Double-rotation and high-yield switching control method of ellipsometer, single-chip microcomputer and system

Abstract

The application discloses a kind of ellipsometer's double rotation and high yield switching control method, single-chip microcontroller and system, its method includes the following steps: receiving motion mode switching instruction;When detecting that motion mode switching instruction is double rotation mode switching instruction, then according to preset first rotational speed condition control adjustment slow motor and the rotational speed of fast motor, and based on the light intensity information of the light intensity information of the measured sample that slow motor rotational speed adjustment corresponding encoder Z sense signal control detector measures;When detecting that the motion mode switching instruction is high yield mode switching instruction, then according to preset second rotational speed condition control adjustment slow motor and the rotational speed of fast motor, and based on the light intensity information of the light intensity information of the measured sample that slow motor rotational speed adjustment corresponding encoder Z sense signal control detector measures;Therefore, through flexible switching motion mode, realize one machine two uses, to adapt to current real-time measurement demand, increase the application scene of instrument, improve the economic benefit of Mueller matrix ellipsometer.

Description

Technical Field

[0001] This invention relates to the field of spectral ellipsometer technology, and in particular to a dual-rotation and high-yield switching control method, microcontroller and system for an ellipsometer. Background Technology

[0002] An ellipsometer is an optical measuring instrument used to detect the thickness, optical constants, and microstructure of thin films. Its high measurement accuracy, suitability for ultrathin films, non-contact nature (no damage to the sample), and lack of vacuum requirement make it a highly attractive measuring instrument.

[0003] The basic structure of the Mueller matrix ellipsometer based on a dual rotation compensator is shown in the attached figure. Figure 1 As shown, the system includes a light source, collimating lens, polarizer, slow-speed motor, first compensator, sample under test, second compensator, fast-speed motor, analyzer, converging lens, spectrometer, etc. It can obtain all 15 normalized Mueller matrix elements of the sample under test in a single measurement, making it suitable for demanding thin film measurement scenarios. However, in actual production applications, due to motor limitations and speed ratio requirements, the measurement speed of the entire system must be based on the slow-speed motor. Existing single-rotation compensator type spectroellipsometrists obtain less light intensity information, and cannot acquire all the optical information of the sample in a single measurement. However, because they only have one motor with a faster speed and no speed ratio limitation, the measurement speed is faster.

[0004] Therefore, in order to improve the measurement speed (high-yield mode) and meet the high-precision measurement requirements of dual rotation (dual rotation mode), a control scheme needs to be designed to allow the Mueller matrix ellipsometer to flexibly switch between dual rotation and high-yield modes, so as to meet the high precision and high-yield requirements of actual industrial needs. Summary of the Invention

[0005] This invention provides a dual-rotation and high-yield switching control method, microcontroller, and system for an ellipsometer. By flexibly switching motion modes, it achieves dual-purpose functionality to adapt to current real-time measurement needs, increasing the instrument's application scenarios and improving the economic benefits of the Mueller matrix ellipsometer.

[0006] Firstly, a method for switching between dual rotation and high-yield modes of an ellipsometer is provided, applied to a microcontroller, comprising the following steps:

[0007] Receive motion mode switching instructions;

[0008] When the motion mode switching command is detected to be a dual rotation mode switching command, the speed of the slow motor and the fast motor are controlled and adjusted according to the preset first speed condition, and the detector is controlled to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the speed adjustment of the slow motor.

[0009] When the motion mode switching command is detected to be a high-yield mode switching command, the speed of the slow motor and the fast motor are controlled and adjusted according to the preset second speed condition, and the detector is controlled to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the slow motor speed adjustment.

[0010] According to the first aspect, in a first possible implementation of the first aspect, the step of "when the motion mode switching command is detected to be a dual rotation mode switching command, the speeds of the slow motor and the fast motor are controlled and adjusted according to a preset first speed condition" specifically includes the following steps:

[0011] When the motion mode switching command is detected to be a dual rotation mode switching command, the slow motor is controlled to stop moving and then run at a preset low speed, and the fast motor is controlled to stop moving and then run at a preset high speed.

