A method and device for detecting parameters of a mist fluid based on wafer preparation

Abstract

The present application relates to the technical field of mist fluid parameter detection for wafer preparation, and discloses a mist fluid parameter detection method and device based on wafer preparation, wherein the method is based on an imaging volume, a total number of images, a preset diameter and a total number of particles to calculate the average concentration of the mist fluid in the imaging space; based on the average speed of the mist fluid in the imaging space; if the average concentration of the mist fluid in the imaging space is less than or equal to a first preset threshold value, and the average speed of the mist fluid in the imaging space is greater than or equal to a second preset threshold value, then the mist fluid is confirmed to be discharged from the discharge pipeline. The present application uses a CCD camera to image the mist fluid in the chamber discharge pipeline, and analyzes the image online to obtain the average speed and average concentration of the organic solvent in the mist fluid. When the obtained parameter values meet the conditions, it is determined that the replacement process is completed, so as to accurately determine whether the process link reaches the end point, and improve the detection efficiency.

Description

Technical Field

[0001] This invention relates to the field of mist fluid parameter detection technology in wafer fabrication, and specifically to a method and apparatus for mist fluid parameter detection based on wafer fabrication. Background Technology

[0002] With the development of semiconductor technology, the process requirements for chip fabrication equipment are becoming increasingly stringent. When drying wafers with circuits already formed on certain surfaces, an inert substance is needed to replace the organic solvent during the process. During this replacement, the organic solvent is discharged from the cavity as a mist fluid.

[0003] During wafer fabrication, processes such as chemical cleaning or wet etching are performed on the wafer. This process includes chemical treatment, pure water rinsing, and the application of an organic solvent protective film. After liquid treatment, the wafer needs to be dried to remove the organic solvent protective film from its surface. During the drying process, due to the refinement and high aspect ratio of the wafer surface pattern, coupled with the evaporation of the organic solvent, the liquid film at the grooves in the wafer pattern can disappear, making the wafer pattern particularly susceptible to deformation. To address this issue, a common practice is to use an inert material to dry the wafer. This inert material replaces the organic solvent in a gas-liquid mixture, preventing contact between the wafer pattern and the external gas during the drying process, thus ensuring the integrity of the wafer pattern.

[0004] In related technologies, due to the special nature of wafer fabrication, it is impossible to monitor in real time whether the organic solvent has been completely replaced. Instead, the duration of the replacement step can only be set by empirical values. This means that the replacement process can only be judged by empirical time, which makes it impossible to control the wafer yield and affects the detection efficiency and accuracy. Summary of the Invention

[0005] In view of this, the present invention provides a method and apparatus for detecting mist-like fluid parameters based on wafer fabrication, in order to solve the problem in related technologies that can only rely on experience time to determine whether the replacement process has been completed, which leads to the inability to control the wafer yield and affects the detection efficiency and accuracy.

[0006] In a first aspect, the present invention provides a method for detecting mist-like fluid parameters based on wafer fabrication. A CCD camera is installed at the inlet of a chamber discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve an organic solvent in the chamber into a mist-like fluid. The mist-like fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source. The method includes: Based on the imaging space of a CCD camera, the total number of particles in the mist-like fluid within the imaging space is identified by the CCD camera, and the particles are fitted into circular particles of a preset diameter. The imaging volume of the imaging space is calculated based on the field of view length, field of view width and lens depth of the CCD camera. Obtain the total number of image frames captured by the CCD camera within the imaging space; Based on the imaging volume, total number of image frames, preset diameter, and total number of particles, the average concentration of the mist fluid in the imaging space is calculated. The distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time is obtained; Based on the exposure time and moving distance, the moving speed of each spherical particulate mist fluid is calculated; The average velocity of the mist fluid in the imaging space is calculated based on the total number of mist fluid particles in the imaging space and the moving velocity of each spherical mist fluid particle. If the average concentration of the mist fluid in the imaging space is less than or equal to the first preset threshold, and the average velocity of the mist fluid in the imaging space is greater than or equal to the second preset threshold, then it is confirmed that the mist fluid is discharged from the discharge pipe.

