Optical lens heat dissipation device

Abstract

This invention belongs to the field of optical technology and discloses an optical lens heat dissipation device, comprising: a base, the base being annular, the bottom of the base for arranging the optical lens; a baffle, disposed on the upper surface of the base and forming a semi-enclosed heat dissipation area between the base and the optical lens; and an air supply unit, disposed within the baffle and used to output gas to the heat dissipation area, which is inclined towards the surface of the optical lens and diffuses in an umbrella-like manner. The optical lens is arranged at the lower end of the base, and the baffle is provided on the upper surface of the base. A semi-enclosed heat dissipation area can be formed between the base, the baffle, and the optical lens. The air supply unit outputs gas to the heat dissipation area, and the gas is inclined towards the surface of the optical lens and diffuses in an umbrella-like manner, thereby sweeping the surface of the optical lens over a large area and improving heat dissipation efficiency. Because the heat dissipation area is a semi-enclosed structure, the gas can flow out from the heat dissipation area, thereby carrying away heat and contaminants, achieving both heat dissipation and pollution prevention effects.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and more particularly to a heat dissipation device for optical lenses. Background Technology

[0002] Numerous optical components need to be arranged in the optical path of a lithography machine. These components absorb some energy and generate heat, posing a risk of overheating and damage. Photoresist volatilization and other contaminants adhere to the optical components, negatively impacting lithography accuracy and effective wafer yield.

[0003] Air curtain devices with anti-contamination designs achieve contamination prevention by projecting a uniform air curtain. For example, Chinese patent CN109283797A – Objective Lens Protection Device, Objective Lens System, and Lithography Equipment – ​​describes an air curtain device (hereinafter referred to as an air curtain device) that uses a sweeping air curtain design with different apertures and porous flow channels. However, this air curtain device has a technical drawback: it cannot form an effective protective air curtain under lateral wind disturbance conditions, and the airflow does not reach the optical lenses, failing to provide sufficient forced cooling.

[0004] CDA (clean dry air) gas baths are a primary design approach for cooling and preventing contamination of optical components. Their mechanism involves using a cooling airflow perpendicular to the component being cooled, increasing the convective heat transfer coefficient on the component surface to achieve forced convection heat transfer. The basic idea is to provide the highest convective heat transfer effect (gas velocity) at the point of highest surface temperature.

[0005] The design focuses slightly differently on cooling and anti-contamination. CDA cooling nozzle devices use multiple angled nozzles to blow heat to the center of the glass, enhancing convective heat transfer. However, existing CDA cooling nozzle devices use multiple jet streams for cooling, resulting in lower diffusion rates and lower cooling efficiency. Furthermore, because existing CDA cooling nozzles use a jet stream format, the volume fraction of contaminants is relatively uneven, leading to lower anti-contamination effectiveness. Summary of the Invention

[0006] The purpose of this invention is to provide a heat dissipation device for optical lenses to solve the problem of low cooling effect.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] An optical lens heat dissipation device includes:

[0009] A base, the base being ring-shaped, the bottom of the base being used to arrange optical lenses;

[0010] A retaining edge is provided on the upper surface of the base and forms a semi-enclosed heat dissipation area between the retaining edge and the base and the optical lens; and

[0011] An air supply unit is disposed within the baffle and is used to output gas to the heat dissipation area, which is inclined towards the surface of the optical lens and diffuses in an umbrella shape.

[0012] Optical lenses are arranged at the lower end of the base, and a baffle is set on the upper surface of the base. A semi-enclosed heat dissipation area can be formed between the base, the baffle, and the optical lenses. The air supply unit outputs gas to the heat dissipation area. The gas is inclined towards the surface of the optical lenses and diffuses in an umbrella shape, thereby sweeping the surface of the optical lenses over a wide area and improving heat dissipation efficiency. Since the heat dissipation area is a semi-enclosed structure, the gas can flow out from the heat dissipation area, thereby carrying away heat and contaminants, achieving both heat dissipation and pollution prevention effects.

[0013] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the air supply unit includes:

[0014] An air vent is provided on the inner circumferential surface of the baffle and extends in an arc shape along the circumference of the baffle, and the width of the inner side of the air vent gradually increases from the inside to the outside.