[0012] According to the first aspect, in the second possible implementation of the first aspect, the step of "when the motion mode switching command is detected to be a high-yield mode switching command, the speeds of the slow motor and the fast motor are controlled and adjusted according to the preset second speed condition" specifically includes the following steps:

[0013] When the motion mode switching command is detected to be a high-yield mode switching command, the fast motor is controlled to stop moving, and the slow motor is controlled to stop moving and then run at a preset high speed.

[0014] In the first possible implementation of the first aspect, and in the third possible implementation of the first aspect, the ratio of the preset high-speed rotational speed to the preset low-speed rotational speed is 5:1.

[0015] According to the first aspect, in the fourth possible implementation of the first aspect, the step of "controlling the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the slow motor speed adjustment" specifically includes the following steps:

[0016] When the slow motor speed adjustment is detected, the encoder Z-phase signal corresponding to the current speed of the slow motor is obtained, and a timer is started at the same time to receive the encoder Z-phase signal.

[0017] When the timer detects that the encoder Z-phase signal has finished receiving, a trigger pulse is sent to the detector, and the detector is controlled to measure the light intensity information of the sample under test according to the trigger pulse.

[0018] Secondly, a microcontroller is provided, including:

[0019] The instruction receiving module is used to receive motion mode switching instructions;

[0020] A dual-rotation mode module, communicatively connected to the instruction receiving module, is used to, when detecting a dual-rotation mode switching instruction, control and adjust the speeds of the slow motor and the fast motor according to a preset first speed condition, and control the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjusted slow motor speed; and,

[0021] The high-yield mode module is communicatively connected to the instruction receiving module. When the motion mode switching instruction is detected to be a high-yield mode switching instruction, it controls and adjusts the speed of the slow motor and the fast motor according to the preset second speed condition, and controls the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjusted speed of the slow motor.

[0022] Thirdly, a dual-rotation and high-yield mode switching control system for an ellipsometer is provided, including:

[0023] The microcontroller is used to receive motion mode switching commands and issue commands to regulate the speed of slow and fast motors.

[0024] The motion controller is communicatively connected to the microcontroller and is used to control the slow motor driver to adjust the speed of the slow motor and the fast motor driver to adjust the speed of the fast motor according to the instructions issued by the microcontroller to regulate the speed of the slow motor and the fast motor driver.

[0025] A slow-speed motor driver, communicatively connected to the motion controller, is used to adjust the speed of the slow-speed motor according to a preset first speed condition based on a dual-rotation mode switching command of the motion mode switching command, and to adjust the speed of the slow-speed motor according to a preset second speed condition based on a high-yield mode switching command of the motion mode switching command; and,

[0026] A fast motor driver, which is communicatively connected to the motion controller, is used to adjust the speed of the fast motor according to a preset first speed condition based on a dual rotation mode switching command of the motion mode switching command, and to adjust the speed of the fast motor according to a preset second speed condition based on a high-yield mode switching command of the motion mode switching command.

[0027] The microcontroller is used to control the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjustment of the slow motor speed.

[0028] Compared with existing technologies, the advantages of this invention are as follows: When the actual producer needs to switch the system to a dual-rotation mode for high-precision measurement, only a switching command needs to be sent to the microcontroller. The microcontroller controls and adjusts the speeds of the slow and fast motors according to a preset first speed condition. When the system needs to be switched to a high-yield mode for high-precision measurement, the speeds of the slow and fast motors are controlled and adjusted according to a preset second speed condition. Finally, based on the encoder Z-phase signal corresponding to the adjusted slow motor speed, the detector is controlled to measure the light intensity information of the sample under test. Therefore, this flexible switching control method only requires sending a switching command to the microcontroller, and the control system can immediately switch the control flow and immediately report back the current mode of the system. Thus, by flexibly switching motion modes, a single machine can be used for two purposes to adapt to the current real-time measurement needs, increasing the application scenarios of the instrument and improving the economic benefits of the Mueller matrix ellipsometer. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of the Mueller matrix ellipsometer;

[0030] Figure 2 This is a flowchart illustrating an embodiment of a dual-rotation and high-yield mode switching control method for an ellipsometer according to the present invention.

