 in FAB 104 to target device 120 in FAB 102, in response to an inter-fab transfer request, microprocessor 130 can select an appropriate route to transfer the cargo container 202 carrying cargo 204 from device 122 to target device 120, and microprocessor 130 transmits sub-routes to MCS 110 and MCS 116 respectively. After receiving a signal (e.g., information related to the sub-routes) from MCS 116, vehicle 212 is configured to retrieve the cargo container 202 containing cargo 204 from device 122 (e.g., a storage bin) in FAB 104 and move the cargo container 202 along overhead track 210 to reach a predetermined location 214 at a predetermined time or within a predetermined duration. In an embodiment, vehicle 212 includes a tray configured to hold the cargo container 202. The predetermined position 214 is located within section 210b of the overhead track 210. After receiving instructions from the MCS 110, the vehicle 208 begins to travel along the overhead track 207 to reach the predetermined position 216 at the same predetermined time or within the same predetermined duration. The predetermined position 216 is located within section 207b of the overhead track 207, and the predetermined position 216 is substantially aligned with the predetermined position 214 along the Y direction.

[0038] Now for reference Figure 2BAfter traveling along the respective elevated tracks for a period of time, vehicle 212 arrives at predetermined position 214 at a predetermined time, and vehicle 208 arrives at predetermined position 216 substantially simultaneously. In this embodiment, to reduce traffic congestion, after arriving at the respective predetermined positions 214 and 216, both vehicle 208 and vehicle 212 continue traveling along their respective tracks. More specifically, after arriving at the respective predetermined positions 214 and 216, vehicle 212 moves along the -X direction on a portion 210b of elevated track 210 at a first speed, and vehicle 208 moves along the -X direction on a portion 207b of elevated track 207 at a second speed. In this embodiment, the first speed is equal to the second speed, such that vehicle 208 and vehicle 212 are relatively stationary. In some embodiments, the speed difference between the first speed and the second speed is less than a predetermined threshold (e.g., 0.1 m / s), such that vehicle 208 and vehicle 212 are considered to be stationary relative to each other. After vehicles 208 and 212 have both reached their respective predetermined positions and are stationary relative to each other, an alignment module on vehicle 212 can determine whether vehicle 208 is aligned with vehicle 212. In some embodiments, the alignment module may include an image sensor, a laser sensor, a tilt sensor, other suitable devices, and / or combinations thereof. After vehicles 208 and 212 are aligned and stationary relative to each other, the cargo container 202 containing cargo 204 is transferred directly from vehicle 212 to vehicle 208. In an exemplary process, a pallet of vehicle 212 may slide out from the body of vehicle 212, and a clamp of vehicle 208 may retrieve the cargo container 202 from the pallet of vehicle 212 and place the cargo container 202 on the pallet of vehicle 208. After the cargo container 202 is transferred directly from vehicle 212 to vehicle 208, vehicle 208 continues to travel along overhead track 207 until the cargo container 202 is transported to the target location in FAB 102. Therefore, it is not necessary to arrange an interface device (e.g., a storage compartment) between OHT system 206 and OHT system 209 to temporarily hold cargo containers (e.g., FOUP) 202. Figure 2A In the case shown), the cross-fab transfer process is completed. This increases the effective area available for placing the processing equipment. Since the cross-fab transfer process is simplified by reducing processes such as temporarily storing the cargo container 202 on the interface device and retrieving the cargo container 202 from the same interface device, traffic congestion caused by these processes can be advantageously reduced.

[0039] Figure 3A simplified partial schematic diagram illustrating a cross-fab transfer process in an optional FAB cluster 300 according to one or more embodiments of the present invention is shown. The block diagram of FAB cluster 300 is similar to that of FAB cluster 100, one difference being that FAB cluster 300 includes more FABs and more bridging areas. For simplicity, devices within each FAB are omitted. Each FAB in FAB cluster 300 can communicate with a unified control unit 126. In this embodiment, as... Figure 3 The depicted FAB cluster 300 includes FAB 302a, FAB 302b, FAB 302c, and FAB 302d. FAB 302a and FAB 302b are connected via bridging area 304a, FAB 302b and FAB 302c are connected via bridging area 304b, FAB 302c and FAB 302d are connected via bridging area 304c, and FAB 302d and FAB 302a are connected via bridging area 304d. Each of FAB 302a to FAB 302d may include a building. For example, each of bridging areas 304a to bridging areas 304d may be a walkway or an overpass. In some embodiments, FAB 302a to FAB 302d and bridging areas 304a to bridging areas 304d have substantially the same cleanroom level. In some other embodiments, FABs 302a to 302d and bridging regions 304a to bridging regions 304d may have different cleanroom levels, and when cargo containers are to be transferred from a FAB with a lower cleanroom level to a FAB with a higher cleanroom level, physical cleaning processes (e.g., by showering with deionized water) can be performed to clean the vehicle and cargo containers. Each of FABs 302a to 302d has its own OHT track 308a, OHT track 308b, OHT track 308c, and OHT track 308d, respectively. In this embodiment, each OHT track has two additional portions in two different bridging regions, in addition to being located within its respective FAB. For example, OHT track 308a has a portion in FAB 302a, a portion in bridging region 304a, and a portion in bridging region 304d.

[0040] FAB 302a to FAB 302d are configured to perform different manufacturing steps. In an embodiment, FAB 302a includes processing tools configured to perform advanced processes. For example, in FAB 302a, front-end process (FEOL) processes and / or mid-end process (MEOL) processes are performed by the processing tools. Front-end process (FEOL) processes typically encompass processes related to the fabrication of integrated circuit (IC) devices, such as transistors (e.g., full-around gate transistors, FinFETs, complementary field-effect transistors (CFETs)). Mid-end process (MEOL) processes typically encompass processes related to the fabrication of contacts for conductive components of the IC device, such as gate vias to the gate structure and / or source / drain contacts to the source / drain components. The processing tools in FAB 302a may include extreme ultraviolet (EUV) lithography systems, chemical vapor deposition (CVD) tools, atomic layer deposition (ALD) tools, and other suitable tools.