[0015] An air inlet is provided on the outer peripheral surface of the baffle, and the air inlet and the air outlet are connected to form an air delivery channel.

[0016] The vent extends in an arc shape along the circumference of the baffle, and the width of the vent inside gradually increases outward, so that the gas diffuses in an umbrella shape after passing through the vent. The inlet is located on the outer circumferential surface of the baffle, so that the gas can be supplied to the heat dissipation area through the outer circumferential surface connected to the baffle.

[0017] As a preferred embodiment of the above-mentioned optical lens heat dissipation device, the cross-sectional area of ​​the air outlet is the same as that of the air inlet.

[0018] Since the cross-sectional areas of the air outlet and the air inlet are the same, the gas flow rates of the air outlet and the air inlet are the same, which makes it easier to control the gas flow rate at the air outlet and achieve precise control of the heat dissipation effect.

[0019] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the air supply channel includes:

[0020] An ejection section extends from a first position to the air outlet, the width of the ejection section gradually increasing from the first position toward the air outlet, wherein the first position is located between the air outlet and the air inlet; and

[0021] The incident section extends inward from the air inlet to the first position.

[0022] The gas delivery channel includes an ejection section, and the width of the ejection section gradually increases from the first position toward the gas outlet, thereby enabling the gas to spread in an umbrella shape after flowing out of the gas outlet.

[0023] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the emission section further includes:

[0024] The second position is located between the first position and the air outlet, and a downward slope is formed between the second position and the air outlet to allow the gas to move downward.

[0025] A downward slope is formed between the second position and the vent, allowing the gas to flow out of the vent and tilt towards the surface of the optical lens, thereby directly dissipating heat from the optical lens.

[0026] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the slope of the downhill ramp is set at 4°-6°.

[0027] Within this range, the slope of a downhill ramp does not easily cause gas to stratify in the vertical direction, making it less likely for pollutants to accumulate and resulting in the best diffusion and heat dissipation effects.

[0028] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the air inlet is located at the lower end of the baffle.

[0029] The air inlet needs to be connected to the air supply pipe. Setting the air inlet at the lower end of the baffle can avoid interference with the components above the baffle and make full use of the limited space inside the lithography machine.

[0030] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the incident section has a uniform inner diameter.

[0031] The incident section has a uniform inner diameter, which keeps the airflow input stable and also helps to keep the output stable, avoiding gas stratification in the heat dissipation area.

[0032] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the emission section is provided with:

[0033] A flow guiding structure is used to guide a portion of the gas in the middle of the ejection section to both sides.

[0034] Because the width of the injection section is smaller than that of the exit section, and the overall thickness of the baffle is smaller, the air delivery channel is shorter. As a result, less airflow disperses to both sides after the gas in the injection section enters the exit section. After setting the flow guiding structure, it is beneficial for the gas to disperse to both sides, so that the gas is evenly distributed along the width direction of the air outlet.

[0035] As a preferred embodiment of the above-mentioned optical lens heat dissipation device, the airflow guiding structure is configured as a rib or groove, the rib or groove being integrally formed on the top wall and / or bottom wall of the emission section, and the rib or groove extending obliquely in a straight line or along a curve from one end of the emission section near the incident section toward the air outlet.

[0036] By setting grooves or ribs on the top and / or bottom walls of the ejection section, the gas will be guided by the ribs or grooves after entering the ejection section and then evenly dispersed to both sides.

[0037] As a preferred embodiment of the above-mentioned optical lens heat dissipation device, the flow guiding structure is configured as a flow guiding block, which is integrally formed on the top wall and / or bottom wall of the emission section, and the width and height of the flow guiding block gradually increase along the direction close to the air outlet.

[0038] By setting guide blocks on the top and / or bottom walls of the ejection section, and setting the shape of the guide blocks to compress the internal space of the ejection section, and causing the gas in the middle to flow to both sides, the gas is evenly dispersed to both sides.

[0039] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the incident section has a uniform inner diameter.