[0031] Figure 3 This is a schematic diagram of the dual-rotation mode control flow of the Mueller matrix ellipsomer of the present invention;

[0032] Figure 4 This is a schematic diagram of the high-yield mode control process of the Mueller matrix ellipsomer of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of a single-chip microcomputer according to the present invention;

[0034] Figure 6 This is a graph showing the real-time speed change of the fast motor in the high-yield mode of the dual-rotation mode switching of the Mueller matrix ellipsometer of the present invention.

[0035] Figure 7 This is a graph showing the real-time speed change of the slow motor in the high-yield mode of the dual-rotation mode switching of the Mueller matrix elliptice of the present invention.

[0036] Figure 8 This is a graph showing the real-time speed change of the slow motor in the high-yield mode switching dual-rotation mode of the Mueller matrix ellipsomer of the present invention.

[0037] Figure 9 This is a graph showing the real-time speed variation of the fast motor in the high-yield mode switching dual-rotation mode of the Mueller matrix ellipsomer of this invention.

[0038] In the diagram, 1. Light source; 2. Collimating lens; 3. Polarizer; 4. Slow-speed motor; 5. First compensator; 6. Test sample; 7. Second compensator; 8. Fast-speed motor; 9. Analyzer; 10. Converging lens; 11. Detector. Detailed Implementation

[0039] Referring now to specific embodiments of the invention, examples of which are illustrated in the accompanying drawings. Although the invention will be described in conjunction with specific embodiments, it will be understood that it is not intended to limit the invention to the described embodiments. Rather, it is intended to cover variations, modifications, and equivalents included within the spirit and scope of the invention as defined by the appended claims. It should be noted that the method steps described herein can be implemented by any functional block or functional arrangement, and any functional block or functional arrangement can be implemented as a physical entity or a logical entity, or a combination of both.

[0040] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0041] Note: The examples described below are merely specific examples and are not intended to limit the embodiments of the present invention to the specific steps, values, conditions, data, order, etc. Those skilled in the art can utilize the concept of the present invention to construct more embodiments not mentioned herein by reading this specification.

[0042] See Figure 2 As shown, this embodiment of the invention provides a method for switching between dual rotation and high-yield modes of an ellipsometer, applied in a microcontroller, including the following steps:

[0043] S100 receives motion mode switching commands;

[0044] S200, when the motion mode switching command is detected to be a dual rotation mode switching command, the speed of the slow motor and the fast motor are controlled and adjusted according to the preset first speed condition, and the encoder Z-phase signal corresponding to the adjustment of the slow motor speed is used to control the detector to measure the light intensity information of the sample under test.

[0045] S300, when the motion mode switching command is detected to be a high-yield mode switching command, the speed of the slow motor and the fast motor are controlled and adjusted according to the preset second speed condition, and the encoder Z-phase signal corresponding to the adjustment of the slow motor speed is used to control the detector to measure the light intensity information of the sample under test.

[0046] Specifically, in this embodiment, see Figure 1 As shown, PC r1 SC r2Taking the optical system of the dual rotation and high-yield mode switching system of the Mueller matrix ellipsometer with configuration A as an example, P, C, S, and A represent polarizer 3, first compensator 5 / second compensator 7, sample under test 6, and analyzer 9, respectively, and the subscript r indicates rotating optical element.

[0047] When the actual producer needs to switch the system to a dual-rotation mode for high-precision measurement, they only need to send a switching command to the microcontroller. The microcontroller then controls and adjusts the speeds of the slow and fast motors according to a preset first speed condition. When switching the system to a high-yield mode for high-precision measurement, the microcontroller controls and adjusts the speeds of the slow and fast motors according to a preset second speed condition. Finally, based on the encoder Z-phase signal corresponding to the adjusted slow motor speed, the detector is controlled to measure the light intensity information of the sample under test. Therefore, this flexible switching control method only requires sending a switching command to the microcontroller, and the control system can immediately switch the control flow and immediately report back the current mode of the system. Thus, by flexibly switching motion modes, a single machine can serve two purposes to adapt to current real-time measurement needs, increasing the application scenarios of the instrument and improving the economic benefits of the Mueller matrix ellipsometer.