[0007] By implementing the above-described method, a CCD camera is used to image the mist fluid in the chamber discharge pipe, and the image is analyzed online to obtain the average velocity and average concentration of the organic solvent in the mist fluid. When the obtained parameter values ​​meet the conditions, the replacement process is determined to be complete, and a signal indicating that the process endpoint has been detected is sent to the whole machine control system, thereby accurately determining whether the process step has reached the endpoint and improving the detection efficiency.

[0008] In one alternative implementation, obtaining the distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time includes: The grayscale image of each spherical, mist-like fluid particle in the imaging area is processed based on the exposure time. Based on the grayscale processed particle image of each circular mist fluid in the imaging area based on the exposure time, the movement distance of each circular mist fluid particle in the imaging area based on the exposure time is identified.

[0009] By implementing the above methods and using grayscale processing, it is beneficial to identify the distance each round, granular mist fluid moves across the imaging area based on exposure time.

[0010] In one alternative implementation, grayscale processing of the particle image includes: Extract the three primary color pixel features from the foggy fluid image, and calculate the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients; The particle image is processed in grayscale based on the grayscale value of the exposure time.

[0011] By implementing the above methods and using specific grayscale processing techniques, it is beneficial to identify the distance each circular particulate mist fluid moves in the imaging area based on the exposure time, which ultimately helps to calculate the moving speed of each circular particulate mist fluid.

[0012] In one alternative implementation, the grayscale value of the foggy fluid image based on exposure time is calculated based on the features of the three primary color pixels and preset coefficients, using the following formula: ; in, Grayscale value Features of red pixels Features of green pixels Blue pixel features The first preset coefficient, This is the second preset coefficient. This is the third preset coefficient.

[0013] By implementing the above-described method and using specific grayscale value calculation techniques, it is beneficial to identify the distance each circular particulate mist fluid moves in the imaging area based on exposure time, and ultimately to calculate the moving speed of each circular particulate mist fluid.

[0014] In one alternative implementation, identifying the distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time includes: Obtain the image length of the particle image over the imaging region; The distance moved is obtained by calculating the difference between the image length and the preset diameter.

[0015] By implementing the above methods and using specific methods to calculate the distance traveled, it is ultimately beneficial to calculate the speed of each spherical, mist-like fluid particle.

[0016] In one alternative implementation, the average concentration of the mist fluid within the imaging space is calculated based on the imaging volume, total number of image frames, preset diameter, and total number of particles, using the following formula:

[0017] in, The average concentration is... The total number of particles, For the preset diameter, The total number of frames in the image. For the imaging volume, Let n be the mist-like fluid of the nth particle.

[0018] By implementing the above-described method and using a specific average concentration calculation method, it is beneficial to accurately detect whether the mist fluid has been completely discharged from the discharge pipeline based on the average concentration parameter.

[0019] In one alternative implementation, the method further includes: If it is confirmed that the mist-like fluid is being discharged from the exhaust pipe, an alarm will be issued.

[0020] By implementing the above-described embodiments, the attention of the process preparation personnel can be drawn.

[0021] Secondly, the present invention provides a device in which a CCD camera is installed at the inlet of a chamber discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve an organic solvent in the chamber into a mist fluid. The mist fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source. The device includes: The mist fluid particle acquisition module is used to identify the total number of mist fluid particles in the imaging space based on the CCD camera. The particles are then fitted into circular particles of a preset diameter. The camera imaging volume calculation module is used to calculate the imaging volume of the imaging space based on the field of view length, field of view width and lens depth of field of the CCD camera. The camera image frame acquisition module is used to acquire the total number of image frames captured by the CCD camera within the imaging space; The mist fluid concentration calculation module is used to calculate the average concentration of mist fluid in the imaging space based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles. The particle movement distance acquisition module is used to acquire the movement distance of each round, mist-like fluid particle in the imaging area based on the exposure time. The particle velocity calculation module is used to calculate the velocity of each spherical particle-shaped mist fluid based on the exposure time and the distance traveled. The average particle velocity calculation module calculates the average velocity of the mist fluid in the imaging space based on the total number of particles in the mist fluid and the moving speed of each round mist fluid particle. The mist fluid discharge confirmation module is used to confirm that the mist fluid is discharged from the discharge pipeline if the average concentration of the mist fluid in the imaging space is less than or equal to a first preset threshold and the average velocity of the mist fluid in the imaging space is greater than or equal to a second preset threshold.