[0040] The incident section has a uniform inner diameter, which keeps the airflow input stable and also helps to keep the output stable, while avoiding gas stratification in the heat dissipation area.

[0041] As a preferred embodiment of the above-mentioned optical lens heat dissipation device, the baffle is provided with an exhaust structure on the side radially away from the air supply unit for discharging the gas from the heat dissipation area.

[0042] The side is equipped with an exhaust structure, which makes the heat dissipation area form a semi-enclosed structure to exhaust the gas. Since the exhaust structure is radially opposite to the air supply unit, it is beneficial for the gas to diffuse fully in the heat dissipation area.

[0043] As a preferred embodiment of the aforementioned optical lens heat dissipation device, the base, the baffle, and the air supply unit are integrally formed; or

[0044] The base and the baffle are integrally formed, and the baffle is provided with mounting holes. The air supply unit is detachably connected to the mounting holes.

[0045] The integrated design of the base, side guard, and air supply unit reduces the number of components in the heat dissipation device. The side guard has mounting holes into which the air supply unit can be detachably connected, allowing for modular, iterative replacement of the separated air supply unit. In subsequent optimizations, the original structure of the base and side guard can be maintained, and the air supply unit can be directly optimized to accelerate the iteration cycle and reduce iteration costs.

[0046] The beneficial effects of the present invention are as follows: an optical lens is arranged at the lower end of the base, and a baffle is provided on the upper surface of the base. A semi-enclosed heat dissipation area can be formed between the base, the baffle, and the optical lens. The gas supply unit outputs gas to the heat dissipation area. The gas is inclined towards the surface of the optical lens and diffuses in an umbrella shape, thereby sweeping the surface of the optical lens over a wide area, improving the heat dissipation efficiency. Since the heat dissipation area is a semi-enclosed structure, the gas can flow out from the heat dissipation area, thereby carrying away heat and pollutants, achieving both heat dissipation and pollution prevention effects. Attached Figure Description

[0047] Figure 1 This is a schematic diagram of the structure of the optical lens heat dissipation device provided in Embodiment 1 of this application;

[0048] Figure 2 yes Figure 1 Axial cross-sectional view of the provided optical lens heat dissipation device at the air supply unit;

[0049] Figure 3 yes Figure 2 Enlarged view of circle A in the middle;

[0050] Figure 4 yes Figure 1 A schematic diagram of the air supply channel of the air supply unit in the provided optical lens heat dissipation device;

[0051] Figure 5 These are velocity cloud diagrams of the CDA cooling nozzle device and the optical lens heat dissipation device provided in Embodiment 1 in the prior art;

[0052] Figure 6 This is an axial cross-sectional view of the optical lens heat dissipation device provided in Embodiment 2 of this application at the air supply unit;

[0053] Figure 7 This is a schematic diagram of the air delivery channel of the air delivery unit in the optical lens heat dissipation device provided in Embodiment 2 of this application;

[0054] Figure 8 This is an axial cross-sectional view of the optical lens heat dissipation device provided in Embodiment 3 of this application at the air supply unit;

[0055] Figure 9 This is a schematic diagram of the air delivery channel of the air delivery unit in the optical lens heat dissipation device provided in Embodiment 3 of this application from a first-view perspective.

[0056] Figure 10 This is a schematic diagram of the air delivery channel of the air delivery unit in the optical lens heat dissipation device provided in Embodiment 3 of this application from a second perspective.

[0057] In the picture:

[0058] 1-Base; 100-Heat dissipation area;

[0059] 2-Flange; 21-Exhaust structure;

[0060] 3-Air delivery unit; 30-Air delivery channel; 31-Air outlet; 32-Air inlet; 33-First position; 34-Second position; 35-Flow guide structure; 311-Exit section sidewall;

[0061] 50 - Optical lens. Detailed Implementation

[0062] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0063] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0064] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0065] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0066] Example 1:

[0067] This embodiment provides a heat dissipation device for optical lenses. Figure 1This is a schematic diagram of the structure of the optical lens heat dissipation device provided in this embodiment. Figure 2 yes Figure 1 An axial cross-sectional view of the provided optical lens heat dissipation device at the air supply unit, as shown below. Figure 1 and Figure 2 As shown, the heat dissipation device includes a base 1, a baffle 2, and an air supply unit 3.

