Hybrid mask rods and mask frame assemblies using hybrid mask rods

Abstract

A hybrid mask rod and a mask frame assembly employing the hybrid mask rod are provided. The mask frame assembly includes a mask frame and a mask rod, the mask rod comprising: a first mask rod extending in a first direction; a second mask rod extending in a second direction intersecting the first direction; and a plurality of third mask rods connected to the first and second mask rods, the at least one first mask rod, the at least one second mask rod, and the plurality of third mask rods defining a plurality of deposition regions, wherein the first mask rod includes a first rod and a second rod disposed on the first rod, and at least one of the first and second rods includes a partial recess in which the first mask rod is connected to the second mask rod.

Description

[0001] This application is a divisional application of the invention patent application filed on September 20, 2019, with application number 201910892103.6 and invention title "Hybrid Mask Rod and Mask Frame Assembly Using Hybrid Mask Rod". Technical Field

[0002] One or more embodiments relate to a hybrid mask rod, and more specifically, to a mask frame assembly employing the hybrid mask rod. Background Technology

[0003] Typically, display devices can be used in mobile devices such as smartphones, laptops, digital cameras, camcorders, personal digital assistants, notebook computers, or tablet computers, or in electronic devices such as desktop computers, televisions, billboards, exhibition displays, vehicle dashboards, or head-up displays (HUDs).

[0004] Various methods are used to form thin films on a substrate of a display device. Among these methods, a deposition method is performed by depositing a material onto the substrate using a mask. The mask includes a patterned mask with multiple patterned apertures arranged therein, or an open mask that does not require multiple patterned apertures. An open mask includes an opening for depositing a common layer, rather than multiple patterned apertures.

[0005] For ease of manufacturing, large aperture masks are used to simultaneously manufacture display devices of various sizes. The aperture mask is welded to the mask frame while a predetermined tension is applied to it. Summary of the Invention

[0006] However, when a predetermined tension is applied to an open mask comprising multiple mask rods, the mask rods deform in the portions where the multiple mask rods are connected to each other.

[0007] One or more embodiments include a hybrid mask rod for preventing deformation in portions of the mask rods that are connected to each other, and a mask frame assembly employing the hybrid mask rod.

[0008] Other aspects will be set forth in part in the following detailed description, and in part will be apparent from the description, or may be learned by practice of the proposed embodiments.

[0009] According to one or more embodiments, a mask frame assembly includes a mask frame and mask rods. The mask frame includes an opening, and the mask rods are disposed on the mask frame and include: at least one first mask rod extending in a first direction; at least one second mask rod extending in a second direction intersecting the first direction; and a plurality of third mask rods connected to the ends of each of the at least one first mask rod and the at least one second mask rod, the at least one first mask rod, the at least one second mask rod, and the plurality of third mask rods defining a plurality of deposition regions, wherein the at least one first mask rod includes a first rod and a second rod disposed on the first rod, and at least one of the first rod and the second rod includes a partial recessed portion in which the at least one first mask rod is connected to the at least one second mask rod.

[0010] The first and second bars can extend together in the first direction and overlap each other.

[0011] The thickness of the first bar can be greater than the thickness of the second bar.

[0012] The recessed portion can be disposed in the first rod, and at least one second mask rod can be installed in the recessed portion.

[0013] The depth of the recessed portion can be the same as the thickness of at least one second mask rod, and the surface of the first rod can be on the same horizontal plane as the surface of at least one second mask rod mounted in the recessed portion.

[0014] At least one second mask rod can be welded to at least one first mask rod while a tensile force is applied.

[0015] The width of the second bar can be smaller than the width of the first bar.

[0016] The partial recess may include: a first partial recess disposed in a first rod and extending in a first direction; and a second partial recess disposed in both the first rod and the second rod and extending in a second direction, wherein the second rod is mounted in the first partial recess and at least one second mask rod is mounted in the second partial recess.

[0017] The depth of the first partial recess can be the same as the thickness of the second rod, the depth of the second partial recess can be the same as the thickness of at least one second mask rod, and the surfaces of the first rod, the second rod, and at least one second mask rod can be on the same horizontal plane.

[0018] At least one second mask rod can be welded to the second rod while tension is applied.

[0019] The partial recess may include a first partial recess disposed in a second rod and a second partial recess disposed in at least one second mask rod, wherein the second partial recess has a shape corresponding to the first partial recess, and the first partial recess may be combined with the second partial recess.

[0020] The total thickness of the portion where the first partial recessed portion connects to the second partial recessed portion can be the same as the thickness of another portion of the second rod.

[0021] At least one second mask rod can be welded to the first rod while tension is applied, and the second rod can be welded to at least one second mask rod while tension is applied.

[0022] At least one first mask rod may have its two ends each connected to a corresponding one of a plurality of third mask rods, at least one second mask rod may have its first end connected to at least one first mask rod, and at least one second end of the second mask rod may have its second end connected to a corresponding one of a plurality of third mask rods.

[0023] Each of the plurality of deposition regions may be arranged in a space defined by at least one first mask rod, at least one second mask rod, and a plurality of third mask rods connected to each other, and one of the plurality of deposition regions may correspond to a first opening of a common layer for deposition on patterned adjacent pixel regions on a unit display panel.