[0041] In some embodiments, after some or all of the FEOL and / or MEOL processes are performed in FAB 302a, the processed wafer can be transferred to other FABs (e.g., FAB 302b, FAB 302c, and / or FAB 302d) for further processing. In one embodiment, FAB 302b includes processing tools configured to perform back-end process (BEOL) processes, typically encompassing processes related to the fabrication of multilayer interconnect (MLI) structures that interconnect IC components fabricated by FEOL and MEOL processes, thereby enabling the operation of the IC device. The processing tools in FAB 302b may include chemical vapor deposition (CVD) tools, etching tools, and other suitable tools. In one embodiment, the processing tools in FAB 302b do not include an extreme ultraviolet (EUV) lithography system. For the transfer of IC devices formed in FAB 302a to FAB 302b, FAB 302a and FAB 302b may communicate with the unified control unit 126. The cross-fab transfer between FAB 302a and FAB 302b is similar to the cross-fab transfers described above with respect to FAB 102 and FAB 104. In some embodiments, to ensure sufficient cargo containers are available in FAB 302a, vehicles of FAB 302a can not only transfer cargo containers containing cargo to vehicles of FAB 302b, but also receive unoccupied / empty cargo containers from vehicles of FAB 302b. Cargo containers transferred between FAB 302a and FAB 302b may include FOUP, FOSB, or masked containers. Vehicles in FAB 302a and FAB 302b are configured to be compatible with all these different types of cargo containers.

[0042] In some embodiments, after some or all of the BEOL processes are performed in FAB 302b, the IC device can be transferred from FAB 302b to other FABs (e.g., FAB 302c and / or FAB 302d) for further processing. In embodiments, FAB 302c includes processing tools configured to perform dicing, wafer bonding, wiring, molding, and / or other packaging processes. Wafer dicing processes ensure that manufacturers of integrated circuits (ICs) and other semiconductor devices obtain many individual dies from a single wafer. The processing tools in FAB 302c may include wafer dicers, wire bonding machines, die mounters, molding equipment for sealing integrated circuits, and / or other suitable equipment. In embodiments, the processing tools in FAB 302c do not include chemical vapor deposition (CVD) tools, etching tools, or extreme ultraviolet (EUV) lithography systems. To transfer IC devices formed in FAB 302b to FAB 302c, FAB 302b and FAB 302c can communicate with the unified control unit 126. Cross-fab transfers between FAB 302b and FAB 302c are similar to the cross-fab transfers described above with respect to FAB 102 and FAB 104. In some embodiments, the vehicle of FAB 302b can not only transport cargo containers containing goods to the vehicle of FAB 302c, but also receive unoccupied cargo containers from the vehicle of FAB 302c. Cargo containers transferred between FAB 302b and FAB 302c may include FOUPs, mask containers, pallet boxes, frame boxes, magazine boxes, and / or other suitable cargo containers. The vehicles in FAB 302b and FAB 302c are configured to be compatible with all these different types of cargo containers.

[0043] In some embodiments, after some or all of the packaging processes are performed in FAB 302c, the packaged IC device can be transferred from FAB 302c to FAB 302d for testing to determine whether the packaged IC device is functioning correctly. In embodiments, FAB 302d includes processing tools configured to perform tests on the packaged IC device, such as electrical and functional characteristics and performance, to detect defects. The processing tools in FAB 302d may include automated test equipment (ATE), wafer detectors, probe cards, and / or other suitable testing tools. In embodiments, the process tools in FAB 302d do not include chemical vapor deposition (CVD) tools, etching tools, photolithography systems, wafer dicing machines, wire bonding machines, die mounters, or molding equipment. For the transfer of the packaged IC device formed in FAB 302c to FAB 302d, FAB 302c and FAB 302d may communicate with a unified control unit 126. Cross-fab transfers between FAB 302c and FAB 302d are similar to the cross-fab transfers described above with respect to FAB 102 and FAB 104. In some embodiments, the vehicle of FAB 302c can not only transfer cargo containers containing goods to the vehicle of FAB 302d, but also receive unoccupied cargo containers from the vehicle of FAB 302d. Cargo containers transferred between FAB 302c and FAB 302d may include FOUPs, pallet boxes, or other suitable cargo containers. The vehicles in FAB 302c and FAB 302d are configured to be compatible with all these different types of cargo containers.

[0044] In some other embodiments, after performing some or all of the FEOL and / or MEOL processes in FAB 302a, instead of transferring the processed wafer to FAB 302b, it can be transferred to FAB 302d for testing via vehicles 306g and 306h. In some embodiments, after performing some or all of the BEOL processes in FAB 302b, the processed wafer can be transferred to FAB 302d for testing before packaging. In some embodiments, after performing some processes in FAB 302c, the wafer can also be transferred to FAB 302d for testing, and then the tested wafer can be transferred from FAB 302d to FAB 302c to complete the remaining processes in FAB 302c.

[0045] Figure 4 The description is in Figure 3 A flowchart of an exemplary method 400 for implementing a cross-fab transfer process in a FAB cluster 300. In an embodiment, method 400 includes, at block 402, once the first FAB (e.g., Figure 3 The processes (e.g., FEOL and / or MEOL processes) that should be performed in FAB 302a) and the goods (e.g., wafers) are ready for use in the second FAB (e.g., Figure 3 The subsequent steps performed in FAB 302b involve sending a signal to a unified control unit (e.g., unified control unit 126). In some embodiments, the signal can be sent via FAB 302a. In some embodiments, upon receiving the signal, unified control unit 126 can determine an appropriate route to transfer the goods between the current location of the goods in FAB 302a and the next location of the goods in FAB 302b.

[0046] Method 400 further includes, at block 404, receiving instructions from unified control unit 126 via FAB 302a and FAB 302b respectively to transfer goods from FAB 302a to FAB 302b. The instructions may include a first sub-route and a second sub-route, the first sub-route consisting of a transfer within FAB 302a and a transfer across bridging area 304a and received by the MCS of FAB 302a, and the second sub-route consisting of a transfer within FAB 302b and a transfer across bridging area 304a and received by the MCS of FAB 302b.