[0068] The base 1 is ring-shaped, and the bottom of the base 1 is used to arrange the optical lens 50. In this embodiment, the inner diameter of the lower end of the base 1 is not less than the outer diameter of the optical lens 50, so that the optical lens 50 is not blocked and the light transmission effect of the optical lens 50 is not affected.

[0069] It should be noted that the optical lens 50 is not limited to lenses that require cleanliness, such as internal lenses of the objective lens, alignment lenses, upper surface lenses, silicon wafers, and masks.

[0070] The guard 2 is disposed on the upper surface of the base 1. The structural dimensions of the base 1 and the guard 2 are only required to not affect the assembly relationship and normal operation of the internal lens and / or other devices. Those skilled in the art can design the structural dimensions of the base 1 and the guard 2 according to the specific working environment, so this application does not make specific limitations in this regard.

[0071] In this embodiment, a semi-enclosed heat dissipation area 100 is formed between the baffle 2, the base 1, and the optical lens 50. The gas supply unit 3 is disposed within the baffle 2 and is used to supply gas to the heat dissipation area 100, which is inclined towards the surface of the optical lens 50 and diffuses in an umbrella-like manner. It should be noted that the gas is a gas with a certain purity requirement, with a purity of at least 99.999%, such as high-purity nitrogen or other high-purity gases.

[0072] It should be noted that pollutants can be volatile organic compounds from photoresist, or various air impurities that affect light transmittance, such as water vapor, dust, and floating microorganisms.

[0073] An optical lens 50 is arranged at the lower end of the base 1, and a baffle 2 is provided on the upper surface of the base 1. A semi-enclosed heat dissipation area 100 can be formed between the base 1, the baffle 2, and the optical lens 50. The gas supply unit 3 outputs gas to the heat dissipation area 100. The gas is inclined towards the surface of the optical lens 50 and diffuses in an umbrella shape, thereby sweeping the surface of the optical lens 50 over a wide area and improving heat dissipation efficiency. Since the heat dissipation area 100 is a semi-enclosed structure, when the organic solvent on the surface of the optical lens 50 evaporates upward during the etching process of the silicon wafer by the photolithography machine, the organic solvent can flow out from the heat dissipation area 100 with the gas, thereby carrying away heat and contaminants, achieving both heat dissipation and anti-contamination effects.

[0074] Figure 3 yes Figure 2 Enlarged view of circle A in the middle. Figure 4 yes Figure 1 A schematic diagram of the air supply channel in the air supply unit of the provided optical lens heat dissipation device. (See diagram below.) Figure 3 and Figure 4 As shown, the air supply unit 3 includes an air outlet 31 and an air inlet 32. The air outlet 31 is located on the inner circumferential surface of the baffle 2 and extends in an arc shape along the circumference of the baffle 2, with the width of the inner side of the air outlet 31 gradually increasing from the inside to the outside. The air inlet 32 ​​is located on the outer circumferential surface of the baffle 2, and the air inlet 32 ​​and the air outlet 31 are connected to form an air supply channel 30.

[0075] In this embodiment, the extension arc of the vent 31 is 40°. Of course, the extension arc of the vent 31 is not limited to 40°. It can be adaptively set according to the heat dissipation effect, the severity of pollutant volatilization, and the size of pollutant particles. For example, the vent 31 can be set to any angle between 20° and 70°. Since the width of the vent 31 gradually increases from the inside to the outside, when the gas is discharged from the vent 31 from the inside to the outside, it will diffuse to both sides.

[0076] In this embodiment, the air inlet 32 ​​can be of various shapes, such as circular or square, and its size can be selected according to the gas flow rate, pollutant particle size, and the severity of pollutant volatilization. In this embodiment, the air inlet 32 ​​is a circular through-hole with a diameter ranging from 0.5 mm to 1 mm.

[0077] The air inlet 32 ​​is used to connect to the gas supply pipe (not shown). After the gas supply pipe outputs nitrogen to the air inlet 32, the nitrogen passes through the gas supply channel 30 and is discharged from the air outlet 31 into the heat dissipation area 100.

