Filtering device and coating system

Abstract

The application relates to a filtering device and a coating system. A reaction cavity is formed in a shell, and an air inlet and an air outlet are formed on the shell. A first flow guide component and a second flow guide component are arranged in the reaction cavity and are alternately and spacedly arranged along the flow direction of the airflow. In the flow direction of the airflow, the orthographic projection of the first filter plate and the orthographic projection of the second filter plate do not overlap. After the tail gas flows into the flow guide cavity through the first filter plate, the tail gas changes the flow direction under the guidance of the second flow guide plate and flows to the second filter plate along the extension direction of the second flow guide plate. After the tail gas flows into the flow guide cavity through the second filter plate, the tail gas changes the flow direction under the guidance of the first flow guide plate and flows to the first filter plate along the extension direction of the first flow guide plate. In this way, the flow path of the tail gas in the flow guide cavity can be prolonged.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a filtration device and coating system. Background Technology

[0002] Among existing technologies, ALD (Atomic Layer Deposition) is a commonly used coating technology. During the operation of an ALD coating system, process gases are alternately pulsed into the coating chamber. These gases chemically adsorb and react on the substrate to form a deposited film. The exhaust gas itself carries dust particles, and unreacted process gases in the exhaust gas react in the filtration device and vacuum pump, generating new dust particles. The vacuum pump extracts the reacted exhaust gas from the coating unit, and the exhaust gas flows sequentially through a particle capture filter and the vacuum pump.

[0003] Existing filtration devices can filter dust particles entrained in the exhaust gas after the reaction. However, unreacted process gases will still react with air in the vacuum pump after flowing through the existing filtration devices, generating new dust particles. These dust particles will accumulate in the vacuum pump, causing it to jam and affecting the normal operation of the coating system. Summary of the Invention

[0004] Therefore, it is necessary to provide a filtration device and coating system to address the issue of how to extend the flow path of exhaust gas within the filtration device.

[0005] A filtration device, comprising:

[0006] A housing having a reaction chamber inside, and an air inlet and an air outlet are provided on the housing.

[0007] The first flow guiding component and the second flow guiding component are both disposed in the reaction chamber and are alternately arranged at intervals along the flow direction of the airflow, and a flow guiding cavity is formed between adjacent first flow guiding components and second flow guiding components;

[0008] The first flow guiding component includes a first flow guiding plate and a first filter plate connected together, and the second flow guiding component includes a second flow guiding plate and a second filter plate connected together. In the direction of airflow, the orthographic projections of the first filter plate and the second filter plate do not overlap.

[0009] In one embodiment, the first guide plate is arranged circumferentially around the first filter plate; the second filter plate is arranged circumferentially around the second guide plate.

[0010] In one embodiment, the first guide plate extends relative to the first filter plate in the direction of airflow or in the opposite direction of airflow.

[0011] In one embodiment, the second guide plate includes a first sub-plate and a second sub-plate, the second sub-plate being arranged circumferentially around the first sub-plate, and the second sub-plate connecting the first sub-plate and the second filter plate;

[0012] The second sub-plate and the second filter plate both extend relative to the first sub-plate in the direction of airflow or in the opposite direction to airflow.

[0013] In one embodiment, the first guide plate, the second sub-plate, and the second filter plate extend in the same direction.

[0014] In one embodiment, a filter element is included, which is disposed at the air outlet.

[0015] In one embodiment, a gas supply pipeline assembly is included, which includes an inlet pipe and an outlet pipe that are interconnected. The outlet pipe is disposed in the reaction chamber and has a plurality of outlet holes.

[0016] The inlet pipe is used to input the reaction gas into the outlet pipe.

[0017] In one embodiment, the air outlet is located inside the reaction chamber near the air inlet.

[0018] In one embodiment, there are multiple air outlet pipes, and each air outlet pipe corresponds to a flow guide cavity, with the air outlet pipe disposed within the corresponding flow guide cavity.