[0047] Method 400 further includes, at block 406, configuring a vehicle of FAB 302a (e.g., vehicle 306a) to (e.g., via the MCS of FAB 302a) transport goods from their current location to a bridging area (e.g., bridging area 304a) connecting FAB 302a and FAB 302b, and transferring the goods to a corresponding vehicle of FAB 302b (e.g., vehicle 306b) where appropriate; and at block 408, configuring a corresponding vehicle of FAB 302b (e.g., vehicle 306b) to (e.g., via the MCS of FAB 302b) reach the bridging area (e.g., bridging area 304a) and, where appropriate (e.g., when the two vehicles 306a and 306b are aligned), thus traveling at the same speed in the same direction, and thus traveling on adjacent and parallel portions of the OHT track, as referenced. Figures 2A to 2B (As described) picking up goods from a vehicle (e.g., vehicle 306b) of FAB 302a.

[0048] Method 400 further includes, at block 410, a cargo transfer between vehicle 306a of FAB 302a and vehicle 306b of FAB 302b when certain predetermined conditions are met (e.g., the two vehicles are aligned, thus traveling at the same speed in the same direction, and thus on adjacent and parallel portions of the OHT track). The cargo transfer between the two vehicles is similar to the above description regarding... Figures 2A to 2BThe described cargo transfer. After receiving the cargo, vehicle 306b can transport the cargo and deliver it to a predetermined facility (e.g., a handling tool or storage warehouse). The cargo can then undergo some manufacturing processes in FAB 302b. Further cargo transfer processes within processing zones and / or processing areas can be carried out within FAB 302b.

[0049] Method 400 includes, at block 412, sending a signal to a unified control unit (e.g., unified control unit 126) once the process to be performed in FAB 302b (e.g., the BEOL process) is completed and the goods are ready for subsequent steps to be performed in FAB 302c. In some embodiments, the signal can be sent via FAB 302b. The signal can also be manually requested. In some embodiments, upon receiving the signal, unified control unit 126 can determine an appropriate route to transfer the goods between their current location in FAB 302b and their desired next location in FAB 302c.

[0050] Method 400 further includes, at block 414, FAB 302b and FAB 302c receiving instructions from unified control unit 126 to transfer goods from FAB 302b to FAB 302c. Method 400 further includes, at block 416, configuring a vehicle of FAB 302b (e.g., vehicle 306c) to (e.g., via the MCS of FAB 302b) transport goods from their current location to a bridging area (e.g., bridging area 304b) connecting FAB 302b and FAB 302c, and transferring the goods to a corresponding vehicle of FAB 302c (e.g., vehicle 306d) where appropriate; and at block 418, configuring a corresponding vehicle of FAB 302c (e.g., vehicle 306d) to (e.g., via the MCS of FAB 302c) reach the bridging area (e.g., bridging area 304b), and retrieving goods from a vehicle of FAB 302b (e.g., vehicle 306c) where appropriate (e.g., when the two vehicles 306c and 306d are aligned, thus traveling at the same speed in the same direction, and thus traveling on adjacent and parallel portions of the OHT track, as referenced). Figures 2A to 2B (As described).

[0051] Method 400 also includes, at box 420, performing a cargo transfer between vehicle 306c of FAB 302b and vehicle 306d of FAB 302c. The cargo transfer between the two vehicles is similar to the above description. Figures 2A to 2BThe described cargo transfer. After receiving the cargo, vehicle 306d can transport the cargo and deliver it to a predetermined facility (e.g., a handling tool or storage bin). The cargo can then undergo some manufacturing processes (e.g., cutting, wire bonding) in FAB 302c. Further cargo transfer processes within processing zones and / or processing areas can be carried out within FAB 302c.

[0052] Method 400 includes, at block 422, sending a signal to a unified control unit (e.g., unified control unit 126) once the process to be performed in FAB 302c is completed and the goods are ready for subsequent steps to be performed in FAB 302d. In some embodiments, the signal can be sent via FAB 302c. The signal can also be manually requested. In some embodiments, upon receiving the signal, unified control unit 126 can determine an appropriate route to transfer the goods between their current location in FAB 302c and their desired next location in FAB 302d.

[0053] Method 400 further includes, at block 424, FAB 302c and FAB 302d receiving instructions from unified control unit 126 to transfer goods from FAB 302c to FAB 302d. Method 400 further includes, at block 426, configuring a vehicle of FAB 302c (e.g., vehicle 306e) to (e.g., via the MCS of FAB 302c) transport goods from their current location to a bridging area (e.g., bridging area 304c) connecting FAB 302c and FAB 302d, and transferring the goods to a corresponding vehicle of FAB 302d (e.g., vehicle 306f) where appropriate; and at block 428, configuring a corresponding vehicle of FAB 302d (e.g., vehicle 306f) to (e.g., via the MCS of FAB 302d) reach the bridging area (e.g., bridging area 304c), and retrieving goods from a vehicle of FAB 302c (e.g., vehicle 306e) where appropriate (e.g., when the two vehicles 306e and 306f are aligned, thus traveling at the same speed in the same direction, and thus traveling on adjacent and parallel portions of the OHT track, as referenced). Figures 2A to 2B (As described).

[0054] Method 400 also includes, at box 430, performing a cargo transfer between vehicle 306e of FAB 302c and vehicle 306f of FAB 302d. The cargo transfer between the two vehicles is similar to the above description. Figures 2A to 2BThe described cargo transfer. After receiving cargo, vehicle 306f can transport the cargo and deliver it to a predetermined facility (e.g., a processing tool or storage warehouse). The cargo may undergo some manufacturing processes in FAB 302d. Further cargo transfer processes within processing zones and / or processing zones may be performed within FAB 302d. In the above embodiments, cargo (e.g., wafers) transfers are performed sequentially between FAB 302a and FAB 302b, between FAB 302b and FAB 302c, and between FAB 302c and FAB 302d. In some alternative embodiments, multiple cross-fab transfers may be performed simultaneously between those FABs, and various types of cargo may be transferred. In some other alternative embodiments, cargo may be transferred directly between FAB 302a and FAB 302d. Similar operations can be performed, and related descriptions are omitted for simplicity.