[0078] In this embodiment, the cross-sectional areas of the air inlet 32 ​​and the air outlet 31 are the same. According to the continuity equation, when nitrogen gas enters the air inlet 32 ​​with a first initial velocity, it will be discharged from the air outlet 31 with the same first initial velocity. Therefore, in order to accurately control the gas outflow velocity of the air outlet 31, the gas inflow velocity of the air inlet 32 ​​of the heat dissipation device can be controlled, ensuring that the gas flow velocities at both locations are consistent. In this embodiment, the gas outflow velocity is controlled at 10 m / s.

[0079] It should be noted that the airflow velocity of the air curtain device in the prior art is only 1.5m / s, while the gas flow velocity provided in this embodiment can reach 10m / s, thereby significantly improving the heat dissipation effect.

[0080] Furthermore, in this embodiment, the air supply channel 30 extends radially, the air inlet 32 ​​and the air outlet 31 are arranged in the same radial direction, the geometric center of the air inlet 32 ​​and the junction center of the air outlet 31 are arranged in the same radial direction, the air supply channel 30 between the air inlet 32 ​​and the air outlet 31 extends radially, and the radially extended air supply channel 30 enables the airflow to enter the heat dissipation area 100 with the shortest path.

[0081] Furthermore, the gas delivery channel 30 includes an injection section and an exit section. The injection section is the channel where the gas just enters the gas delivery channel 30, and the exit section is the channel where the gas is about to flow out.

[0082] The incident section is the area extending inward from the air inlet 32 ​​to the first position 33, wherein the first position 33 is located between the air outlet 31 and the air inlet 32.

[0083] In this embodiment, the incident section has a uniform inner diameter, which ensures stable airflow input and output, while preventing gas stratification within the heat dissipation area. Here, the inner diameter of the incident section refers to the inner diameter defined by the height and width of the incident section.

[0084] The ejection section is the area extending from the first position 33 to the air outlet 31, and the width of the ejection section gradually increases from the first position 33 to the air outlet 31.

[0085] from Figure 4 It can be seen that the air outlet 31 of the ejection section extends along the inner circumferential surface (curved surface) of the baffle 2, and the air inlet 32 ​​of the injection section extends along the outer circumferential surface (curved surface) of the baffle 2. The two ends of the first position 33 extend in a straight line to the air outlet 31, thereby making the two ejection section sidewalls 311 of the ejection section planar.

[0086] It should be noted that in this embodiment, the side wall 311 of the ejection section is a smooth plane. Optionally, the side wall 311 of the ejection section may also be provided with a guide structure, such as a rib or groove extending in a specific direction, so that the gas can pass through the side wall 311 of the ejection section in a specific direction. This embodiment is not limited to this.

[0087] In this embodiment, the sidewall 311 of the exit section is not limited to a smooth curved surface.

[0088] Furthermore, a second position 34 is provided within the emission section. The second position 34 is located between the first position 33 and the vent 31, forming a downward ramp between the second position 34 and the vent 31, allowing the gas to move downwards. That is, after passing through the second position 34, the gas flows downwards and enters the heat dissipation area 100 through the vent 31. This allows the gas to flow towards the surface of the optical lens 50 after passing through the vent 31, carrying away heat from the surface of the optical lens 50.

[0089] It should be noted that the slope of the downhill ramp is between 4° and 6°. Within this range, the slope is less likely to cause gas stratification in the vertical direction, making it less likely for pollutants to accumulate and maximizing diffusion and heat dissipation. It should also be noted that in this embodiment, the vertical direction and the axial direction are the same.

[0090] In this embodiment, the slope of the downhill ramp is 5°.

[0091] Furthermore, the air inlet 32 ​​is located at the lower end of the baffle 2. Since the air inlet 32 ​​needs to be connected to the air supply pipe, placing the air inlet 32 ​​at the lower end of the baffle 2 can avoid interference with the components above the baffle 2 and make full use of the limited space inside the lithography machine.