[0019] A coating system, comprising:

[0020] A coating apparatus, which contains a coating chamber;

[0021] Vacuum pumps; and

[0022] In the aforementioned embodiment, the air inlet of the filter device is connected to the coating chamber, and the air outlet of the filter device is connected to the vacuum pump.

[0023] The aforementioned filtration device and coating system include a housing, a first flow guiding component, and a second flow guiding component. A reaction chamber is formed within the housing, and an air inlet and an air outlet are provided on the housing. Both the first and second flow guiding components are disposed within the reaction chamber and are alternately spaced along the airflow direction, forming a flow guiding cavity between adjacent first and second flow guiding components. The first flow guiding component includes a connected first flow guiding plate and a first filter plate, and the second flow guiding component includes a connected second flow guiding plate and a second filter plate. The orthographic projections of the first and second filter plates do not overlap in the airflow direction. In the filtration device of this application embodiment, the first or second flow guiding component divides the reaction chamber into a connected air inlet chamber, a flow guiding cavity, and an air outlet chamber. The air inlet chamber is connected to the air inlet, and the air outlet chamber is connected to the air outlet. After the exhaust gas flows into the reaction chamber from the air inlet, it needs to flow sequentially through the air inlet chamber, the flow guiding cavity, and the air outlet chamber before flowing out from the air outlet. In this process, after the exhaust gas flows into the guide cavity through the first filter plate, its flow direction changes under the guidance of the second guide plate, and it flows towards the second filter plate along the extension direction of the second guide plate. This extends the flow path of the exhaust gas in the guide cavity. Similarly, after the exhaust gas flows into the guide cavity through the second filter plate, its flow direction changes under the guidance of the first guide plate, and it flows towards the first filter plate along the extension direction of the first guide plate. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the coating system in this application, wherein the arrows indicate the flow direction of the exhaust gas or the flow direction of the process gas involved in the coating.

[0025] Figure 2 This is a schematic diagram of the structure of a filtering device in one embodiment of this application.

[0026] Figure 3 This is a schematic diagram of the structure of a filtration device in another embodiment of this application, wherein the arrow indicates the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0027] Figure 4 for Figure 3 The diagram shows a magnified view of a portion of area A, where the arrows indicate the direction of the exhaust gas flow or the flow direction of the reactant gas.

[0028] Figure 5 This is a schematic diagram of the structure of a filtering device in another embodiment of this application.

[0029] Figure 6 This is a schematic diagram of the filter device in another embodiment of the present application, wherein the arrow indicates the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0030] Figure 7This is a schematic diagram of the filter device in another embodiment of the present application, wherein the arrow indicates the flow direction of the exhaust gas or the flow direction of the reaction gas.

[0031] Figure 8 This is a schematic diagram of the gas supply pipeline assembly in this application.

[0032] Figure Labels

[0033] 100. Coating system;

[0034] 11. Filtration device;

[0035] 111, Shell; 111a, Reaction Chamber; 111b, Air Inlet; 111c, Air Outlet; 111d, Flow Guide Chamber; 111e, Air Inlet Chamber; 111f, Air Outlet Chamber; 1111, Top Cover;

[0036] 112. First flow guiding assembly; 1121. First flow guiding plate; 1122. First filter plate; 112a. First frustum-shaped space;

[0037] 113. Second flow guiding assembly; 1131. Second flow guiding plate; 1132. First sub-plate; 1133. Second sub-plate; 1134. Second filter plate; 113a. Second frustum-shaped space;

[0038] 114. Air supply pipe assembly; 1141. Air inlet pipe; 1142. Air outlet pipe;

[0039] 115. Filter components;

[0040] 12. Coating device; 13. Vacuum pump. Detailed Implementation

[0041] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0042] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0043] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0044] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0045] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0046] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0047] Please see Figure 1 This application provides a coating system 100, including a coating device 12, a vacuum pump 13, and a filter device 11. The coating device 12 is provided with a coating chamber; the air inlet 111b of the filter device 11 is connected to the coating chamber, and the air outlet 111c of the filter device 11 is connected to the vacuum pump 13.