[0048] Preferably, in another embodiment of this application, the step "S200, when the motion mode switching command is detected to be a dual rotation mode switching command, the speeds of the slow motor and the fast motor are controlled and adjusted according to the preset first speed condition" specifically includes the following steps:

[0049] When the motion mode switching command is detected to be a dual rotation mode switching command, the slow motor is controlled to stop moving and then run at a preset low speed, and the fast motor is controlled to stop moving and then run at a preset high speed.

[0050] Preferably, in another embodiment of this application, the step of "controlling the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the slow motor speed adjustment" specifically includes the following steps:

[0051] When the slow motor speed adjustment is detected, the encoder Z-phase signal corresponding to the current speed of the slow motor is obtained, and a timer is started at the same time to receive the encoder Z-phase signal.

[0052] When the timer detects that the encoder Z-phase signal has finished receiving, a trigger pulse is sent to the detector, and the detector is controlled to measure the light intensity information of the sample under test according to the trigger pulse.

[0053] The ratio of the preset high-speed rotational speed to the preset low-speed rotational speed is 5:1.

[0054] Specifically, in this embodiment, see also Figure 3As shown, after the Mueller matrix ellipsometry is turned on and the motion controller, slow motor driver, and fast motor driver are successfully initialized, the motion controller starts running the program for the power-off holding zone. The slow and fast motors begin to enter the homing mode. After the homing is completed, they immediately enter the dual rotation control mode. The slow and fast motors accelerate until the phase angle difference between the encoder Home positions of the two motors reaches the preset value. At this time, the speed of the slow motor is 1ω and the speed of the fast motor is 5ω. Then the slow and fast motors continue to run at the aforementioned speeds.

[0055] The encoder Z-phase signal corresponding to the slow-speed motor is introduced into the microcontroller. After receiving the encoder Z-phase signal of the slow-speed motor, the microcontroller immediately turns on the crystal oscillator timing (timer TIM1). After timer TIM1 finishes timing, the microcontroller sends a trigger pulse, which is sent to the detector to collect the light intensity signal and then outputs the collected information.

[0056] At the same time, the motion controller outputs a low-level signal to the output port of the slow motor driver. After the microcontroller obtains the low-level signal, it converts it into the current mode information: dual rotation mode output.

[0057] Preferably, in another embodiment of this application, the step "S300, when the motion mode switching command is detected to be a high-productivity mode switching command, then the speed of the slow motor and the fast motor is controlled and adjusted according to the preset second speed condition" specifically includes the following steps:

[0058] When the motion mode switching command is detected to be a high-productivity mode switching command, the fast motor is controlled to stop moving, and the slow motor is controlled to stop moving and then run at a preset high speed.

[0059] Specifically, in this embodiment, see also Figure 4 As shown, when the actual producer needs to switch the system to high-yield mode, they only need to send a switching command to the microcontroller. The specific operation is as follows:

[0060] After receiving the switching command, the microcontroller immediately sends a high-level signal to the slow motor driver. Upon receiving the signal, the motion controller immediately stops the movement of both the slow and fast motors and simultaneously releases the motor synchronization control state. Then, both motors immediately enter the homing mode. After homing is completed, the fast motor stops at the homing point and remains stationary, while the slow motor immediately accelerates to the preset speed 5ω and maintains high-speed operation.

[0061] At the same time, the encoder Z-phase signal corresponding to the slow motor is introduced into the microcontroller. After receiving the encoder Z-phase signal corresponding to the slow motor, the microcontroller immediately turns on the crystal oscillator timing (timer TIM1). After timer TIM1 finishes timing, the microcontroller sends a trigger pulse, which is sent to the detector to collect the light intensity signal and then outputs the collected information.

[0062] At the same time, the motion controller outputs a high-level signal, which is immediately converted into the current mode information after reaching the microcontroller: high productivity mode.

[0063] See also Figure 5 As shown, this embodiment of the invention also provides a microcontroller, including:

[0064] The instruction receiving module is used to receive motion mode switching instructions;

[0065] A dual-rotation mode module, communicatively connected to the instruction receiving module, is used to, when detecting a dual-rotation mode switching instruction, control and adjust the speeds of the slow motor and the fast motor according to a preset first speed condition, and control the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjusted slow motor speed; and,

[0066] The high-yield mode module is communicatively connected to the instruction receiving module. When the motion mode switching instruction is detected to be a high-yield mode switching instruction, it controls and adjusts the speed of the slow motor and the fast motor according to the preset second speed condition, and controls the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjusted speed of the slow motor.