[0092] See also Figure 1 The baffle 2 has an exhaust structure 21 on the side radially away from the air supply unit 3 for discharging gas from the heat dissipation area 100. In this embodiment, the exhaust structure 21 is configured as a groove formed on the surface of the baffle 2. There are two exhaust structures 21, which divide the baffle 2 into a fan-ring structure with a large arc length and a fan-ring structure with a small arc length.

[0093] Preferably, the two exhaust structures 21 are symmetrical about the diameter center of the radial extension direction of the air supply unit 3.

[0094] The side 2 is provided with an exhaust structure 21 so that the heat dissipation area 100 forms a semi-enclosed structure to exhaust the gas. Since the exhaust structure 21 is radially opposed to the air supply unit 3, it is beneficial for the gas to diffuse fully within the heat dissipation area 100.

[0095] Furthermore, in this embodiment, the base 1, the baffle 2, and the air supply unit 3 are integrally formed, and the air supply unit 3 itself is configured as a channel structure formed on the baffle 2. Optionally, it can be manufactured by 3D printing, which can effectively reduce the volume of the heat dissipation device compared to mechanical assembly, achieving lightweight and miniaturization.

[0096] Further reading continues Figure 1 and Figure 2 The base 1 is also provided with a light-blocking structure (not shown) for blocking light. The light-blocking structure is located on the outside of the baffle 2 and extends along the outer wall of the baffle 2.

[0097] It should be noted that the light-blocking structure and the air supply unit 3 do not interfere with each other.

[0098] The heat dissipation effect was tested using the existing CDA cooling nozzle device and the heat dissipation device provided in this embodiment.

[0099] It should be noted that the existing CDA cooling nozzle device has three jet streams arranged at equal intervals, with an included angle of 20° between adjacent jet streams.

[0100] Based on the actual working conditions, the surface of the optical lens 50 is divided into 8 rings, and eight volume heat sources are applied from the inside to the outside, with the CDA flow rate set to 45L / min.

[0101] After testing, the highest surface temperature of the optical lens under the existing CDA cooling nozzle device is 174.98°C, while the highest surface temperature of the optical lens under the heat dissipation device provided in this embodiment is 158.31°C, which is 16.67°C lower than the former.

[0102] Figure 5 This is a velocity cloud diagram of a CDA cooling nozzle device in the prior art and an optical lens heat dissipation device provided in this embodiment. According to the velocity cloud diagram, three airflows are formed on the surface of the optical lens under the existing CDA cooling nozzle device. Figure 5 (Left image in the image) The obvious heat dissipation area formed after the three airflows converge is dendritic, far from sufficient to cover the entire surface of the optical lens. In contrast, the obvious heat dissipation area formed on the surface of the optical lens under the heat dissipation device provided in this embodiment is umbrella-shaped. Figure 5 (As shown in the right image), it is sufficient to cover the entire surface of the optical lens, forming an effective heat dissipation layer.

[0103] According to the heat dissipation device provided in this embodiment, by changing the CDA flow rate, at a CDA flow rate of 5 L / min, the temperatures of the upper and lower surfaces of the heat dissipation lens 50 both exceed the allowable temperature of 200°C, reaching 277.86°C and 244.33°C respectively. With increasing CDA flow rate, the maximum temperatures of the upper and lower surfaces of the heat dissipation lens 50 decrease significantly, reaching 163.63°C and 173.06°C respectively at a CDA flow rate of 45 L / min.

[0104] The anti-pollution effect was tested using existing air curtain devices, existing CDA cooling nozzle devices, and the heat dissipation device provided in this embodiment.

[0105] The pollutant was set to grease, the diffusion velocity was set to 0.0029 m / s, and the CDA flow rate remained at 45 L / min.

[0106] The existing air curtain device has too low a flow rate to provide sufficient positive pressure, with a maximum pollutant volume fraction of 0.089% and an average pollutant volume fraction of 0.0018%.

[0107] The existing CDA cooling nozzle device has a relatively uneven contaminant volume fraction on the surface of the optical lens, and there are significant differences in the contaminant volume fraction at different locations. The maximum contaminant volume fraction is 0.15%, and the average contaminant volume fraction is 0.067%.