[0048] During the operation of the coating system 100, process gas for coating is introduced into the coating chamber of the coating device 12. The process gas undergoes a coating reaction in the coating chamber to achieve the coating operation. The exhaust gas after the reaction is extracted from the coating chamber by the vacuum pump 13 and passes through the filter device 11 and the vacuum pump 13. The exhaust gas after the reaction itself will carry dust particles, and there will be some unreacted exhaust gas. During the flow, it will react with the air in the filter device 11 and the vacuum pump 13 to generate new dust particles.

[0049] The filter device 11 in this embodiment extends the path of the exhaust gas within the filter device 11, allowing the exhaust gas to react fully and generate dust particles within the filter device 11. The dust particles are then filtered and contained within the filter device 11, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0050] Please see Figure 2 and Figure 3 This application provides a filtration device 11, which includes a housing 111, a first flow guiding component 112 and a second flow guiding component 113.

[0051] A reaction chamber 111a is formed inside the shell 111. An air inlet 111b and an air outlet 111c are provided on the shell 111. The air inlet 111b, the reaction chamber 111a and the air outlet 111c are connected in sequence.

[0052] In this embodiment, the process gas after the reaction is defined as exhaust gas. It can be understood that the exhaust gas is extracted from the coating chamber by the vacuum pump 13 and flows into the reaction chamber 111a from the inlet 111b, and then flows out from the outlet 111c. In this way, the exhaust gas forms a flow path in the reaction chamber 111a from the inlet 111b to the outlet 111c.

[0053] The first flow guiding component 112 and the second flow guiding component 113 are both disposed in the reaction chamber 111a and are alternately disposed along the flow direction of the airflow. The adjacent first flow guiding component 112 and second flow guiding component 113 define a flow guiding chamber 111d.

[0054] Understandably, the first flow guiding component 112 or the second flow guiding component 113 divides the reaction chamber 111a into an inlet chamber 111e, several flow guiding chambers 111d, and an outlet chamber 111f, which are sequentially connected along the airflow direction. The inlet chamber 111e is connected to the inlet port 111b, and the outlet chamber 111f is connected to the outlet port 111c. The exhaust gas flows into the inlet chamber 111e from the inlet port 111b, and needs to flow through the inlet chamber 111e, the flow guiding chambers 111d, and the outlet chamber 111f in sequence before flowing out from the outlet port 111c. In this way, setting multiple flow guiding chambers 111d can extend the path of the exhaust gas in the filter device 11, so that the exhaust gas can fully react and generate dust particles in the filter device 11.

[0055] The first flow guiding component 112 includes a first flow guiding plate 1121 and a first filter plate 1122 connected together, and the second flow guiding component 113 includes a second flow guiding plate 1131 and a second filter plate 1134 connected together. In the direction of airflow, the orthographic projections of the first filter plate 1122 and the second filter plate 1134 do not overlap.

[0056] It is understandable that after the exhaust gas flows into the guide cavity 111d through the first filter plate 1122, its flow direction will change under the guidance of the second guide plate 1131, and it will flow towards the second filter plate 1134 along the extension direction of the second guide plate 1131. In this way, the flow path of the exhaust gas in the guide cavity 111d can be extended (the flow direction of the airflow is as follows). Figure 4 (As shown by arrows P-Q-X). Similarly, after the exhaust gas flows into the guide cavity 111d through the second filter plate 1134, it will change its flow direction under the guidance of the first guide plate 1121 and flow towards the first filter plate 1122 along the extension direction of the first guide plate 1121 (the flow direction of the airflow is as follows). Figure 4 (As shown by the middle arrow Q-arrow X-arrow Y).