[0067] When the actual producer needs to switch the system to a dual-rotation mode for high-precision measurement, they only need to send a switching command to the microcontroller. The microcontroller then controls and adjusts the speeds of the slow and fast motors according to a preset first speed condition. When switching the system to a high-yield mode for high-precision measurement, the microcontroller controls and adjusts the speeds of the slow and fast motors according to a preset second speed condition. Finally, based on the encoder Z-phase signal corresponding to the adjusted slow motor speed, the detector is controlled to measure the light intensity information of the sample under test. Therefore, this flexible switching control method only requires sending a switching command to the microcontroller, and the control system can immediately switch the control flow and immediately report back the current mode of the system. Thus, by flexibly switching motion modes, a single machine can serve two purposes to adapt to current real-time measurement needs, increasing the application scenarios of the instrument and improving the economic benefits of the Mueller matrix ellipsometer.

[0068] Specifically, this embodiment corresponds one-to-one with the above method embodiments. The functions of each module have been described in detail in the corresponding method embodiments, so they will not be repeated here.

[0069] This invention also provides a dual-rotation and high-yield mode switching control system for an ellipsometer, comprising:

[0070] The microcontroller is used to receive motion mode switching commands and issue commands to regulate the speed of slow and fast motors.

[0071] The motion controller is communicatively connected to the microcontroller and is used to control the slow motor driver to adjust the speed of the slow motor and the fast motor driver to adjust the speed of the fast motor according to the instructions issued by the microcontroller to regulate the speed of the slow motor and the fast motor driver.

[0072] A slow-speed motor driver, communicatively connected to the motion controller, is used to adjust the speed of the slow-speed motor according to a preset first speed condition based on a dual-rotation mode switching command of the motion mode switching command, and to adjust the speed of the slow-speed motor according to a preset second speed condition based on a high-yield mode switching command of the motion mode switching command; and,

[0073] A fast motor driver, which is communicatively connected to the motion controller, is used to adjust the speed of the fast motor according to a preset first speed condition based on a dual rotation mode switching command based on the motion mode switching command, and to adjust the speed of the fast motor according to a preset second speed condition based on a high-yield mode switching command based on the motion mode switching command.

[0074] The microcontroller is used to control the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjustment of the slow motor speed.

[0075] Specifically, in this embodiment, the control part of the Mueller matrix ellipsometer mainly includes a microcontroller, a motion controller, a slow motor driver, and a fast motor driver; the motion controller is the master stack, the slow motor driver is the slave stack 1, and the fast motor driver is the slave stack 2, and the communication between them adopts the EtherCAT communication protocol.

[0076] The specific control methods are as follows:

[0077] The motion controller, serving as the main stack of the system, employs synchronous control methods, writing the control program into the power-off retention area to ensure that the control system can maintain control without external interference. This control system is programmed with a default dual-rotation mode.

[0078] Through negative feedback regulation control, the phase angle difference between the encoder Home positions of the slow motor and the fast motor is maintained at a preset value, and the speeds of the slow motor and the fast motor are 1ω and 5ω respectively. The Z-phase pulse signal of the encoder corresponding to the slow motor is introduced into the microcontroller. After the microcontroller receives the encoder Z-phase pulse signal, it simultaneously starts timer TIM1. After timer TIM1 finishes counting, the microcontroller sends a trigger pulse, which is sent to the detector to collect the light intensity signal and then outputs the collected information. By adjusting the value of timer TIM1, the timing of the detector's signal collection is determined, thus realizing the CS1 debugging of the first compensator 5 of the ellipsometer system parameters. By adjusting the initial parameter values ​​of motion control, the rotation angle of the fast motor when the detector collects the signal is determined, thus realizing the CS2 debugging of the second compensator 5 of the ellipsometer system parameters. The input / output port of the slow motor driver is opened, and the motion controller outputs a low-level signal to the output port. The signal is sent to the microcontroller, and the microcontroller converts the received low-level information into the current mode information: dual-rotation mode output.