[0022] Thirdly, the present invention provides a computer device, comprising: a memory and a processor, wherein the memory and the processor are communicatively connected to each other, the memory stores computer instructions, and the processor executes the computer instructions to perform the wafer fabrication-based mist fluid parameter detection method described in the first aspect or any corresponding embodiment thereof.

[0023] Fourthly, the present invention provides a computer-readable storage medium storing computer instructions for causing a computer to execute the wafer-based method for detecting mist fluid parameters according to the first aspect or any corresponding embodiment described above. Attached Figure Description

[0024] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the installation of a CCD camera according to an embodiment of the present invention; Figure 2 This is a schematic flowchart of a method for detecting mist-like fluid parameters based on wafer fabrication according to an embodiment of the present invention; Figure 3 This is a schematic diagram of an image of a circular particulate mist fluid in the imaging region according to an embodiment of the present invention; Figure 4 This is a schematic diagram of another mist-like fluid parameter detection device based on wafer fabrication according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the hardware structure of a computer device according to an embodiment of the present invention. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] With the development of semiconductor technology, the process requirements for chip fabrication equipment are becoming increasingly stringent. When drying wafers with circuits already formed on certain surfaces, an inert substance is needed to replace the organic solvent during the process. During this replacement, the organic solvent is discharged from the cavity as a mist fluid.

[0028] In the IC manufacturing process, after wafer etching, wet cleaning is required. This involves using different acidic and alkaline agents, which generate a large amount of residue. Organic solvents are then used to remove the remaining agents and particulate matter from the wafer. The surface tension generated during the evaporation of these organic solvents can cause deformation of the patterns on the wafer, damaging the wafer devices. Therefore, before the organic solvent evaporates, it needs to be replaced with an inert material.

[0029] By controlling temperature and pressure, inert materials are converted into a gas-liquid mixture. In this state, the surface tension of the inert gas-liquid mixture is extremely low, resulting in extremely high solubility for organic solvents. This gas-liquid mixture is used to replace the organic solvent, minimizing the impact of surface tension on the wafer during the subsequent drying process, thereby improving wafer processing yield. This replacement process occurs within a temperature- and pressure-controlled chamber, where the gas-liquid mixture dissolves the organic solvent into a mist-like fluid state. The replaced organic solvent is then discharged through an exhaust pipe connected to the chamber.

[0030] In related technologies, there is no function to monitor in real time whether the organic solvent has been completely replaced; the replacement time can only be set using empirical values. If the empirical value is too small, the organic solvent will not be completely replaced, resulting in premature contact between the wafer pattern and air during the wafer drying process. The evaporation of the organic solvent can cause the wafer pattern to collapse or deform. If the empirical value is too large, it will lead to excessive scouring of the gas-liquid mixture, not only wasting consumables but, more seriously, prolonging the process time of this step, causing a delay in the overall processing flow and affecting the overall processing effect. Furthermore, some equipment, such as laser particle analyzers, particle imaging velocimeters, and phase Doppler particle analyzers, can only measure at the entrance of a confined space, which has significant limitations. In particular, particle imagers and phase Doppler particle analyzers have complex system structures, high requirements for the detection environment, and require complex processes such as sampling and band analysis, making real-time online measurement impossible.

[0031] Therefore, this invention primarily uses a CCD camera to image the mist-like fluid at the outlet, then analyzes the image to calculate the velocity and concentration of the mist-like fluid, monitoring whether the organic solvent has been completely replaced, thereby accurately determining whether the process has reached its endpoint. This image-based online detection system is simple in structure, easy to install, and can operate stably in complex industrial environments.

[0032] According to an embodiment of the present invention, a method for detecting mist-like fluid parameters based on wafer fabrication is provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0033] This invention utilizes a CCD camera to image the mist-like fluid within the chamber's discharge pipe and analyzes the image online to obtain the velocity and content of the organic solvent within the mist-like fluid. When the obtained parameter values ​​meet certain conditions, the replacement process is deemed complete, and a signal indicating the process endpoint is detected is sent to the overall control system, thereby precisely ending the process flow. Figure 1 As shown, a CCD camera is installed at the inlet of the chamber discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve the organic solvent in the chamber into a mist fluid. The mist fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source.