[0057] In one embodiment of this application, please refer to Figures 3 to 6After the exhaust gas flows into the intake chamber 111e from the intake port 111b, it flows through the first filter plate 1122 to enter the guide chamber 111d. During this process, the first filter plate 1122 filters dust particles in the exhaust gas as well as dust particles generated in the intake chamber 111e. The first guide plate 1121 can guide the exhaust gas flowing into the intake chamber 111e to the first filter plate 1122. After passing through the first filter plate 1122 and entering the guide chamber 111d, the exhaust gas flows to the second filter plate 1134 under the guidance of the second guide plate 1131 of the second guide assembly 113. After passing through the second filter plate 1134, it enters the next guide chamber 111d. After passing through multiple first filter plates 1122 and second filter plates 1134, the exhaust gas flows into the exhaust chamber 111f. During this process, the guide cavity 111d extends the flow path of the exhaust gas so that the exhaust gas can fully react and generate dust particles in the guide cavity 111d. The dust particles are then filtered by the first filter plate 1122 and the second filter plate 1134, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0058] The specific number of the first flow guiding component 112 and the second flow guiding component 113 is not limited. It is understood that the flow guiding cavity 111d is defined by the spaced arrangement of the first flow guiding component 112 and the second flow guiding component 113. Therefore, the number of the first flow guiding component 112 is at least one, and the number of the second flow guiding component 113 is at least one. Furthermore, the specific number of the first flow guiding component 112 and the second flow guiding component 113 is related to the specific dimensions of the reaction cavity 111a. That is, the longer the flow path of the airflow within the reaction cavity 111a, the larger the space available for arranging the first flow guiding component 112 and the second flow guiding component 113, and thus the greater the number of the first flow guiding component 112 and the second flow guiding component 113.

[0059] The specific locations of the air inlet 111b and the air outlet 111c are not limited. For some embodiments, please refer to [link / reference needed]. Figure 1 and Figure 2 The housing 111 extends along a first direction, the air inlet 111b is disposed at one end of the housing 111 along the first direction, and the air outlet 111c is disposed on the periphery of the other end of the housing 111 along the first direction.

[0060] The specific design of the housing 111 is not limited. For some embodiments, please refer to... Figure 1 The housing 111 includes a top cover 1111 with an air outlet 111c, and a reaction chamber 111a is formed inside the housing 111, with the air outlet 111c communicating with the reaction chamber 111a.

[0061] In some embodiments, when the specific quantity of either the first flow guiding component 112 or the second flow guiding component 113 is N, the specific quantity of the other should be N+1. For example, if the specific quantity of the first flow guiding component 112 is one and the specific quantity of the second flow guiding component 113 is two, then the arrangement of the first flow guiding component 112 and the second flow guiding component 113 should be "second flow guiding component 113 — first flow guiding component 112 — second flow guiding component 113".

[0062] In other embodiments, the specific number of the first flow guiding component 112 and the specific number of the second flow guiding component 113 are equal. For example, if there are two first flow guiding components 112 and two second flow guiding components 113, then the arrangement of the first flow guiding components 112 and the second flow guiding components 113 should be "second flow guiding component 113—first flow guiding component 112—second flow guiding component 113—first flow guiding component 112" or "first flow guiding component 112—second flow guiding component 113—first flow guiding component 112—second flow guiding component 113".

[0063] In the embodiments of this application, please refer to Figures 3 to 6 The specific number of the first flow guiding component 112 and the specific number of the second flow guiding component 113 are equal. If the specific number of the first flow guiding component 112 and the specific number of the second flow guiding component 113 are both M, and M satisfies the condition M≥2, then the specific number of the flow guiding cavity 111d formed between the first flow guiding component 112 and the second flow guiding component 113 is M+1.

[0064] It is understood that the filter device 11 has multiple guide chambers 111d, so that the reacting gas can pass through each guide chamber 111d in sequence and react with the air in each guide chamber 111d to form new dust particles, which are then filtered by the corresponding first filter plate 1122 or second filter plate 1134 downstream. In this way, the exhaust gas can fully react in the guide chamber 111d and filter out the dust particles generated by the exhaust gas reaction, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0065] In some embodiments, please refer to Figures 3 to 6 The first guide plate 1121 is arranged circumferentially around the first filter plate 1122; the second filter plate 1134 is arranged circumferentially around the second guide plate 1131.