[0024] According to one or more embodiments, a hybrid mask rod includes: at least one first mask rod extending in a first direction; at least one second mask rod extending in a second direction intersecting the first direction; and a plurality of third mask rods connected to respective ends of the at least one first mask rod and the at least one second mask rod, wherein the at least one first mask rod, the at least one second mask rod, and the plurality of third mask rods are connected to each other to define a plurality of deposition areas corresponding to each of a plurality of unit display panels, the at least one first mask rod including a first rod and a second rod disposed on the first rod, and at least one of the first rod and the second rod including a partially recessed portion in which the at least one first mask rod is connected to the at least one second mask rod.

[0025] The first and second bars can extend together in the first direction and overlap each other, with the first bar being thicker than the second bar.

[0026] The recessed portion can be disposed in the first rod, and at least one second mask rod can be installed in the recessed portion.

[0027] The width of the second rod may be smaller than the width of the first rod, and the partial recess may include a first partial recess disposed in the first rod and extending in a first direction, and a second partial recess disposed in both the first rod and the second rod and extending in a second direction, wherein the second rod is mounted in the first partial recess and at least one second mask rod is mounted in the second partial recess.

[0028] The local recessed portion may include a first local recessed portion disposed in a second rod and a second local recessed portion disposed in at least one second mask rod, wherein the second local recessed portion has a shape corresponding to the first local recessed portion, and the first local recessed portion may be combined with the second local recessed portion. Attached Figure Description

[0029] These and / or other aspects will become clearer and more readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, in which:

[0030] Figure 1 This is an exploded perspective view of the mask frame assembly according to an embodiment;

[0031] Figure 2 yes Figure 1 A plan view of the mask rod;

[0032] Figure 3A It is shown Figure 2 An enlarged exploded perspective view of the cut portion A;

[0033] Figure 3B yes Figure 3A An assembled perspective view of the mask rod;

[0034] Figure 3C It is along Figure 3B A cross-sectional view taken from line III-III;

[0035] Figure 4A This is an enlarged exploded perspective view of a portion of a mask rod according to another embodiment;

[0036] Figure 4B It is shown that Figure 4A The first runner and Figure 4A A perspective view of the decomposed state of the second bar's binding;

[0037] Figure 4C It is shown that Figure 4A The second mask rod is set Figure 4A On the first mask rod and with Figure 4A A perspective view of the first mask rod in its combined state;

[0038] Figure 5AThis is an enlarged exploded perspective view showing a cut portion of a mask rod according to another embodiment;

[0039] Figure 5B It is shown Figure 5A A cross-sectional view of the assembled mask rod;

[0040] Figure 5C It is shown Figure 5A A plan view of the assembled mask rod;

[0041] Figure 6 A structural diagram of a deposition apparatus according to an embodiment; and

[0042] Figure 7 This is a cross-sectional view of a sub-pixel of an organic light-emitting display device according to an embodiment. Detailed Implementation

[0043] Referring now to embodiments, examples of which are shown in the accompanying drawings, wherein the same reference numerals always denote the same elements. In this respect, embodiments may take different forms and should not be construed as limited to the description set forth herein. Therefore, the embodiments are described below only by reference to the accompanying drawings to explain various aspects of this specification. As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items. When a statement such as “at least one of…” follows a list of elements, it modifies the entire list of elements, not individual elements within it.

[0044] Because this disclosure allows for various modifications and multiple embodiments, specific embodiments will be illustrated in the accompanying drawings and described in detail in the written description. The effects and features of this disclosure, as well as methods for achieving these effects and features, will become clear to those skilled in the art from the following detailed description of various embodiments disclosed in conjunction with the accompanying drawings. However, this disclosure may be presented in many different forms and should not be construed as limited to the embodiments set forth herein.

[0045] It will be understood that when a component such as a layer, film, region, or plate is referred to as being "on" another component, the component may be directly on the other component, or there may be an intermediate component. Furthermore, for ease of explanation, the dimensions of the components in the figures may be exaggerated. In other words, since the dimensions and thicknesses of the components in the figures are arbitrarily shown for ease of explanation, the following embodiments are not limited thereto.

[0046] In the following examples, the x-axis, y-axis, and z-axis are not limited to the three axes of a Cartesian coordinate system and can be interpreted in a broader sense. For example, the x-axis, y-axis, and z-axis can be perpendicular to each other, or they can represent different directions that are not perpendicular to each other.

[0047] In the following, embodiments of the hybrid mask rod and the mask frame assembly employing the hybrid mask rod will be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings denote the same elements, and therefore their descriptions will be omitted.

[0048] Figure 1 This is an exploded perspective view of the mask frame assembly 100 according to an embodiment. Figure 2 yes Figure 1 Plan view of mask rod 300. Figure 3A It is shown Figure 2 An enlarged exploded perspective view of section A.

[0049] Figure 3B yes Figure 3A An assembly perspective view of the mask rod 300. Figure 3C It is along Figure 3B The cross-sectional view taken from line III-III.

[0050] Reference Figure 1 , Figure 2 and Figures 3A to 3C The mask frame assembly 100 includes a mask frame 200 and a mask rod 300 mounted on the mask frame 200.