[0055] Figure 5 A simplified partial schematic diagram of an optional FAB cluster 300' is shown. FAB cluster 300' is similar to FAB cluster 300. One difference between FAB cluster 300' and FAB cluster 300 is the different arrangement of FABs 302a to 302d within FAB cluster 300'. More specifically, FABs 302a to 302d within FAB cluster 300' are connected by bridging region 304. Each OHT system of FABs 302a to 302d includes a portion of its OHT track located within bridging region 304. Two adjacent portions of the OHT track are at least partially parallel to ensure the above references. Figures 2A to 2B The cross-fab transfers are described. For simplicity, repeated descriptions have been omitted.

[0056] Reference Figures 1 to 5 In the embodiments described above, cross-fab transfers can be performed without placing goods on interface devices (e.g., storage bins), thereby improving transfer efficiency and reducing traffic congestion. Figures 6A to 6B In some other embodiments illustrated, vehicles used in FAB's OHT system are capable of transporting more than one cargo container to improve transport efficiency and reduce traffic congestion. According to one or more embodiments of the invention, Figure 6A Depicting along Figure 3 The cross-sectional view of an exemplary vehicle is shown by line A-A'. Figure 6B Depicting along Figure 3 The diagram shows a cross-sectional view of an exemplary vehicle taken along line B-B'. (Reference) Figure 6AVehicle 306a is connected to track 308a of the OHT system of FAB 302a so that vehicle 306a can be operable to move along track 308a. Vehicle 306a includes a housing (or body) 610 and at least one (e.g., one, two or more) upper clamps 620a and at least one (e.g., one, two or more) lower clamps 620b, which are configured to extend from housing 610 to grip one or more cargo containers from a handling tool, interface device, another vehicle (such as vehicle 306b) and / or other means. The upper clamps 620a and lower clamps 620b may be mechanically coupled to an outer surface or an inner surface of housing 610. In this example, when vehicle 306a is configured to retrieve a cargo container from the interface device, the upper clamp 620a or the lower clamp 620b may extend laterally (e.g., along the Y direction) and then vertically (along the -Z direction) to grip the cargo container. The upper clamp 620a and the lower clamp 620b may perform their respective functions independently. For example, in some embodiments, only one clamp of the upper clamp 620a and the lower clamp 620b is configured to operate to retrieve the cargo container.

[0057] Vehicle 306a also includes a first pallet 630a and a second pallet 630b, the first pallet 630a being configured to hold or carry a cargo container gripped by an upper clamp 620a, and the second pallet 630b being configured to hold or carry a cargo container gripped by a lower clamp 620b. For example, after the upper clamp 620a retrieves a mask container from equipment in FAB 302a, the upper clamp 620a can place the mask container on the first pallet 630a. During a cross-fab transfer process, the first pallet 630a may be operable to slide out from the body 610 of vehicle 306a to facilitate the transfer process. Similarly, after the lower clamp 620b retrieves a FOUP from equipment in FAB 302a, the lower clamp 620b can place the FOUP on the second pallet 630b. The second pallet 630b may be operable to slide out from the body 610 of vehicle 306a during a cross-fab transfer process. In some embodiments, to prevent cargo carriers from falling off the pallet (e.g., first pallet 630a, second pallet 630b), the pallet may be configured to have an anti-skid mechanism. In an embodiment, a damper may be installed on the top surface of the pallet.

[0058] The first pallet 630a forms an upper cavity with the sidewalls and top surface of the housing 610. The second pallet 630b, the sidewall surface of the housing 610, and the bottom surface of the first pallet 630a form a lower cavity. In some embodiments, the volume of the upper cavity is smaller than the volume of the lower cavity, and the first pallet 630a and the second pallet 630b are configured to hold cargo containers with different volumes. For example, the first pallet 630a may hold a cargo container 640a (e.g., a pallet box or mask container) with a volume smaller than that of a cargo container 640b (e.g., a FOUP or FOSB) held by the second pallet 630b. By providing vehicles capable of carrying more than one cargo container, more cargo containers can be transferred, and / or fewer vehicles are needed, thereby improving transport efficiency and reducing traffic congestion. Furthermore, instead of using storage compartments to temporarily hold cargo containers, temporarily storing cargo containers on one pallet of a vehicle can reduce the time spent unloading cargo containers. Advantageously, less cleanroom space is required to accommodate interface devices (e.g., storage compartments) for cross-fab transfers.

[0059] Figure 6BA simplified schematic diagram of vehicles 306a and 306b during a cross-fab transfer process is shown. Vehicles 306a to 306h and vehicles 208 to 210 have substantially the same structure, and for simplicity, repetitive descriptions related to the structure of vehicle 306b are omitted. In this illustrated example, the first pallet 630a of vehicle 306a holds cargo container 640a, and the second pallet 630b of vehicle 306a holds cargo container 640b. After vehicles 306a and 306b are ready for cargo transfer, the upper clamp 620a' and lower clamp 620b' of vehicle 306b extend from the body of vehicle 306b and then extend laterally and / or vertically. The first pallet 630a and the second pallet 630b of vehicle 306a can slide out from the body 610 of vehicle 306a. Then, the upper clamp 620a' and lower clamp 620b' of vehicle 306b can extend downward to retrieve and lift cargo containers 640a and 640b respectively from the first pallet 630a and the second pallet 630b of vehicle 306a, and place cargo containers 640a and 640b respectively on the first pallet 630a' and the second pallet 630b' of vehicle 306b. In some other embodiments, cargo container 640a can be transferred from vehicle 306a to vehicle 306b, and cargo container 640b can be transferred from vehicle 306a to another vehicle. That is, the destinations of cargo containers 640a and 640b can be the same or different. In some other embodiments, vehicle 306a can hold cargo containers containing goods, and vehicle 306b can hold empty cargo containers. After vehicles 306a and 306b are aligned and ready for transfer, vehicle 306a can acquire an empty cargo container from vehicle 306b, and vehicle 306b can receive an occupied cargo container from vehicle 306a. In some other embodiments, a vehicle may contain two empty cargo containers. Vehicles capable of carrying two cargo containers can be used in FABs 102 to 104 and / or FABs 302a to 302d for cross-fab transfers, cross-stage transfers within the same FAB, and / or cross AMHS transfers.