[0079] At this point, after issuing a mode switching command to the microcontroller (switching from dual-rotation mode to high-yield mode), the microcontroller sends a high-level signal to the slow-speed motor driver. Upon receiving the signal, the motion controller immediately issues a switching command: desynchronizing the slow-speed and fast-speed motors. It then controls the fast-speed motor to immediately stop, subsequently activating the homing mode and stopping at the origin position. Figure 6 The graph shows the real-time speed change curve of the fast motor when switching modes; the slow motor is controlled to stop immediately and then immediately move at the preset high speed, as shown. Figure 7 The graph shows the real-time speed change curve of the slow motor during mode switching. The motion controller then sends the current motion mode to the microcontroller via a high-level signal. The microcontroller synchronously changes the control mode, and the entire control system successfully switches to high-productivity mode.

[0080] Through negative feedback regulation control, the slow-speed motor maintains its preset high-speed motion, while the fast-speed motor is enabled and stops at its origin. The encoder Z-phase pulse signal corresponding to the slow-speed motor is introduced into the microcontroller. After the microcontroller receives the encoder Z-phase pulse signal, it simultaneously starts timer TIM1. After timer TIM1 finishes counting, the microcontroller sends a trigger pulse to the detector to collect the light intensity signal and then outputs the collected information. Releasing the input / output port of the slow-speed motor driver causes the motion controller to output a high-level signal to the output port, which is then sent to the microcontroller. Simultaneously, the microcontroller converts the received high-level information into the current mode information: high-yield mode output. The microcontroller also sends a high-level signal to the slow-speed motor driver through its input terminal.

[0081] At this point, after the microcontroller sends a mode switching command (from high-yield mode to dual-rotation mode), it sends a low-level signal to the slow-speed motor driver. Upon receiving the signal, the motion controller immediately issues a switching command: controlling the slow-speed motor to stop immediately and then entering the homing mode, as shown below. Figure 8 The graph shows the real-time speed change curve of the slow motor during mode switching; the fast motor is immediately controlled to enter the homing mode. After both motors have completed their homing motion, the motion controller couples the two motors and then synchronously controls them to enter a dual-rotation state, as shown. Figure 9 The graph shows the real-time speed change curve of the motor during the mode switching. Then, the motion control system sends the current motion mode to the microcontroller via a low-level signal. The microcontroller synchronously changes the control mode, and the entire control system successfully switches to dual-rotation mode.

[0082] Specifically, this embodiment corresponds one-to-one with the above method embodiments. The functions of each module have been described in detail in the corresponding method embodiments, so they will not be repeated here.

[0083] Based on the same inventive concept, embodiments of this application also provide a computer-readable storage medium storing a computer program thereon, which, when executed by a processor, implements all or part of the method steps of the above method.

[0084] The present invention can implement all or part of the processes in the above methods, or it can be accomplished by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable file, or some intermediate form. The computer-readable medium can include: any entity or device capable of carrying computer program code, recording media, USB flash drive, portable hard drive, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signals, telecommunication signals, and software distribution media, etc. It should be noted that the content included in the computer-readable medium can be appropriately added or removed according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable medium does not include electrical carrier signals and telecommunication signals.

[0085] Based on the same inventive concept, embodiments of this application also provide an electronic device, including a memory and a processor. The memory stores a computer program that runs on the processor. When the processor executes the computer program, it implements all or part of the method steps described above.

[0086] The processor can be a Central Processing Unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor can be a microprocessor or any conventional processor. The processor is the control center of the computer device, connecting all parts of the computer device through various interfaces and lines.

[0087] Memory can be used to store computer programs and / or modules. The processor performs various functions of the computer device by running or executing the computer programs and / or modules stored in the memory, and by accessing data stored in the memory. Memory can primarily include a program storage area and a data storage area. The program storage area can store the operating system and at least one application program required for a function (e.g., sound playback, image playback, etc.); the data storage area can store data created based on the use of the mobile phone (e.g., audio data, video data, etc.). Furthermore, memory can include high-speed random access memory, and can also include non-volatile memory, such as hard disks, RAM, plug-in hard disks, SmartMedia Cards (SMC), Secure Digital (SD) cards, Flash Cards, at least one disk storage device, flash memory device, or other volatile solid-state storage devices.