[0066] It is understandable that, along the flow path of the airflow in the reaction chamber 111a, the orthographic projection of the first flow guiding component 112 overlaps with the orthographic projection of the second flow guiding component 113. That is, the first filter plate 1122 is located in the center of the orthographic projection of the first flow guiding component 112, and the second filter plate 1134 is located on the periphery of the orthographic projection of the second flow guiding component 113.

[0067] In one embodiment of this application, please refer to Figures 3 to 6 The exhaust gas flows into the guide cavity 111d from the first filter plate 1122, and is then guided by the second guide plate 1131, flowing from the center of the second guide assembly 113 towards its periphery, until it flows out from the second filter plate 1134. In another embodiment of this application, the exhaust gas flows into the guide cavity 111d from the second filter plate 1134, and is then guided by the first guide plate 1121, flowing from the periphery of the first guide assembly 112 towards its center, until it flows out from the second filter plate 1134. Thus, the exhaust gas has a longer flow path within the guide cavity 111d, allowing it more time to react with the air, thereby ensuring a more complete reaction within the guide cavity 111d.

[0068] In some embodiments, please refer to Figures 3 to 6 The first guide plate 1121 extends relative to the first filter plate 1122 in the direction of airflow or in the opposite direction of airflow.

[0069] In one embodiment of this application, the inner diameter of the first guide plate 1121 gradually increases along its own extension direction.

[0070] It is understandable that the first guide plate 1121 and the first filter plate 1122 cooperate to form a first frustum-shaped space 112a, wherein the first filter plate 1122 is the upper bottom surface of the first frustum-shaped space 112a, and the first guide plate 1121 is the side surface of the first frustum-shaped space 112a.

[0071] Specifically, please see Figures 3 to 6 The first flow guiding component 112 is positioned before the second flow guiding component 113. In the flow guiding cavity 111d defined by the first flow guiding component 112 and the second flow guiding component 113, the exhaust gas flows from the second filter plate 1134 into the next flow guiding cavity 111d. Under the guidance of the first flow guiding plate 1121, the exhaust gas flows obliquely. That is, under the guidance of the first flow guiding plate 1121, the exhaust gas will have displacement in the direction of airflow or in the opposite direction to the direction of airflow, and it will also have displacement perpendicular to the direction of airflow. In this way, the flow path of the exhaust gas in the flow guiding cavity 111d is longer, and the exhaust gas can have more time to react, so that the exhaust gas can react fully in the reaction cavity 111a.

[0072] In some embodiments, please refer to Figures 3 to 6 The second guide plate 1131 includes a first sub-plate 1132 and a second sub-plate 1133. The second sub-plate 1133 is arranged circumferentially around the first sub-plate 1132, and the second sub-plate 1133 connects the first sub-plate 1132 and the second filter plate 1134.

[0073] The second sub-plate 1133 and the second filter plate 1134 both extend relative to the first sub-plate 1132 in the direction of airflow or in the opposite direction to airflow.

[0074] In one embodiment of this application, the inner diameters of the second sub-plate 1133 and the second filter plate 1134 gradually increase along their respective extension directions.

[0075] It is understandable that the first sub-plate 1132, the second sub-plate 1133, and the second filter plate 1134 cooperate to form a second frustum-shaped space 113a, wherein the first sub-plate 1132 is the upper bottom surface of the second frustum-shaped space 113a, and the second sub-plate 1133 and the second filter plate 1134 together form the side surface of the second frustum-shaped space 113a.

[0076] Specifically, please see Figures 3 to 6 The second flow guiding component 113 is spaced apart from the first flow guiding component 112. In the flow guiding cavity 111d defined by the first flow guiding component 112 and the second flow guiding component 113, exhaust gas flows from the first filter plate 1122 into the flow guiding cavity 111d. After encountering the first sub-plate 1132 and being obstructed, it flows towards the periphery of the first sub-plate 1132. Guided by the first flow guiding plate 1121 and the second sub-plate 1133, it flows obliquely to the second filter plate 1134. During this process, the exhaust gas is guided by the first flow guiding plate 1121, the first sub-plate 1132, and the second sub-plate 1133, respectively. The second sub-plate 1133 may displace in the direction of airflow or in the opposite direction to the airflow, and it may also displace perpendicular to the airflow direction. Thus, the flow path of the exhaust gas in the flow guiding cavity 111d is longer, allowing the exhaust gas more time to react, thereby enabling the exhaust gas to react fully within the flow guiding cavity 111d.

