Method for mode conversion by femtosecond laser direct writing offset butt joint waveguide and application thereof
CN117031628BActive Publication Date: 2026-11-03JILIN UNIVERSITY
Patent Information
- Application Number
- CN202311017448.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-08-14
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2043-08-14
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Figure CN117031628B_ABST
Abstract
The application discloses a mode conversion method and application of femtosecond laser direct writing offset butt joint waveguide, and belongs to the technical field of laser processing. The method directly butts joint a single-mode waveguide and a multi-mode waveguide, and solves the mode conversion problem during waveguide direct writing by using a femtosecond laser. The main principle is that when a single-mode light beam is incident into the multi-mode waveguide by offsetting the center position or transmission direction of the multi-mode waveguide, a high-order mode is excited in the multi-mode waveguide, and low-loss mode conversion can be realized by changing the incident position or angle of the single-mode light. The single-mode waveguide and the multi-mode waveguide are butted, the positional relationship between the single-mode waveguide and the multi-mode waveguide during butt joint is changed, the original single-mode transmission light beam in the single-mode waveguide is converted into a high-order mode in the multi-mode waveguide, and through fine control of the processing parameters of the single-mode waveguide and the multi-mode waveguide and the position during butt joint, the insertion loss of the waveguide device can be effectively reduced, on-chip low-loss, low-cost and small area occupation mode conversion is realized.
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Citation Information
Patent Citations
Method for improving coupling efficiency through femtosecond laser direct writing waveguide coupling region
CN112548323A
Optical waveguide with mode stabilizer
JP2008287169A