[0051] The opening 201 can be arranged in the mask frame 200. The opening 201 can be surrounded by a plurality of first frames 210 to fourth frames 240 included in the mask frame 200. The plurality of first frames 210 to fourth frames 240 can be connected to each other.

[0052] The plurality of first frames 210 to fourth frames 240 include a first frame 210 and a second frame 220 facing each other in a first direction (X direction), and a third frame 230 and a fourth frame 240 facing each other in a second direction (Y direction). The first frames 210, second frames 220, third frames 230, and fourth frames 240 can be connected to each other to form a rectangular frame. A mounting portion 250 for mounting a mask rod 300 can be arranged within the plurality of first frames 210 to fourth frames 240. The mounting portion 250 can provide a lower step in which the mask rod 300 can be placed.

[0053] The mask frame 200 can be formed of a material that does not deform when the mask rod 300 is welded (e.g., a metal with high rigidity). In an embodiment, the thickness of the mask frame 200 can be approximately 50 mm.

[0054] The mask rod 300 can be disposed on and combined with the mask frame 200. The mask rod 300 may be made of stainless steel, Invar alloy, nickel (Ni), cobalt (Co), nickel alloy, nickel-cobalt alloy, etc.

[0055] Mask rod 300 includes a plurality of mask rods. Mask rod 300 includes at least one first mask rod 310, at least one second mask rod 340, and a plurality of third mask rods 370 (371, 372, 373, and 374). Mask rod 300 may be a hybrid mask rod, through which deposition material can be simultaneously deposited on multiple unit display panels of different sizes.

[0056] At least one first mask rod 310 may extend in a first direction (X direction). The first direction (X direction) may be the longitudinal direction of at least one first mask rod 310.

[0057] At least one second mask rod 340 may extend in a second direction (Y direction). The second direction (Y direction) may be the longitudinal direction of the at least one second mask rod 340. The second direction (Y direction) may be a direction intersecting the first direction (X direction). At least one second mask rod 340 may be present. In an embodiment, the at least one second mask rod 340 comprises three rods.

[0058] The plurality of third mask rods 370 include a first rod portion 371, a second rod portion 372, a third rod portion 373, and a fourth rod portion 374. The first rod portion 371 and the second rod portion 372 face each other in a first direction (X direction) and extend in a second direction (Y direction). The third rod portion 373 and the fourth rod portion 374 face each other in the second direction (Y direction) and extend in the first direction (X direction). The first rod portion 371, the second rod portion 372, the third rod portion 373, and the fourth rod portion 374 can be connected to each other to form a rectangular frame. The plurality of third mask rods 370 can be mounted on mounting portions 250 arranged in the plurality of first frames 210 to fourth frames 240.

[0059] At least one first mask rod 310, at least one second mask rod 340, and a plurality of third mask rods 370 may be connected to each other to define a plurality of first to fifth deposition regions DA1, DA2, DA3, DA4, and DA5. Each of the plurality of first to fifth deposition regions DA1, DA2, DA3, DA4, and DA5 may be arranged in a space defined by the at least one first mask rod 310, at least one second mask rod 340, and a plurality of third mask rods 370 connected to each other.

[0060] The deposition region (e.g., the first deposition region DA1) among the multiple first to fifth deposition regions DA1, DA2, DA3, DA4 and DA5 can correspond to the opening 301 for forming a common layer (e.g., a common electrode of an organic light-emitting diode OLED or some layers in an intermediate layer) deposited on the patterned adjacent pixel regions on the unit display panel.

[0061] Multiple first deposition regions DA1 to fifth deposition regions DA5 can correspond to multiple unit display panels of different sizes. For example, first deposition region DA1, second deposition region DA2, and third deposition region DA3 can all correspond to large unit display panels. Fourth deposition region DA4 and fifth deposition region DA5 can both correspond to small unit display panels.

[0062] The first deposition region DA1, the second deposition region DA2, and the third deposition region DA3 may have the same size. The fourth deposition region DA4 and the fifth deposition region DA5 may have the same size. The deposited material may pass through each opening 301 in the multiple first deposition regions DA1 to fifth deposition regions DA5, thereby depositing on each unit display panel.

[0063] Thus, at least one first mask rod 310, at least one second mask rod 340 and a plurality of third mask rods 370 can be connected to each other to define a plurality of first deposition regions DA1 to fifth deposition regions DA5 having the same or different sizes.

[0064] When a predetermined tension is applied to at least one second mask rod 340 in the second direction (Y direction), the first end 341 and the second end 343 of the at least one second mask rod 340 can be welded to at least one of at least one first mask rod 310 and at least one of a plurality of third mask rods 370, respectively.

[0065] In an embodiment, at least one first mask rod 310 may be longer than at least one second mask rod 340. A plurality of second mask rods 340 may be spaced apart from each other in a first direction (X direction) and welded to at least one first mask rod 310. When the plurality of second mask rods 340 are welded to at least one first mask rod 310, at least one first mask rod 310 may bend due to tensile forces transmitted from the plurality of second mask rods 340. When at least one first mask rod 310 deforms, the dimensions of the plurality of first deposition regions DA1 to fifth deposition regions DA5 may become inaccurate.