[0108] The heat dissipation device provided in Example 1 has a relatively uniform fan-shaped flow pattern in its outgoing flow, resulting in a low volume fraction of contaminants on the surface of the optical lens 50 and a relatively uniform distribution. The maximum volume fraction of contaminants is 0.0061%, and the average volume fraction of contaminants is 0.0007%.

[0109] Therefore, the heat dissipation device provided in Embodiment 1 is compatible with the cooling and anti-pollution effects of the existing air curtain device and CAD cooling nozzle.

[0110] Example 2:

[0111] This embodiment is an improvement based on embodiment one. Considering that the overall thickness of the baffle is small, the air delivery channel is short, and the width of the injection section is smaller than the width of the exit section, the gas from the injection section enters the exit section and disperses to both sides less. After the gas flows out of the outlet, the uniformity along the width direction is not high.

[0112] Figure 6 This is an axial cross-sectional view of the optical lens heat dissipation device provided in the embodiments of this application at the air supply unit. Figure 7 This is a schematic diagram of the air supply channel of the air supply unit in the optical lens heat dissipation device provided in this application embodiment. See also... Figures 6-7 In this embodiment, a flow guiding structure 35 is provided on both the top and bottom walls of the ejection section. The flow guiding structure 35 is used to guide part of the gas in the middle of the ejection section to both sides, which is conducive to the gas being dispersed to both sides and the gas being evenly distributed along the width direction of the gas outlet.

[0113] It should be noted that the flow guiding structure 35 may also be provided only on the top or bottom wall of the ejection section, and this embodiment is not limited to this.

[0114] In this embodiment, the flow guiding structure 35 is configured with four convex ribs, all of which extend in a straight line at a certain angle to the radial direction. In this embodiment, the lengths of the two outer convex ribs are greater than the lengths of the two inner convex ribs.

[0115] It is understood that, depending on the desired uniformity of airflow diffusion for cooling, different numbers, lengths, and directions of the ribs are permissible, and this embodiment is not limited to any of these. Furthermore, although the ribs in this embodiment extend in a straight line, it is not limited to this; the ribs can also extend along curves.

[0116] Furthermore, in this embodiment, the protruding rib is integrally formed on the top and bottom walls of the ejection section.

[0117] Furthermore, this embodiment does not limit the flow guiding structure 35 to be a convex rib; the flow guiding structure 35 can also be a combination of a groove or a convex rib.

[0118] Example 3:

[0119] This embodiment is an improvement based on embodiment one. Considering that the overall thickness of the baffle is small, the air delivery channel is short, and the width of the injection section is smaller than the width of the exit section, the gas from the injection section enters the exit section and disperses to both sides less. After the gas flows out of the outlet, the uniformity along the width direction is not high.

[0120] Figure 8 This is an axial cross-sectional view of the optical lens heat dissipation device provided in the embodiments of this application at the air supply unit. Figure 9 This is a schematic diagram of the air delivery channel of the air delivery unit in the optical lens heat dissipation device provided in this application embodiment, viewed from a first perspective. Figure 10 This is a schematic diagram of the air delivery channel of the air delivery unit in the optical lens heat dissipation device provided in this application embodiment, viewed from a second perspective. See also... Figures 8-10 In this embodiment, a flow guiding structure 35 is provided on the top wall of the ejection section. The flow guiding structure 35 is used to guide part of the gas in the middle of the ejection section to both sides, which is conducive to the gas being dispersed to both sides and the gas being evenly distributed along the width direction of the gas outlet.

[0121] It should be noted that the flow guiding structure 35 can also be set on the bottom wall of the exit section, or simultaneously set on the top and bottom walls of the exit section, and the embodiments are not limited thereto.

[0122] In this embodiment, the flow guiding structure 35 is configured as a single flow guiding block, and the width and height of the flow guiding block gradually increase along the direction close to the air outlet 31.

[0123] In this embodiment, the guide block is teardrop-shaped and extends radially. At the same time, the end of the guide block near the air outlet 31 is larger than the end of the guide block away from the air outlet 31.