[0034] For example, in Figure 1 In this system, a CCD camera is mounted on the side wall of the chamber's exhaust pipe, and a light source is installed opposite the CCD camera. The light source illuminates the CCD camera with uniform red light at a wavelength of 680 + / - 50 nm (the CCD camera is more sensitive to this wavelength). The light source passes through a mist-like fluid in the pipe to the CCD camera's inlet. Different concentrations of the mist-like fluid produce different levels of reflection, diffraction, and obstruction of the light source. This light, passing through the mist-like fluid, passes through the lens and illuminates the CCD's inlet, causing the CCD to generate an electrical signal. The CCD control chip collects the electrical signals generated in a single image and transmits them to an analog-to-digital converter for amplification and noise reduction. After a series of analog-to-digital conversions (A / D), the electrical signals are converted into digital signals, obtaining the initial image data. After processing and transmission by the image processor, the data is stored in memory.

[0035] This embodiment provides a method for detecting mist-like fluid parameters based on wafer fabrication, which can be used in the aforementioned mobile terminals, such as mobile phones and tablet computers. Figure 2 This is a flowchart of a method for detecting mist-like fluid parameters based on wafer fabrication according to an embodiment of the present invention, as shown below. Figure 2 As shown, the process includes the following steps: Step S201: Based on the imaging space of the CCD camera, the total number of particles in the fog-like fluid within the imaging space is identified by the CCD camera, and the particles are fitted into circular particles of a preset diameter.

[0036] Specifically, this embodiment captures real-time images using a CCD camera and analyzes the captured images to obtain the velocity and concentration values ​​of particulate matter in the mist fluid. During the imaging process, the mist fluid in this embodiment can be fitted into spherical particles using established fitting methods, while simultaneously filtering out interfering information that might affect the imaging.

[0037] The replacement process is calculated to determine whether it has reached its endpoint based on the velocity and concentration of particles within a unit space, and an endpoint signal is sent to the main control mechanism. This embodiment obtains the total number of particles in the field of view, as well as the particle size and velocity distribution information, through image processing. Furthermore, this embodiment calculates the particle concentration information in the space occupied by the particles within the field of view.

[0038] In this embodiment of CCD camera imaging, the object is a plane perpendicular to the optical axis. The CCD sensor can receive the image of the object not only at its conjugate plane but also within its foreground and background depth ranges. The image acquired by the CCD camera is not a single planar image of particles, but rather an image of particles within a certain volume. Therefore, this embodiment aims to obtain the volume of this clearly imaged spatial region, and then, by combining this with the total number and diameter of particles in this spatial region, obtain the particle concentration information.

[0039] Step S202: Calculate the imaging volume of the imaging space based on the field of view length, field of view width and lens depth of the CCD camera.

[0040] Specifically, the field of view length of the CCD camera can be set to K, the field of view width to G, and the depth of field of the lens to S, and then the imaging volume V of the imaging space can be calculated. .

[0041] Step S203: Obtain the total number of image frames captured by the CCD camera within the imaging space.

[0042] Step S204: Calculate the average concentration of the mist fluid in the imaging space based on the imaging volume, total number of image frames, preset diameter, and total number of particles.

[0043] In an optional implementation, step S204 above calculates the average concentration of the mist fluid in the imaging space based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles, wherein the preset diameter is the diameter of each circular particle, and in the following formula (1), is the preset diameter of the nth particle, executed by the following formula (1): (1) in, The average concentration is... The total number of particles, For the preset diameter, The total number of frames in the image. For the imaging volume, Let n be the mist-like fluid of the nth particle.

[0044] Step S205: Obtain the distance each circular particulate mist fluid moves in the imaging area based on the exposure time.

[0045] Specifically, let the width of the particle trailing image be the diameter of the particle within the fluid, and the relative displacement between the particle and the CCD camera be the distance the particle travels during the exposure time. Assume the particle moves at a constant velocity during the exposure time, and the exposure time is T. Binarize the data of a portion of the image to identify the particle. Let the circle represent the particle diameter J, and the image length of the imaging region be L, as shown... Figure 3 As shown. The distance the particle travels during the exposure time is W, and we know that W = LJ. If the exposure time is known to be T, the particle's velocity can be calculated.