[0060] According to one or more embodiments of the present invention, Figure 7A flowchart illustrating an exemplary method 700 for a cross-FAB transfer process using vehicles 306a and 306b is depicted. Method 700 includes, at block 702, receiving instructions from a vehicle (e.g., vehicle 306a) to acquire a first cargo container (e.g., cargo container 640a) in a first FAB (e.g., FAB 302a), transferring cargo container 640a to another FAB (e.g., FAB 302b) using a vehicle (e.g., vehicle 306b), and receiving a second cargo container from vehicle 306b. Method 700 includes, at block 704, traveling along track 308a of FAB 302a until reaching the current position of cargo container 640a. Cargo container 640a may carry cargo, such as wafers or photomasks. Method 700 includes, at frame 706, gripping a cargo container 640a using a clamp (e.g., upper clamp 620a) of vehicle 306a and placing it onto a corresponding pallet (e.g., first pallet 630a). Method 700 also includes, at frame 708, traveling along track 308a of FAB 302a and arriving at a predetermined position in a bridging region (e.g., bridging region 304a) between the two FABs at a predetermined time.

[0061] Method 700 further includes, at block 710, receiving instructions via a vehicle (e.g., vehicle 306b) to retrieve a second cargo container (not shown) from a second FAB (e.g., FAB 302b), to transfer the second cargo container to a vehicle (e.g., vehicle 306a) in a first FAB (e.g., FAB 302a), and to receive a first cargo container (e.g., cargo container 640a) from vehicle 306a. Method 700 includes, at block 712, traveling along track 308b of FAB 302b until reaching the current position of the second cargo container. The second cargo container in FAB 302b to be transferred to FAB 302a may be an empty cargo container without any cargo. Method 700 includes, at block 714, gripping the empty cargo container via a clamp (e.g., lower clamp 620b) of vehicle 306b and placing it on a corresponding pallet (e.g., second pallet 630b). Method 700 includes, at block 716, traveling along track 308b of FAB 302b and arriving at a corresponding predetermined position in bridging region 304a at a predetermined time. Method 700 includes, at block 718, vehicles 306a and 306b can then begin an alignment process and determine whether vehicles 306a and 306b are ready for transfer (e.g., whether the first vehicle 306a and the second vehicle 306b are aligned and moving in the same direction at the same speed). If not ready, vehicles 306a and 306b can configure their respective speeds or perform other operations until they are ready for transfer. If ready, method 700 moves to block 720, where an empty cargo container is transferred from vehicle 306b to vehicle 306a, and a cargo container 640a is transferred from vehicle 306a to vehicle 306b. These two transfers can be performed simultaneously. It should be understood that vehicles 306a and 306b can perform fewer or more operations, as will be apparent to those skilled in the art.

[0062] According to one embodiment of the present invention, Figure 8A block diagram of the control system for vehicle 306a is depicted. In this embodiment, vehicle 306a includes a processing unit 810 configured to perform operations to execute cross-fab transfers. For example, processing unit 810 may determine the operation of clamps 620a and 620b, and the operation of trays 630a and 630b. Processing unit 810 is coupled to data storage (e.g., non-volatile memory (NVM)) 820. Data storage 820 may store instructions that, when executed by processing unit 810, cause processing unit 810 to perform operations to control, for example, the movement and speed of the vehicle, the operation of the clamps, and the movement of the trays. Data storage 820 may also include a lookup table (LUT) to store one or more parameters / operations associated with one or more predetermined criteria. Predetermined criteria may include criteria corresponding to, for example, monitored or detected state parameters. Vehicle 306a also includes a network interface 830 coupled to processing unit 810 to provide interconnection between the MCS of vehicle 306a and FAB 302a. The processing unit 810 can transmit information such as vehicle location and pallet availability status to the MCS via the network interface 830. The processing unit 810 can also receive signals such as sub-route requests via the network interface 830.

[0063] Vehicle 306a also includes a position sensor 840 operatively connected to processing unit 810. During operation, position sensor 840 can provide processing unit 810 with position information of vehicle 306a. Based on the position information, processing unit 810 can perform different operations. Vehicle 306a also includes an alignment module 850 coupled to processing unit 810 to determine whether vehicle 306a is aligned with a predetermined target (e.g., vehicle 306b). In some embodiments, alignment module 850 may include an image sensor, a laser sensor, a tilt sensor, other suitable means, and / or combinations thereof. In some embodiments, vehicle 306a may also include a contact detector 860 configured to determine whether the vehicle's gripper is in full contact with the cargo carrier. It should be understood that vehicle 306a may have fewer or more components, as will be apparent to those skilled in the art. For example, vehicle 306a may include a display that can be configured to display barcodes, images, QR codes, or other suitable information so that other vehicles can use the alignment module to detect or scan the information displayed on the display (“alignment marks”) to determine alignment between the two vehicles.

[0064] Reference Figures 1 to 8In the embodiments described above, the operations performed by the vehicle in the FAB are controlled by the FAB's MCS, regardless of whether the vehicle is traveling along the tracks in the FAB or in the bridging area. In some other embodiments, once the vehicle enters the bridging area, another MCS can take over the control of the operations to be performed by the vehicle.