[0077] In some embodiments, please refer to Figures 3 to 6 The first guide plate 1121, the second sub-plate 1133 and the second filter plate 1134 extend in the same direction.

[0078] It is understood that the first flow guiding component 112 and the second flow guiding component 113 are arranged at intervals to form the first frustum-shaped space 112a and the second frustum-shaped space 113a, and the structure between the first flow guiding component 112 and the second flow guiding component 113 is more compact. This is conducive to setting multiple first flow guiding components 112 and the second flow guiding component 113 to form multiple flow guiding cavities 111d, thereby extending the flow path of the exhaust gas in the reaction cavity 111a as much as possible, so that the exhaust gas can have more time to react, and thus the exhaust gas can react fully in the flow guiding cavity 111d.

[0079] In some embodiments, please refer to Figure 3 and Figure 4 It includes a filter element 115, which is disposed at the air outlet 111c.

[0080] Understandably, the filter element 115 is disposed within the exhaust chamber 111f to filter the exhaust gas after it has passed through all the first guide components 112 and the second guide components 113. Specifically, the exhaust gas enters the exhaust chamber 111f after passing through all the first guide components 112 and the second guide components 113, and the exhaust gas may also react in the exhaust chamber 111f to generate new dust particles. Therefore, the filter element 115 is disposed at the exhaust port 111c to further filter the dust particles in the exhaust gas, allowing the exhaust gas to flow into the vacuum pump 13 through the exhaust port 111c. In this way, the complete reaction of the exhaust gas can be further ensured, and the dust particles in the reaction gas can be filtered more thoroughly, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0081] In some embodiments, please refer to Figure 3 The filtration device 11 includes a gas supply pipe assembly 114, which includes an inlet pipe 1141 and an outlet pipe 1142 that are interconnected. The outlet pipe 1142 has several outlet holes. The outlet pipe 1142 is located inside the reaction chamber 111a and is in the direction of airflow within the reaction chamber 111a. The inlet pipe 1141 is used to input reaction gas into the outlet pipe 1142.

[0082] It is understandable that the reactant gas can react with the exhaust gas. The specific type of reactant gas depends on the gas required for the exhaust gas reaction, such as water vapor, oxygen, or air.

[0083] The specific location of the vent pipe 1142 is not limited.

[0084] In some embodiments, please refer to Figure 3 The exhaust pipe 1142 is located inside the reaction chamber 111a near the air inlet 111b, and the exhaust pipe 1142 is provided with several air outlets.

[0085] Understandably, by introducing the reaction gas into the inlet pipe 1141, the reaction gas can enter the inlet chamber 111e through the outlet port of the outlet pipe 1142 and further diffuse upstream of the first guide assembly 112 and the second guide assembly 113. Thus, the exhaust gas flowing out of the coating chamber can immediately and thoroughly mix with the reaction gas after entering the inlet chamber 111e through the inlet port 111b, which is beneficial for the complete reaction of the exhaust gas. Furthermore, the dust particles are thoroughly filtered by the subsequent flow through the first guide assembly 112 and the second guide assembly 113, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0086] In other embodiments, please refer to Figure 7 There are multiple air outlet pipes 1142, each corresponding to a guide cavity 111d, with each air outlet pipe 1142 located within its corresponding guide cavity 111d.

[0087] It is understandable that each outlet pipe 1142 can input the reaction gas into the corresponding guide cavity 111d, which is conducive to the exhaust gas reacting more fully when flowing through the guide cavity 111d, and, together with the first filter plate 1122 or the second filter plate 1134, fully filter the dust particles, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0088] Furthermore, the exhaust pipe 1142 is positioned close to the first filter plate 1122 and / or the second filter plate 1134. It is understood that the reaction gas output from the exhaust pipe 1142 can be fully mixed with the exhaust gas flowing through the first filter plate 1122 and / or the second filter plate 1134, thereby facilitating a complete reaction of the exhaust gas.