[0088] Those skilled in the art will understand that embodiments of the present invention can be provided as methods, systems, servers, or computer program products. Therefore, the present invention can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage and optical storage) containing computer-usable program code.

[0089] This invention is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), servers, and computer program products according to embodiments of the invention. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0090] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0091] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0092] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A method for switching between dual rotation and high-yield modes of an ellipsometer, applied in a microcontroller, characterized in that, Includes the following steps: Receive motion mode switching instructions; When the motion mode switching command is detected to be a dual rotation mode switching command, the slow motor is controlled to stop moving and then run at a preset low speed, and the fast motor is controlled to stop moving and then run at a preset high speed. Based on the encoder Z-phase signal corresponding to the adjustment of the slow motor speed, the detector is controlled to measure the light intensity information of the sample under test. When the motion mode switching command is detected to be a high-yield mode switching command, the fast motor is controlled to stop moving, and the slow motor is controlled to stop moving and then run at a preset high speed. Based on the encoder Z-phase signal corresponding to the slow motor speed adjustment, the detector is controlled to measure the light intensity information of the sample under test.

2. The method for switching between dual rotation and high-yield modes of an ellipsometer as described in claim 1, characterized in that, The ratio of the preset high-speed rotational speed to the preset low-speed rotational speed is 5:

1.

3. The method for switching between dual rotation and high-yield modes of an ellipsometer as described in claim 1, characterized in that, The step of controlling the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the slow motor speed adjustment specifically includes the following steps: When the slow motor speed adjustment is detected, the encoder Z-phase signal corresponding to the current speed of the slow motor is obtained, and a timer is started at the same time to receive the encoder Z-phase signal. When the timer detects that the encoder Z-phase signal has finished receiving, a trigger pulse is sent to the detector, and the detector is controlled to measure the light intensity information of the sample under test according to the trigger pulse.

4. A microcontroller, characterized in that, include: The instruction receiving module is used to receive motion mode switching instructions; The dual-rotation mode module is communicatively connected to the instruction receiving module. When the motion mode switching instruction is detected to be a dual-rotation mode switching instruction, it controls the slow motor to stop moving and then run at a preset low speed, and controls the fast motor to stop moving and then run at a preset high speed. Based on the encoder Z-phase signal corresponding to the adjustment of the slow motor speed, it controls the detector to measure the light intensity information of the sample under test. as well as, The high-yield mode module is communicatively connected to the instruction receiving module. When the motion mode switching instruction is detected to be a high-yield mode switching instruction, it controls the fast motor to stop moving and controls the slow motor to stop moving and then run at a preset high-speed speed. Based on the encoder Z-phase signal corresponding to the slow motor speed adjustment, it controls the detector to measure the light intensity information of the sample under test.

5. A dual-rotation and high-yield mode switching control system for an ellipsometer, characterized in that, include: The microcontroller is used to receive motion mode switching commands and issue commands to regulate the speed of slow and fast motors. The motion controller is communicatively connected to the microcontroller and is used to control the slow motor driver to adjust the speed of the slow motor and the fast motor driver to adjust the speed of the fast motor according to the instructions issued by the microcontroller to regulate the speed of the slow motor and the fast motor driver. A slow-speed motor driver, communicatively connected to the motion controller, is used to control the slow-speed motor to stop moving and then run at a preset low speed based on a dual-rotation mode switching command based on the motion mode switching command, and to control the slow-speed motor to stop moving and then run at a preset high speed based on a high-yield mode switching command based on the motion mode switching command; and, A fast motor driver is communicatively connected to the motion controller and is used to control the fast motor to stop moving and then run at a preset high speed after stopping, based on a dual rotation mode switching command of the motion mode switching command, and to control the fast motor to stop moving based on a high productivity mode switching command of the motion mode switching command. The microcontroller is used to control the detector to measure the light intensity information of the sample under test based on the encoder Z-phase signal corresponding to the adjustment of the slow motor speed.

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