[0065] Figure 9 A simplified block diagram of a FAB cluster 900 according to an embodiment of the present invention is shown. FAB cluster 900 is similar to FAB cluster 100. One difference between FAB cluster 900 and FAB cluster 100 is that the bridging region 106 of FAB cluster 900 includes MCS 113. An exemplary process for cross-fab transfer in FAB cluster 900 includes, via vehicle 212 ( Figure 2A As shown, the vehicle 212 receives an instruction to retrieve cargo container 202 from the device in FAB 104, and as the vehicle 212 moves along section 210b, the vehicle 212 transfers cargo container 202 to vehicle 208. In some embodiments, the instruction may include one of a sub-route request received from microprocessor 130. After receiving the instruction, the vehicle 212 is configured to move along track 210 of OHT system 209 to a position close to the device holding cargo container 202. The vehicle 212 is then configured to grab cargo container 202 from the device and transport cargo container 202. After retrieving cargo container 202, the vehicle 212 is configured to move along track 210 and reach a predetermined position 214. In some embodiments, one or more sensors may be installed near the boundary of FAB 104 to detect the entry / exit of vehicle 212. Once the sensor detects the departure of vehicle 212, a signal can be sent to MCS 116 of FAB 104 and MCS 113 of bridging area 106, and then MCS 113 of bridging area 106 can have control over vehicle 212. Similarly, once the sensor detects the departure of vehicle 208 of FAB 102, then MCS 113 of bridging area 106 can have control over vehicle 208. MCS 113 of bridging area 106 can instruct vehicles 212 and 208 to perform operations to carry out cargo transfer at bridging area 106.

[0066] Figure 10 This is a simplified partial 3D view of a FAB cluster 1000. In some semiconductor FAB clusters, each FAB can have a building configured to contain different devices, and different FABs can have different heights. That is, the height of the OHT track of the first FAB can be different from the height of the OHT track of the second FAB. For the above reference... Figures 1 to 9 The described method enables cross-fab transmission and can improve the configuration of the OHT tracks of the first and second FABs. Figure 10 An example of an improved OHT orbital is depicted to facilitate efficient cross-fab transfers. For example... Figure 10 As depicted, a first FAB 1100 has an OHT track 1300 in both the first FAB 1100 and the bridging region 1150, and a second FAB 1200 has an OHT track 1400 in both the second FAB 1200 and the bridging region 1150. The height H1 of a portion of the OHT track 1300 in the first FAB 1100 differs from the height H2 of a portion of the OHT track 1400 in the second FAB 1200. To enable efficient cross-fab transmission in the bridging region 1150, each of the OHT track 1300 and the OHT track 1400 is configured such that at least a portion of the OHT track 1300 and a portion of the OHT track 1400 are parallel in the bridging region 1150 and have the same height. In this embodiment, the OHT track 1300 of the first FAB 1100 has three parts: a first part 1300a, a second part 1300b, and a third part 1300c. The first part 1300a has a height H1 in the first FAB 1100, the second part 1300b has an inclined track in the bridging region 1150 and therefore has an uneven height, and the third part 1300c is located in the bridging region 1150 and has a height H3 that is less than the height H1. Similarly, the OHT track 1400 of the second FAB 1200 has three sections: a first section 1400a, a second section 1400b, and a third section 1400c. The first section 1400a has a height H2 in the second FAB 1200. The second section 1400b has an inclined track in the bridging area 1150 and therefore has an uneven height. The third section 1400c is located in the bridging area 1150 and has a height H3 greater than the height H2. To ensure that the cargo carrier held by the vehicle can remain stable along the second section 1300b and the second section 1400b, the angle difference between angle A1 of the first segment 1300b1 of the second section 1300b and angle A2 of the second segment 1300b2 (adjacent to the first segment 1300b1 of the second section 1300b) is less than 10° per meter. If the angle difference is greater than 10°, the cargo carrier may fall off the vehicle. If the angle difference is less than 10°, the bridging area may not be able to include a long OHT track. This also applies to the second section 1400b of the OHT track 1400 of the second FAB 1200. By configuring the heights of the OHT tracks 1300 and 1400, vehicles from both FABs can be aligned while traveling along the third sections 1300c and 1400c of the OHT tracks, and cross-fab transport can be efficiently implemented using the methods described above.

[0067] While not intended to be limiting, one or more embodiments of the present invention provide numerous benefits for cross-fab transfers. For example, this disclosure provides a method for performing cross-fab transfers without temporarily placing cargo carriers on storage bins or other interface devices. This simplifies cross-fab transfers. Additionally, manufacturing facilities do not need to have interface devices located in bridging areas. Similarly, traffic congestion caused by temporarily placing wafer carriers on interface devices and then retrieving them from those devices can be reduced. In some embodiments, FAB vehicles may be operable to contain one or more (e.g., two) cargo containers to further improve transfer efficiency and reduce traffic congestion. One or more embodiments of the present invention can also be applied to cross-stage transfers and cross-AMHS transfers.

[0068] This disclosure provides numerous different embodiments. Semiconductor systems and the like are disclosed herein. In one exemplary aspect, this disclosure relates to a system. The system includes a first manufacturing plant (FAB) building comprising a first set of manufacturing tools, a first overhead transfer (OHT) track serving the first set of manufacturing tools, and a first vehicle operable to carry a first container and move along the first OHT track. The system also includes a second FAB building comprising a second set of manufacturing tools, a second OHT track serving the second set of manufacturing tools, and a second vehicle operable to carry the first container and move along the second OHT track. The system further includes a first bridging region located between the first FAB building and the second FAB building, wherein the first OHT track includes a first portion located in the first FAB building and a second portion located in the first bridging region, the second OHT track includes a first portion located in the second FAB building and a second portion located in the first bridging region, the second portion of the second OHT track being at least partially parallel to the second portion of the first OHT track, and the second vehicle operable to directly receive the first container from the first vehicle while both the first vehicle and the second vehicle are moving in the first bridging region.

