一种阻尼结构及具有其的分子泵
By setting a rubber ring and elastic ball bearing between the bearing sleeve and the damping ring of the molecular pump, the problem of insufficient thermal conductivity of the damping structure is solved, achieving effective vibration reduction, noise reduction and thermal conductivity, and improving the operating efficiency and life of the molecular pump.
CN117006105BActive Publication Date: 2026-07-17北京中科九微科技有限公司
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 北京中科九微科技有限公司
- Filing Date
- 2023-08-22
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
The existing molecular pump damping structure has insufficient thermal conductivity, which causes heat to accumulate and not be dissipated in time, affecting the service life of the bearing.
Method used
A rubber ring is installed between the bearing sleeve and the damping ring, and elastic ball bearings are installed inside the rubber ring. The viscoelastic properties of rubber are used to reduce vibration and noise. At the same time, the elastic ball bearings form a heat-conducting bridge to transfer and dissipate heat in a timely manner.
Benefits of technology
It significantly improves the thermal conductivity of the damping structure, reduces mechanical vibration and noise, and improves work efficiency and product quality.
✦ Generated by Eureka AI based on patent content.
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Figure CN117006105B_ABST
Abstract
本发明涉及分子泵技术领域，具体涉及一种阻尼结构及具有其的分子泵。所述阻尼结构包括：轴承套；减振环，与所述轴承套沿径向间隔设置；橡胶环，设置于所述轴承套的外侧周壁与所述减振环的内侧周壁之间，所述橡胶环适于将所述轴承套与所述减振环柔性连接和 / 或弹性连接；弹性撞珠，由导热材质制成，所述弹性撞珠沿径向设置于所述橡胶环内，所述弹性撞珠沿其自身轴向的一端与所述减振环的内侧周壁相抵接，另一端与所述轴承套的外侧周壁弹性抵接。本发明提供的阻尼结构，既能够减震和降噪，又能够及时进行导热散热。
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