[0124] Example 4:

[0125] This embodiment is an improvement based on Embodiment 1, Embodiment 2, Embodiment 3 and Embodiment 4. The difference is that the base 1 and the baffle 2 are integrally formed, the baffle 2 is provided with mounting holes, and the air supply unit 3 is detachably connected to the mounting holes.

[0126] The separated air delivery unit 3 can be modularly replaced in iterations. In subsequent optimizations and modifications, the original structure of the base 1 and the flange 2 can be maintained, and the air delivery unit 3 can be directly optimized to accelerate the iteration cycle and reduce iteration costs.

[0127] Example 5:

[0128] This embodiment provides a photolithography apparatus. The various subsystems of this photolithography apparatus are well-known in the art and will not be described in detail here. The photolithography apparatus includes an optical lens system and a stage system. The optical lens system is equipped with the heat dissipation device provided in Embodiments 1 to 4. This heat dissipation device is located between the optical lens system and the stage system and is capable of heat dissipation and contamination removal.

[0129] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A heat dissipation device for an optical lens, characterized in that, include: A base (1) is annular, and the bottom of the base (1) is used to arrange optical lenses (50); A retaining edge (2) is disposed on the upper surface of the base (1) and is capable of forming a semi-enclosed heat dissipation area (100) between the base (1) and the optical lens (50); and An air supply unit (3) is disposed within the baffle (2) and is used to output gas to the heat dissipation area (100) that is inclined toward the surface of the optical lens (50) and diffuses in an umbrella shape; The baffle (2) is provided with an exhaust structure (21) for discharging the gas from the heat dissipation area (100) on the side that is radially away from the air supply unit (3), and the exhaust structure (21) is radially opposite to the air supply unit (3). The air supply unit (3) includes: an air outlet (31) disposed on the inner circumferential surface of the baffle (2) and extending in an arc shape along the circumferential direction of the baffle (2), and the width of the inner side of the air outlet (31) gradually increases from the inside to the outside; and an air inlet (32) disposed on the outer circumferential surface of the baffle (2), wherein the air inlet (32) and the air outlet (31) are connected to form an air supply channel (30); The cross-sectional area of ​​the air outlet (31) is the same as that of the air inlet (32); The air delivery channel (30) includes: an ejection section extending from a first position (33) to the air outlet (31), the width of the ejection section gradually increasing from the first position (33) to the air outlet (31), wherein the first position (33) is located between the air outlet (31) and the air inlet (32); and an injection section extending inward from the air inlet (32) to the first position (33); The ejection section is further provided with a second position (34), which is located between the first position (33) and the air outlet (31), and a downward slope is formed between the second position (34) and the air outlet (31) to allow the gas to move downward.

2. The optical lens heat dissipation device according to claim 1, characterized in that, The slope of the downhill ramp is set between 4° and 6°.

3. The optical lens heat dissipation device according to claim 1, characterized in that, The air inlet (32) is located at the lower end of the baffle (2).

4. The optical lens heat dissipation device according to claim 1, characterized in that, The launch section is equipped with: The flow guiding structure (35) is used to guide part of the gas in the middle of the ejection section to both sides.

5. The optical lens heat dissipation device according to claim 4, characterized in that, The flow guiding structure (35) is configured as a rib or groove, which is integrally formed on the top wall and / or bottom wall of the ejection section. The rib or groove extends obliquely in a straight line or along a curve from one end of the ejection section near the incident section toward the air outlet.

6. The optical lens heat dissipation device according to claim 4, characterized in that, The flow guiding structure (35) is configured as a flow guiding block, which is integrally formed on the top wall and / or bottom wall of the ejection section. The width and height of the flow guiding block gradually increase along the direction close to the air outlet (31).

7. The optical lens heat dissipation device according to claim 1, characterized in that, The incident section has a uniform inner diameter.

8. The optical lens heat dissipation device according to any one of claims 1-7, characterized in that, The base (1), the side guard (2), and the air supply unit (3) are integrally formed.

9. The optical lens heat dissipation device according to any one of claims 1-7, characterized in that, The base (1) and the baffle (2) are integrally formed. The baffle (2) is provided with a mounting hole. The air supply unit (3) is detachably connected to the mounting hole.

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