[0069] In some embodiments, a first set of manufacturing tools may be configured to perform front-end process (FEOL) processes, and a second set of manufacturing tools may be configured to perform back-end process (BEOL) processes. In some embodiments, a first container may be configured to contain a wafer or a mask. In some embodiments, the first container may include a front-open wafer transport box (FOUP), a front-open shipping box (FOSB), or a mask container. In some embodiments, the system may further include a main control system configured to organize cargo transfer between a first FAB building and a second FAB building, the first FAB building further including a first control system configured to communicate directly with a first vehicle and a main control system, and the second FAB building further including a second control system configured to communicate directly with a second vehicle and a main control system. In some embodiments, the system may further include a third control system, wherein a first control system may be configured to control operations performed by the first vehicle when the first vehicle moves along a first portion of a first OHT track, a second control system may be configured to control operations performed by the second vehicle when the second vehicle moves along a first portion of a second OHT track, and a third control system may be configured to control operations performed by the first vehicle when the first vehicle moves along a second portion of the first OHT track, and to control operations performed by the second vehicle when the second vehicle moves along a second portion of the second OHT track. In some embodiments, the first vehicle may be operable to carry two containers simultaneously. In some embodiments, while both the first vehicle and the second vehicle are moving in a first bridging region, the first vehicle may also be operable to directly receive another container from the second vehicle. In some embodiments, the system may further include a third FAB building, which includes a third set of manufacturing tools, a third OHT track serving the third set of manufacturing tools, and a third vehicle operable to carry the first container and move along the third OHT track. The system may further include a second bridging region located between the second and third FAB buildings, wherein the second OHT track also includes a third portion located within the second bridging region. The third OHT track may include a first portion located in the third FAB building and a second portion located in the second bridging region. The third portion of the second OHT track is parallel to the second portion of the third OHT track, and the third vehicle may be operable to directly receive the first container from a vehicle in the second FAB building. In some embodiments, a third set of manufacturing tools may be configured to perform processes including cutting, wiring, or molding. In some embodiments, the vehicle in the third FAB building may be operable to transfer unoccupied containers to the second FAB building. In some embodiments, the height of the first portion of the first OHT track in the first FAB building may differ from the height of the first portion of the second OHT track in the second FAB building.

[0070] In another exemplary aspect, this disclosure relates to a system. The system includes a first automated material handling system (AMHS) comprising a first overhead transfer (OHT) track and a first vehicle movable along the first OHT track, wherein the first vehicle is operable to simultaneously carry a first cargo container and a second cargo container.

[0071] In some embodiments, the first cargo container may include a pallet box or a mask container. In some embodiments, the second cargo container may include a front-opening wafer transfer box (FOUP) or a front-opening shipping box (FOSB). In some embodiments, the system may further include a second AMHS, which includes a second OHT track and a second vehicle, the second vehicle being movable along the second OHT track and operable to simultaneously carry two cargo containers, wherein the first OHT track includes a first portion parallel to and adjacent to a second portion of the second OHT track, and the first vehicle is operable to transfer at least one of the first cargo container and the second cargo container to the second vehicle, provided that the first vehicle is within the first portion of the first OHT track and the second vehicle is within the second portion of the second OHT track. In some embodiments, the first vehicle may include a first clamp configured to grip the first cargo container, a first container holder configured to hold the first cargo container, a second clamp configured to grip the second cargo container, and a second container holder configured to hold the second cargo container, wherein the second container holder is disposed below the first container holder.

[0072] In another exemplary aspect, this disclosure relates to a method. The method includes providing a first FAB building and a second FAB building connected via a bridging region, wherein the first FAB building includes a first set of manufacturing tools configured to perform a first plurality of manufacturing processes, and the second FAB building includes a second set of manufacturing tools configured to perform a second plurality of manufacturing processes; performing one or more of the first plurality of manufacturing processes on a wafer in the first FAB building; configuring a first vehicle of the first FAB building to travel along a first overhead transfer (OHT) track and transport the wafer to the bridging region, wherein a first portion of the first OHT track is located at the bridging region; configuring a second vehicle of the second FAB building to travel along a second overhead transfer (OHT) track and reach the bridging region, wherein a second portion of the second OHT track is located at the bridging region and parallel to the first portion of the first OHT track; configuring the first vehicle to transfer the wafer to the second vehicle, provided that the first vehicle and the second vehicle are aligned and travel along the first portion of the first OHT track and the second portion of the second OHT track in the same direction at the same speed; and performing one or more of the second plurality of manufacturing processes on the wafer in the second FAB building.

[0073] In some embodiments, the first plurality of manufacturing processes may include a front-end process (FEOL) configured to form isolation components, gate structures, and source / drain components, and the second plurality of manufacturing processes may include a back-end process (BEOL) configured to form a multilayer interconnect (MLI) structure interconnecting integrated circuit components manufactured by the FEOL process. In some embodiments, the method may further include, under the condition that a first vehicle and a second vehicle are aligned and traveling in the same direction at the same speed along a first portion of a first OHT track and a second portion of a second OHT track, respectively, the second vehicle is configured to transfer a cargo container to the first vehicle.

[0074] The foregoing outlines the features of the embodiments to enable those skilled in the art to better understand aspects of this disclosure. Those skilled in the art should understand that they can readily use this disclosure as a basis to design or modify other processes and structures for implementing the same purposes and / or achieving the same advantages as the embodiments described herein. Those skilled in the art should also recognize that such equivalent constructions do not depart from the spirit and scope of this disclosure, and that various changes, substitutions, and alterations can be made therein without departing from the spirit and scope of this disclosure.

Claims

1. A system for transfer across manufacturing plants, comprising: The first manufacturing plant building, comprising: The first set of manufacturing tools is configured to perform the first plurality of manufacturing processes. The first overhead transfer track serves the first set of manufacturing tools, and The first vehicle is operable to carry the first container and move along the first overhead transfer track. The second manufacturing plant building includes: The second set of manufacturing tools is configured to perform a second set of manufacturing processes. The second overhead transfer track serves the second set of manufacturing tools, and A second vehicle, operable to carry the first container and move along the second overhead transfer track; and A first bridging area is located between the first manufacturing plant building and the second manufacturing plant building. The first overhead transfer track includes a first portion located in the first manufacturing plant building and a second portion located in the first bridging area. The second overhead transfer track also includes a first portion located in the second manufacturing plant building and a second portion located in the first bridging area. The second portion of the second overhead transfer track is at least partially parallel to the second portion of the first overhead transfer track. Wherein, when both the first vehicle and the second vehicle are moving in the first bridging area, and provided that the first vehicle and the second vehicle are aligned and traveling in the same direction at the same speed along the first portion of the first overhead transfer track and the second portion of the second overhead transfer track respectively, the second vehicle is operable to directly receive the first container from the first vehicle.