[0089] The specific design of the vent pipe 1142 is not limited.

[0090] In some embodiments, please refer to Figure 3 The vent pipe 1142 includes several sub-segments, which are straight sections and / or bent sections, and several vent holes are provided on the vent pipe 1142.

[0091] In one embodiment of this application, the exhaust pipe 1142 consists of several straight sections and several bent sections that are interconnected, and each section has several exhaust holes. Thus, the exhaust holes of the exhaust pipe 1142 can uniformly discharge the reaction gas into the intake chamber 111e, allowing the exhaust gas entering the intake chamber 111e to mix better with the reaction gas, thereby facilitating a complete reaction of the exhaust gas. Furthermore, the exhaust gas is thoroughly filtered by the first guide assembly 112 and the second guide assembly 113, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0092] It is understandable that a bend can be a curved segment or a broken line segment.

[0093] In other embodiments, please refer to Figure 7 The vent pipe 1142 is circular.

[0094] Understandably, the exhaust pipe 1142 is positioned close to the second filter plate 1134, and the shape of the exhaust pipe 1142 is adapted to the second filter plate 1134 so that the reaction gas output from the exhaust pipe 1142 can be more fully mixed with the exhaust gas flowing through the second filter plate 1134. This facilitates a more complete reaction between the exhaust gas and the reaction gas, and the dust particles are fully filtered through the first guide assembly 112 and the second guide assembly 113 that subsequently flow through, thereby reducing the probability of dust particles entering the vacuum pump 13 and extending the service life of the vacuum pump 13.

[0095] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0096] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A filtration device, characterized in that, include: A housing having a reaction chamber inside, and an air inlet and an air outlet are provided on the housing. The first flow guiding component and the second flow guiding component are both disposed in the reaction chamber and are alternately arranged at intervals along the flow direction of the airflow, and a flow guiding cavity is formed between adjacent first flow guiding components and second flow guiding components; A gas supply pipeline assembly, comprising an inlet pipe and an outlet pipe that are interconnected, wherein the outlet pipe is disposed within the reaction chamber and has a plurality of outlet holes; The inlet pipe is used to input the reaction gas into the outlet pipe; The first flow guiding component includes a first flow guiding plate and a first filter plate connected together, and the second flow guiding component includes a second flow guiding plate and a second filter plate connected together. In the direction of airflow, the orthographic projections of the first filter plate and the second filter plate do not overlap. The first flow guiding plate is arranged circumferentially around the first filter plate. The second filter plate is arranged circumferentially around the second flow guiding plate. The first flow guiding plate extends relative to the first filter plate in the direction of airflow or in the opposite direction to the direction of airflow.

2. The filtration device according to claim 1, characterized in that, The second guide plate includes a first sub-plate and a second sub-plate, the second sub-plate being arranged circumferentially around the first sub-plate, and the second sub-plate connecting the first sub-plate and the second filter plate; The second sub-plate and the second filter plate both extend relative to the first sub-plate in the direction of airflow or in the opposite direction to airflow.

3. The filtration device according to claim 2, characterized in that, The first guide plate, the second sub-plate, and the second filter plate extend in the same direction.

4. The filtration device according to claim 1, characterized in that, It includes a filter element, which is disposed at the air outlet.

5. The filtration device according to claim 1, characterized in that, The exhaust pipe is located inside the reaction chamber near the air inlet.

6. The filtration device according to claim 1, characterized in that, There are multiple air outlet pipes, and each air outlet pipe corresponds to a flow guide cavity. The air outlet pipe is disposed in the corresponding flow guide cavity.

7. A coating system, characterized in that, include: A coating apparatus, which contains a coating chamber; Vacuum pump; as well as The filtration device according to any one of claims 1 to 6, wherein the air inlet of the filtration device is connected to the coating chamber, and the air outlet of the filtration device is connected to the vacuum pump.

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