[0066] To prevent deformation of at least one first mask rod 310 and the plurality of second mask rods 340 in the region where at least one first mask rod 310 is connected to the plurality of second mask rods 340, at least one first mask rod 310 includes a plurality of first rods 320 and second rods 330. At least one first mask rod 310 includes a first rod 320 and second rods 330 disposed on the first rod 320.

[0067] The first rod 320 and the second rod 330 may extend together in a first direction (X direction). The first rod 320 may overlap with the second rod 330 in a third direction (Z direction) intersecting the first direction (X direction) and the second direction (Y direction). The third direction (Z direction) may be the direction of the thickness (i.e., the vertical direction) of at least one first mask rod 310. The second rod 330 may overlap with the first rod 320. The width w2 of the second rod 330 may be the same as or greater than the width w1 of the first rod 320.

[0068] The thickness t1 of the first rod 320 may differ from the thickness t2 of the second rod 330 and the thickness t3 of at least one second mask rod 340. Specifically, the thickness t1 of the first rod 320 may be greater than the thickness t2 of the second rod 330 and the thickness t3 of at least one second mask rod 340. The thickness t2 of the second rod 330 may be the same as the thickness t3 of at least one second mask rod 340.

[0069] The thickness t1 of the first rod 320 can be hundreds of times or more greater than the thickness t2 of the second rod 330. For example, the first rod 320 may have a thick strip shape, and the second rod 330 may have a thin sheet shape. In an embodiment, the thickness t1 of the first rod 320 may be from about 5 mm to about 10 mm. The thickness t2 of the second rod 330 and the thickness t3 of at least one second mask rod 340 may be from about 20 micrometers to about 50 micrometers.

[0070] At least one second mask rod 340 can be welded to the first rod 320. When at least one second mask rod 340 is welded to the first rod 320 while a tensile force is applied, deformation of the first rod 320 can be prevented because the thickness t1 of the first rod 320 is relatively greater than the thickness t3 of the at least one second mask rod 340.

[0071] The two ends 321 of the first rod 320 can be inserted into the insertion slots 260 in the first frame 210 and the second frame 220. The first rod 320 can be fixed to the first frame 210 and the second frame 220 by means of bolt fastening, welding or other methods.

[0072] At least one second mask rod 340 can be welded to the first rod 320. A second rod 330 can be welded to at least one second mask rod 340. If a height difference exists between at least one first mask rod 310 and at least one second mask rod 340, then during the deposition process, this difference will occur in multiple unit display devices. Figure 2Shadows appear in multiple first deposition regions DA1 to fifth deposition regions DA5. To prevent the appearance of shadows, a local recessed portion 360 may be provided in the portion where at least one first mask rod 310 is connected to at least one second mask rod 340. The local recessed portion 360 may be provided in the first rod 320 or the second rod 330.

[0073] Specifically, a partial recess 360 may be provided in the first rod 320. The partial recess 360 may correspond to a portion of the first rod 320 having a thickness t1 smaller than that of another portion of the first rod 320. The partial recess 360 may be a region in which the first rod 320 is recessed from its surface 322 in a third direction (Z direction). The third direction (Z direction) may be a direction perpendicular to the surface 322 of the first rod 320.

[0074] At least one second mask rod 340 may have its first end 341 fitted into the recessed portion 360. The depth d of the recessed portion 360 may be the same as the thickness t3 of the at least one second mask rod 340. Because the first end 341 of the at least one second mask rod 340 is fitted into the recessed portion 360, there is no height difference between the first rod 320 and the at least one second mask rod 340. That is, the surface 322 of the first rod 320 may be on the same horizontal plane as the surface 342 of the at least one second mask rod 340.

[0075] The first rod 320 can be connected to at least one second mask rod 340 by performing laser welding. Specifically, while a predetermined tensile force is applied to at least one second mask rod 340 in the second direction (Y direction), the first end 341 of at least one second mask rod 340 can be mounted into the locally recessed portion 360. Then, the welding process is performed from the upper part of at least one second mask rod 340 by emitting a laser beam.

[0076] exist Figure 3A The length l of the recessed portion 360 shown may be smaller than the width w1 of the first rod 320 in the second direction (Y direction). Therefore, the first end 341 of at least one second mask rod 340 mounted in the recessed portion 360 will not extend to the outer edge 323 of the first rod 320. For example, the first end 341 of at least one second mask rod 340 may be located at the center portion of the first rod 320. The second end 343 of at least one second mask rod 340 may be inserted into the insertion slot 270 in the third frame 230 and the fourth frame 240.

[0077] Because the third mask rod 370 is welded to a plurality of first frames 210 to fourth frames 240 with high rigidity, the portions of at least one first mask rod 310 and / or at least one second mask rod 340 connected to the plurality of first frames 210 to fourth frames 240 may not deform.

[0078] The shape or structure of the plurality of third mask rods 370 may vary depending on the end shape or structure of at least one first mask rod 310 and at least one second mask rod 340. For example, the surface or structure of the plurality of third mask rods 370 is not limited as long as the surface of the plurality of third mask rods 370 in contact with the substrate is on the same horizontal plane as the uppermost surface of at least one first mask rod 310.