[0046] In an optional implementation, step S205, which involves obtaining the distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time, includes: Step a1: Perform grayscale processing on the particle image of each round, misty fluid particle in the imaging area based on the exposure time.

[0047] Specifically, the imaging principle of a CCD camera is that the light within the field of view is integrated over the exposure time T on the photosensitive element, and then an electrical signal is generated through charge transfer. Finally, the analog input signal (voltage or current signal) is converted into a corresponding digital output, and finally quantized into the pixel values ​​of the entire image. In this embodiment, during the grayscale processing of the image, the three primary colors of each pixel in the image can be extracted and defined as colorR, colorG, and colorB. Using a weighted averaging algorithm, the weighted value of the three channels in the color image is used as the grayscale value colorGray.

[0048] Step a2: Based on the particle image of each circular mist fluid particle in the imaging area after grayscale processing based on the exposure time, identify the movement distance of each circular mist fluid particle in the imaging area based on the exposure time.

[0049] In an optional implementation, step a1, which involves grayscale processing of the particle image, includes: Step b1: Extract the three primary color pixel features from the foggy fluid image, and calculate the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients.

[0050] Step b2: Perform grayscale processing on the particle image based on the grayscale value of the exposure time.

[0051] In an optional implementation, step b1 above, which calculates the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients, is performed by the following formula (2): (2) in, The colorGray value is the instantaneous grayscale value of the image at time T. Features of red pixels Features of green pixels Blue pixel features The first preset coefficient, This is the second preset coefficient. This is the third preset coefficient. Specifically, in practical applications, a can be 0.3, b can be 0.59, and c can be 0.11. .

[0052] In one alternative implementation, step a2, identifying the distance each spherical, mist-like fluid particle has moved across the imaging area based on exposure time, includes: Step c1: Obtain the image length of the particle image in the imaging region.

[0053] For example: The image length of the imaging region is L.

[0054] Step c2: Calculate the difference between the image length and the preset diameter to obtain the moving distance.

[0055] For example: if the image length of the imaging area is L, the preset diameter is J, and the moving distance is W, then W = LJ.

[0056] Step S206: Calculate the moving speed of each round particle-shaped mist fluid based on the exposure time and moving distance.

[0057] For example: the exposure time is T, the moving distance is W calculated above, and the moving speed is... Indicate, then .

[0058] Step S207: Calculate the average velocity of the mist fluid in the imaging space based on the total number of mist fluid particles in the imaging space and the moving speed of each round mist fluid particle.

[0059] For example: , , … , but . The average velocity of the mist-like fluid within the imaging space.

[0060] Step S208: If the average concentration of the mist fluid in the imaging space is less than or equal to the first preset threshold, and the average velocity of the mist fluid in the imaging space is greater than or equal to the second preset threshold, then confirm that the mist fluid is discharged from the discharge pipe.

[0061] Specifically, confirming the discharge of the mist fluid through the exhaust pipe indicates that the replacement of the organic solvent in the cavity is complete, meaning the organic solvent replacement process has reached its end. The first preset threshold is an empirical value of concentration obtained through multiple experiments that ensures the accurate discharge of the mist fluid through the exhaust pipe. Similarly, the second preset threshold is also an empirical value of velocity obtained through multiple experiments that ensures the accurate discharge of the mist fluid through the exhaust pipe. When the average velocity and average concentration of the mist fluid in the imaging space do not meet the above conditions, the mist fluid continues to be discharged, that is, the replacement of the organic solvent in the cavity continues.

[0062] In an optional implementation, after step S208, the method may further include: if it is confirmed that the mist fluid is discharged from the discharge pipe, then issuing an alarm notification.

[0063] By issuing alarms, the process preparation personnel can be alerted.