2. The system according to claim 1, wherein, The first set of manufacturing tools is configured to perform front-end manufacturing processes, and the second set of manufacturing tools is configured to perform back-end manufacturing processes.

3. The system according to claim 1, wherein, The first container is configured to contain a wafer or a mask.

4. The system according to claim 1, wherein, The first container includes a front-opening wafer transfer box, a front-opening shipping box, or a photomask container.

5. The system according to claim 1, further comprising: The main control system is configured to organize the transfer of goods between the first manufacturing plant building and the second manufacturing plant building. The first manufacturing plant building further includes a first control system configured to communicate directly with the first vehicle and the main control system, and the second manufacturing plant building further includes a second control system configured to communicate directly with the second vehicle and the main control system.

6. The system according to claim 5, further comprising: Third control system The first control system is configured to control the operations performed by the first vehicle when the first vehicle moves along the first portion of the first overhead transfer track; the second control system is configured to control the operations performed by the second vehicle when the second vehicle moves along the first portion of the second overhead transfer track; and the third control system is configured to control the operations performed by the first vehicle when the first vehicle moves along the second portion of the first overhead transfer track, and to control the operations performed by the second vehicle when the second vehicle moves along the second portion of the second overhead transfer track.

7. The system according to claim 1, wherein, The first vehicle is operable to carry two containers simultaneously.

8. The system according to claim 1, wherein, While both the first vehicle and the second vehicle are moving within the first bridging area, the first vehicle can also be operated to directly receive another container from the second vehicle.

9. The system according to claim 1, further comprising: The third manufacturing plant building, said third manufacturing plant building includes: The third set of manufacturing tools, The third overhead transfer track serves the third set of manufacturing tools, and A third vehicle, operable to carry the first container and move along the third overhead transfer track; and A second bridging area is located between the second manufacturing plant building and the third manufacturing plant building. The second overhead transfer track further includes a third portion located within the second bridging area. The third overhead transfer track includes a first portion located in the third manufacturing plant building and a second portion located within the second bridging area. The third portion of the second overhead transfer track is parallel to the second portion of the third overhead transfer track. The third vehicle is operable to receive the first container directly from a vehicle in the second manufacturing plant building.

10. The system according to claim 9, wherein, The third set of manufacturing tools is configured to perform processes including cutting, wiring, or molding.

11. The system according to claim 9, wherein, Vehicles in the third manufacturing building are operable to transfer unoccupied containers to vehicles in the second manufacturing building.

12. The system according to claim 1, wherein, The height of the first portion of the first overhead transfer track in the first manufacturing plant building is different from the height of the first portion of the second overhead transfer track in the second manufacturing plant building.

13. A system for transferring goods, comprising: A first automated material handling system, comprising: The first aerial transfer orbit, and A first vehicle is movable along the first overhead transfer track, wherein the first vehicle is operable to simultaneously carry a first cargo container and a second cargo container. A second automated material handling system, comprising: The second aerial transfer orbit, and The second vehicle can move along the second overhead transfer track. The first overhead transfer track includes a first portion that is parallel to and adjacent to the second portion of the second overhead transfer track. Wherein, provided that the first vehicle and the second vehicle are aligned and traveling in the same direction at the same speed along the first portion of the first overhead transfer track and the second portion of the second overhead transfer track respectively, the second vehicle is operable to directly receive the first cargo container from the first vehicle.

14. The system according to claim 13, wherein, The first cargo container includes a pallet box or a mask container.

15. The system according to claim 13, wherein, The second cargo container includes a front-opening wafer transfer box or a front-opening shipping box.

16. The system according to claim 13, wherein, The second vehicle is operable to carry two cargo containers simultaneously. Wherein, with the first vehicle within the first portion of the first overhead transfer track and the second vehicle within the second portion of the second overhead transfer track, the first vehicle is operable to transfer at least one of the first cargo container and the second cargo container to the second vehicle.

17. The system according to claim 13, wherein, The first vehicle includes: The first clamp is configured to grip the first cargo container; A first container holder is configured to hold the first cargo container; A second clamp is configured to grip the second cargo container; and A second container holder is configured to hold the second cargo container, wherein the second container holder is disposed below the first container holder.

18. A method for transferring goods across manufacturing plants, comprising: A first manufacturing plant building and a second manufacturing plant building are provided, connected via a bridging area, wherein the first manufacturing plant building includes a first set of manufacturing tools configured to perform a first plurality of manufacturing processes, and the second manufacturing plant building includes a second set of manufacturing tools configured to perform a second plurality of manufacturing processes; One or more of the first plurality of manufacturing processes are performed on the wafer in the first manufacturing plant building; A first vehicle in the first manufacturing plant building is configured to travel along a first overhead transfer track and transport the wafer to the bridging area, wherein a first portion of the first overhead transfer track is located in the bridging area; The second vehicle of the second manufacturing plant building is configured to travel along the second overhead transfer track and reach the bridging area, wherein the second portion of the second overhead transfer track is located at the bridging area and is parallel to the first portion of the first overhead transfer track; Under the condition that the first vehicle and the second vehicle are aligned and traveling in the same direction at the same speed along the first portion of the first overhead transfer track and the second portion of the second overhead transfer track, respectively, the first vehicle is configured to transfer the wafer to the second vehicle; and One or more of the second plurality of manufacturing processes are performed on the wafer in the second manufacturing plant building.

19. The method according to claim 18, wherein, The first plurality of manufacturing processes include a front-end process configured to form isolation components, gate structures, and source / drain components, and the second plurality of manufacturing processes include a back-end process configured to form a multilayer interconnect structure interconnecting integrated circuit components manufactured by the front-end process.

20. The method of claim 18, further comprising: The second vehicle is also configured to transfer cargo containers to the first vehicle, provided that the first vehicle and the second vehicle are aligned and traveling in the same direction at the same speed along the first portion of the first overhead transfer track and the second portion of the second overhead transfer track, respectively.

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