[0079] In the following description, based on an embodiment, the characteristics of the portion in which the first mask rod is connected to the second mask rod are described. As described above, because the design of the third mask rod can be varied depending on the structure in which the first mask rod and the second mask rod are combined, the third mask rod is not described here, wherein the third mask rod is connected to the first mask rod and the second mask rod to define multiple deposition regions.

[0080] Figure 4A This is an enlarged exploded perspective view showing a portion of a mask rod 400 according to another embodiment. Figure 4B It is shown that Figure 4A The first run 420 and Figure 4A The decomposed perspective view of the state of the second bar 430 combined. Figure 4C It is shown that Figure 4A The second mask rod 440 is set in Figure 4A On the first mask rod 410 and with Figure 4A A perspective view of the first mask rod 410 in its combined state.

[0081] Reference Figure 4A , Figure 4B and Figure 4C The mask rod 400 includes a first mask rod 410 and a second mask rod 440. Each of the first mask rod 410 and the second mask rod 440 can be connected to... Figure 2 Multiple third mask rods 370 define multiple first deposition regions DA1 to fifth deposition regions DA5.

[0082] The first mask rod 410 includes a first rod 420 and a second rod 430. The first mask rod 410 includes a first rod 420 and a second rod 430 disposed on the first rod 420. The first rod 420 and the second rod 430 may extend together in a first direction (X direction). The first rod 420 may completely overlap with the second rod 430. The width w2 of the second rod 430 may be smaller than the width w1 of the first rod 420. The thickness t1 of the first rod 420 may be different from the thickness t2 of the second rod 430. Specifically, the thickness t1 of the first rod 420 may be larger than the thickness t2 of the second rod 430.

[0083] When a tensile force is applied to the first bar 420 in the first direction (X direction), the first bar 420 can be welded to... Figure 1 The mask frame 200. While a tensile force is applied to the second rod 430 in the first direction (X direction), the second rod 430 can be welded to the first rod 420. In an embodiment, the second rod 430 can be welded to the mask frame 200 while a tensile force is applied.

[0084] The second mask rod 440 can be welded to the second rod 430 while a tensile force is applied. When the second mask rod 440 is welded to the second rod 430 while a tensile force is applied, a height difference will appear between the first rod 420, the second rod 430, and the second mask rod 440. To eliminate this height difference, a first partial recess 460 and a second partial recess 470 can be arranged in the portions where the first rod 420, the second rod 430, and the second mask rod 440 are connected to each other.

[0085] Specifically, the second rod 430 can be disposed in the first partial recess 460. The first partial recess 460 can correspond to a portion of the first rod 420 having a thickness t1 smaller than that of another portion of the first rod 420. The second rod 430 can be installed into the first partial recess 460.

[0086] The first partial recess 460 may be a region in which the first rod 420 is recessed from the surface 422 of the first rod 420 in the third direction (Z direction). The first partial recess 460 may extend in the longitudinal direction (X direction) of the first mask rod 410.

[0087] The depth d1 of the first partial recess 460 can be the same as the thickness t2 of the second rod 430. Since the second rod 430 is installed in the first partial recess 460, there is no height difference between the surface 422 of the first rod 420 and the surface 432 of the second rod 430. The surface 422 of the first rod 420 can be on the same horizontal plane as the surface 432 of the second rod 430. When a predetermined tensile force is applied to the second rod 430 in the first direction (X direction), the second rod 430 can be welded to the first rod 420.

[0088] The second mask rod 440 can be installed into the second partial recessed portion 470 of the first rod 420 and the second rod 430. Specifically, after the second rod 430 is installed into the first partial recessed portion 460, the second partial recessed portion 470 can be formed in the portion of the first rod 420 and the second rod 430 in which the second mask rod 440 is installed. The second partial recessed portion 470 can be formed in both the first rod 420 and the second rod 430, each corresponding to the portion of the end 441 in which the second mask rod 440 is installed.

[0089] The second partial recess 470 may be a region in which the first rod 420 and the second rod 430 are recessed in a third direction (Z direction). The second partial recess 470 may extend in a second direction (Y direction), which is the width direction of the first mask rod 410. The second partial recess 470 may correspond to a portion of the first rod 420 and the second rod 430 having a thickness smaller than the thickness of other portions of the first rod 420 and the second rod 430. The first rod 420 and the second rod 430 may be recessed to the same depth. The end 441 of the second mask rod 440 may be fitted into the second partial recess 470.

[0090] The depth d2 of the second partial recess 470 can be the same as the thickness t3 of the second mask rod 440. Since the end 441 of the second mask rod 440 is installed in the second partial recess 470, there is no height difference between the first rod 420, the second rod 430, and the second mask rod 440. That is, the surface 422 of the first rod 420, the surface 432 of the second rod 430, and the surface 442 of the second mask rod 440 can be on the same horizontal plane.

[0091] While a predetermined tensile force is applied to the second mask rod 440 in the second direction (Y direction), the end 441 of the second mask rod 440 can be mounted into the second partial recess 470. Then, a welding process is performed from the upper part of the second mask rod 440 by emitting a laser beam. The second mask rod 440 can be welded to the second rod 430 while the tensile force is applied.