[0064] In this embodiment, the method for detecting mist fluid parameters based on wafer fabrication involves replacing the organic solvent with an inert material before evaporation. The replacement process occurs within a temperature- and pressure-controlled chamber, where the gas-liquid mixture dissolves the organic solvent into a mist fluid state. The replaced organic solvent is discharged through an exhaust pipe connected to the chamber. This embodiment uses a CCD camera to image the mist fluid within the chamber's exhaust pipe and analyzes the image online to obtain the average velocity and average concentration of the organic solvent within the mist fluid. When the obtained parameter values ​​meet the conditions, the replacement process is deemed complete, and a signal indicating the detection of the process endpoint is sent to the overall control system. This accurately determines whether the process step has reached its endpoint and improves detection efficiency.

[0065] This embodiment also provides a vapor-based fluid parameter detection device, which is used to implement the above embodiments and preferred embodiments. Details already described will not be repeated. As used below, the term "module" can refer to a combination of software and / or hardware that performs a predetermined function. Although the device described in the following embodiments is preferably implemented in software, hardware implementation, or a combination of software and hardware, is also possible and contemplated.

[0066] This embodiment provides a device for detecting mist-like fluid parameters based on wafer fabrication. A CCD camera is installed at the inlet of the chamber's discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve the organic solvent in the chamber into a mist-like fluid. The mist-like fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source. Figure 4 As shown, the device includes: The mist fluid particle acquisition module 41 is used to identify the total number of mist fluid particles in the imaging space based on the CCD camera. The particles are fitted into circular particles with a preset diameter. The camera imaging volume calculation module 42 is used to calculate the imaging volume of the imaging space based on the field of view length, field of view width and lens depth of field of the CCD camera. The camera image frame acquisition module 43 is used to acquire the total number of image frames captured by the CCD camera in the imaging space. The mist fluid concentration calculation module 44 is used to calculate the average concentration of mist fluid in the imaging space based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles. The particle movement distance acquisition module 45 is used to acquire the movement distance of each round particle-shaped mist fluid in the imaging area based on the exposure time. The particle movement speed calculation module 46 is used to calculate the movement speed of each round particle-shaped mist fluid based on the exposure time and movement distance. The average velocity calculation module 47 calculates the average velocity of the mist fluid in the imaging space based on the total number of particles in the mist fluid in the imaging space and the moving speed of each round mist fluid particle. The mist fluid discharge confirmation module 48 is used to confirm that the mist fluid is discharged from the discharge pipeline if the average concentration of the mist fluid in the imaging space is less than or equal to a first preset threshold and the average velocity of the mist fluid in the imaging space is greater than or equal to a second preset threshold.

[0067] In one optional implementation, the particle movement distance acquisition module 45 includes: The grayscale processing submodule is used to perform grayscale processing on the particle image of each round, granular mist fluid in the imaging area based on the exposure time. The movement distance recognition submodule is used to identify the movement distance of each circular granular mist fluid in the imaging area based on the exposure time of the particle image of each granular mist fluid in the imaging area after grayscale processing.

[0068] In one optional implementation, the grayscale processing submodule performs grayscale processing on the particle image, including: The grayscale value calculation unit is used to extract the three primary color pixel features from the foggy fluid image and calculate the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients. The grayscale processing unit is used to perform grayscale processing on the particle image based on the grayscale value of the exposure time.

[0069] In one alternative implementation, the grayscale value calculation unit calculates the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients, and executes it through the above formula (2).

[0070] In one alternative implementation, the movement distance recognition submodule identifies the movement distance of each circular, particulate mist fluid particle within the imaging area based on exposure time, including: The image length acquisition unit is used to acquire the image length of the particle image in the imaging area; The movement distance calculation unit is used to calculate the difference between the image length and the preset diameter to obtain the movement distance.

[0071] In one optional implementation, the mist fluid concentration calculation module 44 calculates the average concentration of mist fluid in the imaging space based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles, and executes it through the above formula (1).

[0072] In an optional embodiment, the wafer-based mist fluid parameter detection device of this embodiment further includes: The alarm notification module is used to issue an alarm notification if it is confirmed that the mist-like fluid is discharged from the discharge pipeline.

[0073] Further functional descriptions of the above modules and units are the same as those in the corresponding embodiments described above, and will not be repeated here.

[0074] In this embodiment, the wafer-based mist fluid parameter detection device is presented in the form of a functional unit. Here, a unit refers to an ASIC (Application Specific Integrated Circuit) circuit, a processor and memory that execute one or more software or fixed programs, and / or other devices that can provide the above functions.

