一种高可靠性高速直调DFB激光器及其制作方法
By employing Ar+ ion cavity surface cleaning and Si dielectric film passivation techniques, combined with an InGaAsP mode extension layer, the oxidation and divergence angle problems of high-speed direct-modulation DFB lasers in the InGaAlAs/InP material system were solved, resulting in a laser with high reliability and high coupling efficiency, suitable for mass production.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- THE 44TH INST OF CHINA ELECTRONICS TECH GROUP CORP
- Filing Date
- 2023-08-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing high-speed direct-modulation DFB lasers based on InGaAlAs/InP materials suffer from material oxidation, resulting in poor reliability and a large vertical divergence angle, making it difficult to achieve high reliability and high coupling efficiency.
Ar+ ion cavity cleaning and Si dielectric film passivation technology are used, combined with an InGaAsP mode extension layer to reduce the divergence angle. In the cavity surface coating process, Si passivation film and high reflectivity film layer are used to improve reliability.
It effectively solved the problem of material oxidation, improved the reliability of the laser and reduced the vertical divergence angle, making it suitable for mass production and realizing a high-reliability, high-speed, directly modulated DFB laser.
Smart Images
Figure CN117039613B_ABST