[0092] Figure 5A This is an enlarged exploded perspective view showing a cut portion of a mask rod 500 according to another embodiment. Figure 5B It is shown Figure 5A A cross-sectional view of the assembled mask rod 500. Figure 5C It is shown Figure 5A A plan view of the assembled mask rod.

[0093] Reference Figure 5A , Figure 5B and Figure 5CThe mask rod 500 includes a first mask rod 510 and a second mask rod 540. The first mask rod 510 includes a first rod 520 and a second rod 530 disposed on the first rod 520. The first rod 520 and the second rod 530 may extend in a first direction (X direction). The first rod 520 may be a rod connected to the second mask rod 540. The second rod 530 may define a plurality of first to fifth deposition regions. Figure 2 DA1 to DA5) rods.

[0094] The first rod 520 can be stacked on top of the second rod 530 in the third direction (Z direction). The thickness t1 of the first rod 520 can be different from the thickness t2 of the second rod 530. For example, the thickness t1 of the first rod 520 can be greater than the thickness t2 of the second rod 530. The thickness t2 of the second rod 530 can be the same as the thickness t3 of the second mask rod 540.

[0095] The second mask rod 540 can be welded to the first rod 520, which has a large thickness. Since the thickness t1 of the first rod 520 is greater than the thickness t2 of the second rod 530, the deformation of the first rod 520 can be minimized when the second mask rod 540 is welded to the first rod 520 while a tensile force is applied.

[0096] The second mask rod 540 can be welded to the first rod 520 while a tensile force is applied, and the second rod 530 can be welded to the second mask rod 540 while a tensile force is applied. When a height difference occurs between the second rod 530 and the second mask rod 540, a shadow will appear in the multiple first deposition areas DA1 to the fifth deposition areas DA5 of the multiple unit display panels.

[0097] To prevent shadows from appearing, a partial recess 560 may be provided in the portion where the second rod 530 is connected to the second mask rod 540. Specifically, the partial recess 560 includes a first partial recess 561 on the second rod 530 and a second partial recess 562 on the second mask rod 540.

[0098] A first partial recess 561 may be disposed in the portion of the second rod 530 in which the first end 541 of the second mask rod 540 is mounted. The first partial recess 561 may correspond to a portion of the second rod 530 having a thickness t4 smaller than the thickness t2 of another portion of the second rod 530. For example, the first partial recess 561 may correspond to a portion of the second rod 530 having a thickness t4 smaller than the thickness t2 of another portion of the second rod 530 in a third direction (Z direction) perpendicular to the lower surface 531 of the second rod 530 facing the first rod 520.

[0099] The second partial recess 562 may be disposed at the first end 541 of the second mask rod 540. The second partial recess 562 may correspond to a portion of the second mask rod 540 having a thickness t5 that is smaller than the thickness t3 of another portion of the second mask rod 540. For example, the second partial recess 562 may correspond to a portion of the second mask rod 540 having a thickness t5 that is smaller than the thickness t3 of another portion of the second mask rod 540 in a third direction (Z direction) perpendicular to the upper surface 542 of the second mask rod 540.

[0100] The first partial recess 561 may have a shape corresponding to the shape of the second partial recess 562. The first partial recess 561 may be joined to the second partial recess 562 in the third direction (Z direction). The sum of the thicknesses t4 and t5 of the portion where the first partial recess 561 is joined to the second partial recess 562 may be equal to the thickness t2 of the portion of the second rod 530 excluding the first partial recess 561 and / or the thickness t3 of the portion of the second mask rod 540 excluding the second partial recess 562. Since the second rod 530 is connected to the second mask rod 540 in the portion where the partial recess 560 is arranged, there is no height difference between the second rod 530 and the second mask rod 540.

[0101] A substrate (not shown) may contact the upper surface 532 of the second rod 530 and the upper surface 542 of the second mask rod 540. The width w2 of the second rod 530, which defines a plurality of first deposition regions DA1 to fifth deposition regions DA5, may be larger than the width w1 of the first rod 520 connected to the second mask rod 540.

[0102] Thus, the thickness t1 of the first rod 520 can be greater than the thickness t2 of the second rod 530, and the width w1 of the first rod 520 can be smaller than the width w2 of the second rod 530. Therefore, even when the first rod 520 is twisted to the left or right, sufficient margin can be ensured because the width w1 of the first rod 520 is smaller than the width w2 of the second rod 530 that defines the deposition area. Therefore, shading can be prevented.

[0103] Figure 6 This is a structural diagram of the deposition apparatus 600 according to an embodiment.

[0104] Reference Figure 6 Vacuum chamber 660 is arranged therein and is configured as a deposition apparatus 600 for depositing the cathode of an organic light-emitting display device or a common layer of some layers in an intermediate layer.

[0105] A deposition source 670 may be disposed in the lower part of a vacuum chamber 660. A mask frame assembly 610 may be mounted above the deposition source 670. Mask rods 630 may be mounted on a mask frame 620. A plurality of openings 631 may be disposed between the mask rods 630, wherein the plurality of openings 631 correspond to a plurality of deposition regions for simultaneously fabricating a plurality of unit display devices. A substrate 640 for deposition may be disposed on the mask rods 630 on the opposite side of the deposition source 670 relative to the mask frame assembly 610. A magnet 650 for generating magnetic force may be mounted on the substrate 640 for deposition, such that the mask rods 630 adhere to the substrate 640 for deposition.