[0075] This invention also provides a computer device having the above-described features. Figure 5 The device shown is a mist fluid parameter detection device based on wafer fabrication.

[0076] Please see Figure 5 , Figure 5 This is a schematic diagram of the structure of a computer device provided in an optional embodiment of the present invention, such as... Figure 5As shown, the computer device includes one or more processors 10, memory 20, and interfaces for connecting the components, including high-speed interfaces and low-speed interfaces. The components communicate with each other via different buses and can be mounted on a common motherboard or otherwise installed as needed. The processors can process instructions executed within the computer device, including instructions stored in or on memory to display graphical information of a GUI on external input / output devices (such as display devices coupled to the interfaces). In some alternative implementations, multiple processors and / or multiple buses can be used with multiple memories and multiple memory modules, if desired. Similarly, multiple computer devices can be connected, each providing some of the necessary operations (e.g., as a server array, a group of blade servers, or a multiprocessor system). Figure 5 Take a processor 10 as an example.

[0077] Processor 10 may be a central processing unit, a network processor, or a combination thereof. Processor 10 may further include a hardware chip. The hardware chip may be an application-specific integrated circuit (ASIC), a programmable logic device (PLD), or a combination thereof. The programmable logic device may be a complex programmable logic device (CAMP), a field-programmable gate array (FPGA), a general-purpose array logic (GDA), or any combination thereof.

[0078] The memory 20 stores instructions executable by at least one processor 10 to cause the at least one processor 10 to perform the method shown in the above embodiments.

[0079] The memory 20 may include a program storage area and a data storage area. The program storage area may store the operating system and applications required for at least one function; the data storage area may store data created based on the use of the computer device. Furthermore, the memory 20 may include high-speed random access memory and may also include non-transitory memory, such as at least one disk storage device, flash memory device, or other non-transitory solid-state storage device. In some alternative embodiments, the memory 20 may optionally include memory remotely located relative to the processor 10, and these remote memories may be connected to the computer device via a network. Examples of such networks include, but are not limited to, the Internet, intranets, local area networks, mobile communication networks, and combinations thereof.

[0080] The memory 20 may include volatile memory, such as random access memory; the memory may also include non-volatile memory, such as flash memory, hard disk or solid-state drive; the memory 20 may also include a combination of the above types of memory.

[0081] The computer device also includes a communication interface 30 for communicating with other devices or communication networks.

[0082] This invention also provides a computer-readable storage medium. The methods described above according to embodiments of the invention can be implemented in hardware or firmware, or implemented as computer code that can be recorded on a storage medium, or implemented as computer code downloaded over a network and originally stored on a remote storage medium or a non-transitory machine-readable storage medium and then stored on a local storage medium. Thus, the methods described herein can be processed by software stored on a storage medium using a general-purpose computer, a dedicated processor, or programmable or dedicated hardware. The storage medium can be a magnetic disk, optical disk, read-only memory, random access memory, flash memory, hard disk, or solid-state drive, etc.; further, the storage medium can also include combinations of the above types of memory. It is understood that computers, processors, microprocessor controllers, or programmable hardware include storage components capable of storing or receiving software or computer code, which, when accessed and executed by the computer, processor, or hardware, implements the methods shown in the above embodiments.

[0083] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and all such modifications and variations fall within the scope defined by the appended claims.

Claims

1. A method for detecting mist-like fluid parameters based on wafer fabrication, characterized in that, A CCD camera is installed at the inlet of the chamber discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve the organic solvent in the chamber into a mist fluid. The mist fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source. The method includes: Based on the imaging space of the CCD camera, the total number of particles of the mist fluid in the imaging space is identified by the CCD camera, and the particles are fitted into circular particles of a preset diameter. The imaging volume of the imaging space is calculated based on the field of view length, field of view width, and lens depth of field of the CCD camera. Obtain the total number of image frames captured by the CCD camera within the imaging space; Based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles, the average concentration of the mist fluid within the imaging space is calculated. The distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time is obtained; Based on the exposure time and the moving distance, the moving speed of each circular particle of the mist fluid is calculated; The average velocity of the mist fluid in the imaging space is calculated based on the total number of particles in the mist fluid within the imaging space and the moving speed of each spherical particle of the mist fluid. If the average concentration of the mist fluid in the imaging space is less than or equal to a first preset threshold, and the average velocity of the mist fluid in the imaging space is greater than or equal to a second preset threshold, then the organic solvent replacement process in the cavity is confirmed to have reached its endpoint.