[0106] When deposition material is sprayed from deposition source 670 to mask rod 630, the deposition material advances through opening 621 in mask frame 620 and through multiple openings 631 in mask rod 630, thereby depositing on the surface of substrate 640 for deposition.

[0107] Figure 7 This is a cross-sectional view of a sub-pixel of an organic light-emitting display device 700 according to an embodiment.

[0108] Here, the sub-pixel includes at least one thin-film transistor (TFT) and an organic light-emitting diode (OLED). The at least one thin-film transistor (TFT) is not limited to... Figure 7 The structure can be modified in different ways, and its quantity and structure can be modified in different ways.

[0109] Reference Figure 7 The substrate 711 is disposed in the organic light-emitting display device 700. The substrate 711 includes a glass substrate, a plastic substrate, or a flexible film substrate. The substrate 711 can be transparent, translucent, or opaque.

[0110] A barrier layer 712 may be disposed on a substrate 711. The barrier layer 712 may cover the upper surface of the substrate 711. The barrier layer 712 may be formed of an inorganic layer or an organic layer. The barrier layer 712 may be a single layer or multiple layers.

[0111] At least one thin-film transistor (TFT) may be disposed on the barrier layer 712. According to this embodiment, a top-gate TFT is included as an example. However, at least one thin-film transistor TFT with another structure, such as a bottom-gate TFT, may be included.

[0112] Semiconductor layer 713 can be disposed on barrier layer 712. Source region 714 and drain region 715 can be formed in semiconductor layer 713 by doping with N-type or P-type impurity ions. The region between source region 714 and drain region 715 can be an undoped channel region 716 therein.

[0113] Semiconductor layer 713 may be an organic semiconductor layer, an inorganic semiconductor layer, or a layer including amorphous silicon. In another embodiment, semiconductor layer 713 may be an oxide semiconductor layer.

[0114] The gate insulating layer 717 can be deposited on the semiconductor layer 713. The gate insulating layer 717 can be formed of an inorganic layer. The gate insulating layer 717 can be a single layer or multiple layers.

[0115] The gate electrode 718 may be disposed on the gate insulating layer 717. The gate electrode 718 may comprise a single layer or multiple layers, which may include gold (Au), silver (Ag), copper (Cu), nickel (Ni), platinum (Pt), palladium (Pd), aluminum (Al), molybdenum (Mo), chromium (Cr), or alloys such as aluminum-neodymium (Al:Nd) alloys or molybdenum-tungsten (Mo:W) alloys.

[0116] An interlayer insulating layer 719 may be disposed on the gate electrode 718. The interlayer insulating layer 719 may be formed of an inorganic layer including silicon oxide, silicon nitride, etc.

[0117] The source electrode 720 and the drain electrode 721 can be disposed on the interlayer insulating layer 719. A contact hole can be formed by removing a portion of the gate insulating layer 717 and a portion of the interlayer insulating layer 719. Then, the source electrode 720 can be electrically connected to the source region 714 and the drain electrode 721 can be electrically connected to the drain region 715 via the contact hole.

[0118] The passivation layer 722 can be disposed on the source electrode 720 and the drain electrode 721. The passivation layer 722 can be formed of an inorganic layer or an organic layer.

[0119] The planarization layer 723 can be disposed on the passivation layer 722. The planarization layer 723 includes an organic layer containing acryloyl groups, polyimide, benzocyclobutene (BCB), etc.

[0120] Organic light-emitting diodes (OLEDs) can be arranged on at least one thin-film transistor (TFT).

[0121] The organic light-emitting diode (OLED) includes a first electrode 725, a second electrode 727, and an intermediate layer 726 disposed between the first electrode 725 and the second electrode 727.

[0122] The first electrode 725 is connected to the source electrode 720 or the drain electrode 721 via a contact hole. The first electrode 725 may correspond to a pixel electrode.

[0123] The first electrode 725 serves as the anode and can be formed from various types of conductive materials. The first electrode 725 can be formed from a transparent electrode or a reflective electrode.

[0124] On the planarization layer 723, a pixel defining layer (PDL) 724 covering the edge of the first electrode 725 of the organic light-emitting OLED can be disposed. The pixel defining layer 724 defines the light-emitting region of each sub-pixel by surrounding the edge of the first electrode 725. The pixel defining layer 724 can be formed of an organic layer. The pixel defining layer 724 can have openings exposing the first electrode 725.

[0125] On the first electrode 725, an intermediate layer 726 may be disposed in the area exposed by the pixel defining layer 724. The intermediate layer 726 may be formed by performing a deposition process.

[0126] The intermediate layer 726 may include low molecular weight organic materials or polymeric organic materials.

[0127] Intermediate layer 726 may include an organic emitter layer (EML). In another example, intermediate layer 726 includes an organic emitter layer (EML) and may also include at least one of a hole injection layer (HIL), a hole transport layer (HTL), an electron transport layer (ETL), and an electron injection layer (EIL). However, this embodiment is not limited thereto, and intermediate layer 726 may include an organic emitter layer and may also include various other functional layers.

[0128] In an embodiment, an organic emitter layer (EML) can be disposed in each sub-pixel. HIL, HTL, ETL, and EIL serve as a common layer and can extend over adjacent pixels. According to an embodiment, HIL, HTL, ETL, and EIL can be deposited using a hybrid mask bar.

[0129] The second electrode 727 can be disposed on the intermediate layer 726. The second electrode 727 can correspond to the common electrode. Similar to the first electrode 725, the second electrode 727 can be formed of a transparent electrode or a reflective electrode. According to an embodiment, the second electrode 727 can be deposited using a hybrid mask rod.

[0130] The first electrode 725 can be insulated from the second electrode 727 by using an intermediate layer 726. When a voltage is applied to the first electrode 725 and the second electrode 727, visible light can be emitted from the intermediate layer 726, thereby displaying an image that can be recognized by the user.

[0131] The encapsulation layer 740 can be placed on the organic light-emitting OLED.

[0132] In the encapsulation layer 740, multiple organic layers 741 and 742 and multiple inorganic layers 743 to 745 may be stacked alternately. In an embodiment, the encapsulation layer 740 may have a structure in which multiple organic layers 741 and 742 constitute at least one layer and multiple inorganic layers 743 to 745 constitute at least two layers. In the encapsulation layer 740, the uppermost layer 745 exposed to the outside may be formed of an inorganic layer to prevent moisture from penetrating into the organic light-emitting diode (OLED).

[0133] According to an embodiment, in the hybrid mask rod and the mask frame assembly using the hybrid mask rod, deformation of the portions where the multiple mask rods are connected to each other can be prevented. Therefore, deposition areas separated by the multiple mask rods can be precisely defined.

[0134] The effects of this disclosure can be derived from the description provided herein with reference to the accompanying drawings and the description provided above.

[0135] It should be understood that the embodiments described herein should be considered descriptive in nature only and not for limiting purposes. The description of features or aspects in each embodiment should generally be taken into account for other similar features or aspects in other embodiments.

[0136] Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope defined by the claims.

Claims

1. A mask frame assembly, the mask frame assembly comprising: Mask frame, including openings; as well as A mask rod, disposed on the mask frame, and comprising: at least one first mask rod extending in a first direction; at least one second mask rod extending in a second direction intersecting the first direction; and a plurality of third mask rods connected to the ends of each of the at least one first mask rod and the at least one second mask rod, the at least one first mask rod, the at least one second mask rod, and the plurality of third mask rods defining a plurality of deposition regions. The at least one first mask rod includes a first rod and a second rod arranged on the first rod. The second rod includes a first partial recessed portion at which a first end of the second mask rod is mounted, and the at least one second mask rod includes a second partial recessed portion disposed at the first end of the second mask rod. The first partial recess has a shape corresponding to the second partial recess, and the first partial recess is joined to the second partial recess in the thickness direction of the first rod. The thickness of the first rod is greater than the thickness of the at least one second mask rod.

2. The mask frame assembly as claimed in claim 1, wherein, The first rod and the second rod extend together in the first direction and overlap each other.

3. The mask frame assembly as claimed in claim 1, wherein, The thickness of the first rod is greater than the thickness of the second rod.

4. The mask frame assembly as claimed in claim 1, wherein, The total thickness of the portion where the first partial recessed portion connects to the second partial recessed portion is the same as the thickness of another portion of the second rod.

5. The mask frame assembly as claimed in claim 1, wherein, The at least one second mask rod is welded to the first rod while a tensile force is applied, and The second rod is welded to the at least one second mask rod while a tensile force is applied.

6. The mask frame assembly as claimed in claim 1, wherein, The two ends of each of the at least one first mask rod are each connected to a corresponding third mask rod among the plurality of third mask rods. The first end of the at least one second mask rod is connected to the at least one first mask rod, and The second end of at least one second mask rod is connected to a corresponding third mask rod among the plurality of third mask rods.

7. A hybrid mask rod, the hybrid mask rod comprising: At least one first mask rod extends in a first direction; At least one second mask rod extends in a second direction intersecting the first direction; as well as A plurality of third mask rods are connected to the respective ends of the at least one first mask rod and the at least one second mask rod. The at least one first mask rod, the at least one second mask rod, and the plurality of third mask rods are connected to each other to define a plurality of deposition areas corresponding to each of the plurality of unit display panels. The at least one first mask rod includes a first rod and a second rod arranged on the first rod. The second rod includes a first partial recessed portion at which a first end of the second mask rod is mounted, and the at least one second mask rod includes a second partial recessed portion disposed at the first end of the second mask rod. The first partial recess has a shape corresponding to the second partial recess, and the first partial recess is joined to the second partial recess in the thickness direction of the first rod. The thickness of the first rod is greater than the thickness of the at least one second mask rod.

8. The hybrid mask rod as described in claim 7, wherein, The first rod and the second rod extend together in the first direction and overlap each other, and the thickness of the first rod is greater than the thickness of the second rod.

Images