2. The method according to claim 1, characterized in that, The process of obtaining the distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time includes: The particle image of each circular, mist-like fluid particle in the imaging area is processed in grayscale based on the exposure time; Based on the grayscale processed particle image of each circular mist fluid in the imaging area based on the exposure time, the movement distance of each circular mist fluid particle in the imaging area based on the exposure time is identified.

3. The method according to claim 2, characterized in that, Grayscale processing of the particle image includes: Extract the three primary color pixel features from the foggy fluid image, and calculate the grayscale value of the foggy fluid image based on the exposure time based on the three primary color pixel features and preset coefficients; The particle image is processed in grayscale based on the grayscale value of the exposure time.

4. The method according to claim 3, characterized in that, The calculation of the grayscale value of the foggy fluid image based on the exposure time, based on the three primary color pixel features and preset coefficients, is performed by the following formula: ； Among them, the For the grayscale value, the The red pixel feature, the The green pixel feature, the The blue pixel feature, the The first preset coefficient, the The second preset coefficient, the This is the third preset coefficient.

5. The method according to claim 2, characterized in that, The identification of the distance each spherical, mist-like fluid particle moves across the imaging area based on exposure time includes: Obtain the image length of the particle image over the imaging region; The moving distance is obtained by calculating the difference between the image length and the preset diameter.

6. The method according to claim 1, characterized in that, Based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles, the average concentration of the mist-like fluid within the imaging space is calculated using the following formula: ； in, The average concentration is... The total number of particles, The preset diameter, The total number of frames in the image. The imaging volume is... The mist-like fluid is the nth particle.

7. The method according to claim 1, characterized in that, The method further includes: If it is confirmed that the organic solvent replacement process in the chamber has reached its end, an alarm will be issued.

8. A device for detecting mist-like fluid parameters based on wafer fabrication, characterized in that, A CCD camera is installed at the inlet of the chamber discharge pipe, and a light source is installed on the opposite side of the CCD camera. Under temperature and pressure control, a gas-liquid mixture is used to dissolve the organic solvent in the chamber into a mist fluid. The mist fluid discharged from the chamber passes through the inlet of the discharge pipe and is then imaged on the CCD camera by the light source. The device includes: A mist fluid particle acquisition module is used to identify the total number of mist fluid particles in the imaging space of the CCD camera, based on the imaging space of the CCD camera, and the particles are fitted into circular particles with a preset diameter. The camera imaging volume calculation module is used to calculate the imaging volume of the imaging space based on the field of view length, field of view width and lens depth of the CCD camera. The camera image frame acquisition module is used to acquire the total number of image frames captured by the CCD camera within the imaging space; The mist fluid concentration calculation module is used to calculate the average concentration of the mist fluid in the imaging space based on the imaging volume, the total number of image frames, the preset diameter, and the total number of particles. The particle movement distance acquisition module is used to acquire the movement distance of each round particle of the mist fluid in the imaging area based on the exposure time; The particle movement speed calculation module is used to calculate the movement speed of each round particle of the mist fluid based on the exposure time and the movement distance. The average particle velocity calculation module calculates the average velocity of the mist fluid in the imaging space based on the total number of particles in the mist fluid within the imaging space and the moving velocity of each round particle of the mist fluid. The mist fluid discharge confirmation module is used to confirm that the organic solvent replacement process in the cavity has reached its end if the average concentration of the mist fluid in the imaging space is less than or equal to a first preset threshold and the average velocity of the mist fluid in the imaging space is greater than or equal to a second preset threshold.

9. A computer device, characterized in that, include: A memory and a processor are interconnected, the memory storing computer instructions, and the processor executing the computer instructions to perform the method for detecting mist-like fluid parameters based on wafer fabrication as described in any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions for causing the computer to execute the method for detecting mist-like fluid parameters based on wafer fabrication as described in any one of claims 1 to 7.

Images